CN1740804A - Magnetic sensor and method of producing the same - Google Patents
Magnetic sensor and method of producing the same Download PDFInfo
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- CN1740804A CN1740804A CN 200510097891 CN200510097891A CN1740804A CN 1740804 A CN1740804 A CN 1740804A CN 200510097891 CN200510097891 CN 200510097891 CN 200510097891 A CN200510097891 A CN 200510097891A CN 1740804 A CN1740804 A CN 1740804A
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Abstract
The invention relates to magnetic sensor and method of producing the same. The magnetic sensor comprises: magnetoresistance effect element including nailing layer and freedom layer. The magnetoresistance effect element has relative angle changing electrical resistance formed following magnetization direction of the nailing layer and magnetization direction of freedom layer. The method comprises: preparing the magnet array, i.e. setting a plurality of permanent magnet at the grid point of square grid, in which each magnetic pole polarity of permanent magnet has a different polarity of other magnetic pole adjacent and most closely thereto; setting slice on the magnet array, in which a layer comprising the magnetosphere is formed; magnetosphere at least becoming nailing layer; nailing the magnetization direction of the magnetosphere which is becoming the nailing layer by the magnetic field formed between the a magnetic pole and another magnetic pole adjacent and most closely thereto. The method may easily manufacture the magnetic sensor in which the magnetization direction of the nailing layer is intersecting from each other on a single base-plate.
Description
Technical field
The present invention relates to utilize the Magnetic Sensor of magnetoresistance (magnetomechanical effects) element that comprises pinning layer (pinned layer) and free layer, particularly relate to the manufacture method with Magnetic Sensor of two or more magneto-resistance effect elements of formation on a substrate, the direction of magnetization of the pinning layer of magneto-resistance effect element intersects each other.
Background technology
So far, the known element that has large-scale magneto-resistance effect element (GMR element), magnetic-tunnel-effect element (TMR element, tunnel GMR element) to wait other element to can be used as Magnetic Sensor uses.These magneto-resistance effect elements have pinning layer and free layer, the direction of magnetization of pinning layer pinned (pinned) (or fixedly fixed) is on predetermined direction, the direction of magnetization of free layer changes with external magnetic field, thereby has shown the resistance value of the relativeness between the direction of magnetization of the direction of magnetization that meets pinning layer and free layer.
Yet it is difficult that the direction of magnetization that forms the pinning layer of two or more magneto-resistance effect elements, magneto-resistance effect element on single little substrate intersects each other.Because this single substrate is not also developed, therefore there is a problem, promptly owing to the restriction of pinning layer direction of magnetization, the Magnetic Sensor that utilizes the single substrate of magnetoresistance to make does not have range of application widely.
Summary of the invention
The invention is characterized in that Magnetic Sensor comprises magneto-resistance effect element, magneto-resistance effect element comprises pinning layer and free layer.Described magneto-resistance effect element has the resistance value of variation, this resistance value with the direction of magnetization of pinning layer and the direction of magnetization of free layer (between) relative angle (relative angle) that forms changes.Described Magnetic Sensor forms in the following manner: be about to a plurality of described magneto-resistance effect elements and be arranged on the single substrate (with identical substrate).At least two pinning layer in described a plurality of magneto-resistance effect element has the direction of magnetization that intersects each other.
In other words and since wherein the magneto-resistance effect element that intersects each other of pinning layer direction of magnetization be formed on one with identical substrate on, Magnetic Sensor can be realized the little and broad field of application of volume.
Of the present invention another is characterised in that the manufacture method of the Magnetic Sensor that comprises magneto-resistance effect element, and magneto-resistance effect element comprises pinning layer and free layer.Described magneto-resistance effect element has the resistance value of variation, and this resistance value changes with the variable angle that the direction of magnetization of the direction of magnetization of pinning layer and free layer forms.Described method comprises step:
1, form the layer that comprises magnetosphere by predetermined structure on substrate, described magnetosphere will become described pinning layer (for example, inverse ferric magnetosphere antiferromagnetic and ferromagnetic layer ferromagnetic);
2, form magnetic field and apply magnetosphere, be used for applying magnetic field to the layer that comprises becoming the magnetosphere of described pinning layer;
3, the described magnetic field of magnetization applies magnetosphere;
4, apply the remanent magnetism of magnetosphere with described magnetic field, pinning (pinning) will become the direction of magnetization of the magnetosphere of described pinning layer.
According to said method, form magnetic field by mode and apply magnetosphere such as plating one class, this magnetic field applies magnetosphere and is used for applying magnetic field to the magnetosphere that will become pinning layer, and these magnetic fields of this back magnetization apply magnetosphere.Applied the magnetic field of the remanent magnetism generation of magnetosphere then by above-mentioned magnetic field, pinning (pin) will become the direction of magnetization of the magnetosphere of described pinning layer.In this case, forming step that described magnetic field applies magnetosphere helps forming described magnetic field and applies magnetosphere, make the described layer of its clamping in a plane, described layer comprises and will become the magnetosphere of described pinning layer, and the direction of magnetization that described magnetic field applies magnetosphere is different with the direction in the magnetic field that is produced by described remanent magnetism magnetization.
The direction that is applied the magnetic field that the remanent magnetism magnetization of magnetosphere produces by above-mentioned magnetic field depends on the end surface shape that magnetic field applies magnetosphere.Therefore by making the end face of suitable shape, or by suitably place the layer that comprises the magnetosphere that will become pinning layer with respect to end face, can comprise to become the magnetization of layer any direction of the magnetosphere of pinning layer.So just can one with identical substrate on easily make two or more magneto-resistance effect elements with a plurality of pinning layers, the magnetic quilt of these a plurality of pinning layers is pinned at mutually different direction.
The object of the present invention is to provide a kind of manufacture method that comprises the Magnetic Sensor of magneto-resistance effect element, magneto-resistance effect element comprises pinning layer and free layer.Described magneto-resistance effect element has the resistance value of variation, and this resistance value changes with the variable angle that the direction of magnetization of the direction of magnetization of pinning layer and free layer forms.Described method comprises step:
1, prepares the magnet array that constitutes in the following manner, make a plurality of permanent magnets to be set, the polarity of the magnetic pole of each permanent magnet and be adjacent and different apart from the polarity of other the shortest magnet magnetic pole at the lattice point place of square lattice;
2, on described magnet array thin slice is set, in this thin slice, the layer that comprises magnetosphere forms, and described magnetosphere becomes described pinning layer to the major general;
3, utilize a described magnetic pole and be adjacent and another the shortest described magnetic pole of distance between the magnetic field that forms, pinning will become the direction of magnetization of the magnetosphere of described pinning layer.
