KR102231035B1 - Lens-type retarding field energy analyzer without a grid-electrode - Google Patents

Abstract

The present invention relates to a delayed energy analyzer. The delayed energy analyzer comprises: an electrostatic lens refracting an incident charged particle beam; a delay electrode in which a focal point of the charged particle beam refracted by the electrostatic lens is made inside, an electric potential is generated inside to reduce the energy of the incident charged particle beam, and only charged particles having energy greater than a potential generated inside pass through the delay electrode; and a collector measuring the energy distribution of the charged particle beam upon reaching the charged particle passing through the delay electrode. The collision between the beam and the electrode is minimized so that the present invention has the effect of improving durability and reliability of measurement.

Description

{Lens-type retarding field energy analyzer without a grid-electrode}

The present invention relates to a delayed energy analyzer, and more particularly, to a delayed energy analyzer that measures an energy distribution while gradually decreasing the energy of charged particles such as electrons or ion beams.

Characteristics such as the energy distribution of the beam generated from the light source of the electron microscope and the ion microscope influence the performance of the light source and the microscope, and it is very important to accurately grasp it.

At this time, the larger the spread of the energy distribution, the greater the chromatic aberration. This increases the size of the beam reaching the sample surface, which degrades the performance of the microscope. Therefore, the more accurately the energy distribution is measured, the more accurately the chromatic aberration can be calculated, and the accurate measurement of the energy distribution is important in improving the performance of the microscope.

Meanwhile, a delayed energy analyzer is used to measure an accurate energy distribution. The delayed energy analyzer measures the energy distribution by injecting energy of charged particles such as electrons or ion beams (hereinafter referred to as beams), passing through the delay electrode, and generating a delayed potential at the delay electrode, gradually reducing the energy of the incident charged particles. It is a device to do.

This is to use the principle that charged particles with energy greater than the potential generated inside the delay electrode pass through the delay electrode and are collected in the collector, and charged particles with small energy do not pass through the delay electrode. The principle is to measure the energy distribution.

However, the delayed energy analyzer has a problem in that the resolution of the energy analyzer is deteriorated due to the non-uniformity of the potential perpendicular to the optical axis inside the delay electrode.

Meanwhile, in the conventional delay energy analyzer, a grid electrode was used as a delay electrode. In this case, contaminants were accumulated in the grid electrode as the beam collided with the grid electrode. These contaminants cause hysteresis in the collected signals, resulting in distortion of measurement results (HK Fang, K.-I. Oyama, CZ Cheng, Electrode contamination effects of retarding potential analyzer, Rev. Sci. Instrum. 85 ( 2014) 015104.doi:10.1063/1.4856515.).

In addition, as the beam collides with the grid electrode, the amount of collected signal decreases, which is related to the number of meshes and the alignment state of the grid electrode (K. Landheer, AA Kobelev, AS Smirnov, J. Bosman, S. Deelen, M. Rossewij, AC de Waal, I. Poulios, AF Benschop, REI Schropp, JK Rath, Note: Laser-cut molybdenum grids for a retarding field energy analyzer, Rev. Sci. Instrum. 88 (2017) 066108. :10.1063/1.4986229., THM Van De Ven, CA De Meijere, RM Van Der Horst, M. Van Kampen, VY Banine, J. Beckers, Analysis of retarding field energy analyzer transmission by simulation of ion trajectories, Rev. Sci. Instrum .89 (2018).doi:10.1063/1.5018269.). Therefore, if the amount of the initial signal is very small, the collected signal will be smaller, and if it is similar to the noise level, there is a problem in that it is difficult to distinguish the signal between the noise and the beam.

In addition, due to the difference in the potential between the meshes of the grid electrodes, a potential that is partially non-uniform is formed, resulting in distortion of the measurement result (SD Johnson, MM El-Gomati, L. Enloe, High-resolution retarding field analyzer, J. Vac. Sci. Technol. B Microelectron. Nanom. Struct. 21 (2003) 350. doi:10.1116/1.1516180., M. Talley, S. Shannon, ??LC-?? SS and, undefined 2017, IEDF distortion and resolution considerations for RFEA operation at high voltages, Iopscience.Iop.Org. (nd).https://iopscience.iop.org/article/10.1088/1361-6595/aa9465/pdf.).

