KR102227911B1 - Apparatus for holding sample and method for holding sample - Google Patents

Abstract

The sample fixing device according to an embodiment of the present invention is recessed inward on one side and opened at one side to adjust the horizontality of the sample holder and the observation surface of the sample and the sample holder that can be mounted on the mounting table of the microscope. It has a shape and includes a reference table in which a first groove portion capable of accommodating a sample is provided.
Therefore, according to the sample fixing device according to the embodiment of the present invention, even if the observation surface is an inclined surface other than horizontal, it can be adjusted so that the observation surface of the sample is parallel to the focal plane. Accordingly, when magnifying through the objective lens, the entire observation surface can be focused, thereby obtaining a high-quality image of the observation surface.

Description

A sample fixing device and a method of placing a sample {APPARATUS FOR HOLDING SAMPLE AND METHOD FOR HOLDING SAMPLE}

The present invention relates to a sample fixing device and a method for placing a sample, and more particularly, to a sample fixing device and a method for placing a sample, which can be adjusted so that the observation surface of the sample is parallel to the focal plane.

A microscope that observes a sample is generally arranged opposite the stage and the upper side of the stage so that it faces the observation surface of the sample, and an objective lens that enlarges the observation surface at high magnification, and the observer can see the image of the sample magnified by the objective lens. It includes an eyepiece provided so as to be able to, and a dimming unit for irradiating light toward the sample.

On the other hand, as the magnification increases, the depth of focus decreases. In addition, the observation surface of the specimen to be observed by the observer may not be parallel to the stage depending on the type, and may have, for example, an inclination.

However, as the magnification increases to a higher magnification, the depth of focus becomes shorter, and the observation surface deviates from the depth of focus even with a slight inclination, resulting in a shift in focus. Accordingly, there is a problem that the quality of the observation surface image magnified through the objective lens is deteriorated, making it difficult to observe or analyze the observation surface.

Korean Patent Publication 10-2013-0077004

The present invention provides a sample fixing device and a method for placing a sample capable of placing a sample so that the observation surface is parallel to the focal plane.

A sample fixing device according to an embodiment of the present invention includes: a sample holder capable of supporting a sample and seating on a mounting table of a microscope; And a reference table having a shape that is recessed inwardly to one side to be opened on one side and provided with a first groove capable of accommodating the sample so as to adjust the horizontality of the observation surface of the sample.

The sample holder may be mounted on the reference table so that the observation surface of the sample is inserted into the first groove, the mounting table may be mounted on a stage installed facing the objective lens of the microscope, and one surface of the reference table Is a surface facing the opening of the first groove and includes a first adjustment surface that is a horizontal surface.

One surface of the reference stand has a height different from that of the first adjustment surface and is parallel, and includes a first seating surface positioned outside the first groove.

On the rear surface opposite to the one surface of the reference table, a second groove is provided in a shape that is recessed inward and one side is opened to adjust the horizontality of the observation surface of the sample, and a second groove capable of accommodating the sample is provided, and the reference The rear surface of the base is a surface facing the opening of the second groove and includes a second adjustment surface that is a horizontal surface, and the depth of the first groove is smaller than the depth of the second groove.

The sample holder includes: a fixed body having one surface parallel to at least one of a first adjustment surface and a second adjustment surface of the reference table, and having an opening through which the sample passes; And first and second fixing parts that are disposed to face each other so that the sample is positioned therebetween, and which are fastened or detachable on one surface of the fixed body.

The first fixing part may include a first fixing member extending in an extension direction of the fixing body; And a first protruding member protruding from one end of the first fixing member in a direction crossing the extending direction of the first fixing member, wherein the second fixing part includes an extension direction of the first fixing member. A second fixing member formed to extend into a direction; And a second protruding member protruding from one end of the second fixing member in the extending direction.

One surface of each of the first and second fixing members is parallel to at least one of the first and second adjustment surfaces.

The first fixing part includes a first fastening part for attaching and detaching the fixing body and the first fixing member, and the second fixing part includes a second fastening part for attaching and detaching the fixing body and the second fixing member. do.

A method of placing a sample according to an exemplary embodiment of the present invention includes a process of mounting a sample holder having first and second fixing portions arranged to face each other on a reference table; Inserting a sample between the first fixing part and the second fixing part so that the observation surface of the sample faces the adjustment surface of the reference table; Adjusting the horizontality by bringing the observation surface of the sample into contact with the adjustment surface; And separating the sample holder supporting the sample from the reference table.

And bringing the observation surface of the sample into contact with the adjustment surface, and shaking the sample so that the observation surface of the sample is aligned with the horizontality of the adjustment surface.

In inserting a sample between the first fixing part and the second fixing part, inserting the sample between the first fixing part and the second fixing part fastened on one surface of a fixed body provided with an opening, and inserting the sample Passed through the opening of the fixed body, and inserted between the first fixing portion and the second fixing portion.

Placing the sample holder separated from the reference table on a mounting table; And mounting the mounting table on a stage disposed opposite to the objective lens so that the observation surface of the sample faces the objective lens of the microscope.

In placing the sample holder on the mounting table, the sample holder mounted on the reference table is reversed, and the sample holder is mounted on the mounting table.

When the mounting table is mounted on a stage so that the observation surface of the specimen faces the objective lens of the microscope, the observation surface of the specimen is parallel to the focal plane by the objective lens.

According to the sample fixing device according to the embodiment of the present invention, the observation surface of the sample can be adjusted so as to be parallel to the focal plane. Accordingly, when magnifying through the objective lens, the entire observation surface can be focused, thereby obtaining a high-quality image of the observation surface.

1 is a three-dimensional view showing a main part of an observation apparatus according to an embodiment of the present invention, and is a view showing a state in which a sample holder and a mounting table are seated on a stage.
2 is an exploded perspective view of a sample holder and a mounting table according to an embodiment of the present invention, and is a view showing a state in which a sample is supported between the other ends of the first and second fixing members.
3 is an exploded perspective view of a sample holder and a reference stage according to an embodiment of the present invention, and is a view illustrating a state in which the sample holder and the first groove of the reference stage face each other.
4 is an exploded perspective view of a sample holder and a mounting table according to an embodiment of the present invention, and is a view showing a state in which a sample is supported between first and second protruding members.
5 is an exploded perspective view of a sample holder and a reference stage according to an embodiment of the present invention, and is a view illustrating a state in which the sample holder and the second groove of the reference stage face each other.
6 is a view conceptually showing a process of adjusting the observation surface of the specimen to be parallel to the focal plane by using the specimen fixing device according to an embodiment of the present invention.
7 and 8 are views showing a process of mounting a sample on a mounting table using a sample fixing device according to an embodiment of the present invention, and inserting a sample between the other end of the first fixing member and the other end of the second fixing member , It is a diagram explaining a method of adjusting the observation surface of the sample to be parallel to the focal plane by using the first adjustment surface of the reference table.
9 and 10 are views showing a process of mounting a sample on a mounting table using a sample fixing device according to an embodiment of the present invention, and inserting a sample between the other end of the first protruding member and the other end of the second protruding member , It is a diagram explaining a method of adjusting the observation surface of the sample to be parallel to the focal plane by using the second adjustment surface of the reference table.
11 is an image magnified with an objective lens in Comparative Examples in which the observation surface of the sample is not parallel to the focal plane, and in Examples in which the observation surface of the sample is parallel to the focal plane, respectively.

Hereinafter, embodiments of the present invention will be described in more detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but will be implemented in a variety of different forms, only the present embodiments make the disclosure of the present invention complete, and the scope of the invention is completely limited to those of ordinary skill in the art. It is provided to inform you. In order to describe the embodiments of the present invention, the drawings may be exaggerated, and the same reference numerals in the drawings refer to the same elements.

1 is a three-dimensional view showing a main part of an observation apparatus according to an embodiment of the present invention, and is a view showing a state in which a sample holder and a mounting table are seated on a stage.

2 is an exploded perspective view of a sample holder and a mounting table according to an embodiment of the present invention, and is a view showing a state in which a sample is supported between the other ends of the first and second fixing members. 3 is an exploded perspective view of a sample holder and a reference stage according to an embodiment of the present invention, and is a view illustrating a state in which the sample holder and the first groove of the reference stage face each other. 4 is an exploded perspective view of a sample holder and a mounting table according to an embodiment of the present invention, and is a view showing a state in which a sample is supported between first and second protruding members. 5 is an exploded perspective view of a sample holder and a reference stage according to an embodiment of the present invention, and is a view illustrating a state in which the sample holder and the second groove of the reference stage face each other.

Here, in the sample supported by the sample holder of FIGS. 2 and 4, when the sample holder is mounted on the mounting table and the mounting table is mounted on the stage, the observation surface is adjusted so that the observation surface is horizontal with the stage. In addition, FIGS. 3 and 5 show a state in which the sample is not supported on the sample holder.

