KR102272560B1 - Hydrogen water manufacturing electrode and manufacturing method thereof - Google Patents
Hydrogen water manufacturing electrode and manufacturing method thereof Download PDFInfo
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- KR102272560B1 KR102272560B1 KR1020180165245A KR20180165245A KR102272560B1 KR 102272560 B1 KR102272560 B1 KR 102272560B1 KR 1020180165245 A KR1020180165245 A KR 1020180165245A KR 20180165245 A KR20180165245 A KR 20180165245A KR 102272560 B1 KR102272560 B1 KR 102272560B1
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- 239000001257 hydrogen Substances 0.000 title claims abstract description 46
- 229910052739 hydrogen Inorganic materials 0.000 title claims abstract description 46
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 title claims abstract description 44
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 title claims abstract description 32
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 claims abstract description 23
- 238000002161 passivation Methods 0.000 claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 18
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- 238000001771 vacuum deposition Methods 0.000 claims abstract description 4
- 239000010408 film Substances 0.000 claims description 63
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 17
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 claims description 16
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 14
- 239000000463 material Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 claims description 9
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 9
- 239000003054 catalyst Substances 0.000 claims description 9
- 229910052697 platinum Inorganic materials 0.000 claims description 8
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 7
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- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 239000010409 thin film Substances 0.000 claims description 5
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 5
- 239000012498 ultrapure water Substances 0.000 claims description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
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- 229910044991 metal oxide Inorganic materials 0.000 claims description 2
- 150000004706 metal oxides Chemical class 0.000 claims description 2
- 238000006243 chemical reaction Methods 0.000 claims 1
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims 1
- 238000005868 electrolysis reaction Methods 0.000 abstract description 7
- 239000011572 manganese Substances 0.000 description 6
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 3
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- 238000000354 decomposition reaction Methods 0.000 description 2
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- 238000009795 derivation Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
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- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
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- TUJKJAMUKRIRHC-UHFFFAOYSA-N hydroxyl Chemical compound [OH] TUJKJAMUKRIRHC-UHFFFAOYSA-N 0.000 description 1
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- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
- C02F1/46104—Devices therefor; Their operating or servicing
- C02F1/46109—Electrodes
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- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
- C02F1/467—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis by electrochemical disinfection; by electrooxydation or by electroreduction
- C02F1/4676—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis by electrochemical disinfection; by electrooxydation or by electroreduction by electroreduction
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- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
- C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
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Abstract
본 발명은 더 나은 전기분해 특성을 가지는 수소수 생성용 전기분해 전극을 제작할 수 있도록 구현한 수소수 생산용 전극 및 이의 제조 방법에 관한 것으로, Ti 기판(Ti substrate)의 상측에 전기도금 방식을 이용하여 제1막을 형성시키는 단계; E-Beam 진공증착법(Electronic-Beam Evaporator)을 이용하여 상기 제1막의 상측에 제2막을 증착시키는 단계; 상기 제1막을 형성시키는 단계와 상기 제2막을 증착시키는 단계를 교대로 반복 수행하여 상기 Ti 기판의 상측에 다층 구조가 형성된 다층구조 전극을 제조하는 단계; 상기 다층구조 전극에 부동화 피막(passivation film)인 제1피막을 만들어주는 단계; 및 상기 제1피막이 부동화 피막으로 작용할 수 있도록 제1피막이 만들어진 상기 다층구조 전극에 제2피막을 만들어주는 단계를 포함한다.The present invention relates to an electrode for producing hydrogen water and a method for manufacturing the same, which is implemented to produce an electrolysis electrode for generating hydrogen water having better electrolysis characteristics, and uses an electroplating method on the upper side of a Ti substrate to form a first film; depositing a second film on the upper side of the first film by using an E-Beam vacuum deposition method (Electronic-Beam Evaporator); manufacturing a multilayer electrode having a multilayer structure formed on the upper side of the Ti substrate by alternately repeating the steps of forming the first layer and depositing the second layer; forming a first film, which is a passivation film, on the multi-layered electrode; and forming a second film on the multi-layered electrode on which the first film is made so that the first film can act as a passivation film.