Accordingly, there is a need to develop a delayed energy analyzer that reduces the accumulation of contaminants due to collision between the beam and the electrode, prevents reduction of a collection signal due to collision between the beam and the electrode, and forms a uniform potential.

Korean Patent Registration No. 10-1523453 (2015.05.28)

The present invention was created to improve the problems of the conventional delay energy analyzer as described above, and improves durability by preventing the electrode from being damaged by the beam, and improving reliability by preventing distortion of the measurement result due to accumulation of contaminants. Its purpose is to provide a delayed energy analyzer.

In order to achieve the above object, the delayed energy analyzer according to the present invention includes an electrostatic lens that refracts an incident charged particle beam, and a focus of the charged particle beam refracted by the electrostatic lens is created inside, and a potential is generated therein. It reduces the energy of the generated and incident charged particle beam, and measures the energy distribution of the charged particle beam as the delay electrode passes only charged particles having energy greater than the potential generated inside, and the charged particles passing through the delay electrode reach It characterized in that it comprises a collector.

In this case, it is possible to further include a blocking electrode disposed between the electrostatic lens and the delay electrode and provided to block interference of a potential generated between the electrostatic lens and the delay electrode.

In this case, the electrostatic lens includes a lens electrode that refracts an incident charged particle beam by applying a voltage, and a front ground electrode disposed in front of the lens electrode in a direction in which the charged particle beam is incident and provided in a grounded state. It is also possible.

In addition, the electrostatic lens may further include a rear ground electrode disposed on the rear surface of the lens electrode in a direction in which the charged particle beam is incident and provided in a grounded state.

Meanwhile, it is possible to further include an optical system frame formed in a hollow shape to fix the electrostatic lens, the blocking electrode, the delay electrode, and the collector therein.

In this case, it is also possible to further include a diaphragm for adjusting the charged particle beam incident on the electrostatic lens.

At this time, it is possible to further include a housing body formed in a cylindrical shape to accommodate the optical system frame therein and to block an external electric field.

At this time, the front housing cover is coupled to one end in the axial direction of the housing body and formed in a disc shape to cover one end in the axial direction of the housing body, the diaphragm is coupled to one surface, and the optical system frame is coupled to the other surface. It is also possible to include more.

In addition, it is possible to further include an aperture cover in which a beam incidence hole is formed so that the aperture is fixed by being combined with the front housing cover, and a charged particle beam is incident on the aperture from the outside.

In addition, it is possible to uniformly apply a predetermined voltage to the housing, the front ground electrode, the rear ground electrode, the blocking electrode, or the collector.

As described above, according to the delayed energy analyzer according to the present invention, the collision between the beam and the electrode is minimized by using an electrode instead of a grid, thereby improving durability and reliability of measurement.

In addition, there is an effect of improving analysis performance by reducing a measurement error due to a non-uniform potential inside the delay electrode by using an electrostatic lens.

In addition, there is an effect of improving the reliability of measurement by reducing potential interference by placing a grounded blocking electrode between the electrostatic lens and the delay electrode.

