KR102258925B1 - Checking device for checking foreign matter contained in fluid - Google Patents

Abstract

The present invention relates to an inspection apparatus for checking fluid foreign substances. More specifically, a light projection apparatus for checking the fluid foreign substances, provided between a supply pipe through which a fluid is supplied and a discharge pipe through which the fluid is discharged, comprises: a supply flange including a supply body connected to an end of the supply pipe and a supply through-hole formed in a shape to penetrate the supply body corresponding to the flow direction of the fluid supplied from the supply pipe; a discharge flange including a discharge body connected to an end of the discharge pipe and a discharge through-hole formed in a shape to penetrate the discharge body corresponding to a position of the supply through-hole; an inspection tube made of a transparent material and installed between the supply body of the supply flange and the discharge body of the discharge flange; and a support frame connecting the supply body of the supply flange and the discharge body of the discharge flange to each other, and supporting the supply body of the supply flange and the discharge body of the discharge flange to maintain a constant interval. According to the present invention, the fluid supplied through the supply pipe and discharged to the discharge pipe is configured to pass through the inspection tube made of the transparent material, thereby enabling a state of the fluid passing through the inspection tube to be grasped.

Description

Checking device for checking fluid foreign substances {CHECKING DEVICE FOR CHECKING FOREIGN MATTER CONTAINED IN FLUID}

The present invention relates to an inspection device for checking fluid foreign substances.

More specifically, the fluid supplied through the supply pipe and discharged to the discharge pipe is configured to pass through an inspection tube made of a transparent material, so that it is possible to grasp the state of the fluid passing through the inspection tube. it's about

Semiconductors are a generic term for materials (objects) that do not transfer charges as well as conductors such as metals and carbon rods at room temperature, but transfer charges relatively well compared to insulators (insulators) such as glass and porcelain.

Such a semiconductor is manufactured through the following steps.

First, a single-crystal silicon rod (ingot) is grown while contacting and rotating a seed crystal to a silicon melt purified with high purity, and then the grown silicon rod is cut into a thin wafer of uniform thickness. . At this time, the size of the wafer is determined according to the diameter of the silicon rod, which is gradually becoming larger in order to improve productivity.

Then, when the wafer is manufactured, one surface of the wafer is polished to make it a mirror surface (mirror surface). After that, a separate drawing tool (including CAD, Computer Aided Design) is used to design the circuit pattern to be drawn on the electronic circuit and the actual wafer, and the designed circuit pattern is drawn on a predetermined glass plate to make a mask.

Next, oxygen or water vapor is chemically reacted with the wafer surface at a high temperature of about 800°C or higher to form a thin and uniform silicon oxide film (SiO2) on the surface of the wafer, and then a photoresist (PR (Photo Resist) ) is applied evenly. Then, light passes through the circuit pattern drawn on the mask to take a picture of the designed circuit pattern on the surface of the wafer on which the photoresist film (hereinafter, also referred to as a coating film) is formed. Thereafter, a film at a position where light is received on the surface of the wafer is developed (Development).

Next, in order to form the circuit pattern, an etching process for selectively removing unnecessary portions using a chemical or reactive gas (Gas) is performed. Such an etching process may be repeatedly performed for each pattern layer.

Thereafter, impurities in the form of fine gas particles are permeated into the inside of the wafer in a portion connected to the circuit pattern, thereby making the characteristics of the electronic device. Such impurity implantation may also be performed in a diffusion process in which impurity particles are diffused and implanted into the wafer in a high-temperature electric furnace.

Then, a chemical vapor deposition (CVD) process is performed in which particles formed by chemical reaction of gas are deposited on the wafer surface to form an insulating film or a conductive film. Thereafter, each circuit formed on the surface of the wafer is connected with an aluminum wire, the electrical operation of the IC chips formed on the wafer is checked to determine whether there is a defect, and then the wafer is cut. After that, the chip is placed on the lead frame (Read Frame), the external connection terminal inside the chip and the lead frame are connected with a thin gold wire, the connection part is sealed, and the product is released after a final inspection.

In this way, semiconductors are produced as a single product by going through numerous processes starting with making a wafer. Therefore, if an error occurs in the process of performing each process or does not reach the level required at each stage, it is difficult to release it as a product.

In particular, since the semiconductor is very sensitive to contamination such as dust, dust, particles, etc., it is preferable to have a process for washing the dust, dust, particles, etc. by spraying a cleaning solution.

On the other hand, the cleaning liquid is configured to be supplied and flowed through various pipelines, and more specifically, from the tank to the injection device, two or more tubes may be supplied through a supply passage in which they are continuously connected by pipe joints.

However, since all of these supply paths are composed of an opaque metal pipe, that is, a steel pipe or a cast iron pipe, etc., the inside of which cannot be seen, so that the state of the cleaning liquid flowing through the supply path cannot be checked. Since the cleaning liquid is used as it is, there is a problem in that efficient semiconductor cleaning is difficult.

Registered Patent Publication No. 10-1953266 (2019.02.22.) Laid-open Patent Publication No. 10-2017-0075131 (2017.07.03.)

The present invention has been devised to solve the above problems, and the problem to be solved in the present invention is that the fluid supplied through the supply pipe and discharged to the discharge pipe is configured to pass through an inspection pipe made of a transparent material, so that the inspection pipe An object of the present invention is to provide an inspection device for checking fluid foreign substances that allows the state of the fluid passing through it to be understood.

The inspection device for checking fluid foreign substances according to the present invention for solving the above problems is a light projecting device for checking fluid foreign substances provided between a supply pipe to which a fluid is supplied and a discharge pipe to which the fluid is discharged, and is connected to the end of the supply pipe a supply body and a supply flange including a supply through hole formed in a shape to penetrate the supply body corresponding to the flow direction of the fluid supplied from the supply pipe; a discharge flange including a discharge body connected to the end of the discharge pipe and a discharge through-hole formed in a shape to penetrate the discharge body corresponding to the position of the supply through-hole; an inspection tube made of a transparent material and installed between the supply body of the supply flange and the discharge body of the discharge flange; and a support frame that connects the supply body of the supply flange and the discharge body of the discharge flange to each other, and supports the interval between the supply body of the supply flange and the discharge body of the discharge flange to maintain a constant distance. do.

In addition, the fluid supplied through the supply pipe and discharged through the discharge pipe is characterized in that the gas in which one or a plurality of materials are mixed and the liquid in which one or a plurality of materials are mixed are mixed with each other.

In addition, the supply flange has a first supply coupling portion formed in a groove shape along the circumferential direction of the supply through-hole formed at a position corresponding to the position where the inspection pipe is installed among the upper surface or the lower surface of the supply body; and a shape corresponding to the first supply coupling part and coupled to the first supply coupling part, a first main packing through-hole corresponding to the supply through-hole is formed, and the first main packing through-hole and the other A first main packing in which a first main packing coupling groove is formed along the circumferential direction of the first main packing through hole is included between the periphery, and the inspection pipe has any one of the upper and lower parts of the first main packing 1 It is characterized in that it is configured to be inserted into the main packing coupling groove.

