KR102229414B1 - Nitriding furnace apparatus - Google Patents

Abstract

The present invention relates to a nitriding furnace apparatus, which comprises: a heat treatment unit for receiving a reaction gas and performing nitridation; a decomposition unit which receives the reaction gas from the heat treatment unit and heats the reaction gas to decompose it into decomposition gas; a measuring unit connected to the decomposition unit and measuring the decomposition state of the reaction gas; and a combustion unit which receives the decomposition gas from the decomposition unit and burns the decomposition gas to discharge it.

Description

Nitriding furnace equipment {NITRIDING FURNACE APPARATUS}

The present invention relates to a nitridation furnace apparatus, and more particularly, to a nitridation furnace apparatus for performing nitriding treatment using ammonia gas.

In general, the surface hardening method of iron includes a chemical surface hardening method that changes the chemical composition of the iron surface and a physical surface hardening method that hardens only by quenching without changing the chemical composition of the iron surface. The former includes carburization, nitriding, chimney, and chimney, and the latter includes induction heating quenching, flame quenching, and the like.

The surface hardening of iron is aimed at improving abrasion resistance, fatigue strength, corrosion resistance, seizure resistance, etc., and is widely used in fields that require durability, high performance, and high weight such as machine parts, molds, and tools.

Nitriding, a kind of chemical surface hardening method, is a method of diffusing nitrogen atoms onto the surface of iron. In other words, the iron surface heated above 500℃ acts as a catalyst and pyrolyzes ammonia (NH3) gas, and nitrogen atoms (N) generated at this time are adsorbed on the iron surface and diffused into the iron surface, resulting in a nitride layer on the iron surface. Is formed. The furnace used in this nitriding method is called a nitriding furnace.

However, in a conventional nitriding furnace, ammonia that cannot be decomposed from the product surface is directly leaked into the atmosphere, causing environmental pollution and threatening the safety of workers.

The background technology of the present invention is disclosed in Korean Patent Publication No. 10-0414542 (registered on December 24, 2003, title of the invention: Nitriding furnace).

An object of the present invention is to provide a nitridation furnace device capable of preventing harmful substances from being discharged to the outside.

In order to solve the above problems, the nitridation furnace apparatus according to the present invention includes: a heat treatment unit receiving a reaction gas and performing a nitriding treatment; A decomposition unit receiving the reaction gas from the heat treatment unit and heating the reaction gas to decompose it into a decomposition gas; A measuring unit connected to the decomposition unit and measuring a decomposition state of the reaction gas; And a combustion unit receiving the decomposition gas from the decomposition unit and combusting and discharging the decomposition gas.

In addition, the decomposition unit may include a flow unit connected to the heat treatment unit to provide a flow path of the reaction gas and the decomposition gas; A heating unit for decomposing the reaction gas by heating the flow unit; And a decomposition promoting unit installed in the flow unit and promoting decomposition of the reaction gas.

In addition, the flow portion is connected to the heat treatment portion, the inlet portion through which the reaction gas flows; A first flow unit in communication with the inlet and through which the reaction gas flows; And a second flow unit in communication with the first flow unit and through which the cracked gas flows.

Further, the first flow portion extends in a first direction from the inlet portion, and the second flow portion is disposed in parallel with the first flow portion.

In addition, the heating part is spaced apart from the flow part.

In addition, the decomposition promoting unit, a support disposed to interfere with the flow path of the reaction gas; And a decomposition promoting member installed on the support and contacting the reaction gas to promote decomposition of the reaction gas.

In addition, the decomposition promoting unit, the body portion provided with a contact strengthening unit; It includes; a catalyst member supported on the body portion and in contact with the reaction gas.

In addition, the contact reinforcement portion is provided in a porous shape disposed along the surface of the body portion to expand the area of the catalyst member in contact with the reaction gas.

In addition, the catalyst member includes a nickel oxide material.

In addition, a plurality of the support portions are provided and are stacked along the longitudinal direction of the flow portion.

In addition, the measuring unit is connected to the decomposition unit, the branch portion for branching the reaction gas and the decomposition gas; A measuring part body receiving the reaction gas and the decomposition gas from the branch part; A receiving unit accommodating a measuring member in which the reaction gas is dissolved, and introducing the measuring member into the measuring unit body; And a display unit provided on the measurement unit body and displaying the amount of the measurement member introduced into the measurement unit body.