1 is a combined perspective view of a delay energy analyzer according to an embodiment of the present invention,
Figure 2 is an exploded perspective view of Figure 1,
Figure 3 is a cross-sectional view of Figure 1,
4 is a perspective view of an optical system in a delayed energy analyzer according to an embodiment of the present invention;
5 is a perspective view of a lens electrode in a delayed energy analyzer according to an embodiment of the present invention,
6 is a perspective view of a delay electrode in the delay energy analyzer according to an embodiment of the present invention,
7 is a perspective view of a collector in a delayed energy analyzer according to an embodiment of the present invention,
8 is a perspective view of a blocking electrode in a delayed energy analyzer according to an embodiment of the present invention,
9 is a perspective view of an optical system frame in a delayed energy analyzer according to an embodiment of the present invention;
10 is a schematic diagram of the configuration and operation of a delayed energy analyzer according to an embodiment of the present invention;
11 is a schematic diagram simulating a trajectory of a beam in a delayed energy analyzer according to an embodiment of the present invention;
12A is a schematic diagram simulating a trajectory of a beam when a voltage is not applied to a lens electrode and a delay electrode in a delay energy analyzer according to an embodiment of the present invention;
12B is a schematic diagram simulating a trajectory of a beam when a voltage is applied to a lens electrode in a delayed energy analyzer according to an embodiment of the present invention;
12C is a schematic diagram simulating a trajectory of a beam when a voltage is applied to a lens electrode and a delay electrode in a delay energy analyzer according to an embodiment of the present invention;
12D is a schematic diagram simulating a trajectory of a beam when the negative potential of the delay electrode is increased in FIG. 12C;
13 is a graph of a collection rate according to a delay potential in a delay energy analyzer according to an embodiment of the present invention;
14 is a graph representing a change in resolution according to a change in voltage of a lens electrode in a delayed energy analyzer according to an embodiment of the present invention;
15 is a graph of a change in resolution according to a distance between an electrostatic lens and a blocking electrode and a length of a delay electrode in the delay energy analyzer according to an embodiment of the present invention;
16 is a graph of a change in resolution according to initial energy of a beam in a delayed energy analyzer according to an embodiment of the present invention;
17 is a cross-sectional view of a delay energy analyzer according to a second embodiment of the present invention;
18 is a perspective view of an optical system in a delayed energy analyzer according to a second embodiment of the present invention;
19 is a perspective view of a lens electrode in a delayed energy analyzer according to a second embodiment of the present invention;
20 is a schematic diagram simulating a trajectory of a beam in a delayed energy analyzer according to a second embodiment of the present invention;
21 is a cross-sectional view of a delay energy analyzer according to a third embodiment of the present invention;
22 is a perspective view of an optical system in a delayed energy analyzer according to a third embodiment of the present invention;
23 is a schematic diagram illustrating a beam trajectory simulation in a delayed energy analyzer according to a third embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

In the present invention, various modifications may be made and various embodiments may be provided, and specific embodiments will be illustrated in the drawings and described in detail in the detailed description. This is not intended to limit the present invention to a specific embodiment, and should be construed as including all changes, equivalents, and substitutes included in the spirit and scope of the present invention.

In describing the present invention, terms such as first and second may be used to describe various elements, but the elements may not be limited by the terms. The terms are only for the purpose of distinguishing one component from another component. For example, without departing from the scope of the present invention, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element.

The term “and/or” may include a combination of a plurality of related listed items or any of a plurality of related listed items.

When a component is referred to as being "connected" or "connected" to another component, it is said that it is directly connected to or may be connected to the other component, but other components may exist in the middle. Can be understood. On the other hand, when a component is referred to as being "directly connected" or "directly connected" to another component, it may be understood that the other component does not exist in the middle.

The terms used in the present application are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions may include plural expressions unless the context clearly indicates otherwise.

In the present application, terms such as "comprise" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and one or more other features It may be understood that the presence or addition of elements or numbers, steps, actions, components, parts, or combinations thereof, does not preclude in advance.

Unless otherwise defined, all terms used herein including technical or scientific terms may have the same meaning as commonly understood by one of ordinary skill in the art to which the present invention belongs. Terms as defined in a commonly used dictionary may be interpreted as having a meaning consistent with the meaning in the context of the related technology, and unless explicitly defined in the present application, it is interpreted as an ideal or excessively formal meaning. It may not be.

In addition, the following embodiments are provided to more completely describe to those with average knowledge in the art, and the shapes and sizes of elements in the drawings may be exaggerated for clearer explanation.

1 to 3, the delay energy analyzer according to an embodiment of the present invention includes an electrostatic lens 100, a spacer 140, a delay electrode 200, a collector 300, a blocking electrode 400, It includes an optical system frame 500, a stop 600, a housing 700, and a stop cover 800.

At this time, the aperture 600 is coupled to one side of the housing 700, and the aperture cover 800 is coupled to the outside of the aperture 600. Meanwhile, the optical system frame 500 is mounted inside the housing 700, and the electrostatic lens 100, the delay electrode 200, the collector 300, and the inside of the optical system frame 500 The blocking electrode 400 and the spacer 140 are provided.