Description
본 발명은 수소수 생산용 전극 및 이의 제조 방법에 관한 것으로, 더욱 상세하게는 더 나은 전기분해 특성을 가지는 수소수 생성용 전기분해 전극을 제작할 수 있도록 구현한 수소수 생산용 전극 및 이의 제조 방법에 관한 것이다.The present invention relates to an electrode for producing hydrogen water and a method for producing the same, and more particularly, to an electrode for producing hydrogen water and a method for producing the same, which is implemented so that an electrolysis electrode for producing hydrogen water having better electrolysis properties can be produced it's about
현재 국외에서 의학 분야에 수소에 대한 많은 연구가 진행되고 있으며, 이는 활성산소를 제거하는 치료법 중 효과적인 방법으로 연구되고 있다.Currently, a lot of research on hydrogen in the medical field is being conducted abroad, and it is being studied as an effective method among treatments to remove free radicals.
Nature Medicine(2007)을 비롯한 다양한 저명한 해외 논문지에서 500여 건 이상의 논물을 통해 제시되고 있는 것처럼, 수소는 활성 산소를 제거하는데, 특히 가장 반응성이 높은 하이드록실라디칼과 선택적으로 반응하여 물로 전환되고, 이러한 수소를 이용한 헬스 케어는 심혈관질환, 악성신생물, 만성호흡기질활, 뇌혈관질한, 알츠하이머 질환, 인믈루엔자, 폐렴, 당뇨 등 다양한 질환에 사용하는 연구가 진행되고 있다.As suggested through more than 500 papers in various prestigious overseas journals including Nature Medicine (2007), hydrogen removes active oxygen, and in particular, it selectively reacts with the most reactive hydroxyl radical and is converted to water, In health care using hydrogen, research is underway to use it for various diseases such as cardiovascular disease, malignant neoplasm, chronic respiratory disease, cerebrovascular disease, Alzheimer's disease, influenza, pneumonia, and diabetes.
일본에서는 이러한 수소의 건강에 대한 역할로 인해, 수소수음료, 수소캡슐, 수소수정수기, 수소발생스틱, 수소 입욕제, 수소 팩 등등 많은 산업이 발달되었고, 이를 통해 건강을 회복하고, 실생활에서도 많은 음용이 이루어지고 있다.In Japan, due to the role of hydrogen for health, many industries such as hydrogen water drinks, hydrogen capsules, hydrogen water purifiers, hydrogen generating sticks, hydrogen bath products, hydrogen packs, etc. this is being done
국내에서도 여러 피부과에서 피부 노화에 효과가 있는 수소 토닝, 수소 베일과 같은 수소치료가 진행되고 있다.In Korea, hydrogen treatment such as hydrogen toning and hydrogen veil, which are effective for skin aging, is in progress at various dermatology clinics.
그러나, 기존 수소수를 제조하는 기기에 사용하는 전극은, 백금 전극을 두껍게 전해 도금하는 방식을 사용하고 있지만, 백금은 비싼 귀금속에 해당하여 두껍게 전해 도금하는 방식에는 재료비가 많이 든다는 문제점을 가지고 있었다.However, the electrode used in the conventional device for producing hydrogen water uses a thick electrolytic plating method of a platinum electrode, but platinum is an expensive noble metal, and the thick electrolytic plating method has a problem in that the material cost is high.
한편, 전술한 배경 기술은 발명자가 본 발명의 도출을 위해 보유하고 있었거나, 본 발명의 도출 과정에서 습득한 기술 정보로서, 반드시 본 발명의 출원 전에 일반 공중에게 공개된 공지기술이라 할 수는 없다.On the other hand, the above-mentioned background art is technical information that the inventor possessed for the derivation of the present invention or acquired in the process of derivation of the present invention, and it cannot necessarily be said to be a known technique disclosed to the general public before the filing of the present invention. .