In addition, the discharge flange has a first discharge coupling portion formed in a groove shape along the circumferential direction of the discharge through-hole formed at a position corresponding to the position where the inspection pipe is installed among the upper surface or the lower surface of the discharge body; and formed in the same shape as the first discharge coupling part and coupled to the first discharge coupling part, a second main packing through hole corresponding to the discharge through hole is formed, and the second main packing through hole and the outer periphery A second main packing in which a second main packing coupling groove is formed along the circumferential direction of the second main packing through hole is included between the first main packing couplings of the first main packing among the upper and lower parts of the inspection tube. Any one not inserted into the groove is characterized in that it is configured to be inserted into the second main packing coupling groove of the second main packing.

In addition, in the support frame, one side is configured to penetrate the supply body and the other side is configured to penetrate the discharge body, and a plurality of components are configured to be spaced apart from each other at regular intervals along the circumferential direction of the supply body and the discharge body. support rod; a supply support cap nut coupled to one end of the support rod passing through the supply flange; and a discharge support cap nut coupled to the other end of the support rod passing through the discharge flange.

In addition, it characterized in that it further includes a state monitoring unit configured to check and transmit the state of the fluid flowing in the inspection tube.

In addition, the condition monitoring unit, the light emitting module is provided at a position adjacent to the inspection tube is configured to emit light passing through the inspection tube; and a main light receiving module provided at a position adjacent to the inspection tube and configured to collect light emitted from the light emitting module and transmitted through the inspection tube.

In addition, the supply through-hole, a first supply coupling hole configured to have the same diameter as the outer diameter of the supply pipe is configured to be inserted into the supply pipe; a second supply coupling hole configured to have the same diameter as the inner diameter of the supply pipe; and a third supply coupling hole formed to be tapered in a shape gradually narrowing from the first supply coupling hole toward the second supply coupling hole and configured to connect the first supply coupling hole and the second supply coupling hole. characterized by being

In addition, the discharge through-hole, a first discharge coupling hole configured to have the same diameter as the outer diameter of the discharge pipe is configured to be inserted into the discharge pipe; a second discharge coupling hole having the same diameter as the inner diameter of the discharge pipe; and a third exhaust coupling hole formed to be tapered in a shape gradually narrowing from the first exhaust coupling hole toward the second exhaust coupling hole and configured to connect the first exhaust coupling hole and the second exhaust coupling hole. characterized by being

In addition, a sensor unit installed in any one or a plurality of the supply pipe, the inspection pipe, and the discharge pipe to inspect any one or all of the flow rate and temperature of the fluid flowing in the supply pipe, the inspection pipe, and the discharge pipe is further included. do.

According to the inspection apparatus for checking fluid foreign substances according to the present invention, the fluid supplied through the supply pipe and discharged to the discharge pipe is configured to pass through the inspection pipe made of a transparent material, so that the state of the fluid passing through the inspection pipe can be grasped. has the effect of

In addition, according to the present invention, the first main packing and the second main packing are coupled to the supply body and/or the discharge body, respectively, and configured to support the inspection pipe installed between the supply body or the discharge body. It has the effect of being configured to reduce vibration noise generated by the fluid moving through it.

In addition, according to the present invention, the light emitted from the light emitting module passes through the inspection tube and is collected by the main light receiving module, so that the state of the fluid flowing through the inspection tube can be checked according to the amount of light collected in the main light receiving module. has the effect of being

In addition, according to the present invention, the inner diameter of the first supply coupling hole is configured to be the same as the outer diameter of the supply pipe, and the third supply coupling hole connected from the first supply coupling hole is formed to be tapered in a gradually smaller shape, thereby forming the first supply coupling hole. The insertion position of the supply pipe to be inserted is fixed, so that connection workability such as welding is improved.

In addition, according to the present invention, the inner diameter of the first discharge coupling hole is configured to be the same as the outer diameter of the discharge pipe, and the third discharge coupling hole connected from the first discharge coupling hole is formed to be tapered in a gradually smaller shape, thereby forming the first discharge coupling hole. The insertion position of the discharge pipe to be inserted is confirmed, so that the connection workability such as welding is improved.

In addition, according to the present invention, the sensor unit is configured to be installed in any one or a plurality of the supply pipe, the inspection pipe, and the discharge pipe, so that any one or both of the flow rate and the temperature of the fluid flowing in the supply pipe, the inspection pipe and the discharge pipe can be detected. has the effect of being

Figure 1a is a perspective view showing an inspection device for checking fluid foreign substances according to the present invention.
Figure 1b is an exploded perspective view showing the inspection device for checking fluid foreign substances according to the present invention.
1c is a cross-sectional view showing an inspection device for checking fluid foreign substances according to the present invention.
Figure 1d is an exploded cross-sectional view showing the inspection device for checking fluid foreign substances according to the present invention.
Figure 2a is a view showing an embodiment of the first main packing of the inspection device for checking fluid foreign substances according to the present invention.
Figure 2b is a view showing a first main packing in which the rotation preventing protrusion of the inspection device for checking fluid foreign substances according to the present invention.
Figure 3a is a view showing an embodiment of the second main packing of the inspection device for checking fluid foreign substances according to the present invention.
Figure 3b is a view showing a second main packing formed with a rotation preventing protrusion of the inspection device for checking fluid foreign substances according to the present invention.
Figure 4a is a view showing a support frame of the inspection device for checking fluid foreign substances according to the present invention.
Figure 4b is a view showing an embodiment of the support frame of the inspection device for checking fluid foreign substances according to the present invention.
Figure 4c is an exploded cross-sectional view enlarged (A) of Figure 4b.
Figure 4d is an exploded cross-sectional view enlarged and exploded (B) of Figure 4b.
5 is a view showing a state monitoring unit of the inspection device for checking fluid foreign substances according to the present invention.
6A is a view showing an embodiment of the state monitoring unit according to FIG. 5;
FIG. 6B is a graph showing an example of a determination criterion according to a level of light received by the state monitoring unit according to FIG. 5; FIG.
7 is a view showing an embodiment of a state monitoring unit according to another embodiment of the inspection device for checking fluid foreign substances according to the present invention.

Since the present invention can have various changes and can have various embodiments, specific embodiments are illustrated in the drawings and described in detail. However, this is not intended to limit the present invention to a specific embodiment, it should be understood to include all changes, equivalents, or substitutes included in the spirit and scope of the present invention.

When a component is referred to as being "connected" or "connected" to another component, it is understood that it may be directly connected or connected to the other component, but other components may exist in the middle. It should be.

On the other hand, when a component is referred to as being "directly connected" or "directly connected" to another component, it should be understood that there is no other component in the middle.

The terms used herein are used only to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present application, terms such as “comprise” or “have” are intended to designate that a feature, number, process, operation, component, part, or combination thereof described in the specification is present, and one or more other features It is to be understood that this does not preclude the existence or addition of numbers, processes, operations, components, parts, or combinations thereof.

Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms such as those defined in a commonly used dictionary should be interpreted as having a meaning consistent with the meaning of the related technology, and should not be interpreted as an ideal or excessively formal meaning unless explicitly defined in the present application. Does not.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings. Prior to this, the terms or words used in the present specification and claims should not be construed as being limited to conventional or dictionary meanings, and the inventor should properly understand the concept of the term in order to best describe his invention. Based on the principle that can be defined, it should be interpreted as meaning and concept consistent with the technical idea of the present invention. In addition, unless there are other definitions in the technical and scientific terms used, it has the meaning commonly understood by those of ordinary skill in the art to which this invention belongs, and the summary of the present invention in the following description and accompanying drawings Descriptions of known functions and configurations that may be unnecessarily obscure will be omitted. The drawings introduced below are provided as examples in order to sufficiently convey the spirit of the present invention to those skilled in the art. Accordingly, the present invention is not limited to the drawings presented below and may be embodied in other forms. Also, like reference numerals refer to like elements throughout. It should be noted that the same components in the drawings are denoted by the same reference numerals wherever possible.

The present invention relates to an inspection device for checking fluid foreign substances that is configured to allow a fluid supplied through a supply pipe and discharged to a discharge pipe to pass through an inspection tube made of a transparent material, so that the state of the fluid passing through the inspection tube can be grasped. .

Hereinafter, with reference to the accompanying drawings, it will be described in detail with respect to the inspection device for checking fluid foreign substances according to the present invention.

Figure 1a is a perspective view showing an inspection device for checking fluid foreign substances according to the present invention, Figure 1b is an exploded perspective view showing the inspection device for checking fluid foreign substances according to the present invention, Figure 1c is an inspection device for checking fluid foreign substances according to the present invention It is a cross-sectional view showing, Figure 1d is an exploded cross-sectional view showing the inspection device for checking fluid foreign substances according to the present invention.

1A to 1D, the inspection device for checking fluid foreign substances of the present invention includes a supply flange 100, a discharge flange 200, an inspection pipe 300, and a support frame 400.

This inspection device for checking fluid foreign substances is provided between the supply pipe 10 to which the fluid is supplied and the discharge pipe 20 to which the fluid is discharged and configured to grasp the state of the fluid flowing through the inspection pipe 300, It is configured to prevent semiconductor production errors caused by foreign substances contained in the fluid.

At this time, the fluid supplied through the supply pipe 10 and discharged through the discharge pipe 20 may be composed of a cleaning liquid in which a gas in which one or a plurality of materials are mixed and a liquid in which one or a plurality of materials are mixed are mixed with each other. In addition, the components of the fluid may be changed as long as dust, dust, particles, etc. generated in the semiconductor production process can be washed.

The supply flange 100 has a supply body 110 connected to the end of the supply pipe 10 and formed in a shape that corresponds to the flow direction of the fluid supplied from the supply pipe 10 and penetrates the supply body 110 . A supply through-hole 120 is included.

At this time, although the present invention shows that the supply body 110 is formed in a circular shape, depending on the implementation environment, the shape of the supply body 110 may be formed in a polygonal shape such as a triangle, a square, and a pentagon. Depending on the environment, the shape of the supply body 110 may be modified and applied and implemented as long as it is a shape that can connect the supply pipe 10 and the inspection pipe 300 .

And the material of the supply body 110 may be made of a metal material, and when the material of the supply pipe 10 and the supply body 110 is made of metal, the supply pipe 10 and the supply body 110 are made of metal. Arc welding using electric energy, electron beam welding, plasma welding, gas welding using chemical energy, thermite welding, friction welding using mechanical energy, pressure welding, welding welding, ultrasonic welding using ultrasonic energy and light energy It may be configured to be connected to each other by any one method of laser welding using

The material of the supply body 110 is not deformed in shape by the supply of the fluid supplied from the supply pipe 10 and flowing into the inspection pipe 300, but by coupling with the discharge body 210 to be described later. Any structure that can withstand the generated load and pressure can be modified and applied and implemented.

On the other hand, the supply through hole 120 is supplied from the supply pipe 10 as shown in FIG. 1B and is provided in the supply body 110 to prevent the vibration caused by the fluid flowing into the inspection pipe 300 from being biased. Preferably, it is configured to be formed in the center of the , and the inner diameter of the supply through hole 120 is configured to have a size corresponding to the inner diameter of the supply tube 10 and the inspection tube 300 as shown in FIG. 1C. can

The inner diameter of the supply through hole 120 is configured to have a size corresponding to the inner diameter of the supply pipe 10 and the inspection tube 300, the inner diameter of the supply through hole 120 is the supply pipe 10 And when it is smaller or larger than the inner diameter of the inspection pipe 300 , the fluid supplied through the supply pipe 10 continuously impacts while passing through the supply pipe 10 , the supply through-hole 120 and the inspection pipe 300 . This is because vibration and noise due to the impact are generated.

According to an embodiment, as shown in FIG. 1d , the supply through hole 120 has a first supply coupling hole configured to have the same diameter as the outer diameter of the supply pipe 10 and to be inserted into the supply pipe 10 . (121), the second supply coupling hole 122 and the first supply coupling hole 121 configured to have the same diameter as the inner diameter of the supply pipe 10 toward the second supply coupling hole 122 gradually A third supply coupling hole 123 formed to be tapered in a narrower shape and configured to connect the first supply coupling hole 121 and the second supply coupling hole 122 may be included.

That is, the supply pipe 10 inserted through the first supply coupling hole 121 and connected to the supply body 110 may be caught by the tapered shape of the third supply coupling hole 123 , and the It may be configured to be connected in a welding manner as described above in the caught portion.

The discharge flange 200 has a discharge body 210 connected to the end of the discharge pipe 20 and a discharge through-hole formed in a shape to penetrate the discharge body 210 corresponding to the position of the supply through-hole 120 . A hole 220 is included.

At this time, although the present invention shows that the discharge body 210 is formed in a circular shape, depending on the implementation environment, the shape of the discharge body 210 may be formed in a polygonal shape such as a triangle, a square, and a pentagon, and the The shape of the discharge body 210 may be modified and applied and implemented as long as it is a shape that can connect the inspection pipe 300 and the discharge pipe 20 .

And the material of the supply body 110 may be made of a metal material, and when the material of the supply pipe 10 and the supply body 110 is made of metal, the supply pipe 10 and the supply body 110 are made of metal. Arc welding using electric energy, electron beam welding, plasma welding, gas welding using chemical energy, thermite welding, friction welding using mechanical energy, pressure welding, welding welding, ultrasonic welding using ultrasonic energy and light energy It may be configured to be connected to each other by any one method of laser welding using

The material of the discharge body 210 is not deformed in shape by the flow of the fluid flowing to the discharge pipe 20 through the inspection pipe 300, but is generated by coupling with the supply body 110 Any structure that can withstand load and pressure can be modified and applied and implemented.

