KR102353581B1 - Sample transfer system using gas pocket and sample transfer method using the same - Google Patents

Abstract

The present invention relates to a sample analysis system using a gas pocket and a sample analysis method using the same. More specifically, the system comprises: a carrier supply unit configured to supply ultra pure water (UPW) through a transfer line; a gas supply unit for supplying gas to the transfer line to form a gas pocket; and a sample forming unit for supplying a sample to the transfer line in a state in which the UPW is being supplied by the carrier supply unit, and forming a sample by mixing the UPW and the sample. Selective supply control of the UPW, the gas pocket and the sample is achieved, thereby allowing a sample packet consisting of gas pocket-sample-gas pocket to be transferred. According to the present invention, the sample supplied from the sample forming unit and configured to be transferred by the UPW is supplied between the gas pockets and transferred between the gas pockets, thereby preventing the concentration of the sample from being lowered by diffusing the sample into the UPW by the gas pocket, and at the same time, preventing analysis reliability from being degraded.

Description

A sample analysis system using a gas pocket and a sample analysis method using the same

The present invention relates to a sample analysis system using a gas pocket and a sample analysis method using the same.

More specifically, the sample supplied from the sample forming unit and configured to be transported by the ultrapure solution is supplied between the gas pockets and transferred between the gas pockets, so that the sample is diffused into the ultrapure solution by the gas pockets and the concentration of the sample It relates to a sample analysis system using a gas pocket and a sample analysis method using the same, which are configured to prevent deterioration and at the same time prevent deterioration of analysis reliability.

Ultrapure water (UPW, Ultrapure water) has the property of dissolving and decomposing surrounding substances in a pure state with a specific resistance value of 18.25MΩ.cm close to 18.25MΩ.cm by removing fine particles, organic matter, live cells and silica as much as possible. It is a semiconductor manufacturing process It is used in a variety of ways, including for cleaning purposes.

More specifically, semiconductor devices are generally manufactured by applying a photoresist after forming an oxide film on a wafer, removing a portion of the photoresist by exposing using a mask, depositing metal particles, forming a metal pattern, etching, etc. It is manufactured through the same processes. That is, during the manufacturing process of a semiconductor device, a process in which a wide variety of material layers are formed on the wafer and then removed is performed several times. At this time, in order to prevent substances to be removed in the previous process from remaining on the wafer before moving on to the next process, an ultrapure aqueous solution is used and cleaning is performed between various processes, such as materials remaining from the previous process or materials introduced from outside, etc. It would be desirable to remove the same impurities as completely as possible.

On the other hand, the conventional method for collecting and analyzing a sample goes through the process of sample collection, sample transfer, and sample analysis. is currently occurring.

In particular, in the case of a method of transferring a sample using a conventional gas, there is a problem that a cracking phenomenon occurs in the process of transferring the sample, thereby lowering the reliability of the analysis, and the transfer line through which the sample is transferred may be contaminated. There is a problem, and when contamination occurs in the transfer line, partial cleaning of the transfer line to remove the contamination acts as a hunting for analysis data of the sample.

In addition, in the case of the conventional method of transferring a sample using an ultrapure solution, as the sample moves over a relatively long distance, the sample diffuses into the ultrapure solution and mixes with each other, thereby gradually decreasing the concentration of the sample. There is a problem in that it is difficult to obtain a sample required for the analysis, and at the same time, there is a problem in that the reliability of the sample analysis is lowered.

Registered Patent Publication No. 10-1547167 (2015.08.19.) Registered Patent Publication No. 10-1710859 (2017.02.22.)

The present invention has been devised to solve the above problems, and the problem to be solved in the present invention is that the sample configured to be supplied from the sample forming unit and transferred by the ultrapure solution is supplied between the gas pockets, and between the gas pockets. A sample analysis system using a gas pocket and a sample analysis method using the gas pocket, which are configured to prevent the sample from being diffused into the ultrapure solution by the gas pocket to prevent the concentration of the sample from being lowered and at the same time to prevent the analysis reliability from being lowered. is to provide

A sample analysis system using a gas pocket according to an embodiment of the present invention for solving the above problems includes a carrier supply unit configured to supply an ultra pure water (UPW) through a transfer line; a gas supply unit for supplying gas to the transfer line to form a gas pocket; and a sample forming unit for supplying a sample to the transfer line in a state in which the ultrapure water solution is supplied by the carrier supply unit and mixing the ultrapure water solution and the sample to form a sample, an ultrapure water solution, a gas pocket and a sample It is characterized in that the sample packet composed of the gas pocket-sample-gas pocket is transferred by selectively supplying control of the .

