KR102198808B1 - Capacitive leakage detection sensor having multi-layer structure - Google Patents

Abstract

The present invention relates to a leak detection sensor. More particularly, the present invention relates to a capacitive-type leak detection sensor having a multilayer structure in which flat films are laminated to detect a leaking liquid flowing between the films and to prevent an electrode for detection from being damaged by a chemical solution. To this end, according to the present invention, the leak detection sensor comprises: a lower film having a lower electrode formed on the upper side thereof in the longitudinal direction; an upper film on which an upper electrode is formed on a lower surface or an upper surface, a plurality of inlet holes are formed while having intervals in the longitudinal direction, and which is laminated on the upper side of the lower film; and a gap maintaining member formed of a mesh or porous plate and positioned between the lower film and the upper film to space the lower film and the upper film.

Description

Capacitive leakage detection sensor having multi-layer structure

The present invention relates to a leakage detection sensor, and in particular, a capacitive type having a multilayer structure in which a flat film is stacked to detect the leakage liquid flowing between the films and to prevent the electrode for detection from being damaged by a chemical solution. It relates to a leak detection sensor.

The leak detection sensor of Registration Patent No. 10-1571398 (leak detection device) registered by the present applicant uses a capacitive method of various leaking chemical solutions and uses conductive and non-conductive chemical solutions such as water, acids and alkalis, oils and organic solvents. It has a structure that senses, and the structure is "a base film made of a material having excellent corrosion resistance and chemical resistance; a conductive material is formed side by side in a pair at an interval from each other on the upper surface of the base film, And a conductive line forming a capacitance by means of "consisting of".

Accordingly, when a leaked liquid flows between adjacent conductive lines, water, conductive and non-conductive chemical solutions, and oil and organic solvents can be discriminated by a change in the capacitance value.

However, according to the prior art, since a pair of conductive lines formed on the base film is positioned on a plane, the area and spacing of the pair of conductive lines, that is, electrodes, are greatly affected.

In other words, since the capacitance value is proportional to the area of the pair of conductive lines and inversely proportional to the spacing, the change in capacitance value due to the leaked liquid is evident when the width of the conductive line is widened and the spacing is minimized. Although it is possible to discriminate the state of the leaked liquid and the type of the leaked liquid, since a pair of conductive lines are formed side by side on a plane in the prior art, it is not so easy to form a capacitance value by the leak between the conductive lines.

According to the prior art, in order to form a meaningful capacitance value, the width of the conductive line must be widened, but since the width of the sensor is increased by that amount, there is a limit to widening the width of the conductive line.

In addition, when the width of the conductive line is narrowed, it becomes difficult to form a capacitance value as mentioned above.

<Prior technical literature>

1. Registered Patent No. 10-1571398

(Leakage detection device)

In order to solve such a conventional problem, the present invention is to position the electrodes to face each other by stacking conductive lines, that is, films on which electrodes are formed, and insert a gap maintaining member capable of maintaining a gap between the stacked films. It provides a capacitive leak detection sensor having a multi-layered structure that allows the formation of accurate capacitance values and minimizing the size of the sensor by introducing the leaked liquid into the space between the films formed by the holding member. There is a purpose.

Capacitive leakage detection sensor having a multi-layer structure of the present invention for achieving the above object,

A film material having a length, the lower film having a lower electrode formed on an upper side thereof in a longitudinal direction;

A film material having a length, wherein an upper electrode is formed on a lower surface or an upper surface in a longitudinal direction, a plurality of inflow holes are formed while having an interval in the longitudinal direction, and an upper film is stacked on the upper side of the lower film;

It characterized in that it consists of; a gap maintaining member that is positioned in the longitudinal direction between the lower film and the upper film to separate the lower film and the upper film.

In addition, the gap maintaining member is formed of a porous plate material or a mesh material.

In addition, both sides of the lower film and the upper film are bonded to each other in the longitudinal direction, and the gap maintaining member is positioned at a portion where the lower film and the upper film are not bonded.

In the capacitive leakage detection sensor having a multi-layer structure according to the present invention, a gap maintaining member is positioned between the lower film and the upper film to maintain a gap facing the lower electrode and the upper electrode in the vertical direction. The capacitance value of the leakage liquid flowing through the upper film is accurately generated.

That is, as in the prior art, the conductive lines are not adjacent to each other in a plane, and the electrodes are opposed to each other at an interval in the vertical direction, thereby generating an accurate capacitance value by the leakage liquid flowing between the opposed electrodes.