Constitute above-mentioned magnet array by this way, be about to the lattice point place that a plurality of permanent magnets are placed on square lattice, the polarity of the magnetic pole of each permanent magnet is different with polarity adjacent with it and other magnetic pole that distance is the shortest.Therefore, in the planimetric map of magnet array, on magnet array, form from the N utmost point to the magnetic field that is positioned at its right side S utmost point, upward to forming from the N utmost point to the magnetic field that is positioned at its upside S utmost point, direction forms on the magnetic field of extremely descend side direction to be positioned at the S utmost point on the left of it from N and the downward direction from the N utmost point to the magnetic field that is positioned at its downside S utmost point (referring to Figure 56 and 57) left to right.Similarly, for a S utmost point, form on the direction left from being positioned at its right side N utmost point and form from being positioned at its upside N utmost point to the magnetic field of the S utmost point, form from being positioned at its left side N utmost point to the magnetic field of the S utmost point with upward to forming from being positioned at the magnetic field of its downside N utmost point to the S utmost point to right to magnetic field, the downward direction of the S utmost point.
Said method utilizes these magnetic field pinnings will become the direction of magnetization of the layer of pinning layer, thereby can easily make the intersect each other Magnetic Sensor of (being perpendicular to one another in this case) of the direction of magnetization of pinning layer wherein on single substrate.
Wherein, described Magnetic Sensor comprises X-axis magneto-resistance effect element and Y-axis magneto-resistance effect element, and this X-axis and this Y-axis are perpendicular to one another.Be provided with in the step described, thin slice is set in this way on described magnet array, magnetic field on the X-direction that is formed by described magnet array is applied to will be become on the layer of magnetosphere of described pinning layer of described X-axis magneto-resistance effect element described comprising, the magnetic field on the Y direction that forms by described magnet array be applied to described comprise with become described Y-axis magneto-resistance effect element described pinning layer magnetosphere layer on.
Wherein, the step of the direction of magnetization of the described magnetosphere of described pinning comprises uses clamper that described thin slice is fixed on the described magnet array, heats described thin slice then.
The present invention also provides a kind of manufacture method of Magnetic Sensor, described Magnetic Sensor comprises a magneto-resistance effect element, each magneto-resistance effect element has the resistance value that the relative angle that forms with the direction of magnetization by the direction of magnetization of pinning layer and free layer changes, and described method comprises step:
Prepare the magnet array of formation in the following manner, promptly at the lattice point place of square lattice a plurality of permanent magnets are set, the polarity of the magnetic pole of each permanent magnet is different with polarity adjacent with it and other magnet magnetic pole that distance is the shortest;
On thin slice, form a plurality of film M that will constitute described each magneto-resistance effect element with isolated island shape form one by one, thereby when this thin slice of cutting makes this thin slice be divided on each substrate, described a plurality of film M will be positioned at definite position;
Described thin slice is placed on the described magnet array as follows, be applied to each film M by described magnet array in one of on the negative direction on the positive dirction on the positive dirction of Y-axis, in X-axis, in Y-axis and magnetic field that forms on the negative direction in X-axis, with the direction of magnetization of the described pinning layer of each film M of pinning.
Description of drawings
Describe the present invention below in conjunction with accompanying drawing, purpose of the present invention, feature and advantage will become more apparent.
Fig. 1 is the floor plan design of explanation according to the embodiment of the invention 1 and embodiment 2 Magnetic Sensors;
Fig. 2 is the enlarged drawing of magnetic-tunnel-effect element (group) shown in Figure 1;
Fig. 3 is that magnetic channel element (group) shown in Figure 2 is along 1-1 line sectional view;
Fig. 4 is the floor map of magnetic channel element (group) shown in Figure 3, and the antiferromagnetic film and the ferromagnetic film (pinning layer) of element is described;
Fig. 5 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Fig. 6 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Fig. 7 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Fig. 8 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Fig. 9 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Figure 10 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Figure 11 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Figure 12 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Figure 13 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Figure 14 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Figure 15 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Figure 16 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Figure 17 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 1;
Figure 18 represents when the length direction (X-direction) at element applies the external magnetic field of Strength Changes to element the change curve that the MR of a magnetic-tunnel-effect element (group) shown in Figure 1 leads;
Figure 19 represents when when the direction vertical with the length direction of element (Y direction) upward applies the external magnetic field of Strength Changes to element the change curve that the MR of a magnetic-tunnel-effect element (group) shown in Figure 1 leads;
Figure 20 is illustrated on the direction vertical with the length direction of element (X-direction) when applying the external magnetic field of Strength Changes to element, the change curve that the MR of another magnetic-tunnel-effect element (group) shown in Figure 1 leads;
Figure 21 is that the length direction (Y direction) that is illustrated in element is taken in when applying the external magnetic field of Strength Changes to element the change curve that the MR of another magnetic-tunnel-effect element (group) shown in Figure 1 leads;
Figure 22 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 23 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 24 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 25 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 26 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 27 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 28 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 29 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 30 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 31 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 32 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 33 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 34 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 35 is a step in manufacture process, the diagrammatic cross-section of the Magnetic Sensor of embodiment 2;
Figure 36 is expression when at the length direction (X-direction among Fig. 1) of element when applying the external magnetic field of Strength Changes to element, the change curve that leads according to the MR of the magnetic-tunnel-effect element (group) of embodiment 2;
Figure 37 is expression when applying the external magnetic field of Strength Changes to element on the direction vertical with the length direction of element (Y direction among Fig. 1), the change curve that leads according to the MR of the magnetic-tunnel-effect element (group) of embodiment 2;
Figure 38 be expression when on the direction vertical (X-direction among Fig. 1) when applying the external magnetic field of Strength Changes to element with the length direction of element, the change curve that leads according to the MR of another magnetic-tunnel-effect element (group) of embodiment 2;
Figure 39 is expression when applying the external magnetic field of Strength Changes to element on the length direction (Y direction among Fig. 1) of element, the change curve that leads according to the MR of another magnetic-tunnel-effect element (group) of embodiment 2;
Figure 40 be expression when to according to embodiment 1 when 2 magnetic channel element group is applied to the external magnetic field of Strength Changes on the direction vertical with the direction of magnetization of pinning layer, the magnetization curve figure of pinning layer and free layer;
According to the planimetric map of another substrate of the present invention, have the different plating films of formation structure thereon during Figure 41;
Figure 42 is the floor map according to the Magnetic Sensor of the embodiment of the invention 3;
Figure 43 is the plane enlarged diagram of the first X-axis GMR element shown in Figure 42;
Figure 44 is the first an X-axis GMR element shown in Figure 43 2-2 line diagrammatic cross-section along Figure 43;
Figure 45 is the figure of the spin valve structure of the explanation first X-axis GMR element shown in Figure 43;
Figure 46 is the change curve of the resistance value (solid line) of the expression first X-axis GMR element shown in Figure 43 with respect to the magnetic field that changes in X-direction, and the resistance value of element (dotted line) is with respect to the change curve in the magnetic field that changes in Y direction;
Figure 47 is included in the equivalent circuit diagram of the X-axis Magnetic Sensor in the Magnetic Sensor shown in Figure 42;
Figure 48 is the change curve of the output voltage (solid line) of expression X-axis Magnetic Sensor shown in Figure 47 with respect to the magnetic field that changes in X-direction, and the output voltage of sensor (dotted line) is with respect to the change curve in the magnetic field that changes in Y direction;
Figure 49 is that expression is included in the change curve of the output voltage (solid line) of the Y-axis Magnetic Sensor in the Magnetic Sensor shown in Figure 42 with respect to the magnetic field that changes in X-direction, and the output voltage of sensor (dotted line) is with respect to the change curve in the magnetic field that changes in Y direction;
Figure 50 is a step in the manufacture process of Magnetic Sensor shown in Figure 42, has formed the planimetric map of the quartz glass of Spin Valve film on it;
Figure 51 is the planimetric map that is used to prepare the sheet metal of magnet array, and this magnet array will be used for the manufacturing of Magnetic Sensor shown in Figure 42;
Figure 52 is sheet metal shown in Figure 51 and the 3-3 line sectional view of permanent bar magnet along Figure 51;
Figure 53 is used to form to be used in the planimetric map of the plate of the magnet array in the manufacturing of Magnetic Sensor shown in Figure 42;
Figure 54 will be used in the sectional view of the magnet array in the manufacturing of Magnetic Sensor shown in Figure 42;
Figure 55 is the sectional view of the step in the manufacturing of expression Magnetic Sensor shown in Figure 42;
Figure 56 is the skeleton view of some magnet of choosing of the magnet array of explanation from Figure 54;
Figure 57 is the schematic diagram of pinning method of direction of magnetization of pinning layer of each GMR element of explanation Magnetic Sensor shown in Figure 42;
Figure 58 is the figure that concerns between explanation Magnetic Sensor shown in Figure 42 and the position angle; With
Figure 59 is the output voltage of expression Magnetic Sensor shown in Figure 42 and the curve map between the position angle.