On the other hand, a sample analysis system using a gas pocket according to another embodiment of the present invention for solving the above problems includes a carrier supply unit configured to supply an ultra pure water (UPW) through a transfer line; a gas supply unit for supplying gas to the transfer line to form a gas pocket; and a sample forming unit configured to supply a sample containing a sample to the transfer line, so that the sample packet consisting of the gas pocket-sample-gas pocket is transferred by selectively supplying the ultrapure solution, the gas pocket, and the sample. characterized in that

In addition, one or a plurality of photosensor units configured to detect the position of the gas pocket in the sample packet transferred through the transfer line to determine the position of the sample in the sample packet are included.

In addition, a control unit configured to control any one or a plurality of the carrier supply unit, the gas supply unit, and the sample forming unit is further included.

In addition, the carrier supply unit, an ultrapure water control valve installed on the transfer line and configured to open and close the transfer line according to the control of the control unit, thereby controlling the flow of the ultrapure water solution supplied to the transfer line; and an ultrapure water check valve installed on the transfer line to prevent a reverse flow of the ultrapure water solution supplied through the transfer line.

In addition, the gas supply unit, a gas supply line branched from the transfer line; a gas generating module configured to inject gas through the gas supply line under the control of the controller; and a gas check valve installed in the gas supply line.

In addition, the sample forming unit may include a first sample supply line branched from the transfer line; and a sample forming module configured to supply a sample in which the ultrapure aqueous solution and the sample are mixed through the first sample supply line.

In addition, the sample forming unit may include a second sample supply line connected to the first sample supply line and configured to supply the sample; and a third sample supply line connected to the first sample supply line and the second sample supply line, wherein the sample forming module is installed in the third sample supply line to drain and supply the ultrapure aqueous solution and the sample a syringe pump configured; and a sample control valve installed between the first sample supply line, the second sample supply line, and the third sample supply line to open and close the first sample supply line, the second sample supply line, and the third sample supply line characterized in that it is included.

In addition, the sample forming module is characterized in that it includes a loop module configured to wait before injecting the sample drained by the syringe pump into the transfer line.

On the other hand, the sample analysis method using a gas pocket according to the present invention for solving the above problems, a first ultrapure water supply step in which the ultrapure water solution is supplied from the carrier supply unit; a first gas supply step of stopping the supply of the ultrapure solution supplied from the carrier supply unit, and supplying gas from the gas supply unit to form a gas pocket; a sample supply step of stopping the supply of the gas supplied from the gas supply unit, and supplying an ultrapure solution and a sample from the carrier supply unit and the sample forming unit, respectively; A mixing step in which the sample is formed by mixing the sample and the ultrapure solution supplied from the carrier supply unit and the sample forming unit, respectively; a second gas supply step of stopping the supply of the ultrapure water solution and the sample supplied from the carrier supply unit and the sample forming unit, respectively, and supplying gas from the gas supply unit to form a gas pocket; and a second ultrapure water supply step of stopping the supply of the gas supplied from the gas supply unit, and transferring the sample by supplying the ultrapure water solution from the carrier supply unit.

In addition, by the first gas supply step, the sample supply step, the mixing step, and the second gas supply step, the sample packet consisting of the gas pocket-sample-gas pocket is transferred by the ultrapure water solution supplied in the second ultrapure water supply step. Thereafter, an irradiation step of irradiating light to the transfer line by the irradiation module of the photosensor unit consisting of one or a plurality; a collecting step in which the light irradiated in the irradiation step is collected by a collecting module; and a detection step of analyzing the light collected by the collection module to detect data on each position of the gas pocket and the sample in the sample packet.

According to the sample analysis system using the gas pocket and the sample analysis method using the same according to the present invention, the sample supplied from the sample forming unit and configured to be transported by the ultrapure solution is supplied between the gas pockets and transferred between the gas pockets. , there is an effect configured to prevent the sample from being diffused into the ultrapure aqueous solution by the gas pocket to decrease the concentration of the sample, and at the same time to prevent the decrease in analysis reliability.

In addition, according to the present invention, the carrier supply unit is configured to include an ultrapure water control valve and an ultrapure water check valve, thereby easily controlling the supply of the ultrapure water solution supplied through the transfer line and preventing the reverse flow phenomenon to prevent contamination of the transfer line. has the effect of being

In addition, according to the present invention, since the gas supply unit is configured to include a gas supply line, a gas generation module, and a gas check valve, the ultrapure solution supplied through the transfer line flows into the gas generation module to cause damage to the gas generation module. There is an effect that is configured to prevent problems such as.

In addition, according to the present invention, the sample forming unit is configured to include a plurality of sample supply lines, a syringe pump, a sample control valve, and a loop module, thereby preventing the sample from flowing into the syringe pump and damaging the syringe pump, There is an effect of supplying a sample of the mixture and mixing with the ultrapure solution to form a sample.