1 to 5, the observation device according to an embodiment of the present invention is a stage 180, a mounting table 120 that can be seated on the stage 180, and is positioned opposite to the stage 180 so that a sample (S) The microscope (A) and the sample (S) having the objective lens (130) for observing are supported and fixed, and the sample holder (1000) that can be mounted on the mounting table (120), the observation surface (OF) of the sample (S) It includes a sample holding device (B) provided with a reference stand 7000 that is adjusted to be parallel to the focal plane.

Here, the focal plane is a plane that is enlarged through the objective lens 130. In other words, the focal plane is a plane in which light incident through the objective lens 130 converges into one point. In other words, in other words, the focal plane is a _{plane perpendicular to the optical axis L A} of the objective lens 130, and the focal plane is a horizontal plane perpendicular to the optical axis LA and a plane horizontal (FIG. 6 (C) of). Accordingly, that the observation surface OF of the sample S is parallel to the focal plane may mean that the observation surface OF of the sample S is'a surface horizontal to the stage 180'. In addition, adjusting the observation surface OF of the sample S to be parallel to the focal plane may mean adjusting the horizontal degree of the observation surface OF of the sample S.

The microscope (A) is a body part 110, a stage 180 mounted on the body part 110 so as to be elevated and lowered, and a sample holder 1000 that can be mounted on the stage 180 and supports the sample S. ) Is installed on the body part 110 to face the stage 180 so that it can face the mounting table 120, the observation surface OF of the sample S, and the observation surface OF of the sample S ), and an eyepiece 150 provided so that an observer can see the image of the sample S magnified by the objective lens 130.

Further, the microscope A is positioned between the first and second dimming units 160a and 160b, the first dimming unit 160a and the stage 180 to emit light, and emitted from the first dimming unit 160a. A condenser (not shown) for condensing light and irradiating toward the sample, a rotating part 140 mounted on the body part 110 to support the objective lens 130, and an elevating part for raising and lowering the stage 180 ( 170).

Here, the second dimming unit 160b may be a means for irradiating light to the objective lens 130.

The body portion 110 includes a first body 111 on which the stage 180, the objective lens 130, and the eyepiece 150 are supported or mounted, and a second body 112 connected to the lower portion of the first body 111 Includes.

The first body 111 may have a shape extending in a direction in which the stage 180 and the objective lens 130 are arranged, that is, in a vertical direction. The second body 112 is to allow the entire microscope (A) to be stably supported.

The stage 180 is positioned between the objective lens 130 and the condenser, and is a means on which the mounting table 120 is mounted. This stage 180 is in the shape of a plate having a predetermined area. In addition, the stage 180 is provided with an opening 182 having a predetermined area, which is a hole capable of communicating with the insertion hole 121 of the mounting table 120 to be described later.

In addition, the stage 180 is provided such that a surface facing the objective lens 130 (hereinafter, one surface 181) is parallel and horizontal with the focal plane by the objective lens 130. To this end, one surface 181 of the stage 180 is provided to be horizontal with a horizontal plane perpendicular to the optical axis (refer to FIG. 6) by the objective lens 130.

In addition, the sample fixing device B according to the embodiment of the present invention adjusts the observation surface OF of the sample S to be horizontal with the one surface 181 of the stage 180, and accordingly The observation surface OF may be parallel to the focal plane by the objective lens 130.

A fixing means 183 for fixing the mounting table 120 is provided on the stage 180. For example, the fixing means 183 is a means for fixing by pressing both sides of the placing table 120, and may be a means for fixing the position of the placing table 120. In addition, the fixing means 183 is configured to be horizontally movable on the stage 180 so that the mounting table 120 is horizontally movable on the stage 180.

The mounting table 120 is a means on which the sample holder 1000 that fixes the sample S is mounted. In addition, the mounting table 120 is a means for being mounted and fixed on the upper stage of the stage 180 in a state in which the sample holder 1000 is seated. At this time, the mounting table 120 is mounted on one surface 181 of the stage 180, and thus the mounting table 120 is positioned closer to the objective lens 130 than the stage 180.

The mounting table 120 is in the shape of a plate having a predetermined area, is a surface opposite to the surface facing the objective lens 130 (hereinafter, one surface 121a), and is on one surface 181 of the stage 180 A surface to be seated (hereinafter, the rear surface 123) is provided so as to be horizontal with the one surface 181 of the stage 180.

In addition, referring to FIG. 2, the mounting table 120 is provided with an opening (hereinafter referred to as an insertion port 121) into which the fixing body 2000 of the sample holder 1000, which will be described later, is inserted or accommodated. When the mounting table 120 is seated on the stage 180, the insertion hole 121 of the mounting table 120 can communicate with the opening 182 of the stage 180.

In addition, of the mounting table 120, an inner wall that divides the insertion hole 121 or surrounds the insertion hole 121 may have a shape having a step 122. In other words, the step 122 is provided so that the opening area of the lower area is smaller than the opening area of the upper area when the insertion hole 121 is divided in the vertical direction. And it is provided so that the center of the upper region and the center of the lower region coincide. Accordingly, the inner wall of the mounting table 120 partitioning the insertion port 121 has a shape having a step 122 of a two-step staircase.

The objective lens 130 is a means for enlarging the observation surface OF of the sample S at a high magnification, and may be positioned above the stage 180 so as to face the one surface 181 of the stage 180. In addition, a plurality of objective lenses 130 may be provided, and the plurality of objective lenses 130 may have different magnifications. In addition, the plurality of objective lenses 130 are mounted on the rotating part 140 and may be arranged on the rotating part 140 to form, for example, a circular shape. Accordingly, the observer may rotate the rotation unit 140 as necessary so that any one of the plurality of objective lenses 130 faces the mounting table 120.

The eyepiece 150 may be mounted on the first body 111 to be positioned above the objective lens 130. In addition, the eyepiece 150 may be provided to be inclined toward the viewer.

The elevating unit 170 is a means for elevating the stage 180 so that the height of the stage 180 is adjusted. The elevating portion 170 is formed to extend in the vertical direction, for example, the stage 180 is fastened, and the elevating member 171 and the elevating member 171 are driven to move the stage 180 along the extending direction. ) May include an adjustment unit 172 driving.

Each of the first and second dimming units 160a and 160b may be a means including a lamp that generates light. Here, the first dimming part 160a is a means for providing light to the condenser, and may be mounted on the second body 112 so as to face the condenser.

A capacitor (not shown) is a means positioned between the first dimming unit 160a and the stage 180 to condense the light emitted from the first dimming unit 160a and irradiate it toward the sample S. Such a capacitor may be a means including a condensing lens for condensing the light emitted from the first dimming part 160a. In addition, the condenser may be connected to a separate elevating unit (not shown) to enable its height adjustment.

Referring to FIGS. 2 and 3, the sample holding device B faces a sample holder 1000 capable of fixing the sample S and an observation surface OF of the sample S supported on the sample holder 1000. Alternatively, it includes a reference stand 7000 that is a contactable surface and has adjustment surfaces 7110 and 7310 that are horizontal with one surface 181 of the stage 180.

The sample holder 1000 is a main body (hereinafter, the fixed main body 2000) that can be inserted into the insertion hole 121 of the mounting table 120, each extending in the width direction of the fixed main body 2000, and between the sample S ) Are arranged in one direction to enable insertion, and includes first and second fixing parts 3000 and 4000 that are movable so as to be closer to each other or away from each other. In addition, the sample holder 1000 includes first and second fastening portions 5000 and 6000 for fastening or separating each of the first and second fixing portions 3000 and 4000 on the fixed body 2000.

A step 2140 corresponding to the step 122 of the mounting table 120 may be provided on the outer surface of the fixed body 2000.

Referring to the state in which the fixed body 2000 is positioned above the insertion hole 121 of the mounting table 120 (see FIG. 2), the step 2140 will be described again as follows.

When the fixed body 2000 is divided in the vertical direction, the diameter (or width) of the upper region is provided to be larger than the diameter (or width) of the lower region. And, it is provided so that the centers of the upper area and the lower area are aligned. Accordingly, the outer surface of the fixed body 2000 has a shape having a step 2140 of a two-step staircase.

The fixed body 2000 may have a shape corresponding to the insertion hole 121 so as to be inserted into the insertion hole 121 of the mounting table 120, for example, a circular shape, and a plate shape having a predetermined area.

The fixed body 2000 is rotatable while being inserted into the insertion hole 121 of the mounting table 120. By the rotation of the fixed body 2000, the observation direction of the sample S can be adjusted.