In addition, the electrostatic lens 100, the delay electrode 200, the collector 300, and the blocking electrode 400 are along a direction in which a charged particle beam (electron or ion beam) is incident (axial direction). They are arranged to form a path through which light travels (hereinafter referred to as'optical system'). That is, in the present invention, the blocking electrode 400 is disposed at the rear side of the electrostatic lens 100 along the axial direction based on the incident direction, and the delay electrode 200 is disposed at the rear side of the blocking electrode 400. And the collector 300 is disposed behind the delay electrode 200 to form an optical system.

Meanwhile, a spacer between the electrostatic lens 100 and the blocking electrode 400, between the blocking electrode 400 and the delay electrode 200, and between the delay electrode 200 and the collector 300, respectively 140 is placed (see Fig. 4).

3 and 4, the electrostatic lens 100 is disposed inside the optical system frame 500 and includes a lens electrode 110.

Referring to FIG. 5, the lens electrode 110 is disposed on the front surface of the blocking electrode 400, and a gap with the blocking electrode 400 is maintained through the spacer 140. In this case, the lens electrode 110 includes a lens electrode body 111 and a lens electrode coupling part 112, and a passage through which a charged particle beam can pass is provided at the center. That is, the lens electrode body 111 is provided in a cylindrical shape, and a plurality of the lens electrode coupling portions 112 protrude outwardly in a radial direction on the outer circumferential surface of the lens electrode body 111 to form the optical system frame 500. It is combined with the inner circumferential surface of.

Meanwhile, in the present embodiment, the lens electrode 110 uses a cylindrical electrostatic lens, but is not limited thereto, and various types of electrostatic lenses capable of refracting a charged particle beam may be applied.

3, the spacer 140 is formed in a cylindrical shape, between the lens electrode 110 and the blocking electrode 400, between the blocking electrode 400 and the delay electrode 200, and It is disposed between the delay electrode 200 and the collector 300. Meanwhile, in the present embodiment, the spacer 140 uses alumina, but is not limited thereto and may be made of various materials capable of insulating each electrode. In addition, the spacer 140 may be transformed into various sizes (lengths or diameters) according to the sizes of the lens electrode 110, the delay electrode 200, and the blocking electrode 400 and an applied voltage.

6, the delay electrode 200 is configured to be applied with a voltage and is disposed between the collector 300 and the blocking electrode 400, and the blocking electrode 400 and the delay electrode 200 ) And between the delay electrode 200 and the collector 300 by the spacer 140.

In addition, the delay electrode 200 includes a cylindrical delay electrode main body 210 and a delay electrode coupling part 220 protruding radially outward from the delay electrode main body 210. In this case, the delay electrode body 210 is made of a material to which a voltage can be applied. Meanwhile, the delay electrode coupling part 220 is coupled to the inner circumferential surface of the optical system frame 500.

Referring to FIG. 7, the collector 300 is disposed at the rear side of the delay electrode 200 in the direction in which the charged particle beam is incident, and the collector body 310 in the form of a disk and the collector body 310 are radially outward. It includes a collector coupling portion 320 formed extending into, and a collection portion 330 for collecting charged particles is provided at the center of the collector body 310, and the collection portion 330 receives the charged particle current of the charged particle beam. A measurable ammeter is connected.

Referring to FIG. 8, the blocking electrode 400 is disposed between the lens electrode 110 and the delay electrode 200, and the lens electrode 110 and the delay electrode 200 are formed through the spacer 140. ) And the gap is maintained. In this case, the blocking electrode 400 includes a disk-shaped blocking electrode body 410 and a blocking electrode coupling portion 420 extending radially outward from the blocking electrode body 410.

2, 3, and 9, the optical system frame 500 is coupled to the housing 700 and includes a frame body 510 and a frame cover 520. At this time, the frame body 510 is formed in a cylindrical shape in which a plurality of holes 511 and 512 are formed on an outer circumferential surface, and the lens electrode 110, the front ground electrode 120, and a plurality of the The spacer 140, the delay electrode 200, the collector 300, and the blocking electrode 400 are accommodated. In addition, the frame cover 520 is formed to block one end of the frame body 510 in the axial direction, and a passage 521 through which a charged particle beam can pass is formed in the center, and the housing 700 A plurality of coupling holes 522 for coupling and coupling are formed.

