KR102186473B1 - Ultrasonic Spindle Unit - Google Patents

Abstract

The present invention relates to an ultrasonic spindle apparatus which comprises: a shaft which has a long cylindrical shape, which has a tool connection end on one end and a rotation driving connection end on the other end and which is rotatable around a longitudinal axial line, and which has an axial diameter unit which is cut from the surface of the cylinder in a radial direction at one position in a longitudinal direction to form a thrust support surface in the direction of an axial line; a housing which has a shaft accommodation unit which accommodates the shaft, and which has an inward flange which protrudes in a ring shape from an internal wall surface of the shaft accommodation unit to be accommodated in an area of the axial diameter unit; a plurality of thrust air bearings placed between the inward flange and the trust support surface to support an axial line-directional load of the shaft; a plurality of radial air bearings placed between the cylinder surface and the shaft accommodation unit to support a radial-directional load of the shaft; an ultrasonic oscillation unit which makes an ultrasonic vibration on the shaft; and a gaseous medium supply unit which supplies a bearing gaseous medium to the plurality of thrust air bearings and the plurality of radial air bearings through the housing. The present invention aims to provide the ultrasonic spindle apparatus which is able to minimize friction in an axial direction and thereby minimize frictional heat.

Description

Ultrasonic Spindle Unit {Ultrasonic Spindle Unit}

The present invention relates to an ultrasonic spindle device, and more particularly, to an ultrasonic spindle device capable of minimizing friction and friction heat due to rotation and vibration driving of a shaft.

The shaft housed in the housing of the ultrasonic spindle device vibrates by receiving energy from the ultrasonic oscillator, and is rotated by a rotary drive motor, and the workpiece is processed by the installed tool. The shaft is rubbed against the housing by this vibration and rotation.

However, as the shaft vibrates, the shaft and the housing become friction, and frictional heat is generated severely. In order to improve this, a ball bearing or an air bearing is disposed between the shaft and the housing to reduce friction between the shaft and the housing in the transverse axis direction. However, the shaft is still vibrated due to mechanical friction in the axial direction with respect to the housing, and there is a disadvantage that the shaft cannot be rotated at high speed. In addition, frictional heat generated when the shaft is rotated is conducted to the housing and the tool, causing deviation from the axis due to material change and expansion, shortening the lifespan and impairing the processing precision of the workpiece.

Accordingly, an object of the present invention is to provide an ultrasonic spindle device capable of minimizing friction in the axial direction and minimizing frictional heat during shaft rotation and vibration.

The ultrasonic spindle device for achieving the object of the present invention is a rotation drive connection in which a tool connection end to which a tool for processing a workpiece is connected to both ends in a long rod shape and a rotation drive motor for rotationally driving the tool are combined. An end is formed, and the outer diameter is extended from the tool connection end to extend the tool diameter portion, the shaft diameter portion that is extended by reducing the outer diameter stepwise from the tool diameter portion, and the outer diameter is extended and extended from the shaft diameter portion to be connected to the rotation drive connection end. A shaft having a vibration diffusing portion; A housing having an inward flange protruding inwardly along the circumferential direction and receiving and disposed in the shaft diameter portion and having a shaft receiving portion accommodating the shaft; A plurality of thrust air bearings disposed between the shaft and the shaft receiving portion to support an axial load of the shaft; A plurality of radial air bearings disposed between the shaft and the shaft receiving portion to support a load in the transverse axis direction of the shaft; An ultrasonic oscillation unit for oscillating and driving the shaft to vibrate; And a fluid supply unit supplying fluid to the plurality of thrust air bearings and the plurality of radial air bearings. As it rotates and vibrates by the rotary drive motor and the ultrasonic generator, it is supported in the axial direction and transverse direction of the shaft by the thrust air bearing and the radial air bearing. It can cool the frictional heat.

Here, the housing includes an inlet hole for introducing the bearing gaseous medium into the shaft receiving part and a discharge hole for discharging the bearing gaseous medium introduced into the shaft receiving part, and the gaseous medium supplying part includes an air compressor; An oil mist generator that generates oil mist; And a gaseous medium pipe for introducing and discharging the bearing gaseous medium in which air and oil mist of the air compressor and the oil mist generator are mixed into the inlet hole and the discharge hole, wherein air and oil mist are mixed between the shaft and the housing. It is preferable because the cooling efficiency can be improved by supplying the bearing gaseous medium.

