KR102234140B1 - Module for fixing standard specimens - Google Patents

Abstract

The present invention relates to a standard specimen fixing module, and in particular, to a standard specimen fixing module used to fix a standard specimen used in a wafer inspection apparatus.

Description

Standard specimen fixing module {MODULE FOR FIXING STANDARD SPECIMENS}

The present invention relates to a standard specimen fixing module, and in particular, to a standard specimen fixing module used to fix a standard specimen used in a wafer inspection apparatus.

Wafers are used in semiconductors or solar modules. Such wafers generally perform a process of inspecting whether contaminants remain on the surface or defects such as chipping during manufacturing. As one of the methods of inspecting a wafer, it is known to perform inspection by fixing a standard specimen on a wafer product by a vacuum adsorption method using collet parts. In this case, if the collet parts are worn after a certain period of use and vacuum adsorption is not properly performed, the standard specimen is not fixed well, and thus there is a problem that the accuracy of wafer inspection is deteriorated.

An object of the present invention is to provide a standard specimen fixing module capable of attaching and detaching a standard specimen to a wafer with a constant detachment force without limitation to the standard (eg, size) of a standard specimen used in a wafer inspection apparatus.

In order to achieve the above object, the present invention is a support; A magnetic portion disposed on the support portion and in which a plurality of magnetic blocks are arranged; And a magnetic force shielding portion disposed between the support portion and the magnetic portion and shielding the magnetic force line in at least one direction of the magnetic force lines of the magnetic portion, but having a surface magnetic force satisfying the following relations 1 and 2, a standard specimen fixing the standard specimen Provides a fixed module:

[Relationship 1]

[Relationship 2]

(In the above formula,

|G _1A | is the absolute value (Gauss) of the surface magnetic force at the center of the standard specimen fixing module,

|G _2A | is the absolute value of the surface magnetic force (Gauss) at one end of the standard specimen fixing module,

|G _3A | is the absolute value of the surface magnetic force (Gauss) of the other end of the standard specimen fixing module).

In the present invention, the standard specimen can be attached to and detached from the wafer with a constant detachment force without being restricted to the standard (eg, size) of the standard specimen used in the wafer inspection apparatus.

1 is a plan view showing a standard specimen fixing module according to a first embodiment of the present invention, and an enlarged portion is a cross-sectional view of the standard specimen fixing module taken along a cutting line A-A'.
2 is a plan view showing a standard specimen fixing module according to a second embodiment of the present invention, and an enlarged portion is a cross-sectional view of the standard specimen fixing module taken along a cutting line A-A'.
3 is a plan view showing a standard specimen fixing module according to a second embodiment of the present invention, and an enlarged portion is a cross-sectional view of the standard specimen fixing module taken along a cutting line A-A'.
4 is a cross-sectional view schematically showing a state in which a standard specimen is attached to a wafer surface using the standard specimen fixing module of the present invention.
5 is a diagram showing a magnetic part divided into unit regions in order to measure the adhesion of each part of the standard specimen fixing module manufactured in Examples 1 to 2, respectively.

Hereinafter, the present invention will be described.

Advantages and features of the present invention, and a method of achieving them will become apparent with reference to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, only the present embodiments are intended to complete the disclosure of the present invention, and common knowledge in the technical field to which the present invention pertains. It is provided to completely inform the scope of the invention to those who have, and the invention is only defined by the scope of the claims. Accordingly, in some embodiments, well-known process steps, well-known device structures, and well-known techniques have not been described in detail in order to avoid obscuring interpretation of the present invention. The same reference numerals refer to the same elements throughout the specification.

Unless otherwise defined, all terms (including technical and scientific terms) used in the present specification may be used with meanings that can be commonly understood by those of ordinary skill in the art to which the present invention belongs. In addition, terms defined in a commonly used dictionary are not interpreted ideally or excessively unless explicitly defined specifically.

In this specification, the first direction is the first direction of the module, the X-axis direction shown in FIGS. 1 to 3, the second direction is the direction crossing the first direction, and the Y-axis direction shown in FIGS. 1 to 3 And the third direction is a direction perpendicular to the first direction and the second direction, and is the Z-axis direction shown in FIGS. 1 to 3.

In addition, in this specification, the horizontal length means the length in the X-axis direction, the vertical length means the length in the Y-axis direction, and the thickness (height) means the length in the Z-axis direction.

In general, in inspecting a wafer, a standard specimen was fixed to the wafer surface by a vacuum adsorption method using collet parts. In this case, if the collet parts are worn after a certain period of use, vacuum adsorption is not performed properly, so that the standard specimen is not well fixed to the wafer surface.

Accordingly, the present inventors tried to fix the standard specimen to the wafer surface using a magnet. In general, the magnetic force decreases as the thickness of the magnet becomes thinner based on the pole direction, or the width and length of the magnet increase. On the other hand, the adhesion of the magnet to the standard specimen is proportional to the magnetic strength of the magnet or the area of the magnet. Therefore, the present inventors attempted to increase the area of the magnet by increasing the thickness of the magnet or increasing the width and length of the magnet in order to increase the adhesion of the magnet to the standard specimen. However, when only the area of the magnet is increased while the thickness of the magnet is the same, the adhesion of the magnet to the standard specimen does not increase, but the magnetic strength of the magnet decreases. In addition, the magnetic force deviation between the center portion of the magnet and each end (corner portion) increased, and the adhesion force to the standard specimen was different for each portion of the magnet. In particular, the magnetic force deviation between the center and the end was larger as the thickness of the large magnet was relatively thin compared to the horizontal and vertical length. For this reason, there is a limitation in applying a large-sized magnet with a thin thickness to a wafer inspection apparatus requiring a constant detachment and attachment force.