That is, on the outer circumferential surface of the frame body 510, the long hole 511 is formed long along the axial direction so that the horizontal position (position in the axial direction) of the delay electrode 200 can be changed, and the position of the electrostatic lens 100 is A plurality of circular holes 512 are formed to guide.

Meanwhile, in the present embodiment, the optical system frame 500 uses alumina, but is not limited thereto and may be changed to a material having insulating properties.

The diaphragm 600 is formed in a disk shape, is provided between the housing 700 and the diaphragm cover 800, and is provided to adjust the amount of the charged particle beam passing through. Meanwhile, in the present embodiment, the inner diameter of the stop 600 is 0.5 mm, but is not limited thereto.

1 to 3, the housing 700 accommodates the optical system frame 500 therein, and includes a housing body 710, a front housing cover 720, and a rear housing cover 730. At this time, the housing main body 710 is formed in a cylindrical shape, and a plurality of holes are formed on the outer circumferential surface thereof. One end of the housing body 710 in the axial direction is covered by coupling the front housing cover 720, and the other end of the housing body 710 in the axial direction is covered by coupling the rear housing cover 730.

The front housing cover 720 includes a disk-shaped front portion 721 and a coupling portion 722 formed to be bent and extended at a radial end of the front portion 721 to be coupled to the inner circumferential surface of the housing body 710. Including, in the center of the front portion 721, the aperture 600 is seated, the incident hole 724 through which the charged particle beam passes is formed, and the optical system frame outside the radial direction of the incident hole 724 Two coupling holes 723 for coupling with 500 are formed. In addition, a hole for coupling with the aperture cover 800 is also formed.

The rear housing cover 730 is formed in a disk shape and is coupled to the inner circumferential surface of the housing main body 710.

The aperture cover 800 is coupled to the front housing cover 720 and includes an aperture cover body 810, an inclined portion 820, and a beam incident hole 830. In this case, the aperture cover body 810 is formed in a circular protrusion shape, the inclined portion 820 is formed at the center of the aperture cover body 810, and the beam incident hole is formed at the center of the inclined portion 820. 830 is formed. That is, in the diaphragm cover main body 810, the upper part is wide and the lower part is narrowed in a conical shape, so that the inclined surface is formed to lead to the beam incidence hole 830.

On the other hand, in the groove between the lens electrode coupling portion 112, the delay electrode coupling portion 220, the collector coupling portion 320, and the blocking electrode coupling portion 420 protrudes in the optical system frame 500 A screw inserted from the outside through the formed long hole 511 and circular hole 512 is received. Accordingly, it is possible to finely adjust the alignment of the lens electrode 110, the delay electrode 200, the collector 300, and the blocking electrode 400 by turning the screw.

When the effect of the delayed energy analyzer according to an embodiment of the present invention is described with reference to FIGS. 1 to 16, when a charged particle beam is incident, it passes through the beam incident hole 830. At this time, the amount of the charged particle beam is adjusted while passing through the stop 600 provided in the beam incident hole 830.

The charged particle beam passing through the diaphragm 600 is refracted by the electrostatic lens 100. That is, refraction of the charged particle beam occurs while an electric field is generated in the lens electrode 110 to which a current is applied.

The charged particle beam refracted while passing through the electrostatic lens 100 passes through the blocking electrode 400 to form a focus inside the delay electrode 200.

In this case, a voltage is applied to the delay electrode 200 to cause a delay in the charged particles of the charged particle beam. As a result, charged particles having energy greater than the potential generated inside the delay electrode 200 pass through the delay electrode 200 and are collected by the collector 300, and the potential generated inside the delay electrode 200 Charged particles having less energy are prevented from passing through the delay electrode 200. As a result, an ammeter connected to the collector 300 measures the current of the charged particles.

Meanwhile, the blocking electrode 400 blocks interference between the delay electrode 200 and the electric potential generated by the electrostatic lens 100.

10 and 11, in the delay energy analyzer according to an embodiment of the present invention, it is possible to know the progress of light according to the arrangement of components and the spacing of the electrodes. At this time, the distance (D) between the electrostatic lens 100 and the blocking electrode 400, the axial length (L) of the delay electrode 200, and the electrostatic lens 100 and the delay electrode 200 It was designed so that the focus of the charged particle beam was formed inside the delay electrode 200 by adjusting the applied potential.

