KR102398963B1 - Apparatus for transfering a carrier - Google Patents

Apparatus for transfering a carrier Download PDF

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Publication number
KR102398963B1
KR102398963B1 KR1020190081916A KR20190081916A KR102398963B1 KR 102398963 B1 KR102398963 B1 KR 102398963B1 KR 1020190081916 A KR1020190081916 A KR 1020190081916A KR 20190081916 A KR20190081916 A KR 20190081916A KR 102398963 B1 KR102398963 B1 KR 102398963B1
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South Korea
Prior art keywords
power
unit
storage unit
power storage
belt
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KR1020190081916A
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Korean (ko)
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KR20210006084A (en
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임철영
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세메스 주식회사
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C11/00—Trolleys or crabs, e.g. operating above runways
    • B66C11/12—Trolleys or crabs, e.g. operating above runways having hoisting gear adapted to special load-engaging elements and not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C13/00—Other constructional features or details
    • B66C13/12—Arrangements of means for transmitting pneumatic, hydraulic, or electric power to movable parts of devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B66—HOISTING; LIFTING; HAULING
    • B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
    • B66C17/00—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports
    • B66C17/06—Overhead travelling cranes comprising one or more substantially horizontal girders the ends of which are directly supported by wheels or rollers running on tracks carried by spaced supports specially adapted for particular purposes, e.g. in foundries, forges; combined with auxiliary apparatus serving particular purposes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67276—Production flow monitoring, e.g. for increasing throughput
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67751—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a single workpiece
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber vertical transfer of a batch of workpieces

Abstract

본 발명은 반도체라인의 천정에 구비된 이송레일을 따라 반송물을 이송하는 캐리어 이송장치에 관한 것으로서, 본 발명의 캐리어 이송장치는, 벨트를 승강 구동하는 본체부; 상기 벨트에 의해 승강 구동되며, 반송물을 파지하는 파지부를 포함하고, 상기 파지부는 상기 본체부로부터 무선전력을 전송받아 저장하는 전력저장부를 포함한다.The present invention relates to a carrier transport device for transporting a transported material along a transport rail provided on a ceiling of a semiconductor line. The lift is driven by the belt and includes a gripper for gripping the conveyed material, and the gripper includes a power storage for receiving and storing wireless power from the main body.

Description

캐리어 이송장치{APPARATUS FOR TRANSFERING A CARRIER}Carrier transfer device {APPARATUS FOR TRANSFERING A CARRIER}

본 발명은 캐리어 이송장치에 관한 것으로서, 보다 상세하게는 반송물을 이적재하는 파지부의 전원공급구조를 개선한 캐리어 이송장치에 관한 것이다.The present invention relates to a carrier transporting device, and more particularly, to a carrier transporting device in which the power supply structure of a gripper for transferring and loading a transported object is improved.

일반적으로, 메모리, LCD 등을 생산하는 반도체공정에서 패널 및 자재를 효율적으로 반송시키는 캐리어 이송장치로서 오버헤드 호이스트 이송장치(OHT: Overhead Hoist Transfer)가 사용되고 있다. In general, an overhead hoist transfer device (OHT) is used as a carrier transport device for efficiently transporting panels and materials in a semiconductor process for producing memories, LCDs, and the like.

도 1은 종래의 캐리어 이송장치를 도시한 도면이다. 도 1에 도시된 바와 같이, 종래의 OHT장치는 본체부(1)에 설치된 모터(미도시)를 통해 구동풀리(2)에 전달된 구동력이 벨트(3)에 다시 전달됨으로써 파지부(4)를 승하강시킬 수 있는 구조를 포함한다. 벨트(3)의 일단은 파지부(4)의 벨트지지부(5)에 의해 고정되어 있으며, 벨트(3)의 타단은 구동풀리(2)에 고정된다. 모터의 구동에 의해 구동축(6)이 회전하게 되며, 구동축(6)에 고정된 구동풀리(2)가 회전하면서 벨트(3)를 권취한다. 권취되는 벨트(3)에 의해 파지부(4)가 승하강된다.1 is a view showing a conventional carrier transport device. As shown in FIG. 1, in the conventional OHT device, the driving force transmitted to the driving pulley 2 through a motor (not shown) installed in the main body 1 is transmitted back to the belt 3, so that the gripper 4 is Includes a structure that can elevate. One end of the belt 3 is fixed by the belt support part 5 of the gripping part 4 , and the other end of the belt 3 is fixed to the driving pulley 2 . The drive shaft 6 is rotated by the driving of the motor, and the belt 3 is wound while the drive pulley 2 fixed to the drive shaft 6 rotates. The grip part 4 is raised and lowered by the belt 3 being wound up.