Therefore, in the present invention, a plurality of magnetic blocks are used instead of a large magnet whose thickness is relatively thin compared to the horizontal and vertical lengths. That is, in the present invention, a plurality of magnetic blocks are arranged to constitute a magnetic portion. Because of the plurality of magnetic blocks, magnetic force is uniformly distributed for each portion of the magnetic portion, and there is almost no magnetic force deviation between the central portion and each end portion. Accordingly, the present invention includes a plurality of magnetic blocks, so that the standard specimen can be attached to the wafer surface with uniform adhesion. In addition, it is possible to easily adjust the intensity of the magnetic force and the deviation of the adhesion force according to the material or size of the magnetic block.

In addition, the present invention includes a shielding portion capable of shielding the magnetic field lines in at least one direction of the plurality of magnetic blocks. In this case, it is possible to maximize the strength of the magnetic force in the unshielded direction at the same thickness.

As described above, the present invention is a standard specimen fixing module for fixing a standard specimen to a wafer to inspect a wafer used in a wafer inspection apparatus, comprising: a magnetic portion in which a plurality of magnetic blocks are arranged; A magnetic force shielding unit disposed on at least one side of the magnetic unit and shielding a magnetic force line in at least one direction of the magnetic force lines of the magnetic unit; And a support part supporting the magnetic part and the magnetic force shielding part. As a result, the standard specimen fixing module of the present invention maximizes the magnetic strength in the unshielded direction at the same thickness, and can be easily used in a wafer inspection apparatus that requires a constant detachment and detachment because the surface magnetic force deviation for each part is small. . In addition, the standard specimen fixing module of the present invention has no restrictions on the specifications of the wafer and the standard specimen, and can be applied to various wafers and standard specimens.

1 to 3 are plan views schematically showing the standard specimen fixing module according to the first to third embodiments of the present invention, respectively, and the enlarged portion is of the standard specimen fixing module cut along the cutting line A-A'. It is a cross-sectional view.

Hereinafter, the standard specimen fixing modules 100A, 100B, and 100C according to the first to third embodiments of the present invention will be described with reference to FIGS. 1 to 3.

1 to 3, the standard specimen fixing modules 100A, 100B, and 100C according to the first embodiment of the present invention include a support part 10, a magnetic part 20, and between the support part and the magnetic part. Including the magnetic force shield 30 disposed in, and optionally further includes an auxiliary support portion 40 surrounding the support portion 10, the magnetic portion 20, and the magnetic force shield 30.

The support portion 10 is a portion that supports the magnetic portion 20 and the magnetic force shielding portion 30, and the shape thereof is not particularly limited, and may be selected according to the standards required by the wafer product and the wafer inspection apparatus. For example, it may be in the shape of a bar or a plate.

The material of the support portion 10 is not particularly limited as long as it is a non-magnetic material capable of fixing the magnetic force shield portion 30. For example, non-ferrous metals such as Al alloy, brass, bronze, and the like; There are plastics such as MC nylon (Mono Cast Nylon), epoxy resin, glass fiber/epoxy resin composite substrate (e.g. FR-4), Bakelite, etc. These are used alone or in two types. The above can be mixed and used. According to an example, the support may be in the form of a bar made of an Al alloy.

In the standard specimen fixing modules 100A, 100B, 100C of the present invention, the magnetic portion 20 is a portion disposed on the support portion 10, and a standard specimen containing metal or magnet is fixed on the wafer by its magnetic force ( Attached).

However, in the magnetic part 20 according to the present invention, a plurality of magnetic blocks 21 are arranged. The magnetic portion 20 has a higher magnetic force than a conventional fixed bar made of one large magnet, and can easily adjust the magnetic force. In addition, since the magnetic part 20 of the present invention has no or small magnetic force deviation between the center and each end along the first direction (X-axis direction) of the module, unlike the conventional fixing, one or more standard specimens are placed on the wafer. It can be fixed with a certain adhesive force.

Specifically, the standard specimen fixing module has a surface magnetic force that satisfies the following relational equations 1 and 2 by including a plurality of magnetic blocks in the magnetic portion. As described above, in the present invention, unlike a conventional standard specimen fixing module composed of one magnet, a decrease in surface magnetic force at the center of the module is minimized, and accordingly, a decrease in adhesion to the standard specimen may be minimized. Here, the surface magnetic force means the magnetic force on the opposite surface in the direction of the magnetic force shield in the standard specimen fixing module.

[Relationship 1]

[Relationship 2]

(In the above formula,

|G _1A | is the absolute value of the surface magnetic force (Gauss) of the center along the first direction of the standard specimen fixing module,

|G _2A | is the absolute value of the surface magnetic force (Gauss) at one end along the first direction of the standard specimen fixing module,

|G _3A | is the absolute value of the surface magnetic force (Gauss) of the other end along the first direction of the standard specimen fixing module).

In this case, the standard specimen fixing module has a surface magnetic force that satisfies the following relational equation 3.

[Relationship 3]

(In the above formula,

|G _2A | is the absolute value of the surface magnetic force (Gauss) at one end along the first direction of the standard specimen fixing module,

|G _3A | is the absolute value of the surface magnetic force (Gauss) of the other end along the first direction of the standard specimen fixing module).

