KR102383416B9 - 플라즈마 장비의 센싱데이터를 이용한 공정 예측 방법 및 이를 위한 스마트센서 - Google Patents

플라즈마 장비의 센싱데이터를 이용한 공정 예측 방법 및 이를 위한 스마트센서

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Publication number
KR102383416B9
KR102383416B9 KR1020200104457A KR20200104457A KR102383416B9 KR 102383416 B9 KR102383416 B9 KR 102383416B9 KR 1020200104457 A KR1020200104457 A KR 1020200104457A KR 20200104457 A KR20200104457 A KR 20200104457A KR 102383416 B9 KR102383416 B9 KR 102383416B9
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KR
South Korea
Prior art keywords
sensing data
plasma chamber
smart sensor
process predicting
predicting
Prior art date
Application number
KR1020200104457A
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English (en)
Other versions
KR20220023034A (ko
KR102383416B1 (ko
Inventor
송중호
송미영
김대철
김종식
김용현
윤정식
김영우
한덕선
조기환
Original Assignee
한국핵융합에너지연구원
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Priority to KR1020200104457A priority Critical patent/KR102383416B1/ko
Publication of KR20220023034A publication Critical patent/KR20220023034A/ko
Application granted granted Critical
Publication of KR102383416B1 publication Critical patent/KR102383416B1/ko
Publication of KR102383416B9 publication Critical patent/KR102383416B9/ko

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    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
    • G05B23/0283—Predictive maintenance, e.g. involving the monitoring of a system and, based on the monitoring results, taking decisions on the maintenance schedule of the monitored system; Estimating remaining useful life [RUL]
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0221—Preprocessing measurements, e.g. data collection rate adjustment; Standardization of measurements; Time series or signal analysis, e.g. frequency analysis or wavelets; Trustworthiness of measurements; Indexes therefor; Measurements using easily measured parameters to estimate parameters difficult to measure; Virtual sensor creation; De-noising; Sensor fusion; Unconventional preprocessing inherently present in specific fault detection methods like PCA-based methods
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B23/00—Testing or monitoring of control systems or parts thereof
    • G05B23/02—Electric testing or monitoring
    • G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
    • G05B23/0218—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults
    • G05B23/0243—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterised by the fault detection method dealing with either existing or incipient faults model based detection method, e.g. first-principles knowledge model
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N3/00—Computing arrangements based on biological models
    • G06N3/02—Neural networks
    • G06N3/08—Learning methods

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Theoretical Computer Science (AREA)
  • General Health & Medical Sciences (AREA)
  • Computing Systems (AREA)
  • Computational Linguistics (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Biophysics (AREA)
  • General Engineering & Computer Science (AREA)
  • Artificial Intelligence (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Plasma Technology (AREA)
KR1020200104457A 2020-08-20 2020-08-20 플라즈마 장비의 센싱데이터를 이용한 공정 예측 방법 및 이를 위한 스마트센서 KR102383416B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020200104457A KR102383416B1 (ko) 2020-08-20 2020-08-20 플라즈마 장비의 센싱데이터를 이용한 공정 예측 방법 및 이를 위한 스마트센서

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020200104457A KR102383416B1 (ko) 2020-08-20 2020-08-20 플라즈마 장비의 센싱데이터를 이용한 공정 예측 방법 및 이를 위한 스마트센서

Publications (3)

Publication Number Publication Date
KR20220023034A KR20220023034A (ko) 2022-03-02
KR102383416B1 KR102383416B1 (ko) 2022-04-06
KR102383416B9 true KR102383416B9 (ko) 2022-12-05

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200104457A KR102383416B1 (ko) 2020-08-20 2020-08-20 플라즈마 장비의 센싱데이터를 이용한 공정 예측 방법 및 이를 위한 스마트센서

Country Status (1)

Country Link
KR (1) KR102383416B1 (ko)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20230149059A (ko) * 2022-04-19 2023-10-26 한국핵융합에너지연구원 플라즈마 시뮬레이션 방법 및 시스템
KR20230151381A (ko) * 2022-04-25 2023-11-01 한국핵융합에너지연구원 기계학습을 이용한 플라즈마 시뮬레이션 방법 및 시스템
US20240094056A1 (en) * 2022-09-20 2024-03-21 Tokyo Electron Limited Optical Emission Spectroscopy for Advanced Process Characterization

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102025145B1 (ko) * 2017-09-01 2019-09-25 두산중공업 주식회사 플랜트 데이터 예측 장치 및 방법
KR102219090B1 (ko) * 2019-01-22 2021-02-24 주식회사 케이디파워 발전기의 고장예측 진단 시스템

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Publication number Publication date
KR20220023034A (ko) 2022-03-02
KR102383416B1 (ko) 2022-04-06

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G170 Re-publication after modification of scope of protection [patent]