Meanwhile, in this embodiment, the lens electrode 110 used a cylindrical electrostatic lens having an outer diameter of 20 mm, an inner diameter of 16 mm, and a length of 15 mm, and the blocking electrode 400 has an outer diameter of 16 mm, an inner diameter of 2 mm, and a length of 3 mm. The delay electrode 200 has an outer diameter of 16 mm, an inner diameter of 2.5 mm, and a length of 8 mm. In addition, the collector has an outer diameter of 16 mm and a length of 3 mm. At this time, the charged particle beam was incident with an energy of 500 eV at an emission angle of ±7 mrad to simulate the result. Hereinafter, the effect of the present invention will be described through the result data applying the present embodiment.

12A shows the trajectory of the charged particle beam when no voltage is applied to the electrostatic lens 100 and the delay electrode 200. When no voltage is applied to the electrostatic lens 100 and the delay electrode 200, a charged particle beam travels straight from the light source and is collected by the collector 300 as it is.

In contrast, FIG. 12B shows a trajectory when -492.193V is applied to the lens electrode 110. As described above, when a negative potential is applied to the lens electrode 100, the charged particles included in the charged particle beam are refracted while passing through the lens electrode 100 to form a focus inside the delay electrode 200. Meanwhile, in this embodiment, a focus is formed at a point 0.75mm from the end in the direction in which the beam of the delay electrode 200 is incident.

Meanwhile, in FIG. 12C, a trajectory of a charged particle beam when -492.193V is applied to the lens electrode 110 and -500V is applied to the delay electrode 200 is shown. In this case, the energy of the charged particles decreases due to the potential of the delay electrode 200, but all of the initially emitted (incident) beams reach the collector 300.

In comparison, FIG. 12D shows the trajectory of the charged particle beam when -492.193V is applied to the lens electrode 110 and -500.07V is applied to the delay electrode 200. In this case, all of the initially emitted (incident) beams do not reach the collector 300.

On the other hand, as shown in FIGS. 12A to 12D, since the charged particle beam that has passed through the lens electrode 110 is collected toward the focus inside the delay electrode 200, charged particles are collected in the delay electrode 200. Do not collide. As a result, there is an effect of preventing the occurrence of a phenomenon in which the amount of collected signals decreases or contamination due to collision occurs.

Therefore, it is possible to find a condition for obtaining an optimized resolution by adjusting the potential of the lens electrode 110 as described above, and under this condition, the collector 300 is controlled by adjusting the potential of the delay electrode 200. It is possible to measure the energy spread (or energy spread or energy distribution) by controlling the number of charged particles reaching ).

That is, as shown in FIG. 13, charges collected by the collector 300 according to the relative delay voltage applied to the delay electrode 200 (in this embodiment, this means a relative voltage based on -500V). The collection rate of particles varies. In this embodiment, the collection rate is maintained at 90% or more until the relative delay voltage is -65mV, and then the collection rate rapidly decreases in the -65mV to -70mV section, and the collection rate converges to 0% in the -70mV or more section. . Therefore, the distribution of the differential values of the collection rates in this section (dotted line on the graph in Fig. 13) becomes the largest. This means that the charged particles incident in this section can be decomposed according to the energy, and the smaller the energy spread of the beam (the smaller the voltage) is, the better the resolution is. The resolution in this example is 3.1 meV at a beam energy of 500 eV.

Meanwhile, in FIG. 14, a change in resolution according to the voltage of the lens electrode 110 is shown. When the focus is at the end of the delay electrode 200 in the direction in which the beam is incident, if the voltage applied to the lens electrode 110 is 0V, the relative lens voltage is the relative lens electrode ( 110). Referring to the graph of FIG. 14, it can be seen that the position of the focus changes as the voltage of the lens electrode 110 changes. Therefore, it can be seen that the voltage of the lens electrode 110 that can optimize performance exists as the resolution is minimized at a specific point.

