KR102218020B1 - Reverse pressure blocking valve - Google Patents

Abstract

One embodiment of the present invention relates to a back pressure shut-off valve, and the technical problem to be solved is a back pressure that can effectively protect high vacuum products of semiconductors and display devices and low vacuum products for general industrial use in a quick response when a vacuum pump fails. It is to provide a shut-off valve.
To this end, the present invention provides a valve body having a hollow installed between a process chamber and a vacuum pump; A support body coupled to the hollow of the valve body and having at least one exhaust hole; And it is installed on the support body to descend during operation of the vacuum pump so that the process gas is exhausted through the hollow of the valve body and the exhaust hole of the support body, and rises when the operation of the vacuum pump is stopped to close the hollow of the valve A back pressure shut-off valve comprising a shut-off portion is disclosed.

Description

Reverse pressure blocking valve

An embodiment of the present invention relates to a back pressure shutoff valve.

A back pressure shut-off valve or a gate valve is installed between a process chamber of a semiconductor and display device manufacturing apparatus and a vacuum pump to open and close the pipe during maintenance and repair of the pipe and auxiliary equipment such as a vacuum pump. In the conventional operation method of the back pressure shut-off valve, it is divided into manual opening and closing and automatic opening and closing.

The back pressure shut-off valve serves to shut off the vacuum chamber or the process module under vacuum from the atmosphere. For example, wafer/substrate transfer equipment, high vacuum pump lines (located between high vacuum turbo pump/diffusion pump and vacuum system), etc. are used. In particular, in the CTC system (Cluster Tool Control system), it blocks between the central wafer/substrate transfer equipment and the process module so that each process can be performed independently.

BACKGROUND ART With the recent development of semiconductor and display device manufacturing technologies, as wafers/substrates become larger, the diameter of a vacuum pipe in which a back pressure shutoff valve is installed is increasing. However, due to frequent failures of auxiliary equipment such as vacuum pumps, not only increases maintenance and repair costs, but also increases equipment downtime, resulting in an increase in manufacturing cost and decrease in productivity. In particular, in the event of a failure or error in the vacuum pump, the back pressure shut-off valve is delayed, i.e., outputs a failure signal of the vacuum pump, and the control unit that receives the output signal closes the back pressure shut-off valve. There was a problem with slow motion.

Accordingly, there is a need for a device capable of effectively preventing product damage, such as high vacuum products and low vacuum products for general industrial use, of semiconductors and display devices being manufactured by closing the back pressure shut-off valve as soon as a failure or error of the vacuum pump occurs.

The above-described information disclosed in the background technology of the present invention is only for improving an understanding of the background of the present invention, and thus may include information not constituting the prior art.

An object to be solved by the present invention is to provide a back pressure shut-off valve that can effectively protect high vacuum products of semiconductors and display devices, low vacuum products for general industrial use, and the like in a quick response when a vacuum pump fails. In other words, the problem to be solved of the present invention is installed in the pipe between the process chamber and the vacuum pump, and when the vacuum pump fails, the process (reaction) gas flows backward and contaminates the inside of the process chamber and the wafer/substrate. It is to provide a back pressure shut-off valve and/or a gate valve that can be prevented. In particular, the problem to be solved of the present invention is not that the shut-off part inside the valve is operated only by the differential pressure, but the closing force is added by the restoring force of the bellows constituting the shut-off part, so that the back pressure cut-off enables faster operation in case of failure of the vacuum pump. It is to provide a valve.

A back pressure shut-off valve according to an embodiment of the present invention includes a valve body having a hollow installed between a process chamber and a vacuum pump; A support body coupled to the hollow of the valve body and having at least one exhaust hole; And it is installed on the support body to descend during operation of the vacuum pump so that the process gas is exhausted through the hollow of the valve body and the exhaust hole of the support body, and rises when the operation of the vacuum pump is stopped to close the hollow of the valve. It may include a blocking portion.

The blocking portion is a flexible elastic corrugated pipe installed on the support body; And a blocking plate formed on the elastic corrugated pipe to block or open the hollow.

The blocking portion may include a bellows that has an upper end to block or open the hollow.

The blocking portion may be formed of Teflon or metal.

