KR102211619B1 - Exhaust damper for semiconductor facilities - Google Patents

Abstract

The present invention is an exhaust damper for a semiconductor facility, wherein the exhaust damper for a semiconductor facility according to an embodiment of the present invention is an exhaust damper for a semiconductor facility that is connected between the semiconductor facility and an exhaust line to control the amount of air. A damper body having an internal flow path, a handle coupled to the damper body so as to be rotatable, and rotated within the damper body by the handle within a set angle range, and opening and closing the internal flow path in response to the rotated angle And an air volume control member for adjusting the opening size in multiple stages, an angle fixing member that penetrates the handle and is fastened to the damper body to restrain the rotational motion of the handle, and maintains the angle at which the air volume control member rotates, the damper body. And a handle fixing member connecting the center of the handle and the center of rotation of the air volume control member through the hole, and a socket coupled to both ends of the damper body and to which pipes constituting an exhaust line are connected.

Description

Exhaust damper for semiconductor equipment {EXHAUST DAMPER FOR SEMICONDUCTOR FACILITIES}

The present invention relates to an exhaust damper for a semiconductor facility, and to an exhaust damper for a semiconductor facility capable of controlling an amount of air passing through an exhaust line used in a semiconductor facility.

In the semiconductor manufacturing process, various gases such as hydrogen gas, helium gas, and nitrogen gas, and various chemical substances such as silanes, acids, bases, and arsenic compounds are used.

Therefore, in order to prevent corrosion of semiconductor equipment or direct damage to products, it is necessary that the above gases or chemical substances are properly discharged after use.

For this reason, a vacuum pressure exhaust line is provided in the reaction chamber, and residual gases in the reaction chamber are configured to be forcibly discharged through the exhaust line by the vacuum pressure of the vacuum pump.

The exhaust damper is a device installed in the exhaust line to control the exhaust pressure. The exhaust pressure is controlled by the exhaust damper, so that gases or chemicals can be discharged smoothly.

However, in the conventional exhaust damper, it is difficult to precisely control the air volume of the gas passing through the exhaust line into several stages.

Furthermore, the conventional exhaust damper has difficulty in continuously maintaining a state in which the internal flow path is 100% open due to vibration generated by gas flow or shock applied from an external operator.

Even, in the conventional exhaust damper, both ends of the damper body to which the pipe is connected are structurally weak, so there is a problem with a short endurance.

Further, the conventional exhaust damper has a problem in the coupling structure of the air volume control member installed to open and close the inner flow path of the damper body, and thus there is a problem such as gas leakage or noise.

As a prior art related to the present invention, Korean Laid-Open Patent Publication No. 10-2008-0070260 (published on July 30, 2008), and the prior document discloses an exhaust damping device for a semiconductor facility.

However, the exhaust damping device of the semiconductor facility disclosed herein can be operated only by forced manipulation of the handle, so that valve malfunction is essentially prevented, and there is no suggestion of a means for continuously maintaining a 100% open state.

In addition, the prior literature does not present any means for precisely controlling the air volume of gas by dividing it into several stages, nor does it suggest any means for preventing gas leakage and noise generation.

It is an object of the present invention to provide an exhaust damper for a semiconductor facility capable of precisely controlling the air volume of a gas passing through an exhaust line used in a semiconductor facility into several stages.

It is an object of the present invention to provide an exhaust damper for a semiconductor facility in which the fully open state is not arbitrarily changed even when a vibration or external shock due to a gas flow is applied since the exhaust damper can be kept 100% open.

An object of the present invention is to provide an exhaust damper for a semiconductor facility in which durability is improved by increasing the contact strength between the pipe and the exhaust damper while structurally reinforcing both ends of a damper body to which a pipe is connected.

An object of the present invention is to provide an exhaust damper for a semiconductor facility that prevents gas leakage or noise caused by a gap or the like during coupling by improving a coupling structure of an air volume control member installed to open and close an inner flow path of a damper body.

The objects of the present invention are not limited to the above-mentioned objects, and other objects and advantages of the present invention that are not mentioned can be understood by the following description, and will be more clearly understood by examples of the present invention. In addition, it will be easily understood that the objects and advantages of the present invention can be realized by the means shown in the claims and combinations thereof.

According to an embodiment of the present invention, there is provided an exhaust damper for a semiconductor facility capable of precisely controlling an air volume of gas passing through an exhaust line used in a semiconductor facility by dividing it into several stages.

An exhaust damper for a semiconductor facility according to an embodiment of the present invention is an exhaust damper for a semiconductor facility connected between the semiconductor facility and an exhaust line to control an air volume, comprising: a damper body having an internal flow path for the flow of exhaust gas; A handle rotatably coupled to the upper portion of the damper body; An air volume control member that rotates within the damper body by the handle in a set angle range, and adjusts the opening and closing size of the inner flow passage in multiple stages according to the rotated angle; An angle fixing member that penetrates the handle and is fastened to the damper body to restrain a rotational motion of the handle, and maintains an angle at which the air volume control member rotates; A handle fixing member passing through the damper body and connecting the center of the handle and the rotation center of the air volume control member; And a socket coupled to both ends of the damper body and to which pipes constituting an exhaust line are connected.