In addition, since the sensor is formed flat even though the electrodes face each other by the structure of the present invention, it does not protrude when installed on the floor or wall, and since the electrodes face each other, the area of the electrode is not as wide as in the prior art. There is no need to reduce the size of the sensor, so installation is easy and manufacturing cost is reduced.

1 is a diagram showing the structure of a capacitive leak detection sensor having a multilayer structure according to the present invention.
Figure 2 is a cross-sectional view of the coupling of Figure 1;
Figure 3 is a view showing another form of the upper film.
4 is a diagram showing a structure of a lower electrode on which a capacitance pattern is formed;
5 is a diagram showing a structure of an upper electrode in which a capacitance pattern and an inlet hole are formed.
6 is a diagram showing the reduced graphene oxide that is positively charged and coated on the surface of the sensing line.
7 is a diagram showing negatively charged reduced graphene oxide.
8 is a diagram showing the initial charge distribution of a general sensor.
9 is a diagram showing the initial charge distribution of a sensing line including charged and reduced graphene oxide applied to the present invention.
10 is a diagram showing a charge distribution when a general sensor contacts harmful substances.
FIG. 11 is a diagram showing a charge distribution when a sensing line including charged and reduced graphene oxide contacts a harmful substance according to another embodiment of the present invention.

The above-described objects, features, and advantages will be described later in detail with reference to the accompanying drawings, and accordingly, one of ordinary skill in the art to which the present invention pertains will be able to easily implement the technical idea of the present invention.

In describing the present invention, if it is determined that a detailed description of known technologies related to the present invention may unnecessarily obscure the subject matter of the present invention, a detailed description will be omitted.

The terms used in the present invention have been selected from general terms that are currently widely used while considering functions in the present invention, but this may vary depending on the intention or precedent of a technician working in the field, the emergence of new technologies, and the like.

In addition, in certain cases, there are terms arbitrarily selected by the applicant, and in this case, the meaning of the terms will be described in detail in the description of the corresponding invention.

Therefore, the terms used in the present invention should be defined based on the meaning of the term and the overall contents of the present invention, not a simple name of the term.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

However, the embodiments of the present invention exemplified below may be modified in various forms, and the scope of the present invention is not limited to the embodiments described below.

The embodiments of the present invention are provided to more completely describe the present invention to those of ordinary skill in the art.

1 is a diagram showing the structure of a capacitive leak detection sensor having a multilayer structure according to the present invention, and FIG. 2 is a combined cross-sectional view of FIG.

The present invention is composed of a lower film 100, a gap maintaining member 200, an upper film 300.

The lower film 100 is a film made of materials such as PI, Teflon, etc., which have excellent acid resistance and chemical resistance, and a lower electrode 110 is formed on the upper surface in the longitudinal direction of the center thereof, and this lower electrode 110 is conductive. It may be printed by ink or formed by plating or sputtering with a conductive material such as copper, silver, or gold.

The lower electrode 110 is preferably formed of a material that has conductivity and does not corrode or dissolve in chemical solutions such as strong acids, weak acids, strong alkalis, weak alkalis, and the like.

That is, for semi-permanent and repeated use, the lower electrode 110 should be formed of a material having excellent acid resistance and chemical resistance while having conductivity, and the lower film 100 has a size of 2 to 3 cm in width, and the length is It has a length of several centimeters to tens of meters, and the width is preferably about 3 to 6 mm.

The lower electrode 110 is preferably formed of a metal material having excellent conductivity without causing damage such as corrosion by an acid or alkali component, and may be formed by stacking a plurality of metal layers.

To this end, the lower electrode 110 consists of three layers, and the lowermost first layer may be formed by an etching method, and the lower electrode 110 is formed with a copper foil layer formed on the entire upper surface of the lower film 100. 110) is masked, and the remaining copper foil is corroded to form a first layer of copper.

It is preferable that this first layer has a thickness of about 13 to 20 μm.

That is, if it is too thick, peeling can easily occur from the lower film 100, and if it is too thin, the second layer cannot be easily attached. Therefore, having a thickness of 13 to 20 μm has the best results experimentally.

In addition, the reason why the first layer is formed of a copper layer is that the third layer, which is the uppermost layer, is not directly attached to the lower film 100 by plating, so that the first layer is first formed of a copper layer.