The blocking portion is installed on the outer diameter surface of the support body, the outer diameter pipe that can be elevated; And

It may include a blocking plate formed on the outer diameter tube to block or open the hollow.

The blocking portion may further include an O-ring formed on an inner diameter surface of the hollow portion of the valve body or an outer diameter surface of the blocking plate.

The blocking portion may include a shaft passing through the valve body and the support body; And a cam installed on the shaft to raise the blocking plate by contacting the blocking plate according to the rotation of the shaft, or to lower the blocking plate by being spaced apart from the blocking plate.

The shut-off part may include a shaft passing through the valve body and the support body and having a first gear; And a second gear coupled to the first gear of the shaft to raise the blocking plate by contacting the blocking plate, or to lower the blocking plate by being spaced apart from the blocking plate.

The blocking portion further includes a drive gear coupled to the shaft, and the drive gear may be rotated manually or coupled to an electric motor to rotate.

The first and second gears may include worm gears, bevel gears, or helical gears.

The blocking part may include a pressure tube passing through the valve body and the support body; And a cylinder connected to the pressure pipe to raise and lower the blocking portion according to the pressure of the pressure pipe.

The blocking portion may further include a support base supporting the cylinder, and the support base may be installed inside the hollow of the valve body with a plurality of exhaust holes formed.

The blocking portion may have a cone shape or a triangular cone shape.

The valve body may further include a support stepped on the hollow inner diameter surface so that the support body is coupled and supported.

The valve body may further include an inclined surface formed such that the blocking portion is in close contact or spaced apart from the hollow inner diameter surface.

The back pressure shut-off valve according to an embodiment of the present invention enables effective protection of high vacuum products for semiconductors and display devices, low vacuum products for general industrial use, etc. in a quick response when a vacuum pump fails. That is, the back pressure shut-off valve according to the embodiment of the present invention is installed in the pipe between the process chamber and the vacuum pump, and when a failure of the vacuum pump occurs, the process gas (reactive gas) flows back through the inside of the process chamber and the wafer/ Make sure that the substrate is not contaminated. In particular, in the back pressure shut-off valve according to an embodiment of the present invention, the shut-off portion within the valve is not simply operated by the differential pressure, but the closing force is added by the restoring force of the bellows constituting the shut-off portion, so that a faster operation is possible when the vacuum pump fails. Do it.

1 is a schematic diagram showing an installation position of a back pressure shut-off valve according to an embodiment of the present invention.
2A and 2B are cross-sectional views showing the configuration and operation of a back pressure shutoff valve according to an embodiment of the present invention.
3A and 3B are cross-sectional views showing the configuration and operation of a back pressure shut-off valve according to another embodiment of the present invention.
4 and 5 are cross-sectional views showing the configuration of a back pressure shut-off valve according to another embodiment of the present invention.
6A and 6B are cross-sectional views showing the configuration and operation of a back pressure shut-off valve according to another embodiment of the present invention, and FIG. 6C is a side view showing the structure of a camshaft.
7 is a cross-sectional view showing the configuration of a back pressure shut-off valve according to another embodiment of the present invention.
8 is a cross-sectional view showing the configuration of a back pressure shut-off valve according to another embodiment of the present invention.
9 is a cross-sectional view showing the configuration of a back pressure shut-off valve according to another embodiment of the present invention.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more completely describe the present invention to those of ordinary skill in the art, and the following examples may be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to completely convey the spirit of the present invention to those skilled in the art.

In addition, in the drawings below, the thickness or size of each layer is exaggerated for convenience and clarity of description, and the same reference numerals refer to the same elements in the drawings. As used herein, the term "and/or" includes any and all combinations of one or more of the corresponding listed items. In addition, the meaning of "connected" in the present specification means not only the case where the member A and the member B are directly connected, but also the case where the member A and the member B are indirectly connected by interposing a member C between the member A and the member B do.

The terms used in this specification are used to describe specific embodiments, and are not intended to limit the present invention. As used herein, the singular form may include the plural form unless the context clearly indicates another case. In addition, when used herein, "comprise, include" and/or "comprising, including" refers to the mentioned shapes, numbers, steps, actions, members, elements, and/or groups thereof. It specifies existence and does not exclude the presence or addition of one or more other shapes, numbers, actions, members, elements, and/or groups.