1 is a view showing a sample analysis system using a gas pocket according to the present invention.
2 is a reference diagram showing a sample transfer state of the sample analysis system using a gas pocket according to the present invention.
3 is a view showing the transport direction of the ultrapure water solution, gas, and sample in the sample analysis system using a gas pocket according to the present invention.
4 is a block diagram illustrating a sample analysis method using the sample analysis system according to the present invention.
5 is a block diagram showing an irradiation step, a collection step, and a detection step of the sample analysis method using the sample analysis system according to the present invention.

Since the present invention can have various changes and can have various embodiments, specific embodiments are illustrated in the drawings and described in detail. However, this is not intended to limit the present invention to specific embodiments, and it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

When an element is referred to as being “connected” or “connected” to another element, it is understood that it may be directly connected or connected to the other element, but other elements may exist in between. it should be

On the other hand, when it is said that a certain element is "directly connected" or "directly connected" to another element, it should be understood that the other element does not exist in the middle.

The terms used herein are used only to describe specific embodiments, and are not intended to limit the present invention. The singular expression includes the plural expression unless the context clearly dictates otherwise. In the present application, terms such as "comprise" or "have" are intended to designate that a feature, number, process, operation, component, part, or a combination thereof described in the specification exists, but one or more other features It is to be understood that this does not preclude the existence or addition of numbers, processes, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present application. does not

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. Prior to this, the terms or words used in the present specification and claims should not be construed as being limited to conventional or dictionary meanings, and the inventor should properly understand the concept of the term in order to best describe his invention. Based on the principle that can be defined, it should be interpreted as meaning and concept consistent with the technical idea of the present invention. In addition, if there is no other definition in the technical terms and scientific terms used, it has the meaning commonly understood by those of ordinary skill in the art to which this invention belongs, and the summary of the present invention in the following description and accompanying drawings Descriptions of known functions and configurations that may be unnecessarily obscure will be omitted. The drawings introduced below are provided as examples so that the spirit of the present invention can be sufficiently conveyed to those skilled in the art. Accordingly, the present invention is not limited to the drawings presented below and may be embodied in other forms. Also, like reference numerals refer to like elements throughout. It should be noted that the same components in the drawings are denoted by the same reference numerals wherever possible.

According to the present invention, the sample supplied from the sample forming unit and configured to be transported by the ultrapure solution is supplied between the gas pockets and transported between the gas pockets, so that the sample is diffused into the ultrapure solution by the gas pockets to decrease the concentration of the sample It relates to a sample analysis system using a gas pocket and a sample analysis method using the same, which are configured to prevent the occurrence of a leak and at the same time prevent deterioration of analysis reliability.

Hereinafter, a sample analysis system using a gas pocket and a sample analysis method using the same according to the present invention will be described in detail with reference to the accompanying drawings.

1 is a diagram showing a sample analysis system using a gas pocket according to the present invention, FIG. 2 is a reference diagram showing a sample transfer state of the sample analysis system using a gas pocket according to the present invention, and FIG. It is a diagram showing the transport direction of the ultrapure water solution, gas, and sample in the sample analysis system using the gas pocket.

1 to 3, the sample analysis system using a gas pocket according to an embodiment of the present invention is configured to supply an ultra pure water (UPW) 101 through a transfer line 10 The carrier supply unit 100 to be used, the gas supply unit 200 for supplying gas to the transfer line 10 to form a gas pocket 201, and the carrier supply unit 100 supply the ultrapure water solution 101 by means of the supply. A sample forming unit 300 for supplying a sample 301 to the transfer line 10 in a state in which the ultrapure aqueous solution 101 and the sample 301 are mixed to form a sample S is included.

A sample analysis system using a gas pocket according to an embodiment of the present invention transfers a sample packet composed of the gas pocket 201 - the sample (S) - the gas pocket 201, and the sample packet is the gas pocket. (201) and the sample (S) refer to a state in which the gas pocket 201-sample (S)-gas pocket 201 are listed in the order as described above, and the formation of the sample packet is the ultrapure aqueous solution 101, The gas pocket 201 and the sample (S) may be configured to be formed by selectively supplying control.

In the sample analysis system using the gas pocket according to an embodiment of the present invention, the sample 301 supplied from the sample forming unit 300 is mixed with the ultrapure solution 101 to form the sample S, The gas pocket 201 and the sample S are arranged as a gas pocket 201 - a sample (S) - a gas pocket 201 in the transfer line 10 to form a sample packet, so that the sample (S) ) is to be transported by the ultrapure aqueous solution 101 supplied from the carrier supply unit 100 while being protected by the gas pocket 201 .

That is, in the sample analysis system using the gas pocket of the present invention, the sample 301 included in the sample S formed by the sample forming unit 300 is an ultrapure aqueous solution 101 located outside the gas pocket 201 . ) by preventing the diffusion to the lowering of its concentration, it is configured to prevent a decrease in the analysis reliability of the sample in the analysis step using the sample.