Embodiment
Embodiment according to Magnetic Sensor of the present invention is described below with reference to the accompanying drawings.
As shown in Figure 1, comprise common square substrate 10, two magnetic-tunnel-effect elements (group) 11,21, magnetic core logical circuit deflection coil 30 and a plurality of electrode pad 40a to 40f according to the Magnetic Sensor of first embodiment, wherein rectangular substrate 10 for example can be by SiO
2/ Si, glass or quartz are made.Magnetic-tunnel-effect element (group) 11,21 is connected with electrode pad 40a, 40b, 40c, 40d, 40e and 40f respectively with magnetic core logical circuit deflection coil 30.Because magnetic-tunnel-effect element (group) 11 structurally is identical with magnetic-tunnel-effect element (group) 21, therefore hereinafter will magnetic-tunnel-effect element (group) 11 be described as typical example, omitted the description of magnetic-tunnel-effect element (group) 21.
Shown in Figure 2 as the plane of amplifying, magnetic-tunnel-effect element (group) 11 is made of the magnetic-tunnel-effect element that a plurality of (being 20 in this example) polyphone connects.Each magnetic-tunnel-effect element comprises a plurality of bottom electrodes (lower electrode) 12, and is rectangular in the planimetric map of bottom electrode 12 on substrate 10, and Fig. 3 has shown along the sectional view of the 1-1 face of Fig. 2.Bottom electrode 12 is lined up row, separate predetermined distance each other in the horizontal.Bottom electrode 12 is made by the nonmagnetic material Ta (can be Cr or Ti) of conduction, and thick about 30nm.The antiferromagnetic film 13 of stacked respectively that make by PtMn, thick about 30nm on each bottom electrode 12, and antiferromagnetic film 13 formed the flat shape the same with bottom electrode 12.
On each antiferromagnetic film 13, the ferromagnetic film of stacked at certain intervals that made by NiFe, thick about 20nm is to 14,14.In planimetric map, these ferromagnetic films have rectangular shape to 14,14, and it is parallel to each other relatively to be arranged as its long limit.Ferromagnetic film 14,14 constitutes pinning layer, and wherein direction of magnetization is by antiferromagnetic film 13 pinnings.(promptly on direction to the right) is with ferromagnetic film 14,14 magnetization on the direction of arrow of the partial enlarged drawing of Fig. 4.Here, antiferromagnetic film 13 and ferromagnetic film (pinning layer) 14,14 constitutes the fixed magnetization layer of direction of magnetization basic fixed (promptly having fixing magnetized axis axis).
Form ferromagnetic film 16 on insulation course 15, ferromagnetic film 16 has the flat shape the same with insulation course 15, and is made by the NiFe of thick 80nm.This ferromagnetic film 16 constitutes free layer (free magnetization layer), and its direction of magnetization changes along with the direction of external magnetic field, and this ferromagnetic film 16 constitutes magnetic tunnel junction structure with pinning layer of being made by aforementioned ferromagnetic film 14 and aforementioned dielectric layer 15.In other words, antiferromagnetic film 13, ferromagnetic film 14, insulation course 15 and ferromagnetic film 16 constitute a magnetic-tunnel-effect element (except electrode and other).
Form illusory film 17 on each ferromagnetic film 16 respectively, illusory film 17 has the flat shape identical with each ferromagnetic film 16.Use by Ta film conduction nonmagnetic material that make, thick about 40nm and constitute this illusory film 17.
In the zone that covers substrate 10, bottom electrode 12, antiferromagnetic film 13, ferromagnetic film 14, insulation course 15, ferromagnetic film 16 and illusory film 17, form interlayer insulating film 18, be used for insulation and isolate a plurality of bottom electrodes 12 and antiferromagnetic film 13, and be used to insulate isolate each ferromagnetic film of being arranged on each antiferromagnetic film 13 to 14, dielectric film to 15, ferromagnetic film to 16 and illusory film to 17.Interlayer insulating film 18 is by SiO
2Make and thick about 250nm.
Pass this interlayer insulating film 18, on each illusory film 17, form contact hole 18a respectively.Form respectively as with aluminium (Al) top electrode 19,19 that make, thick about 300nm, so that be filled among the contact hole 18a, and electrical connection is arranged on illusory film on the different bottom electrodes 12 (with antiferromagnetic film 13) in 17,17 each.Like this, alternately be connected successively with bottom electrode 12, antiferromagnetic film 13 and top electrode 19 by in each (each in the illusory film 17,17) in the ferromagnetic film that adjacent magnetic tunnel junction structure is right 16,16 and the antiferromagnetic film 13,13 each, formed magnetic-tunnel-effect element (group) 11, in magnetic-tunnel-effect element (group) 11, a plurality of magnetic tunnel junction structure polyphones that its pinning layer has identical direction of magnetization connect.Here, on top electrode 19,19, formed the diaphragm of making by SiO and SiN (omission is described).
Below, the manufacture method of above-mentioned magnetic-tunnel-effect element will be described with reference to figure 5 to 17.
In Fig. 5 to 12 and Figure 14 to 17,, show the magnetic-tunnel-effect element group of making by four magnetic-tunnel-effect elements of polyphone connection in order to illustrate.But, in these figure, omitted the description of coil 30.
At first, as shown in Figure 5, by substrate 10 (in this step, it is a substrate, by later scribing dicing technology, will be thus substrate obtain a plurality of Magnetic Sensors) go up sputter form constitute bottom electrode 12, by the film that Ta makes, thickness is about 30nm.Then, form the film made by PtMn respectively and by the film that NiFe makes, be used to constitute the antiferromagnetic film 13 and the ferromagnetic film (pinning layer) 14 of fixed magnetization layer by sputter, thickness is respectively 30nm and 20nm.In this describes, bottom electrode 12, will and will be called as magnetosphere SJ down as the PtMn film of antiferromagnetic film 13 as the FeNi film of ferromagnetic film 14.