파지부(4)는 반송물을 클램핑하거나 언클램핑하여 파지하는 클램핑부를 포함하며, 각종 센서 등을 포함하고 있다. 따라서 파지부(4)에는 충분한 전력이 공급되어야 한다.The gripping part 4 includes a clamping part for clamping or unclamping the conveyed object and gripping it, and includes various sensors and the like. Therefore, sufficient power must be supplied to the gripper 4 .

종래의 경우, 본체부(1)는 구동축(6)에 결합되어 있는 슬립링(8) 및 벨트(3)의 심선을 통해 파지부(4)에 전력을 공급한다. In the conventional case, the main body 1 supplies power to the gripping unit 4 through the core wire of the belt 3 and the slip ring 8 coupled to the drive shaft 6 .

그러나 상기와 같은 구조의 OHT장치는 전원공급을 주도하는 벨트(3)의 심선이 대부분 스틸와이어로 이루어져, 무거운 하중 지지에는 유효하지만 저항값이 상대적으로 큰 이유로 파지부(4)에 필요한 전원을 충분히 공급하는 데에는 한계가 있다.However, in the OHT device having the above structure, the core wire of the belt 3 leading the power supply is mostly made of steel wire, so it is effective for supporting a heavy load, but because the resistance value is relatively large, the power required for the grip part 4 is sufficiently supplied. Supply is limited.

이와 같은 문제점을 해결하기 위하여 벨트(3)의 심선으로 스틸와이어와 동(또는 동합금)와이어를 혼재시키는 방법을 사용할 수 있으나, 스틸과 동(또는 동합금)의 변형율 차이로 인해 벨트(3)에 변형이 발생되는 문제점이 있다.In order to solve this problem, a method of mixing a steel wire and a copper (or copper alloy) wire as the core wire of the belt 3 can be used, but the belt 3 is deformed due to the difference in strain rate between steel and copper (or copper alloy) There is a problem that this occurs.

이를 해결하기 위한 방안으로서 대한민국 공개특허 제10-2006-0064298호에 기재된 OHT장치는, 저항값이 적은 동 또는 동합금으로 이루어진 벨트를 사용하되, 벨트와 연결되는 벨트를 지지하는 벨트지지부분에 스프링과 같은 완충부재를 장착함으로써 벨트에 완충력을 부여한다. 따라서 파지부에 대한 외부충격이나 파지부의 흔들림에 의한 벨트의 변형을 방지할 수 있다. As a solution to this problem, the OHT device described in Korean Patent Application Laid-Open No. 10-2006-0064298 uses a belt made of copper or copper alloy having a low resistance value, but a spring and a belt support part supporting the belt connected to the belt By attaching the same cushioning member, the belt is given a buffering force. Therefore, it is possible to prevent deformation of the belt due to an external shock to the gripping part or shaking of the gripping part.

하지만 완충부재는 동 또는 동합금으로 이루어진 벨트의 변형을 방지하는 근본적인 해결책이 되지 못한다. 또한 벨트에 완충력을 부여하는 스프링과 같은 완충부재에도 변형이 발생할 수 있기 때문에 완충부재 교체작업 및 캐리어 이송장치의 티칭 작업을 다시 수행해야 한다는 문제점이 존재한다.However, the buffer member does not provide a fundamental solution to prevent deformation of the belt made of copper or copper alloy. In addition, there is a problem in that the buffer member replacement operation and the teaching operation of the carrier transfer device must be performed again because deformation may occur in the buffer member such as a spring that gives a buffer force to the belt.

본 발명은 상기와 같은 문제점을 해결하기 위한 것으로서, 벨트를 이용하지 않고서도 전원을 공급할 수 있는 캐리어 이송장치를 제공하는 것을 목적으로 한다.An object of the present invention is to solve the above problems, and an object of the present invention is to provide a carrier transport device capable of supplying power without using a belt.