In this specification, terms such as first and second are used to describe various members, parts, regions, layers and/or parts, but these members, parts, regions, layers and/or parts are limited by these terms. It is self-evident. These terms are only used to distinguish one member, component, region, layer or portion from another region, layer or portion. Accordingly, the first member, part, region, layer or part to be described below may refer to the second member, part, region, layer or part without departing from the teachings of the present invention.

Terms relating to space such as “beneath”, “below”, “lower”, “above”, and “upper” are used in conjunction with an element or feature shown in the drawing. Other elements or features may be used for easy understanding. Terms related to this space are for easy understanding of the present invention according to various process conditions or use conditions of the present invention, and are not intended to limit the present invention. For example, if an element or feature in a figure is flipped over, the element or feature described as “bottom” or “below” becomes “top” or “above”. Thus, "bottom" is a concept encompassing "top" or "bottom".

1 is a schematic diagram showing the installation position of the back pressure shut-off valves 100 to 800 according to an embodiment of the present invention.

As shown in FIG. 1, the back pressure shut-off valves 100 to 800 according to an embodiment of the present invention may be installed between the process chamber 10 and the vacuum pump 20. That is, the back pressure shut-off valve 100 may be installed in the pipes 30a and 30b between the process chamber 10 and the vacuum pump 20.

Here, the process chamber 10 is an area in which a semiconductor or a flat panel display device is manufactured, and the vacuum pump 20 serves to exhaust process gases and pollutants from the process chamber 10. In addition, a scrubber 40 for removing process gases and contaminants may be further connected to the vacuum pump 20.

In this way, the back pressure shutoff valves 100 to 800 are quickly closed when the operation of the vacuum pump 20 is stopped or a failure occurs, so that the process gas or contaminant particles in the vacuum pump 20 flow back to the process chamber 10. To prevent contamination of the inside of the process chamber 10 and the wafer/substrate.

2A and 2B are cross-sectional views showing the configuration and operation of the back pressure shut-off valve 100 according to an embodiment of the present invention.

2A and 2B, the back pressure shut-off valve 100 according to the embodiment of the present invention may include a valve body 110, a support body 120, and a shut-off part 130.

The valve body 110 is installed in the pipes 30a, 30b between the process chamber 10 and the vacuum pump 20, and has a hollow 111 in a vertical direction to exhaust process gases and pollutants therein. Is formed. The valve body 110 is, for example, but not limited to, an expansion pipe 112 having a relatively large inner/outer diameter in which the support body 120 and the blocking portion 130 are installed, and the expansion pipe 112 ), the upper and lower connecting pipes 113 and 114 having relatively small inner/outer diameters connected to the upper and lower portions of the), and flanges 113a and 114a formed at the upper and lower ends of the upper and lower connecting pipes 113 and 114, respectively. have. These flanges 113a and 114a are connected to the pipes 30a and 30b between the process chamber 10 and the vacuum pump 20.

In addition, the valve body 110 is formed between the inner diameter surface of the hollow 111, for example, between the expansion pipe 112 and the lower connection pipe 114, the stepped support body 120 is coupled in the vertical direction It may further include (115). In addition, the valve body 110 is formed between the inner diameter surface of the hollow 111, for example, between the expansion pipe 112 and the upper connection pipe 113 so that the blocking portion 130 is in close contact (at this time, the valve The hollow 111 of the body 110 is blocked) or the blocking portion 130 is spaced apart (at this time, the hollow 111 of the valve body 110 is open) may further include an inclined surface 116.

The support body 120 is coupled to the inside of the hollow 111 of the valve body 110, that is, the inside of the expansion tube 112 and is supported in a vertical/horizontal direction. That is, the support body 120 is coupled to the stepped portion 115 formed on the inner diameter surface of the hollow 111 among the valve body 110 and is fixed so as not to move in the vertical/horizontal direction. The support body 120 may further include a plurality of exhaust holes 121 formed so that the process gas can easily pass. The exhaust hole 121 may be, for example, but not limited to, a plurality of relatively small circular through-holes or a plurality of relatively wide rectangular through-holes.