The first and second fixing parts 3000 and 4000 are fastened to the fixed body 2000. Hereinafter, one side 2100 of the fixed body 2000 to which the first and second fixing parts 3000 and 4000 are fastened. ), the opposite side is referred to as the back side 2200 (see Fig. 7(b)).

The thickness of the fixed main body 2000 is when the fixed main body 2000 is inserted into the insertion hole 121 of the mounting table 120, one side 2100 of the fixed main body 2000 is one surface 121a of the mounting table 120 It may be provided to protrude upward. This is the total thickness of the mounting table 120, the structure or thickness of the step 122 of the mounting table 120, the total thickness of the fixed body 2000 (t ₂₀₀₀ ), the structure or thickness of the step 2140 of the fixed body 2000 This can be achieved by adjusting any one of them.

To configure one side (2100) of the fixed body (2000) to protrude upward from one side (121a) of the mounting table (120), the first and second fixing parts (3000, 4000) are fastened on the fixed body (2000) This is to prevent interference with one surface 121a of the mounting table 120 when horizontally moving or rotating in a state of being. Accordingly, the first and second fixing parts 3000 and 4000 are easily moved horizontally or rotated while being fastened on the fixed body 2000, and damage to the mounting table 120 can be prevented. Here, the rotational movement of each of the first and second fixing parts 3000 and 4000 means rotating the first and second fastening parts 5000 and 6000 about a central axis.

The fixed body 2000 is provided with an opening 2150 capable of communicating with the opening 182 of the stage 180 and the insertion opening 121 of the mounting table 120. It is preferable that the opening 2150 is provided so as to be located at the center of the fixed body 2000.

The opening 2150 according to the embodiment may include a first opening 2151 and a pair of second openings 2152 each extending outwardly from an edge of the first opening 2151 and provided to face each other. have. Here, the pair of second openings 2152 may be disposed to face each other with respect to the center of the first opening 2151. In addition, the area of the first opening 2151 is provided to be larger than the area of the pair of second openings 2152. Of course, the area of the second opening 2152 may be larger than or the same as that of the first opening 2151.

The second openings 2152, which are arranged to face each other with respect to the center of the first opening 2151, are used to check the center of the opening 2150 when inserting the sample S into the opening 2150. I can. That is, the sample S may be inserted so that it is located at the center of the first opening 2151 by the formation position of the second opening 2152.

In addition, the second opening 2152 is formed to extend outward from the first opening 2151, and thus, a sample S that is larger than the length of the first opening 2151 can be inserted. That is, the specimen S that is longer than the first opening 2151 may be inserted so that at least a portion of its both ends are accommodated in the second opening 152 formed in both directions of the first opening 2151.

The fixed body 2000 is provided with an opening (hereinafter, first and second fastening openings 2161 and 2162) into which a portion of each of the first and second fastening portions 5000 and 6000 can be inserted (see FIG. 7 ). (b), see (a) of FIG. 8).

The first and second fastening openings 2161 and 2162 are provided to face each other on the outside of the opening 2150. That is, the first fastening opening 2161 and the second fastening opening 2162 are provided to face each other with the opening 2150 therebetween. More specifically, a first fastening opening 2161 is located between one side of the pair of second openings 2152, and a second fastening opening ( 2162) is provided to be located.

In addition, threads may be formed on inner walls of each of the first and second fastening openings 2161 and 2162. The threads provided in the first and second fastening openings 2161 and 2162 may be engaged with the threads provided in the first and second connecting members 5100 and 6100 to be described later.

One surface 2100 of the fixed body 2000 is a surface horizontal to the one surface 181 of the stage 180, and when the mounting table 120 on which the sample holder 1000 is seated is seated on the stage 180, One surface 2100 of the fixed body 2000 is parallel to one surface 181 of the stage 180. In addition, when the sample fixing table 1000 is mounted on the reference table 7000, one surface 2100 of the fixing body 2000 may be parallel to at least a part of the surface of the reference table 7000 and may be contactable. When the specimen fixing table 1000 and the reference table 7000 are arranged parallel to each other and contacted, this advantageously acts to adjust the observation surface OF of the specimen S to be parallel to the focal plane.

Each of the first and second fixing parts 3000 and 4000 is fastened on one surface 2100 of the fixing body 2000 and may be arranged in one direction. More specifically, the first and second fixing parts 3000 and 4000 are arranged in the alignment direction of the first and second fastening openings 2161 and 2162 provided in the fixed body 2000 and are disposed on the fixed body 2000. It is concluded.

The first and second fixing parts 3000 and 4000 have the same or similar configuration and shape to each other.

Hereinafter, first, the configuration of the first fixing unit 3000 will be described.

The first fixing part 3000 includes a first fixing member 3100 extending in one direction and a first protruding member 3200 protruding from one of both ends of the first fixing member 3100 in the extending direction, for example. do.

The first fixing member 3100 has a plate shape having a predetermined area. In addition, the other end of the first fixing member 3100 is a surface in contact with the sample S to support the sample S, and may be a surface perpendicular to the one surface 2100 of the fixing body 2000.

The first fixing member 3100 is provided with an opening (hereinafter, a third fastening opening 3131) into which at least a portion of the body 1 fastening part 5000 can be inserted. The third fastening opening 3131 may have a shape extending in the extending direction of the first fixing member 3100. The shape of the third fastening opening 3131 is to allow the first fixing part 3000 to move in the extension direction while being fastened to the fixing body 2000.

Hereinafter, a surface of the first fixing member 3100 opposite to one surface 2100 of the fixing body 2000 is a surface 3110 and a surface opposite to the surface 3110, and the surface 2110 of the fixing body 2000 and The facing surface is referred to as the back surface 3120 (see Fig. 7(b)).

When the sample holder 1000 is mounted on the reference table 7000, one surface 3110 of the first fixing member 3100 is a surface parallel to the adjustment surfaces 7110 and 7310 provided on the reference table 7000. In addition, at this time, one surface 3110 of the first fixing member 3100 may be in contact with the adjustment surface of the reference table 7000. In addition, one surface 3110 of the first fixing member 3100 may be parallel to the one surface 2100 of the fixing body 2000.

The first protruding member 3200 has a shape extending in a direction intersecting or orthogonal to the extending direction of the first fixing member 3100. Accordingly, the first protruding member 3200 is provided such that one surface 3210 protrudes further outward than the one surface 3110 of the first fixing member 3100.

When the sample holder 1000 is mounted on the reference table 7000, one surface 3210 of the first protruding member 3200 is provided on one surface 3110 of the first fixing member 3100 and the reference table 7000. It is a plane parallel to the adjustment plane. In addition, at this time, one surface 3210 of the first protruding member 3200 may contact the adjustment surface. In addition, one surface 3210 of the first protruding member 3200 may be parallel to the one surface 2100 of the fixed body 2000.

In addition, of the first protruding member 3200, a surface opposite to the other end of the first fixing member 3100, that is, the outermost surface facing the sample S, is a surface in contact with the sample S in order to support the sample S. , It may be a surface perpendicular to the one surface 2100 of the fixed body 2000.

The second fixing part 4000 includes a second fixing member 4100 extending in one direction and a second protruding member 4200 protruding from one of both ends in the extending direction of the second fixing member 4100, for example, one end. do.

The second fixing member 4100 has a plate shape having a predetermined area. In addition, the other end of the second fixing member 4100 is a surface in contact with the sample S to support the sample S, and may be a surface perpendicular to the one surface 2100 of the fixing body 2000.

The second fixing member 4100 is provided with an opening (hereinafter, a fourth fastening opening 4131) into which at least a part of the second fastening portion 6000 can be inserted. The fourth fastening opening 4131 may have a shape extending in the extending direction of the second fixing member 4100. The shape of the fourth fastening opening 4131 is to allow the second fixing part 4000 to move in the extension direction while the second fixing part 4000 is fastened to the fixing body 2000.

Hereinafter, a surface of the second fixing member 4100 opposite to one surface 2100 of the fixing body 2000 is a surface 4110 and a surface opposite to the surface 4110, and the surface 2100 of the fixing body 2000 and The facing surface is referred to as the back surface 4120 (see Fig. 7(b)).

When the sample holder 1000 is mounted on the reference table 7000, one surface 4110 of the second fixing member 4100 is a surface parallel to the adjustment surfaces 7110 and 7310 provided on the reference table 7000. In addition, at this time, one surface 4110 of the second fixing member 4100 may be in contact with the adjustment surface of the reference table 7000. In addition, one surface 4110 of the second fixing member 4100 may be parallel to the one surface 2100 of the fixing body 2000.

The second protruding member 4200 has a shape extending in a direction intersecting or orthogonal to the extending direction of the second fixing member 4100. Accordingly, the second protruding member 4200 is provided such that one surface 4210 protrudes further outward than the one surface 4110 of the second fixing member 4100.