In addition, the standard specimen fixing module has a gap magnetic force that satisfies the following relations 4 and 5 by the magnetic portion including a plurality of magnetic blocks. Here, the gap magnetic force is a gap plate (e.g., wafer) (thickness: 1 mm) between the standard specimen fixing module and the standard specimen, so that the gap (thickness: 1 mm) on the magnetic path of the standard specimen fixing module. If present, refers to the magnetic force of the standard specimen holding module towards the gap plate side.

[Relationship 4]

[Relationship 5]

(In the above formula,

If there is a gap of 1 mm in the magnetic path of the standard specimen fixing module,

|G _1B | is the absolute value of the gap magnetic force (Gauss) at the center along the first direction of the standard specimen fixing module,

|G _2B | is the absolute value of the gap magnetic force (Gauss) at one end along the first direction of the standard specimen fixing module,

|G _3B | is the absolute value of the gap magnetic force (Gauss) at the other end along the first direction of the standard specimen fixing module).

In this case, the standard specimen fixing module has a gap magnetic force that satisfies the following equation (6).

[Relationship 6]

(In the above formula,

If there is a gap of 1 mm in the magnetic path of the standard specimen fixing module,

|G _2B | is the absolute value of the gap magnetic force (Gauss) at one end along the first direction of the standard specimen fixing module,

|G _3B | is the absolute value of the gap magnetic force (Gauss) at the other end along the first direction of the standard specimen fixing module).

In addition, the standard specimen fixing module has an average surface magnetic force of about 1.5 to 2.5 times greater than that of a single magnet fixing module (fixing bar) having the same shape and size (horizontal, vertical length and thickness) as the magnetic part. Have. Here, the conventional fixing module is a support portion, and a fixed bar disposed on the support portion and made of one magnet having the same shape and size as the magnetic portion of the present invention.

The standard specimen fixing module of the present invention having such a surface magnetic force and a gap magnetic force has an average adhesion to a standard specimen of about 1.5 to 2.5 times greater than that of a conventional fixing module of one magnet. Here, the average adhesive force of the present invention is divided into unit regions having a certain number of magnetic blocks along the first direction, and means the average value of the adhesive force to the standard specimen in each unit region, and the adhesive force of the conventional fixing module is One magnet is divided into unit regions having a certain size along the first direction, and means the average value of the adhesion force to the standard specimen in each unit region.

In addition, the standard specimen fixing module of the present invention has a locally uniform adhesive force along the first direction (X-axis direction). According to an example, in the standard specimen fixing module of the present invention, the standard deviation of the secondary force for the standard specimen in the unit area along the first direction is in the range of about 0 to 0.5. As described above, in the present invention, since the adhesion force to the standard specimen is uniform as a whole along the first direction of the module, there are no restrictions on the specifications of the wafer and the standard specimen.

The magnetic force of the magnetic portion 20 may be adjusted according to the standard specimen, thereby improving adhesion to the standard specimen. For example, when the standard specimen includes a metal layer (eg, a Ni layer), the magnetic force of the magnetic portion may be adjusted according to the thickness of the metal layer. However, the magnetic force of the magnetic unit is adjusted according to the material, number, and size of the magnetic block. In particular, as the thickness of the magnetic block becomes thinner or the width and length increase, the magnetic force decreases. In addition, the variation of the adhesion force for each portion of the magnetic portion varies depending on the magnetic block. Accordingly, in the present invention, the number of magnetic blocks in the magnetic portion and the thickness, width, and length of the magnetic block are respectively adjusted as follows.

Specifically, the ratio (S ₂ /S ₁ ) of the area (S ₂ ) of one magnetic block to the total area (S ₁ ) of the magnetic part may be in the range of about 0.2 to 3.0%. In this case, the magnetic block may have a thickness Z _{1 in the} range of about 3 to 10 mm. In addition, the magnetic block may have a horizontal length (X ₁ ) ranging from about 10 to 500 mm, and a vertical length (Y ₁ ) ranging from about 10 to 500 mm. In particular, the magnet block is the ratio of the thickness (Z ₁₎ of the width _{(X 1) (Z 1 /} X 1) and / or the height (Y ₁₎ the ratio of the thickness (Z ₁₎ of the (Z ₁ / Y ₁ ) may range from about 0.01 to 1.0. The magnetic part 20 of the present invention in which a plurality of magnetic blocks are arranged may have an adhesive force in the range of about 0.5 to 30 gf uniformly throughout the module with respect to the standard specimen. Here, the total area S _{1 of the} magnetic part may be calculated by Equation 1 below.

[Equation 1]

{N ₁ ×X ₁ + (N ₁ -1)×X ₂ }×{N ₂ ×Y ₁ + (N ₂ -1)×Y ₂ }

(In the above formula,

N ₁ is the number of magnetic blocks arranged in the first direction (eg, X-axis direction) in the magnetic part,

N ₂ is the number of magnetic blocks arranged in a second direction (eg, Y-axis direction) crossing the first direction in the magnetic part,

X ₁ is the width of the magnetic block,

X ₂ is the separation distance between the magnetic blocks disposed along the first direction,

Y ₁ is the length of the magnetic block,

Y ₂ is the separation distance between the magnetic blocks disposed along the second direction).

In addition, the separation distance between the plurality of magnetic blocks disposed along the first direction and the second direction is not particularly limited, but may be set according to the dimensional design of the standard specimen and the support unit and the workability of the auxiliary support unit 40. Accordingly, the plurality of magnetic blocks may be spaced apart in a range of about 0 to 2 mm along the first direction and the second direction.