본 발명에 따른 반도체라인의 천정에 구비된 이송 레일을 따라 반송물을 이송하는 캐리어 이송장치는, 연결벨트를 승강 구동하는 본체부; 상기 연결벨트에 의해 승강 구동되며, 반송물을 파지하는 파지부를 포함하고, 상기 파지부는 상기 본체부로부터 무선전력을 전송받아 저장하는 전력저장부를 포함한다.According to the present invention, there is provided a carrier transport device for transporting a transported material along a transport rail provided on a ceiling of a semiconductor line, comprising: a main body for elevating and driving a connecting belt; It is driven up and down by the connecting belt, and includes a gripper for gripping the conveyed material, and the gripper includes a power storage for receiving and storing wireless power from the main body.

또한 실시예에 있어서, 상기 본체부는 상기 파지부가 상승된 상태일 때 상기 파지부에 무선전원을 송신하는 무선전원송신부를 포함하고, 상기 파지부는 상기 무선전원송신부로부터 무선전원을 수신하고, 상기 전기전력저장부를 충전하는 무선전원수신부를 포함한다.In addition, in an embodiment, the main body includes a wireless power transmitter for transmitting wireless power to the gripper when the gripper is in a raised state, and the gripper receives wireless power from the wireless power transmitter and the electric power It includes a wireless power receiving unit for charging the storage unit.

또한 실시예에 있어서, 상기 전력저장부는 제1 전력저장부 및 제2 전력저장부를 포함하고, 상기 제1 전력저장부는 주 전원공급원으로 사용되고, 상기 제2 전력저장부는 예비 전원공급원으로 사용된다.Also in an embodiment, the power storage unit includes a first power storage unit and a second power storage unit, the first power storage unit is used as a main power supply source, and the second power storage unit is used as a spare power supply source.

또한 실시예에 있어서, 상기 파지부는 배터리를 제어하는 배터리제어부를 포함하고, 상기 배터리제어부는, 제1 전력저장부의 상태를 판단하고, 판단결과 제1 전력저장부의 수명이 일정한도를 초과한 경우, 제2 전력저장부를 주 전원으로 교체 사용하고, 사용자에게 통지한다.In addition, in an embodiment, the holding unit includes a battery control unit for controlling the battery, and the battery control unit determines the state of the first power storage unit, and as a result of the determination, when the lifespan of the first power storage unit exceeds a certain limit, The second power storage unit is replaced with the main power source and the user is notified.

또한 실시예에 있어서, 상기 제1 전력저장부 및 상기 제2 전력저장부는 탈착 가능하도록 구성된다.Also in an embodiment, the first power storage unit and the second power storage unit are configured to be detachable.

본 발명에 따르면, 무선으로 전력을 전송받는 파지부를 구비함으로써, 유선 전력전송을 위한 슬립링이 필요하지 않고, 케이블 저항을 낮추기 위한 가공이 필요하지 않아 벨트의 변형을 방지할 수 있다.According to the present invention, since the gripper for wirelessly receiving power is provided, a slip ring for wired power transmission is not required, and processing for lowering the cable resistance is not required, thereby preventing deformation of the belt.

본 발명에 따르면, 전력저장부가 제1 전력저장유닛과 제2 전력저자유닛를 포함하므로, 생산라인 가동 중 제1 및 제2 전력저장유닛의 동시 교체로 인한 생산량 감소를 방지할 수 있다.According to the present invention, since the power storage unit includes the first power storage unit and the second power author unit, it is possible to prevent a decrease in production due to simultaneous replacement of the first and second power storage units during operation of the production line.

도 1은 종래의 캐리어 이송장치를 도시한 도면이다.
도 2a 내지 도 2c는 본 발명의 실시예에 따른 캐리어 이송장치를 도시한 도면이다.
도 3은 도 2에 도시된 본체부를 설명하기 위한 도면이다.
도 4는 도 2에 도시된 파지부를 설명하기 위한 도면이다.1 is a view showing a conventional carrier transport device.
2A to 2C are views illustrating a carrier transport apparatus according to an embodiment of the present invention.
FIG. 3 is a view for explaining the main body shown in FIG. 2 .
FIG. 4 is a view for explaining the gripping unit shown in FIG. 2 .

이하에서는, 본 발명의 실시예에 따른 캐리어 이송장치를 첨부한 도면을 참조하여 설명한다. 본 발명에 따른 동작 및 작용을 이해하는 데 필요한 부분을 중심으로 상세히 설명한다.Hereinafter, a carrier transport apparatus according to an embodiment of the present invention will be described with reference to the accompanying drawings. It will be described in detail focusing on the parts necessary to understand the operation and operation according to the present invention.

