KR102354879B9 - 배치식 기판처리장치 - Google Patents
배치식 기판처리장치Info
- Publication number
- KR102354879B9 KR102354879B9 KR1020200097444A KR20200097444A KR102354879B9 KR 102354879 B9 KR102354879 B9 KR 102354879B9 KR 1020200097444 A KR1020200097444 A KR 1020200097444A KR 20200097444 A KR20200097444 A KR 20200097444A KR 102354879 B9 KR102354879 B9 KR 102354879B9
- Authority
- KR
- South Korea
- Prior art keywords
- processing apparatus
- substrate processing
- type substrate
- batch type
- batch
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020200097444A KR102354879B1 (ko) | 2020-08-04 | 2020-08-04 | 배치식 기판처리장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020200097444A KR102354879B1 (ko) | 2020-08-04 | 2020-08-04 | 배치식 기판처리장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR102354879B1 KR102354879B1 (ko) | 2022-02-07 |
KR102354879B9 true KR102354879B9 (ko) | 2022-07-06 |
Family
ID=80253096
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020200097444A KR102354879B1 (ko) | 2020-08-04 | 2020-08-04 | 배치식 기판처리장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR102354879B1 (ko) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102622739B1 (ko) * | 2022-02-10 | 2024-01-09 | 주식회사 유진테크 | 배치식 기판처리장치 |
KR102640939B1 (ko) * | 2022-03-04 | 2024-02-27 | 주식회사 유진테크 | 배치식 기판처리장치 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4470970B2 (ja) | 2007-07-31 | 2010-06-02 | 東京エレクトロン株式会社 | プラズマ処理装置 |
KR20190003972A (ko) * | 2016-04-29 | 2019-01-10 | 레트로-세미 테크놀로지스, 엘엘씨 | 분할 전극을 가지는 플라즈마 반응기 |
KR102009348B1 (ko) * | 2017-09-20 | 2019-08-09 | 주식회사 유진테크 | 배치식 플라즈마 기판처리장치 |
KR102485400B1 (ko) * | 2018-11-14 | 2023-01-06 | 주식회사 원익아이피에스 | 기판 처리 장치 |
KR102139296B1 (ko) * | 2019-05-02 | 2020-07-30 | 주식회사 유진테크 | 배치식 기판처리장치 |
-
2020
- 2020-08-04 KR KR1020200097444A patent/KR102354879B1/ko active IP Right Grant
Also Published As
Publication number | Publication date |
---|---|
KR102354879B1 (ko) | 2022-02-07 |
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