The blocking part 130 is installed inside the expansion pipe 112 of the valve body 110 to block (block/close) or open the hollow 111. That is, the blocking part 130 is coupled to the support body 120 installed on the inner side of the expansion pipe 112 of the valve body 110, and the hollow 111 between the expansion pipe 112 and the upper connection pipe 113 To close or open. In particular, the blocking unit 130 is in close contact with the inclined surface 116 formed at the boundary between the expansion pipe 112 and the upper connection pipe 113 (at this time, the hollow 111 of the valve body 110 is blocked/closed) , It is spaced apart from the inclined surface 116 (at this time, the hollow 111 of the valve body 110 is opened).

In other words, the blocking unit 130 descends when the vacuum pump 20 is operated so that the process gas is exhausted through the hollow 111 of the valve body 110 and the exhaust hole 121 of the support body 120. , When the operation of the vacuum pump 20 is stopped or when a failure occurs, it rises to block the hollow 111 of the valve body 110.

The blocking portion 130 may be, for example, but not limited to, a cone shape or a triangular cone shape.

As an example, but not limited to, the blocking portion 130 may include an elastic corrugated pipe 131 and a blocking plate 132. The elastic corrugated pipe 131 may be formed in a tube shape with a side portion closed and an upper and a lower portion open. The elastic corrugated pipe 131 is elastically expandable in the up and down directions (ie, in the vertical direction), and is installed on the support body 120. The blocking plate 132 is formed integrally with the elastic corrugated pipe 131 on the elastic corrugated pipe 131 to block or open the hollow 111. That is, the blocking plate 132 is in close contact with the inclined surface 116 formed at the boundary between the expansion pipe 112 and the upper connection pipe 113, or is spaced apart from the inclined surface 116.

In addition, the blocking plate 132 may have an inclined upper surface 133, and the upper surface 133 of the blocking plate 132 may be formed at the same angle as the inclined surface 116 formed on the valve body 110. . Therefore, when the upper surface 133 of the blocking plate 132 is in close contact with the inclined surface 116 of the valve body 110, the sealing force is relatively high, so that the process gas does not flow back into the process chamber 10.

Here, the above-described blocking unit 130 may be referred to as a bellows that simply blocks or opens the hollow 111 by clogging the top. That is, the blocking portion 130 may have a bellows shape in which the upper end is closed and a plurality of wrinkles are formed in the lower direction.

In addition, the features of the blocking plate 132 and the inclined upper surface 133 may be equally applied to all other embodiments described below.

The blocking part 130 may be made of, for example, but not limited to, Teflon or metal. Here, the metal may be, for example, but not limited to, stainless steel or magnesium. In addition, the blocking portion 130 may be formed of various materials that do not react to the process gas and have excellent elasticity, and the material is not limited in the embodiment of the present invention.

The shape and/or material of the blocking portion 130 may be commonly applied to all embodiments of the present invention.

In this way, the back pressure shut-off valve 100 according to an embodiment of the present invention has a vacuum suction force directed from the process chamber 10 to the vacuum pump 20 as shown in FIG. 2A during normal operation of the vacuum pump 20. By this, the blocking portion 130 is naturally contracted (falling). That is, as the elastic corrugated pipe 131 of the blocking part 130 is contracted, the blocking plate 132 is spaced apart from the inclined surface 116 of the valve body 110 to open the hollow 111, and accordingly, the process chamber 10 ) From the process gas is exhausted to the scrubber 40 through the vacuum pump 20. On the other hand, the back pressure shut-off valve 100 removes the vacuum suction force directed to the vacuum pump 20 from the process chamber 10, as shown in FIG. 2B when the operation of the vacuum pump 20 is stopped or a failure occurs. Due to the resulting differential pressure, the blocking unit 130 expands (rises).

Moreover, as the elastic corrugated pipe 131 expands (elongates/rises) more rapidly by the restoring force of the elastic corrugated pipe 131, the blocking plate 132 comes into contact with the inclined surface 116 of the valve body 110 and the hollow 111 It is blocked. Accordingly, the process gas does not flow back from the vacuum pump 20 to the process chamber 10, and thus the inside of the process chamber 10 and the wafer/substrate are safely protected from contaminants.

