KR102302266B1 - PVD plating method of mold using chromium nitride - Google Patents

Abstract

The present invention relates to a PVD plating method of a mold using chromium nitride (CrN), which may extend a lifetime of a mold by using chromium nitride coating after cutting an exterior product mold core wire, comprising: a first process which mounts an object on a jig; a second process which inserts the jig in a sealed chamber and deposits chromium nitride inside the chamber on a surface of the object to form a film; and a third process which extracts a finished product by wire-cutting a film-formed part among a part of the object into a specified shape. In the second process, a remaining part except the part of the object is covered with a protector, so that film coating is processed only on the part, which is not covered with the protector, among the surface of the object. According to the present invention, the chromium nitride coating has high elastic force, excellent adhesion strength, remarkable oxidation resistance, and high hardness compared to the chromium coating.

Description

PVD plating method of mold using chromium nitride

The present invention relates to a PVD plating method of a mold using chromium nitride (CrN), which enables the lifespan of a mold to be extended by using a chromium nitride coating after cutting the core wire of a mold for exterior products.

Chromium coatings are widely used as surface coatings for various articles due to their high hardness values, attractive appearance, and good wear and corrosion resistance.

Chromium deposition is accomplished by electroplating from an electrolytic bath containing hexavalent chromium ions. In reality, this process is very toxic.

Accordingly, many efforts have been made to develop alternative coatings and coating processes to replace hexavalent chromium in electroplating.

However, an industrial-scale process that provides a hard, corrosion-resistant Cr deposit through an aqueous trivalent chromium solution is still difficult to achieve.

The chrome plating process cannot produce a coating having a Vickers microhardness value of more than 1,500 HV measured according to the SFS-EN ISO 4516 standard.

Additional drawbacks of known chromium-based coatings are inadequate wear and corrosion resistance. Chrome coatings are very weak in properties. Cracks and micro-cracks in the chromium coating increase with the thickness of the coating, reducing the corrosion resistance of the coating.

Deposition of nickel by electroless plating or electroplating has also been proposed as an alternative to hard chromium. Disadvantages of nickel plating include defects in hardness, coefficient of friction and wear resistance. Nickel plating and chrome are not interchangeable coatings. Since they both have unique deposit properties, each has distinct uses.

Relevant prior art discloses patent documents WO 2015/107256 A1, WO 2015/107255 A1, WO 2014/111624 A1 and WO 2014/111616 A1 in which chromium-containing coatings are described.

However, the conventional plating method of chromium coating has a problem of causing pollution by generating hexavalent chromium as a by-product.

The present invention has been devised to solve the problems of the prior art, and by coating an object using a chromium nitride coating (CrN Coating) with excellent high temperature corrosion resistance, hexavalent chromium is generated as a by-product to cause pollution. An object of the present invention is to provide a PVD plating method of a mold using chromium nitride (CrN) that can be improved and can be partially coated on a specific object by applying a wire cutting method to reduce costs.

The above-described object of the present invention, step 1 of mounting the object to the jig; a second step of loading a jig into a closed chamber and depositing chromium nitride on the surface of an object in the chamber to form a film; a third step of extracting the finished product by wire-cutting the portion where the film is formed among a portion of the object in a specified shape; and, in the second step, covering the remaining portion except for a portion of the object with a protective material so that the film coating is protected from the surface of the object It can be achieved by the PVD plating method of the mold using chromium nitride (CrN) so that it can be carried out only on the area not covered with ash.

The chamber of the second process is in a vacuum state, and it is characterized in that the deposition is carried out at 300°C to 500°C.

The chromium nitride is characterized in that it is deposited by magnetron sputtering.

The magnetron sputtering is characterized in that two coatings are produced with different DC bias voltages under the condition that a total pressure of 0.3 Pa (2 mTorr), a current of 3.0 A, and an OEM controlled nitrogen (N2) flow are supplied.

The different DC bias voltage is characterized in that 70 V or 120 V.

The deposition rate is characterized in that 18 ~ 28 nm / min.

The thickness of the film is 2-3㎛, the hardness is 1600-2000 Hv, it is characterized in that the friction coefficient is 0.3-0.5.

The temperature of the coating is characterized in that 400 ~ 500 ℃.