본 발명의 일측면은 수소수 모듈에 적용되어 비싼 귀금속인 기존 Pt 금속을 대체하여 비교적 저렴한 금속들과의 합금화 또는 박막 형성을 통해 가격 경쟁력 있는 수소수 제품을 제작할 수 있도록 구현한 수소수 생산용 전극 및 이의 제조 방법을 제공한다.One aspect of the present invention is applied to a hydrogen water module to replace the existing Pt metal, which is an expensive precious metal, and an electrode for producing hydrogen water that is cost-competitive through alloying with relatively inexpensive metals or forming a thin film and a method for preparing the same.
본 발명의 다른 측면은, 전극을 오래 사용하면 발생하는 전극의 부식 문제를 막기 위해 부동화 피막을 형성하여 장시간 제품을 사용할 수 있도록 하고, 수소수 제품 이외의 소형 수소 생성제품에 활용될 수 있도록 구현한 수소수 생산용 전극 및 이의 제조 방법을 제공한다.Another aspect of the present invention is to form a passivation film to prevent the corrosion problem of the electrode that occurs when the electrode is used for a long time, so that the product can be used for a long time, and it can be used for small hydrogen-generating products other than hydrogen water products. Provided are an electrode for producing hydrogen water and a method for manufacturing the same.
본 발명의 기술적 과제는 이상에서 언급한 기술적 과제로 제한되지 않으며, 언급되지 않은 또 다른 기술적 과제들은 아래의 기재로부터 당업자에게 명확하게 이해될 수 있을 것이다.The technical problems of the present invention are not limited to the technical problems mentioned above, and other technical problems not mentioned will be clearly understood by those skilled in the art from the following description.
본 발명의 일 실시예에 따른 수소수 생산용 전극 제조 방법은, Ti 기판(Ti substrate)의 상측에 전기도금 방식을 이용하여 제1막을 형성시키는 단계; E-Beam 진공증착법(Electronic-Beam Evaporator)을 이용하여 상기 제1막의 상측에 제2막을 증착시키는 단계; 상기 제1막을 형성시키는 단계와 상기 제2막을 증착시키는 단계를 교대로 반복 수행하여 상기 Ti 기판의 상측에 다층 구조가 형성된 다층구조 전극을 제조하는 단계; 상기 다층구조 전극에 부동화 피막(passivation film)인 제1피막을 만들어주는 단계; 및 상기 제1피막이 부동화 피막으로 작용할 수 있도록 제1피막이 만들어진 상기 다층구조 전극에 제2피막을 만들어주는 단계를 포함한다.An electrode manufacturing method for producing hydrogen water according to an embodiment of the present invention comprises the steps of: forming a first film on an upper side of a Ti substrate using an electroplating method; depositing a second film on the upper side of the first film by using an E-Beam vacuum deposition method (Electronic-Beam Evaporator); manufacturing a multilayer electrode having a multilayer structure formed on the upper side of the Ti substrate by alternately repeating the steps of forming the first layer and depositing the second layer; forming a first film, which is a passivation film, on the multi-layered electrode; and forming a second film on the multi-layered electrode on which the first film is made so that the first film can act as a passivation film.
일 실시예에서, 상기 제1막을 형성시키는 단계는, 망간(Mn), 철(Fe), 구리(Cu), 니켈(Ni) 중 적어도 하나의 금속을 전기도금하여 제1막을 형성시킬 수 있다.In an embodiment, the forming of the first layer may include electroplating at least one of manganese (Mn), iron (Fe), copper (Cu), and nickel (Ni) to form the first layer.
일 실시예에서, 상기 제2막을 증착시키는 단계는, 백금계 촉매재료를 이용하여 제2막을 증착시킬 수 있다.In an embodiment, the depositing of the second layer may include depositing the second layer using a platinum-based catalyst material.
일 실시예에서, 상기 제2막을 증착시키는 단계는, 백금계 촉매로서 팔라듐(Pd)이 사용될 수 있다.In an embodiment, in the depositing of the second layer, palladium (Pd) may be used as a platinum-based catalyst.