On the upper side of the first layer, a second layer is stacked by a plating method, and the second layer is a nickel-copper layer having a thickness of about 1 to 15 μm, which is a gold layer forming the third layer. Since the first layer, the copper layer, is not immediately adhered to the upper surface of the copper layer by plating, a first layer, a copper layer, and a second layer, a nickel-copper layer that is well adhered by plating, are formed first.

Thereafter, a third layer of gold is laminated by plating to a thickness of 0.03 to 0.07 μm. This third layer is not directly attached to the copper layer, which is the first layer, by plating, but is plated on the nickel-copper layer, which is the second layer. It adheres well and is stacked.

In the end, in order to form the lower electrode 110 on the upper surface of the lower film 100 by plating a third layer of gold having excellent acid resistance, chemical resistance, and conductivity, the first layer and the second layer are sequentially formed. After lamination, a third layer of gold is deposited on the top layer by plating.

The upper film 300 has the same width and length as the lower film 100 and is made of a material such as PI or Teflon, which has excellent acid resistance and chemical resistance, and has an upper electrode ( 310) is formed, and the upper electrode 310 may be formed in the same manner as the lower electrode 110.

In addition, in the upper film 300, a plurality of inflow holes 330 are formed in a lengthwise direction in a portion where the upper electrode 310 is not formed while maintaining an interval.

Of course, the inlet holes 330 may be formed continuously in the longitudinal direction on both left and right sides around the upper electrode 310.

In another form, a pair of upper electrodes may be formed side by side while maintaining a gap, and a plurality of inlet holes 330 may be formed in the longitudinal direction at a location where the gap is formed.

Further, the upper electrode 310 may be formed on the upper surface of the upper film 300, but it is most preferably formed on the lower surface of the upper film 300 in order to minimize contamination or damage.

As shown in FIG. 2, bonding portions 500 and 510 are formed at both edges of the lower film 100 and the upper film 300 by thermal bonding, ultrasonic bonding, adhesive, or the like, and the lower electrode 110 The portion where the and upper electrodes 310 are formed are not joined to form the space part 400.

The spacing member 200 may be formed of a flexible mesh or a flexible porous plate, the mesh is preferably formed of a Teflon material having acid resistance and chemical resistance, and the porous plate is made of a flexible Teflon film. It is a form in which a number of holes are formed.

The gap maintaining member 200 is located in the space 400 formed between the lower film 100 and the upper film 300, so that the lower electrode 110 and the upper electrode 310 do not contact each other but face each other. In this state, the gap is maintained, and the width is slightly smaller than the width of the space part 400, and it is preferable to have a thickness of 200 to 700 μm.

The gap maintaining member 200 is inserted into the space part 400 while the edges of the lower film 100 and the upper film 300 are bonded to each other, or the lower film 100, the gap maintaining member 200, and the upper film In a state in which 300 is sequentially stacked, the edges can be bonded and positioned.

Of course, the width of the gap maintaining member 200 may be formed to be the same as the width of the lower film 100 and the upper film 300, so that the gap maintaining member 200 may be laminated by bonding to both edges of the gap maintaining member 200.

However, when the lower film 100, the gap maintaining member 200, and the upper film 300 are bonded, the bonded portion becomes thick, and in the case of other materials, the bonded part can be easily peeled off due to a feeling of heterogeneity, so that the gap is maintained as much as possible. It is preferable that the member 200 is located only in the space part 400.

In addition, the lower surface or the upper surface of the gap maintaining member 200 may be adhered to the upper surface of the lower film 100 or the lower surface of the upper film 300.

In this case, before bonding the lower film 100 and the upper film 300, it is preferable to attach the gap maintaining member 200 to the lower film 100 or the upper film 300 in advance.

Accordingly, as shown in FIG. 2, the lower film 100, the gap maintaining member 200, and the upper film 300 are stacked to constitute a capacitive leakage detection sensor, and water, acid or alkali solution, oil, and organic A leaked solution such as a solvent flows into the space part 400 through the inlet hole 330. At this time, since the gap maintaining member 200 has a mesh or porosity, the space part 400 along the gap maintaining member 200 ) Spreads in.

Therefore, a capacitance value is formed between the lower electrode 110 and the upper electrode 310 facing each other while facing each other.

The structure of the controller for notifying the leakage alarm by the capacitance value formed between the lower electrode 110 and the upper electrode 310 is registered by the applicant of the present invention or registered patent No. 10-1983660 (leak detection device) or Since it is well represented in many technical data and products, detailed operation description is not provided.

In addition, the lower electrode 110 may have an area as large as the width and length of the space part 400 without changing the size of the lower film 100, and the upper electrode 310 also has an inlet hole 330 in size. You can have an area excluding.

