KR102177543B1 - Apparatus for producing ultra-pure water production - Google Patents

Abstract

In the present invention, when the concentration of ultrapure water is less than or equal to a set value during the ultrapure water production process, the user can control the setting of the ultrapure water production device and circulate by itself to maintain the concentration of ultrapure water at an appropriate value.

Description

Ultra-pure water manufacturing equipment{APPARATUS FOR PRODUCING ULTRA-PURE WATER PRODUCTION}

The present invention relates to an ultrapure water production system, and more particularly, when the purity of ultrapure water falls below a set value during the production of ultrapure water, it is maintained at an appropriate purity through internal filtration circulation, and pure water and ultrapure water can be appropriately used according to the purpose. It relates to a device for producing ultrapure water.

As semiconductor devices become finer and more highly integrated, product yield and reliability are significantly affected by micro-contamination caused by impurity particles or various contaminants generated during the process. Therefore, before and after the process for manufacturing most semiconductor devices, a cleaning process is performed to clean the wafer in a very clean state, and ultrapure water is mainly used in this cleaning process. Moreover, such ultrapure water is widely used in manufacturing processes such as chemical, bio, and pharmaceutical.

In the conventional ultrapure water production device, when the concentration of ultrapure water is less than the set value in the ultrapure water production process, there is a problem in that the user who finds it does not have the ability to self-circulate filtration by controlling the setting of the ultrapure water production device. .

In addition, there is a problem in that it is not easy to selectively use pure and ultrapure water according to the purpose because it is only biased toward the generation of ultrapure water.

Therefore, it is difficult for a user to easily manage the purity of ultrapure water and to use ultrapure water and pure water suitable for the purpose of use.

Korean Patent Publication No. 10-0191234

An object of the present invention is to provide an ultrapure water production apparatus capable of appropriately using pure water and ultrapure water according to a purpose, while maintaining an appropriate purity through internal filtration circulation when the purity of ultrapure water falls below a set value in the process of producing ultrapure water. do.

The present invention provides an apparatus for producing ultrapure water, comprising: a primary filter for removing particles by filtering supplied raw water; a reverse osmosis filter for generating pure water by filtering impurities of the filtered raw water filtered by the primary filter; and A pure water generation module including a first purity information generation unit that detects the conductivity of and generates first purity information, a storage tank module receiving and storing the generated pure water, and pure water in the storage tank module to a pure water supply pump. A sterilization unit that receives and sterilizes it, a secondary filter that generates ultrapure water by filtering impurities of the sterilized pure water, and second purity information that generates second purity information by sensing resistance of the ultrapure water filtered by the secondary filter A main input/output module including an ultrapure water generation module including a generation unit, a main input unit receiving user input information, a main display unit displaying information on the ultrapure water generation module, the first purity information and the second purity information Based on, a control module that displays information of the ultrapure water generation module on the main display unit, controls the ultrapure water generation device based on input information received from the main input unit, and a local dispenser that discharges the ultrapure water to the outside. A module, a recirculation line for recirculating the ultrapure water from the local dispenser module between the pure water supply pump and the storage tank module, a check valve installed to prevent the recirculated ultrapure water from flowing back to the storage tank module, and the A pressure reducing valve installed on the recirculation line to reduce the pressure of the recirculated ultrapure water, wherein the control module includes, when the purity value included in the second purity information of the ultrapure water is below a preset level, the It provides an ultrapure water production apparatus for recirculating the ultrapure water of the local dispenser module until the purity level reaches a preset level.

The ultrapure water production apparatus according to the present invention has the following effects.

First, when the concentration of ultrapure water becomes less than the set value during the ultrapure water production process, the user can control the setting of the ultrapure water production apparatus and circulate by itself to maintain the concentration of ultrapure water at an appropriate value.

Second, users can easily use pure and ultrapure water according to their intended use.

1 is a block diagram schematically showing the configurations of an ultrapure water production apparatus according to an embodiment of the present invention.
2 is a schematic perspective view of the ultrapure water manufacturing apparatus shown in FIG. 1.
3 is a diagram schematically illustrating a main input/output module among the configurations of the ultrapure water manufacturing apparatus shown in FIG. 1.

1 to 3, the pure water generation module 110 includes a primary filter 111 for removing particles by filtering the supplied raw water, and impurities in the filtered raw water filtered by the primary filter 111. It includes a reverse osmosis filter 112 that generates pure water by pressurizing and filtering, and a first purity information generation unit 113 that generates first purity information by detecting state information of the pure water.