일 실시예에서, 상기 제1피막을 만들어주는 단계는, 부동화 피막 물질로서 메탄올 베이스의 PVB(Poly Vinyl Butyral) 용액을 이용할 수 있다.In one embodiment, in the step of making the first film, a methanol-based polyvinyl butyral (PVB) solution may be used as a passivation film material.
일 실시예에서, 상기 제1피막을 만들어주는 단계는, PVB 용액을 dip coating 또는 drop-casting & spin-coating을 이용하여 제1피막을 만들어줄 수 있다.In an embodiment, the forming of the first film may include forming the first film using dip coating or drop-casting & spin-coating of the PVB solution.
일 실시예에서, 상기 제2피막을 만들어주는 단계는, 극초순수를 이용하여 상기 제2피막을 만들어줄 수 있다.In one embodiment, the step of making the second film may be made using ultrapure water to make the second film.
일 실시예에서, 상기 제2피막을 만들어주는 단계는, 극초순수를 dip coating 또는 drop-casting & spin-coating을 이용하여 제1피막을 만들어줄 수 있다.In one embodiment, the step of forming the second film may include making the first film using ultrapure water dip coating or drop-casting & spin-coating.
일 실시예에서, 본 발명의 일 실시예에 따른 수소수 생산용 전극 제조 방법은, 상기 제1막을 형성시키는 단계 이전에, 상기 Ti 기판을 클리닝하는 공정을 더 포함할 수 있다.In an embodiment, the method for manufacturing an electrode for producing hydrogen water according to an embodiment of the present invention may further include a step of cleaning the Ti substrate before the step of forming the first layer.
또한, 본 발명은 본 발명의 일 실시예에 따른 수소수 생산용 전극 제조 방법에 의하여 제조된 수소수 생산용 전극을 제공한다.In addition, the present invention provides an electrode for producing hydrogen water manufactured by the method for producing an electrode for producing hydrogen water according to an embodiment of the present invention.
상술한 본 발명의 일측면에 따르면, 수소를 전기분해로 생성하는 비백금 전극으로 백금 수준의 효율을 값싼 금속재료와 촉매재료의 다층 구조를 통해 달 수 있고, PVB 부동화 피막을 이용하여 전기분해 촉매 재료의 문제인 내구성을 향상시키는 효과를 제공할 수 있다.According to one aspect of the present invention described above, as a non-platinum electrode that generates hydrogen through electrolysis, platinum-level efficiency can be applied through a multilayer structure of inexpensive metal material and catalyst material, and the electrolysis catalyst using a PVB passivation film It is possible to provide an effect of improving durability, which is a matter of material.
또한, 수소수 기반 헬스케어 제품의 전극 소재로 적용될 수 있을 뿐 아니라, 현재 상용화가 진행되고 있는 수소자동차 분야의 수소 연료 공급 분야에서도 활용 가능하도록 하는 효과를 제공할 수 있다.In addition, it can be applied as an electrode material for hydrogen water-based health care products, and it can provide the effect of making it usable in the hydrogen fuel supply field of the hydrogen vehicle field, which is currently being commercialized.
도 1은 본 발명의 일 실시예에 따른 수소수 생산용 전극 제조 방법을 설명하는 순서도이다.
도 2는 도 1의 본 발명의 일 실시예에 따른 수소수 생산용 전극 제조 방법에 의하여 제조된 수소수 생산용 전극을 보여주는 도면이다.
도 3은 PVB 부동화 피막 적용에 따른 안정화 테스트를 비교한 그래프이다.1 is a flowchart illustrating a method of manufacturing an electrode for producing hydrogen water according to an embodiment of the present invention.
FIG. 2 is a view showing an electrode for producing hydrogen water manufactured by the method for producing an electrode for producing hydrogen water according to an embodiment of the present invention of FIG. 1 .
3 is a graph comparing the stabilization test according to the PVB passivation coating application.