Meanwhile, in the sample analysis system using the gas pocket according to another embodiment of the present invention, the carrier supply unit 100 configured to supply Ultra Pure Water (UPW) 101 through the transfer line 10, the transfer A gas supply unit 200 for supplying gas to the line 10 to form a gas pocket 201 , and a sample forming unit configured to supply a sample S including a sample 301 to the transfer line 10 . (300) is included.

In this case, the sample S including the sample 301 may be made of only the sample 301 or a mixture of the ultrapure aqueous solution 101 and the sample 301 .

A sample analysis system using a gas pocket according to another embodiment of the present invention transfers a sample packet composed of the gas pocket 201 - the sample (S) - the gas pocket 201, and the sample packet is the gas pocket ( 201) and the sample S are listed in the order of the gas pocket 201 - the sample (S) - the gas pocket 201 as described above, and the formation of the sample packet is the ultrapure aqueous solution 101, gas The pocket 201 and the sample S may be configured to be formed by selective supply control.

In the sample analysis system using a gas pocket according to another embodiment of the present invention, the sample S supplied from the sample forming unit 300 is supplied from the gas supply unit 200 to form a gas pocket 201 together with the system. Gas pockets 201 - sample (S) - gas pockets 201 are arranged in the transfer line 10 to form a sample packet, so that the sample S is protected by the gas pocket 201 and the It is to be transported by the ultrapure aqueous solution 101 supplied from the carrier supply unit 100 .

That is, in the sample analysis system using the gas pocket of the present invention, the sample 301 included in the sample S supplied from the sample forming unit 300 is an ultrapure aqueous solution 101 located outside the gas pocket 201 . By preventing the diffusion to the lowering of its concentration, it is configured to prevent deterioration of the analysis reliability of the sample in the analysis step using the sample.

In the sample analysis system using the gas pocket of the present invention, one is configured to detect the position of the gas pocket 201 in the sample packet transferred through the transfer line 10 to determine the position of the sample S in the sample packet. Alternatively, a plurality of photosensor units 600 may be included.

When the photosensor unit 600 is configured in plurality, it detects the position of the gas pocket 201 in the sample packet transferred through the transfer line 10 , and based on the position of the gas pocket 201 , the It may be composed of a first photosensor 610 and a second photosensor 620 configured to detect the position of the sample S in the sample packet.

The first photosensor 610 and the second photosensor 620 are configured to detect light or other electromagnetic waves, and any one or a plurality of information about the shape, color, spacing, and thickness of the gas pocket 201 . can be configured to detect

In particular, in the sample analysis system using the gas pocket of the present invention, the liquid containing the ultrapure solution 101, the sample 301, and the sample S detected by the photosensor unit 600, the gap (normal air) And by pre-stored detection data of the gas constituting the gas pocket 201, respectively, and configured to detect the positions of the liquid, the gap, and the gas detected by the photosensor unit 600 according to the previously stored detection data, It may be configured to determine the exact position of the sample (S) configured to be transferred between the gas pockets (201).

Meanwhile, in the sample analysis system using the gas pocket of the present invention, when the position of the gas pocket 201 is detected by the first photosensor 610, the injection time of the standard solution by the standard solution injection unit 700 is determined. It may be configured to grasp, and when the position of the gas pocket 201 is detected by the second photosensor 620, it may be configured to grasp the operation time of the 3-way valve.

At this time, the standard solution injected at the time detected by the first photosensor 610 is to quantify the analyte in the sample through the analysis unit 500 to be described later by creating a calibration curve, and the second photosensor The operation of the 3-way valve performed at the point in time identified by 620 is to control the flow of the ultrapure aqueous solution 101 so that the sample packet is transferred to the analysis unit 500 .

The sample analysis system using the gas pocket of the present invention may include a control unit 400 configured to control any one or a plurality of the carrier supply unit 100 , the gas supply unit 200 , and the sample forming unit 300 . .

The control unit 400 controls the supply of the ultrapure aqueous solution 101 supplied from the carrier supply unit 100 , controls the supply of the gas supplied from the gas supply unit 200 , and is supplied by the sample forming unit 300 . It may be configured to control the supply of the sample 301 and control the mixing of the sample S formed by mixing by the sample forming unit 300 .

On the other hand, the control unit 400 is configured to control the carrier supply unit 100, the gas supply unit 200, and the sample forming unit 300 according to preset numerical values and intervals, etc., so that the carrier supply unit at regular intervals without separate control. (100), the gas supply unit 200, and the sample forming unit 300 may be controlled to transfer the sample 301 to perform a separate analysis operation, and the like.

The carrier supply unit 100 may include an ultrapure water control valve 120 and an ultrapure water check valve 130 .