Meanwhile, FIG. 15 shows a change in energy resolution according to a distance D between the electrostatic lens 100 and the blocking electrode 400 and an axial length L of the delay electrode 200. In the graph of FIG. 15, as the distance D between the electrostatic lens 100 and the blocking electrode 400 and the length L in the axial direction of the delay electrode 200 increase, the resolution decreases and the performance is improved. I can see that.

Meanwhile, FIG. 16 shows a change in resolution according to the initial energy of the charged particle beam. According to FIG. 16, it can be seen that the resolution increases as the initial energy of the charged particle beam increases.

17 to 20 illustrate a delay energy analyzer according to a second embodiment of the present invention. The delay energy analyzer of the present embodiment includes an electrostatic lens 1100, a spacer 1140, a delay electrode 1200, a collector 1300, a blocking electrode 1400, an optical system frame 1500, a diaphragm 1600, and a housing 1700. And an aperture cover 1800.

Meanwhile, the delay electrode 1200, the collector 1300, the blocking electrode 1400, the optical system frame 1500, the aperture 1600, the housing 1700, and the aperture cover 1800 of the present embodiment are In an embodiment of the present invention, the delay electrode 200, the collector 300, the blocking electrode 400, the optical system frame 500, the aperture 600, the housing 700, and the aperture cover Since the structure and effect of (800) are the same, a detailed description will be omitted.

The electrostatic lens 1100 in this embodiment includes a lens electrode 1110, a front ground electrode 1120, and a rear ground electrode 1130. At this time, the lens electrode 1110 is provided to apply a negative potential, the front ground electrode 1120 is disposed on the front side in the direction in which the beam of the lens electrode 1110 is incident, and the beam of the lens electrode 1110 The rear ground electrode 1130 is disposed on the rear side in the incident direction. Meanwhile, the spacer 1140 is disposed between the lens electrode 1110 and the front ground electrode 1120 and between the lens electrode 1110 and the rear ground electrode 1130.

Referring to FIG. 19, the lens electrode 1110 is disposed between the front ground electrode 1120 and the rear ground electrode 1130, and includes a lens electrode body 1111 and a lens electrode coupling portion 1112 In the center, a passage through which the charged particle beam can pass is provided. That is, the lens electrode body 1111 is provided in the form of a disk, and a plurality of lens electrode coupling portions 1112 are extended radially outwardly on the outer circumferential surface of the lens electrode body 1111 to form the optical system frame 1500 It is combined with the inner circumferential surface of.

Meanwhile, in the present embodiment, an Einzel lens is applied to the lens electrode 1110, but the present invention is not limited thereto and may be replaced with another lens.

Meanwhile, since the front ground electrode 1120 and the rear ground electrode 1130 of the present embodiment have the same structure as the lens electrode 1110 of the embodiment of the present invention, detailed descriptions will be omitted. However, the front ground electrode 1120 and the rear ground electrode 1130 are grounded. Accordingly, when a voltage is applied to the lens electrode 1110, an electric field is generated due to a voltage difference between the front ground electrode 1120 and the rear ground electrode 1130.

In addition, since the spacer 1140 in this embodiment has the same structure and effect as the spacer 140 in the embodiment of the present invention, a detailed description will be omitted.

Meanwhile, according to the present embodiment, a resolution of 2.8 meV may be obtained by applying a voltage of -282.858V to the lens electrode 1110.

21 to 23 illustrate a delay energy analyzer according to a third embodiment of the present invention. The delay energy analyzer of the present embodiment includes an electrostatic lens 2100, a spacer 2140, a delay electrode 2200, a collector 2300, a blocking electrode 2400, an optical system frame 2500, a diaphragm 2600, and a housing 2700. And an aperture cover 2800.

Meanwhile, the delay electrode 2200, the collector 2300, the blocking electrode 2400, the optical system frame 2500, the aperture 2600, the housing 2700 and the aperture cover 2800 of the present embodiment are In an embodiment of the present invention, the delay electrode 200, the collector 300, the blocking electrode 400, the optical system frame 500, the aperture 600, the housing 700, and the aperture cover Since the structure and effect of (800) are the same, a detailed description will be omitted.