또한, 본 발명의 구성 요소를 설명하는 데 있어서, 동일한 명칭의 구성 요소에 대하여 도면에 따라 다른 참조부호를 부여할 수도 있으며, 서로 다른 도면임에도 불구하고 동일한 참조부호를 부여할 수도 있다. 그러나, 이와 같은 경우라 하더라도 해당 구성 요소가 실시예에 따라 서로 다른 기능을 갖는다는 것을 의미하거나, 서로 다른 실시예에서 동일한 기능을 갖는다는 것을 의미하는 것은 아니며, 각각의 구성 요소의 기능은 해당 실시예에서의 각각의 구성 요소에 대한 설명에 기초하여 판단하여야 할 것이다In addition, in describing the components of the present invention, different reference numerals may be assigned to components with the same names according to the drawings, and the same reference numerals may be assigned even though they are different drawings. However, even in such a case, it does not mean that the corresponding components have different functions depending on the embodiment or that they have the same function in different embodiments, and the function of each component depends on the corresponding implementation. It should be judged based on the description of each component in the example

도 2a 내지 도 2c는 본 발명의 실시예에 따른 캐리어 이송장치를 도시한 도면이다.2A to 2C are views showing a carrier transport apparatus according to an embodiment of the present invention.

도 2a는 캐리어 이송장치가 하강된 상태를 도시한 도면이다.Figure 2a is a view showing a state in which the carrier transfer device is lowered.

도 2a를 참조하면, 캐리어 이송장치(10)는 본체부(100)과 파지부(200)과, 벨트(300)를 포함한다.Referring to FIG. 2A , the carrier transport device 10 includes a body part 100 , a gripping part 200 , and a belt 300 .

캐리어 이송장치(10)는 메모리, LCD 등을 생산하는 반도체공정에서 패널 또는 다수의 기판이 적재된 캐리어 등의 반송물을 목표위치로 반송시키는 반송수단으로서, 천정에 구비된 이송 레일을 따라 반송물을 이송하는 오버헤드 호이스트 이송장치(OHT: Overhead Hoist Transfer)에 해당된다.The carrier transport device 10 is a transport means for transporting transported objects such as a carrier on which a panel or a plurality of substrates are loaded to a target position in a semiconductor process for producing a memory, LCD, etc., and transports the transported goods along a transport rail provided on the ceiling. It corresponds to the overhead hoist transfer device (OHT: Overhead Hoist Transfer).

본체부(100)는 반도체라인의 천정에 구비된 이송레일을 따라 주행하며, 이송레일로부터 전력을 수급받고, 파지부(200)에 무선으로 전력을 송신한다. 그리고 본체부(100)는 벨트(300)를 권취하여 파지부(200)를 승강시킨다.The main body 100 travels along a transfer rail provided on the ceiling of the semiconductor line, receives power from the transfer rail, and wirelessly transmits power to the gripper 200 . And the body part 100 winds up the belt 300 to elevate the grip part 200 .

파지부(200)가 상승된 상태일 때, 파지부(200)는 본체부(100)로부터 무선으로 전력을 수신하여 저장한다. 파지부(200)는 저장된 전력을 이용한다.When the gripper 200 is in a raised state, the gripper 200 wirelessly receives and stores power from the main body 100 . The gripper 200 uses the stored power.

벨트(300)는 본체부(100)와 파지부(200)를 연결하고, 본체부(100)의 구동에 의해 파지부(200)를 상승 또는 하강시킨다. 벨트(300)에는 신호선이 포함될 수 있다.The belt 300 connects the main body 100 and the gripper 200 , and raises or lowers the gripper 200 by driving the main body 100 . The belt 300 may include a signal line.

종래의 파지부는 벨트를 통해 본체부로부터 유선으로 전력을 전송받지만, 본 발명의 파지부(200)는 본체부(100)로부터 무선으로 전력을 전송받고 전송된 전력을 저장한다. 따라서 벨트(300)는 전력을 전달하기 위해 저항값을 낮춘 스틸와이어와 동(또는 동합금) 와이어가 혼재될 필요가 없으므로, 벨트의 변형문제가 발생하지 않는다.The conventional gripper receives power by wire from the main body through a belt, but the gripper 200 of the present invention receives power wirelessly from the main body 100 and stores the transmitted power. Therefore, the belt 300 does not require a mixture of a steel wire and a copper (or copper alloy) wire having a lowered resistance in order to transmit power, so that a deformation problem of the belt does not occur.