In addition, the plurality of magnetic blocks 21 may be a kind of magnetic block having the same horizontal length and vertical length, or different types of magnetic blocks having different horizontal and/or vertical lengths. According to an example, as illustrated in FIG. 1, in the magnetic part 20, a plurality of magnetic blocks 21 having the same horizontal length and vertical length may be arranged. According to another example, as shown in FIG. 2, the magnetic unit 20 includes a plurality of first magnetic blocks 21A; And a plurality of second magnetic blocks 21B having the same horizontal length as the first magnetic block and different vertical lengths.

In addition, the shape of the magnetic block 21 is not particularly limited, and may be square or rectangular, and may be circular, as shown in FIG. 3. In this case, when the magnetic block is circular, the diameter D of the magnetic block may be in the range of about 2 to 15 mm.

In addition, lines of magnetic force of the magnetic portion 20 are formed in a radial direction. At this time, the line of magnetic force toward the magnetic force shielding unit 30 is shielded by the magnetic force shielding unit 30, whereby the line of magnetic force toward the opposite side of the magnetic force shielding unit 30 is concentrated, strengthened, and amplified. However, the shielding rate and the amplification factor of the magnetic force line are affected by the thickness of the magnetic portion (ie, magnetic block) 20 and the magnetic force shielding portion 30. Accordingly, in the present invention, the ratio (t ₁ /t _{2 ) of the thickness (t 1} ) of the magnetic portion to the _{thickness (t 2} ) of the magnetic force shielding portion is adjusted in the range of about 2 to 5 (see FIG. 1). In this case, the magnetic portion 20 may be shielded by about 30 to 100% of the magnetic force line with respect to the surface 20A in the direction of the magnetic force shielding portion 30, and thus, the opposite surface 20B in the direction of the magnetic force shielding portion 30 ) Can be amplified in the range of about 120 to 300%.

In such a magnetic part 20, the magnetization directions of the plurality of magnetic blocks are different from each other. A method of arranging such a plurality of magnetic blocks is not particularly limited, and examples include a halbach array, an alternating array, and the like. According to an example, the plurality of magnetic blocks may have N poles and S poles alternately arranged in a first direction and a second direction.

In the standard specimen fixing module (100A, 100B, 100C) of the present invention, the magnetic force shielding part 30 is a part disposed between the support part 10 and the magnetic part 20, for example, on the lower part of the magnetic part 20 Can be placed on The magnetic force shielding part 30 shields the magnetic force in at least one direction (eg, the lower side of the magnetic part) among the magnetic force of the magnetic part 20, and thus a non-shielded direction (eg, the upper side of the magnetic part). You can concentrate and strengthen the magnetic lines of force. As a result, the standard specimen fixing module of the present invention may have increased adhesion to the standard specimen.

The magnetic force shielding unit 30 may be designed according to the type, size, and magnetic force of the magnetic block 21. For example, the magnetic force shielding unit may have a plate shape. In this case, the material of the magnetic force shielding unit may be a magnetic material having a high magnetic permeability, specifically, a magnetic material capable of shielding and reflecting magnetic force lines while having a high magnetic permeability. For example, the magnetic shielding unit includes a steel plate (eg, cold rolled steel sheet), a silicon steel sheet, a galvanized steel sheet (eg, electrolytic galvanized iron (EGI)), but is not limited thereto.

In addition, the magnetic force shielding unit 30 may include a receiving groove (not shown) accommodating a plurality of magnets. This magnetic force shielding part 30 has a shape surrounding the magnetic part 20. That is, the magnetic force shielding unit 30 has a structure that opens only the upper surface of the magnetic unit 20, and shields and reflects the magnetic force line toward the lower side of the magnetic unit 20, thereby shielding the magnetic force line to the surface toward the magnetic force shield unit. Thus, it is possible to amplify the line of magnetic force with respect to the side opposite to the magnetic force shielding portion.

As described above, as described above, the larger the thickness, the better the shielding effect, but counteracts the reduction in weight and thickness. Accordingly, the thickness of the magnetic force shielding portion may be about 0.5 to 3 mm, but is not limited thereto, and the design may be changed according to the material of the magnetic force shielding portion.

The standard specimen fixing modules 100A, 100B, and 100C of the present invention may further include an auxiliary support part 40 that covers the support part 10, the magnetic part 20, and the magnetic force shielding part 30 to fix them. At this time, the magnetic part 20 may be exposed by the auxiliary support part 40, as shown in FIG. 3, or may be non-exposed, as shown in FIGS. 1 to 2. In addition, a spaced portion between the plurality of magnetic blocks may be exposed or non-exposed by the auxiliary support 40. That is, the auxiliary support portion 40 may exist or may not exist as a partition wall portion at a spaced portion between a plurality of magnetic blocks.

The material of the auxiliary support 40 is not particularly limited as long as it is a non-magnetic material. For example, non-ferrous metals such as Al alloy, brass, bronze, and the like; There are plastics such as MC nylon (Mono Cast Nylon), epoxy resin, glass fiber/epoxy resin composite substrate (e.g. FR-4), Bakelite, etc. These are used alone or in two types. The above can be mixed and used. In this case, the auxiliary support portion 40 may be formed of the same or different material as the support portion 10. According to an example, the auxiliary support 40 may be made of an Al alloy.

