KR102332792B1 - Bio-sensing device - Google Patents

Abstract

The present invention provides a first gate and a second gate extending apart from each other on a substrate; a first electrode and a second electrode disposed on one side of the first gate and spaced apart from each other; a sensing film that is a channel between the first electrode and the second electrode; and a passivation pattern formed on a substrate and having an open region in which a portion of the first gate is exposed so that a receptor capable of binding to a target material can be attached to the other side of the first gate. , to provide a bio-sensing device.

Description

Bio-sensing device

The present invention relates to a biosensing device, and more particularly, to a biosensing device having an electrode structure.

The test method used for disease diagnosis is mainly based on color development by enzymatic reaction, fluorescence, etc., but recently, a method using an immune test using an immune reaction between an antigen and an antibody is also used. In the conventional immunoassay, an optical measurement method in which a light label is coupled to an enzyme catalyzed reaction has been most used. These methods mainly require complicated procedures that can be performed by skilled researchers mainly in laboratories, and have disadvantages in that the apparatus for analysis is an expensive and large-scale apparatus, and the analysis time is long.

As a related prior art, there is Korean Patent Publication No. KR20110116461A (published on October 26, 2011, title of the invention: Immunoassay diagnostic apparatus and immunoassay method using the same).

An object of the present invention is to solve various problems including the above problems, and an object of the present invention is to provide a biosensing device capable of improving sensitivity without being contaminated by a target material. However, these problems are exemplary, and the scope of the present invention is not limited thereto.

To solve the above problems, there is provided a biosensing device according to an aspect of the present invention. The biosensing device includes a first gate and a second gate extending apart from each other on a substrate; a first electrode and a second electrode disposed on one side of the first gate and spaced apart from each other; a sensing film that is a channel between the first electrode and the second electrode; and a passivation pattern formed on the substrate and having an open region in which a portion of the first gate is exposed so that a receptor capable of binding to a target material can be attached to the other side of the first gate. .

In the biosensing device, the open region of the passivation pattern may be formed to be spaced apart from the sensing layer so that the sensing layer is not exposed.

In the biosensing device, the first gate may be integrally connected under the sensing layer under the open region and may extend.

In the biosensing device, the first gate and the second gate may be disposed to have a separation distance through which a capacitance can be formed.

In the biosensing device, the first gate and the second gate may be arranged to extend in parallel with each other.

In the biosensing device, the first gate and the second gate may be disposed on the same plane.

In the biosensing device, the first gate and the second gate may each extend toward each other, but may include protruding patterns alternately disposed therebetween.

In the biosensing device, the sensing film may be made of a material having a variable resistance depending on the receptor and the target material coupled thereto.

In the biosensing device, the receptor is attached to the sensing membrane by a functional group, and may be any one or more selected from the group consisting of an enzyme substrate, a ligand, an amino acid, a peptide, a protein, a nucleic acid, a lipid, and a carbohydrate.

In the biosensing device, the functional group may be at least one selected from the group consisting of an amine group, a carboxyl group, and a thiol group.

In the biosensing device, the target material may be at least one selected from the group consisting of proteins, nucleic acids, oligosaccharides, amino acids, carbohydrates, dissolved gas, sulfur oxide gas, nitric oxide gas, residual pesticides, heavy metals, and environmentally harmful substances.

According to some embodiments of the present invention made as described above, it is possible to provide a biosensing device capable of improving sensitivity without being contaminated by a target material. Of course, the scope of the present invention is not limited by these effects.

1 is a diagram illustrating a partial configuration of a biosensing device according to an embodiment of the present invention.
2 is a diagram illustrating a cross-section taken along line AA′ of the biosensing device according to an embodiment of the present invention.
3 is a diagram illustrating a cross-section of a biosensing device according to a comparative example of the present invention.
4 is a graph illustrating a relationship between a gate applied voltage and a channel current in a biosensing device according to an embodiment of the present invention.
5 is a diagram illustrating a partial configuration of a biosensing device according to a modified embodiment of the present invention.