The electrostatic lens 2100 in this embodiment includes a lens electrode 2110 and a front ground electrode 2120. In this case, the lens electrode 2110 is provided to apply a negative potential, and the front ground electrode 1120 is disposed on the front side in a direction in which the beam of the lens electrode 2110 is incident. Meanwhile, the spacer 2140 is disposed between the lens electrode 2110 and the front ground electrode 2120.

Meanwhile, in the present embodiment, the lens electrode 2110 is applied with an Einzel lens. In this embodiment, unlike a general Einzel lens that uses one negative potential electrode and two ground electrodes, the lens electrode 2110 and the front ground electrode 2120, which is one ground electrode, refract the beam, but the blocking electrode By the presence of 2400, the function as an Einzel lens can be implemented.

Meanwhile, since the front ground electrode 2120 of the present embodiment has the same structure and effect as the front ground electrode 120 of the embodiment of the present invention, a detailed description will be omitted. In addition, since the spacer 2140 in this embodiment has the same structure and effect as the spacer 140 in the embodiment of the present invention, a detailed description will be omitted.

Meanwhile, according to the present embodiment, a resolution of 2.6 meV may be obtained by applying a voltage of -320.475V to the lens electrode 2110.

Although the present invention has been described in detail through specific examples, this is for describing the present invention in detail, and the present invention is not limited thereto, and the present invention is not limited to those of ordinary skill in the art within the spirit of the present invention. It is clear that the transformation or improvement is possible by the ruler.

All simple modifications to changes of the present invention belong to the scope of the present invention, and the specific scope of protection of the present invention will be made clear by the appended claims.

100, 1100, 2100: electrostatic lens
110, 1110, 2110: lens electrode
200, 1200, 2200: delay electrode
300, 1300, 2300: collector
400, 1400, 2400: blocking electrode
500, 1500, 2500: optical system frame
600, 1600, 2600: aperture
700, 1700, 2700: housing
800, 1800, 2800: aperture cover

Claims (10)

An electrostatic lens that refracts the incident charged particle beam;
A delay electrode in which the focus of the charged particle beam refracted by the electrostatic lens is created inside, generates an electric potential inside to reduce the energy of the incident charged particle beam, and passes only charged particles with energy greater than the potential generated inside ; And
A collector for measuring the energy distribution of the charged particle beam by reaching the charged particles passing through the delay electrode;
Delayed energy analyzer comprising a.
The method of claim 1,
A blocking electrode disposed between the electrostatic lens and the delay electrode and provided to block interference of a potential generated between the electrostatic lens and the delay electrode;
Delayed energy analyzer, characterized in that it further comprises.
The method of claim 1,
The electrostatic lens,
Delayed energy analyzer comprising a lens electrode to refract the incident charged particle beam by applying a voltage.
The method of claim 3,
The electrostatic lens,
A front ground electrode disposed in front of the lens electrode in a direction in which the charged particle beam is incident, and provided in a grounded state;
Delayed energy analyzer, characterized in that it further comprises.
The method of claim 4,
The electrostatic lens,
A rear ground electrode disposed at a rear surface of the lens electrode in a direction in which the charged particle beam is incident, and provided in a grounded state;
Delayed energy analyzer, characterized in that it further comprises.
The method of claim 2,
An optical system frame formed in a hollow shape to fix the electrostatic lens, the blocking electrode, the delay electrode, and the collector therein;
Delayed energy analyzer, characterized in that it further comprises.
The method of claim 6,
An aperture for controlling a charged particle beam incident on the electrostatic lens;
Delayed energy analyzer, characterized in that it further comprises.
The method of claim 7,
A housing body formed in a cylindrical shape to accommodate the optical system frame therein and to block an external electric field;
Delayed energy analyzer, characterized in that it further comprises.
The method of claim 8,
A front housing cover coupled to one end of the housing body in the axial direction and formed in a disc shape so as to cover one end of the housing body in the axial direction, the diaphragm coupled to one surface, and the optical system frame coupled to the other surface;
Delayed energy analyzer, characterized in that it further comprises.
The method of claim 9,
An aperture cover in which a beam incidence hole is formed so that a beam of charged particles is incident on the aperture from the outside by being combined with the front housing cover to fix the aperture;
Delayed energy analyzer, characterized in that it further comprises.

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