That is, when the operation of the vacuum pump 20 is stopped and/or when a failure occurs, the back pressure shut-off valve 100 according to the embodiment of the present invention causes the process gas to flow back through the process chamber 10 and the wafer/substrate. Make sure that your back is not contaminated.

In particular, the back pressure shut-off valve 100 according to an embodiment of the present invention does not simply operate the shut-off part 130 in the valve body 110 by differential pressure, but the restoring force of the bellows-shaped shut-off part 130. By adding a closing force, a faster motion is possible. For example, but not limited to, the back pressure shut-off valve 100 according to an embodiment of the present invention operates within approximately 0.2 seconds when the vacuum pump 20 stops operating or when a failure occurs, compared to the conventional back pressure shut-off valve. It has a much faster operation speed.

3A and 3B are cross-sectional views showing the configuration and operation of a back pressure shut-off valve 200 according to another embodiment of the present invention.

3A and 3B, the back pressure shut-off valve 200 according to the embodiment of the present invention is similar to the back pressure shut-off valve 100 shown in FIGS. 2A and 2B. Therefore, the explanation will be focused on the difference.

The back pressure shut-off valve 200 according to the embodiment of the present invention also has a support body 120 having a plurality of exhaust holes 121 formed between the expansion pipe 112 and the lower connection pipe 114 of the valve body 110. It is coupled to the stepped 115, the blocking portion 230 is installed on the support body 120.

As an example, but not limited to, the blocking unit 230 may include an outer diameter tube 231 and a blocking plate 232. The outer diameter pipe 231 is installed on the upper outer diameter surface of the support body 120 and can be elevated along the outer diameter surface. The blocking plate 232 is formed integrally with the outer diameter pipe 231 on the outer diameter pipe 231 to generally block the upper portion of the support body 120, in particular, to block or open the hollow 111 of the valve body 110 . The blocking plate 232 may also include an inclined upper surface 233 that is substantially parallel to the inclined surface 116 or having the same angle as the inclined surface 116.

The blocking unit 230 including the outer diameter tube 231 and the blocking plate 232 may also have a conical shape or a triangular conical shape, but is not limited thereto.

In this way, the back pressure shut-off valve 200 according to an embodiment of the present invention is a vacuum suction force directed from the process chamber 10 to the vacuum pump 20 as shown in FIG. 3A during normal operation of the vacuum pump 20. By this, the blocking unit 230 is lowered. That is, as the outer diameter pipe 231 of the blocking part 230 moves downward along the outer diameter surface of the support body 120, the blocking plate 232 is spaced apart from the inclined surface 116 of the valve body 110 and is hollow ( 111 is opened, whereby the process gas is exhausted from the process chamber 10 to the scrubber 40 through the vacuum pump 20.

On the other hand, the back pressure shut-off valve 200 removes the vacuum suction force directed to the vacuum pump 20 from the process chamber 10 as shown in FIG. 3B when the operation of the vacuum pump 20 is stopped or when a failure occurs. Due to the resulting pressure difference, the blocking unit 230 is raised. That is, while the outer diameter pipe 231 of the blocking part 230 rises along the outer diameter surface of the support body 120, the blocking plate 232 comes into contact with the inclined surface 116 of the valve body 110 and thus the hollow 111 It is blocked. Accordingly, the process gas does not flow back to the process chamber 10 from the vacuum pump 20, and thus the inside of the process chamber 10 and/or the wafer/substrate are safely protected from contaminants.

4 and 5 are cross-sectional views showing the configuration of the back pressure shut-off valves 300 and 400 according to another embodiment of the present invention. Here, the back pressure shut-off valve 300 shown in FIG. 4 is similar to the back pressure shut-off valve 100 shown in FIG. 2A, and the back pressure shut-off valve 400 shown in FIG. 5 is a back pressure shut-off valve shown in FIG. 3B ( 200). Therefore, the explanation will be focused on the difference.