The damper body, a tubular housing in which the inner flow path is formed along a hollow; An expansion part provided at both ends of the tubular housing, the inner diameter of which is expanded, and at least a part of the socket is inserted; And a protrusion protruding from the top of the tubular housing and to which the handle is coupled.

In addition, a corrugation protrusion is provided on an outer circumferential surface of the tubular housing, and a plurality of corrugation protrusions may be formed spaced apart at a set interval along the longitudinal direction of the tubular housing.

Further, the protrusion may include a protruding block protruding at a predetermined height above the tubular housing and having a flat upper surface; A through-hole formed through the center of the flat upper surface of the protruding block along the height direction of the protruding block to fasten the handle fixing member; And a first screw groove positioned on a flat upper surface of the protruding block, and after rotating the air volume control member to a set angle, the angle fixing member is fastened through an arc long hole of the handle to block rotation of the handle. Includes;

In addition, the arc long hole may be cut into an arc shape so as to have a central angle of at least 90 degrees around the through portion.

In addition, a plurality of angle adjustment grooves are provided on the rear surface of the handle, each of the plurality of angle adjustment grooves is spaced apart in an arc shape along the arc long hole, and the plurality of angle adjustment grooves are formed on a flat upper surface of the protruding block. It is fitted to at least one of the air volume control protrusion for adjusting the rotation angle of the handle may be provided.

In addition, the protrusion is located on the opposite side of the first screw groove based on the through part, and after rotating the air volume control member so that the inner flow path is completely open, the angle fixing member is used for completely opening the handle. It further includes; a second screw groove fastened through the hole.

In addition, the handle includes a handle body provided with a first circumferential protrusion along a circular rim; An outer diameter expansion portion having an outer diameter extended compared to the handle body in correspondence with the circular long hole, and having a second circumferential protrusion along a circular edge; And a fixing part positioned at the center of the handle body and penetrating to fasten the handle fixing member to an upper end of the air volume control member.

In addition, the air volume control member has a size capable of opening and closing the inner flow path, the air volume control plate is supported by inserting a connection protrusion at the lower end of the damper body; A lower end is assembled with an upper end of the air volume control plate, and an upper end is a handle assembly body fixed to the handle; It is fastened to a screw hole passing through the side of the handle assembly body, a PVC bolt fixing between the upper end of the air volume control plate and the handle assembly body; and includes.

In addition, the handle assembly body, a lower coupling portion having a coupling groove to be assembled with the air volume control plate; A central insertion part connected to the upper part of the lower coupling part, inserted through the protrusion of the damper body, and spaced apart from a plurality of O-rings at a predetermined height along an outer circumferential surface; And an upper connection part connected to the upper part of the central insertion part and fitted to the fixing part of the handle, and having a square cross-sectional shape corresponding to the shape of the fixing part.

In addition, the air volume control plate has a disk shape corresponding to the diameter of the inner flow path, and the air volume control plate has an edge reinforcement portion having an increased thickness along the edge, and the thickness increases at an upper end assembled to the lower coupling portion. The upper reinforcement portion, the vertical reinforcement portion having a thickness increased along the rotation center of the air volume control plate, and a horizontal reinforcement portion having an increased thickness in a direction crossing the vertical reinforcement portion may be provided. The connection part between the upper reinforcement part and the lower coupling part is a part where the load can be relatively concentrated when the handle rotates repeatedly, so structural reinforcement is required. In addition, the vertical reinforcement portion has an advantage that the thickness increases along the rotation center of the air volume control plate, so that the rotation center is relatively structurally reinforced to improve durability, and the horizontal reinforcement portion is further formed in a direction orthogonal to the vertical reinforcement portion. The effect of structurally reinforcing can be improved.

In addition, the angle fixing member includes a plurality of grips protruding through a central angle of 90 degrees, and is provided at the lower end of the grip body and is provided at the lower end of the grip body and is inserted into the grip body to enable screw fastening. Including a screw portion, the handle fixing member includes a hemispherical body portion injection-molded into a hemispherical shape, and a fastening screw portion provided at a lower end of the hemispherical body portion and inserted into the hemispherical body portion so as to be screwed.

In addition, the socket, the pipe insertion portion is provided through an inner diameter into which the pipe is inserted, the outer diameter is inserted into the inside of the expansion portion, the socket body including a bonding portion bonded to the expansion portion; A rim protrusion formed at an outer end of the socket body; And a welding portion formed to be inclined at the inner end of the rim protrusion and welded to the expansion portion. Through the expansion part of the damper body, the bonding part of the socket is bonded and inserted, and then welded to the contact area between the rim protrusion and the expansion part to form an additional welding part, thereby enhancing the reliability of the product and suppressing damage and structural weakness. I can reinforce it further.

