KR102165546B1 - Self-diagnosis/correcting module and self-diagnosis/correcting method in DC plasma power supply apparatus - Google Patents

Abstract

The present invention relates to a self-diagnosis/correction module and a self-diagnosis/correction method for a DC plasma power supply apparatus. The module includes: a power dividing unit connected to the output end of the plasma power supply apparatus and dividing output power at any duty cycle; a divided power accumulation unit accumulating the divided power; an accumulated power discharge unit discharging the accumulated charge for accurate divided power measurement and initializing the divided power accumulation unit; a divided current detection unit measuring the current quantity at a time when power moves from the power dividing unit to the divided power accumulation unit; a first filter unit removing noise from an output voltage signal of the divided power accumulation unit; a second filter unit removing noise from an output current signal of the divided current detection unit; and a central processing device unit controlling the operation of the power dividing unit and the accumulated power discharge unit. The central processing device unit collects a test voltage signal corresponding to the voltage of the divided power and a test current signal corresponding to the current of the divided power from the first and second filter units, respectively. The signals are plasma power supply apparatus status information. The central processing device unit determines based on the collected status information whether the plasma power supply apparatus is abnormal in terms of function and performance. According to the present invention, self-diagnosis and self-correction information is collected, compared to a reference value, and analyzed and a user is provided with the content and result of the self-correction and the status information on whether the plasma power supply apparatus is defective or malfunctioning. As a result, equipment reliability can be ensured and the user can run a semiconductor process with economy, speed, and accuracy.

Description

Self-diagnosis/correcting module and self-diagnosis/correcting method in DC plasma power supply apparatus}

The present invention relates to a self-diagnosis/calibration module of a DC plasma power supply, and more particularly, a defect or failure of a plasma power supply by comparing and analyzing information obtained through a sensing means connected to the plasma power supply with a reference value. The present invention relates to a self-diagnosis/calibration module and a self-diagnosis/calibration method of a DC plasma power supply that determines and corrects whether or not, and notifies a user of a final result.

A power supply unit refers to a device that supplies voltage and current to operate various electronic devices or mechanical devices. Although the capacity of such a power supply varies depending on the applied device or device, its principle and purpose are similar.

Power supplies as described above can be classified into linear power supplies and switching power supplies according to their operation method. Linear power supplies have a large overall volume and weight and low power density. On the other hand, switching power supplies have high-efficiency and high-density characteristics, and this is the case for almost all power supplies.

In recent years, as the demand for plasma power supply devices has rapidly increased in the field of semiconductor processing, a large-capacity DC power supply device capable of stably supplying power to the plasma generating device is required. In order to form and maintain a high-efficiency plasma in a waste-gas treatment process using plasma, a high-performance power supply is essential. In addition, a function of preventing an accident in advance (eg, a function of preventing an accident in advance by detecting an abnormal output voltage or a large current control error in advance and reflecting it in the control) is becoming an essential condition. Furthermore, there is a demand for a product with a countermeasure on how to ensure safety in the event of a problem even in the event of a control instability of the central processing unit.

On the other hand, Korean Patent Publication No. 10-1918253 (Patent Document 1) discloses "a self-diagnosis module and self-diagnosis method of a plasma power supply device", and the self-diagnosis module of a plasma power supply device according to this is disclosed. A dummy load resistor connected to the inner end of the plasma power supply for self-diagnosis of the power supply to form a closed circuit at the output of the power supply during self-diagnosis of the power supply; A test current applying unit for inputting a power supply operating current through the dummy load resistor to confirm normal operation of the power supply; Collects self-diagnosis data including any one or more of input/output current, voltage, temperature, operation status, measured by the test current applied to the power supply from the diagnostic sensor provided in the input/output node of the components and circuits constituting the power supply. Data collection unit; It is characterized in that it comprises a determination unit that determines whether or not each of the power supply component component and circuit failure by comparing the self-diagnosis data received from the data collection unit with a preset value.

In the case of Patent Document 1 as described above, there is an advantage of being able to quickly diagnose the presence of abnormalities in components and circuits by the plasma power device itself without a separate load, cooler and wiring connection when checking the power device, but self-diagnosis The function is to measure (diagnose) a part of the function of the device before operating the plasma power supply in earnest by connecting a large-capacity load resistor in parallel to the output terminal. There is a problem that is difficult to accurately judge.