On the other hand, the discharge through-hole 220 is the discharge body 210 in order to prevent the vibration caused by the fluid flowing into the discharge tube 20 through the inspection tube 300 from being biased as shown in FIG. 1B. It is preferable to be configured to be formed in the center, and the inner diameter of the discharge through hole 220 may be configured to have a size corresponding to the inner diameter of the inspection tube 300 and the discharge tube 20 as shown in FIG. 1C . have.

When the inner diameter of the discharge through-hole 220 is smaller or larger than the inner diameter of the discharge pipe 20 and the inspection tube 300, the fluid flowing through the inspection tube 300 flows through the inspection tube 300, While passing through the discharge through-hole 220 and the discharge pipe 20, an impact is continuously generated, and vibration and noise are generated due to the impact. The inner diameter of the discharge through-hole 220 is the inspection tube 300 ) and the size corresponding to the inner diameter of the discharge pipe 20 is to prevent vibration and noise caused by the fluid impact.

According to an embodiment, as shown in FIG. 1d , the discharge through hole 220 has a first discharge coupling hole configured to have the same diameter as the outer diameter of the discharge pipe 20 so that the discharge pipe 20 is inserted. 221 , the second discharge coupling hole 222 and the first discharge coupling hole 221 configured to have the same diameter as the inner diameter of the discharge pipe 20 gradually toward the second discharge coupling hole 222 . A third exhaust coupling hole 223 formed to be tapered in a narrower shape and configured to connect the first exhaust coupling hole 221 and the second exhaust coupling hole 222 may be included.

That is, the discharge pipe 20 inserted through the first discharge coupling hole 221 and connected to the discharge body 210 may be caught by the tapered shape of the third discharge coupling hole 223, and the It may be configured to be connected in a welding manner as described above in the caught portion.

The inspection tube 300 is made of a transparent material and is installed between the supply body 110 of the supply flange 100 and the discharge body 210 of the discharge flange 200 .

The inspection pipe 300 is supplied through the supply pipe 10 and discharged through the discharge pipe 20 so that the fluid configured to clean the semiconductor is visually displayed between the supply pipe 10 and the discharge pipe 20 . By making it exposed, it is supplied through the supply pipe 10 from the outside of the inspection device for checking fluid foreign substances of the present invention and discharged through the discharge pipe 20 so that the state of the fluid configured to clean the semiconductor can be checked. will do

That is, the inspection tube 300 is preferably made of glass, etc. made of a transparent and smooth surface material in order to check the fluid inside the inspection tube 300 as described above, and the inspection tube 300 Any material having strength enough to prevent damage by the fluid flowing through it and transparency and surface roughness enough to visually check the fluid flowing inside the inspection tube 300 can be replaced can be used

The support frame 400 connects the supply body 110 of the supply flange 100 and the discharge body 210 of the discharge flange 200 to each other, and the supply body 110 of the supply flange 100 and The distance between the discharge body 210 of the discharge flange 200 is supported to maintain a constant interval.

That is, the support frame 400 connects the supply body 110 of the supply flange 100 and the discharge body 210 of the discharge flange 200 to each other, so that the supply body 110 and the discharge body 210 are connected to each other. To prevent the inspection pipe 300 installed between the supply body 110 and the discharge body 210 from being separated between the supply body 110 and the discharge body 210, and at the same time to support the inspection device for checking fluid foreign substances of the present invention so that it can maintain its original shape will be.

At this time, the support frame 400 may be made of the same material as the supply body 110 and the discharge body 210, and the material of the support frame 400 is the supply body 110 and discharge, such as metal. While the body 210 is configured to connect and support each other, its shape may not be deformed by vibration caused by the fluid flowing through the supply through-hole 120 , the inspection tube 300 and the discharge through-hole 220 . Any structure can be changed and applied and implemented.

On the other hand, in the inspection device for checking fluid foreign substances of the present invention, it is installed in any one or a plurality of the supply pipe 10, the inspection pipe 300, and the discharge pipe 20, and the supply pipe 10, the inspection pipe 300 and the discharge pipe ( A sensor unit 600 configured to inspect any one or both of the flow rate and temperature of the fluid flowing in 20) may be further included.

In the present invention, the sensor unit 600 is illustrated as being provided only in the supply pipe 10 , but as described above, the sensor unit 600 includes the supply pipe 10 , the inspection pipe 300 and the discharge pipe 20 . If any one or both of the flow rate and temperature of the fluid flowing in can be inspected, it may be installed in any one or a plurality of the supply pipe 10 , the inspection pipe 300 , and the discharge pipe 20 .

The sensor unit 600 includes a flow measurement sensor configured to inspect the flow rate of the fluid flowing in the supply pipe 10 , the inspection pipe 300 and the discharge pipe 20 , and the supply pipe 10 , the inspection pipe 300 . And a temperature sensor configured to check the temperature of the fluid flowing in the discharge pipe 20 may be included.

That is, the sensor unit 600 measures the parts that cannot be inspected visually, such as flow rate and temperature, among the states of the fluid flowing in the supply pipe 10 , the inspection pipe 300 , and the discharge pipe 20 to measure the supply pipe. (10), the inspection tube 300 and can be configured to transmit the state information of the fluid flowing in the discharge tube 20, the inspection device for checking fluid foreign substances of the present invention, the fluid transmitted from the sensor unit (600) It may be configured to check the state information of the fluid flowing in the supply pipe 10 , the inspection pipe 300 , and the discharge pipe 20 through a separate display module from which the status information of the is received.

In other words, the sensor unit 600 includes a flow measurement sensor for measuring the flow rate of the fluid flowing in the supply pipe 10 , the inspection pipe 300 and the discharge pipe 20 , and the supply pipe 10 , the inspection pipe 300 . and a temperature sensor for measuring the temperature of the fluid flowing in the discharge pipe 20, for example, in the sensor unit 600, the supply pipe 10, the inspection pipe 300, and the discharge pipe 20 A foreign material detection sensor configured to detect foreign substances in the fluid, a component detection sensor configured to detect components of the fluid flowing in the supply pipe 10, the inspection pipe 300, and the discharge pipe 20. can

In addition, the supply flange 100 and the discharge flange 200 are provided at portions in contact with the supply pipe 10 and the discharge pipe 20, respectively, so that the vibrations generated from the supply pipe 10 and the discharge pipe 20 are respectively the above O-rings 150 and 250 to prevent transmission to the supply flange 100 and the discharge flange 200 may be included.

Figure 2a is a view showing an embodiment of the first main packing of the inspection device for checking fluid foreign substances according to the present invention, Figure 2b is a first main packing with a rotation preventing projection of the inspection device for checking fluid foreign substances according to the present invention 3A is a view showing an exemplary state of the second main packing of the inspection device for checking fluid foreign substances according to the present invention, and FIG. 3B is a product having a rotation preventing protrusion of the inspection device for checking fluid foreign substances according to the present invention. 2 It is a diagram showing the main packing.