According to the present invention, it is possible to precisely control the air volume of the gas passing through the exhaust line used in semiconductor equipment by dividing it into several stages. For example, by gradually adjusting the rotation angle of the air volume control member blocking the internal flow path of the exhaust damper by a predetermined angular displacement, the opening of the internal flow path may be gradually expanded or reduced. Accordingly, the operator can precisely control and control the flow of gas passing through the exhaust line by opening the internal flow path of the exhaust damper at a required opening ratio.

In addition, according to the present invention, it is possible to continuously maintain the state in which the exhaust damper is 100% open, so that even when vibration or external shock due to gas flow is applied, there is an advantage that the fully open state is not arbitrarily changed. If there is a need to keep the exhaust damper inner flow path 100% open, the angle adjusting member can be fastened to the open nut for fully open maintenance. Accordingly, even when vibrations due to gas flow occur or when an external shock is applied to the handle due to an accidental hit by an operator, the handle does not rotate arbitrarily, so that a completely open state of the internal flow path of the exhaust damper can be maintained.

Further, according to the present invention, while structurally reinforcing both ends of the damper body to which the pipe is connected, the contact strength between the pipe and the exhaust damper can be increased, thereby improving durability.

In addition, according to the present invention, by improving the coupling structure of the air volume control member installed to open and close the inner flow path of the damper body, it is possible to prevent gas leakage or noise caused by a gap during coupling.

In addition to the above-described effects, specific effects of the present invention will be described together while describing specific details for carrying out the present invention.

1 is a schematic perspective view of an exhaust damper for a semiconductor facility according to an embodiment of the present invention.
2 is a schematic front view of an exhaust damper for a semiconductor facility according to an embodiment of the present invention.
3 is a schematic plan view of an exhaust damper for a semiconductor facility according to an embodiment of the present invention.
4 is a side view schematically showing an exhaust damper for a semiconductor facility according to an embodiment of the present invention.
5 is a schematic perspective view and a partial enlarged view of a damper body among exhaust dampers for semiconductor facilities according to an embodiment of the present invention.
6 is a schematic perspective view of a handle among exhaust dampers for semiconductor equipment according to an embodiment of the present invention.
7 is a rear view schematically showing a handle of an exhaust damper for a semiconductor facility according to an embodiment of the present invention.
8 is a schematic perspective view of a socket among exhaust dampers for semiconductor equipment according to an embodiment of the present invention.
9 is a schematic front view and a partial enlarged view of a socket among exhaust dampers for semiconductor facilities according to an embodiment of the present invention.
10 is a schematic perspective view of an air volume control member among exhaust dampers for semiconductor facilities according to an embodiment of the present invention.
11 is a front view briefly showing an air volume control member among exhaust dampers for semiconductor facilities according to an embodiment of the present invention.
12 is a side view schematically showing an air volume control member among exhaust dampers for semiconductor facilities according to an embodiment of the present invention.
13 is a schematic perspective view of an angle adjusting member among exhaust dampers for semiconductor facilities according to an embodiment of the present invention.
13 is a schematic perspective view of an angle adjusting member among exhaust dampers for semiconductor facilities according to an embodiment of the present invention.
14 is a schematic perspective view of a damper fixing member among exhaust dampers for semiconductor facilities according to an embodiment of the present invention.
15 is a state diagram using an exhaust damper for a semiconductor facility according to an embodiment of the present invention.
16 is a partially enlarged view showing a connection portion between a damper body and a socket among exhaust dampers for semiconductor equipment according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings so that those skilled in the art can easily implement the present invention. The present invention may be implemented in various different forms, and is not limited to the embodiments described herein.

In order to clearly describe the present invention, parts irrelevant to the description have been omitted, and the same reference numerals are assigned to the same or similar components throughout the specification. In addition, some embodiments of the present invention will be described in detail with reference to exemplary drawings. In adding reference numerals to elements of each drawing, the same elements may have the same numerals as possible even if they are indicated on different drawings. In addition, in describing the present invention, when it is determined that a detailed description of a related known configuration or function may obscure the subject matter of the present invention, a detailed description thereof may be omitted.

In describing the constituent elements of the present invention, terms such as first, second, A, B, (a), (b) may be used. These terms are only for distinguishing the component from other components, and the nature, order, order, or number of the component are not limited by the term. When a component is described as being "connected", "coupled" or "connected" to another component, the component may be directly connected or connected to that other component, but other components between each component It is to be understood that is "interposed", or that each component may be "connected", "coupled" or "connected" through other components.

In addition, in implementing the present invention, components may be subdivided and described for convenience of description, but these components may be implemented in one device or module, or one component may be a plurality of devices or modules. It can also be implemented by being divided into.

1 to 4 are a perspective view, a front view, a plan view, and a side view briefly showing an exhaust damper for a semiconductor facility according to an embodiment of the present invention.