This auxiliary support portion 40 is not particularly limited as long as the horizontal length and the vertical length are greater than that of the support portion 10. In addition, the height of the auxiliary support part 40 may be equal to or greater than the sum of the heights of the support part 10, the magnetic force shielding part 30, and the magnetic part 20. In this case, the surface of the magnetic block of the magnetic part 20 is exposed or non-exposed according to the height of the auxiliary support part 40. However, the difference from the secondary support portion 40 in height (Z _1), the support part 10, the total height of the sum of the height of the magnetic shield 30 and the chair part (20) (Z ₂₎ of the (Z ₁ -Z ₂₎ When is greater than about 3 mm, the magnetic force of the magnetic part 20 is too small, and the standard specimen may not be well fixed to the wafer. Thus, the height of the auxiliary support (40) (Z ₁₎ and the support (10), the difference between the magnetic shield 30 and the chair Height plus the height of the part _{(20) (Z 2) (} Z 1 -Z 2) It is appropriate to adjust to within the range of about 3 mm or less, specifically about 0 to 3 mm.

As described above, since the standard specimen fixing modules 100A, 100B, and 100C of the present invention have a uniform surface magnetic force as a whole, the adhesion to the standard specimen is also uniform throughout. In particular, since the standard specimen fixing modules 100A, 100B, and 100C of the present invention have a low surface magnetic force deviation between the center and each end of about 100 Gauss or less, the adhesive force deviation between the center and each end is also as low as about 3 gf or less. These standard specimen fixing modules 100A, 100B, and 100C fix the standard specimen 200 on the entire surface of the wafer 300 with the same and similar adhesive force, as shown in FIG. 4. At this time, the standard specimen 200 includes a magnetic material, and thus is attached to the wafer by the standard specimen fixing modules 100A, 100B, and 100C of the present invention. According to an example, the standard specimen 200 may include a magnetic material layer or may be coated with a magnetic material. At this time, examples of the magnetic material include a ferromagnetic material such as nickel (Ni).

Hereinafter, the present invention is specifically described through examples, but the following examples and experimental examples are only illustrative of one embodiment of the present invention, and the scope of the present invention is not limited by the following examples and experimental examples. .

<Example 1>

On the magnetic shielding part (width: 285 mm, length: 15 mm, thickness: 1 mm) having a thin plate shape made of an SPCC member, as shown in Fig. 1, 171 magnetic blocks (width: 4.5 mm) , Vertical length: 4.5 mm, thickness: 4 mm) to form a magnetic portion arranged to manufacture an assembly. At this time, the separation distance between the magnetic blocks was 0.5 mm. On the other hand, through MCT (Machining Center Tooling System) processing, a bar-shaped support part (length in the longitudinal direction: 310 ㎜, vertical length: 20 ㎜, length in the thickness direction: 7 ㎜) is processed with aluminum alloy. A seating groove for seating the assembly was formed in the support portion. Thereafter, the assembly was inserted into the seating groove of the support part, and then packed with bonding and screws to manufacture a standard specimen fixing module.

<Example 2>

Instead of 171 magnetic blocks (width: 4.5 mm, vertical length: 4.5 mm, thickness: 4 mm) used in Example 1, 114 first magnetic blocks (width: 4 mm, vertical length: 4.5 mm, thickness: 4 mm) and 57 second magnetic blocks (width: 4.5 mm, vertical length: 7 mm, thickness: 4 mm) were arranged as shown in FIG. 2 to form a magnetic portion, except that the magnetic part was formed. A standard specimen fixing module was manufactured by performing the same procedure as described above. At this time, the separation distance between the first magnetic block and the other adjacent first magnetic block, the separation distance between the second magnetic block and the other adjacent second magnetic block is 0.5 mm, and the separation distance between the first magnetic block and the adjacent second magnetic block is 0 It was mm.

<Comparative Example 1>

Through MCT (Machining Center Tooling System) processing, a bar-shaped support part (width: 310 ㎜, vertical length: 20 ㎜, thickness: 7 ㎜) is processed with aluminum alloy to form a seating groove for seating the magnet. I did. Then, one magnet (width: 284.5 mm, vertical length: 14.5 mm, thickness: 5 mm) was inserted into the mounting groove, and then packed with bonding and screws to prepare a standard specimen fixing module.

<Comparative Example 2>

171 magnetic blocks used in Example 1 (width: 4.5 mm, vertical length: 4.5 mm, thickness: 4 mm) instead of a magnetic portion arranged with one magnet (width: 284.5 mm, vertical length: 14.5 mm, A standard specimen fixing module was manufactured in the same manner as in Example 1, except for forming a magnetic portion of thickness: 4 mm).

<Experimental Example 1>-Magnetic evaluation

The surface magnetic force and the gap magnetic force for the standard specimen fixing modules prepared in Example 2 and Comparative Examples 1 to 2, respectively, were measured as follows, and the measurement results are shown in Tables 1 to 3, respectively.

(1) surface magnetic force

Surface magnetic force was measured for each unit area (width: 15 ㎜, vertical length: 15 ㎜) of the standard specimen fixing module using a Gaussmeter (KANETEC, TM-801) as follows, and the measurement result Is shown in Table 1.

First, after turning on the power of the Gaussian Mitagi, the ZERO button was pressed in a state where there is no magnetic material around, and then the Gaussian Mitagi's probe sensor was contacted with the central surface of each unit area of the module to measure the surface magnetic force.

On the other hand, the surface magnetic force of the standard specimen fixing module of Comparative Examples 1 to 2 was calculated by the Maxwell analysis program, and is shown in Table 1.