2A and 2B, in the supply flange 100 of the present invention, a supply through-hole formed at a position corresponding to the position where the inspection pipe 300 is installed among the upper surface or the lower surface of the supply body 110 A first supply coupling portion 130 formed in a groove shape along the circumferential direction of (120); and a first main packing through hole 141 formed in a shape corresponding to the first supply coupling unit 130 and coupled to the first supply coupling unit 130 , and corresponding to the supply through hole 120 . A first main packing in which a first main packing coupling groove 142 is formed along the circumferential direction of the first main packing through hole 141 between the first main packing through hole 141 and the outer periphery (140) may be included. In addition, the inspection tube 300 of the present invention may be configured such that any one of the upper and lower portions is inserted into the first main packing coupling groove 142 of the first main packing 140 .

The first supply coupling part 130 is formed in a groove shape into which the first main packing 140 can be inserted, and as described above, a shape corresponding to the shape of the first main packing 140 . It is preferable that the first main packing 140 is formed in a size smaller than that of the first main packing 140 so that the first main packing 140 is coupled while being forcedly fitted to the first supply coupling unit 130 . .
In addition, the inner diameter of the supply pipe 10, the diameter of the second supply coupling hole 122, the diameter of the first main packing through hole 141, and the inner diameter of the inspection tube 300 are formed to be the same, so that they are aligned with each other. make it available

The first main packing 140 is configured to be coupled while being press-fitted to the first supply coupling unit 130 , the first main packing 140 coupled to the first supply coupling unit 130 is the first main packing unit 140 . This is to prevent the first main packing 140 from being detached from the first supply coupling part 130 after coupling to the first supply coupling part 130, and for this purpose, the first supply coupling part 130 and A separate adhesive or the like may be applied between the first main packing 140 depending on the implementation environment.

On the other hand, the material of the first main packing 140 may be made of Teflon having heat resistance, corrosion resistance and friction resistance, and the material of the first main packing 140 has heat resistance and corrosion resistance like the Teflon. As long as it is a material that is not easily deformed by having, it is configured to be changed and implemented and applied, so that the first main packing 140 is a fluid flowing in the supply through hole 120 and the inspection tube 300 . It may be configured to reduce vibration noise generated by the

In addition, the first main packing 140 is configured on the opposite surface of the first main packing coupling groove 142 , the first supply support surface 143 tapered to support the load of the supply body 110 . ), and the supply body 110 is formed to be tapered in a shape gradually narrowing from the second supply coupling hole 122 to the first supply coupling part 130 in the direction of the first supply support surface 143 . ) and may be configured to include a second supply support surface 111 that is fastened in contact.
That is, the first supply support surface 143 configured to support the load of the supply body 110 may be formed in a shape that gradually tapers toward the supply body 110 toward the center, and the first supply support surface ( 143) may be formed in a shape corresponding to the tapered shape of the second supply support surface 111 configured to be in contact with the first supply support surface 143, the first supply support surface 143 and the second supply paper According to the shape of the ground surface 111, the contact area between the supply body 110 and the first main packing 140 is increased so that the supply body 110 and the first main packing 140 are firmly supported with each other. can

The shape in which the first supply support surface 143 of the first main packing 140 and the second supply support surface 111 of the supply body 110 are tapered is the first main packing 140 and the supply body 110. By increasing the contact area of , the coupling force between the first main packing 140 and the supply body 110 is improved.

Meanwhile, according to FIG. 3A , the first main packing 140 may include a rotation preventing protrusion 144 in which a portion of the first supply support surface 143 protrudes in the supply body 110 direction. , the supply body 110 may include a rotation prevention groove in which a portion of the second supply support surface 111 is formed in a shape corresponding to the rotation prevention protrusion 144 of the first main packing 140 .

The anti-rotation protrusion 144 and the anti-rotation groove are formed in the first main packing 140 in a state in which the first main packing 140 is coupled to the first supply coupling part 130 of the supply flange 100 . ) is configured to prevent rotation based on the center of the first main packing through hole 141 .

The anti-rotation protrusion 144 and the anti-rotation groove may be configured to be formed at positions corresponding to each other, respectively, and may be configured to prevent rotation of the first main packing 140 .

In addition, in the present invention, the shape of the anti-rotation protrusion 144 and the anti-rotation groove is shown as being formed in a straight line, but depending on the implementation environment, the shape of the anti-rotation protrusion 144 and the anti-rotation groove is the first. In a state in which the first main packing 140 is coupled to the first supply coupling part 130 of the supply flange 100, any shape that can prevent the first main packing 140 from rotating may be used in any other shape. It can be modified and applied and practiced.

According to the accompanying Figures 3a and 3b, in the discharge flange 200 of the present invention, the discharge through-hole formed at a position corresponding to the position where the inspection pipe 300 is installed among the upper surface or the lower surface of the discharge body 210 A first discharge coupling portion 230 formed in a groove shape along the circumferential direction of 220; And formed in the same shape as the first discharge coupling portion 230 is coupled to the first discharge coupling portion 230, the second main packing through hole 241 corresponding to the discharge through hole 220 is formed A second main packing in which a second main packing coupling groove 242 is formed along the circumferential direction of the second main packing through hole 241 between the second main packing through hole 241 and the outer periphery ( 240) may be included. In addition, in the inspection tube 300 of the present invention, any one of the upper and lower portions not inserted into the first main packing coupling groove 142 of the first main packing 140 is the second main packing 240 . 2 It may be configured to be inserted into the main packing coupling groove (242).

The first discharge coupling part 230 is formed in a groove shape into which the second main packing 240 can be inserted, and as described above, a shape corresponding to the shape of the second main packing 240 . It is formed of a doedoe, it is formed in a finely smaller size than the second main packing 240, and the second main packing 240 is preferably configured to be coupled while being forcedly fitted to the first discharge coupling part 230. .

This is to prevent the second main packing 240 coupled to the first discharge coupling unit 230 from being detached from the first discharge coupling unit 230 after coupling to the first discharge coupling unit 230, To this end, a separate adhesive or the like may be applied between the first discharge coupling part 230 and the second main packing 240 according to the implementation environment.

On the other hand, the material of the second main packing 240, like the first main packing 140, may be composed of Teflon having heat resistance, corrosion resistance and friction resistance. As the material has heat resistance, corrosion resistance and friction resistance like Teflon, any material that is advantageous for deformation can be changed and implemented and applied. It may be configured to reduce vibration noise generated by the fluid flowing in the inner and discharge through-holes 220 .

In addition, the first discharge support surface 211 configured to support the load of the first main packing 140 may be formed in a shape that gradually tapers toward the discharge pipe 20 toward the center, and the first discharge support The second discharge support surface 243 configured to be in contact with the surface 211 may be formed in a shape corresponding to the tapered shape of the first discharge support surface 211 , and this first discharge support surface 211 may be formed in a shape corresponding to the tapered shape of the first discharge support surface 211 . ) and the shape of the second discharge supporting surface 243, the contact area between the second main packing 240 and the discharging body 210 is increased, so that the second main packing 240 and the discharging body 210 are connected to each other. It may be configured to be firmly supported.