The primary filter 111 serves to filter the high particles contained in the raw water supplied from the raw water supply through the inlet valve 114, and the filtered raw water from which the high particles have been removed is filtered by the raw water pressure pump 115. It is supplied to the reverse osmosis filter 112. Here, the filtered raw water pressure pump 115 provides a pressure required for smooth filtration in the reverse osmosis filter 112.

When measuring the purity of the pure water, a method of determining the content of foreign substances using an electrical conductivity measurement method may be used. However, in the method of measuring purity, those of ordinary skill in the art are not limited to the method of measuring electrical conductivity, and it will be sufficiently appreciated that various methods can be used. In addition, the first pure water information generation unit includes a PH sensor (not shown) to measure the acidity of the pure water.

The reverse osmosis filter 112 is provided with a drain valve 116 in order to discharge the pure water whenever necessary. A drain valve 124 is also provided in the storage tank module 120 to be described later. A three-way valve 117 is provided between the first purity information generation unit 113 and the storage tank module 120 to be described later, so that when the purity of the first purity information generation unit 113 is less than a reference value, it is drained. I can.

The storage tank module 120 may receive the generated pure water, store it therein, and use it in a required amount. The storage tank module 120 may be provided with an automatic water level sensor (not shown) to detect the level of pure water stored therein.

The storage tank module 120 is provided with an air vent filter (not shown) for filtering contaminants contained in air introduced from the outside, thereby preventing the pure water stored therein from being contaminated. Further, a discharge port 121 for discharging and using the pure water is formed, and a drain valve 124 for draining the pure water is provided.

The ultrapure water generation module 130 generates ultrapure water by receiving pure water in the storage tank module 120 by a pure water pressure pump 123 to sterilize the pure water, and filtering impurities of the sterilized pure water. And a second filter 132 for generating second purity information by sensing resistance of the ultrapure water filtered by the second filter 132.

The sterilization unit 131 performs ultraviolet sterilization treatment on the pure water using a UV lamp. However, for the sterilization treatment, it will not be limited to the ultraviolet sterilization. A check valve 122 (to be described later) is provided between the sterilization unit 131 and the storage tank module 120 to prevent pure water or ultrapure water to be described later from flowing back to the storage tank module 120. I can.

The secondary filter removes impurities remaining in the pure water that has passed through the sterilization unit 131 to filter the pure water with ultrapure water, and the second purity information generator 133 detects resistance to the ultrapure water. 2 Generate purity information. Like the above-described first purity information generation unit, the second purity information generation unit is provided with a PH sensor to measure the acidity of ultrapure water.

The second purity information generation unit 133 includes a TOC sensor that measures TOC (Total organc carbon) and measures a purity value based on the concentration of the total organic carbon included in the second purity information. However, the purity value is not limited to the total amount of organic carbon and may be used as a purity value by combining one or a plurality of various water quality evaluation indicators.

The ultrapure water generated by filtering in the secondary filter is discharged to the outside by the local dispenser module 140. In addition, the local dispenser module 140 is provided with a metal component filtering function to filter the metal components that may exist in the ultrapure water.

The main input/output module 160 includes a main input unit 162 for receiving user input information, and a main display unit 161 for displaying information on the ultrapure water generation module. The main display unit 161 displays information related to the ultrapure water production apparatus according to the present invention on the screen, so that the user currently provides information related to pure water and ultrapure water (eg, information about the purity value of pure water and ultrapure water, water level information of the storage tank module, PH concentration information, temperature information, etc.) of pure and ultrapure water can be identified at a glance.

The main display unit 161 may output information related to the pure water, ultrapure water, and the like on a display screen as numerical values or graphs. It also outputs a function menu (eg, brightness, font, etc.) for controlling the main input/output module.

A control module (not shown) displays the information of the ultrapure water generation module on the main display unit 161 based on the first purity information and the second purity information, and an input received from the main input unit 162 The ultrapure water manufacturing apparatus is controlled based on the information.

The main input unit 162 is a control command for controlling the ultrapure water production device based on the items output from the main display unit 161 by the user (e.g., when the purity of the ultrapure water is less than the reference value, the recirculation line 150 is used). Of ultrapure water, etc.) can be entered.