The exhaust damper 1 for a semiconductor facility according to an embodiment of the present invention is a device that is connected between the semiconductor facility and an exhaust line to control the air volume.

As shown, the exhaust damper 1 for semiconductor equipment includes a damper body 100, a handle 200, an air volume control member 300, an angle fixing member 400, a handle fixing member 500, and a socket 600. ).

The damper body 100 is provided with an internal flow path 101 through a hollow and is formed to allow exhaust gas to flow through the internal flow path 101.

Specifically, the damper body 100 includes a tubular housing 110, an expansion pipe 120, and a protrusion 140.

The tubular housing 110 is a pipe-shaped member in which the inner flow path 101 is provided.

The illustrated tubular housing 110 has a pipe shape of a circular cross section, but is not limited thereto and can be changed into various shapes and sizes.

The expansion unit 120 is provided at both ends of the tubular housing 110 and has an expanded inner diameter compared to the tubular housing 110. A part of the socket 600 is inserted into the expansion part 120.

The protrusion 140 is a portion protruding upward of the tubular housing 110.

The protrusion 140 is disposed horizontally on the upper portion of the tubular housing 110 and a handle 200 installed to be rotatable is coupled.

Accordingly, the handle 200 is supported in contact with the upper surface of the protrusion 140 and can be stably rotated according to a user's manipulation.

In addition, it is preferable that the upper surface of the protrusion 140 has a flat shape in order to smoothly implement the rotational operation of the handle 200.

As a specific example, referring to FIG. 5, the protrusion 140 includes a protrusion block 141, a through part 143, a first screw groove 147, and a second screw groove 145.

The protruding block 141 refers to a rectangular parallelepiped protruding portion protruding a predetermined height from the top of the tubular housing 110, and the upper surface thereof is formed flat.

Accordingly, the handle 200 (refer to FIG. 4) is stably seated on the flat upper surface of the protruding block 141 and can be rotated according to the user's manipulation.

The through part 143 refers to a circular hole formed in the center of the flat upper surface of the protruding block 141.

The through part 143 penetrates along the height direction of the protrusion block 141, and as a result, may be formed to penetrate inside and outside the damper body 100.

The penetrating part 143 allows the handle fixing member 500 (see FIG. 4) to penetrate the handle 200 (see FIG. 4) and the protruding block 141, so that the handle fixing member 500 (see FIG. 4) passes through the damper body ( 100) Allows to be connected to the internal air volume control member (300, see FIG. 4).

The first screw groove 147 is located on a flat upper surface of the protruding block 141 and allows a fastening screw-shaped member such as a bolt to be screwed.

Specifically, the first screw groove 147 allows the angle fixing member 400 (see FIG. 4) to pass through the arcuate long hole 240 (see FIG. 6) of the handle 200 (see FIG. 6) to be fastened.

The user rotates the handle to rotate the air volume control member 300 (refer to FIG. 4) at a set angle. Thereafter, the user may penetrate the angle fixing member 400 (refer to FIG. 4) through the arcuate long hole 240 of the handle 200 and fasten it to the first screw groove 147.

Accordingly, the rotation operation of the handle is blocked, and the air volume control member 300 (refer to FIG. 4) maintains a state rotated at a set angle to maintain the set air volume control state.

In addition, the protrusion 140 further includes a second screw groove 145.

The second screw groove 145 allows the angle fixing member 400 (see FIG. 4) to pass through the hole 250 for completely opening the handle 200 (see FIG. 6) to be fastened.

The user rotates the air volume control member 300 (see FIG. 4) so that the inner flow path 101 (see FIG. 4) is completely opened by rotating the handle. Thereafter, the user may penetrate the angle fixing member 400 (see FIG. 4) through the hole 250 for completely opening the handle 200 to be fastened and fixed to the second screw groove 145.

Accordingly, the rotation operation of the handle is blocked, and the air volume control member 300 (see FIG. 4) can maintain a state in which the inner flow path 101 (see FIG. 4) is completely opened.

Meanwhile, the second screw groove 145 may be located on the opposite side of the first screw groove 147.

Specifically, the second screw groove 145 may be positioned on a flat upper surface of the protruding block 141 and may be positioned on the opposite side of the first screw groove 147 based on the through portion 143.

On the other hand, the air volume control protrusion 149 is provided on the flat upper surface of the protruding block 141.

The air volume adjustment protrusion 149 is fitted into at least one of a plurality of angle adjustment grooves 280 provided on the rear surface of the handle 200.

In other words, when the handle 200 is rotated, the air volume adjustment protrusion 149 is inserted into any one of the plurality of angle adjustment grooves 280, so that the user can measure the rotation angle of the handle 200, and the air volume adjustment member The rotation angle of 300 can be easily adjusted.

On the other hand, the outer circumferential surface of the tubular housing 110 is provided with a corrugated protrusion 130.

The corrugation 130 serves to structurally reinforce the tubular housing 110.