도 2b는 캐리어 이송장치가 반송물을 파지하지 않고 상승된 상태를 도시한 도면이고, 도 2c는 캐리어 이송장치가 반송물을 파지하고 상승된 상태를 도시한 도면이다. Figure 2b is a view showing a state in which the carrier conveying device is raised without holding the conveyed material, Figure 2c is a view showing a state in which the carrier conveying device is lifted holding the conveyed material.

도 2b 또는 도 2c와 같이, 파지부(200)가 상승된 상태일 때, 파지부(200)는 본체부(100)로부터 무선으로 전력을 전송받아 저장한다. 그리고 파지부(200)는 도 2a와 같이, 파지부(200)는 가 상승된 상태가 아닌 경우, 저장된 전력을 이용하여 반송물을 클랭핑 또는 언클램핑한다. 또는 이와는 다르게, 무선충전효율을 기반하여 도 2b 및 도 2c와 같이 파지부(200)가 상승된 상태가 아닌 경우에서도 충전이 수행될 수도 있다. 2B or 2C , when the gripper 200 is in a raised state, the gripper 200 receives and stores power wirelessly from the main body 100 . And, as shown in FIG. 2A , the holding unit 200 clamps or unclamps the conveyed material using the stored power when the holding unit 200 is not in an elevated state. Alternatively, charging may be performed even when the holding unit 200 is not raised as shown in FIGS. 2B and 2C based on the wireless charging efficiency.

이하 도 3 및 도 4를 참조하여 본체부(100)와 파지부(200)에 대해 상세히 설명한다.Hereinafter, the body part 100 and the grip part 200 will be described in detail with reference to FIGS. 3 and 4 .

도 3은 도 2에 도시된 본체부를 설명하기 위한 도면이다.FIG. 3 is a view for explaining the main body shown in FIG. 2 .

도 3을 참조하면, 본체부(100)는 레일구동부(110)와, 전원수급부(120)와, 벨트구동부(130)와, 무선전력송신부(140)를 포함한다.Referring to FIG. 3 , the body unit 100 includes a rail driving unit 110 , a power supply unit 120 , a belt driving unit 130 , and a wireless power transmission unit 140 .

레일구동부(110)는 본체부(100)의 상단에 구비되며, 캐리어 이송장치(10)로 하여금 반도체라인의 천정에 설치된 주행레일을 따라 이동하는 기능을 수행한다.The rail driving unit 110 is provided at the upper end of the main body 100 and performs a function of causing the carrier transport device 10 to move along the running rail installed on the ceiling of the semiconductor line.

전원수급부(120)는 주행레일로부터 전원을 수급받아 캐리어 이송장치의 각 구성에 전원을 제공한다.The power supply unit 120 receives power from the running rail and provides power to each component of the carrier transport device.

벨트구동부(130)에는 모터가 마련되어 있으며, 모터의 구동축에는 벨트를 권취하는 구동풀리가 마련된다. 모터의 구동에 의해 구동풀리가 벨트를 권취함으로써 파지부(200)를 승강시킨다.A motor is provided in the belt driving unit 130 , and a driving pulley for winding the belt is provided on a drive shaft of the motor. The gripper 200 is raised and lowered by the drive pulley winding the belt by driving the motor.

무선전력송신부(140)은 파지부(200)에 무선으로 전력을 공급한다. 무선전력송신부에 대응되는 무선전력수신부(210)가 파지부(200)에 구비된다. The wireless power transmitter 140 wirelessly supplies power to the gripper 200 . A wireless power receiver 210 corresponding to the wireless power transmitter is provided in the gripper 200 .

무선전력송신부(140)는, 무선전력송신효율을 고려하여, 파지부(200)가 상승된 상태일 때에, 파지부(200)의 무선전력수신부(220)에 무선으로 전력을 송신한다. 파지부(200)가 상승되지 않은 상태에서 무선으로 전력을 송신하는 경우, 무선충전효율이 떨어지기 때문이다. The wireless power transmitter 140 wirelessly transmits power to the wireless power receiver 220 of the gripper 200 when the gripper 200 is in a raised state in consideration of the wireless power transmission efficiency. This is because, when the holding unit 200 wirelessly transmits power in a non-raised state, the wireless charging efficiency is lowered.