In this case, the ultrapure aqueous solution supplied from the carrier supply unit 100 through the transfer line 10 may be a solution that is not contaminated by a metal or a metal compound used in the cleaning process.

The ultrapure water control valve 120 is installed in the transfer line 10 and configured to open and close the transfer line 10 under the control of the controller 400 , thereby supplying the ultrapure water solution 101 to the transfer line 10 . ) to control the flow.

The ultrapure water check valve 130 is installed in the transfer line 10 and is configured to prevent a reverse flow of the ultrapure water solution 101 supplied through the transfer line 10 .

The carrier supply unit 100 is configured to supply the ultrapure aqueous solution 101 through the transfer line 10, so that the transfer line 10 is washed and the sample of the sample forming unit 300 to be described later is transferred. will become

The gas supply unit 200 may include a gas supply line 210 , a gas generating module 220 , and a gas check valve 230 .

The gas supply line 210 is configured to guide the gas branched from the transfer line 10 and injected from the gas generating module 220 to be described later to the transfer line 10 .

The gas generating module 220 is configured to inject gas through the gas supply line 210 under the control of the controller 400, and is configured to inject gas through the gas supply line 210 such as a compressor and a syringe pump. If it can deliver, it can be changed and applied in various configurations.

In this case, the gas injected from the gas generating module 220 may be composed of an inert gas, and the inert gas may be understood as a gas that does not cause a chemical reaction with other elements.

Therefore, the gas supplied by the gas supply unit 200 does not include a separate pocket, that is, a pocket, so that the gas pocket 201 is not formed, but an inert gas mass that does not cause a chemical reaction with other elements is formed in the ultrapure aqueous solution ( 101), the inert gas does not spread by the ultrapure aqueous solution 101 and is agglomerated to form a gas pocket 201.

That is, the gas injected from the gas generating module 220 is made of an inert gas to form a pocket, so that the ultrapure aqueous solution 101 supplied from the carrier supply unit 100 and the sample 301 supplied from the sample forming unit 300 are formed. ) is configured not to be mixed with the ultrapure aqueous solution 101 supplied from the carrier supply unit 100 and the sample 301 supplied from the sample forming unit 300 is mixed to reduce the concentration of the sample (S) formed will be able to prevent it.

On the other hand, the inert gas injected from the gas generating module 220 may be composed of, for example, any one or a combination selected from helium, neon, argon, krypton, xenon and radon, and depending on the implementation environment, nitrogen may consist of

The gas check valve 230 is installed in the gas supply line 210 so that the ultrapure water solution 101 supplied to the transfer line 10 flows back through the gas supply line 210 to the gas generating module 220 . ) to prevent inflow.

In addition, the ultrapure water solution 101 supplied through the transfer line 10 is not only prevented from flowing into the gas generating module 220 through the gas supply line 210, but the gas check valve 230 is Since it can be configured to also control the flow of the gas injected from the gas generating module 220, more preferably, the gas check valve 230 is the gas generated from the gas generating module 220 and the transfer line ( 10) is to be configured to control the flow of the ultrapure aqueous solution 101 supplied through.

The gas supply unit 200 injects gas from the gas generating module 220 to the transfer line 10 , and a plurality of gas pockets 201 between the ultrapure aqueous solution 101 present in the transfer line 10 . ), so that the sample 301 supplied from the sample forming unit 300 is positioned between the plurality of gas pockets 201 to be transported.

That is, the gas supply unit 200 forms a plurality of gas pockets 201 so that the gas pockets 201 serve as a buffer so that the sample 301 is located on the outside of the gas pocket 201 . By preventing diffusion to 101, the concentration of the sample 301 mixed in the ultrapure aqueous solution 101 positioned between the plurality of gas pockets 201 is configured to prevent the concentration from being lowered to more than a preset value. will become

The sample forming unit 300 may include a first sample supply line 310 and a sample forming module 340 .

The first sample supply line 310 is branched from the transfer line 10 and is configured to guide a sample S formed by mixing in a sample forming module 340 to be described later to the transfer line 10 . will be.

The sample forming module 340 is controlled by the control unit 400 to supply a sample S in which the ultrapure aqueous solution 101 and the sample 301 are mixed through the first sample supply line 310 will be.

In more detail, the sample forming unit 300 includes a second sample supply line 320 connected to the first sample supply line 310 and configured to supply the sample 301 and the first sample supply line ( 310) and a third sample supply line 330 connected to the second sample supply line 320 may be included, and the sample forming module 340 may include a syringe pump 342 and a sample control valve 343 . can

The syringe pump 342 is installed in the third sample supply line 330 to drain and supply the ultrapure aqueous solution 101 and the sample 301, and more specifically, the syringe pump ( 342 is installed in the third sample supply line 330 and is driven under the control of the controller 400 to supply the ultrapure aqueous solution 101 and the first sample supply line 310 through the transfer line 10 . ) to drain and mix the sample 301 supplied through it, and then supply it to the transfer line 10 .