Chromium nitride is produced by plasma-beam sputtering, pulsed laser deposition, high-temperature reaction with chromium oxide or chromate using ammonia and hydrocarbons, spark discharge using liquid nitrogen, vacuum It is formed by the solid state metathesis of reacting chromium chloride (CrCl3) and lithium nitride (Li3N) in the ampoule, and the ammonolysis method of synthesizing chromium sulfide (Cr2S3) and ammonia at 725 ° C. characterized in that

a filter member having a magnetron sputtering device, a DC sputtering device, an arc ion plating device, and a gas supply tank connected to and mounted around the chamber, and installed on the tube to filter out impurities; and a heat insulating part formed on the wall surface of the chamber.

The filter member has a connector formed at the lower portion, one end is connected to the water supply pipe, a middle plate formed with a plurality of fastening grooves is formed horizontally therein, and a pair of slide grooves are recessed so that a pair of slide grooves are spaced apart from each other along the circumferential direction on the inner surface, , An opening is formed in the upper portion, a cover is coupled to the opening and sealed, the other end of the tube is connected to the cover, a filter is accommodated therein, and a first partition plate and a second partition for supporting and fixing the filter It is characterized in that the plates are cross-linked.

The heat insulating part is installed to be in contact with the wall of the chamber, the insulating board; a concave-convex plate having a plurality of wedges projecting on one side so as to be inserted into the insulation board and having a partition frame on the other side; a coupling plate coupled to the partition frame to form a plurality of charging space portions, and through which a plurality of injection guide holes are formed; a foam material filled in the charging space through the injection guide hole when the coupling plate is coupled to the partition frame; and a cover board fixed to the coupling plate with an adhesive to cover the coupling plate to prevent exposure.

According to the present invention, the chromium nitride coating layer has high elasticity, excellent adhesion strength, excellent oxidation resistance, and high hardness compared to the chromium plating layer, and exhibits very excellent performance even under severe friction conditions such as high temperature, high speed and high pressure.

It is effective in manufacturing very high-quality products because it has excellent abrasion resistance and oxidation resistance even for tools and molds that are expected to reach hundreds of degrees locally in a mold used at a high temperature or in contact with a workpiece.

1 is a flowchart showing a PVD plating method of a mold using chromium nitride (CrN) according to the present invention;
2 is a view showing a PVD plating apparatus of a mold using chromium nitride (CrN) according to the present invention;
Figure 3 is a view showing the 'object (T)' in Figure 2,
4 is a cross-sectional view showing an example of installing a 'filter member' in the PVD plating apparatus of a mold using chromium nitride (CrN) according to the present invention;
5 is an exploded perspective view of the 'filter member' of the PVD plating apparatus of the mold using chromium nitride (CrN) according to the present invention;
6 is a view showing a state in which the position fixing member is applied at the intersection of the first partition plate and the second partition plate in the 'filter member' of the PVD plating apparatus of the mold using chromium nitride (CrN) according to the present invention.
7 is an exploded perspective view showing the 'insulation part' of the PVD plating apparatus of the mold using chromium nitride (CrN) according to the present invention;
FIG. 8 is a combined cross-sectional view of FIG. 7 .

Hereinafter, embodiments will be described in detail with reference to the accompanying drawings. However, since various changes may be made to the embodiments, the scope of the patent application is not limited or limited by these embodiments. It should be understood that all modifications, equivalents and substitutes for the embodiments are included in the scope of the rights.

Specific structural or functional descriptions of the embodiments are disclosed for purposes of illustration only, and may be changed and implemented in various forms. Accordingly, the embodiments are not limited to a specific disclosure form, and the scope of the present specification includes changes, equivalents, or substitutes included in the technical spirit.

Although terms such as first or second may be used to describe various elements, these terms should be interpreted only for the purpose of distinguishing one element from another. For example, a first component may be termed a second component, and similarly, a second component may also be termed a first component.

When a component is referred to as being “connected to” another component, it may be directly connected or connected to the other component, but it should be understood that another component may exist in between.

The terms used in the examples are used for description purposes only, and should not be construed as limiting. The singular expression includes the plural expression unless the context clearly dictates otherwise. In the present specification, terms such as “comprise” or “have” are intended to designate that a feature, number, step, operation, component, part, or combination thereof described in the specification exists, but one or more other features It should be understood that this does not preclude the existence or addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the embodiment belongs. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with the meaning in the context of the related art, and should not be interpreted in an ideal or excessively formal meaning unless explicitly defined in the present application. does not

In addition, in the description with reference to the accompanying drawings, the same components are given the same reference numerals regardless of the reference numerals, and the overlapping description thereof will be omitted. In the description of the embodiment, if it is determined that a detailed description of a related known technology may unnecessarily obscure the gist of the embodiment, the detailed description thereof will be omitted.