When the information displayed on the main display unit 161 indicates that the purity of pure or ultrapure water does not satisfy the reference value, the user opens and closes the drain valve 124 through the main input unit 162 to reduce the pure water. Drain it to the outside. In the case of the ultrapure water, as described above, the ultrapure water is recycled to the recirculation line 150 in order to obtain a purity that satisfies the reference value.

The pure water generation module 110, the ultrapure water generation module 130, and the control module are disposed inside a predetermined main housing 118. In addition, the storage tank module 120 and the local dispenser module are separately disposed outside the main housing 118.

The local input/output module 170 includes a local input unit (not shown) for receiving user input information, and a local display unit (not shown) for displaying information on the ultrapure water generation module, and the main input/output module 160 and It is interlocked and operates in the same manner as the main input/output module 160.

Since the local input/output module 170 is interlocked with the main input/output module 160 to perform the same function, the user can select the main input/output module 160 and the local input/output module 170 The functions provided by the input/output module 160 can be used. The local dispenser module 140 and the local input/output module 170 are mounted and provided in a predetermined local housing 141.

The recirculation line 150 recirculates the ultrapure water from the local dispenser module 140 between the pure water pressure pump 123 and the storage tank module 120. A check valve 122 is provided in the recirculation line 150 to prevent the recirculated ultrapure water from flowing back to the storage tank module 120. In addition, a pressure reducing valve 151 is provided on the recirculation line 150 to reduce the pressure of the ultrapure water for recirculation of the ultrapure water.

When the purity value included in the second purity information of the ultrapure water falls below a preset level, the control unit supplies the ultrapure water of the local dispenser module 140 to the recycle line until the purity value reaches a preset level. Recycle through (150).

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those of ordinary skill in the art will appreciate that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical scope of the present invention should be determined by the technical spirit of the appended claims.

110: pure water generation module 111: first filter
112: reverse osmosis filter 113: first purity information generation unit
114: inlet valve 115: filtered raw water pressure pump
116: drain valve 117: 3 low valve
118: main housing 120: storage tank module
121: discharge port 122: check valve
123: pure water pressure pump 124: drain valve
130: ultrapure water generation module 131: sterilization unit
132: second filter 133: second purity information generation unit
140: local dispenser module 141: local housing
150: recirculation line 151: pressure reducing valve
160: main input/output module 161: main display unit
162: plug input unit 170: local input/output module

Claims (4)

In the ultrapure water production apparatus,
A first filter for removing particles by filtering the supplied raw water, a reverse osmosis filter for generating pure water by filtering impurities of the filtered raw water filtered by the first filter, and a first purity information by sensing the conductivity of the pure water. A pure water generating module including a generating first purity information generating unit;
A storage tank module receiving and storing the generated pure water;
A sterilization unit that receives and sterilizes pure water in the storage tank module by a pure water supply pump, a secondary filter that filters impurities of the sterilized pure water to generate ultrapure water, and detects the resistance of the ultrapure water filtered by the secondary filter An ultrapure water generation module including a second purity information generation unit that generates second purity information;
A main input/output module including a main input unit for receiving user input information and a main display unit for displaying information on the ultrapure water generation module;
A control module configured to display information of the ultrapure water generation module on the main display unit based on the first purity information and the second purity information, and control the ultrapure water generation module based on input information received from the main input unit;
A local dispenser module for discharging the ultrapure water to the outside;
A recirculation line for recirculating the ultrapure water from the local dispenser module between the pure water supply pump and the storage tank module;
A check valve installed to prevent the recirculated ultrapure water from flowing back to the storage tank module;
A pressure reducing valve installed on the recirculation line to reduce the pressure of the recirculated ultrapure water; And
The pure water generating module, the ultra-pure water generating module and the control module comprises a main housing disposed therein,
The storage tank module and the local dispenser module are disposed outside the main housing,
The storage tank module is provided with a discharge port for discharging and using the stored pure water, and a drain valve for draining the stored pure water,
The control module,
When the purity value included in the second purity information of the ultrapure water falls below a preset level, the ultrapure water of the local dispenser module is recycled until the purity value reaches a preset level,
A local input unit for receiving input information from a user, and a local display unit for displaying information on the ultrapure water generation module, and a local input/output module interlocked with the main input/output module and operated in the same manner as the main input/output module. ,
Ultrapure water production device. delete delete The method according to claim 1,
Ultrapure water production apparatus further comprising a local housing in which the local dispenser module and the local input/output module are mounted.

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