Hereinafter, various embodiments of the present invention will be exemplarily described with reference to the accompanying drawings. Throughout the specification, when it is stated that one component, such as a film, pattern, region, or substrate, is located "on" another component, the one component is directly in contact with or "on" the other component. , it can be interpreted that there may be other elements interposed therebetween. On the other hand, when it is stated that one element is located "directly on" another element, it is construed that other elements interposed therebetween do not exist.

In the drawings, variations of the illustrated shape can be envisaged, for example depending on manufacturing technology and/or tolerances. Accordingly, embodiments of the spirit of the present invention should not be construed as limited to the specific shape of the region shown in the present specification, but should include, for example, changes in shape caused by manufacturing. In addition, in the drawings, the thickness or size of each layer may be exaggerated for convenience and clarity of description. Like numbers refer to like elements.

The biosensing device according to an embodiment of the present invention may be used as a test device used for disease diagnosis, and may be utilized as a detection device using an immune reaction between an antigen and an antibody depending on the type of the sensing membrane and the receptor. In this case, since the electrical measurement result is used, a complicated procedure is not required in the analysis process, the apparatus for analysis is relatively inexpensive, and the analysis time is not required for a long time.

1 is a diagram illustrating a partial configuration of a biosensing device according to an embodiment of the present invention, and FIG. 2 is a diagram illustrating a cross-section taken along line AA′ of the biosensing device according to an embodiment of the present invention am. 3 is a diagram illustrating a cross-section of a biosensing device according to a comparative example of the present invention. In particular, FIG. 1 is a diagram schematically illustrating a relative arrangement relationship of a first gate, a second gate, an open region, a first electrode, a second electrode, and a sensing layer on a plane.

First, referring to FIGS. 1 and 2 , the biosensing device includes a first gate 112 and a second gate 114 extending apart from each other on a substrate 105 ; a first electrode 140 and a second electrode 150 disposed on one side of the first gate 112 and spaced apart from each other; a sensing film 160 serving as a channel between the first electrode 140 and the second electrode 150; And formed on the substrate 105, a portion of the first gate 112 is exposed so that a receptor 195 capable of binding to a target material can be attached to the other side of the first gate 112 is open (open) ) having a region 185 , a passivation pattern 180 .

Furthermore, the biosensing device may further include a first insulating layer 130 formed on the first gate 112 to secure electrical insulation of the first gate 112 . The first insulating layer 130 may be interposed between the first electrode 140 , the second electrode 150 , and the sensing layer 160 and the first gate 112 . The first insulating layer 130 may be, for example, an aluminum oxide (Al ₂ O ₃ ) layer.

In addition, the biosensing device may further include a second insulating layer 111 between the first gate 112 and the substrate 105 . The second insulating layer 111 may be understood as a gate insulating layer. For example, when the substrate 105 is a silicon substrate, the second insulating layer 111 may be a _{silicon oxide (SiO 2 ) layer.}

The first electrode 140 may be any one of the source electrode and the drain electrode, and in this case, the second electrode 150 may be the other one of the source electrode and the drain electrode. For example, the first electrode 140 and the second electrode 150 may be a source electrode and a drain electrode, respectively. The first electrode 140 and the second electrode 150 may have, for example, a stacked structure of a titanium (Ti) layer and a gold (Au) layer, respectively.

The open region 185 of the passivation pattern 180 may be formed to be spaced apart from the sensing layer 160 so that the sensing layer 160 is not exposed. The open region 185 may be formed by removing a portion of the passivation pattern 180 so that a portion of the first gate 112 is exposed.

The first gate 112 may be integrally connected under the sensing layer 160 under the open region 185 and may extend. That is, the first electrode 140 , the second electrode 150 , and the sensing layer 160 are disposed on one side of the first gate 112 , and the open region 185 is on the other side of the first gate 112 . can be placed in The first gate 112 may have, for example, a stacked structure of a titanium (Ti) layer and a gold (Au) layer. The first gate 112 may be a floating gate to which a voltage is not directly applied from the outside and is not grounded.

The receptor 195 may be attached to the other side of the first gate 112 exposed by the open region 185 . The receptor 195 may be attached on the first gate 112 by a functional group. The receptor 195 may be, for example, any one or more selected from the group consisting of an enzyme substrate, a ligand, an amino acid, a peptide, a protein, a nucleic acid, a lipid, and a carbohydrate. Meanwhile, the functional group may be, for example, at least one selected from the group consisting of an amine group, a carboxyl group, and a thiol group. In addition, the target material may be, for example, at least one selected from the group consisting of proteins, nucleic acids, oligosaccharides, amino acids, carbohydrates, dissolved gas, sulfur oxide gas, nitric oxide gas, residual pesticides, heavy metals and environmentally harmful substances. have.