The shape in which the first discharge supporting surface 211 of the discharge body 210 and the second discharge supporting surface 243 of the second main packing 240 are tapered is the discharge body 210 and the second main packing ( By increasing the contact area of 240 , the coupling force between the discharge body 210 and the second main packing 240 is improved.

Meanwhile, according to FIG. 3B , the second main packing 240 may include a rotation preventing protrusion 244 in which a portion of the second discharge support surface 243 protrudes in the direction of the discharge body 210 . And, the discharge flange 200 may include a rotation preventing groove in which a portion of the first supply support surface 143 is formed in a shape corresponding to the rotation preventing protrusion 244 of the second main packing 240 .

The anti-rotation protrusion 244 and the anti-rotation groove are the second main packing 240 in a state in which the second main packing 240 is coupled to the first discharge coupling part 230 of the discharge flange 200 . ) is configured to prevent rotation based on the center of the second main packing through hole 241.

The anti-rotation protrusion 244 and the anti-rotation groove may be configured to prevent rotation of the second main packing 240 by being configured to be formed at positions corresponding to each other.

In addition, in the present invention, the shape of the anti-rotation protrusion 244 and the anti-rotation groove is shown as being formed in a straight line, but depending on the implementation environment, the shape of the anti-rotation protrusion 244 and the anti-rotation groove is the first. If the second main packing 240 can prevent the second main packing 240 from rotating in a state in which it is coupled to the first discharge coupling part 230 of the discharge flange 200, any other shape can be used. It can be modified and applied and practiced.

Figure 4a is a view showing a support frame of the inspection device for checking fluid foreign substances according to the present invention, Figure 4b is a view showing an embodiment of the support frame of the inspection device for checking fluid foreign substances according to the present invention, Figure 4c is Figure 4b It is an exploded cross-sectional view by expanding (A) of Fig. 4D is an exploded cross-sectional view by expanding (B) of Fig. 4B.

According to the accompanying Figures 4a to 4d, in the support frame 400 of the present invention, one side is configured to penetrate the supply body 110 and the other side is configured to penetrate the discharge body 210, a plurality of configurations A support rod 410 configured to be spaced apart from each other at regular intervals along the circumferential direction of the supply body 110 and the discharge body 210, and one end of the support rod 410 passing through the supply flange 100 is coupled to A supply support cap nut 420 and a discharge support cap nut 430 coupled to the other end of the support rod 410 passing through the discharge flange 200 may be included.

That is, the support frame 400 includes the support rod 410 , the supply support cap nut 420 , and the discharge support cap nut 430 in the circumferential direction of the supply body 110 and the discharge body 210 . By being configured to be spaced apart from each other at regular intervals along the , the supply body 110 and the discharge body 210 are firmly coupled.

At this time, the support rod 410, the supply support cap nut 420, and the discharge support cap nut 430 are each composed of 4 to 12 as shown in FIG. 1B, and the supply body 110 and the discharge body 210 ) is preferably configured to be spaced apart at regular intervals along the circumferential direction, and the number of such support rods 410, supply support cap nut 420 and discharge support cap nut 430 is the supply body 110. and the diameter of the discharge body 210 can be changed and implemented and applied.

On the other hand, the support frame 400 is coupled to one side of the support rod 410, the supply support nut 440 configured to be in contact with the inner surface of the supply body 110 facing the discharge body 210 and A discharge support nut 450 coupled to the other side of the support rod 410 and configured to be in contact with the inner surface of the discharge body 210 facing the supply body 110 may be included.

The supply support nut 440 is coupled to a position symmetrical to the supply support cap nut 420 with respect to the supply body 110 , and the discharge support nut 450 is based on the discharge body 210 . By being coupled to a position symmetrical with the discharge support cap nut 430 as a result, the compression force generated by the coupling of the supply support cap nut 420 and the discharge support cap nut 430 is checked as shown in FIG. 4b. It is applied to the tube 300 and is configured to prevent the inspection tube 300 from being damaged.

That is, the supply support cap nut 420 and the supply support nut 440 are coupled to the support rod 410 so as to be in contact with each of the outer and inner surfaces of the supply body 110 to support the supply body 110 . The discharge support cap nut 430 and the discharge support nut 450 are coupled to the support rod 410 so as to be in contact with each of the outer and inner surfaces of the discharge body 210 to support the discharge body 210 . can be configured to

At this time, the supply support cap nut 420 and the discharge support cap nut 430 are configured to be formed in a cap shape, so that excessive compressive force is generated on the supply support nut 440 and the discharge support nut 450 to support the supply Any one or both of the nut 440 and the discharge support nut 450 may be loosened to prevent the inspection tube 300 from being damaged.

In addition, as shown in Fig. 4c, the supply flange 100 has a supply support hole 160, which is formed in plurality along the circumferential direction of the supply body 110 and is configured to be penetrated by the support rod 410, the A second supply coupling portion 170 formed in a groove shape along the circumferential direction of the supply support hole 160 formed at a position corresponding to the position of the supply support cap nut 420 among the upper surface or the lower surface of the supply body 110 . And formed in a shape corresponding to the second supply coupling portion 170, coupled to the second supply coupling portion 170, and a through hole corresponding to the supply support hole 160 is formed in the support rod (410) A first sub-packing 180 configured to be penetrated by the may be included.

The second supply coupling part 170 is formed in a groove shape into which the first sub-packing 180 can be inserted, and as described above, a shape corresponding to the shape of the first sub-packing 180 . It is preferable that the first sub-packing 180 is formed in a size smaller than that of the first sub-packing 180, and is configured to be coupled while the first sub-packing 180 is pressed into the second supply coupling part 170. .

This is to prevent the first sub-packing 180 coupled to the second supply coupling part 170 from being detached from the second supply coupling part 170 after coupling to the second supply coupling part 170, To this end, a separate adhesive or the like may be applied between the second supply coupling part 170 and the first sub-packing 180 according to the implementation environment.

On the other hand, the material of the first sub-packing 180, like the first main packing 140, may be composed of Teflon having heat resistance, corrosion resistance and friction resistance, and the The material is configured to be changed and implemented and applied as long as it is a material that is not easily deformed as it has heat resistance and corrosion resistance like Teflon, so that the first sub-packing 180, the supply support cap nut 420 ) to prevent loosening of the supply support cap nut 420 due to vibration generation, and at the same time reduce noise caused by vibration generation, and between the supply support cap nut 420 and the supply body 110 It can be adapted to counteract the gap.

In addition, as shown in Fig. 4d, the discharge flange 200 is formed in a plurality along the circumferential direction of the discharge body 210 and is formed at a position corresponding to the supply support hole 160, and the support rod 410. The circumferential direction of the discharge support hole 260 formed at a position corresponding to the position of the discharge support cap nut 430 among the discharge support hole 260 configured to pass through the discharge body 210, the upper surface or the lower surface of the discharge body 210. A second discharge coupling part 270 formed in a groove shape along the side, and a shape corresponding to the second discharge coupling part 270 are coupled to the second discharge coupling part 270 and the discharge support hole 260. A second sub-packing 280 configured to be penetrated by the support rod 410 may be included in a through hole corresponding to the .