As shown in Figure 4, the back pressure shut-off valve 300 according to the embodiment of the present invention is on the inclined surface 116 formed at the boundary between the expansion pipe 112 and the upper connection pipe 113 of the valve body 110. It may further include an attached O-ring 301. Therefore, when the blocking part 130 is raised or lowered, the blocking plate 132 first contacts the O-ring 301 and then contacts the inclined surface 116, so that between the upper connection pipe 113 and the lower expansion pipe 112 The sealing power is further improved.

As shown in Figure 5, the back pressure shut-off valve 400 according to the embodiment of the present invention is a shut-off part 130, that is, an O-ring 401 attached to the boundary area between the shut-off plate 132 and the outer diameter pipe 231. ) May be further included. Therefore, when the blocking part 130 is raised or lowered, the O-ring 401 first contacts the inclined surface 116, and then the blocking plate 132 comes into contact with the inclined surface 116 again, so that the upper connection pipe 113 and the lower The sealing force between the expansion pipes 112 is improved.

Here, the aforementioned O-rings 301 and 401 are not corroded by a process gas, and may be formed of Teflon having excellent elasticity, but the material of the O-rings 301 and 401 is not limited in the present invention.

6A and 6B are cross-sectional views showing the configuration and operation of a back pressure shut-off valve 500 according to another embodiment of the present invention, and FIG. 6C is a side view showing the structure of a camshaft.

Here, as shown in FIGS. 6A and 6B, the back pressure shut-off valve 500 according to an embodiment of the present invention is similar to the back pressure shut-off valve 100 shown in FIGS. 2A and 2B. Therefore, the explanation will be focused on the difference.

6A and 6B, the back pressure shut-off valve 500 according to the embodiment of the present invention may further include a shaft 534 and a cam 535 in the shut-off part 530. That is, the shaft 534 passes through the valve body 110 and the support body 120 in the horizontal direction. In addition, the cam 535 is installed on the shaft 534 which is the lower part of the blocking part 130. As shown in FIG. 6C, for example, the cam 535 has a substantially elliptical shape, and the shaft 534 is eccentrically coupled to one side of the cam 535. In addition, at one end of the shaft 534, that is, the shaft 534 outside the valve body 110, a drive gear 536 capable of rotating the shaft 534 manually or by an electric motor (not shown) is additionally added. Can be installed.

In this way, as shown in FIG. 6A, when the shaft 534 rotates in one direction, the surface of the cam 535 (for example, the upper surface) is removed from the blocking plate 132. It is spaced apart, and accordingly, the blocking plate 132 is separated from the inclined surface 116 of the valve body 110 so that the hollow 111 of the valve body 110 is eventually opened. However, as shown in FIG. 6B, when the shaft 534 further rotates in one direction, the back pressure shutoff valve 500 contacts the blocking plate 132 with the surface (eg, the upper surface) of the cam 535 Thus, the blocking plate 132 is pushed upward, and accordingly, the blocking plate 132 is in close contact with the inclined surface 116 of the valve body 110 so that the hollow 111 of the valve body 110 is eventually blocked.

Therefore, the back pressure shut-off valve 500 according to the embodiment of the present invention can open or close the hollow 111 of the valve body 110 by rotating the shaft 534 manually or automatically. In addition, accordingly, the back pressure shut-off valve 500 may be used as a conventional vacuum gate valve.

Of course, a sealing structure (not shown) is applied to a region where the shaft 534 and the valve body 110 overlap each other, so that process gas does not flow out through the overlapping region.

7 is a cross-sectional view showing the configuration of a back pressure shut-off valve 600 according to another embodiment of the present invention. Here, as shown in FIG. 7, the back pressure shutoff valve 600 according to an embodiment of the present invention is similar to the back pressure shutoff valve 500 shown in FIGS. 6A and 6B. Therefore, the explanation will be focused on the difference.

As shown in FIG. 7, the back pressure shut-off valve 600 according to the embodiment of the present invention includes a shaft 534 having a first gear 635 and a second gear 636 in the shut-off part 630. It may include. That is, the shaft 534 penetrates the valve body 110 and the support body 120 in the horizontal direction, and among these shafts 534, the first gear 635 is substantially located below the blocking part 130 in the horizontal direction. Installed. In addition, the second gear 636 is installed in a vertical direction under the blocking portion 130 while being coupled to the first gear 635. Here, the first gear 635 and the second gear 636 may be, for example, but not limited to, any one selected from a worm gear, a bevel gear, a helical gear, and equivalents thereof.