In addition, when the oil for generating the oil mist contains at least one of cutting oil, lubricating oil, and vegetable oil comprising at least one of hydrocarbon, organic ester, polyglycol, and phosphate ester, frictional heat generated between the shaft and the housing is removed. It is desirable because the speed can be improved.

Here, a gaseous medium temperature sensor disposed on the gaseous medium pipe downstream of the discharge hole to sense a temperature of the bearing gaseous medium discharged; It stores the normal temperature range of the bearing gaseous medium, and when the temperature of the bearing gaseous medium detected by the gaseous medium temperature sensor exceeds the normal temperature range, the flow rate of the bearing gaseous medium, the mixing ratio of air and oil mist, and oil If a control unit for controlling at least one of the air compressor and the oil mist generator is further included so that at least one of the sizes of the mist is adjusted, the temperature due to frictional heat generated between the shaft and the housing can be checked and controlled to be cooled quickly. desirable.

In addition, when at least one of the inner surface of the shaft receiving portion and the outer surface of the shaft is coated with a cemented carbide material containing tungsten, durability of the shaft and the housing can be improved.

Here, the vibration diffusing unit includes: a vibrator receiving ultrasonic energy from the ultrasonic oscillator and vibrating the shaft; And a booster horn capable of adjusting an intensity of vibration generated from the vibrator, wherein the shaft receiving unit comprises: a vibration receiving unit accommodating the vibrator and the booster horn; And it is preferable to further include a tool receiving portion accommodating the tool diffusing portion to vibrate the shaft and adjust the vibration intensity.

According to the present invention, the shaft and the housing are supported in the axial and transverse directions of the shaft by the thrust air bearing and the radial air bearing while being rotated and vibrated by the rotary drive motor and the ultrasonic oscillator. Since it is possible to cool the frictional heat generated between the workpieces, there is an effect of improving the processing precision and work efficiency of the workpiece.

1 is a schematic view of an ultrasonic spindle device according to the present invention.
2 is a detailed view of an air bearing.
3 is a control block diagram.

Hereinafter, an ultrasonic spindle device 1 according to a preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

1 is a schematic diagram of an ultrasonic spindle device 1 according to the present invention, FIG. 2 is a detailed view of an air bearing, and FIG. 3 is a control block diagram. The ultrasonic spindle device (1) includes a shaft (10), a housing (20), a thrust air bearing (30), a radial air bearing (40), an ultrasonic oscillation unit (50), a gaseous medium supply unit (60), a rotary drive motor ( 70), a gaseous medium temperature sensor 80, a cooler gaseous medium temperature sensor 82, and a control unit 90.

The shaft 10 has a long rod shape and has a tool connection end 111 at one end and a rotation drive connection end 13 at the other end, and has a long cylindrical shape rotatable with respect to the longitudinal axis. The shaft 10 has a tool horn 11, a vibration attenuating part 12, and a rotation drive connection end 13.

The tool horn 11 extends in the radial direction from the tool connection end 111 and is connected to one end of the shaft diameter portion 114. The tool horn 11 has a tool connecting end 111, a tool expanding portion 112, a tool step 113, and a shaft diameter portion 114. The tool connection end 111 is connected to the tool 2 for processing the workpiece. The tool connection part 111 is formed with a tool connection part 111-1 to which the tool 2 is mounted. The tool connection 111-1 is formed in a groove shape so that the tool 2 is inserted and fixed.

The tool expanding part 112 has an outer diameter that is expanded at the tool connection end 111 and is formed to extend in the axial direction in the expanded state. The tool expansion part 112 is formed in a stepped shape from the tool connection end 111.

The tool step 113 is a portion that extends in the axial direction in the extended state at the tool connection end 111 and then reduces the outer diameter and is stepped in a step shape. The tool step 113 is provided with a radial air bearing 40 to be described later to support it in the axial direction. At least one tool step 113 may be formed in the tool expanding part 112.

The shaft diameter portion 114 is cut radially from the cylindrical surface at a position in the longitudinal direction to form a tool step 113 which is a thrust support surface in the axial direction. The shaft diameter portion 114 is formed to be extended by reducing the outer diameter stepwise from the tool diameter portion 112.