(2) Gap magnetic force (gap = 1 ㎜)

The gap magnetic force was measured for each unit area (width: 15 mm, vertical length: 15 mm) of the standard specimen fixing module using a Gaussmeter (KANETEC, TM-801), and the results are shown in the following table. It is shown in 1.

First, after turning on the power of the Gaussian Mitagi, pressing the ZERO button without a magnetic material around it, and then attaching a non-magnetic material with a thickness of 1 mm to the surface of the standard specimen fixing module to create a gap (gap). Thereafter, the Gauss Mitagi probe sensor was in contact with the central surface of each unit area of the module to measure the surface magnetic force.

On the other hand, the gap magnetic force for the standard specimen fixing module of Comparative Examples 1 to 2 was calculated by the Maxwell analysis program and shown in Table 1.

Example 2 Comparative Example 1 Comparative Example 2 Absolute value of surface magnetic force (Gauss) Absolute value of gap magnetic force (Gauss) Absolute value of shielding surface magnetic force
(Gauss) Absolute value of surface magnetic force (Gauss) Absolute value of gap magnetic force (Gauss) Absolute value of surface magnetic force (Gauss) Absolute value of gap magnetic force (Gauss) Absolute value of shielding surface magnetic force
(Gauss) #One 4910 2730 4 2480 2250 2290 2040 968 #2 4900 2710 18 2150 1982 2010 1823 824 #3 4910 2720 10 2120 1942 1967 1783 807 #4 4910 2710 16 2100 1930 1953 1770 803 #5 4920 2720 10 2090 1925 1946 1764 801 #6 4900 2700 14 2090 1922 1940 1760 801 #7 4910 2700 12 2080 1921 1940 1758 801 #8 4900 2720 14 2070 1920 1939 1757 801 #9 4900 2730 12 2080 1919 1938 1756 801 #10 4890 2730 14 2080 1919 1938 1756 801 #11 4920 2730 12 2080 1920 1938 1756 801 #12 4910 2720 14 2080 1920 1939 1757 801 #13 4910 2730 12 2080 1921 1940 1758 801 #14 4910 2720 14 2080 1922 1943 1760 801 #15 4910 2720 10 2080 1925 1946 1764 801 #16 4910 2720 16 2100 1930 1953 1770 803 #17 4920 2730 10 2100 1942 1966 1783 807 #18 4900 2710 18 2160 1982 2010 1823 823 #19 4910 2710 4 2490 2250 2290 2040 958 Average 4908 2719 12 2136 1965 1989 1799 821 max 4920 2730 18 2490 2250 2290 2040 968 min 4890 2700 4 2070 1919 1938 1756 801 max-min 30 30 14 420 331 352 284 167

Surface magnetic force (Gauss) |G _1A | |G _2A | |G _3A | ||G _1A |-|G _2A || ||G _1A |-|G _2A || ||G _2A |-|G _3A || Example 2 4890 4910 4910 100 100 0 Comparative Example 1 2080 2480 2490 400 400 0 Comparative Example 2 1938 2290 2290 350 350 0 * |G _1A | is the absolute value of the surface magnetic force of the #10 unit area listed in Table 1.
* |G _2A | is the absolute value of the surface magnetic force of the #1 unit area listed in Table 1.
* |G _3A | is the absolute value of the surface magnetic force of the #19 unit area listed in Table 1.

Gap magnetic force (Gauss) |G _1B | |G _2B | |G _3B | ||G _1B |-|G _2B || ||G _1B |-|G _2B || ||G _2B |-|G _3B || Example 2 2730 2730 2710 0 20 20 Comparative Example 1 1919 2250 2250 330 330 0 Comparative Example 2 1756 2040 2040 285 285 0 * |G _1B | is the absolute value of the gap magnetic force in the #10 unit area listed in Table 1.
* |G _2B | is the absolute value of the gap magnetic force in the #1 unit area listed in Table 1.
* |G _3B | is the absolute value of the gap magnetic force in the #19 unit area listed in Table 1.

< Experimental example 2>-Evaluation of adhesion

The adhesion to the standard specimen fixing modules prepared in Examples 1 to 2 and Comparative Examples 1 to 2, respectively, was measured as follows, and the measurement results are shown in Tables 4 to 6.

A gap plate (thickness: 1 mm) was interposed, and the standard specimen was fixed on the standard specimen fixing module. Thereafter, the moment when the standard specimen was separated from the standard specimen fixing module was measured using a push pull gauge. At this time, the adhesion of the standard specimen fixing module was measured for each unit area (width: 15 ㎜, vertical length: 15 ㎜) (see Fig. 5), and the standard specimen had a Ni layer thickness of 5 µm, 10 µm, and 20 µm. Each was used. Here, the one unit area refers to a portion consisting of nine magnetic blocks divided every 15 mm along the first direction of the module.