Korean Patent Publication No. 10-1918253 (Registered on November 7, 2018, Announced on November 13, 2018)

The present invention was created in consideration of the above matters comprehensively, and instead of a large-capacity dummy load resistor for self-calibration, a divided power accumulator, which is a combination of an inductor and a capacitor, is provided in a self-diagnosis module, and the plasma power supply is self-diagnosed. And by collecting self-diagnosis and self-calibration information according to the conditions set through the detection unit connected for self-calibration, comparing/analyzing it with the reference value, and providing the user with status information on the presence or absence of defects or failures of the plasma power supply, and the contents and results of self-calibration. It is an object of the present invention to provide a self-diagnosis/calibration module and self-diagnosis/calibration method of a DC plasma power supply that guarantees the reliability of a device and enables users to operate a semiconductor process economically, quickly and accurately.

In order to achieve the above object, the self-diagnosis/calibration module of the DC plasma power supply device according to the present invention is a module that is connected to the output of the plasma power supply device to self-diagnose and correct an abnormality in the plasma power supply device,

A power dividing unit connected to the output terminal of the plasma power supply and dividing the output power to be diagnosed at an arbitrary ratio;

A divided power accumulating unit that accumulates the electric power divided by the power dividing unit;

An accumulated power discharging unit for discharging the accumulated charge to accurately measure the electric power divided by the power dividing unit and initializing the divided power accumulating unit;

A divided current sensing unit that measures an amount of current when electric power is transferred from the power dividing unit to the divided power accumulating unit;

A first filter unit for removing noise included in the output voltage signal of the divided power storage unit;

A second filter unit for removing noise included in the output current signal of the divided current detection unit; And

While controlling the operation of the power dividing unit and the accumulated power discharging unit, a test voltage signal corresponding to the voltage of the divided power and a test current signal corresponding to the current of the divided power as the state information of the plasma power supply device are transmitted to the first It is characterized in that it includes a central processing unit that collects each from the filter unit and the second filter unit, and determines whether the function and performance of the plasma power supply is abnormal based on the collected state information.

Here, the divided power accumulating unit may include a series-parallel combination of a capacitor C that accumulates divided power and an inductor L that suppresses excessive inrush current.

In addition, the central processing unit unit includes a self-control unit for controlling the operation of the power dividing unit and the accumulated power discharging unit; It may be configured to include a self-processing unit that collects state information of the plasma power supply and determines whether the function and performance of the plasma power supply is abnormal based on the collected state information.

Here, the self-controller may generate a discharge control signal for controlling the accumulated power discharging unit and a division control signal having an arbitrary ratio of controlling the power dividing unit.

At this time, the self-controller continuously generates the division control signal at a fixed application rate, or repeats generation and interruption of the division control signal at a fixed application rate, or generation and interruption of the division control signal at a variable application rate. Can be continued or repeated with occurrence and cessation.

In addition, the self-processing unit receives a test voltage signal corresponding to the divided power voltage and a test current signal corresponding to the divided power current from the first filter unit and the second filter unit, respectively, and collects self-diagnosis and self-calibration. Data can be used for comparison and analysis.

In addition, when the accumulated power discharge unit discharges the accumulated charge and initializes the divided power storage unit, the divided power storage unit may be initialized by receiving a discharge control signal from the self-controller.

In addition, when the power dividing unit divides the output power of the plasma power supply at an arbitrary rate, a division control signal according to an arbitrary rate may be received from the self-controller.

In addition, in order to achieve the above object, the self-diagnosis method of the DC plasma power supply device according to the present invention,

Based on the self-diagnosis/calibration module of the DC plasma power supply including the power division unit, the divided power accumulation unit, the accumulated power discharge unit, the divided current detection unit, the first filter unit, the second filter unit and the central processing unit unit. As a self-diagnosis method,

a) generating an arbitrary output power to the output of the plasma power supply to check whether the plasma power supply is defective or faulty by the central processing unit;

b) initializing the divided power accumulating unit to accurately measure the divided power by the accumulated power discharging unit;

c) A split control signal for dividing the power input from the output of the plasma power supply to the self-diagnosis/calibration module at an arbitrary rate is generated by the self-controlling unit of the central processing unit and transmitted to the power dividing unit. step;

d) obtaining a test voltage signal from the first filter unit and a test current signal from the second filter unit by the self-processing unit of the central processing unit unit, respectively, and obtaining a state information signal of the plasma power supply unit ; And

e) comparing and analyzing the state information signal of the plasma power supply obtained by the self-processing unit with the reference state information signal of the plasma power supply in a normal state to determine whether the plasma power supply is defective or faulty. Including it has its characteristics.