후술하는 본 발명에 대한 상세한 설명은, 본 발명이 실시될 수 있는 특정 실시예를 예시로서 도시하는 첨부 도면을 참조한다. 이들 실시예는 당업자가 본 발명을 실시할 수 있기에 충분하도록 상세히 설명된다. 본 발명의 다양한 실시예는 서로 다르지만 상호 배타적일 필요는 없음이 이해되어야 한다. 예를 들어, 여기에 기재되어 있는 특정 형상, 구조 및 특성은 일 실시예와 관련하여 본 발명의 정신 및 범위를 벗어나지 않으면서 다른 실시예로 구현될 수 있다. 또한, 각각의 개시된 실시예 내의 개별 구성요소의 위치 또는 배치는 본 발명의 정신 및 범위를 벗어나지 않으면서 변경될 수 있음이 이해되어야 한다. 따라서, 후술하는 상세한 설명은 한정적인 의미로서 취하려는 것이 아니며, 본 발명의 범위는, 적절하게 설명된다면, 그 청구항들이 주장하는 것과 균등한 모든 범위와 더불어 첨부된 청구항에 의해서만 한정된다. 도면에서 유사한 참조부호는 여러 측면에 걸쳐서 동일하거나 유사한 기능을 지칭한다.DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0010] DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS [0023] Reference is made to the accompanying drawings, which show by way of illustration specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the present invention. It should be understood that the various embodiments of the present invention are different but need not be mutually exclusive. For example, certain shapes, structures, and characteristics described herein with respect to one embodiment may be implemented in other embodiments without departing from the spirit and scope of the invention. In addition, it should be understood that the location or arrangement of individual components within each disclosed embodiment may be changed without departing from the spirit and scope of the present invention. Accordingly, the detailed description set forth below is not intended to be taken in a limiting sense, and the scope of the invention, if properly described, is limited only by the appended claims, along with all scope equivalents to those claimed. Like reference numerals in the drawings refer to the same or similar functions throughout the various aspects.
이하, 도면들을 참조하여 본 발명의 바람직한 실시예들을 보다 상세하게 설명하기로 한다.Hereinafter, preferred embodiments of the present invention will be described in more detail with reference to the drawings.
도 1은 본 발명의 일 실시예에 따른 수소수 생산용 전극 제조 방법을 설명하는 순서도이다.1 is a flowchart illustrating a method of manufacturing an electrode for producing hydrogen water according to an embodiment of the present invention.
본 발명은 전기 도금 및 PVD 증착법인 E-beam evaporator를 번갈아 가며 공정하여 수소수 생산용 전극을 제조하기 위한 방법으로서, 도 1을 참조하면, 본 발명의 일 실시예에 따른 수소수 생산용 전극 제조 방법은, 우선, Ti 기판(100)(Ti substrate)의 상측에 전기도금 방식을 이용하여 제1막(200)을 형성시킨다(S110).The present invention is a method for manufacturing an electrode for producing hydrogen water by alternately processing an E-beam evaporator, which is an electroplating and PVD deposition method. Referring to FIG. 1 , an electrode for producing hydrogen water according to an embodiment of the present invention In the method, first, the first film 200 is formed on the upper side of the Ti substrate 100 (Ti substrate) by using an electroplating method (S110).
일 실시예에서, 제1막(200)을 형성시키는 단계(S110)는, 망간(Mn), 철(Fe), 구리(Cu), 니켈(Ni) 중 적어도 하나의 금속을 전기도금하여 제1막(200)을 형성시킬 수 있다.In an embodiment, the step of forming the first layer 200 ( S110 ) may include electroplating at least one metal among manganese (Mn), iron (Fe), copper (Cu), and nickel (Ni) to form the first first layer ( S110 ). A film 200 may be formed.
즉, 본 발명의 증착 기판으로는 상용 전극에 많이 사용되는 Ti 기판을 이용하며, Ti 기판의 클리닝 공정 후 전기도금 방식(electroplating, 電氣鍍金)을 이용하여 망간(Mn), 철(Fe), 구리(Cu), 니켈(Ni) 등과 같이 저가의 비귀금속을 일정 두께의 제1막(200)을 형성하게 된다.That is, as the deposition substrate of the present invention, a Ti substrate, which is often used for commercial electrodes, is used, and after the cleaning process of the Ti substrate, manganese (Mn), iron (Fe), copper A low-cost non-noble metal such as (Cu) or nickel (Ni) is used to form the first layer 200 having a predetermined thickness.