In the present invention, a syringe pump is adopted as configured to drain and supply the ultrapure water solution 101 and the sample 301, but depending on the implementation environment, the syringe pump 342 is the ultrapure water solution 101 and the sample Any configuration that can drain and supply 301 can be changed and applied.

The sample control valve 343 is installed between the first sample supply line 310, the second sample supply line 320, and the third sample supply line 330, the first sample supply line 310, By being configured to open and close the second sample supply line 320 and the third sample supply line 330 , the ultrapure aqueous solution 101 drained by the syringe pump 342 and the sample 301 and the sample S supplied ) to control the flow.

In other words, the sample control valve 343 is configured to open the first sample supply line 310 and the second sample supply line 320 and close the third sample supply line 330 , or By sealing the first sample supply line 310 and opening the second sample supply line 320 and the third sample supply line 330 , the drain operation and supply operation of the syringe pump 342 are easy It is structured so that it can be done.

Accordingly, the sample control valve 343 is interlocked with the operation of the syringe pump 342 to operate the first sample supply line 310 , the second sample supply line 320 , and the third sample supply line 330 . It may be configured to control opening and closing.

Meanwhile, the sample forming module 340 may include a loop module 344 configured to wait before injecting the sample 301 drained by the syringe pump 342 into the transfer line 10 .

The loop module 344 is damaged as the sample 301 drained by the syringe pump 342 flows into the syringe pump 342 and a load is generated on the syringe pump 342, etc. This is to avoid problems.

Therefore, the roof module 344 is preferably formed in the shape of a coil or the like so that the sample 301 having a relatively large capacity can be stored in a narrow space.

In addition, in the sample analysis system using the gas pockets of the present invention, the eluent is mixed with the ultrapure solution containing the sample that is positioned between the gas pockets 201 and the sample transferred from the position between the gas pockets 201 . Any one method of a concentration unit eluting an analyte sample from a sample including An analysis unit 500 configured to analyze as may be included.

The sample analysis system using the gas pocket of the present invention may be configured to perform quantitative analysis by eluting the analyte sample from the sample including the sample transferred through the sample analysis system using the gas pocket.

4 is a block diagram illustrating a sample analysis method using the sample analysis system according to the present invention, and FIG. 5 is a block diagram illustrating the investigation step, collection step, and detection step of the sample analysis method using the sample analysis system according to the present invention. .

4, in the sample analysis method using the sample analysis system of the present invention, a first ultrapure water supply step (S10), a first gas supply step (S20), a sample supply step (S30), a mixing step (S40) , a second gas supply step (S50) and a second ultrapure water supply step (S60) are included.

The first ultrapure water supply step (S10) is a step in which the ultrapure water solution 101 is supplied from the carrier supply unit 100 .

In the present invention, it has been described that the ultrapure water solution 101 supplied from the carrier supply unit 100 is temporarily supplied, but depending on the implementation environment, the ultrapure water solution 101 supplied from the carrier supply unit 100 is the transfer line 10 ) can be configured in a state in which it is always supplied.

In the first gas supply step (S20), the supply of the ultrapure aqueous solution 101 supplied from the carrier supply unit 100 is stopped, and the gas is supplied from the gas supply unit 200 to form a gas pocket 201. .

The gas supplied in the first gas supply step (S20) is configured to form a gas pocket 201 between the ultrapure aqueous solution 101 that is supplied to the transfer line 10 and remains there.

In the sample supply step (S30), the gas supplied from the gas supply unit 200 is stopped, and the ultrapure aqueous solution 101 and the sample 301 are supplied from the carrier supply unit 100 and the sample forming unit 300, respectively. The mixing step (S40) is a step in which the ultrapure aqueous solution 101 and the sample 301 supplied from the carrier supply unit 100 and the sample forming unit 300, respectively, are mixed with each other.

In the present invention, the sample supply step (S30) and the mixing step (S40) are described as being sequentially performed, but depending on the implementation environment, the sample supply step (S30) and the mixing step (S40) are performed simultaneously and multiple times. can be configured.

Accordingly, the gas pocket 201 formed by the gas supplied in the first gas supply step S20 may be located in front of the location where the ultrapure aqueous solution 101 and the sample 301 are mixed.

In the second gas supply step (S50), the supply of the ultrapure aqueous solution 101 and the sample 301 supplied from the carrier supply unit 100 and the sample forming unit 300, respectively, is stopped and the gas is supplied from the gas supply unit 200 is supplied to form the gas pocket 201 .

The gas supplied in the second gas supply step S50 may be configured to form a gas pocket 201 between the ultrapure aqueous solution 101 supplied to the transfer line 10 .