When the sample holder 1000 is mounted on the reference table 7000, one surface 4210 of the second protruding member 4200 is provided on the one surface 4110 and the reference table 7000 of the second fixing member 4100. It is a plane parallel to the adjustment plane. In addition, at this time, one surface 4210 of the second protruding member 4200 may contact the adjustment surface. In addition, one surface 4210 of the second protruding member 4200 may be parallel to the one surface 2100 of the fixed body 2000.

In addition, of the second protruding member 4200, a surface opposite to the other end of the second fixing member 4100, that is, the outermost surface facing the sample S, is a surface in contact with the sample S in order to support the sample S. , It may be a surface perpendicular to the one surface 2100 of the fixed body 2000.

When the sample holder 1000 is mounted on the reference table 7000, any one of the one surface 3110 of the first fixing member 3100 and the one surface 3210 of the first protruding member 3200 and the second fixing member One surface 4110 of the (4100) and one surface 4210 of the second protruding member 4200 so that any one of the adjustment surface is in contact with the thickness of the first and second fixing members 3100, 4100, the first And adjusting the thickness of the second protruding members 3200 and 4200 and the depth of the groove provided in the reference table 7000.

On the other hand, when the observation surface OF of the sample S is adjusted to be parallel to the adjustment surface, the sample S is contacted and supported by the first and second fixing parts 3000 and 4000, and then the mounting table 210 ) Move to settle on. At this time, one of both sides of the sample S in the Y-axis direction is in contact with the other end of the first fixing member 3100 or the first protruding member 3200, and the other is the other end of the second fixing member 4100 or It is supported to be in contact with the second protruding member 4200 (see FIGS. 2 and 4).

When the observation surface OF of the sample S is inclined in the X-axis direction (see FIGS. 2, 4 and 6), the other ends of the first and second fixing members 4100 and 4200 If the surface opposite to the other end of the first and second fixing members 3100 and 4100 of the first and second protruding members 3200 and 4200 is a vertical surface, the observation surface OF is adjusted parallel to the adjustment surface Even if (S) is contacted and supported by the first and second fixing portions 3000 and 4000, the parallelism of the observation surface OF is not distorted.

However, when the observation surface OF of the sample is inclined in the Y-axis direction, the first and second ends of the first and second fixing members 4100 and 4200 or of the first and second protruding members 3200 and 4200 When the surface opposite to the other end of the second fixing members 3100 and 4100 is a vertical surface, the specimen S whose observation surface OF is adjusted parallel to the adjustment surface is transferred to the first and second fixing parts 3000 and 4000. When contacting and supporting, the parallelism of the observation surface OF may be distorted.

Therefore, in order to correspond to the sample S in which the observation surface is inclined in the Y-axis direction, the other ends of the first and second fixing members 4100 and 4200, and of the first and second protruding members 3200 and 4200, A surface opposite to the other end of the first and second fixing members 3100 and 4100 is provided in an inclined shape in the Y-axis direction.

That is, the other ends of the first and second fixing members 4100 and 4200 and the other ends of the first and second protruding members 3200 and 4200 are perpendicular to the other ends of the first and second fixing members 3100 and 4100. The first and second fixing parts 3000 and 4000 and the inclined first and second fixing parts 3000 and 4000 may be provided, respectively, and may be selected and used according to the shape of the sample S.

In addition, when the observation surface OF of the sample S is inclined in both the X-axis direction and the Y-axis direction, the other ends of the first and second fixing members 4100 and 4200, the first and second protruding members ( Among the 3200 and 4200), it is preferable to use the first and second fixing portions 3000 and 4000 in which the opposite ends of the first and second fixing members 3100 and 4100 are inclined in the Y-axis direction.

Each of the first and second fastening parts 5000 and 6000 is a means for fastening the first and second fixing parts 3000 and 4000 on the fixing body 2000, respectively.

The first fastening part 5000 includes a first connecting member 5100 passing through a third fastening opening 3131 provided in the first fixing member 3100 and a first fastening opening 2161 provided in the fixing body 2000, and It includes a first fastening member 5200 for fixing the first connecting member 5100 (see FIG. 7B).

In addition, the second fastening part 6000 is a second connecting member 6100 passing through the fourth fastening opening 4131 provided in the second fixing member 4100 and the second fastening opening 2162 provided in the fixing body 2000. ) And a second fastening member 6200 for fixing the second connecting member 6100 (see FIG. 7B).

Each of the above-described first and second connecting members 5100 and 6100 may be, for example, a bolt having a thread formed on an outer circumferential surface thereof.

In addition, each of the first and second fastening members 5200 and 6200 may be a washer having a hollow shape with an open center to allow penetration of the first and second connecting members 5100 and 6100.

Each of the first and second fastening members 5200 and 6200 is provided to be larger in size than the third and fourth fastening openings 4131 provided in the first and second fastening members 3100 and 4100. In addition, an upper portion (ie, a head) of each of the first and second connecting members 5100 and 6100 is provided to be larger than the opening of each of the first and second fastening members 5200 and 6200. This is, when the connecting members 5100 and 6100 are inserted through the openings of the fastening members 5200 and 6200, the upper portions of the connecting members 5100 and 6100 do not pass through the openings of the fastening members 5200 and 6200, It is to be caught on the upper portion of the fastening member (5200, 6200).

In addition, each of the first and second fastening parts 5000 and 6000 includes spring washers that can be fastened with the connecting members 5100 and 5200 so that they are positioned between the heads of the connecting members 5100 and 5200 and the fastening members 5200 and 6200. It may contain more. The spring washer is a degree of close contact between the upper portions (ie, heads) of the first and second connecting members 5100 and 6100 and the first and second fastening members 5200 and 6200, the first and second fastening members 5200, 6200 and the fixed body 2000 serves to adjust the degree of close contact between the one surface (2100). Accordingly, the fastening strength between the fastening parts 5000 and 6000 and the fixing parts 3000 and 4000 is adjusted.

Each of the first and second fixing parts 3000 and 4000 may be fastened and separated on the fixing body 2000 by the first and second fastening parts 5000 and 6000.

If this is described in more detail, it is as follows. First, a first fixing part 3000 is disposed on one surface 2100 of the fixing body 2000. In addition, in a state in which the first fastening member 5200 is positioned on one surface 3110 of the first fastening member 3100, the first connecting member 5100 is fitted into the opening of the first fastening member 5200. . At this time, the first connection member 5100 is the opening of the first fastening member 5200, the third fastening opening 3131 provided in the first fixing member 3100, and the first fastening opening 2161 provided in the fixed body 2000. ) To penetrate. In this case, when the first connection member 5100 is rotated in a tightening direction, for example, in a clockwise direction, the threads of the first connection member 5100 and the threads provided in the first fastening opening 2161 are tightened while being engaged with each other.

In addition, when the first connecting member 5100 continues to rotate in the clockwise direction, the first connecting member 5100 gradually descends downward of the fixed body 2000. Accordingly, the upper portion (ie, the head) of the first connecting member 5100 and the first fastening member 5200 are closer to each other, and the first fastening member 5200 is gradually closer to the one surface 2100 of the fixed body 2000. Move to lose.

By this operation, the first fixing part 3000 is fastened on one surface 2100 of the fixing body 2000.

The second fixing part 4000 is fastened on the fixing body 2000 in the same way. That is, first, the second fixing part 4000 is disposed on one surface 2100 of the fixing body 2000. In addition, with the second fastening member 6200 positioned on one surface 4110 of the second fastening member 4100, the second connecting member 6100 is fitted into the opening of the second fastening member 6200. . At this time, the second connection member 6100 is the opening of the second fastening member 6200, the fourth fastening opening 4131 provided in the second fixing member 4100, and the second fastening opening 2162 provided in the fixed body 2000. ) To penetrate. In this case, when the second connection member 6100 is rotated in a tightening direction, for example, in a clockwise direction, the threads of the second connection member 6100 and the threads provided in the second fastening opening 2162 are tightened while being engaged with each other.

In addition, when the second connection member 6100 continues to rotate in the clockwise direction, the second connection member 6100 gradually descends to the lower side of the fixed body 2000. Accordingly, the upper portion (ie, the head) of the second connection member 6100 and the second fastening member 6200 are closer to each other, and the second fastening member 6200 is gradually closer to the one surface 2100 of the fixed body 2000. Move to lose.

Accordingly, the second fixing part 4000 is fastened on one surface 2100 of the fixing body 2000.

