KR102279275B9 - Printing Apparatus and Method for Forming Patterns Using the Same - Google Patents

Printing Apparatus and Method for Forming Patterns Using the Same

Info

Publication number
KR102279275B9
KR102279275B9 KR20140164528A KR20140164528A KR102279275B9 KR 102279275 B9 KR102279275 B9 KR 102279275B9 KR 20140164528 A KR20140164528 A KR 20140164528A KR 20140164528 A KR20140164528 A KR 20140164528A KR 102279275 B9 KR102279275 B9 KR 102279275B9
Authority
KR
South Korea
Prior art keywords
same
printing apparatus
forming patterns
patterns
forming
Prior art date
Application number
KR20140164528A
Other languages
Korean (ko)
Other versions
KR20160061748A (en
KR102279275B1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1020140164528A priority Critical patent/KR102279275B1/en
Publication of KR20160061748A publication Critical patent/KR20160061748A/en
Application granted granted Critical
Publication of KR102279275B1 publication Critical patent/KR102279275B1/en
Publication of KR102279275B9 publication Critical patent/KR102279275B9/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
    • H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
    • H01L21/0274—Photolithographic processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Printing Methods (AREA)
  • Electroluminescent Light Sources (AREA)
KR1020140164528A 2014-11-24 2014-11-24 Printing Apparatus and Method for Forming Patterns Using the Same KR102279275B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020140164528A KR102279275B1 (en) 2014-11-24 2014-11-24 Printing Apparatus and Method for Forming Patterns Using the Same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020140164528A KR102279275B1 (en) 2014-11-24 2014-11-24 Printing Apparatus and Method for Forming Patterns Using the Same

Publications (3)

Publication Number Publication Date
KR20160061748A KR20160061748A (en) 2016-06-01
KR102279275B1 KR102279275B1 (en) 2021-07-20
KR102279275B9 true KR102279275B9 (en) 2021-10-27

Family

ID=56138254

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020140164528A KR102279275B1 (en) 2014-11-24 2014-11-24 Printing Apparatus and Method for Forming Patterns Using the Same

Country Status (1)

Country Link
KR (1) KR102279275B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20200061268A (en) * 2018-11-23 2020-06-02 주식회사 나노엑스 Imprinting machine and imprinting method

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101959670B (en) * 2008-12-17 2014-12-31 夏普株式会社 Roller-type imprint device, and method for manufacturing imprint sheet
KR100988935B1 (en) * 2009-10-28 2010-10-20 한국기계연구원 Roll imprinting apparatus
KR101726625B1 (en) * 2010-08-13 2017-04-14 엘지디스플레이 주식회사 Roll mold, method and apparatus of fabricating the same, and method of fabricating thin film pattern using the same
JP6080139B2 (en) * 2012-05-31 2017-02-15 エルジー・ケム・リミテッド Plate, printing apparatus including the same, and printing method using the same

Also Published As

Publication number Publication date
KR20160061748A (en) 2016-06-01
KR102279275B1 (en) 2021-07-20

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Legal Events

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A201 Request for examination
E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Publication of correction