The vibration diffusing unit 12 is connected to a rotation drive connection end 13 that will be described later by extending the outer diameter from the shaft diameter unit 114. The vibration expanding unit 12 extends radially from the rotation drive connection end 13 and is connected to the other end of the shaft diameter unit 114. The vibration diffusing unit 12 has a boost horn 121 and a vibrator 122. The boost horn 121 has a larger diameter than the shaft diameter portion 114 and is connected to the shaft diameter portion 114 stepwisely. The boost horn 121 may adjust the intensity of vibration generated by the vibrator 122. The boost horn 121 has a boost step 121-1 and is connected to the vibrator 122. The vibrator 122 has a larger diameter than the boost horn 121 and is connected to the boost horn 121 and receives vibration energy from the ultrasonic oscillator 50 to be described later to vibrate the shaft 10.

The rotation drive connection end 13 is connected to have a smaller diameter than the vibrator 122 and a rotation drive motor 70 to be described later is coupled to rotate the shaft 10.

The housing 20 accommodates and supports at least a portion of the shaft 10. The housing 20 has a shaft receiving portion 21, an inlet hole 22 and an outlet hole 23. The shaft receiving portion 21 accommodates the shaft 10. The shaft receiving part 21 has a tool receiving part 211, a tool receiving step 212, a vibration receiving part 213, an inward flange 214, a tool connecting hole 215, and a rotating drive connecting hole 216. . The tool receiving part 211 is formed to accommodate the tool diffusing part 112 in the axial and transverse directions of the shaft 10. The tool receiving part 211 accommodates the tool horn 11 in the radial and axial regions and forms a tool receiving step 212 which is a thrust support surface in the axial direction, which will be described later. The tool receiving portion 211 is formed to have a shape corresponding to the outer shape of the tool diffusing portion 112. The tool accommodating part 211 is formed in a shape that is depressed from the tool connection end 111 into an axial transverse portion in which the outer diameter is expanded and then extends in the axial direction.

The tool receiving step 212 extends in the axial direction and then protrudes inward to form a step shape. A radial air bearing 40, which will be described later, may be disposed to be fixed in the axial direction.

The vibration receiving unit 213 is formed to accommodate the vibration amplifying unit 12 in the axial and transverse directions of the shaft 10. The vibration receiving unit 213 accommodates the vibration amplifying unit 12 in the radial and axial regions and forms a thrust support surface in the axial direction. The vibration receiving portion 213 is formed to have a shape corresponding to the external shape of the vibration attenuating portion 12. The vibration receiving portion 213 is formed in a shape that is depressed from the shaft diameter portion 114 in the transverse axial portion where the outer diameter is expanded and then extends in the axial direction.

The inward flange 214 protrudes from the inner wall surface of the shaft receiving portion 21 in a ring shape and is accommodated in the region of the shaft diameter portion 114. The inward flange 214 is formed by protruding inwardly along the circumferential direction so as to be accommodated and disposed in the shaft diameter part 114 from the tool receiving part 211 and the vibration receiving part 213. The inward flange 214 of the shaft 10 is accommodated and inserted into the shaft diameter portion 114 to limit movement in the axial direction.

The tool connection hole 215 is formed so that the tool connection end 111 is inserted and received.

The rotation drive connection hole 216 is formed so that the rotation drive connection end 13 is inserted and received.

At least one of the inner surface of the shaft receiving portion 21 and the outer surface of the shaft 10 may be coated with a cemented carbide material containing tungsten. Accordingly, even when friction occurs due to rotation and vibration of the shaft 10, durability of the shaft 10 and the housing 20 may be improved.

The thrust air bearing 30 is disposed between the shaft 10 and the shaft receiving portion 21, that is, between the inward flange 214 and the tool step 113, which is a thrust support surface, in the axial direction of the shaft 10. Try to support the load. The thrust air bearing 30 may be disposed on a side surface of the tool accommodating part 211 in the transverse axis direction, a side surface in the axial transverse direction in front of the tool expansion unit 112 and a side surface in the axial transverse direction at the rear. Thereby, the tool diffusing part 112 supports moving in the axial direction without rubbing against the inner surface of the tool receiving part 211. The thrust air bearing 30 may be disposed on a side surface of the vibration receiving unit 213 in the transverse direction, a side surface in the transverse axis direction in front of the boost horn 121 and a side surface in the transverse axis direction behind the vibrator 122. . Thereby, the vibration diffusing part 12 supports the inner surface of the vibration receiving part 213 and moving in the axial direction without friction. The thrust air bearing 30 includes a thrust inlet hole 31 of the bearing gaseous medium, a thrust discharge hole 32 disposed toward the tool expanding part 112, the boost horn 121 and the vibrator 122, The thrust inlet pipe 33 connecting the thrust inlet hole 31 and the thrust discharge hole 32, the thrust discharge inlet hole 34 for discharging the bearing gaseous medium, and the bearing gaseous medium are thrust A thrust discharge hole 35 for discharging the air bearing 30 to the outside, and a thrust discharge pipe path 36 connecting the thrust discharge inlet hole 34 and the thrust discharge hole 35 may be formed. have. The thrust discharge hole 32 may be formed to have a small diameter like a nozzle so that the bearing gaseous medium is strongly discharged at high speed toward the tool diaphragm 112.