그리고 무선전력송신부(140)는, 무선충전효율 향상을 위해, 상승된 상태의 파지부(200)에 구비되는 무선전력수신부(210)와 가장 가깝게 배치됨이 바람직하다. And, the wireless power transmitter 140 is preferably disposed closest to the wireless power receiver 210 provided in the gripping unit 200 in the raised state in order to improve wireless charging efficiency.

도 4는 도 2에 도시된 파지부를 설명하기 위한 도면이다.FIG. 4 is a view for explaining the gripping unit shown in FIG. 2 .

도 4를 참조하면, 파지부(200)는 무선전력수신부(210), 충전제어부(220), 전력저장부(230), 클램핑부(240)를 포함한다.Referring to FIG. 4 , the holding unit 200 includes a wireless power receiving unit 210 , a charging control unit 220 , a power storage unit 230 , and a clamping unit 240 .

무선전력수신부(210)는 파지부(200)가 상승된 상태일 때, 무선전력송신부(140)로부터 무선으로 전송되는 무선전력을 수신한다. 무선전력수신부(210)에서 수신된 전력은 전력저장부(230)에 저장된다.The wireless power receiver 210 receives wireless power wirelessly transmitted from the wireless power transmitter 140 when the gripper 200 is in a raised state. The power received from the wireless power receiver 210 is stored in the power storage 230 .

전력저장부(230)는 무선전력수신부(220)으로부터 전송되는 전력을 저장한다. 전력저장부(230)는 전력을 저장하는 복수개의 전력저장유닛을 포함할 수 있다. 복수개의 전력저장유닛은 적어도 제1 전력저장유닛(231)과 제2 전력저장유닛(232)를 포함한다.The power storage unit 230 stores power transmitted from the wireless power receiver 220 . The power storage unit 230 may include a plurality of power storage units for storing power. The plurality of power storage units includes at least a first power storage unit 231 and a second power storage unit 232 .

충전제어부(220)의 제어 하에, 제1 전력저장유닛(231)과 제2 전력저장유닛(232) 중 어느 하나는 주전력원으로 사용되고 나머지 하나는 주전력원의 상태이상을 대비한 예비전력원으로 사용된다. Under the control of the charging control unit 220, any one of the first power storage unit 231 and the second power storage unit 232 is used as the main power source and the other is a reserve power source in preparation for abnormalities in the main power source. is used as

충전제어부(220)는 상태판단부(221)와 스위칭부(222)를 포함한다.The charging control unit 220 includes a state determination unit 221 and a switching unit 222 .

상태판단부(221)는 제1 전력저장부(231) 및 제2 전력저장부(232) 중 주전력원으로 사용되는 전력저장부의 수명, 성능 등의 상태이상여부를 판단한다.The state determination unit 221 determines whether there is an abnormality in the lifespan and performance of the power storage unit used as the main power source among the first power storage unit 231 and the second power storage unit 232 .

스위칭부(222)는, 상태판단부(221)의 상태이상여부 판단 결과를 기반으로, 무선전력수신부(220)로부터의 전력을 제1 전력저장유닛(231)과 제2 전력저장유닛(232) 중 어느 하나에 선택 공급하도록 제어한다. The switching unit 222 transfers power from the wireless power receiver 220 to the first power storage unit 231 and the second power storage unit 232 based on the determination result of the state abnormality of the state determination unit 221 . Control to supply selectively to any one of them.

예를 들어, 제1 전력저장유닛(231)가 주전력원이고, 제2 전력저장유닛(232)가 예비전력원인 것으로 가정하면, 상태판단부(242)에서 주전력원인 제1 전력저장유닛 (231)이 상태이상으로 판단되는 경우, 스위칭부(241)는 제1 전력저장유닛(231)을 예비전력원으로 설정하고, 제2 전력저장유닛(232)을 주전력원으로 설정한다. 이후부터는 제2 전력저장유닛(232)은 무선전력수신부(210)으로부터의 전력을 받아 충전되며, 이미 수명이 다한 예비전력원인 제1 전력저장유닛(231)은 충전되지 않는다. 수명이 다된 제1 전력저장유닛(231)는 차후 사용자에 의해 교체될 새로운 제1 전력저장유닛(231)로 교체될 것이다.For example, assuming that the first power storage unit 231 is the main power source and the second power storage unit 232 is the reserve power source, the first power storage unit ( 231) is determined to be abnormal, the switching unit 241 sets the first power storage unit 231 as a reserve power source and sets the second power storage unit 232 as the main power source. From now on, the second power storage unit 232 is charged by receiving power from the wireless power receiver 210 , and the first power storage unit 231 , which is a spare power source that has already expired, is not charged. The first power storage unit 231 whose lifespan has expired will be replaced with a new first power storage unit 231 to be replaced by a user in the future.