The sensing layer 160 may be made of a material whose resistance may vary depending on the receptor 195 and a target material coupled thereto. The material of the sensing film 160 may include, for example, carbon nanotubes or graphene.

When the liquid sample containing the target material is provided in the open region 185 , as the target material is coupled to the receptor 195 , a change in the charge density of the surface portion of the first gate 112 occurs. Since the first gate 112 is integrally connected under the sensing film 160 under the open region 185 and extends, the surface portion of the first gate 112 generated under the open region 185 is The change in charge density may change the electrical characteristics of the sensing layer 160 through the first gate 112 integrally connected to the lower portion of the sensing layer 160 . As a result, by measuring the change in the channel current between the first electrode 140 and the second electrode 150 induced by the change in electrical properties (eg, electrical conductivity) of the sensing film 160 , the concentration of the target material can be quantified.

However, when the detection film 160 is in direct contact with the liquid sample containing the target material, the detection film 160 is contaminated by the liquid sample, thereby making it difficult to accurately measure electrical characteristics. For example, referring to FIG. 3 showing a biosensing device according to a comparative example of the present invention, a configuration in which the receptor 195 is directly attached to the sensing film 160 is introduced, and the sensing film 160 is the target. Direct contact with the liquid sample containing the substance 197 is possible.

In the biosensing device according to an embodiment of the present invention, the sensing film 160 is not exposed to the open region 185 into which the liquid sample containing the target material is injected, and the sensing film 160 has a passivation pattern 180 . This problem can be fundamentally prevented because it has a structure that is protected from the outside.

Referring to FIG. 3 , in the biosensing device according to the comparative example of the present invention, a gate electrode 112 , a source electrode 140 , and a drain electrode 150 are disposed on a substrate 105 , and the source electrode 140 and A sensing layer 160 serving as a channel is disposed between the drain electrodes 150 . The receptor 195 is directly attached to the sensing film 160 . As the target material 197 binds to the receptor 195 , the electrical characteristics of the sensing film 160 change, and by measuring the change in the channel current between the source electrode 140 and the drain electrode 150 induced by this change, the target The concentration of substance 197 can be quantified. However, since a predetermined voltage is applied to the gate electrode 112 shown in FIG. 3 , the effect on the channel current by the gate electrode 112 may be large, and thus there may be a limit to precise measurement. On the contrary, since the first gate 112 shown in FIG. 1 is a floating gate, it is possible to minimize the influence on the channel current, thereby enabling precise measurement.

Referring back to FIG. 1 , in the biosensing device according to an embodiment of the present invention, the first gate 112 and the second gate 114 are disposed to have a separation distance d through which a capacitance can be formed. can Furthermore, the first gate 112 and the second gate 114 may be disposed to extend in parallel with each other, and the first gate 112 and the second gate 114 may be disposed on the same plane. The first gate 112 and the second gate 114 may have, for example, a stacked structure of a titanium (Ti) layer and a gold (Au) layer, respectively.

The first gate 112 and the second gate 114 are further provided to be spaced apart from the first gate 112 in which the first electrode 140 , the second electrode 150 , and the sensing film 160 are positioned. A capacitance may be formed between the two gates 114 to increase the sensitivity of the biosensing device.

4 is a graph illustrating a relationship between a gate applied voltage and a channel current in a biosensing device according to an embodiment of the present invention.

Referring to FIG. 4 , it can be understood that the sensitivity of the biosensing device is increased in the R2 region than in the R1 region. The R1 region corresponds to the biosensing device having only the first gate 112 , and the R2 region corresponds to the biosensing device including the above-described first gate 112 and the second gate 114 .

5 is a diagram illustrating a partial configuration of a biosensing device according to a modified embodiment of the present invention.