The radial air bearing 40 is disposed between the shaft 10 and the shaft receiving portion 21, that is, between the cylindrical surface and the shaft receiving portion 21 to support the radial load of the shaft 10. The radial air bearing 40 may be disposed on a side surface of the tool receiving portion 211 in the axial direction and a side surface of the tool expanding portion 112 in the axial direction. One of the radial air bearings 40 may be supported and disposed in the axial direction by a tool step 133, and the other may be supported and disposed in the axial direction by a tool receiving step 212. Thereby, it supports that the tool diffusing part 112 moves in the axial transverse direction without rubbing against the inner surface of the tool receiving part 211. The radial air bearing 40 may be disposed on a side surface of the vibration receiving part 213 in the axial direction, a side surface of the boost horn 121 in the axial direction, and a side surface of the vibrator 122 in the axial direction. Thereby, the vibration diffusing part 12 supports the inner surface of the vibration receiving part 213 and moving in the axial direction without friction. The radial air bearing 40 includes a radial inlet hole 41 of the bearing gaseous medium, a radial discharge hole 42 disposed toward the tool expanding part 112, the boost horn 121 and the vibrator 122, The radial inlet pipe 43 connecting the radial inlet hole 41 and the radial outlet hole 42, the radial outlet inlet hole 44 for discharging the bearing gaseous medium, and the bearing gaseous medium are thrust. A radial discharge hole 45 for discharging the air bearing 30 to the outside, and a radial discharge pipe path 46 connecting the radial discharge inlet hole 44 and the radial discharge hole 45 may be formed. have. The radial discharge hole 42 may be formed to have a small diameter such as a nozzle, so that the bearing gaseous medium is strongly discharged toward the tool diaphragm 112 at high speed.

The ultrasonic oscillation unit 50 oscillates and drives the shaft 10 to vibrate. The ultrasonic oscillation unit 50 has a brush 51. The vibrator 122 includes a piezoelectric element (not shown) forming a pair and an electrode plate (not shown) inserted between the piezoelectric elements, and a brush 51 is attached to the electrode plate. In addition, when the ultrasonic oscillator 50 is connected to the brush 51 through a feed line, and high-frequency electric vibration is generated from the ultrasonic oscillator 50, the piezoelectric element is driven through the electrode plate.

The vapor phase medium supply unit 60 supplies the bearing vapor phase medium to the plurality of thrust air bearings 30 and the plurality of radial air bearings 40. The gaseous medium supply unit 60 has an air compressor 61, an oil mist generator 62, and a gaseous medium pipe 63. The air compressor 61 has a compression motor 611 that sucks and compresses external air, and supplies air to a plurality of thrust air bearings 30 and a plurality of radial air bearings 40.

The oil mist generator 62 generates oil mist, which is fine oil particles, by finely dividing the oil. The oil mist generator 62 may generate oil mist of fine particles, or may evaporate and decompose oil to create oil vapor. The oil mist generator 62 includes a pressure pump 621 that pressurizes and transfers oil, a spray nozzle (not shown) capable of spraying the oil pressurized and transferred by the pressure pump 621, and an oil tank ( 622). Here, the spray nozzle may be provided with various nozzles having nozzle diameters that generate different sizes of the oil mist.

The oil mist generator 62 may inject ultrasonic waves into the oil tank 622 to make the oil ultrafine. Oil mist of fine particles can be generated by spraying through the spray nozzle while the ultra-fine oil is pressurized. In some cases, the oil tank 622 stored in the ultra-fine oil may be heated under reduced pressure to a vacuum state by using a pressure reducer to generate oil vapor of oil. The oil for generating oil mist or vapor may include at least one of cutting oil, lubricating oil, and vegetable oil comprising at least one of hydrocarbons, organic esters, polyglycols, and phosphate esters. In particular, synthetic cutting oil is a suitable material for cooling the frictional heat between the shaft 10 and the housing 20 because it is a bearing gaseous medium through which heat exchange proceeds very quickly.