스위칭 이벤트가 발생하는 경우, 충전제어부(220)는 사용자에게 스위칭 이벤트 정보를 통지한다. 스위칭 이벤트 정보는 제1 및 제2 전력저장유닛(231, 232) 중 어느 것이 현재 주전력원이고 예비전력원인지에 대한 정보, 주전력원 예비전력원 각각의 상태정보, 스위칭 시각정보 등을 포함할 수 있다. 사용자는 스위칭 이벤트에 대한 정보를 기반으로, 정기 메인터넌스 수행 시 수명이 다된 예비전력원을 교체할 수 있다.When a switching event occurs, the charging control unit 220 notifies the user of switching event information. The switching event information includes information on which of the first and second power storage units 231 and 232 is the current main power source and the standby power source, status information of each of the main power source and the spare power source, and switching time information, etc. can do. Based on the information on the switching event, the user can replace the expired standby power source during regular maintenance.

무선전력수신부(210)는 파지부(200)가 상승되었을 때, 본체부(100)의 무선전력송신부(140)와 가장 가까운 위치에 구비됨이 바람직하다. The wireless power receiver 210 is preferably provided at a position closest to the wireless power transmitter 140 of the main body 100 when the gripper 200 is raised.

전력저장부(230)는 무선전력수신부(210)와 인접하여 구비되거나 이격되어 구비될 수도 있다. 따라서 제1 전력저장유닛(231) 및 제2 전력저장유닛(232) 각각은 교체용이성을 위해 외부로 노출될 수 있는 위치에 탈착식으로 구성될 수 있다.The power storage unit 230 may be provided adjacent to or spaced apart from the wireless power receiving unit 210 . Therefore, each of the first power storage unit 231 and the second power storage unit 232 may be detachably configured at a position that can be exposed to the outside for ease of replacement.

클램핑부(240)는 클램프를 구동시켜 반송물을 클램핑하거나 또는 언클램핑하여 이적재하는 기능을 수행한다. The clamping unit 240 drives the clamp to clamp or unclamp the conveyed material to perform the function of loading and unloading.

본 발명에 따르면, 파지부는 무선으로 전력을 전송받으므로, 유선 전력전송을 위한 슬립링이 필요하지 않고, 케이블 저항을 낮추기 위한 재료를 필요하지 않아 벨트의 변형을 방지할 수 있다.According to the present invention, since the gripper receives power wirelessly, there is no need for a slip ring for wired power transmission, and a material for lowering the cable resistance is not required, thereby preventing deformation of the belt.

본 발명에 따르면, 전력저장부가 제1 전력저장유닛과 제2 전력저장유닛를 포함한다. 따라서 생산라인 가동 중에는 제1 전력저장유닛과 제2 전력저장유닛 중 어느 하나만을 사용하므로, 제1 및 제2 전력저장유닛의 동시 교체로 인한 생산량 감소를 방지할 수 있다.According to the present invention, the power storage unit includes a first power storage unit and a second power storage unit. Therefore, since only one of the first power storage unit and the second power storage unit is used during operation of the production line, it is possible to prevent a decrease in production due to simultaneous replacement of the first and second power storage units.

이상에서 설명한 실시예들은 그 일 예로서, 본 발명이 속하는 기술 분야에서 통상의 지식을 가진 자라면 본 발명의 본질적인 특성에서 벗어나지 않는 범위에서 다양한 수정 및 변형이 가능할 것이다. The embodiments described above are examples thereof, and various modifications and variations may be made by those of ordinary skill in the art to which the present invention pertains without departing from the essential characteristics of the present invention.

따라서, 본 발명에 개시된 실시예들은 본 발명의 기술 사상을 한정하기 위한 것이 아니라 설명하기 위한 것이고, 이러한 실시예에 의하여 본 발명의 기술 사상의 범위가 한정되는 것은 아니다. Accordingly, the embodiments disclosed in the present invention are not intended to limit the technical spirit of the present invention, but to explain, and the scope of the technical spirit of the present invention is not limited by these embodiments.