In addition, the measurement unit is provided in a pair and is connected to both sides of the disassembly unit, respectively.

Further, it further includes a bypass unit for bypassing the reaction gas and the decomposition gas discharged from the heat treatment unit to the combustion unit.

The nitridation furnace apparatus according to the present invention can prevent harmful substances such as ammonia gas from being directly discharged into the atmosphere by decomposing reaction gases that have not yet been decomposed in the heat treatment unit into decomposition gases by the decomposition unit, thereby reducing environmental pollution. It can be used, and the safety of workers can be secured.

In addition, the nitridation furnace apparatus according to the present invention utilizes the difference in density between the reaction gas and the exhaust gas as a power to assist the flow of the reaction gas and the exhaust gas as the first flow unit and the second flow unit are arranged side by side in the first direction. I can.

In addition, in the nitridation furnace apparatus according to the present invention, since the heating unit is spaced apart from the flow unit to uniformly heat the flow unit, it is possible to prevent degradation of the decomposition efficiency of the reaction gas by local heating of the flow unit.

In addition, the nitridation furnace apparatus according to the present invention can accelerate the decomposition of the reaction gas by the decomposition accelerating unit, thereby reducing the energy or cost required for the decomposition of the reaction gas.

In addition, the nitridation furnace apparatus according to the present invention can increase the contact area between the reaction gas and the catalyst member by the contact strengthening unit, thereby enabling efficient operation.

In addition, the nitridation furnace apparatus according to the present invention can measure the decomposition state of the reaction gas by the measuring unit, thereby ensuring the accuracy of operation.

In addition, the nitridation furnace apparatus according to the present invention is easy to replace or manage the decomposition unit as the flow path of the reaction gas and the decomposition gas is bypassed by the bypass unit.

1 is a diagram schematically showing the configuration of a nitridation furnace apparatus according to an embodiment of the present invention.
2 is a cross-sectional view schematically showing the configuration of an exploded portion according to an embodiment of the present invention.
3 is a cross-sectional view schematically showing the configuration of a heating unit according to another embodiment of the present invention.
4 is a perspective view schematically showing the configuration of a disassembly promoting member according to an embodiment of the present invention.
5 is a front view schematically showing the configuration of a measuring unit according to an embodiment of the present invention.
6 is an operational state diagram schematically showing the operating sequence of the nitridation furnace apparatus according to an embodiment of the present invention.
7 is an operating state diagram schematically showing the operating state of the disassembled portion according to an embodiment of the present invention.
8 is an operational state diagram schematically showing the operation of the bypass unit according to an embodiment of the present invention.

Hereinafter, an embodiment of a nitridation furnace apparatus according to the present invention will be described with reference to the accompanying drawings.

In this process, the thickness of the lines or the size of components shown in the drawings may be exaggerated for clarity and convenience of description. In addition, terms to be described later are terms defined in consideration of functions in the present invention, which may vary according to the intention or custom of users or operators. Therefore, definitions of these terms should be made based on the contents throughout the present specification.

In addition, in the present specification, when a part is "connected (or connected)" with another part, it is not only "directly connected (or connected)", but also "directly connected (or connected)" with another member interposed therebetween. Indirectly connected (or connected) is also included. In the present specification, when a part "includes (or includes)" a certain component, it does not exclude other components, but further "includes (or includes)" other components unless otherwise stated. It means you can.

In addition, the same reference numerals may refer to the same components throughout the specification. Even if the same reference numerals or similar reference numerals are not mentioned or described in a specific drawing, the numerals may be described based on other drawings. In addition, even if there is a part in which a reference numeral is not indicated in a specific drawing, the part may be described based on other drawings. In addition, the relative difference between the number, shape, size, and size of the detailed components included in the drawings of the present application are set for convenience of understanding, and the embodiments are not limited and may be implemented in various forms.

1 is a diagram schematically showing the configuration of a nitridation furnace apparatus according to an embodiment of the present invention.

Referring to FIG. 1, a nitridation furnace apparatus 1 according to an embodiment of the present invention includes a heat treatment unit 100, a decomposition unit 200, a measurement unit 300, a combustion unit 400, and a bypass unit 500. Includes.

The reaction gas 2 described below may be exemplified as ammonia (NH3) gas, and the decomposition gas 3 may be exemplified as hydrogen (H2) gas and nitrogen gas (N2) generated by pyrolysis of ammonia gas. have.