More specifically, the gas pocket 201 formed in the second gas supply step (S50) may be located at the rear of the position where the ultrapure aqueous solution 101 and the sample 301 are mixed in the mixing step (S40). .

That is, in the front of the position where the ultrapure aqueous solution 101 and the sample 301 are mixed in the mixing step (S40) by the gas supplied in the first gas supply step (S20) and the second gas supply step (S50), and Gas pockets 201 may be formed at the rear, respectively, and the ultrapure water solution 101 and the ultrapure water solution 101 and The mixed sample 301 may be configured not to diffuse into the ultrapure aqueous solution 101 located outside the gas pocket 201 .

The second ultrapure water supply step ( S60 ) is a step in which the gas supplied from the gas supply unit 200 is stopped and the ultrapure water solution 101 is supplied from the carrier supply unit 100 .

Accordingly, the sample 301 mixed with the ultrapure aqueous solution 101 positioned between the pair of gas pockets 201 formed by the first gas supply step (S20) and the second gas supply step (S50) is It is transferred by the ultrapure solution 101 without further spreading into the ultrapure solution.

Thereafter, in the sample analysis method using the sample analysis system of the present invention, the sample S transported by the ultrapure aqueous solution 101 may be analyzed.

5, in the sample analysis method using the sample analysis system of the present invention, the first gas supply step (S20), the sample supply step (S30), the mixing step (S40), and the second gas supply step (S50) ) in the state in which the sample packet consisting of the gas pocket 201 - the sample (S) - the gas pocket 201 is being transferred by the ultrapure water solution 101 supplied in the second ultrapure water supply step (S60), the An investigation step (S71), a collection step (S73) and a detection step (S75) for identifying and detecting the positions of the gas pocket 201 and the sample S in the sample packet to perform an analysis operation may be further included. have.

The irradiating step (S71) is a step in which one or a plurality of irradiation modules of the photosensor unit 600 are irradiated with light to the transfer line 10, and the irradiated light is transmitted to the gas pocket 201 of the sample packet. and to transmit the sample (S) or to allow the irradiated light to be reflected from the gas pocket (201) and the sample (S) of the sample packet.

This means that the photosensor unit 600 may be formed of a transmissive type or a reflective type.

The collecting step (S73) is a step in which the light irradiated in the irradiation step (S71) is collected by the collecting module. The gas pocket 201 and the sample in the detection step S75 to be described later by allowing the light to pass through the sample S or to be collected after the irradiated light is reflected from the gas pocket 201 and the sample S of the sample packet. It is to obtain detection data for (S).

The detection step (S75) is a step of analyzing the light collected by the collection module to detect data on the positions of the gas pocket 201 and the sample S in the sample packet.

The sample analysis system using the gas pocket of the present invention may be configured to perform an analysis operation on the sample when data on the positions of the gas pocket 201 and the sample S are detected in the detection step S75. have.

According to the present invention, the sample supplied from the sample forming unit and configured to be transported by the ultrapure solution is supplied between the gas pockets and transferred between the gas pockets, so that the sample is diffused into the ultrapure solution by the gas pockets and the sample There is an effect configured to prevent the concentration from being lowered, and at the same time to prevent the lowering of the analysis reliability.

In the above description, various embodiments of the present invention have been presented and described, but the present invention is not necessarily limited thereto. It can be seen that branch substitutions, transformations and alterations are possible.

10: transfer line
100: carrier supply unit 101: ultrapure solution
120: ultrapure water control valve 130: ultrapure water check valve
200: gas supply unit 201: gas pocket
210: gas supply line 220: gas generating module
230: gas check valve
300: sample forming unit 301: sample
310: first sample supply line 320: second sample supply line
330: third sample supply line
340: sample forming module
342: syringe pump 343: sample control valve
344: loop module
400: control unit 500: analysis unit
600: photosensor unit
610: first photosensor 620: second photosensor

Claims (11)