As a result, since the sensor of the present invention has a flexible, flat and flat shape, and a structure in which the electrodes face each other with a gap, a leakage alarm can be generated by a capacitance value formed between the electrodes.

3 is a diagram showing a different shape of the upper film 300, in order to further increase the area of the upper electrode 310, a pair of upper electrodes 310 and 320 are formed side by side at intervals, and the upper electrodes 310 and 320 It may have a structure in which a plurality of inlet holes 330 are formed while maintaining a gap in the lengthwise direction in the space therebetween.

4 is a diagram showing a different shape of the lower electrode, in which the lower electrode is formed long in the longitudinal direction of the lower film 100 while a pair of lower electrodes 110 and 120 are spaced apart from each other, and on the lower electrodes 110 and 120 Capacitance patterns 130 for capacitive sensing are formed at each interval, in which a plurality of stem lines 111 and 121 branch in a direction in which the pair of lower electrodes 110 and 120 face each other. And are arranged to alternate with each other

The stem lines 111 and 121 are formed to extend toward conductive lines facing each other in a rounded shape, and have a structure that alternates with each other, thereby acting as a similar capacitor.

Accordingly, it is possible to form an accurate capacitance value.

FIG. 5 is a diagram showing a different shape of the upper electrode. Like the lower electrode, FIG. 5 has a pair of upper electrodes 310 and 320 and a capacitance pattern 340, and has stem lines 311 and 321.

Therefore, a more accurate capacitance value is formed between the lower electrodes 110 and 120 on which the capacitance pattern 130 is formed.

The inlet hole 320 may be formed in the gap portion between the capacitive pattern 340 yarn in the gap portion between the upper electrodes 310 and 320.

The above-described capacitive pattern may be formed only on one of the lower electrode and the upper electrode.

Meanwhile, the upper electrode 310 and the lower electrode 110 are coated with an electrode composition containing graphene oxide to be used as an electrode while having chemical resistance, chemical resistance, chemical resistance and chemical resistance. (310) is coated with a composition for an electrode containing positively charged reduced graphene oxide to form an electrode, and the lower electrode 110 is applied to an electrode composition containing negatively charged reduced graphene oxide. The electrode is formed by this.

Of course, the upper electrode 310 is coated with a composition for an electrode containing negatively charged reduced graphene oxide to form an electrode, and the lower electrode 110 includes positively charged reduced graphene oxide. An electrode may be formed by the electrode composition, and the upper electrode 310 and the lower electrode 110 have opposite polarities.

In the present invention, graphene is used as an electrode composition, and graphene is a two-dimensional carbon sheet made of carbon atoms and exhibits a wide specific surface area, excellent thermal conductivity, and fast electron transfer characteristics compared to conventional nanomaterials. .

Graphene can be obtained by physically separating graphite layer by layer, but this method is not suitable for mass production, and large-area graphene production is impossible. Another method is a chemical exfoliation method of graphite, that is, a manufacturing process through an oxidation process.This method is inexpensive to manufacture, enables mass production, and enables functionalization of the generated graphene, allowing various applications. You can get a pin.

In the case of graphene oxide, it may have a smaller number of layers than in the case of graphene by a physical method.

Various functional groups such as an epoxy group, a hydroxy group, a carbonyl group, or a carboxy group exist on the surface of graphene oxide obtained through the oxidation process.

In order to use such graphene oxide as a component of an electrode, in the present invention, graphene oxide is reduced and used as reduced graphene oxide (rGO).

In particular, in the present invention, when the reduced graphene oxide is manufactured, the sensitivity of the sensor can be greatly improved, particularly when used as a capacitive sensor, by using a reduced graphene oxide having a polarity by giving a polarity.

The leakage detection sensor according to the present invention comprises: coating a composition for an electrode comprising positively charged reduced graphene oxide on the upper electrode 310 or the lower electrode 110; Coating a composition for an electrode including negatively charged reduced graphene oxide on the upper electrode 310 or the lower electrode 110; And curing step; may be prepared including.

6 is a diagram showing a positively charged reduced graphene oxide, and FIG. 7 is a diagram showing a negatively charged reduced graphene oxide, in which the composition for an electrode according to the present invention is charged and reduced oxide graphene The pin is used for the electrode.

Reduced graphene, which can be obtained by reducing graphene oxide, can be used as an electrode because it exhibits conductivity unlike insulating graphene oxide.