상술한 단계 S110에서 제1막(200)의 형성이 완료되면, E-Beam 진공증착법(Electronic-Beam Evaporator, Electronic-Beam을 이용하여 증발원을 가열시켜 증착시키는 방법으로서, 가판을 만들려는 물질의 용융점이 넓은 경에 많이 사용됨)을 이용하여 제1막(200)의 상측에 제2막(300)을 증착시킨다(S120).When the formation of the first film 200 is completed in the above-described step S110, the E-Beam vacuum evaporation method (Electronic-Beam Evaporator, a method of depositing by heating an evaporation source using an Electronic-Beam, the melting point of the material to be made A second film 300 is deposited on the upper side of the first film 200 by using the wide mirror (which is often used in this case) (S120).
일 실시예에서, 제2막(300)을 증착시키는 단계(S120)는, 백금계 촉매재료인 팔라듐(Pd)을 이용하여 nm 단위의 얇은 박막인 제2막(300)을 증착시킬 수 있다.In one embodiment, in the step of depositing the second layer 300 ( S120 ), the second layer 300 , which is a thin film in nm units, may be deposited using palladium (Pd), which is a platinum-based catalyst material.
제1막(200)을 형성시키는 단계(S110)와 제2막(300)을 증착시키는 단계(S120)를 교대로 반복 수행하여 Ti 기판(100)의 상측에 다층 구조가 형성된 다층구조 전극(400)을 제조한다(S130).The step of forming the first layer 200 ( S110 ) and the step of depositing the second layer 300 ( S120 ) are alternately repeated to form the
상술한 단계 S130에서는, 상술한 단계 S110와 S120를 교대로 수회 반복하여 저가 금속 막과 촉매재료 박막을 다층구조로 쌓아 금속의 계면구조 형성을 통해 효율을 증대시키게 된다.In the above-described step S130, the above-described steps S110 and S120 are alternately repeated several times to stack the low-cost metal film and the catalyst material thin film in a multi-layered structure to increase the efficiency through the formation of the metal interface structure.
같은 두께로 물질을 증착시켰을 때, 단순히 두 개의 층으로 물질을 증착시키는 것에 비하여, 도 2에 도시된 바와 같은 구조로 얇은 막의 다층구조를 형성하는 다층구조 전극(400)을 통해 금속 간의 계면을 형성하면 계면 사이에서의 특성에 의해 더 높은 효율을 얻을 수 있다.When the material is deposited to the same thickness, an interface between metals is formed through the
다만, 도 2에는 제1막(200)과 제2막(300)이 각각 세 차례 교대(즉, 세 개의 제1막(200-1 내지 200-3)과 세 개의 제2막(300-1 내지 300-3)로 형성된 다층구조 전극(400)에 관하여 도시되었으나, 제1막(200)과 제2막(300)의 교차 적층은 세 차례에 한정되는 것은 아니며, 사용자의 필요에 따라 보다 많게 또는 보다 적게 형성되어도 무방하다.However, in FIG. 2 , the first act 200 and the second act 300 alternate three times (that is, three first acts 200-1 to 200-3 and three second acts 300-1), respectively. to 300-3), but the cross lamination of the first film 200 and the second film 300 is not limited to three times, and may be performed more according to the needs of the user. Or it may be formed less.