The second discharge coupling part 270 is formed in a groove shape into which the second sub-packing 280 can be inserted, and as described above, a shape corresponding to the shape of the second sub-packing 280 . It is preferable that the second sub-packing 280 is formed in a size smaller than that of the second sub-packing 280, and is configured to be coupled while the second sub-packing 280 is pressed into the second discharge coupling part 270. .

This is to prevent the second sub-packing 280 coupled to the second discharge coupling unit 270 from being detached from the second discharge coupling unit 270 after coupling to the second discharge coupling unit 270, To this end, a separate adhesive or the like may be applied between the second discharge coupling part 270 and the second sub-packing 280 depending on the implementation environment.

On the other hand, the material of the second sub-packing 280, like the first main packing 140, may be composed of Teflon having heat resistance, corrosion resistance and friction resistance, and The material is configured to be changed and implemented and applied as long as it is a material that is not easily deformed as it has heat resistance and corrosion resistance like Teflon, so that the second sub-packing 280 is the discharge support cap nut 430 ) to prevent loosening of the discharge support cap nut 430 due to vibration generation, and at the same time reduce noise caused by vibration generation, and between the discharge support cap nut 430 and the discharge body 210 It can be adapted to counteract the gap

5 is a view showing the state monitoring unit of the inspection device for checking fluid foreign substances according to the present invention, FIG. 6a is a view showing an embodiment of the state monitoring unit according to FIG. 5, and FIG. 6b is the state monitoring unit according to FIG. It is a graph showing an example of a determination criterion according to the value of light, and FIG. 7 is a view showing an exemplary state of a state monitoring unit according to another embodiment of the inspection device for checking fluid foreign substances according to the present invention.

5 to 6b, the inspection device for checking fluid foreign substances of the present invention may further include a state monitoring unit 500 configured to check and transmit the state of the fluid flowing in the inspection tube 300. .

The condition monitoring unit 500 includes a light emitting module 510 provided at a position adjacent to the inspection tube 300 and configured to emit light passing through the inspection tube 300 and adjacent to the inspection tube 300 . A main light receiving module 520 configured to collect light emitted from the light emitting module 510 and transmitted through the inspection tube 300 may be included.

As shown in FIG. 6B , the state monitoring unit 500 determines that the fluid passing through the inspection tube 300 is in a normal state when the level of light collected by the main light receiving module 520 is within a preset range. (solid line, S) may be configured to determine that the value of the light collected by the main light receiving module 520 is lower than a preset range (dotted line, E1), or is collected by the main light receiving module 520 If the level of light is higher than the preset range (dotted line, E2), or the level of light collected by the main light receiving module 520 has a significant deviation within the preset range (dotted line, E3), the inspector 300 It may be configured to determine that the fluid passing through is in an abnormal state.

At this time, the state monitoring unit 500, the value of the light collected by the main light receiving module 520 is lower than a preset range (E1), or the value of the light collected by the main light receiving module 520 is a preset range If it is higher (E2), it is determined that the concentration of the fluid, that is, the concentration of one or a plurality of gases and one or a plurality of liquids constituting the cleaning liquid does not match, and may be configured to transmit a first error signal, as shown in FIG. As shown, when the value of the light collected by the main light receiving module 520 is out of the preset range and the deviation is severe (E3), it is determined that the bubble of the fluid, that is, the mixing ratio of the gas is high. and transmit a second error signal.

On the other hand, the first error signal and the second error signal transmitted from the state monitoring unit 500 are transmitted to a separately provided display, etc., so that the user can check the first error signal and the second error signal. And, according to the implementation environment, it may be transmitted to a control unit configured to set the mixing ratio of the fluid so that the mixing ratio of the fluid is adjusted.

And the control unit, according to the received first error signal and the second error signal, a gas control valve of one or a plurality of gas tanks in which the gas is stored and a liquid control valve of one or a plurality of storage tanks in which the liquid is stored. By being configured to control, the mixing ratio of the fluid can be configured to be adjusted.

According to the accompanying FIG. 7 , the inspection device for checking fluid foreign substances according to another embodiment of the present invention further includes a state monitoring unit 500 configured to check and transmit the density of the fluid flowing in the inspection tube 300 . can

At this time, the light emitted from the light emitting module 510 may be configured such that the angle of refracting is changed according to the inspection tube 300 and the density value of the fluid flowing inside the inspection tube 300 .

The condition monitoring unit 500 includes a light emitting module 510 provided at a position adjacent to the inspection tube 300 and configured to emit light passing through the inspection tube 300 and adjacent to the inspection tube 300 . A first sub light receiving module 530 and a second sub light receiving module 540 configured to collect light emitted from the light emitting module 510 and transmitted through the inspection tube 300 may be included. .

The first sub light receiving module 530 and the second sub light receiving module 540 are each configured to be positioned in a direction in which the light emitted from the light emitting module 510 is refracted through the inspection tube 300 and is emitted, As shown in FIG. 7 , the first sub light receiving module 530 may be configured to be positioned in a direction in which light is emitted when light is refracted more than the second sub light receiving module 540 , and the second sub light receiving module 530 may be configured to be positioned in a direction in which light is emitted. The light receiving module 540 may be configured to be positioned in a direction in which light is emitted when less light is refracted compared to the first sub light receiving module 530 .

That is, the state monitoring unit 500 according to another embodiment of the present invention includes the first sub light receiving module 530 and the second sub light receiving module 540 according to the density value of the fluid flowing inside the inspection tube 300 . ) is configured so that the amount of light collected is different, so that the density value of the fluid flowing inside the inspection tube 300 can be measured and transmitted.

On the other hand, the density value transmitted from the state monitoring unit 500 may be transmitted to a separately provided display, etc., so that the user can check the density value.

As described above, according to the present invention, the fluid supplied through the supply pipe and discharged to the discharge pipe is configured to pass through the inspection tube made of a transparent material, so that it is possible to grasp the state of the fluid passing through the inspection tube.

In the above description, various embodiments of the present invention have been presented and described, but the present invention is not necessarily limited thereto. It can be seen that branch substitutions, transformations and alterations are possible.