The heat treatment unit 100 receives the reaction gas 2 from the outside and performs a nitriding treatment on the surface of the object (not shown). More specifically, the heat treatment unit 100 thermally decomposes the reaction gas 2 by heating the reaction gas 2 to 500° C. to 600° C., and the nitrogen atom (N) generated at this time is adsorbed to the object to be nitrided to nitrate it. A nitride layer, exemplified by iron nitride (Fe2N3), is formed on the surface of the object to be treated. Here, the object for nitriding may be exemplified as a metal material for hardening the surface by infiltrating nitrogen.

The decomposition unit 200 receives the reaction gas 2 from the heat treatment unit 100 and heats the reaction gas 2 to decompose it into the decomposition gas 3. More specifically, the decomposition unit 200 has a higher temperature than the heat treatment unit 100 in the reaction gas 2 so that the reaction gas 2 that has not yet been decomposed in the heat treatment unit 100 is completely decomposed into the decomposition gas 3 By adding the reaction gas (2) to prevent direct leakage into the atmosphere.

2 is a cross-sectional view schematically showing the configuration of an exploded portion according to an embodiment of the present invention.

Referring to FIG. 2, the decomposition unit 200 according to an embodiment of the present invention includes a flow unit 210, a heating unit 220, a decomposition promoting unit 230, and a temperature measuring unit 240.

The flow unit 210 is connected to the heat treatment unit 100 to receive the reaction gas 2, and the received reaction gas 2 and the decomposition gas 3 generated as the reaction gas 2 are decomposed. Provide a flow path. The flow part 210 according to an embodiment of the present invention includes an inlet part 211, a first flow part 212, and a second flow part 213.

The inlet 211 is connected to the heat treatment unit 100 so that the reaction gas 2 is introduced. The inlet part 211 according to an embodiment of the present invention may be formed to have a shape of a tube communicating with the heat treatment part 100. The inlet part 211 is disposed above the housing 201 surrounding the first flow part 212 to be described later, and may extend in a direction horizontal to the ground.

The first flow unit 212 communicates with the inlet unit 211 and provides a flow path through which the reaction gas 2 is heated by a heating unit 220 to be described later. The first flow part 212 may extend from the inlet part 211 in a first direction perpendicular to the ground. Accordingly, the first flow unit 212 induces a smooth flow of the reaction gas 2 due to the difference in density of the reaction gas 2 with the decomposition gas 3 and the weight of the reaction gas 2, even if a large external force is not applied. can do. The first flow part 212 according to an embodiment of the present invention may be formed in the shape of a cylindrical tube communicating with the inlet part 211. The first flow portion 212 extends vertically downward toward the ground from the end of the inlet portion 211.

The second flow unit 213 communicates with the first flow unit 212 and provides a flow path through which the decomposition gas 3 generated as the reaction gas 2 is decomposed is discharged to the outside of the decomposition unit 200 do. The second flow unit 213 according to an embodiment of the present invention may be formed in the shape of a tube disposed inside the first flow unit 212. In this case, the second flow portion 213 is formed to have a diameter smaller than the diameter of the first flow portion 212. The lower end of the second flow portion 213 is opened to communicate with the first flow portion 213. The upper end of the second flow part 213 passes through the housing 201 and protrudes to the outside. The second flow unit 213 may extend in a first direction, that is, in a direction perpendicular to the ground, and may be disposed in parallel with the first flow unit 212.

The heating unit 220 heats the flow unit 200 to decompose the reaction gas 2 into a decomposition gas 3. The heating unit 220 thermally decomposes the reaction gas 2 exemplified by ammonia gas at about 800°C to 900°C into a decomposition gas 3 exemplified by hydrogen gas and nitrogen gas. The heating unit 220 may be disposed to be spaced apart from the flow unit 200 to indirectly heat the flow unit 200. Accordingly, the heating unit 220 can prevent the temperature of the flow unit 200 from rapidly increasing in a local area, and can heat the flow unit 200 to a uniform temperature as a whole. The heating unit 220 may be installed to be supported by the housing 201.

The heating unit 220 according to the exemplary embodiment of the present invention is fixed to the inner surface of the housing 201 and is formed in a cylindrical shape disposed to face the outer surface of the first flow unit 212. In this case, the heating unit 220 may be illustrated as a heating device such as a heater. The heating unit 220 is disposed to be spaced apart from the first flow unit 212, and heats the first flow unit 212 by convection flow generated by self-heating.