Advantages and features of the present invention and methods of achieving them will become apparent with reference to the embodiments described below in detail in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be embodied in various different forms, only these embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention belongs It is provided to fully inform the possessor of the scope of the invention, and the present invention is only defined by the scope of the claims.

In the embodiments of the present invention, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. have meaning Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning in the context of the related art, and unless explicitly defined in an embodiment of the present invention, an ideal or excessively formal meaning is not interpreted as

The shapes, sizes, proportions, angles, numbers, etc. disclosed in the drawings for explaining the embodiments of the present invention are exemplary, and thus the present invention is not limited to the illustrated matters. In addition, in describing the present invention, if it is determined that a detailed description of a related known technology may unnecessarily obscure the subject matter of the present invention, the detailed description thereof will be omitted. When 'include', 'have', 'consist', etc. mentioned in this specification are used, other parts may be added unless 'only' is used. When a component is expressed in the singular, the case in which the plural is included is included unless otherwise explicitly stated.

In interpreting the components, it is interpreted as including an error range even if there is no separate explicit description.

In the case of a description of the positional relationship, for example, when the positional relationship of two parts is described as 'on', 'on', 'on', 'beside', etc., 'right' Alternatively, one or more other parts may be positioned between the two parts unless 'directly' is used.

Reference to an element or layer “on” another element or layer includes any intervening layer or other element directly on or in the middle of another element. Like reference numerals refer to like elements throughout.

The size and thickness of each component shown in the drawings are illustrated for convenience of description, and the present invention is not necessarily limited to the size and thickness of the illustrated component.

Each feature of the various embodiments of the present invention may be partially or wholly combined or combined with each other, and technically various interlocking and driving are possible, as will be fully understood by those skilled in the art, and each embodiment may be independently implemented with respect to each other, It may be possible to implement together in a related relationship.

Among the accompanying drawings, FIG. 1 is a flowchart showing a PVD plating method of a mold using chromium nitride (CrN) according to the present invention, and FIG. 2 is a view showing a PVD plating apparatus of a mold using chromium nitride (CrN) according to the present invention , FIG. 3 is a view showing the object T in FIG. 2, and FIG. 4 is a cross-sectional view showing an example of installing a 'filter member' in the PVD plating apparatus of a mold using chromium nitride (CrN) according to the present invention, FIG. 5 is an exploded perspective view of the 'filter member' of the PVD plating apparatus of the mold using chromium nitride (CrN) according to the present invention, and FIG. 6 is the 'filter member of the PVD plating apparatus of the mold using chromium nitride (CrN) according to the present invention ', a view showing a state in which the position fixing member is applied to the intersection of the first and second partition plates in ', FIG. 7 is a 'insulation part of the PVD plating apparatus of the mold using chromium nitride (CrN) according to the present invention An exploded perspective view showing ', FIG. 8 is a combined cross-sectional view of FIG. 7 .

As shown in FIG. 1, the PVD plating method of a mold using chromium nitride (CrN) according to the present invention according to the present invention comprises: 1 step (S1) of mounting an object (T) to a jig (Z); A second step (S2) of loading the jig (Z) into the sealed chamber (4) and depositing chromium nitride on the surface of the object (T) in the chamber (4) to form a film; 3 process (S3) of extracting the finished product by wire-cutting the portion where the film is formed in a specified shape; including, In the second process (S2), the remaining part except for a part of the object (T) is covered with a protective material (C) to form a film The coating may be applied only to the portion T-2 that is not covered with the protective material C among the surface of the object T.

The object T is mounted on the jig Z. Then, the jig (Z) is charged into the sealed chamber (4). A film is formed by depositing chromium nitride on the surface of the object T in the chamber 4 .

The jig (Z) may be provided in a rotatable form of rotation and revolution, and may improve process efficiency by enabling simultaneous operation of a plurality of objects (T) as necessary.

The object T is a metal or ceramic material, and may be a tool, a mold, an automobile, a machine part, etc., and various other parts may be applied.

A magnetron sputtering device 41 , a DC sputtering device 42 , an arc ion plating device 43 , a gas supply tank 44 , etc. may be connected to the periphery of the chamber 4 through the tube body P and mounted thereon.