As a specific example, a plurality of corrugated protrusions 130 may be formed along the circumference of the tubular housing 110, and the plurality of corrugated protrusions 130 are formed in the longitudinal direction (ie, Y-axis direction) of the tubular housing 110. It is spaced apart at a set interval accordingly.

1 to 3, the three corrugations 130 are formed to be spaced apart at regular intervals, but the position, shape and number of the corrugations 130 may be appropriately changed according to the damper body 100. have.

The handle 200 is a member that is rotated from the top of the damper body 100. And in conjunction with the rotation operation of the handle 200, the air volume control member 300 rotates at a set rotation angle, and the inner flow path of the damper body 100 is opened and closed.

Referring to FIG. 1, the handle 200 has a handle body 210 provided with a first circumferential protrusion 211 along the rim, and the outer diameter thereof is expanded compared to the handle body 210 and a second circumferential protrusion 221 along the rim. ) Includes an outer diameter extension 220 provided.

Hereinafter, a detailed configuration of the handle 200 will be described in detail with reference to FIGS. 6 and 7.

6 and 7, the handle 200 includes a handle body 210, an outer diameter expansion part 220, a fixing part 230, an arc long hole 240, a hole for completely opening 250, an angle adjustment groove Includes 280.

The handle body 210 is a disk-shaped member, and a first circumferential protrusion 211 is provided along a circular rim.

The outer diameter expansion part 220 has an outer diameter that is extended compared to the handle body 210 in correspondence with the arc long hole 240. And the outer diameter expansion part 220 is provided with a second circumferential protrusion 221 along a circular circular border.

At this time, the first circumferential protrusion 211 is shown to have a larger shape than the second circumferential protrusion 221, but the opposite case is also possible and is not limited to the illustrated size.

In addition, the outer diameter expansion part 220 may have a shape in which the outer diameter is further expanded than the handle body 210 on the outside thereof in correspondence with the circular long hole 240.

The fixing part 230 is located at the center of the handle body 210 and is a portion formed through vertically to fasten the handle fixing member 500 (refer to FIG. 1) to the upper end of the air volume control member 300.

The fixing part 230 includes a circular groove 231 formed concave downward from the upper surface to insert the handle fixing member 500 (see FIG. 1), and a rectangular hollow penetrated in a square shape at the center of the circular groove 231 Including 233.

The square hollow 233 is a portion to which the upper connection portion 328 (see FIG. 10) of the handle assembly body 320 (see FIG. 10) constituting the air volume control member 300 (see FIG. 10) is coupled.

Accordingly, the handle fixing member 500 (see FIG. 1), the handle 200, and the air volume control member 300 (see FIG. 10) are connected to each other and are configured to rotate together.

The arc long hole 240 is cut in an arc shape so as to have a central angle of at least 90 degrees about the through portion 143 of the protruding block 140.

On the other hand, the hole for completely opening 250 refers to a circular hole formed by penetrating the handle body 210 in the thickness direction.

When the handle body 210 rotates to completely open the inner flow path 101 (see FIG. 4), the completely opening hole 250 is formed with the second screw groove 145 on the protruding block 141 (see FIG. 5). Are placed in the same position.

Accordingly, in a state in which the inner flow path 101 (see FIG. 4) of the damper body 100 (see FIG. 4) is completely open, the angle fixing member 400 (see FIG. 4) is a hole for completely opening provided in the handle 200 It may pass through 250 and be fastened to the second screw groove 145.

As a result, rotation of the handle 200 is blocked, and rotation of the air volume control member 300 (see FIG. 4) is also blocked, so that the inner flow path 101 (see FIG. 4) can be completely opened for a required time.

A plurality of angle adjustment grooves 280 are provided through the rear surface of the handle 200.

Specifically, the plurality of angle adjustment grooves 280 may be spaced apart in an arc shape along the arc long hole 240.

Accordingly, the air volume adjustment protrusion 149 on the protrusion block 141 (see FIG. 5) is inserted into any one of the plurality of angle adjustment grooves 280 after the rotation angle of the handle 200 is adjusted to Prevent rotation.

Accordingly, the angle between the plurality of angle adjustment grooves 280 is formed corresponding to the rotation angle of the air volume adjustment member 300 (see FIG. 10) adjustable through the handle 200.

The socket 600 allows pipes (P1, P2, see FIG. 15) constituting the exhaust line to be connected to the damper body 100.

The socket 600 is coupled to both ends of the damper body 100 to structurally reinforce the connection portion between the pipe and the damper body 100, while maintaining a more firmly fastened state with each other using bonding and welding.

8 and 9, the socket 600 includes a socket body 610, a rim protrusion 630, and a welding portion 631.

The socket body 610 has a pipe insertion portion 620 into which a pipe (P1, P2, see FIG. 15) is inserted through an inner diameter.

In addition, the outer diameter of the socket body 610 is inserted into the inside of the expansion portion 120. A bonding portion 611 that is bonded to the expansion portion 120 is further provided on an outer circumferential surface surrounding the outer diameter of the socket body 610.