In the present invention, among the reduced graphene oxide, positively charged reduced graphene oxide or negatively charged reduced graphene oxide is used.

Positively charged reduced graphene oxide may be, for example, a surface charge represented by NH ₃ ⁺ functional groups (Fig. 6), and negatively charged reduced graphene oxide has a surface charge of COO ^- functional group. It may appear (Fig. 7).

NH ₃ ⁺ group or ^{COO-oxidation} of the reduced graphene having a functional group is the functional group NH ₃ ⁺ or COO at reduced graphene oxide ^- while remaining the functional group can be obtained by reducing the graphene oxide.

In the case of charging the reduced graphene oxide, there is an effect on the value of the change in capacitance related to the sensitivity of the sensor.

8 is a diagram showing the initial charge distribution of a general sensor, FIG. 9 is a diagram showing the initial charge distribution of a sensing line including charged and reduced graphene oxide applied to the present invention, and FIG. 10 is a diagram showing the harmfulness of a general sensor. It is a diagram showing the distribution of charge when a substance is in contact.

And, FIG. 11 is a diagram showing a charge distribution when a sensing line including charged and reduced graphene oxide contacts harmful substances according to another embodiment of the present invention.

Referring to FIG. 8, when a conventional electrode does not contain a material having a polarity, electric charges are distributed to the + electrode and the-electrode to obtain an initial charge amount value.

9 shows a case where the electrode is coated with a charged and reduced graphene oxide, that is, a positively charged reduced graphene oxide on any one electrode (upper electrode 310 or lower electrode 110) used as the + electrode. When this coated, negatively charged reduced graphene oxide is coated on another electrode (lower electrode 110 or upper electrode 310) used as an -electrode, a voltage is applied.

When the positively charged reduced graphene oxide is coated on the + electrode, the -charges induced by the application of voltage are canceled by the positively charged reduced graphene oxide, so that the initial charge value is lowered.

Referring to Figures 10 and 11, when the electrode of the conventional sensor does not contain polarity and when the electrode is coated with charged and reduced graphene oxide, when exposed to harmful substances, the amount of charge depends on the harmful substances. Since the value of the amount of charge by the substance is the same, the current value of the amount of charge becomes similar.

Since the capacitance depends on the amount of charge, the amount of change in the capacitance depends on the difference between the current amount of charge and the initial amount of charge, so if the initial charge value decreases, the range of change in the capacitance value widens when the current charge value is the same. The resolution and sensitivity of the sensor are improved.

That is, when charged and reduced graphene oxide is added to the electrode composition as in the present invention, the amount of charge is affected, so that the sensitivity of the sensor acting as the capacitance type of the present invention can be improved.

The composition for an applied capacitive hazardous substance electrode according to the present invention includes charged and reduced graphene oxide, a binder, a solvent and a curing agent.

In addition, the composition for a capacitive toxic substance electrode according to the present invention may further include a dispersant and a volatilization delay agent for increasing the dispersibility of the charged and reduced graphene oxide.

Binders that can be used in the composition for a capacitive hazardous material electrode of the present invention include ethylcellulose, polyvinylalcohol, polyvinylpyrrolidone, polyvinylbutyral, and polymethyl Although methacrylate (poly(methylmetacrylate)), polyurethane (polyurethane) or polyester (polyester) may be used, oil-based fluorine resin is most preferred for high acid resistance.

Solvents that can be used in the composition for the capacitive hazardous substance electrode of the present invention are 2-ethoxyethanol, ethanol, methanol, toluene, xylene, or methyl ethyl. Ketones (methyl ethyl ketone) can be used.

As a dispersant that can be used in the composition for a capacitive hazardous substance electrode applied to the present invention, Solspers 20000, Solspers 38500, BYK 170, and the like may be used.

Volatilization retarding agents that can be used in the composition for a capacitive hazardous material electrode of the present invention may be butyl carbitol acetate, dipropylene glycol dimethyl ether, or the like.

The curing agents that can be used in the composition for the capacitive hazardous substance electrode of the present invention include benzoyl peroxide, azobisisobutyronitrile, and 2-cyano-2-propyl azoformide (2- CYANO-2-PROPYLAZOFORMAMIDE), 2, 2-azobis (2,4-dimethylvaleronitrile) (2, 2-AZOBIS (2, 4-DIMETHYLVALERONITRILE), 2,2-azobis (2- (2- already Dazolin-2-yl)propane](2, 2-AZOBIS[2-(2-IMIDAZOLIN-2-YL)PROPANE]), 2,2-azobis(2-methylbutyronitrile)(2,2- AZOBIS (2-METHYLBUTYRONITRILE) can be used in any one, 2, 2-azobis (2,4-dimethylvaleronitrile) (2, 2-AZOBIS (2, 4-DIMETHYLVALERONITRILE) is most preferred.