Ni layer thickness of standard specimen: 5 μm Example 1 Example 2 Comparative Example 1 Comparative Example 2 Adhesion(gf) Deviation rate from average (%) Adhesion(gf) Deviation rate from average (%) Adhesion(gf) Deviation rate from average (%) Adhesion(gf) Deviation rate from average (%) #One 2.755 0.39% 3.061 5.44% 1.383 -1.00% 1.240 0.53% #2 2.755 0.39% 2.959 2.18% 1.381 -1.15% 1.230 -0.27% #3 2.755 0.39% 2.959 2.18% 1.399 0.15% 1.236 0.21% #4 2.653 -3.44% 2.857 -1.32% 1.403 0.44% 1.198 -2.95% #5 2.653 -3.44% 2.857 -1.32% 1.399 0.15% 1.247 1.09% #6 2.755 0.39% 2.755 -5.07% 1.382 -1.08% 1.226 -0.60% #7 2.755 0.39% 2.857 -1.32% 1.388 -0.64% 1.193 -3.38% #8 2.755 0.39% 2.959 2.18% 1.421 1.70% 1.228 -0.44% #9 2.857 3.95% 3.061 5.44% 1.404 0.51% 1.243 0.77% #10 2.857 3.95% 3.061 5.44% 1.351 -3.40% 1.232 -0.11% #11 2.755 0.39% 2.959 2.18% 1.397 0.01% 1.234 0.05% #12 2.755 0.39% 2.755 -5.07% 1.415 1.28% 1.222 -0.93% #13 2.653 -3.44% 2.755 -5.07% 1.382 -1.08% 1.236 0.21% #14 2.755 0.39% 2.755 -5.07% 1.393 -0.28% 1.234 0.05% #15 2.653 -3.44% 2.959 2.18% 1.377 -1.44% 1.221 -1.01% #16 2.653 -3.44% 2.857 -1.32% 1.432 2.45% 1.254 1.65% #17 2.755 0.39% 2.857 -1.32% 1.401 0.29% 1.277 3.42% #18 2.755 0.39% 2.857 -1.32% 1.434 2.59% 1.256 1.80% #19 2.875 3.95% 2.857 -1.32% 1.399 0.15% 1.227 -0.52% Avg. 2.7443 - 2.8946 - 1.3969 - 1.2334 -

Ni layer thickness of standard specimen: 10 ㎛ Example 1 Example 2 Comparative Example 1 Comparative Example 2 Adhesion(gf) Deviation rate from average (%) Adhesion(gf) Deviation rate from average (%) Adhesion(gf) Deviation rate from average (%) Adhesion(gf) Deviation rate from average (%) #One 5.612 -0.96% 5.816 0.37% 2.792 -0.99% 2.502 -1.13% #2 5.612 -0.96% 5.816 0.37% 2.793 -0.96% 2.565 1.35% #3 5.612 -0.96% 5.816 0.37% 2.782 -1.35% 2.528 -0.09% #4 5.612 -0.96% 5.714 -1.41% 2.849 1.03% 2.598 2.61% #5 5.714 0.85% 5.612 -3.25% 2.733 -3.17% 2.485 -1.82% #6 5.612 -0.96% 5.918 2.09% 2.798 -0.77% 2.513 -0.69% #7 5.510 -2.83% 5.918 2.09% 2.824 0.15% 2.474 -2.28% #8 5.816 2.58% 5.918 2.09% 2.794 -0.92% 2.518 -0.49% #9 5.612 -0.96% 5.714 -1.41% 2.830 0.36% 2.523 -0.29% #10 5.816 2.59% 5.816 0.37% 2.895 2.60% 2.518 -0.49% #11 5.816 2.59% 5.714 -1.41% 2.850 1.06% 2.563 1.28% #12 5.510 -2.83% 5.714 -1.41% 2.796 -0.85% 2.537 0.26% #13 5.816 2.59% 5.714 -1.41% 2.819 -0.02% 2.524 -0.25% #14 5.714 0.85% 5.918 2.09% 2.867 1.65% 2.553 0.89% #15 5.612 -0.96% 5.918 2.09% 2.852 1.13% 2.498 -1.29% #16 5.612 -0.96% 5.612 -3.25% 2.843 0.82% 2.517 -0.53% #17 5.714 0.85% 5.714 -1.41% 2.800 -0.70% 2.544 0.54% #18 5.510 -2.83% 5.918 2.09% 2.864 1.55% 2.592 2.38% #19 5.816 2.59% 5.816 0.37% 2.793 -0.96% 2.524 -0.25% Avg. 5.6657 - 5.7945 - 2.8197 - 2.5303 -

Ni layer thickness of standard specimen: 20 μm Example 1 Example 2 Comparative Example 1 Comparative Example 2 Adhesion(gf) Deviation rate from average (%) Adhesion(gf) Deviation rate from average (%) Adhesion(gf) Deviation rate from average (%) Adhesion(gf) Deviation rate from average (%) #One 10.918 0.74% 11.020 0.39% 5.643 1.16% 4.946 0.52% #2 10.918 0.74% 11.122 1.30% 5.622 0.79% 4.927 0.13% #3 10.816 -0.20% 11.020 0.39% 5.652 1.32% 5.015 1.89% #4 10.816 -0.20% 10.816 -1.49% 5.690 1.97% 4.873 -0.97% #5 10.816 -0.20% 10.816 -1.49% 5.647 1.23% 4.849 -1.68% #6 10.816 -0.20% 11.020 0.39% 5.526 -0.93% 4.943 0.46% #7 10.816 -0.20% 10.816 -1.49% 5.618 0.72% 4.974 1.08% #8 10.816 -0.20% 10.918 -0.54% 5.401 -3.27% 4.924 0.07% #9 10.816 -0.20% 10.918 -0.54% 5.592 0.26% 4.931 0.21% #10 10.816 -0.20% 10.918 -0.54% 5.507 -1.28% 4.825 -1.98% #11 10.816 -0.20% 11.020 0.39% 5.552 -0.46% 4.961 0.82% #12 10.714 -1.15% 11.122 1.30% 5.432 -2.68% 4.900 -0.42% #13 10.612 -2.13% 11.020 0.39% 5.552 -0.46% 4.977 1.14% #14 11.020 1.66% 11.122 1.30% 5.608 0.54% 4.864 -1.16% #15 10.918 0.74% 11.122 1.30% 5.825 4.25% 4.921 0.01% #16 10.714 -1.15% 10.918 -0.54% 5.581 0.06% 4.916 -0.09% #17 10.918 0.74% 11.020 0.39% 5.582 0.08% 4.912 -0.17% #18 11.020 1.66% 10.816 -1.49% 5.531 -0.84% 4.992 1.43% #19 10.816 -0.20% 11.020 0.39% 5.414 -3.02% 4.848 -1.49% Avg. 10.8375 - 10.9771 - 5.5776 - 4.9204 -