After this, the aluminium of stacked only 1nm, and use dioxygen oxidation aluminium, form Al
2O
3(Al-O) film is as insulation course 15.Then, for example form the film that is made of NiFe by sputter, with the ferromagnetic film 16 of this film formation free layer, thickness is 80nm, forms the film of being made by Ta thereon, is used for constituting illusory film 17, and thickness is 40nm.Here, ferromagnetic film 16 and illusory film 17 are called as magnetosphere UJ.Then, utilize ion mill edge etc., upward magnetosphere UJ is separated in processing, as shown in Figure 6.Magnetosphere SJ is down separated in processing, and is final as shown in Figure 7, forms a predetermined structure layer.
Then, as shown in Figure 8, by sputter form to constitute interlayer insulating film 18, by SiO
2The film that constitutes makes that its thickness will be 250nm on element, forms film of being made by Cr and the film of being made by NiFe thereon by sputter, and thickness is respectively 100nm and 50nm, as the underlying membrane of plating.Then, apply resist 51, as shown in Figure 9.Resist 51 Bututs for predetermined shape, will not carried out the part of plating so that do not cover the back.
Then, as shown in figure 10,, apply magnetosphere as magnetic field with NiCo plating thin slice.For example the thickness with NiCo is made as 10 μ m.Then, as shown in figure 11, remove after the resist, milling is carried out on whole surface, (Ar milling) is to remove as the film formed NiFe of plating bottom, as shown in figure 12.
Figure 13 is the planimetric map at the thin slice of this state.In Figure 13, for convenience, pass through the scribing operation of back with each substrate separated from one another with reference number 10 representatives.With reference to Figure 13, by the Butut of front to resist, form each magnetic field and apply magnetosphere (NiCo), this magnetic field applies magnetosphere (NiCo) and has common square shape, it is centered close to the center of back with four adjacent substrate 10 separated from one another, and magnetic field is set applies magnetosphere (NiCo), make to get rid of in the vertical and transversely and just be positioned at magnetic-tunnel-effect element (group) 11, part on 21 (portion) (promptly, make that clamping will be as magnetic-tunnel-effect element (group) 11,21 layer, this layer has predetermined structure, in planimetric map, formed the following magnetosphere SJ that comprises as the magnetosphere of pinning layer at this place).Under this state, apply the magnetic field that intensity is approximately 1000 (oe) applying on the parallel direction of foursquare diagonal line that magnetosphere forms with each magnetic field, make magnetic field apply magnetosphere and in Figure 13, magnetize on the direction shown in the arrow A.
Then, remove above-mentioned magnetic field.At this moment, the remanent magnetism magnetization that magnetic field applies magnetosphere produces magnetic field in the top that applies magnetosphere from each magnetic field to the direction that magnetic field adjacent applies the bottom of magnetosphere, and produce magnetic field on the right side that applies magnetosphere from each magnetic field to the direction that magnetic field adjacent applies the left side of magnetosphere, shown in the arrow B among Figure 13.For this reason, will become the part of tunnel effect element (group) 11,21 for this reason to apply the magnetic field of the length direction that is parallel to this part.Then, in order to form ordered alloy, and provide exchange coupling magnetic field Hex, thin slice is put into carries out the high annealing operation in the hot environment by the antiferromagnetic film 13 that PtMn makes.As a result, the magnetic-tunnel-effect element (group) 11 that is formed on and the identical substrate 10 will have pinning layer, this pinning layer be magnetized on different directions from each other (pinning) (being in this case, on the direction that is perpendicular to one another).In other words, has fixing magnetized axis on the direction of each magnetic-tunnel-effect element (group) 11,21 shown in will the arrow in Fig. 1.
Then, as shown in figure 14, utilize acid to remove the NiFe of plating film NiCo and sputter, utilize milling to remove Cr, as shown in figure 15.After this, as shown in figure 16, pass interlayer dielectric 18 and form contact hole 18a; As shown in figure 17, form the Al film of thick 300nm by sputter; The Al film is processed as wiring figure, to form top electrode 19.
Then, on substrate 10, form electrode pad 40a to 40f shown in Figure 1, electrode pad 40a to 40f is connected respectively to magnetic-tunnel-effect element (group) 11,21 and coil 30.At last, form film (not shown) that make by SiO, thick 150nm and film (not shown) that make by SiN, thick 1000nm by CVD, as diaphragm (passivating film).After this, by milling, reactive ion etching or utilize the etching of Etching mask to open the part diaphragm, so that expose electrode pad 40a to 40f.Then, substrate is returned mill (by grinding attenuate); By scribing substrate is divided into each Magnetic Sensor; At last, encapsulate.
Made magnetic-tunnel-effect element (group) 11 like this and be shown in Fig. 1, applied external magnetic field, this external magnetic field changes intensity along X-direction shown in Figure 1 with perpendicular to each axle of the Y direction of X-axis, so that measure the resistance change rate MR (MR leads) when applying magnetic field.The results are shown in Figure 18 and 19, it will be seen that from Figure 18 and 19 MR of magnetic-tunnel-effect element (group) 11 leads the amplitude that changes in X-direction with external magnetic field than bigger in the amplitude that the variation of Y direction changes with external magnetic field.This has just confirmed that the direction of magnetization of its pinning layer is parallel to X-axis in magnetic-tunnel-effect element (group) 11.
Equally, the magnetic-tunnel-effect element (group) 21 for shown in Figure 1 applies external magnetic field, and this external magnetic field changes intensity along X-direction shown in Figure 1 with perpendicular to each axle of the Y direction of X-axis, so that measure the resistance change rate MR (MR leads) when applying magnetic field.The results are shown in Figure 20 and 21, it will be seen that from Figure 20 and 21 MR of magnetic-tunnel-effect element (group) 21 leads the amplitude that changes in Y direction with external magnetic field than bigger in the amplitude that the variation of X-direction changes with external magnetic field.This has just confirmed that the direction of magnetization of its pinning layer is parallel to Y-axis in magnetic-tunnel-effect element (group) 21.In other words, verified this Magnetic Sensor has two magnetic-tunnel-effect elements (magneto-resistance effect element) with pinning layer on one and identical substrate 10, and wherein pinning layer is pinned, make its direction of magnetization differ from one another (that is, making its direction of magnetization intersect each other).
Magnetic Sensor according to second embodiment will be described below.
The difference of second embodiment and first embodiment only is: the fixed magnetization layer of first embodiment constitutes with PtMn and NiFe, and the magnetized layer of second embodiment is made of the MnRh film of thick 30nm and the NiFe film (pinning layer) of thick 40nm.On the other hand, because the material difference of this fixed magnetization layer, the method and first embodiment that make second embodiment are slightly different, will specifically describe below.
Promptly, in a second embodiment, as shown in figure 22, by sputtering at Ta film, the MnRh film of thick 30nm and the NiFe film of thick 40nm that forms thick 30nm on the substrate 10, so that form magnetosphere SJ down, then, form the Al film of 1nm, and this Al film of oxidation, to form insulation course 15, form the NiFe film of thick 40nm and the Ta film of thick 40nm thereon, go up magnetosphere UJ so that form.
