KR102354879B9 - 배치식 기판처리장치 - Google Patents

배치식 기판처리장치

Info

Publication number
KR102354879B9
KR102354879B9 KR1020200097444A KR20200097444A KR102354879B9 KR 102354879 B9 KR102354879 B9 KR 102354879B9 KR 1020200097444 A KR1020200097444 A KR 1020200097444A KR 20200097444 A KR20200097444 A KR 20200097444A KR 102354879 B9 KR102354879 B9 KR 102354879B9
Authority
KR
South Korea
Prior art keywords
processing apparatus
substrate processing
type substrate
batch type
batch
Prior art date
Application number
KR1020200097444A
Other languages
English (en)
Other versions
KR102354879B1 (ko
Inventor
조정희
Original Assignee
주식회사 유진테크
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 유진테크 filed Critical 주식회사 유진테크
Priority to KR1020200097444A priority Critical patent/KR102354879B1/ko
Application granted granted Critical
Publication of KR102354879B1 publication Critical patent/KR102354879B1/ko
Publication of KR102354879B9 publication Critical patent/KR102354879B9/ko

Links

KR1020200097444A 2020-08-04 2020-08-04 배치식 기판처리장치 KR102354879B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020200097444A KR102354879B1 (ko) 2020-08-04 2020-08-04 배치식 기판처리장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020200097444A KR102354879B1 (ko) 2020-08-04 2020-08-04 배치식 기판처리장치

Publications (2)

Publication Number Publication Date
KR102354879B1 KR102354879B1 (ko) 2022-02-07
KR102354879B9 true KR102354879B9 (ko) 2022-07-06

Family

ID=80253096

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020200097444A KR102354879B1 (ko) 2020-08-04 2020-08-04 배치식 기판처리장치

Country Status (1)

Country Link
KR (1) KR102354879B1 (ko)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102622739B1 (ko) * 2022-02-10 2024-01-09 주식회사 유진테크 배치식 기판처리장치
KR102640939B1 (ko) * 2022-03-04 2024-02-27 주식회사 유진테크 배치식 기판처리장치

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4470970B2 (ja) 2007-07-31 2010-06-02 東京エレクトロン株式会社 プラズマ処理装置
KR20190003972A (ko) * 2016-04-29 2019-01-10 레트로-세미 테크놀로지스, 엘엘씨 분할 전극을 가지는 플라즈마 반응기
KR102009348B1 (ko) * 2017-09-20 2019-08-09 주식회사 유진테크 배치식 플라즈마 기판처리장치
KR102485400B1 (ko) * 2018-11-14 2023-01-06 주식회사 원익아이피에스 기판 처리 장치
KR102139296B1 (ko) * 2019-05-02 2020-07-30 주식회사 유진테크 배치식 기판처리장치

Also Published As

Publication number Publication date
KR102354879B1 (ko) 2022-02-07

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G170 Re-publication after modification of scope of protection [patent]