Referring to FIG. 5 , in the biosensing device according to a modified embodiment of the present invention, the first gate 112 and the second gate 114 each extend toward each other, but protrusion patterns 113 are alternately arranged. can be provided in between. The protrusion pattern 113 includes a first protrusion pattern 112a extending from the side surface of the first gate 112 in the direction of the second gate 114 and the first gate 112 direction from the side surface of the second gate 114 . It may include a second protruding pattern 114a that extends. The first protrusion pattern 112a is connected to the first gate 112 and spaced apart from the second gate 114 , and the second protrusion pattern 114a is connected to the second gate 114 and connected to the first gate 112 . is spaced apart from the The plurality of first protruding patterns 112a and the plurality of second protruding patterns 114a may each have a comb shape, and the first protruding pattern 112a and the second protruding pattern 113 in the protruding pattern 113 may each have a comb shape. The protrusion patterns 114a are alternately disposed to alternate with each other.

The present inventors have confirmed that the sensitivity of the biosensing device can be further increased by the capacitance formed between the first gate 112 and the second gate 114 by adopting this configuration. That is, it was confirmed that the protrusion pattern 113 shown in FIG. 5 can be easily moved from the R1 region shown in FIG. 4 to the R2 region by introducing the protrusion pattern 113 shown in FIG. 5 .

Other components shown in FIG. 5 are the same as those of FIG. 1 , and thus a description thereof will be omitted.

Although the present invention has been described with reference to the embodiments shown in the drawings, which are merely exemplary, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

105: substrate
112: first gate
114: second gate
140: first electrode
150: second electrode
160: sensing film
180: passivation pattern
185: open area
195 : Receptor

Claims (11)

a first gate and a second gate extending apart from each other on the substrate;
a protrusion pattern positioned between the first gate and the second gate and extending toward each other but alternately disposed;
a first electrode and a second electrode disposed on one side of the first gate and spaced apart from each other;
a sensing film that is a channel between the first electrode and the second electrode; and
A passivation pattern formed on a substrate and having an open region in which a portion of the first gate is exposed so that a receptor capable of binding to a target material can be attached to the other side of the first gate;
The protrusion pattern includes a first protrusion pattern extending from a side surface of the first gate to a second gate direction and a second protrusion pattern extending from a side surface of the second gate in the first gate direction, wherein the first protrusion pattern includes the first protrusion pattern. It is connected to the gate and spaced apart from the second gate, the second protruding pattern is connected to the second gate and disposed to be spaced apart from the first gate, and the plurality of first protruding patterns and the plurality of second protruding patterns each have a comb-shaped comb. (comb) shape, in which the first protrusion pattern and the second protrusion pattern in the protrusion pattern are alternately arranged to alternate with each other,
The sensing film is made of a material having a variable resistance depending on the receptor and the target material coupled thereto, and is protected from the outside by a passivation pattern,
The open region is formed to be spaced apart from the sensing film so that the sensing film is not exposed in the open region into which the liquid sample containing the target material is injected,
The material of the sensing film includes carbon nanotubes or graphene,
The first gate exposed to the open region has a stacked structure of a titanium (Ti) layer and a gold (Au) layer,
The first gate is integrally connected from the lower portion of the open region to the sensing film and extends,
bio-sensing device.
delete delete The method of claim 1,
characterized in that the first gate and the second gate are arranged to have a separation distance through which a capacitance can be formed,
bio-sensing device.
The method of claim 1,
characterized in that the first gate and the second gate are arranged to extend in parallel with each other,
bio-sensing device.
The method of claim 1,
characterized in that the first gate and the second gate are disposed on the same plane,
bio-sensing device.
delete delete The method of claim 1,
The receptor is attached to the sensing membrane by a functional group, and at least one selected from the group consisting of an enzyme substrate, a ligand, an amino acid, a peptide, a protein, a nucleic acid, a lipid, and a carbohydrate, a biosensing device.
10. The method of claim 9,
The functional group is at least one selected from the group consisting of an amine group, a carboxyl group, and a thiol group.
The method of claim 1,
The target material is at least one selected from the group consisting of proteins, nucleic acids, oligosaccharides, amino acids, carbohydrates, dissolved gas, sulfur oxide gas, nitric oxide gas, residual pesticides, heavy metals, and environmentally harmful substances, a biosensing device.

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