100A, 100B, 100C: standard specimen holding module,
10: support,
20: magnetic part,
21, 21A, 21B: magnetic block,
30: magnetic force shield,
40: auxiliary support

Claims (14)

Support;
A magnetic portion disposed on the support portion and in which a plurality of magnetic blocks are arranged; And
A magnetic force shielding unit disposed between the support unit and the magnetic unit and shielding the magnetic force line in at least one direction of the magnetic force lines of the magnetic unit
Including,
A standard specimen fixing module for fixing a standard specimen, having a surface magnetic force that satisfies the following relations 1 and 2:
[Relationship 1]

[Relationship 2]

(In the above formula,
|G _1A | is the absolute value (Gauss) of the surface magnetic force at the center of the standard specimen fixing module, but |G _1A | = 0 Except for Gauss,
|G _2A | is the absolute value of the surface magnetic force (Gauss) at one end of the standard specimen fixing module, but |G _2A | = 0 Except for Gauss,
|G _3A | is the absolute value of the surface magnetic force (Gauss) of the other end of the standard specimen fixing module, but |G _3A | = 0 Gauss is excluded). The method of claim 1,
A standard specimen fixing module having a surface magnetic force that satisfies the following relational equation 3:
[Relationship 3]

(In the above formula,
|G _2A | is the absolute value of the surface magnetic force (Gauss) at one end of the standard specimen fixing module, but |G _2A | = 0 Except for Gauss,
|G _3A | is the absolute value of the surface magnetic force (Gauss) of the other end of the standard specimen fixing module, but |G _3A | = 0 Gauss is excluded). The method of claim 1,
A standard specimen fixing module for fixing the standard specimen, having a gap magnetic force that satisfies the following relations 4 and 5:
[Relationship 4]

[Relationship 5]

(In the above formula,
If there is a gap of 1 mm in the magnetic path of the standard specimen fixing module,
|G _1B | is the absolute value of the gap magnetic force (Gauss) at the center of the standard specimen fixing module, but |G _1B | = 0 Except for Gauss,
|G _2B | is the absolute value of the gap magnetic force (Gauss) at one end of the standard specimen fixing module, but |G _2B | Except for = 0 Gauss,
|G _3B | is the absolute value of the gap magnetic force (Gauss) at the other end of the standard specimen fixing module, but |G _3B | = 0 Gauss is excluded). The method of claim 3,
A standard specimen fixing module having a gap magnetic force that satisfies the following relational equation 6:
[Relationship 6]

(In the above formula,
If there is a gap of 1 mm in the magnetic path of the standard specimen fixing module,
|G _2B | is the absolute value of the gap magnetic force (Gauss) at one end of the standard specimen fixing module, but |G _2B | Except for = 0 Gauss,
|G _3B | is the absolute value of the gap magnetic force (Gauss) at the other end of the standard specimen fixing module, but |G _3B | = 0 Gauss is excluded). The method of claim 1,
The standard specimen fixing module has an average surface magnetic force that is 1.5 to 2.5 times larger than that of a single magnet fixing module having the same shape and size as the magnetic part. The method of claim 1,
The standard specimen fixing module has an average adhesion to the standard specimen of 1.5 to 2.5 times greater than that of a single magnet fixing module having the same shape and size as the magnetic part. The method of claim 1,
The standard specimen fixing module has a standard deviation of adhesion to the standard specimen in the range of 0 to 0.5, a standard specimen fixing module. The method of claim 1,
The ratio of the area (S ₂ ) of one magnetic block to the total area (S _{1 ) of the magnetic part (S 2} /S ₁ ) is in the range of 0.2 to 3.0%, a standard specimen fixing module. The method of claim 1,
The thickness of the magnetic block is in the range of 3 to 10 mm, the standard specimen fixing module. The method of claim 9,
The magnetic block has a horizontal length in the range of 10 to 500 mm, a vertical length in the range of 10 to 500 mm, a standard specimen fixing module. The method of claim 1,
The ratio of the thickness (t ₁ ) of the magnetic portion to the thickness (t _{2 ) of the magnetic force shielding portion (t 1} /t ₂ ) is in the range of 3 to 4, the standard specimen fixing module. The method of claim 11,
The magnetic part is shielded by 30 to 100% of magnetic force with respect to the surface in the direction of the magnetic force shielding part, and the magnetic force is amplified in the range of 120 to 300% with respect to the surface opposite to the direction of the magnetic force shielding unit The method of claim 1,
The plurality of magnetic blocks are spaced apart in the range of 0 to 2 mm, the standard specimen fixing module. The method of claim 1,
The standard specimen is to contain a magnetic material, the standard specimen fixing module.

Images