Then, as shown in figure 23, upward magnetosphere UJ is separated in processing, and magnetosphere SJ is down separated in processing, as shown in figure 24.Then, as shown in figure 25, sputter SiO
2Form the film of thick 250nm,, pass interlayer insulating film 18 then and form contact hole 18a, as shown in figure 26 to form interlayer insulating film 18.Then, as shown in figure 27, sputter Al forms the film of thick 300nm, and is processed into wiring figure, to form top electrode 19.Then, as shown in figure 28, form the diaphragm of making by SiO and SiN 20 by CVD.
Then, as shown in figure 29, form film of making by Cr and the film of making by NiFe by sputter, they are thick 100nm and 50nm respectively, as the bottom of plating, then, apply resist 51, as shown in figure 30, resist 51 is arranged as predetermined shape, makes it not cover the back and will carry out the part of plating.
Then, as shown in figure 31, apply magnetic field layer with the conduct of NiCo plating thin slice.For example, the thickness setting with NiCo is 10 μ m.Then, shown in figure 32, remove after the resist, milling (Ar milling) is carried out on whole surface, to remove the NiFe that forms the plating underlying membrane, as shown in figure 33.In this step, thin slice is in state shown in Figure 13.In this state, apply the magnetic field of about 1000 (oe) intensity applying on the parallel direction of foursquare diagonal line that magnetosphere forms, so that make magnetic field apply the magnetosphere magnetization on the direction shown in the arrow A in Figure 13 with each magnetic field.After this, remove demagnetizing field.
At this moment, will become the part of magnetic-tunnel-effect element (group) 11 ', 21 ' for the back, the remanent magnetism magnetization by NiCo applies magnetic field, and this magnetic field is parallel to the length direction of above-mentioned part.Then, thin slice is put into hot environment and carried out the high annealing operation.As a result, be formed on one and be magnetic-tunnel-effect element (group) 11 ', 21 ' on the identical substrate 10 ' pinning layer that will have magnetization (pinning) on different directions from each other (in this case, be perpendicular to one another direction on).Finish after the high annealing operation, remove the underlying membrane NiFe of plating film NiCo and plating, as shown in figure 34, remove the underlying membrane Cr of plating by milling, as shown in figure 35 with acid.After this, carry out the operation the same with first embodiment.
For manufacturing like this and be shown in the magnetic-tunnel-effect element (group) (shown in Figure 1 11 ') of Fig. 1, apply external magnetic field, this external magnetic field changes intensity along X-direction with perpendicular to each axle of the Y direction of X-axis, so that measure the resistance change rate MR (MR leads) when applying magnetic field.The results are shown in Figure 36 and 37, it will be seen that from Figure 36 and 37 MR of magnetic-tunnel-effect element (group) 11 ' leads the amplitude that changes in X-direction with external magnetic field than bigger in the amplitude that the variation of Y direction changes with external magnetic field.This has just confirmed that the direction of magnetization of its pinning layer is parallel to X-axis in magnetic-tunnel-effect element (group) 11 '.
Equally, the magnetic-tunnel-effect element (group) 21 ' for shown in Figure 1 applies external magnetic field, and this external magnetic field changes intensity along X-direction with perpendicular to each axle of the Y direction of X-axis, so that measure the resistance change rate MR (MR leads) when applying magnetic field.The results are shown in Figure 38 and 39, it will be seen that from Figure 38 and 39 MR of magnetic-tunnel-effect element (group) 21 ' leads the amplitude that changes in Y direction with external magnetic field than bigger in the amplitude that the variation of X-direction changes with external magnetic field.This has just confirmed that the direction of magnetization of its pinning layer is parallel to Y-axis in magnetic-tunnel-effect element (group) 21 '.In other words, verified on one and identical substrate 10 ', have two magnetic-tunnel-effect elements (magneto-resistance effect element) according to the Magnetic Sensor of second embodiment with pinning layer, wherein pinning layer is pinned, make its direction of magnetization intersect each other (that is, differing from one another).
As mentioned above, according to the Magnetic Sensor of first and second embodiment at one and be that (on a substrate) has the magnetic-tunnel-effect element on the identical substrate, in the magnetic-tunnel-effect element, the direction of magnetization of pinning layer intersect each other (that is, the angle that forms of the direction of magnetization of at least two pinning layers is not 0 ° and 180 °).For this reason, can be with these Magnetic Sensors as weak magnetic sensor (for example, being used as geomagnetic sensor etc.), this Magnetic Sensor need detect magnetic field in different directions.And according to the method for the foregoing description, these sensors are easy to make.
Here; in first embodiment; since PtMn is used in the fixed magnetization layer; in the magnetosphere direction of magnetization of pinning layer must be when thin slice have just been put into high temperature the pinning pinning layer; therefore; in order to form the step of diaphragm before carrying out pyroprocessing by CVD etc., thin slice is carried out the high annealing operation.On the contrary, in a second embodiment, use MnRh as fixed magnetization layer.If after the high annealing operation, carry out other pyroprocessing, the quality of MnRh will be reduced.Therefore, in a second embodiment,, carry out the high annealing operation in order to form after diaphragm carries out pyroprocessing by CVD etc.
In addition, according to the manufacture method of above-mentioned first and second embodiment, one can obtain a kind of magnetic-tunnel-effect element (group), and this magnetic-tunnel-effect element (group) presents level and smooth function performance to the external magnetic field that will detect.In other words, when give magnetic-tunnel-effect element group 11,21,11 ', 21 ' be applied to perpendicular to the direction of the direction of magnetization of pinning layer on during the magnetic field of Strength Changes, the magnetization smooth change of pinning layer is shown in the line LP of Figure 40.On the other hand, because the anisotropy of shape, the free layer of these elements is to the orientation-sensitive reaction of above-mentioned external magnetic field, and when external magnetic field being approached near " 0 ", the magnetization of free layer is stepwise and changes, as shown in figure 40.As a result, when external magnetic field was " 0 ", the related angle that forms between the direction of magnetization of the direction of magnetization of pinning layer and free layer reached maximal value, and (about 90 °), along with the increase of outer magnetosphere intensity (absolute value), related angle reduces.This can be confirmed by Figure 19,20,37 and 38.
In addition, also can clearly be seen that from Figure 13, when magnetizing plating film (NiCo) on the predetermined direction shown in the arrow A in Figure 13, when described plating film (NiCo) constitutes each magnetic field and applies magnetosphere, will be different at the magnetic direction that the remanent magnetism magnetization by plating film produces between plating film with the direction of magnetization of plating film, and will be on the direction vertical with the end surfaces of plating film M, shown in the arrow B among Figure 13.Therefore, as shown in figure 41, if the end surface shape of design plating film M, and on the direction shown in the arrow C this plating film of magnetization, the local magnetic field (by the direction shown in the arrow D) that produces needed direction, appropriate position that can be on thin slice.Therefore, by utilizing this mode, can on a substrate, make magnetic-tunnel-effect elements T MR1, TMR2 (at on-chip magnetic-tunnel-effect elements T MR1, a TMR2, wherein the direction of magnetization of pinning layer intersects each other) with fixed magnetization axle.