A method of separating the first and second fixing portions 3000 and 4000 from the fixed body 2000 can be performed by performing the above-described fastening method in reverse. That is, when each of the first and second connecting members 5100 and 6100 is rotated in a loosening direction, such as a counterclockwise direction, a thread provided in each of the first and second connecting members 5100 and 6100 becomes the first and second fastening openings. The engagement with the thread provided in (2161, 2162) is gradually released. Thereafter, when the first and second connecting members 5100 and 6100 are carried out of the first and second fastening openings 2161 and 2162 and the third and fourth fastening openings 3131 and 4141, the first and second fixing parts (3000, 4000) are separated from the fixed body (2000).

In this way, when the first and second fixing parts 3000 and 4000 are fastened on the fixing body 2000, the fastening strength of the first and second fixing parts 3000 and 4000 can be adjusted. That is, according to the amount of rotation of the first and second connecting members 5100 and 6100, the upper portions (ie, heads) of the first and second connecting members 5100 and 6100 and the first and second connecting members 5100 and 6100 Since the degree of close contact with the second fastening members 5200 and 6200 and the degree of contact between the first and second fastening members 5200 and 6200 and the one side 2100 of the fixed body 2000 are adjusted, 3000, 4000) can be adjusted.

Adjusting the fastening strength of the first and second fixing parts 3000 and 4000 is to allow the first and second fixing parts 3000 and 4000 to move while being fastened on the fixed body 2000 Can be Here, the movement of the first and second fixing parts 3000 and 4000 means that the first fixing part 3000 and the second fixing part 4000 are moved closer to each other or away from each other while being fastened on the fixed body 2000. It may be an operation of moving horizontally or an operation of rotating about the first and second fastening parts 5000 and 6000 as a central axis.

The first and second fastening parts 5000 and 6000 are not limited to the above-described examples, and each of the first and second fastening parts 3000 and 4000 is fastened or separated on one side 2100 of the fixed body 2000. And the first and second fixing parts (3000, 4000) are fastened to the first and second fastening parts (5000, 6000), so that horizontal movement and rotation are possible. Applicable.

The reference table 7000 is a means for adjusting in advance so that the observation surface OF of the sample S is parallel to the focal plane. In other words, the reference table 7000 is a means for adjusting in advance so that the observation surface OF of the sample S may be parallel to the focal plane before the sample holder 1000 is seated on the mounting table 120 to be.

The reference table 7000 may have a plate shape having an area. It is preferable that the area of the reference table 7000 is provided to be larger than the area of the fixed body 2000.

Referring to FIG. 3, each of one side surface (hereinafter, one surface) of the reference table 7000 and the other side surface (hereinafter, referred to as “rear surface”) opposite or opposite to the one side surface (hereinafter, referred to as “rear surface”) has a shape in which a step with a height difference is provided. In other words, one surface of the reference table 7000 has a shape having a first groove portion 7200 and the other surface has a shape having a second groove portion 7400.

One surface 7100 of the reference base 7000 on which the first groove portion 7200 is provided corresponds to the bottom surface of the first groove portion 7200, and is a surface that is horizontal or parallel to the one surface 181 of the stage 180. The height is different from the first side (7110) and the first side (7110) and extends from the second side (7120) and the first side (7110) to the second side (7120) which is parallel to the first side (7110). And a third surface 7130 which is a surface orthogonal to the first and second surfaces 7110 and 7120.

Here, the third surface 7130 is a surface extending in the circumferential direction of the first surface 7110 and may be referred to as a side surface (hereinafter, a first side surface).

Accordingly, the first groove portion 7200 may be described as having a shape recessed inward from the second surface 7120 that is the outermost surface of one surface. In addition, the first groove 7200 is a space partitioned by the first surface 7110 and the third surface 7130, and the surface located outside the first groove 7200 is the second surface 7120. Can be explained.

The first groove portion 7200 includes a first groove 7210 into which the first and second fixing portions 3000 and 4000 are inserted or accommodated.

The first groove 7210 is formed to extend in one direction, and the extended length is preferably provided to be shorter than the sum of the lengths of the first fixing part 3000 and the second fixing part 4000. Further, the first groove 7210 has a length in a direction intersecting or orthogonal to the extension direction, that is, the width of the first and second fixing parts 3000 and 4000 so that the first and second fixing parts 3000 and 4000 can be inserted therein 2 It is provided to be larger than the width of the fixing parts (3000, 4000).

In addition, the first groove portion 7200 may further include a pair of second grooves 7220.

Each of the pair of second grooves 7220 is formed to extend in a direction crossing the extension direction of the first groove 7210, and the pair of second grooves 7220 are arranged in the width direction of the first groove 7210 Is placed. That is, one of the pair of second grooves 7220 extends outward from one side of the first groove 7210 in the width direction, and the other second groove 7220 is formed in the width direction of the first groove 7210 It is formed extending outward from the other side. Since the first groove 7210 and the second groove 7220 extend to cross each other, the first groove 7200 may have a cross shape.

In addition, the width of each of the pair of second grooves 7220 may be smaller or larger than the widths of the first groove 7210 and the first and second fixing parts 3000 and 4000, and the size of the sample S It can be different. In addition, the width of each of the pair of second grooves 7220 may be provided to be larger or smaller than the second opening 2152 provided in the fixed body 2000.

The depth of the first groove portion 7200 (t ₇₂₀₀ ) (see FIG. 3) is the same as the thickness of the first and second fixing members 3100 and 4100 (t ₃₁₀₀ , t ₄₁₀₀ ) (see FIG. 7(b)) It can be, or it can be large or small. In other words, the separation distance between the first surface 7110 and the second surface 7120 or the vertical length (height) of the third surface 7130 is the thickness of the first and second fixing members 3100 and 4100 It may be the same as, greater than or less than.

The first surface 7110 is a surface that is horizontal with one surface 181 of the stage 180 and is a surface that is adjusted so that the observation surface OF of the sample S is parallel to the first surface 7110.

Therefore, hereinafter, the first surface 7110 adjusted so that the observation surface OF of the sample S is parallel is referred to as the first adjustment surface, and will be described using the same reference numeral '7110' as the first surface. .

The first adjustment surface 7110 is a surface horizontal to one surface 181 of the stage 180 as described above. Accordingly, when the observation surface OF of the sample S is adjusted parallel to the first adjustment surface 7110, the observation surface OF of the sample S becomes horizontal. In addition, the first adjustment surface 7110 is parallel to the one surface 121a of the mounting table 120 and the one surface 181 of the stage 180. Accordingly, when the observation surface OF of the sample S is adjusted parallel to the first adjustment surface 7110, the sample S is seated on the mounting table 120, and the mounting table 120 is placed on the stage 180. When seated on the image, the observation surface OF of the specimen S becomes parallel with one surface 121a of the mounting table 120 and one surface 181 of the stage 180.

Accordingly, when the observation surface OF of the sample S is enlarged through the objective lens 130, the focal plane and the observation surface OF of the sample S become parallel.

Further, the first adjustment surface 7110 is parallel to the second surface 7120. And, when the sample holder 1000 is seated on the reference table 7000, one surface (3110, 3210) of each of the first and second fixing members (3100, 4100), the first and second protruding members (4100, 4200) Each one surface 3210, 4210 is parallel to the first adjustment surface 7110 of the reference table 7000. In addition, when the sample holder 1000 is seated on the placing table 120, the first and second fixing members 3100 and 4100, and the first and second protruding members 3200 and 4200 are the placing table 120 It is parallel to the one side (121a) of.

The second surface 7120 is parallel to the first adjustment surface 7110 as described above. In addition, when the sample holder 1000 is mounted on the reference table 7000, the second surface 7120 and the one surface 2100 of the fixing body 2000 are parallel and may be in contact with each other.

Hereinafter, the second surface 7120 of the reference table 7000 is referred to as a first seating surface, and will be described using the same reference numeral 7120.

Referring to FIG. 5, the rear surface 7300 of the reference base 7000 in which the second groove portion 7400 is provided corresponds to the bottom surface of the second groove portion 7400, and the first surface 181 of the stage 180 and the The height is different from the horizontal or parallel surface of the fourth surface (7310) and the fourth surface (7310), and the fifth surface (7320) and the fourth surface (7310) are parallel to the fourth surface (7310). It includes a sixth surface 7330 that extends to a surface 7320 and is a surface orthogonal to the fourth and fifth surfaces 7310 and 7320.

Here, the sixth surface 7330 is a surface extending in the circumferential direction of the fourth surface 7310 and may be referred to as a side surface (hereinafter, a first side surface).

In addition, the second groove portion 7400 may be described as having a shape recessed inward from the fifth surface 7320 that is the outermost surface of the rear surface. In addition, the second groove 7400 is a space divided by the fourth surface 7310 and the sixth surface 7330, and the surface located outside the second groove 7400 is the fifth surface 7320. Can be explained.

The second groove portion 7400 includes a third groove 7410 into which at least a portion of the first and second fixing portions 3000 and 4000 can be inserted or received.