상술한 단계 S130에 의해 제작된 다층구조 전극(400)에 부동화 피막(passivation film, 철, 코발트, 니켈 등의 양극 산화막처럼 보통의 화학 반응성을 상실한 상태의 금속 산화 피막)인 제1피막(500)을 만들어준다(S140).The
여기서, 제1피막(500)을 만들어주는 단계(S140)에서의 부동화 피막 물질로서 메탄올 베이스의 PVB(Poly Vinyl Butyral, 폴리바이닐부티랄) 용액을 이용할 수 있으며, 다층구조 전극(400)에 PVB 용액을 dip coating 또는 drop-casting & spin-coating을 이용하여 제1피막(500)을 만들어줄 수 있다.Here, a methanol-based PVB (Poly Vinyl Butyral, polyvinyl butyral) solution may be used as the passivation film material in the step (S140) of making the
상술한 단계 S140에서 만들어준 제1피막(500)이 부동화 피막으로 작용할 수 있도록 제1피막(500)이 만들어진 다층구조 전극(400)에 제2피막(600)을 만들어준다(S150).A
여기서, 제2피막(600)을 만들어주는 단계(S150)는, 극초순수를 이용하여 제2피막(600)을 만들어줄 수 있으며, 극초순수를 dip coating 또는 drop-casting & spin-coating을 이용하여 제2피막을 만들어줌으로써, 상술한 단계 S140에서 만들어준 제1피막(500), 즉, PVB막이 전극의 안정성을 늘려주는 부동화 피막으로 작용할 수 있도록 한다.Here, in the step (S150) of making the
상술한 바와 같은 단계를 가지는 수소수 생산용 전극 제조 방법은, 제1막(200)을 형성시키는 단계(S110) 이전에, 전극의 수소분해 성능을 향상시키고 정밀도를 향상시키기 위한 Ti 기판(100)을 클리닝하는 공정을 더 포함할 수 있다(설명의 편의상 도면에는 도시하지 않음).In the method for manufacturing an electrode for producing hydrogen water having the steps as described above, before the step of forming the first film 200 ( S110 ), the
상술한 바와 같은 단계를 가지는 수소수 생산용 전극 제조 방법은, 전기도금 방식을 이용하여 값싼 Ni과 같은 금속으로 형성되는 비교적 두꺼운 막과 E-beam evaporator를 이용함으로써, 귀금속 또는 전기 금속 촉매 합금이 쉽게 되지 않아 분해 촉매로서의 사용이 용이하지 않은 금속도 계면 효과를 이용하여 보다 나은 전기분해 특정을 가지도록 할 수 있다.The electrode manufacturing method for producing hydrogen water having the steps as described above uses a relatively thick film and an E-beam evaporator formed of a cheap metal such as Ni using an electroplating method, so that a noble metal or an electric metal catalyst alloy is easily produced Even metals, which are not easily used as decomposition catalysts because they are not made, can have better electrolysis properties by using the interfacial effect.
도 3은 PVB 부동화 피막 적용에 따른 안정화 테스트를 비교한 그래프이다.3 is a graph comparing the stabilization test according to the PVB passivation coating application.
도 3은, 1X2cm 크기로 만들어진 전극에 부동화 피막의 유무에 따라 5V 전압을 12시간 동안 일정하게 가하며 전류 변화를 측정한 것이다.Figure 3 shows the measurement of the current change while constantly applying a voltage of 5V for 12 hours depending on the presence or absence of a passivation film to an electrode made of 1X2cm size.
PVB 부동화 피막 적용 전에는 시간이 지남에 따라 일정하게 전류가 감소하고 15% 정도의 전도도 감소를 보이지만, 본 발명에 따른 PVB 부동화 피막 적용 시에는 전도도가 거의 일정하게 유지됨을 확인할 수 있다.Before the PVB passivation film is applied, the current decreases over time and the conductivity decreases by about 15%, but it can be confirmed that the conductivity is maintained almost constant when the PVB passivation film according to the present invention is applied.