Due to the coupling structure of the first gear 635 and the second gear 636, when the shaft 534 and the first gear 635 rotate in one direction, the second gear 636 descends, and the shaft 534 ) And the first gear 635 rotate in the other direction, the second gear 636 rises.

In this way, when the shaft 534 rotates in one direction, the second gear 636 coupled to the first gear 635 descends, and accordingly, the blocking plate 132 is the inclined surface 116 of the valve body 110 ), and eventually the hollow 111 of the valve body 110 is opened. However, when the shaft 534 rotates in the other direction, the second gear 636 coupled to the first gear 635 rises, and accordingly, the blocking plate 132 rises in the upper direction and the blocking plate 132 It is in close contact with the inclined surface 116 of the valve body 110 and eventually the hollow 111 of the valve body 110 is closed.

The back pressure shut-off valve 600 according to an embodiment of the present invention can open or close the hollow 111 of the valve body 110 by rotating the shaft 534 manually or automatically. Accordingly, the back pressure shut-off valve 600 may be used as a conventional vacuum gate valve.

8 is a cross-sectional view showing the configuration of a back pressure shut-off valve 700 according to another embodiment of the present invention.

As shown in Figure 8, the back pressure shut-off valve 700 according to the embodiment of the present invention may further include a pressure pipe 735, a solenoid valve 736, and a cylinder 737 in the shut-off unit 730. have. In addition, the blocking part 730 may further include a support base 738.

The pressure pipe 735 passes through the valve body 110 and the support body 120, and an end thereof is located under the blocking portion 130. In addition, the solenoid valve 736 is installed in the pressure pipe 735 outside the valve body 110 so that pneumatic and/or hydraulic pressure is provided or recovered through the pressure pipe 735. The cylinder 737 is connected to the pressure pipe 735 and is installed below the blocking portion 130. In addition, the support base 738 includes a plurality of exhaust holes (not shown), and is coupled to the support body 120 to support the cylinder 737.

In this way, when the solenoid valve 736 operates in one direction to provide pressure to the pressure pipe 735, the cylinder 737 rises, and accordingly, the blocking plate 132 moves in the upper direction, and the blocking plate ( 132 is in close contact with the inclined surface 116 of the valve body 110, and eventually the hollow 111 of the valve body 110 is closed. In addition, when the solenoid valve 736 operates in the other direction and the pressure is released/recovered from the pressure pipe 735, the cylinder 737 descends, and accordingly, the blocking plate 132 moves downward, and the blocking plate ( 132 is spaced apart from the inclined surface 116 of the valve body 110, and accordingly, the blocking plate 132 moves downward, so that the blocking plate 132 is spaced apart from the inclined surface 116 of the valve body 110 As a result, the hollow 111 of the valve body 110 is opened.

In the back pressure shut-off valve 700 according to the embodiment of the present invention, the cylinder 737 is raised or lowered according to the control of the solenoid valve 736, so that the shut-off part 730 is the hollow 111 of the valve body 110. May be closed or opened, and accordingly, the back pressure shut-off valve 700 can be used as a normal vacuum gate valve by an automatic control system or the like.

9 is a cross-sectional view showing the configuration of a back pressure shut-off valve 800 according to another embodiment of the present invention.

9, in the back pressure shut-off valve 800 according to the embodiment of the present invention, in the shut-off part 530, the drive gear 536 is coupled to one end of the shaft 534, and the drive gear ( The rotation shaft 812 of the electric motor 811 may be coupled to 536. Accordingly, the rotation shaft 812 of the electric motor 811 may be rotated in a forward direction or in a reverse direction by an electrical signal from a control system (not shown). Accordingly, the back pressure shut-off valve 800 according to an embodiment of the present invention may be opened and closed by control of the control system.

The back pressure shut-off valve 800 according to the embodiment of the present invention raises or lowers the cam 535 according to the control of the electric motor 811, so that the shut-off portion 530 is formed in the hollow 111 of the valve body 110. ) Can be closed or opened, and accordingly, the back pressure shut-off valve 800 can be used as a normal vacuum gate valve by an automatic control system or the like. Such an electric motor 811 may be equally applied to the back pressure shut-off valve 600 shown in FIG. 7.