The composition for a capacitive hazardous substance electrode applied in the present invention comprises: mixing charged and reduced graphene oxide, a binder, a solvent, a dispersant, and a volatilization retardant; A dispersion step of first dispersing the mixture by stirring it with a homomixer, and second dispersing the first dispersed mixture with a high pressure disperser; Injecting a curing agent into the dispersed mixture; can be prepared by performing.

It is preferable that the curing temperature is pre-cured at 100°C and then cured at 180°C.

The first dispersing step is a step of mixing charged and reduced graphene oxide and an oil-based fluorine resin in a solvent to maximize the capacitance reaction width, and is preferably performed at 5,000 to 7,000 rpm for 1 to 2 hours.

The step of secondary dispersing the first mixture using a high-pressure disperser increases the coating properties and dispersibility of the composition for capacitive hazardous substance sensor electrodes by crushing and dispersing the mixture under high pressure.

The secondary dispersion may preferably be carried out 5 to 10 times under a pressure of 300 to 350 bar.

A curing agent is added to the dispersed mixture, and agitation is performed for 10 to 30 minutes at 3,000 to 5,000 rpm using a homomixer.

Based on the total weight of the electrostatic capacitive electrode composition, the charged and reduced graphene oxide is 5 to 20 wt%, the binder is 30 to 60 wt%, the solvent is 30 to 50 wt%, the curing agent is 20 to 60 wt%, and the dispersant is It may be included in 5 to 20wt%.

The leak detection sensor of the present invention described above has been described as an example of a long shape, but may have a structure that is formed in an area-type pad shape and installed in a point shape in a specific area where leakage is expected.

As described above, specific parts of the present invention have been described in detail, and for those of ordinary skill in the art, it is obvious that these specific techniques are only preferred embodiments, and the scope of the present invention is not limited thereby. something to do.

Accordingly, it will be said that the substantial scope of the present invention is defined by the appended claims and their equivalents.

100: lower film
110,120: lower electrode
130: capacitance pattern
200: gap maintaining member
300: upper film
310,320: upper electrode
330: inlet hole
400: space part
500,510: junction

Claims (8)

A lower film having a lower electrode formed on the upper side thereof;
An upper film having an upper electrode formed on a lower surface or an upper surface, and stacked above the lower film;
Consists of; a gap maintaining member positioned between the lower film and the upper film to separate the lower film and the upper film,
Either of the lower electrode or the upper electrode is formed by coating a composition for an electrode including positively charged reduced graphene oxide on its surface,
Either of the upper electrode or the lower electrode is a capacitive leak detection sensor having a multilayer structure, characterized in that it is constructed by coating a composition for an electrode comprising negatively charged reduced graphene oxide on its surface.
The capacitive leakage detection sensor of claim 1, wherein the gap maintaining member is formed of a porous plate.
The capacitive leak detection sensor of claim 1, wherein the gap maintaining member is a mesh.
The capacitive leakage liquid having a multilayer structure according to claim 1, wherein a plurality of inlet holes are formed in the upper film with intervals in the longitudinal direction, and the leaked solution is introduced into the space between the lower film and the upper film. Detection sensor.
The method of claim 1, wherein, in the lower electrode or the upper electrode, a pair of electrodes are formed side by side at intervals, and a capacitance pattern is formed on the pair of electrodes to form a capacitance at regular intervals,
The capacitive pattern has a structure in which a plurality of stem lines diverge from the electrode and are arranged to alternate with each other, wherein the stem lines are formed to extend toward electrodes facing each other in a rounded shape, and have a structure that alternates with each other. Capacitive leak detection sensor with structure.
The electrostatic discharge having a multilayer structure according to claim 1, wherein both sides of the lower film and the upper film are bonded to each other in a longitudinal direction, and the gap maintaining member is positioned at a portion where the lower film and the upper film are not bonded. Capacitive leak detection sensor.
The method of claim 1, wherein the positively charged reduced graphene oxide has a surface charge of NH ₃ ⁺ functional groups, and the negatively charged reduced graphene oxide has a surface charge of COO ^- functional groups. Capacitive leak detection sensor with multi-layered structure.
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