The third groove 7410 is formed to extend in one direction, and the extension length is preferably provided to be shorter than the sum of the lengths of the first fixing part 3000 and the second fixing part 4000. In addition, the third groove 7410 has a length in a direction intersecting or orthogonal to the extension direction, that is, the width of the first and second fixing parts 3000 and 4000 so that the first and second fixing parts 3000 and 4000 can be inserted therein. 2 It is provided to be larger than the width of the fixing parts (3000, 4000).

In addition, the second groove portion 7400 may further include a pair of fourth grooves 7420.

Each of the pair of fourth grooves 7420 is formed to extend in a direction crossing the extension direction of the third groove 7410, and the pair of fourth grooves 7420 are arranged in the width direction of the third groove 7410 Is placed. That is, one of the pair of fourth grooves 7420 is formed to extend outward from one side in the width direction of the third groove 7410, and the other fourth groove 7420 is formed in the width direction of the third groove 7410 It is formed extending outward from the other side. In this way, the third groove 7410 and the fourth groove 7420 are formed to extend to cross each other, so that the second groove portion 7400 may have a cross shape.

In addition, the width of each of the pair of fourth grooves 7420 may be smaller or larger than the widths of the third groove 7410 and the first and second fixing parts 3000 and 4000, and the size of the sample S It can be different. In addition, the width of each of the pair of fourth grooves 7420 may be provided to be larger or smaller than the second opening 2152 provided in the fixed body 2000.

_{The depth t 7400} of the second groove 7400 may be equal to, greater than or less than _{the thickness t 3200} and t ₄₂₀₀ of the protruding members 3200 and 4200 (see FIGS. 3 and 11 ). In other words, the separation distance between the fourth surface 7310 and the fifth surface 7320 or the vertical length (height) of the sixth surface 7330 is the thickness of the protruding members 3200 and 4200 (t ₃₂₀₀ , t ₄₂₀₀ ) and may be equal to, greater than or less than.

The fourth surface 7310 is a surface that is horizontal with the one surface 181 of the stage 180 and is a surface that is adjusted so that the observation surface OF of the sample S is parallel to the fourth surface 7310.

Therefore, hereinafter, the fourth surface 7310, which is adjusted so that the observation surface OF of the sample S is parallel, is referred to as the second adjustment surface, and will be described using the same reference numeral '7310' as the fourth surface. .

The second adjustment surface 7310 is a surface horizontal to one surface 181 of the stage 180 as described above. Accordingly, when the observation surface OF of the sample S is adjusted parallel to the second adjustment surface 7310, the observation surface OF of the sample S becomes horizontal with the one surface 181 of the stage 180. . In addition, the second adjustment surface 7310 is parallel to the one surface 121a of the mounting table 120 and the one surface 181 of the stage 180. Accordingly, when the observation surface OF of the sample S is adjusted parallel to the second adjustment surface 7310, the sample S is seated on the mounting table 120, and the mounting table 120 is placed on the stage 180. When seated on the image, the observation surface OF of the specimen S becomes parallel with one surface 121a of the mounting table 120 and one surface 181 of the stage 180.

Accordingly, when the observation surface OF of the sample S is enlarged through the objective lens 130, the focal plane and the observation surface OF of the sample S become parallel.

Further, the second adjustment surface 7310 is parallel to the fifth surface 7320. And, when the sample holder 1000 is seated on the reference table 7000, one surface (3110, 3210) of each of the first and second fixing members (3100, 4100), the first and second protruding members (4100, 4200) Each one surface 3210, 4210 is parallel to the second adjustment surface 7310 of the reference table 7000. In addition, when the sample holder 1000 is seated on the placing table 120, the first and second fixing members 3100 and 4100, and the first and second protruding members 3200 and 4200 are the placing table 120 It is parallel to the one side (121a) of.

The fifth surface 7320 is parallel to the second adjustment surface 7310 as described above. In addition, when the specimen fixing table 1000 is mounted on the reference table 7000, the fifth surface 7320 and the one surface 2100 of the fixing body 2000 are parallel and may be in contact with each other.

Hereinafter, the fifth surface 7320 of the reference table 7000 is referred to as a second seating surface, and will be described using the same reference numeral 7320.

The reference table 7000 has holes (hereinafter, first and second holes 7500 and 7600) so that the first and second adjustment surfaces 7110 and 7310 communicate with each other or penetrate as shown in FIG. 3. It is provided, which is a hole in which at least a portion of the first and second fastening portions 5000 and 6000 can be inserted and received. The first hole 7500 and the second hole 7600 are provided to be arranged in the alignment direction of the first fastening opening 2161 and the second fastening opening 2162.

6 is a view conceptually showing a process of adjusting the observation surface of the specimen to be parallel to the focal plane by using the specimen fixing device according to an embodiment of the present invention.

Hereinafter, referring to FIG. 6, a process of adjusting the observation surface of a sample to be parallel to the focal plane using the sample holder and the reference table according to an embodiment of the present invention will be described.

Here, the sample S has a shape extending in one direction, and the observation surface OF is an inclined surface having an inclination in the extending direction. As a more specific example, the sample S may have a shape in which the observation surface OF is inclined in the X-axis direction (see FIGS. 2 and 6 ).

First, the sample holder 1000 is mounted on the reference table 7000 and the sample S is inserted between the first fixing part 3000 and the second fixing part 4000. At this time, for example, the sample holder 1000 is mounted on the reference table 7000 so that one surface of the fixing body 2000 faces the first adjustment surface 7110 of the reference table 7000. In addition, as shown in FIG. 6A, the first fixing part 3000 and the second fixing part ( 4000), insert the sample (S).

When inserting the sample (S) between the first fixing part (3000) and the second fixing part (4000), when the force holding or holding the sample (S) is released, the sample (S) becomes the first It moves or falls a predetermined distance toward the adjustment surface 7110.

Meanwhile, as described above, the observation surface OF of the sample S is inclined in the extending direction of the sample S. Accordingly, in the observation surface OF of the sample S, one edge is closer to the first adjustment surface 7110 than the other edge.

Thus, when the specimen S falls or moves toward the first adjustment surface 7110, one edge first comes into contact with the first adjustment surface 7110, so that the center of gravity of the specimen S is in the direction of the other edge. Is moved to. Therefore, when one edge of the observation surface OF is in contact with the first adjustment surface 7110, the observation surface OF of the sample S is rotated around a point on the path of the observation surface (inclined surface). ) The whole is in contact with the first adjustment surface 7110. The operation of the sample S may be similar to, for example, a seesaw operation, and may be expressed as a vibration or flow of the sample.

As the observation surface OF of the specimen S and the first adjustment surface 7110 are in contact with each other, the observation surface OF is parallel to the first adjustment surface 7110 as shown in the solid line of FIG. 6B. do. In addition, the rear surface of the specimen S, which is a surface opposite to the observation surface OF, is not parallel to the first adjustment surface 7110 and has an inclination.

Next, the sample S is fixed by moving the first fixing part 3000 and the second fixing part 4000 close to each other so that the sample S does not flow or move. Then, after separating the sample holder 1000 from the reference table 7000, the sample holder 1000 is mounted on the mounting table 120, and the mounting table 120 is mounted on the stage 180. In this case, as shown in (c) of FIG. 6, one surface 2100 of the fixed main body 2000 is seated toward the objective lens 130. Accordingly, the observation surface OF of the sample S is disposed to face the objective lens 130.

The sample S supported by the sample holder 1000 and seated on the mounting table 120 has an observation surface OF thereof, one surface 121a of the mounting table 120 and one surface 181 of the stage 180. ) Is parallel. Accordingly, when the observer enlarges the sample S through the objective lens 130, the observation surface OF of the sample S becomes parallel to the focal plane. Therefore, it is easy to focus the observation surface, and thus an excellent image can be obtained.

On the other hand, the observation method of the sample includes a transmission illumination observation method and a reflection illumination observation method. Here, the transmission illumination observation is a method of irradiating light in the direction of the rear surface of the sample S through the first dimming unit 160a and the capacitor to observe the light. In addition, reflection illumination observation is a method of irradiating light in the direction of the observation surface of the sample S through the second dimming unit 160b and the objective lens 130 to observe.

In transmission illumination observation, the quality of the acquired image varies according to the separation distance between the observation surface OF of the sample S and the condenser. And, each condenser has its own working distance to obtain a good quality image, and when the separation distance between the observation surface (OF) and the condenser becomes the working distance, a good image is obtained. You can get it. Accordingly, the condenser is usually raised and lowered to adjust the separation distance between the observation surface OF of the sample S and the condenser. However, there is a limit to adjusting the height of the capacitor.