Magnetic Sensor according to third embodiment of the invention will be described below.When constituting the Magnetic Sensor of above-mentioned first and second embodiment with the TMR element, the Magnetic Sensor of the 3rd embodiment is made of the GMR element.In addition, this magnetic sensor configuration is useful on the X-axis sensor in the magnetic field of detecting X-direction and is used to detect the Y-axis Magnetic Sensor in the magnetic field of Y direction, and wherein Y-axis is perpendicular to X-axis.
More particularly, this Magnetic Sensor 60 has rectangle (normally square) shape, have in planimetric map as shown in figure 42, be perpendicular to one another, along the side of X-axis and Y-axis, and Magnetic Sensor 60 comprises: by single substrate (identical substrate) 60a that quartz glass is made, this substrate 60a thickness on perpendicular to the Z-direction of X-axis and Y-axis is very little; Be formed on eight GMR element 61-64,71-74 on the substrate 60a; Be formed on eight pad 65-68,75-78 on the substrate 60a; Connecting line with connection pads and element.
Near the end of the substrate 60a on the negative direction of X-axis and generally speaking any position form the first X-axis GMR element 61 slightly down at the middle body of the substrate 60a of Y direction, the pinning direction of magnetization of pinning layer is on the negative direction of X-axis, shown in the arrow among Figure 42.Near the end of the substrate 60a of the negative direction of X-axis and generally speaking form the second X-axis GMR element 62 in the position that the middle body of the substrate 60a of Y direction is gone up a bit slightly, the pinning direction of magnetization of pinning layer is on the negative direction of X-axis, shown in the arrow among Figure 42.Near the end of the substrate 60a of the positive dirction of X-axis and generally speaking form the 3rd X-axis GMR element 63 in the position that the middle body of the substrate 60a of Y direction is gone up a bit slightly, the pinning direction of magnetization of pinning layer is on the positive dirction of X-axis, shown in the arrow among Figure 42.Near the end of the substrate 60a on the positive dirction of X-axis and generally speaking any position form the 4th X-axis GMR element 64 slightly down at the middle body of the substrate 60a of Y direction, the pinning direction of magnetization of pinning layer is on the positive dirction of X-axis, shown in the arrow among Figure 42.
Near the end of the substrate 60a on the positive dirction of Y-axis and generally speaking the middle body of the substrate 60a on X-direction forms the first Y-axis GMR element 71 in the position on a left side slightly, the pinning direction of magnetization of pinning layer is on the positive dirction of Y-axis, shown in the arrow among Figure 42.Near the end of the substrate 60a on the positive dirction of Y-axis and generally speaking the right slightly position of the middle body of the substrate 60a on X-direction forms the second Y-axis GMR element 72, the pinning direction of magnetization of pinning layer is on the positive dirction of Y-axis, shown in the arrow among Figure 42.Near the end of the substrate 60a on the negative direction of Y-axis and generally speaking the right slightly position of the middle body of the substrate 60a on X-direction forms the 3rd Y-axis GMR element 73, the pinning direction of magnetization of pinning layer is on the negative direction of Y-axis, shown in the arrow among Figure 42.Near the end of the substrate 60a on the negative direction of Y-axis and generally speaking the middle body of the substrate 60a on X-direction forms the 4th Y-axis GMR element 74 in the position on a left side slightly, the pinning direction of magnetization of pinning layer is on the negative direction of Y-axis, shown in the arrow among Figure 42.
GMR element 61-64,71-74 have mutually the same basically structure, except their positions on substrate 60a with respect to substrate 60a pinning layer the pinning direction of magnetization different.Therefore their structure hereinafter the first X-axis GMR element 61 is described as typical example.
As plane Figure 43 of the first X-axis GMR element 61 with along shown in the diagrammatic cross-section 44 of the 2-2 line of Figure 43, the first X-axis GMR element 61 comprise by Spin Valve (spin valve) film SV make and with Y direction as its a plurality of longitudinally arrowband shape part 61a ... 61a and by the magnetic bias film of making as the CoCrPt hard ferromagnetic material (hard iron magnetic thin film layer) 61b ... 61b, magnetic bias film 61b ... 61b is formed on below two ends of each the arrowband shape part 61a on the Y direction.Each arrowband shape part 61a ... 61a extends in X-direction on the upper surface of each magnetic bias film 61b, and is connected with adjacent arrowband shape part 61a.
Shown in the membrane structure among Figure 45, the conduction interlayer S of the thick 2.4nm (24 ) that the Spin Valve film SV of the first X-axis GMR element 61 makes by free layer (free magnetization layer) F, by Cu, pinning layer (or claim fixed bed, fixed magnetization layer) P and top layer C constitute, be laminated to then on the substrate 60a that constitutes substrate, shown in top layer C make and the thickness of thick 2.5nm (25 ) by titanium (Ti) or tantalum (Ta).
Free layer F is the layer that its direction of magnetization changes with outer magnetic field direction, and by being formed on CoZrNb amorphous magnetosphere 61-1 above the substrate 60a, being formed on the NiFe magnetosphere 61-2 above the CoZrNb amorphous magnetosphere 61-1 and the CoFe layer 61-3 that be formed on above the NiFe magnetosphere 61-2 constitutes, the thickness of CoZrNb amorphous magnetosphere 61-1 is 8nm (80 ), the thickness of NiFe magnetosphere 61-2 is 3.3nm (33 ), and the thickness of CoFe layer 61-3 is about 1-3nm (10-30 ).CoZrNb amorphous magnetosphere 61-1 and NiFe magnetosphere 61-2 constitute the soft magnetic film layer.CoFe layer 61-3 is used for preventing the diffusion of Ni and the Cu among the interlayer S61-4 of NiFe layer 61-2.Here, above-mentioned magnetic bias film 61b ... 61b applies bias field for free layer F in Y direction (right side shown in the arrow among Figure 43 and left to), is used to keep the coaxial anisotropy of free layer F.
Fixed magnetization layer P is overlapping (lamination) of the antiferromagnetic film 61-6 of the CoFe magnetosphere 61-5 of thick 2.2nm (22 ) and thick 24nm (240 ), and antiferromagnetic film 61-6 is formed by the PtMn alloy that comprises 45-55 mole %Pt.Mode with exchange coupling serves as a contrast with magnetized antiferromagnetic film 61-6, so that constitute the pinning layer of its direction of magnetization pinning (fixing) on the X-axis negative direction along CoFe magnetosphere 61-5.
So the first X-axis GMR element 61 that constitutes has the resistance value that is directly proportional and changes with external electric field, and this external magnetic field changes in the scope of+Hc at-Hc along X-axis, and has with the constant resistance value of external magnetic field along the Y-axis variation, shown in the dotted line among Figure 46.