The rim protrusion 630 is formed at the outer end of the socket body 610. 8 and 9, the rim protrusion 630 further includes a plurality of rim protrusions 632 and 633 whose outer diameter is reduced toward the outside. Through this, structural reinforcement of the pipe insertion portion 620 is reinforced, and durability may be increased.

The welding part 631 is a part formed to be inclined at the inner end of the rim protrusion 630 and refers to a part where welding is performed at a position in contact with the expansion part 120.

As such, according to an embodiment of the present invention, pipes (P1, P2, see FIG. 15) are inserted into both ends of the damper body 100 using the socket 600 as shown in FIG. 15, and the bonding part 611 ) And the welding part 631 are formed at the same time to prevent damage and the like. Accordingly, there is an advantage in that the reliability of the product is improved.

The air volume control member 300 rotates within the damper body 100 in a set angle range in conjunction with the rotation operation of the handle 200 and controls the air volume of the exhaust gas flowing through the internal flow path 101.

In other words, the air volume control member 300 is installed in the damper body 100 in a size capable of opening and closing the inner flow path 101.

In addition, the air volume control member 300 controls the opening and closing of the inner flow path 101 in response to the rotated angle, or divides the opening size into several stages to adjust multiple stages.

10 to 12 are perspective views, front views, and side views of the air volume control member 300 according to an embodiment of the present invention.

As shown, the air volume control member 300 includes an air volume control plate 310, a handle assembly body 320, and a PVC bolt 330.

The air volume control plate 310 is a disk-shaped member having a size capable of opening and closing the inner flow path 101 (see FIG. 4 ).

A connection protrusion 317 is provided at the lower end of the air volume control plate 310.

The connection protrusion 317 is inserted into the lower inner side of the damper body 100 and serves to support the air volume control plate 310 from the lower side. In other words, the connection protrusion 317 becomes a rotation center when the air volume control plate 310 rotates.

The handle assembly body 320 is assembled with the air volume control plate 310 on the opposite side of the connection protrusion 317, that is, on the inner upper side of the damper body 100, and the connection projection 317 when the air volume control plate 310 rotates. It becomes the center of rotation with

To this end, the lower end of the handle assembly body 320 is assembled with the upper end of the air volume control plate 310. And the upper end of the handle assembly body 320 is fixed to the handle 200.

Specifically, the handle assembly body 320 includes a lower coupling portion 321, a central insertion portion 325, and an upper connection portion 328.

The lower coupling part 321 has a coupling groove 322 so as to be assembled with the air volume control plate 310. Accordingly, the upper portion of the air volume control plate 310 is inserted into the interior of the coupling groove 322 and is mutually fastened by the PVC bolt 330.

The central insertion part 325 is connected to the upper part of the lower coupling part 321.

The central insertion portion 325 is inserted through the protrusion 140 of the damper body 100, and a plurality of O-rings 326 and 327 are spaced apart from each other at a predetermined height interval along the outer circumferential surface.

Accordingly, it is possible to completely block the gas from leaking to the outside through the assembly portion of the handle assembly body 320 from the damper body.

The upper connection part 328 is connected to the upper part of the central insertion part 325.

The upper connection part 328 is fitted to the fixing part 230 of the handle 200 and has a shape that can be fitted to each other corresponding to the shape of the fixing part 230, in particular, a square hollow 233 (see FIG. 7). Accordingly, the upper connection portion 328 may have a rectangular planar shape corresponding to the rectangular hollow 233 (see FIG. 7 ).

The PVC bolt 330 is fastened to a screw hole 323 penetrating the side of the handle assembly body 320. Accordingly, the PVC bolt 330 is fixed between the upper end of the air volume control plate 310 and the handle assembly body 320.

Meanwhile, a detailed configuration of the air volume control plate 310 will be described with reference to FIG. 10.

As shown, the air volume control plate 310 may have a disk shape corresponding to the diameter of the inner flow path 101 (see FIG. 4 ).

In addition, the air volume control plate 310 may further include an edge reinforcing portion 311 having an increased thickness along a circular edge.

In addition, the air volume control plate 310 may further include an upper reinforcing part 312, a vertical reinforcing part 314, and a horizontal reinforcing part 315.

The upper reinforcing part 312 refers to a part with an increased thickness of the upper part assembled to the lower coupling part 321, and the vertical reinforcing part 314 is a part with increased thickness along the rotation center of the air volume control plate 310 Say.

In addition, the horizontal reinforcing portion 315 is a portion whose thickness is increased in a direction crossing the vertical reinforcing portion 314, and the center of the circle of the air volume control plate 310 is positioned at a point intersecting the vertical reinforcing portion 315.

The angle fixing member 400 maintains the angle at which the air volume control member 300 rotates.

To this end, the angle fixing member 400 penetrates the handle 200 and is fastened to the damper body 100, whereby the rotational motion of the handle 200 is restricted, and as a result, the air volume control member 300 does not rotate. To fix the rotation angle.