The gaseous medium piping 63 is a bearing of the oil mist and oil vapor of the air compressor 61 and the oil mist generator 62 alone, or a bearing gaseous medium mixed with air and oil mist, air and oil vapor, and an inlet hole 22 And discharge into and out of the discharge hole (23). The gaseous medium pipe 63 is connected to the inlet hole 22 and the discharge hole 23 to introduce the bearing gaseous medium from the outside and discharge it to the outside. A gaseous medium valve 631 is installed on the gaseous medium pipe 63 to control the movement of the bearing gaseous medium.

The rotation drive motor 70 has a rotation shaft connected to the rotation drive connection end 13 and rotates the rotation drive connection end.

The gaseous medium temperature sensor 80 is disposed on the gaseous medium pipe 63 downstream of the discharge hole 23 to detect the temperature of the discharged bearing gaseous medium. The cooler gaseous medium temperature sensor 82 is disposed on the gaseous medium pipe 63 upstream of the inlet hole 22 to detect the temperature of the bearing gaseous medium flowing into the inlet hole 22.

The controller 90 stores the normal temperature range of the bearing gaseous medium, and when the temperature of the bearing gaseous medium detected by the gaseous medium temperature sensor 80 exceeds the normal temperature range, the temperature of the bearing gaseous medium becomes the normal temperature range. At least one of the air compressor 61 and the oil mist generator 62 is controlled so that the inflow amount of the bearing gaseous medium flowing into the inlet hole 22 is increased until.

At least one of the air compressor 61 and the oil mist generator 62 may be provided with a cooler, and the controller 90 may adjust the temperature of the bearing gaseous medium flowing into the inlet hole 22.

The control unit 90 may adjust the ultrasonic intensity in consideration of the components of oil. The controller 90 may control the ultrasonic oscillator 50 to store the intensity of ultrasonic waves for ultra-fine particles of the oil component and adjust the ultrasonic intensity according to the mixing amount of the oil component.

When the controller 90 determines that the temperature of the bearing gaseous medium detected by the gaseous medium temperature sensor 80 is high, the flow rate of the bearing gaseous medium is increased or the amount of oil mist in the bearing gaseous medium in which air and oil mist are mixed is increased. Or increase the amount of oil vapor in the bearing gaseous medium in which air and oil vapor are mixed.

Deformable embodiments other than the above-described embodiments will be described.

A pressure control valve may be further provided downstream of the discharge hole 23 to control the pressure of the bearing gaseous medium supplied to the plurality of thrust air bearings 30 and the plurality of radial air bearings 40.

The plurality of thrust air bearings 30 and the plurality of radial air bearings 40

An airtight guide may be provided so that the entire gaseous medium of the bearing is introduced into the inlet hole. The airtight guide is connected to a plurality of thrust air bearings 30 and a plurality of radial air bearings 40, has elasticity, and extends in a diagonal direction to contact the outer surface of the shaft 10 or the inner surface of the shaft receiving part 21 Thus, the plurality of thrust air bearings 30, the plurality of radial air bearings 40, and the shaft 10 may not be introduced into the space, but may be introduced into the inlet hole.

The control unit 90 cleans the oil vapor or oil mist to wipe off the oil on the plurality of thrust air bearings 30, the plurality of radial air bearings 40, and the shaft 10 and the shaft receiving part 21. You can have a process of cleaning by having a wealth and injecting a cleaning solution.

Due to the ultrasonic spindle device 1, the shaft 10 is rotated and vibrated by the rotary drive motor 70 and the ultrasonic oscillator 50, and the thrust air bearing 30 and the radial air bearing 40 It is supported in the axial direction and the transverse direction of and the bearing gaseous medium is supplied from the gaseous medium supply unit 60 to cool the frictional heat generated between the shaft 10 and the housing 20. Cooling efficiency can be improved by supplying a bearing gaseous medium in which air and oil mist are mixed between the shaft 10 and the housing 20.

The use of cutting oil, lubricating oil, and vegetable oil may improve the removal speed of frictional heat generated between the shaft 10 and the housing 20. Depending on the temperature of the bearing gaseous medium, the flow rate of the bearing gaseous medium, the mixing ratio of air and oil mist, and the size of the oil mist are adjusted to quickly check the temperature due to frictional heat generated between the shaft 10 and the housing 20. It can be controlled so that it can be cooled. It is possible to improve durability of the shaft 10 and the housing 20 by coating the shaft 10 and the housing 20 with a cemented carbide material containing tungsten on opposite surfaces.