3 is a cross-sectional view schematically showing the configuration of a heating unit according to another embodiment of the present invention.

Referring to FIG. 3, the heating unit 220 according to another embodiment of the present invention heats the flow unit 200 by high frequency heating. More specifically, the heating unit 220 is fixed to the housing 201, surrounds the outer surface of the first flow unit 212, and the shape of a coil extending helically along the longitudinal direction of the first flow unit 212 It can be formed as The heating unit 220 heats the first flow unit 212 by inducing an eddy current to the first flow unit 212 by a magnetic field generated as current is applied.

The decomposition accelerating unit 230 is installed in the flow unit 200 and promotes decomposition of the reaction gas 2. More specifically, the decomposition promoting unit 230 accelerates the decomposition of the reaction gas 2 by lowering the activation energy for decomposing the reaction gas 2 by a catalytic action.

The disassembly promoting unit 230 according to an embodiment of the present invention includes a support 231 and a disassembling promoting member 232.

The support part 231 is disposed in the flow part 200 so as to interfere with the flow path of the reaction gas 2, and supports a decomposition promoting member 232 to be described later. A plurality of support portions 231 may be provided, and each of the support portions 231 may be disposed to be stacked along the lengthwise direction of the flow portion 200. Accordingly, the support part 231 can accommodate more decomposition promoting members 232, and thus decomposition of the decomposition gas 2 can be further promoted. The support part 231 according to an embodiment of the present invention is formed in a disk shape and is fixed to the inner surface of the first flow part 212. A hollow is formed in the central part of the support part 231 to penetrate the second flow part 213. The support part 231 is provided in plural and disposed to be stacked vertically along the length direction of the first flow part 212. The support part 231 is provided so as not to completely block the flow of the reaction gas 2 although it interferes with the flow of the reaction gas 2. Accordingly, a through hole is formed or a mesh is formed on the surface of the support 231 facing the flow path of the reaction gas 2, that is, the upper and lower surfaces of the support 231 so that the reaction gas 2 can flow continuously. It can be formed in a (mesh) shape.

The decomposition promoting member 232 is installed on the support part 231 and is in contact with the reaction gas 2 to act as a catalyst for accelerating the decomposition of the reaction gas 2. The decomposition promoting member 232 may be provided in plural so that contact with the reaction gas 2 can be made more smoothly.

4 is a perspective view schematically showing the configuration of a disassembly promoting member according to an embodiment of the present invention.

Referring to FIG. 4, a decomposition promoting member 232 according to an embodiment of the present invention includes a body portion 232a, a contact strengthening portion 232b, and a catalyst member 232c.

The body portion (232a) forms the outer shape of the decomposition promoting member (232). The body portion 232a may include a heat-resistant material such as metal, ceramic, and silica alumina capable of maintaining a shape without undergoing physical or chemical changes even at high temperatures. The specific shape of the body portion 232a is not limited to the shape of the square pillar shown in FIG. 4, and the design can be changed into various shapes such as a spherical shape, a cylindrical shape, and a conical shape.

The contact reinforcing part (232b) is disposed along the surface of the body part (232a), and is provided in the shape of a porous body that penetrates the body part (232a) or is recessed in the body part (232a) to reduce the surface area of the body part (232a). Increase. Accordingly, the contact reinforcement part 232b may expand the area of the catalyst member 232c in contact with the reaction gas 2. The contact reinforcing portion 232b according to an embodiment of the present invention has a hexagonal cross-sectional shape and may be formed in the shape of a honeycomb penetrating the body portion 232a.

The catalyst member 232c is supported on the surface of the body portion 232a by an ion exchange method, an impregnation method, a dip method, a spray method, or the like, and contacts the reaction gas 2 to accelerate the decomposition of the reaction gas 2. The catalyst member 232c may include a material of nickel oxide such as NiO, Ni2O3, and Ni3O4.

The temperature measurement unit 240 is connected to the flow unit 210 and measures the temperature of the flow unit 210 heated by the heating unit 220. The temperature measuring unit 240 according to an embodiment of the present invention may be exemplified as various temperature measuring equipment capable of measuring the temperature of the moving unit 210 such as a thermometer. The temperature measurement unit 240 may have one end protruding outside the housing 1 to visually provide temperature information of the flow unit 210 to an operator.