Among them, any one of the DC sputtering apparatus 42 and the arc ion plating apparatus 43 may be omitted if necessary.

As a supply gas for sputtering, any one of argon (Ar) and nitrogen (N) or a mixed gas of one or more may be used. The supply flow rate and supply rate of the supply gas may be controlled by the gas flow controller 45 disposed between the gas supply tank 44 and the chamber 4 .

The film is deposited on the surface of the object T using a predetermined deposition method, preferably by magnetron sputtering.

That is, it may be formed by chemical bonding with a gaseous non-metal containing nitrogen, which is pre-injected by injecting chromium, which is a transition metal, by sputtering.

The film has a three-dimensional microstructure in which nanoparticles are mixed in an amorphous matrix structure.

According to an example, the chamber of step 2 (S2) is in a vacuum state, and is deposited as PVD at 300°C to 500°C.

If the temperature is less than 300 ℃, nitridation is not made, and if it exceeds 500 ℃, there is a risk of thermal deformation.

The magnetron sputtering is such that two coatings are produced with different DC bias voltages under the condition that a total pressure of 00.3 Pa (2 mTorr), a current of 3.0 A, and an OEM controlled nitrogen (N2) flow are supplied.

The different DC bias voltage is 70 V or 120 V.

The deposition rate is 18-28 nm/min.

According to the present invention described above, the thickness of the film is 2-3 μm, the hardness is 1600 to 2000 Hv, and the friction coefficient is 0.3 to 0.5.

When the thickness of the film is less than 2 μm, the effect of improving hardness and abrasion properties may be insignificant because the thickness is too thin.

When the thickness of the film exceeds 3 μm, there is a fear that a problem with the stability of the coating may occur, and the cost may become excessive.

Preferably, the temperature of the coating is 400 ~ 500 ℃.

Chromium nitride is produced by plasma-beam sputtering, pulsed laser deposition, high-temperature reaction with chromium oxide or chromate using ammonia and hydrocarbons, spark discharge using liquid nitrogen, vacuum It is formed by solid state metathesis in which chromium chloride (CrCl3) and lithium nitride (Li3N) are reacted in the ampoule, and ammonolysis method in which chromium sulfide (Cr2S3) and ammonia are synthesized at 725 ° C. .

A finished product is extracted by wire-cutting a portion of the object (T) where the film is formed in a specified shape.

In wire cutting, electric discharge is generated between a moving wire electrode and a workpiece, and the spark generated is cut using a saw blade. It is also called wire cut electric discharge machining.

Preferably, in the second step (S2), the remaining portion except for a portion of the object T is covered with the protective material 120 so that the film coating is performed only on the portion of the surface of the object T where the protective material 120 is not covered. let it be

By preventing coating on unnecessary parts in this way, the cost can be reduced, and the lifespan of the mold can be extended by intensively coating the necessary parts.

Meanwhile, according to another embodiment, as shown in FIGS. 4 to 6 , each tube body formed in the chamber 4 may include a filter member 10 provided with a filter for filtering impurities.

The filter member 10, the connector 11 is formed, one end of the tube body (P) connected, the middle plate is formed horizontally inside, the inner surface is recessed so that a pair of slide groove portions 12 are spaced apart from each other in the circumferential direction, an opening is formed in the upper part, and the cover 40 is coupled to the opening It is sealed, and the other end of the tube body (P) is connected to the cover (40),

The filter F is accommodated therein, and the first partition plate 20 and the second partition plate 30 are cross-coupled to support and fix the filter.

The first partition plate 20 has a first slide protrusion 21 , which is slidably fitted in the slide groove 12 , is formed to protrude on both sides, and slides to prevent interference with the second partition plate 30 . The first anti-interference guide groove 22 is recessed along the longitudinal direction on the upper side so as to be moved.

The second partition plate 30 has a second slide protrusion 31 , which is slidably fitted to the slide groove 12 , is formed to protrude on both sides, and slides to prevent interference with the first partition plate 20 on the lower side. The second anti-interference guide groove 32 is recessed on the lower side to move.

When the first partition plate 20 and the second partition plate 30 are slidably moved, the first slide protrusion 21 and the second slide protrusion 31 are respectively moved while being fitted in the slide groove part 12 .

And the concave-convex portion 12a is formed inside the slide groove portion 12 so that the first slide protrusion 21 and the second slide protrusion 31 are slidably moved.