13 is a schematic perspective view of the angle fixing member 400.

Referring to FIG. 13, the angle fixing member 400 includes a grip body portion 410 and a fastening screw portion 420.

The grip body portion 410 includes four round-shaped grips protruding through a central angle of 90 degrees, and is molded by an injection method.

The fastening screw part 420 is provided at the lower end of the grip body part 410, and a screw thread is formed through the outer circumferential surface to enable screw fastening.

The fastening screw portion 420 may be inserted at the lower end of the grip body portion 410 when the grip body portion 410 is formed to have an integral structure with the grip body portion 410.

The angle fixing member 400 may be injection-molded of PP and ABS materials, and other materials having similar properties may be used.

The handle fixing member 500 penetrates the damper body 100 and connects the center of the handle 200 and the rotation center of the air volume control member 300.

14 is a schematic perspective view of the handle fixing member 500. Referring to FIG. 14, the handle fixing member 500 includes a hemispherical body portion 510 and a fastening screw portion 520.

The hemispherical body portion 510 is injection-molded in a hemispherical shape. In addition, the fastening screw portion 520 is provided at the lower end of the hemispherical body portion 510, and a screw thread is formed through the outer circumferential surface to enable screw fastening. For example, the fastening screw portion 520 may be inserted into the lower end of the hemispherical body portion 510 during injection molding of the hemispherical body portion 510 to have an integral structure with the hemispherical body portion 510.

The handle fixing member 500 may be injection-molded of PP and ABS materials, but other materials having similar properties may be used.

15 is a diagram illustrating a state of use of an exhaust damper for semiconductor equipment according to an embodiment of the present invention.

Referring to FIG. 15, in the exhaust damper 1 for semiconductor equipment according to an embodiment of the present invention, a damper body 100 is located in the center, and a handle 200 and an angle adjustment member ( 400), a handle fixing member 500 is disposed.

In addition, the air volume control member 300 is rotatably installed in the damper body 100 to open and close the inner flow path and adjust the opening size.

Meanwhile, sockets 600 are respectively coupled to both ends of the damper body 100 in the longitudinal direction, and the pipes P1 and P2 are firmly connected through the socket 600.

16 is a partially enlarged view showing a connection portion between a damper body and a socket among exhaust dampers for semiconductor equipment according to an embodiment of the present invention.

Referring to FIG. 16, the damper body 100 includes a tubular housing 110 and expansion portions 120 positioned at both ends thereof. The socket 600 is inserted into the expansion part 120, and when inserted, a bonding part 611 is formed through a portion that contacts the expansion part 120.

In addition, a welding portion 631 is further formed in the region B where the inner side of the rim protrusion 630 of the socket 600 and the expansion portion 120 contact sideways.

In this way, bonding and welding are performed together to improve product reliability.

As described above, according to the configuration and operation of the present invention, there is an advantageous technical effect that can precisely control the air volume of the gas passing through the exhaust line used in semiconductor equipment by dividing it into several steps.

For example, by gradually adjusting the rotation angle of the air volume control member blocking the internal flow path of the exhaust damper by a predetermined angular displacement, the opening of the internal flow path may be gradually expanded or reduced.

Accordingly, the operator can precisely control and control the flow of gas passing through the exhaust line by opening the internal flow path of the exhaust damper at a required opening ratio.

Further, since the exhaust damper can be kept 100% open, there is an advantageous technical effect that the fully open state is not arbitrarily changed even when vibration or external shock due to gas flow is applied.

If there is a need to keep the exhaust damper inner flow path 100% open, the rotation of the handle can be prevented in advance by fastening the angle adjustment member to the open nut for fully open maintenance.

Accordingly, it is possible to prevent the handle from rotating due to vibrations or external shocks caused by gas flow in a situation where the exhaust damper internal flow path needs to be completely opened, and thus the completely open state of the exhaust damper internal flow path can be continuously maintained for a required time.

Furthermore, while structurally reinforcing both ends of the damper body to which the pipe is connected, there is an advantageous technical effect of improving durability by increasing the contact strength between the pipe and the exhaust damper.

Further, by improving the coupling structure of the air volume control member installed to open and close the inner flow path of the damper body, it is possible to prevent gas leakage or noise from being caused by a gap that appears when the air volume control member is coupled.

As described above with reference to the drawings illustrated for the present invention, the present invention is not limited by the embodiments and drawings disclosed in the present specification, and various by a person skilled in the art within the scope of the technical idea of the present invention. It is obvious that transformation can be made.