상술한 바와 같이, 본 발명의 일 실시예에 따른 수소수 생산용 전극 제조 방법에 의하여 제조된 수소수 생산용 전극(10)은 도 2에 도시되어 있다.As described above, the
즉, 수소수 생산용 전극(10)은, 최하측에 Ti 기판(100)이 위치하고, Ti 기판(100)의 상측에 제1막(200)과 제2막(300)이 다수 교차 적층(도 2의 경우에는 3회 교차 적층)된 다층구조 전극(400)이 형성되고, 다층구조 전극(400)의 상측에 제1피막(500)과 제2피막(600)이 차례로 형성된다.That is, in the
상술된 실시예들은 예시를 위한 것이며, 상술된 실시예들이 속하는 기술분야의 통상의 지식을 가진 자는 상술된 실시예들이 갖는 기술적 사상이나 필수적인 특징을 변경하지 않고서 다른 구체적인 형태로 쉽게 변형이 가능하다는 것을 이해할 수 있을 것이다. 그러므로 상술된 실시예들은 모든 면에서 예시적인 것이며 한정적이 아닌 것으로 이해해야만 한다. 예를 들어, 단일형으로 설명되어 있는 각 구성 요소는 분산되어 실시될 수도 있으며, 마찬가지로 분산된 것으로 설명되어 있는 구성 요소들도 결합된 형태로 실시될 수 있다.The above-described embodiments are for illustration, and those of ordinary skill in the art to which the above-described embodiments pertain can easily transform into other specific forms without changing the technical idea or essential features of the above-described embodiments. You will understand. Therefore, it should be understood that the above-described embodiments are illustrative in all respects and not restrictive. For example, each component described as a single type may be implemented in a distributed manner, and likewise components described as distributed may be implemented in a combined form.
본 명세서를 통해 보호받고자 하는 범위는 상기 상세한 설명보다는 후술하는 특허청구범위에 의하여 나타내어지며, 특허청구범위의 의미 및 범위 그리고 그 균등 개념으로부터 도출되는 모든 변경 또는 변형된 형태를 포함하는 것으로 해석되어야 한다.The scope to be protected through this specification is indicated by the claims described below rather than the above detailed description, and it should be construed to include all changes or modifications derived from the meaning and scope of the claims and their equivalents. .
10: 수소수 생산용 전극
100: Ti 기판
200: 제1막
300: 제2막
400: 다층구조 전극
500: 제1피막
600: 제2피막10: electrode for hydrogen water production
100: Ti substrate
200: Act 1
300: Act 2
400: multi-layered electrode
500: first film
600: second film
Claims (10)
E-Beam 진공증착법(Electronic-Beam Evaporator)을 이용하여 상기 제1막의 상측에 백금계 촉매재료인 팔라듐(Pd)으로 나노 단위의 얇은 제2막을 증착시키는 단계;
상기 제1막을 형성시키는 단계와 상기 제2막을 증착시키는 단계를 교대로 반복 수행하여 상기 Ti 기판의 상측에 3차례 이상의 다층 구조로 쌓아 금속의 계면구조가 형성된 다층구조 전극을 제조하는 단계;
상기 다층구조 전극에 보통의 화학반응을 상실한 금속 산화 피막 형태의 부동화 피막(passivation film)인 제1피막을 만들어주는 단계;
상기 부동화 피막 물질은 메탄올 베이스의 PVB(Poly Vinyl Butyral) 용액을 이용하고;
상기 PVB 용액을 dip coating 또는 drop-casting & spin-coating을 이용하고; 및
상기 제1피막이 부동화 피막으로 작용할 수 있도록 제1피막이 만들어진 상기 다층구조 전극에 극초순수를 dip coating 또는 drop-casting & spin-coating을 이용하여 제2피막을 만들어주는 단계를 포함하는, 수소수 생산용 전극 제조 방법.
cleaning the Ti substrate, and forming a first layer made of at least one of manganese, iron, copper, and nickel on an upper side of the Ti substrate using an electroplating method;
depositing a second nano-thin film using palladium (Pd), a platinum-based catalyst material, on the upper side of the first film using an E-Beam vacuum deposition method;
manufacturing a multilayer electrode having a metal interface structure formed by stacking a multilayer structure on the upper side of the Ti substrate three or more times by alternately repeating the steps of forming the first layer and depositing the second layer;
forming a first film, which is a passivation film in the form of a metal oxide film that has lost a normal chemical reaction, on the multi-layered electrode;
The passivation coating material uses a methanol-based PVB (Poly Vinyl Butyral) solution;
dip coating or drop-casting & spin-coating the PVB solution; and
Including the step of making a second film by using dip coating or drop-casting & spin-coating of ultrapure water on the multi-layered electrode on which the first film is made so that the first film can act as a passivation film, for producing hydrogen water Electrode manufacturing method.
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