The measurement unit 300 is connected to the decomposition unit 200 and measures the decomposition state of the decomposition gas 3 of the reaction gas 2. The measuring unit 300 may be provided in a pair and connected to both sides of the decomposition unit 200, respectively. The pair of measurement units 300 according to an embodiment may be connected to the inlet portion 211 and the second flow portion 213, respectively. Accordingly, the measurement unit 300 compares the amount of the reaction gas 2 introduced into the decomposition unit 200 with the amount of the reaction gas 2 discharged from the decomposition unit 200, so that the decomposition gas ( 3) The decomposition state of the furnace can be measured more accurately.

5 is a front view schematically showing the configuration of a measuring unit according to an embodiment of the present invention.

5, the measurement unit 300 according to an embodiment of the present invention includes a branch unit 310, a measurement unit body 320, a receiving unit 330, a display unit 340, and a collection unit 350. Includes.

The branch portion 310 is connected to the decomposition unit 200, the reaction gas 2 and the decomposition gas flowing from the heat treatment unit 100 to the decomposition unit 200 or the decomposition unit 200 to the combustion unit 400 ( Branch 3). The branch part 310 according to an embodiment of the present invention may be formed in the shape of a tube communicating with the inlet part 211 or the second flow part 213.

The measuring part body 320 receives the reaction gas 2 and the decomposition gas 3 from the branch part 310. The measuring part body 320 according to an embodiment of the present invention is formed in the shape of a cylinder. One side of the measuring part body 320 is in communication with the branch part 310 to receive the reaction gas 2 and the decomposition gas 3 from the branch part 310. In this case, between the branch part 310 and the measuring part body 320, a agent that blocks or allows the flow of the reaction gas 2 and the decomposition gas 3 from the branch part 310 to the measuring part body 320 One cock 301 may be installed.

The receiving unit 330 accommodates a measuring member 331 in which the reaction gas 2 is dissolved, and introduces the measuring member 331 into the measuring unit body 320. Meanwhile, as the reaction gas 2 is illustrated as ammonia gas, the measuring member 331 according to an embodiment may be illustrated as liquid water H20 capable of dissolving ammonia gas. The receiving part 330 according to an embodiment of the present invention is formed in the shape of a container that can hold the measuring member 331 therein and communicates with the upper end of the measuring part body 320. In this case, between the receiving part 330 and the measuring part body 320, a second cock 302 that blocks or allows the flow of the measuring member 331 from the receiving part 330 to the measuring part body 320 is provided. Can be installed.

The display unit 340 is provided on the measurement unit body 320 and displays the amount of the measurement member 331 introduced into the measurement unit body 320. The display unit 340 according to an embodiment of the present invention may be illustrated in the form of a scale printed or attached to the surface of the measurement unit body 320. The display unit 340 is formed to convert the volume of the measurement member 331 numerically through the height of the measurement member 331 accumulated in the measurement unit body 320.

After the measurement of the measurement unit 300 is completed, the recovery unit 350 recovers the measurement member 331 flowing into the measurement unit body 320. The recovery unit 350 according to an embodiment of the present invention is formed by forming a container in communication with the lower end of the measurement unit body 320. In this case, between the recovery unit 350 and the measurement unit body 320, a third cock 303 that blocks or allows the flow of the measurement member 331 from the recovery unit 350 to the measurement unit body 320 is provided. Can be installed.

The combustion unit 400 receives the decomposition gas 3 from the decomposition unit 200, burns the decomposition gas 3, and discharges the decomposition gas 3 to the outside. More specifically, the combustion unit 400 prevents the highly reactive hydrogen gas from being directly discharged to the outside by burning the hydrogen gas before the decomposition gas 3 including hydrogen gas is discharged to the outside. Accordingly, the combustion unit 400 may include a combustion device such as a burner.

The bypass unit 500 bypasses the reaction gas 2 and the decomposition gas 3 discharged from the heat treatment unit 100 to the combustion unit 400. Accordingly, when a malfunction occurs in the decomposition unit 200, the bypass unit 500 can prevent the reaction gas 2 and the decomposition gas 3 from flowing into the decomposition unit 200, so that the decomposition unit 200 It is easy to repair or replace. The bypass part 500 according to an embodiment of the present invention may be formed in the shape of a tube in which both sides communicate with the heat treatment part 100 and the combustion part 400, respectively. In this case, a bypass valve 501 capable of opening and closing the bypass unit 500 may be installed in the bypass unit 500.

Hereinafter, the operation of the nitridation furnace apparatus 1 according to an embodiment of the present invention will be described.