1: exhaust damper
100: damper body
101: internal flow
110: tubular housing
120: expansion unit
130: wrinkles
140: protrusion
141: protruding block
143: through part
145: second screw groove
147: first screw groove
149: air volume control projection
200: handle
210: handle body
211: first circumferential projection
220: outer diameter extension
221: second circumferential projection
230: fixed part
231: circular groove
233: square hollow
240: circular longbow
250: hole for full opening
280: angle adjustment groove
300: air volume control member
310: air volume control plate
311: border reinforcement
312: upper reinforcement
314: vertical reinforcement
315: horizontal reinforcement
317: connecting projection
320: handle assembly body
321: lower coupling portion
322: mating groove
323: screw hole
325: central insert
326: first O-ring
327: second O-ring
328: top connection
329: screw groove
330: PVC bolt
400: angle fixing member
410: grip body
420: fastening thread
500: handle fixing member
510: hemispherical body part
520: fastening thread
600: socket
610: socket body
611: bonding unit
620: pipe insert
630: edging
631: weld

Claims (9)

As an exhaust damper for semiconductor facilities that is connected between the semiconductor facility and the exhaust line to control the air volume,
A damper body having an internal flow path for the flow of exhaust gas;
A handle rotatably coupled to the upper portion of the damper body;
An air volume control member that rotates within the damper body by the handle in a set angle range, and adjusts the opening and closing size of the inner flow channel in multiple stages corresponding to the rotated angle;
An angle fixing member that penetrates the handle and is fastened to the damper body to restrain a rotational motion of the handle, and maintains an angle at which the air volume control member rotates;
A handle fixing member passing through the damper body and connecting the center of the handle and the rotation center of the air volume control member; And
Includes; a socket coupled to both ends of the damper body and to which pipes constituting the exhaust line are connected,
The damper body includes a tubular housing in which the inner flow path is formed along a hollow, and an expansion portion provided at both ends of the tubular housing, and into which at least a part of the socket is inserted by expanding an inner diameter,
The socket is provided with a pipe insertion portion through an inner diameter into which the pipe is inserted, an outer diameter inserted into the expansion portion, a socket body including a bonding portion bonded to the expansion portion, and an outer end of the socket body An exhaust damper for a semiconductor facility comprising an edge protrusion formed, and a welding portion formed to be inclined at an inner end of the edge protrusion and welded to the expansion portion.
The method of claim 1,
The damper body,
A protrusion protruding from the top of the tubular housing and to which the handle is coupled;
Exhaust damper for semiconductor equipment further comprising a.
The method of claim 2,
A wrinkle protrusion is provided on the outer circumferential surface of the tubular housing,
The wrinkle protrusion,
A plurality of pieces are formed spaced apart at a set interval along the longitudinal direction of the tubular housing
Exhaust damper for semiconductor equipment.
The method of claim 2,
The protrusion,
A protruding block protruding a predetermined height above the tubular housing and having a flat upper surface;
A through-hole formed through the center of the flat upper surface of the protruding block along the height direction of the protruding block to fasten the handle fixing member; And
A first screw groove positioned on a flat upper surface of the protruding block, and after rotating the air volume control member to a set angle, the angle fixing member is fastened through an arc long hole of the handle to block rotation of the handle;
Exhaust damper for semiconductor equipment comprising a.
The method of claim 4,
The arc long hole,
The through part is cut in an arc shape to have a central angle of at least 90 degrees
Exhaust damper for semiconductor equipment.
The method of claim 4,
A plurality of angle adjustment grooves are provided on the rear surface of the handle,
Each of the plurality of angle adjustment grooves are spaced apart in an arc shape along the arc long hole,
The flat upper surface of the protruding block is fitted with at least one of the plurality of angle adjustment grooves, and an air volume adjustment protrusion for adjusting the rotation angle of the handle is provided.
Exhaust damper for semiconductor equipment.
The method of claim 4,
The handle,
A handle body having a first circumferential protrusion along a circular rim;
An outer diameter expansion portion having an outer diameter extended compared to the handle body in correspondence with the circular long hole, and having a second circumferential protrusion along a circular edge; And
A fixing part positioned at the center of the handle body and penetrating to fasten the handle fixing member to an upper end of the air volume control member;
Exhaust damper for semiconductor equipment comprising a.
The method of claim 1,
The air volume control member,
An air volume control plate having a size capable of opening and closing the inner flow path, wherein a connection protrusion at a lower end is inserted and supported in an inner lower portion of the damper body;
A lower end is assembled with an upper end of the air volume control plate, and an upper end is a handle assembly body fixed to the handle;
A PVC bolt that is fastened to a screw hole penetrating the side of the handle assembly body and fixes an upper end of the air volume control plate and the handle assembly body;
Exhaust damper for semiconductor equipment comprising a.
The method of claim 8,
The handle assembly body,
A lower coupling portion having a coupling groove to be assembled with the air volume control plate;
A central insertion portion connected to an upper portion of the lower coupling portion, inserted through the protrusion of the damper body, and spaced apart from a plurality of O-rings at a predetermined height along an outer peripheral surface; And
An upper connecting portion connected to the upper portion of the central insertion portion and fitted to the fixing portion of the handle, and having a square cross-sectional shape corresponding to the shape of the fixing portion;
Exhaust damper for semiconductor equipment comprising a.

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