According to the sample fixing device according to the embodiment of the present invention, the thickness of the fixing members 3100 and 4100 is thinner than that of the protruding members 3200 and 4200, so that the separation distance between the observation surface OF of the sample S and the condenser is more. Can be adjusted shortly. The protruding members 3200 and 4200 may be difficult to achieve a desirable working distance with a general capacitor having a short working distance.

To this end, in the embodiment of the present invention, in providing the reference base 7000 to have the first groove portion 7200 and the second groove portion 7400, any one of the first and second groove portions 7200 and 7400 Make sure the depth is shallower than the other.

For example, a depth t ₇₂₀₀ of the first groove portion 7200 is provided to be shallower than that of the second groove portion 7400. That is, the depth of the first adjustment surface 7110, which is the bottom surface recessed inward with respect to the first seating surface 7120, is the second adjustment surface, which is the bottom surface that is recessed inward with respect to the second seating surface 7120 Make it shallower than (7310).

In addition, in providing each of the first and second fixing parts 3000 and 4000, the thickness (t ₃₁₀₀ , t ₄₁₀₀ ) is thicker than the fixing members 3100 and 4100 at one end of the fixing members 3100 and 4100. Protruding members 3200 and 4200 are provided.

In addition, the first and second fixing parts 3000 and 4000 are rotatable while being fastened on the fixed body 2000. By this rotational operation, when the specimen holder 1000 is seated on the reference table 7000, any one of the fixing members 3100 and 4100 and the protruding members 3200 and 4200 of the fixing parts 3000 and 4000 It is in contact with the adjustment surfaces 7110 and 7310.

And, when adjusting the observation surface (OF) of the sample (S) parallel to the adjustment surfaces (7110, 7310) using the reference table (7000), the selected groove type (first groove (7200) or second groove ( (7400)) and the first and second fixing parts (3000, 4000), respectively, depending on the portion in contact with the adjustment surfaces (7110, 7310), the specimen (S) is dropped or moved toward the adjustment surfaces (7110, 7310) The distance to do is different.

For example, in a state in which the fixing members 3100 and 4100 are in contact with the first adjustment surface, when the specimen S observation surface OF is brought into contact with the first adjustment surface 7110 to adjust the horizontality, the specimen S ) With the distance between the observation surface (OF) and the condenser so that the protruding members (3200, 4200) are in contact with the first adjustment surface (7110), the specimen (S) observation surface (OF) is replaced with the first adjustment surface (7110). It is relatively close compared to when the horizontal is adjusted by contacting with.

Accordingly, the sample S is positioned between the other end of the first fixing member 3100 and the other end of the second fixing member 4100, and each of the first and second fixing members 3100 and 4100 is the first groove part 7200. It is advantageous to observe the transmitted illumination to be inserted into and to be in contact with the first adjustment surface 7110.

7 and 8 are views showing a process of mounting a sample on a mounting table using a sample fixing device according to an embodiment of the present invention. Here, FIGS. 7 and 8 show that a sample is inserted between the other end of the first fixing member and the other end of the second fixing member, and the observation surface OF of the sample S is connected to the focal plane by using the first adjustment surface of the reference table. It is a figure explaining the method of adjusting so that it is parallel.

Hereinafter, a method of adjusting the observation surface OF of the sample S to be parallel to the focal plane will be described with reference to FIGS. 7 and 8.

The sample S is a sample in which the observation surface OF has an inclination that is not horizontal to the one surface 181 of the stage 180. More specifically, the sample S has a shape extending in one direction, and the observation surface OF is an inclined surface having an inclination in the extending direction, that is, in the X-axis direction.

First, in a state in which the other end of the first fixing member 3100 and the other end of the second fixing member 4100 face each other, the sample holder 1000 is mounted on the reference table 7000 as shown in FIG. 7. At this time, one surface 2100 of the fixing body 2000 faces the first mounting surface 7120 of the reference table 7000, and the first and second fixing members 3100 and 4100 are in the first groove 7210. To be accepted.

At this time, when one surface 2100 of the fixed body 2000 is seated so as to be in contact with the first seating surface 7120 of the reference table 7000, one surface 3110 and 4110 of each of the first and second fixing members 3100 and 4100 ) Is in contact with the first adjustment surface 7110. In addition, at this time, one surface 2100 of the fixing body 2000 is parallel to the first mounting surface 7120 of the reference table 7000, and one surface 3110, 4110 of each of the first and second fixing members 3100 and 4100 It is parallel to this 1st adjustment surface 7110.

Subsequently, the sample S is inserted between the other end of the first fixing member 3100 and the other end of the second fixing member 4100. To this end, a predetermined space is provided between the other end of the first fixing member 3100 and the other end of the second fixing member 4100. Then, the sample S is supported or gripped by means such as tweezers, and the sample is inserted between the other end of the first fixing member 3100 and the other end of the second fixing member 4100. At this time, the sample is placed between the other end of the first fixing member 3100 and the other end of the second fixing member 4100 so that the surface facing the first adjustment surface 7110 of the reference table 7000 becomes the observation surface OF. Insert.

Thereafter, when the holding force of the support means such as tweezers is released, the observation surface OF of the specimen S moves toward the first adjustment surface 7110 of the reference table 7000 or falls a predetermined distance. At this time, the entire observation surface OF of the specimen S comes into contact with the first adjustment surface 7110 as it rotates around a point on the path of the observation surface (inclined surface).

As a result, the observation surface OF becomes parallel to the first adjustment surface 7110 as shown in FIGS. 7B and 7C, and the specimen S which is the opposite surface of the observation surface OF The rear surface is not parallel to the first adjustment surface 7110 and has an inclination.

Next, the first fixing part 3000 and the second fixing part 4000 are moved close to each other so that the sample S does not flow or move, thereby supporting and fixing the sample S. That is, the first fixing part 3000 so that the other end of the first fixing member 3100 is in contact with one side of the sample S, and the other end of the second fixing member 4100 is in contact with the other side of the sample S. ) And the second fixing part 4000 are moved close to each other.

Then, after separating the sample holder 1000 from the reference table 7000, the sample holder 1000 is mounted on the mounting table 120 as shown in FIG. 8. Then, as shown in FIG. 1, the mounting table 120 is seated and fixed on the stage 180. At this time, the mounting table 120 is mounted on the stage 180 so that one surface 2100 of the fixed body 2000 faces the objective lens 130. Accordingly, the observation surface OF of the sample S is disposed to face the objective lens 130. In addition, the observation surface OF of the sample S is parallel to the one surface 121a of the mounting table 120 and the one surface 181 of the stage 180.

Therefore, when the observer enlarges the sample S through the objective lens 130, the observation surface OF of the sample S is parallel to the focal plane. Accordingly, the entire observation surface OF is focused, and an excellent image of the observation surface OF can be obtained.

7 and 8, the sample S is supported between the other end of the first fixing member 3100 and the second fixing member 4100, and the first and second fixing members 3100 and 4100 are the first grooves. The sample holder 1000 was mounted on the reference table 7000 so as to be accommodated in the 7200 and contact the first adjustment surface 7110.

However, although not limited thereto, the sample S is supported between the first protruding member 3200 and the second protruding member 4200, and the first and second protruding members 3200 and 4200 are formed in the first groove 7200. The sample holder 1000 may be mounted on the reference table 7000 so as to be accommodated in and contact with the first adjustment surface 7110. At this time, each of the first and second protruding members 3200 and 4200 has one surface 3210 and 4210 parallel to the first adjustment surface 7110. In this case, one surface 3110 and 4110 of each of the first and second fixing members 3100 and 4100 may be spaced apart from the first adjustment surface 7110.

In addition, the sample (S) is supported between the other end of any one of the first and second fixing members (3100, 4100) and any one of the first and second protruding members (3200, 4200), and the sample (S) is supported. The sample holder 1000 may be mounted on the reference table 7000 so that the protruding member and the other end of the fixing member are accommodated in the first groove portion 7200.

9 and 10 are views showing a process of mounting a sample on a mounting table using a sample fixing device according to an embodiment of the present invention. Here, in FIGS. 9 and 10, a sample is inserted between the other end of the first protruding member and the other end of the second protruding member, and the observation surface OF of the sample S is placed between the focal plane and It is a figure explaining the method of adjusting so that it is parallel.

Hereinafter, a method of adjusting the observation surface OF of the sample S to be parallel to the focal plane will be described with reference to FIGS. 9 and 10.

In this case, a method of adjusting the observation surface OF of the specimen S to be parallel to the focal plane using the above-described first adjustment surface 7110 and overlapping contents will be partially omitted or briefly described.

The sample S is a sample in which the observation surface OF has an inclination that is not horizontal to the one surface 181 of the stage 180. More specifically, the sample S has a shape extending in one direction, and the observation surface OF is an inclined surface having an inclination in the extending direction, that is, in the X-axis direction.