6 is an operational state diagram schematically showing the operating sequence of the nitridation furnace apparatus according to an embodiment of the present invention.

Referring to FIG. 6, first, the heat treatment unit 100 receives the reaction gas 2 from the outside, and then thermally decomposes the reaction gas 2 at a temperature of approximately 500°C to 600°C to nitrify the surface of the object to be nitrided. To do.

Thereafter, the decomposition unit 200 receives the reaction gas 2 that has not been decomposed in the heat treatment unit 100 and converts the reaction gas 2 exemplified as ammonia gas into the decomposition gas 3 exemplified as hydrogen gas and nitrogen gas. Completely disassemble. In this case, the decomposition gas 3 generated by the heat treatment unit 100 may also be introduced into the decomposition unit 200.

7 is an operating state diagram schematically showing the operating state of the disassembled portion according to an embodiment of the present invention.

Looking at the operation of the decomposition unit 200 in more detail with reference to FIG. 7, the reaction gas 2 discharged from the heat treatment unit 100 flows into the inlet unit 211.

Thereafter, the reaction gas 2 flows into the first flow unit 212 and flows downward, more specifically in a first direction perpendicular to the ground. In this case, the reaction gas 2 is more smoothly inside the first flow unit 212 due to the flow pressure applied from the heat treatment unit 100, the gravity due to its own mass, and the density difference with the decomposition gas 3 Can be fluidized.

As the first flow unit 212 is heated to approximately 800°C to 900°C by the heating unit 220, the reaction gas 2 flowing through the first flow unit 212 is pyrolyzed to decompose into decomposition gas 3 do.

In this case, the decomposition of the reaction gas 2 is accelerated by the decomposition promoting member 232 supported by the support portion 231 installed inside the first flow portion 212. That is, the reaction gas 2 passes through the body part 232a provided with the contact reinforcement part 232b, and as it comes into contact with the catalyst member 232c, the activation energy is lowered, so that the decomposition into the decomposition gas 3 is made more smoothly. .

Thereafter, the decomposition gas 3 decomposed in the first flow unit 212 and the decomposition gas 3 introduced from the heat treatment unit 100 are the flow pressure due to the reaction gas 2 and the density of the reaction gas 2 It flows upward along the second flow part 213 by the vehicle and is discharged from the decomposition part 200.

Meanwhile, the measurement unit 300 is connected to the decomposition unit 200 to measure the decomposition state of the reaction gas 2.

More specifically, the branch part 310 communicates with the inlet part 211 or the second flow part 213 to introduce the reaction gas 2 and the decomposition gas 3 into the inside of the measuring part body 320. In this case, the communication between the receiving portion 330 and the measuring portion body 320 is kept blocked by the second cock 302. In addition, the third cock 303 maintains the communication between the recovery unit 350 and the measurement unit body 320 so as to be blocked.

After the reaction gas 2 and the decomposition gas 3 are filled in the measurement unit body 320, the first cock 301 is locked to block communication between the branch unit 310 and the measurement unit body 320.

Thereafter, the second cock 302 is opened to introduce a measurement member 331 exemplified as water into the measurement unit body 320.

In this case, when the reaction gas 2 does not exist inside the measurement unit body 320, the decomposition gas 3 exemplified as hydrogen gas and nitrogen gas is not dissolved in the measurement member 331 and thus the measurement member 331 ) Does not flow into the measurement unit body 320. Accordingly, the display unit 340 indicates that there is no amount of the measurement member 331 flowing into the measurement unit body 320, and the operator determines that the reaction gas 2 is completely decomposed.

On the other hand, when the reaction gas 2 is present inside the measurement unit body 320, the reaction gas 2 exemplified as ammonia gas is dissolved in the measurement member 331 so that the measurement member 331 becomes the measurement unit body ( 320). Accordingly, the display unit 340 dissolves the reaction gas 2 and displays the amount of the measurement member 331 flowing into the measurement unit body 320 in numerical values such as volume and height, and the operator displays the display unit 340. According to the information, the degree of decomposition of the reaction gas 2 is determined.

In addition, as the measurement unit 300 is connected to both sides of the decomposition unit 200, more specifically, the inlet unit 211 and the second flow unit 213, the operator can use the display unit of the pair of measurement units 300 ( The decomposition performance of the decomposition unit 200 may be determined through the information respectively displayed by the 340.