Accordingly, it is possible to prevent the sliding movement of the first partition plate 20 and the second partition plate 30 without manipulation by an external force, as well as prevent the user from moving the first partition plate 20 and the second partition plate. It is possible to form a feeling of manipulation grip when moving the slide (30).

A cross-shaped fitting groove 51 is recessed in the axial direction at a portion where the first partition plate 20 and the second partition plate 30 intersect, and the position fixing member 50 is fitted to include;

An auxiliary elastic fitting portion 52 having a pressing groove portion 53 is formed on the circumferential surface of the positioning member 50 so as to be elastically and pressurized into the second partition plate 30 .

The width of the pressing groove (53) is preferably formed thinner than the thickness of the second partition plate (30).

When the fitting groove 51 of the positioning member 50 is fitted so as to match the portion where the first partition plate 20 and the second partition plate 30 intersect, the positioning member 50 is the first partition plate 20 ) and the second compartment plate 30 guides to prevent arbitrary movement, and the pressing groove 53 of the auxiliary elastic fitting portion 52 is forcibly fitted in the height direction of the second compartment plate 30, so that the position The fixing member 50 is prevented from being separated in a direction opposite to the direction in which the first partition plate 20 and the second partition plate 30 are fitted at the intersection.

Meanwhile, according to another embodiment, as shown in FIGS. 7 and 8 , a heat insulating part W may be formed on the wall surface of the chamber 4 so as not to lose heat to the outside.

The heat insulating part (W) is a heat insulating board 101 which is installed in contact with the outside of the wall surface of the chamber (4); A concave-convex plate 201 having a plurality of wedges 211 protruding on one side so as to be fitted to the insulation board 101 and having a partition frame 221 on the other side; a coupling plate 301 coupled to the partition frame 221 to form a plurality of charging space portions 311 and through which a plurality of injection guide holes 321 are formed; a foam material 401 filled in the charging space 311 through the injection guide hole 321 when the coupling plate 301 is coupled to the partition frame 221 ; and a cover board 501 fixed to the coupling plate 301 with an adhesive to cover the coupling plate 301 to prevent exposure.

The insulation board 101 is installed so that one side is contactable on the side panels 120 and 220 to block the heat transmitted from the outside of the building to the inside or from the inside of the wall of the chamber 4 to the outside.

The material of the insulation board 101 is not particularly limited, but it is advantageous that one or two of PE or PP are mixed to form a foamed resin having heat resistance and elasticity.

The concave-convex plate 201 has a plurality of wedges 211 protrudingly formed on one side so as to be forcibly fitted to the insulation board 101 , and a partition frame 221 is provided on the other side.

When the concave-convex plate 201 is pressed toward the insulating board 101 in a state where the concave-convex plate 201 and the insulating board 101 are matched, the wedge 211 is forcibly inserted into the insulating board 101, and the concave-convex plate 201 is It is mounted on the insulation board 101 .

Since a plurality of spaced spaces are formed between the insulation board 101 and the concave-convex plate 201, when hot or cold air from the outside of the building passes through the insulation board 101, the heat or cold air can stay to prevent inflow into the building. do.

A plurality of partition frames 221 are spaced apart from each other in the vertical direction on the uneven plate 201 to partition the charging space 311 to be described later. 201) may be elastically coupled.

The elastic coupling portion 231 is a through-hole portion 231a that is formed through the other side of the concave-convex plate 201 and a hook portion protruding from the partition frame 221 so as to be hookably fitted around the through-hole portion 231a ( 231b).

When the engaging hook part 231b is inserted into the through-hole part 231a, the engaging hook part 231b comes into contact with the inner circumferential surface of the through-hole part 231a and is retracted. The periphery of the through-hole portion 231a is caught and fixed.

The coupling plate 301 is coupled to the partition frame 221 to form a plurality of charging space portions 311 , and a plurality of injection guide holes 321 communicating with the charging space 311 are formed through the plurality of coupling plates.

The coupling plate 301 is formed in a flat plate shape, and the material is not limited and may be variously changed.

The coupling plate 301 may be slidably coupled to the partition frame 221 by the slide coupling part 331 .

The slide coupling portion 331 includes a slide groove portion 331a recessed in the partition frame 221 and a slide rail portion 331b protruding from the coupling plate 301 so as to be movably fitted into the slide groove portion 331a. do.

Accordingly, since the coupling plate 301 can be easily slide-assembled to the partition frame 221 , it is possible to improve the construction workability.