The vibration attenuating unit 12 is composed of a vibrator 122 and a booster horn 121, and the shaft receiving unit 21 includes a vibration receiving unit 213 and a tool receiving unit 211 to form the shaft 10. It vibrates and the intensity of vibration can be adjusted.

1: ultrasonic spindle device 2: tool
10: shaft 11: tool horn
12: vibration amplification unit 13: rotation drive connection end
20: housing 21: shaft receiving part
22: inlet hole 23: discharge hole
30: thrust air bearing 31: thrust inlet hole
32: thrust discharge hole 33: thrust inlet pipe
34: Drust discharge inlet hole 35: Drust discharge hole
36: thrust discharge pipe 40: radial air bearing
41: radial inlet hole 42: radial discharge hole
43: radial inlet pipe 44: radial discharge inlet hole
45: radial discharge hole 46: radial discharge pipe
50: ultrasonic generator 51: brush
60: gaseous medium supply unit 61: air compressor
62: oil mist generator 63: gaseous medium piping
70: rotary drive motor 80: gaseous medium temperature sensor
82: cooler phase medium temperature sensor 90: control unit
111: tool connection end 112: tool expansion part
113: tool step 114: shaft diameter
121: boost horn 122: vibrator
211: tool receiving part 212: tool receiving step
213: vibration receiving part 214: inward flange
215: tool connection hole 216: rotation drive connection hole
611: compression motor 621: pressure pump
622: oil tank 631: gas phase medium valve

Claims (5)

In the ultrasonic spindle device,
It has a long cylindrical shape that can be rotated about the longitudinal axis with the tool connection end and the rotation drive connection end of the other end, and is cut in the radial direction from the cylindrical surface at one position in the longitudinal direction to form a thrust support surface in the axial direction. A shaft having a shaft diameter portion;
A housing having a shaft receiving portion accommodating the shaft, and having an inward flange protruding from an inner wall surface of the shaft accommodating portion in a ring shape to be accommodated in a region of the shaft diameter portion;
A plurality of thrust air bearings disposed between the inward flange and the thrust supporting surface to support an axial load of the shaft;
A plurality of radial air bearings disposed between the cylindrical surface and the shaft receiving portion to support a radial load of the shaft;
An ultrasonic oscillator for ultrasonically vibrating the shaft; And
And a gaseous medium supply unit for supplying a bearing gaseous medium to the plurality of thrust air bearings and the plurality of radial air bearings through the housing,
The shaft further includes a tool horn extending radially from the tool connection end and connected to one end of the shaft diameter portion, and a vibration expanding part extending radially from the rotation drive connection end and connected to the other end of the shaft diameter portion,
The shaft receiving portion accommodates the tool horn in the radial and axial regions and forms a thrust support surface in the axial direction, and the vibration expanding part accommodates in the radial and axial regions, and Further comprising a vibration receiving portion forming a thrust support surface in the direction,
The plurality of thrust air bearings are disposed between the tool horn and the thrust support surface of the tool receiving part, and between the vibration expanding part and the thrust support surface of the vibration receiving part to support an axial load of the shaft. Ultrasonic spindle system. The method of claim 1,
The housing has an inlet hole for introducing the bearing gaseous medium into the shaft receiving part and a discharge hole for discharging the bearing gaseous medium introduced into the shaft receiving part,
The gaseous medium supply unit,
Air compressor;
An oil mist generator for generating oil mist; And
And a gaseous medium pipe for introducing and discharging the bearing gaseous medium in which air and oil mist of the air compressor and the oil mist generator are mixed into the inlet hole and the discharge hole.
The method of claim 2,
A gaseous medium temperature sensor disposed on the gaseous medium pipe downstream of the discharge hole to sense a temperature of the bearing gaseous medium discharged; And
It stores the normal temperature range of the bearing gaseous medium, and when the temperature of the bearing gaseous medium detected by the gaseous medium temperature sensor exceeds the normal temperature range, the temperature of the bearing gaseous medium is in the normal temperature range. And a controller for controlling the air compressor and the oil mist generator so that the inflow amount of the bearing gaseous medium introduced into the inlet hole is increased.
The method of claim 1,
An ultrasonic spindle system, characterized in that at least one of the inner surface of the shaft receiving portion and the outer surface of the shaft is coated with a cemented carbide material containing tungsten.
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