The decomposition gas 3 discharged from the decomposition unit 200 flows into the combustion unit 400, and the combustion unit 400 burns the hydrogen gas contained in the decomposition gas 3 by a combustion device such as a burner. Discharge to the back outside.

8 is an operational state diagram schematically showing the operation of the bypass unit according to an embodiment of the present invention.

Referring to FIG. 8, when repair or replacement of the decomposition unit 200 is required due to a defect or malfunction of the decomposition unit 200, the operator blocks communication between the heat treatment unit 100 and the decomposition unit 200.

After that, the operator operates the bypass valve 501 to open the bypass unit 500. Accordingly, the reaction gas 2 and the decomposition gas 3 discharged from the heat treatment unit 100 are directly transferred to the combustion unit 400 through the bypass unit 500 and then discharged to the outside.

Although the present invention has been described with reference to the embodiments shown in the drawings, this is only illustrative, and those of ordinary skill in the field to which the technology pertains, various modifications and other equivalent embodiments are possible. I will understand.

Therefore, the true technical protection scope of the present invention should be determined by the claims.

1: nitriding furnace device 2: reaction gas
3: decomposition gas 100: heat treatment unit
200: disassembly part 201: housing
210: flow part 211: inlet
212: first flow section 213: second flow section
220: heating unit 230: decomposition promoting unit
231: support 232: disassembly promoting member
232a: body part 232b: contact strengthening part
232c: catalyst member 300: measuring unit
301: first cock 302: second cock
303: third coke 310: branch
320: measuring part body 330: receiving part
331: measuring member 340: display
350: recovery unit 400: combustion unit
500: bypass

Claims (13)

A heat treatment unit receiving a reaction gas and performing a nitriding treatment;
A decomposition unit receiving the reaction gas from the heat treatment unit and heating the reaction gas to decompose it into a decomposition gas;
A measuring unit connected to the decomposition unit and measuring a decomposition state of the reaction gas; And
Includes; a combustion unit receiving the decomposition gas from the decomposition unit, and burning and discharging the decomposition gas,
The measurement unit,
A branch portion connected to the decomposition unit and branching the reaction gas and the decomposition gas;
A measuring part body receiving the reaction gas and the decomposition gas from the branch part;
A receiving unit accommodating a measuring member in which the reaction gas is dissolved, and introducing the measuring member into the measuring unit body; And
And a display unit provided on the measurement unit body and displaying the amount of the measurement member introduced into the measurement unit body.
The method of claim 1,
The disassembly part,
A flow unit connected to the heat treatment unit and providing a flow path of the reaction gas and the decomposition gas;
A heating unit for decomposing the reaction gas by heating the flow unit; And
And a decomposition accelerating unit installed in the flow unit and promoting decomposition of the reaction gas.
The method of claim 2,
The flow part,
An inlet part connected to the heat treatment part and into which the reaction gas is introduced;
A first flow unit in communication with the inlet and through which the reaction gas flows; And
And a second flow unit in communication with the first flow unit and through which the cracked gas flows.
The method of claim 3,
The first flow portion extends in a first direction from the inlet portion,
The nitridation furnace apparatus, characterized in that the second flow portion is disposed in parallel with the first flow portion.
The method of claim 2,
Nitriding furnace apparatus, characterized in that the heating unit is spaced apart from the flow unit.
The method of claim 2,
The decomposition promoting unit,
A support portion disposed to interfere with the flow path of the reaction gas; And
And a decomposition promoting member installed on the support and contacting the reaction gas to promote decomposition of the reaction gas.
The method of claim 6,
The decomposition promoting unit,
A body portion provided with a contact reinforcing portion;
And a catalyst member supported on the body portion and in contact with the reaction gas.
The method of claim 7,
The contact reinforcement unit is provided in a porous shape disposed along the surface of the body portion to expand the area of the catalyst member in contact with the reaction gas.
The method of claim 7,
Nitriding furnace device, characterized in that the catalyst member comprises a nickel oxide material.
The method of claim 6,
A nitriding furnace apparatus, characterized in that a plurality of support portions are provided and are stacked along a longitudinal direction of the flow portion.
delete The method of claim 1,
Nitriding furnace apparatus, characterized in that the measuring unit is provided in a pair and connected to both sides of the decomposition unit.
The method according to any one of claims 1 to 10 and 12,
And a bypass unit for bypassing the reaction gas and the decomposition gas discharged from the heat treatment unit to the combustion unit.

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