Concave-convex plate 201 can be prevented from deflection due to the load of the partition frame 221 by the deflection prevention reinforcing part 600 .

The anti-sag reinforcing part 600 is fixedly installed on the inner wall, is inserted into the fixing bracket 611 having a fastening hole part 611a and the slide groove part 331a, and when inserted into the slide groove part 331a, the uneven plate 201 and a fastening support bolt 620 fastened to the fastening hole 611a by sequentially passing through the insulating board 101 and the heat insulating board 101 .

Therefore, heat transfer can be blocked by forming a heat insulating part on the side panels 120 and 220 of each of the first accommodating cover 100 or the second accommodating cover 200, so that fire suppression can be safely and easily.

Although the embodiments of the present invention have been described in more detail with reference to the accompanying drawings, the present invention is not necessarily limited to these embodiments, and various modifications may be made within the scope without departing from the technical spirit of the present invention. . Therefore, the embodiments disclosed in the present invention are not intended to limit the technical spirit of the present invention, but to explain, and the scope of the technical spirit of the present invention is not limited by these embodiments. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not restrictive. The protection scope of the present invention should be construed by the following claims, and all technical ideas within the scope equivalent thereto should be construed as being included in the scope of the present invention.

Therefore, other implementations, other embodiments, and equivalents to the claims are also within the scope of the following claims.

Z: Jig T: Object
4: Chamber C: Protective material
41: magnetron sputtering device 42: DC sputtering device
43: arc ion plating device 44: gas supply tank
P: tube body 10: filter member
11: fastening groove 12: slide groove
20: first compartment plate 21: first slide projection
22: first interference prevention guide groove 30: second compartment plate
31: second slide projection 32: second interference prevention guide groove
40: cover 50: position fixing member
52: auxiliary elastic fitting part 53: pressing groove part
101: insulation board 201: uneven plate
301: bonding plate 401: foam material
501: cover board 600: anti-sag reinforcement part

Claims (3)

Step 1 of mounting the object on the jig;
a second step of loading a jig into a closed chamber and depositing chromium nitride on the surface of an object in the chamber to form a film;
3 steps of extracting the finished product by wire-cutting the portion where the film is formed among a portion of the object in a specified shape;
In the second step, the remaining part except for a part of the object is covered with a protective material so that the film coating can be performed only on the portion of the surface of the object that is not covered with the protective material,
The chamber of the second process is in a vacuum state, and chromium nitride is deposited at 300°C to 500°C,
The chromium nitride is deposited by magnetron sputtering,
A magnetron sputtering device, a DC sputtering device, an arc ion plating device, and a gas supply tank are connected to and mounted around the chamber,
a filter member provided with a filter installed on the tube body to filter out impurities;
Including a heat insulating portion formed on the wall surface of the chamber;
The filter element is
A connector is formed at the lower portion, one end is connected to the water supply pipe, a middle plate having a plurality of fastening grooves is formed horizontally therein, and a pair of slide grooves are recessed so as to be spaced apart from each other along the circumferential direction on the inner surface, and an opening in the upper part is formed, the cover is coupled to the opening and sealed, and the other end of the tube body is connected to the cover,
The filter is accommodated therein, and the first partition plate and the second partition plate for supporting and fixing the filter are cross-coupled,
the insulator
Insulation board installed to be in contact with the wall of the chamber;
a concave-convex plate having a plurality of wedges protruding on one side so as to be inserted into the insulation board and having a partition frame on the other side;
a coupling plate coupled to the partition frame to form a plurality of charging space portions, and through which a plurality of injection guide holes are formed;
a foam material filled in the charging space through the injection guide hole when the coupling plate is coupled to the partition frame;
a cover board fixed to the bonding plate with an adhesive to cover the bonding plate to prevent exposure;
PVD plating method of a mold using chromium nitride (CrN), characterized in that it comprises a. The method of claim 1,
The thickness of the film is 2-3 μm, the hardness is 1600-2000 Hv, and the friction coefficient is 0.3-0.5,
The magnetron sputtering allows two coatings to be produced with different DC bias voltages under the condition that a total pressure of 0.3 Pa (2 mTorr), a current of 3.0 A, and an OEM controlled nitrogen (N2) flow are supplied,
The PVD plating method of the mold using chromium nitride (CrN), characterized in that the different DC bias voltage is 70 V or 120 V. delete

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