본 발명의 보호 범위는 아래의 청구범위에 의하여 해석되어야 하며, 그와 동등한 범위 내에 있는 모든 기술 사상은 본 발명의 권리범위에 포함되는 것으로 해석되어야 할 것이다.The protection scope of the present invention should be construed by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

10: 캐리어 이송장치 100: 본체부
110: 레일구동부 120: 전원수급부
130: 벨트구동부 140: 무선전력송신부
200: 파지부 210: 무선전력수신부
220: 충전제어부 221: 상태판단부
222: 스위칭부 230: 전력저장부
231: 제1 전력저장유닛 232; 제2 전력저장유닛
240: 클램핑부10: carrier transfer device 100: body portion
110: rail driving unit 120: power supply unit
130: belt driving unit 140: wireless power transmission unit
200: grip unit 210: wireless power receiver
220: charging control unit 221: state determination unit
222: switching unit 230: power storage unit
231: a first power storage unit 232; second power storage unit
240: clamping part

Claims (5)

반도체라인의 천정에 구비된 이송레일을 따라 반송물을 이송하는 캐리어 이송장치에 있어서,
벨트를 승강 구동하는 본체부; 및
상기 벨트에 의해 승강 구동되며, 반송물을 파지하는 파지부를 포함하고,
상기 파지부는, 상기 본체부로부터 무선전력을 전송받아 저장하는 제1 전력저장유닛 및 제2 전력저장유닛을 구비하는 전력저장부와, 충전제어부를 포함하고,
상기 제1 전력저장유닛 및 제2 전력저장유닛 중 어느 하나는 주 전원공급원으로 사용되고, 나머지 하나는 예비 전원공급원으로 사용되고,
상기 충전제어부는,
주 전원공급원의 상태를 판단하고, 판단결과 주 전원공급원의 수명이 일정한도를 초과한 경우, 예비 전원공급원을 주 전원공급원으로 교체 사용하도록 제어하고, 상기 수명이 일정한도를 초과한 전원공급원에 대해 충전을 수행하지 않고, 교체 사실을 사용자에게 통지하는 것을 특징으로 하는 캐리어 이송장치.
In the carrier transport device for transporting a transported material along a transport rail provided on the ceiling of a semiconductor line,
a body unit for lifting and lowering the belt; and
It is driven up and down by the belt, and includes a gripper for gripping the conveyed material,
The holding unit includes a power storage unit having a first power storage unit and a second power storage unit for receiving and storing wireless power from the main body unit, and a charging control unit,
Any one of the first power storage unit and the second power storage unit is used as a main power supply source, and the other one is used as a spare power supply source,
The charging control unit,
The state of the main power source is determined, and if the lifespan of the main power source exceeds a certain limit, the standby power supply is controlled to be replaced with the main power source and used, and for the power supply whose life exceeds the certain limit, Carrier conveying device, characterized in that the user is notified of the fact of replacement without charging.
 제1항에 있어서,
상기 본체부는 상기 파지부가 상승된 상태 일 때 상기 파지부에 무선전원을 송신하는 무선전원송신부를 포함하고,
상기 파지부는 상기 무선전원송신부로부터 무선전원을 수신하고, 상기 전력저장부를 충전하는 무선전원수신부를 포함하는 캐리어 이송장치.
According to claim 1,
The main body includes a wireless power transmission unit for transmitting wireless power to the holding unit when the holding unit is in a raised state,
The holding unit receives the wireless power from the wireless power transmission unit, carrier transfer device including a wireless power receiving unit for charging the power storage unit.
 삭제delete 삭제delete 제1항에 있어서,
상기 제1 전력저장유닛 및 상기 제2 전력저장유닛은 탈착가능한 것을 특징으로 하는 캐리어 이송장치.According to claim 1,
The carrier transport device, characterized in that the first power storage unit and the second power storage unit is detachable.
KR1020190081916A 2019-07-08 2019-07-08 Apparatus for transfering a carrier KR102398963B1 (en)

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Citations (1)

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Publication number Priority date Publication date Assignee Title
JP2007109819A (en) * 2005-10-12 2007-04-26 Ricoh Co Ltd Portable electronic apparatus

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