First, with the first protruding member 3200 and the second protruding member 4200 facing each other, the sample holder 1000 is mounted on the reference table 7000 as shown in FIG. 9. At this time, when one surface 2100 of the fixed body 2000 is seated in contact with the second seating surface 7320 of the reference table 7000, one surface 3210, 4210 of the first and second protruding members 3200 and 4200 ) May be seated in contact with the second adjustment surface 7310. In addition, at this time, one surface 2100 of the fixed body 2000 is parallel to the second mounting surface 7320 of the reference table 7000, and one surface 3210, 4210 of the first and second protruding members 3200 and 4200 It is parallel to this 2nd adjustment surface 7310.

Subsequently, a space is provided between the first protruding member 3200 and the second protruding member 4200, and the sample is inserted into the space. At this time, for example, using a means such as tweezers to support or grip the sample (S), so that the surface facing the second adjustment surface (7310) of the reference table (7000) is the observation surface (OF), the sample (S ) Is inserted between the first protruding member 3200 and the second protruding member 4200.

Thereafter, when the holding force of the support means such as tweezers is released, the observation surface OF of the specimen S moves toward the second adjustment surface 7310 of the reference table 7000 or falls a predetermined distance. At this time, the entire observation surface OF of the specimen S comes into contact with the second adjustment surface 7310 as it rotates around a point on the path of the observation surface (inclined surface).

As a result, as shown in (b) and (c) of FIG. 8, the observation surface OF becomes parallel to the second adjustment surface 7310, and the rear surface of the specimen S, which is the opposite surface of the observation surface OF, is 2 It is not parallel to the adjustment surface 7310 and has an inclination.

Next, the first fixing part 3000 and the second fixing part 4000 are moved close to each other so that the sample S does not flow or move, thereby supporting and fixing the sample S. That is, so that the first protruding member 3200 is in contact with one side of the sample S, and the second protruding member 4200 is in contact with the other side of the sample S, the first fixing part 3000 and the second The fixing parts 4000 are moved closer to each other.

Then, after separating the sample holder 1000 from the reference table 7000, the sample holder 1000 is mounted on the mounting table 120 as shown in FIG. 9. Then, as shown in FIG. 1, the mounting table 120 is seated and fixed on the stage 180. At this time, the mounting table 120 is mounted on the stage 180 so that one surface 2100 of the fixed body 2000 faces the objective lens 130. Accordingly, the observation surface OF of the sample S is disposed to face the objective lens 130. In addition, the observation surface OF of the sample S is parallel to the one surface 121a of the mounting table 120 and the one surface 181 of the stage 180.

Therefore, when the observer enlarges the sample S through the objective lens 130, the observation surface OF of the sample S is parallel to the focal plane. Accordingly, the entire observation surface OF is focused, and an excellent image of the observation surface OF can be obtained.

9 and 10, the sample S is supported between the first protruding member 3200 and the second protruding member 4200, and the first and second protruding members 3200 and 4200 are provided with the second groove 7200. ), the sample holder 1000 was mounted on the reference table 7000 so as to be in contact with the second adjustment surface 7310.

However, the present invention is not limited thereto, and the sample S is supported between the other end of the first fixing member 3100 and the other end of the second fixing member 3200, and the first and second fixing members 3100 and 4100 are The sample holder 1000 may be mounted on the reference table 7000 so as to be accommodated in the 7200 and contact the second adjustment surface 7310.

In addition, the sample S is supported between the other end of any one of the first and second fixing members 3100 and 4100 and any one of the first and second protruding members 3200 and 4200, and the sample S is The sample holder 1000 may be mounted on the reference table 7000 so that the supported protruding member and the other end of the fixing member are accommodated in the second groove portion 7400.

As described above, according to the sample fixing device according to the embodiment of the present invention, even if the observation surface OF is a non-horizontal inclined surface, the observation surface OF of the sample S is horizontal, or one surface of the stage 180 ( 181) can be adjusted to be parallel. Accordingly, when the observation surface OF of the sample S is enlarged with the objective lens 130, the observation surface OF may be parallel to the focal plane.

Accordingly, in the comparative example in which the observation surface is not parallel to the focal plane as shown in (a) of FIG. 11, when magnifying at a high magnification through the objective lens 130, only a portion of the observation surface is in focus, but Likewise, in the embodiment in which the observation surface is adjusted to be parallel to the focal plane by the method according to the embodiment of the present invention, it can be confirmed that the entire observation surface is in focus when magnified through the objective lens 130 at high magnification.

Accordingly, according to the specimen fixing device B according to the exemplary embodiment of the present invention, even if the observation surface OF is not horizontal to the stage 180, the observation surface OF can be adjusted to be parallel to the focal plane. Accordingly, it is possible to focus on the observation surface OF, so that a high-quality image of the observation surface OF can be obtained.

A: Microscope B: Sample holding device
120: mounting table 130: objective lens
160: eyepiece 1000: sample holder
2000: fixed body 3000: first fixed portion
4000: second fixing part 7000: reference table
7110: first adjustment surface 7200: first groove
7310: second adjustment surface 7400: second groove

Claims (14)

A sample holder capable of supporting a sample and seated on a mounting table of the microscope; And
A reference table having a shape that is recessed inward on one surface and opened at one side to adjust the horizontality of the observation surface of the sample, and provided with a first groove capable of accommodating the sample;
Including,
One surface of the reference base is a surface facing the opening of the first groove and includes a first adjustment surface that is a horizontal surface,
The sample holder,
A fixed body having one surface parallel to the first adjustment surface of the reference table and having an opening through which the sample passes; And
First and second fixing portions disposed to face each other so that the sample is positioned therebetween, and fastened or detachable on one surface of the fixed body;
Sample holding device comprising a. The method according to claim 1,
The sample holder may be mounted on the reference table so that the observation surface of the sample is inserted into the first groove,
The mounting table is a sample fixing device that can be seated on a stage installed to face the objective lens of the microscope. The method according to claim 2,
One side of the reference band,
A sample fixing device comprising a first seating surface that is different in height from the first adjustment surface and is parallel to the first adjustment surface, and is located outside the first groove. The method according to claim 2,
On the rear surface opposite to the one surface of the reference table, a second groove portion is provided with a shape that is recessed inward and one side is open to adjust the horizontality of the observation surface of the sample, and a second groove capable of accommodating the sample is provided,
The rear surface of the reference base is a surface facing the opening of the second groove and includes a second adjustment surface that is a horizontal surface,
A sample fixing device in which the depth of the first groove is smaller than that of the second groove. The method of claim 4,
One surface of the fixed body is a sample holding device parallel to the second adjustment surface. The method of claim 5,
The first fixing part,
A first fixing member extending in an extension direction of the fixing body; And
A first protruding member protruding from one end of the first fixing member in a direction crossing the extending direction of the first fixing member;
Including,
The second fixing part,
A second fixing member extending in an extension direction of the first fixing member; And
A second protruding member protruding from one end of the second fixing member in the extending direction;
Sample holding device comprising a. The method of claim 6,
One surface of each of the first and second fixing members is parallel to at least one of the first and second adjustment surfaces. The method of claim 7,
The first fixing part includes a first fastening part for attaching and detaching the fixing body and the first fixing member,
The sample fixing device including a second fastening part that allows the second fixing part to attach and detach the fixing body and the second fixing member. Mounting a sample holder having first and second fixing portions arranged to face each other on a reference table;
Inserting a sample between the first fixing part and the second fixing part so that the observation surface of the sample faces the adjustment surface of the reference table;
Adjusting the horizontality by bringing the observation surface of the sample into contact with the adjustment surface; And
Separating the sample holder supporting the sample from the reference table;
Method of placing the sample comprising a. The method of claim 9,
And bringing the observation surface of the sample into contact with the adjustment surface, and shaking the sample so that the observation surface of the sample aligns with the horizontality of the adjustment surface. The method of claim 10,
In inserting a sample between the first fixing part and the second fixing part,
Inserting the sample between the first fixing portion and the second fixing portion fastened on one surface of the fixed body provided with an opening,
A method for placing a sample in which the sample is passed through an opening of the fixed body and inserted between the first fixing part and the second fixing part. The method according to any one of claims 9 to 11,
Placing the sample holder separated from the reference table on a mounting table;
Mounting the mounting table on a stage disposed opposite the objective lens so that the observation surface of the sample faces the objective lens of the microscope;
Method of placing the sample comprising a. The method of claim 12,
In placing the sample holder on the mounting table,
A method of placing a sample in which the sample holder mounted on the reference table is inverted and placed on the placing table. The method of claim 13,
When the mounting table is mounted on a stage so that the observation surface of the sample faces the objective lens of the microscope, the observation surface of the sample is parallel to the focal plane by the objective lens.

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