Full-bridge by first to fourth X-axis GMR element 61-64 connects and composes the X-axis Magnetic Sensor, shown in the equivalent electrical circuit among Figure 47.Here, arrow is represented the pinning direction of magnetization of the pinning layer of GMR element 61-64 in Figure 47.In this structure, pad 67 and pad 68 are connected with negative pole with the positive pole of constant power supply (not shown) respectively, so that provide voltage Vxin+ (being 5V in this example) and voltage Vxin-(being 0V in this example).Take out the voltage of pad 65 and pad 66 then,, take out their voltage differences of (Vxout+-Vxout-), as the output Vxout of sensor as voltage Vxout+ and Vxout-.The result, the X-axis Magnetic Sensor has shown the output voltage V xout that is directly proportional with external electric field and changes usually, this external magnetic field changes in the scope of+Hc at-Hc along X-axis, shown in the solid line among Figure 48, and the X-axis Magnetic Sensor has also shown " 0 " output voltage with the external magnetic field that changes along Y-axis, shown in the dotted line among Figure 48.
In the mode the same, by the complete bridging formation Y-axis Magnetic Sensor of first to fourth Y-axis GMR element with the X-axis Magnetic Sensor.In addition, pad 77 is connected with negative pole with the positive pole of stabilized power source (not shown) respectively with pad 78, so that provide voltage Vyin+ (being 5V in this example) and voltage Vyin-(being 0V in this example).Then, get the voltage difference between pad 75 and the pad 76, as the output voltage V yout of sensor.The result, the Y-axis Magnetic Sensor has shown and the proportional output voltage V yout of external magnetic field that changes to+Hc the scope at-Hc along Y-axis, shown in the dotted line among Figure 49, and shown generally speaking " 0 " output voltage, shown in the solid line among Figure 49 with the external magnetic field that changes along X-axis.
The manufacture method of the Magnetic Sensor 60 that constitutes in the above described manner will be described below.At first, shown in Figure 50 as the plane, on rectangle quartz glass 60al, form a plurality of film M that make by above-mentioned Spin Valve film SV and will constitute the above-mentioned magnetic bias film 61b of GMR element in isolated island shape mode.Utilize super high-vacuum installation film M to be formed into accurate thickness by sequential cascade.Form these films M, make that when by the cutting technique that carries out the later dotted line cutting quartz glass 60al along Figure 50, when it is divided into each substrate 60a shown in Figure 42, film M will be positioned at GMR element 61-64 shown in Figure 42, the position of 71-74.In addition, become except cross shape, to have aligning (location) the mask 60b of rectangular shape at four dihedrals of quartz glass 60al.
Then, as plane Figure 51 and along the 3-3 line of Figure 51 cut section Figure 52 shown in, prepare rectangular metal plate 81, wherein a plurality of square through-holes have been formed (promptly with square dot matrix structure, form square through-hole along X-axis and Y-axis equally spacedly each other, this square through-hole has the limit that is parallel to X-axis and Y-axis).Then, with parallelepiped-shaped and have the permanent bar magnet 82 of almost the same square sectional with through hole ... 82 insert in the through hole of sheet metal 81, make to form the permanent bar magnet 82 in magnetic pole place ... 82 end face is parallel to sheet metal 81.At this moment, arrange permanent bar magnet 82 ... 82, make that the polarity of magnetic pole of each bar magnet 82 is different with polarity adjacent with it and the at interval magnetic pole of other permanent bar magnet 82 of bee-line.Here, the permanent bar magnet 82 of employing ... 82 have the magnetic charge of identical size.
Then, shown in the Figure 53 of plane, the plate 83 of preparing thick about 0.5nm, making by transparent quartz glass, this plate 83 has with above-mentioned sheet metal 81 rectangularity about the same long, the shape that allows this plate 83 on four angles, have to be used to locate, be complementary with the alignment mask of above-mentioned quartz glass 60al aim at (location) mask 83a.In addition, at middle body, with the permanent bar magnet 82 that inserts above-mentioned sheet metal 81 ... the corresponding position of 82 profile forms alignment mask 83b.Then, shown in Figure 54, utilize bonding agent with permanent bar magnet 82 ... 82 upper surface bonds to the lower surface of plate 83.At this moment, determine the relative position of permanent bar magnet 82 by alignment mask 83b with respect to plate 83.Then, remove sheet metal 81 from downside.In this step, permanent bar magnet 82 ... 82 and plate 83 form the magnetic array that constitutes in the following manner: promptly be provided with a plurality of permanent magnets with square end faces of magnetic poles at the lattice point place of quadrate array, the polarity of the magnetic pole of each permanent magnet is different with the polarity of the magnetic pole of other permanent bar magnet 82 of and interval bee-line adjacent with it.
Then, shown in Figure 55, location quartz glass 60al, make the surface that has formed the film that will become the GMR element on it contact with the upper surface of plate 83, in quartz glass 60al, formed the film (comprising to become the layer of the magnetosphere of pinning layer, that is, this layer comprises the magnetosphere that becomes fixed magnetization layer) that will become the GMR element.Cruciform by making alignment mask 83a and each and above-mentioned alignment mask 60b have removed that criss-cross part kissing is incompatible accurately determines the relative position of quartz glass 60al with respect to plate 83.
Figure 56 illustrates wherein to have chosen four above-mentioned permanent bar magnets 82 ... the skeleton view of 82 state.From then on figure can clearly be seen that, at permanent bar magnet 82 ... on 82 the upper surface, distance the shortest four the S utmost points extremely adjacent with N are pointed to from a N utmost point in the magnetic field of formation, that is, and and at the four direction that differs 90 ° each other.Therefore, shown in the illustraton of model of Figure 57, under the state on the upper surface that quartz glass 60al is placed on the plate 83 shown in Figure 55, impose on parallel in the magnetic field of the negative direction of the negative direction of the positive dirction of the positive dirction of Y-axis, X-axis, Y-axis and X-axis and will become the film of GMR element with each limit of the square end faces of the N utmost point.
In the present embodiment, utilize such magnetic field, heat-treat with the fixing direction of magnetization of fixed magnetization layer P (fixed bed of fixed magnetization layer P).That is, by clamper CL that plate 83 and quartz glass 60al is fixed to one another under the state of Figure 55, be heated to 250 ℃ to 280 ℃ in a vacuum, and make it keep this state about 4 hours.
After this, take out quartz glass 60al; Form pad 65-68,75-78 shown in Figure 42; Form the wiring that connects these pads; At last along dotted line cutting quartz glass 60al shown in Figure 50.Above-mentioned technology has been finished the manufacturing of Magnetic Sensor shown in Figure 42 60.
To describe below and utilize the measurement result of above-mentioned Magnetic Sensor magnetic.In this measured, when the positive dirction energized south of the Y-axis of Magnetic Sensor 60, azimuth angle theta (measured angular) was defined as 0 °, shown in Figure 58.Measurement result is shown in Figure 59.Can clearly be seen that from Figure 59 the variation of the X-axis Magnetic Sensor output Sx shown in the solid line is as sinusoidal curve, the variation of the Y-axis Magnetic Sensor output Sy shown in the dotted line is as cosine curve.The desired just result of characteristic shown in Figure 48 and 49.