10: supply pipe 20: discharge pipe
100: supply flange
110: supply body 111: second supply support surface
120: supply through hole 121: first supply coupling hole
122: second supply coupling hole 123: third supply coupling hole
130: first supply coupling part
140: first main packing
141: first main packing through hole 142: first main packing coupling groove
143: first supply support surface 144: anti-rotation projection
150: O-ring 160: supply support hole
170: second supply coupling unit 180: first sub-packing
200: discharge flange
210: discharge body 211: first discharge support surface
220: exhaust through hole 221: first exhaust coupling hole
222: second exhaust coupling hole 223: third exhaust coupling hole
230: first exhaust coupling part
240: second main packing
241: second main packing through hole 242: second main packing coupling groove
243: second discharge support surface
250: O-ring 260: discharge support hole
270: second exhaust coupling part 280: second sub-packing
300 : checker
400: support frame
410: support bar 420: supply support cap nut
430: discharge support cap nut 440: supply support nut
450: discharge support nut
500: status monitoring unit
510: light emitting module 520: main light receiving module
530: first sub light receiving module 540: second sub light receiving module
600: sensor unit

Claims (10)

In the light projecting device for checking fluid foreign substances provided between the supply pipe to which the fluid is supplied and the discharge pipe to which the fluid is discharged,
A supply body 110 connected to the end of the supply pipe 10 and a supply through hole 120 formed in a shape to penetrate the supply body 110 in correspondence to the flow direction of the fluid supplied from the supply pipe 10 ) The supply flange 100 is included;
The discharge body 210 connected to the end of the discharge pipe 20 and the discharge through-hole 220 formed in a shape penetrating the discharge body 210 corresponding to the position of the supply through-hole 120 is included. discharge flange 200;
an inspection pipe 300 made of a transparent material and installed between the supply body 110 of the supply flange 100 and the discharge body 210 of the discharge flange 200; and
The supply body 110 of the supply flange 100 and the discharge body 210 of the discharge flange 200 are connected to each other, and the supply body 110 of the supply flange 100 and the discharge flange 200 are discharged. A support frame 400 for supporting the body 210 to maintain a constant interval between the body 210;
This includes,
In the supply flange 100,
The first supply coupling part 130 formed in a groove shape along the circumferential direction of the supply through hole 120 formed at a position corresponding to the position where the inspection pipe 300 is installed among the upper surface or the lower surface of the supply body 110 . ); and a first main packing through hole formed in a shape corresponding to the first supply coupling part 130 and coupled to the first supply coupling part 130 by force fitting, and corresponding to the supply through hole 120 . 141 is formed, and a first main packing coupling groove 142 is formed between the first main packing through hole 141 and the outer periphery along the circumferential direction of the first main packing through hole 141 A first main packing 140 is included,
The inspector 300 is
Any one of the upper and lower parts is configured to be inserted into the first main packing coupling groove 142 of the first main packing 140,
In the supply through hole 120,
a first supply coupling hole 121 configured to have the same diameter as the outer diameter of the supply pipe 10 and to be inserted into the supply pipe 10;
a second supply coupling hole 122 configured to have the same diameter as the inner diameter of the supply pipe 10; and
The first supply coupling hole 121 is formed to be tapered in a gradually narrower shape toward the second supply coupling hole 122 to form the first supply coupling hole 121 and the second supply coupling hole 122 . a third supply coupling hole 123 configured to connect;
includes,
The inner diameter of the supply pipe 10, the diameter of the second supply coupling hole 122, the diameter of the first main packing through hole 141, and the inner diameter of the inspection tube 300 are formed to be the same and are provided in a shaft-matched state. ,
The first main packing 140,
It is configured on the opposite surface of the first main packing coupling groove 142, and includes a first supply support surface 143 that is tapered to support the load of the supply body 110,
The supply body 110,
A second supply support surface 111 that is formed to be tapered in a shape gradually narrowing from the second supply coupling hole 122 toward the first supply coupling part 130 to be in contact with the first supply support surface 143 is formed. including,
The first main packing 140 has
A portion of the first supply support surface 143 may include a rotation preventing protrusion 144 formed in a shape protruding in the supply body 110 direction,
The supply body 110 includes a rotation prevention groove in which a portion of the second supply support surface 111 is formed in a shape corresponding to the rotation prevention projection 144 of the first main packing 140,
The inspection device for checking fluid foreign substances, characterized in that it further includes a state monitoring unit (500) configured to check and transmit the state of the fluid flowing in the inspection tube (300).
The method of claim 1,
The fluid supplied through the supply pipe 10 and discharged through the discharge pipe 20 is,
A check device for checking fluid foreign substances, characterized in that the gas in which one or a plurality of materials are mixed and the liquid in which one or a plurality of materials are mixed are mixed with each other.
delete The method of claim 1,
In the discharge flange 200,
The first discharge coupling part 230 formed in a groove shape along the circumferential direction of the discharge through-hole 220 formed at a position corresponding to the position where the inspection pipe 300 is installed among the upper surface or the lower surface of the discharge body 210 ); And formed in the same shape as the first discharge coupling portion 230 is coupled to the first discharge coupling portion 230, the second main packing through hole 241 corresponding to the discharge through hole 220 is formed A second main packing in which a second main packing coupling groove 242 is formed along the circumferential direction of the second main packing through hole 241 between the second main packing through hole 241 and the outer periphery ( 240) is included,
The inspector 300 is
So that any one of the upper and lower parts not inserted into the first main packing coupling groove 142 of the first main packing 140 is inserted into the second main packing coupling groove 242 of the second main packing 240 A check device for checking fluid foreign substances, characterized in that it is configured.
The method of claim 1,
In the support frame 400,
One side is configured to penetrate the supply body 110 and the other side is configured to penetrate the discharge body 210 , and is configured in plurality to be constant with each other along the circumferential direction of the supply body 110 and the discharge body 210 . Support rods 410 configured to be spaced apart from each other;
a supply support cap nut 420 coupled to one end of the support rod 410 passing through the supply flange 100; and
a discharge support cap nut 430 coupled to the other end of the support rod 410 passing through the discharge flange 200;
Checking device for checking fluid foreign substances, characterized in that it is included.
delete The method of claim 1,
In the state monitoring unit 500,
a light emitting module 510 provided at a position adjacent to the inspection tube 300 and configured to emit light passing through the inspection tube 300 ; and
a main light receiving module 520 provided at a position adjacent to the inspection tube 300 and configured to collect light emitted from the light emitting module 510 and transmitted through the inspection tube 300;
Checking device for checking fluid foreign substances, characterized in that it is included.
delete The method of claim 1,
In the discharge through hole 220,
a first discharge coupling hole 221 configured to have the same diameter as the outer diameter of the discharge pipe 20 so that the discharge pipe 20 is inserted;
a second discharge coupling hole 222 having the same diameter as the inner diameter of the discharge pipe 20; and
The first exhaust coupling hole 221 is formed to be tapered in a gradually narrower shape toward the second exhaust coupling hole 222 to form the first exhaust coupling hole 221 and the second exhaust coupling hole 222 . a third exhaust coupling hole 223 configured to connect;
Checking device for checking fluid foreign substances, characterized in that it is included.
The method of claim 1,
Any one of the flow rate and temperature of the fluid that is installed in any one or a plurality of the supply pipe 10 , the inspection pipe 300 , and the discharge pipe 20 and flows in the supply pipe 10 , the inspection pipe 300 , and the discharge pipe 20 . Inspection device for checking fluid foreign substances, characterized in that the sensor unit 600 configured to inspect one or both of them is further included.

Images