What has been described above is only one embodiment for implementing the back pressure shut-off valve according to the present invention, and the present invention is not limited to the above-described embodiment, and the subject matter of the present invention is as claimed in the claims below. Without departing from it, anyone of ordinary skill in the field to which the present invention pertains will have the technical spirit of the present invention to the extent that various changes can be implemented.

100-800; Back pressure shut-off valve according to an embodiment of the present invention
10; Process chamber 20; Vacuum pump
30a, 30b; Piping 40; Scrubber
110; Valve body 111; Hollow
112; Extension pipes 113 and 114; Upper and lower connector
113a; 114b; Flange 115; Step
116; Slope 120; Support body
121; Exhaust hole 130; Blocking
131; Elastic corrugated pipe 132; Blocking plate
133; Top surface 230 of the blocking plate; Blocking
231; Outer view tube 232; Blocking plate
233; Upper surfaces 301 and 401 of the blocking plate; O-ring
530; Blocking part 534; shaft
535; Cam 536; Drive gear
630; Blocking part 635; First gear
636; Second gear 730; Blocking
735; Pressure tube 736; Solenoid valve
737; Cylinder 738; Support base
811; Electric motor 812; Rotating shaft

Claims (15)

A valve body having a hollow installed between the process chamber and the vacuum pump;
A support body coupled to the hollow of the valve body and having at least one exhaust hole; And
It is installed on the support body and descends when the vacuum pump is operated to exhaust the process gas through the hollow of the valve body and the exhaust hole of the support body, and rises when the vacuum pump is stopped to block the hollow of the valve. It includes a blocking part,
The blocking part
A flexible elastic corrugated pipe installed on the support body; And
It is formed on the upper end of the elastic corrugated pipe and includes a blocking plate to block or open the hollow,
The elastic corrugated pipe is in the form of a tube whose sides are sealed and the top and bottom are open,
The elastic corrugated pipe is contracted by a vacuum suction force directed from the process chamber to the vacuum pump, and is formed to expand by a differential pressure according to removal of the vacuum suction force and a restoring force of the elastic corrugated pipe. delete delete The method of claim 1,
The back pressure shut-off valve, characterized in that the shut-off portion is formed of Teflon or metal. delete The method of claim 1,
The blocking part
The back pressure shut-off valve further comprising an O-ring formed on an inner diameter surface of the hollow portion of the valve body or an outer diameter surface of the shut-off plate. The method of claim 1,
The blocking part
A shaft passing through the valve body and the support body; And
And a cam installed on the shaft to raise the blocking plate by contacting the blocking plate according to the rotation of the shaft, or to lower the blocking plate by being spaced apart from the blocking plate. The method of claim 1,
The blocking part
A shaft passing through the valve body and the support body and having a first gear; And
And a second gear coupled to the first gear of the shaft to raise the blocking plate by contacting the blocking plate or to lower the blocking plate by being spaced apart from the blocking plate. The method according to claim 7 or 8,
The blocking part
Further comprising a drive gear coupled to the shaft,
The drive gear is manually rotated or a back pressure shut-off valve, characterized in that the rotation is coupled to the electric motor. The method of claim 8,
Wherein the first and second gears include a worm gear, a bevel gear, or a helical gear. The method of claim 1,
The blocking part
A pressure pipe passing through the valve body and the support body; And
And a cylinder connected to the pressure pipe to raise and lower the shutoff part according to the pressure of the pressure pipe. The method of claim 11,
The blocking part
A back pressure shut-off valve, further comprising a support base for supporting the cylinder, wherein the support base is installed in the hollow of the valve body with a plurality of exhaust holes formed. The method of claim 1,
The back pressure shut-off valve, characterized in that the cut-off portion has a cone shape or a triangular cone shape. The method of claim 1,
The valve body further comprises a support stepped on the hollow inner diameter surface so that the support body is coupled and supported. The method of claim 1,
The valve body further comprises an inclined surface formed such that the blocking portion is in close contact or spaced apart from the inner diameter surface of the hollow.

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