In this case, can determine the position angle by following manner: (1) when X-axis Magnetic Sensor output Sx and Y-axis Magnetic Sensor output Sy all be on the occasion of the time, θ=arctan (Sx/Sy); (2) when Y-axis Magnetic Sensor output Sy is negative value, θ=180 °+arctan (Sx/Sy); (3) when X-axis Magnetic Sensor output Sx be negative value, Y-axis Magnetic Sensor output Sy be on the occasion of the time, θ=360 °+arctan (Sx/Sy).Therefore, for example can be with Magnetic Sensor 60 as magnetic (position angle) sensor, it can be installed on the portable electric appts as mobile phone.Here, if when the position angle is in from 270 to 360 scope, permission is the demonstration in the scope from 90 ° to 0 °, so when output the Sy of institute be on the occasion of the time, can determine the position angle by θ=arctan (Sx/Sy), as output Sy when being negative value, can determine the position angle by θ=180 °+arctan (Sx/Sy).
As mentioned above, according to the 3rd embodiment, prepare the magnet array of formation in the following manner, make a plurality of permanent magnets be arranged on the lattice point place of square lattice, the polarity of the magnetic pole of each permanent magnet is different with polarity adjacent with it and the magnetic pole of other permanent magnet of bee-line at interval, the magnetic field that utilization is formed by magnet array, the direction of magnetization of magnetosphere that will become above-mentioned pinning layer is pinned.Therefore, on single substrate, can easily form the GMR element, wherein pinning layer ground pinning direction of magnetization differ from one another (being perpendicular to one another).In addition, by the method, can once make single substrate in a large number, each substrate has the GMR element that the pinning direction of magnetization of pinning layer wherein differs from one another, thereby reduces the manufacturing expense of single substrate.
Here, the present invention is not limited to the foregoing description, can make various modifications within the scope of the invention.For example, have the magnetized NiCo of big remanent magnetism as coating layer, also can replace NiCo with having magnetized other material of big remanent magnetism (for example Co) although in above-mentioned first and second embodiment, adopt.In addition, the method for the fixed magnetisation direction of the fixed magnetization layer among first and second embodiment can be applied to other as the magneto-resistance effect element among the 3rd embodiment with pinning layer (layer) with fixed magnetization axle.In addition, although but in the fixed magnetization layer of above-mentioned three embodiment pinning layer (pinning layer) use PtMn, also can wait to replace PtMn with FeMn, IrMn.
Claims (4)
1. the manufacture method of a Magnetic Sensor, described Magnetic Sensor comprises the magneto-resistance effect element that comprises pinning layer and free layer, described magneto-resistance effect element has the resistance value that the relative angle that forms with the direction of magnetization by the direction of magnetization of pinning layer and free layer changes, and described method comprises step:
Prepare the magnet array of formation in the following manner, promptly at the lattice point place of square lattice a plurality of permanent magnets are set, the polarity of the magnetic pole of each permanent magnet is different with polarity adjacent with it and other magnet magnetic pole that distance is the shortest;
Thin slice is set on described magnet array, in this thin slice, the layer that comprises magnetosphere forms; Described magnetosphere becomes described pinning layer to the major general;
Utilization is in a described magnetic pole and the magnetic field that is adjacent and distance forms between another the shortest described magnetic pole, and pinning will become the direction of magnetization of the magnetosphere of described pinning layer.
2. the manufacture method of Magnetic Sensor as claimed in claim 1, wherein,
Described Magnetic Sensor comprises X-axis magneto-resistance effect element and Y-axis magneto-resistance effect element, and this X-axis and this Y-axis are perpendicular to one another,
Be provided with in the step described, thin slice is set in this way on described magnet array, magnetic field on the X-direction that is formed by described magnet array is applied to will be become on the layer of magnetosphere of described pinning layer of described X-axis magneto-resistance effect element described comprising, the magnetic field on the Y direction that forms by described magnet array be applied to described comprise with become described Y-axis magneto-resistance effect element described pinning layer magnetosphere layer on.
3. the manufacture method of Magnetic Sensor as claimed in claim 1, wherein,
The step of the direction of magnetization of the described magnetosphere of described pinning comprises uses clamper that described thin slice is fixed on the described magnet array, heats described thin slice then.
4. the manufacture method of a Magnetic Sensor, described Magnetic Sensor comprises a magneto-resistance effect element, each magneto-resistance effect element has the resistance value that the relative angle that forms with the direction of magnetization by the direction of magnetization of pinning layer and free layer changes, and described method comprises step:
Prepare the magnet array of formation in the following manner, promptly at the lattice point place of square lattice a plurality of permanent magnets are set, the polarity of the magnetic pole of each permanent magnet is different with polarity adjacent with it and other magnet magnetic pole that distance is the shortest;
On thin slice, form a plurality of film M that will constitute each magneto-resistance effect element with isolated island shape form one by one, thereby when this thin slice of cutting makes this thin slice be divided on each substrate, described a plurality of film M will be positioned at definite position;
Described thin slice is placed on the described magnet array as follows, be applied to each film M by described magnet array in one of on the negative direction on the positive dirction on the positive dirction of Y-axis, in X-axis, in Y-axis and magnetic field that forms on the negative direction in X-axis, with the direction of magnetization of the described pinning layer of each film M of pinning.
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| CN102809732A (en) * | 2011-05-30 | 2012-12-05 | 株式会社电装 | Magnetic sensor and manufacturing method of the same |
| WO2016173481A1 (en) * | 2015-04-27 | 2016-11-03 | 江苏多维科技有限公司 | Rapid thermal treatment method and apparatus for pinning layer of spintronic device |
| CN110573895A (en) * | 2017-04-25 | 2019-12-13 | 柯尼卡美能达株式会社 | Magnetic sensor |
| CN110568385A (en) * | 2019-08-02 | 2019-12-13 | 歌尔股份有限公司 | Manufacturing method of magnetic sensor and magnetic sensor |
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| CN102809732A (en) * | 2011-05-30 | 2012-12-05 | 株式会社电装 | Magnetic sensor and manufacturing method of the same |
| CN102809732B (en) * | 2011-05-30 | 2016-01-20 | 株式会社电装 | Magnetic Sensor and manufacture method thereof |
| WO2016173481A1 (en) * | 2015-04-27 | 2016-11-03 | 江苏多维科技有限公司 | Rapid thermal treatment method and apparatus for pinning layer of spintronic device |
| EP3291318A4 (en) * | 2015-04-27 | 2019-01-23 | Multidimension Technology Co., Ltd. | Rapid thermal treatment method and apparatus for pinning layer of spintronic device |
| US11069544B2 (en) | 2015-04-27 | 2021-07-20 | MultiDimension Technology Co., Ltd. | Rapid thermal processing method and apparatus for programming the pinned layer of spintronic devices |
| CN110573895A (en) * | 2017-04-25 | 2019-12-13 | 柯尼卡美能达株式会社 | Magnetic sensor |
| CN111090063A (en) * | 2018-10-24 | 2020-05-01 | Tdk株式会社 | Magnetic sensor |
| CN113383243A (en) * | 2019-02-01 | 2021-09-10 | 森斯泰克有限公司 | Arrangement of adjacent layer structures for a magnetoresistive magnetic field sensor, magnetoresistive magnetic field sensor and method for the production thereof |
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