a carrier supply unit 100 configured to supply an ultra-pure water (UPW) 101 through the transfer line 10;
a gas supply unit 200 for supplying gas to the transfer line 10 to form a gas pocket 201; and
In a state in which the ultrapure aqueous solution 101 is supplied by the carrier supply unit 100, the sample 301 is supplied to the transfer line 10, and the ultrapure aqueous solution 101 and the sample 301 are mixed. (S) includes a sample forming unit 300 to be formed,
By selectively supplying the ultrapure solution 101, the gas pocket 201, and the sample S, the sample packet consisting of the gas pocket 201 - the sample (S) - the gas pocket 201 is transferred,
In the sample forming unit 300,
a first sample supply line 310 branched from the transfer line 10; and
a sample forming module 340 configured to supply a sample (S) in which the ultrapure aqueous solution 101 and the sample 301 are mixed through the first sample supply line 310;
is included,
In the sample forming unit 300,
a second sample supply line 320 connected to the first sample supply line 310 and configured to supply the sample 301; and
a third sample supply line 330 connected to the first sample supply line 310 and the second sample supply line 320;
is included,
In the sample forming module 340,
a syringe pump 342 installed in the third sample supply line 330 and configured to drain and supply the ultrapure aqueous solution 101 and the sample 301; and
The first sample supply line 310 , the second sample supply line 320 and the third sample supply line 330 are installed between the first sample supply line 310 and the second sample supply line 320 . and a sample control valve 343 configured to open and close the third sample supply line 330;
characterized in that it is included,
Sample analysis system using gas pockets.
a carrier supply unit 100 configured to supply an ultra-pure water (UPW) 101 through the transfer line 10;
a gas supply unit 200 for supplying gas to the transfer line 10 to form a gas pocket 201; and
A sample forming unit 300 configured to supply a sample S including a sample 301 to the transfer line 10 is included,
Selective supply control of the ultrapure water solution 101, the gas pocket 201, and the sample S is made so that the sample packet consisting of the gas pocket 201 - the sample (S) - the gas pocket 201 is transferred doing,
Sample analysis system using gas pockets.
3. The method of any one of claims 1 and 2,
one or a plurality of photosensor units 600 configured to detect the position of the gas pocket 201 in the sample packet transferred through the transfer line 10 to determine the position of the sample S in the sample packet;
characterized in that it is included,
Sample analysis system using gas pockets.
3. The method of any one of claims 1 and 2,
a control unit 400 configured to control any one or a plurality of the carrier supply unit 100, the gas supply unit 200, and the sample forming unit 300;
characterized in that it is further included,
Sample analysis system using gas pockets.
5. The method of claim 4,
In the carrier supply unit 100,
It is installed in the transfer line 10 and configured to open and close the transfer line 10 according to the control of the control unit 400 to control the flow of the ultrapure aqueous solution 101 supplied to the transfer line 10 Ultrapure water control valve 120;
characterized in that it is included,
Sample analysis system using gas pockets.
5. The method of claim 4,
In the gas supply unit 200,
a gas supply line 210 branched from the transfer line 10; and
a gas generating module 220 configured to inject gas through the gas supply line 210 under the control of the controller 400; and
a gas check valve 230 installed in the gas supply line 210;
characterized in that it is included,
Sample analysis system using gas pockets.
delete delete According to claim 1,
In the sample forming module 340,
a loop module 344 configured to wait before injecting the sample 301 drained by the syringe pump 342 into the transfer line 10;
characterized in that it is included,
Sample analysis system using gas pockets.
In the sample analysis method using the sample analysis system using the gas pocket according to any one of claims 1 to 9,
A first ultrapure water supply step (S10) in which the ultrapure water solution 101 is supplied from the carrier supply unit 100;
A first gas supply step (S20) of stopping the supply of the ultrapure aqueous solution 101 supplied from the carrier supply unit 100, and supplying gas from the gas supply unit 200 to form a gas pocket 201;
A sample supply step (S30) in which the gas supplied from the gas supply unit 200 is stopped, and the ultrapure solution 101 and the sample 301 are supplied from the carrier supply unit 100 and the sample forming unit 300, respectively. ;
A mixing step (S40) in which the ultrapure aqueous solution 101 and the sample 301 supplied from the carrier supply unit 100 and the sample forming unit 300, respectively, are mixed with each other to form a sample (S);
The supply of the ultrapure aqueous solution 101 and the sample 301 supplied from the carrier supply unit 100 and the sample forming unit 300, respectively, is stopped, and the gas is supplied from the gas supply unit 200 to form a gas pocket 201 a second gas supply step (S50); and
A second ultrapure water supply step (S60) of stopping the supply of the gas supplied from the gas supply unit 200, and transferring the sample (S) by supplying the ultrapure aqueous solution 101 from the carrier supply unit 100;
characterized in that it is included,
A method for analyzing a sample using a sample analysis system.
11. The method of claim 10,
Gas pocket 201 - sample (S) - gas pocket 201 by the first gas supply step (S20), sample supply step (S30), mixing step (S40) and second gas supply step (S50) After the made sample packet is transferred by the ultrapure water solution 101 supplied in the second ultrapure water supply step (S60),
An irradiation step (S71) of irradiating light to the transfer line 10 by the irradiation module of the photosensor unit 600 consisting of one or a plurality;
a collecting step (S73) in which the light irradiated in the irradiation step (S71) is collected by a collecting module; and
a detection step (S75) of analyzing the light collected by the collection module to detect data on the respective positions of the gas pocket 201 and the sample S in the sample packet (S75);
characterized in that it is included,
A method for analyzing a sample using a sample analysis system.

Images