Here, in generating the divided control signal by the self-controller in step c), the self-controlling continuously generates the divided control signal at a fixed time ratio or the divided control signal is generated at a fixed time ratio. It is possible to repeat over and interruption, continue to generate and interrupt the division control signal, or repeat occurrence and interruption at a variable application rate.

In addition, in step d), the self-processing unit obtains a test voltage signal corresponding to the voltage of the divided power and a test current signal corresponding to the current of the divided power from the first filter unit and the second filter unit for self-diagnosis. And it can be used for comparison and analysis as collected data of self-correction.

In addition, in order to achieve the above object, the self-calibration method of the DC plasma power supply device according to the present invention,

Based on the self-diagnosis/calibration module of the DC plasma power supply including the power division unit, the divided power accumulation unit, the accumulated power discharge unit, the divided current detection unit, the first filter unit, the second filter unit and the central processing unit unit. As a self-correction method,

a) receiving an operating voltage signal and an operating current signal from an output portion of the plasma power supply by the central processing unit to obtain operating voltage information and operating current information, respectively;

b) initializing the divided power accumulating unit by the accumulated power discharging unit in an operating state of the plasma power supply device;

c) controlling the power dividing unit by generating a division control signal by the self-controlling unit of the central processing unit to divide the driving power of the plasma power supply at an arbitrary ratio;

d) A test voltage signal and a test current signal are obtained from the first filter unit and a test current signal from the second filter unit respectively by the self-processing unit of the central processing unit, and the divided power Pd is the driving power Pr. Determining whether the multiplied by the application ratio (D) (Pd = D·Pr) is satisfied; And

e) According to the determination result, the operation power is adjusted by the central processing unit, so that the divided power (Pd) satisfies the value obtained by multiplying the operating power (Pr) by the application ratio (D) (Pd = D·Pr). It is characterized in that it includes the step of doing.

Here, in generating the divided control signal by the self-controller in step c), the self-controlling continuously generates the divided control signal at a fixed time ratio or the divided control signal is generated at a fixed time ratio. It is possible to repeat over and interruption, continue to generate and interrupt the division control signal, or repeat occurrence and interruption at a variable application rate.

In addition, in step d), the self-processing unit obtains a test voltage signal corresponding to the voltage of the divided power and a test current signal corresponding to the current of the divided power from the first filter unit and the second filter unit for self-diagnosis. And it can be used for comparison and analysis as collected data of self-correction.

According to the present invention, instead of a large-capacity dummy load resistor for self-calibration, a divided power accumulating unit, which is a combination of an inductor and a capacitor, is provided in the self-diagnosis module, and through a detection unit connected to the plasma power supply for self-diagnosis and self-calibration. By collecting self-diagnosis and self-calibration information according to the set conditions, comparing/analyzing it with the reference value, and providing the status information on the presence or absence of defects or failures of the plasma power supply and the contents and results of self-calibration to the user, the reliability of the device can be guaranteed. , The user has the advantage of being economical and able to quickly and accurately operate the semiconductor process.

1 is a diagram schematically explaining the theoretical background of a self-diagnosis module, a self-diagnosis method, and a self-correction method.
FIG. 2 is a circuit diagram illustrating that the power storage unit (LC tank) of the self-diagnosis module can be reduced according to the fertilization ratio (D) for self-diagnosis and self-calibration.
3 is a diagram illustrating a state in which a self-diagnosis/calibration module of a DC plasma power supply device according to an embodiment of the present invention is applied to a plasma power supply device.
4 is a block diagram schematically showing the configuration of a self-diagnosis/calibration module of a DC plasma power supply device according to an embodiment of the present invention.
5 is a diagram illustrating a case in which a divided control signal is input to a power divider of a self-diagnosis/calibration module of a DC plasma power supply device according to the present invention in various application ratios and control methods.
6 is a flowchart illustrating an execution process of a self-diagnosis method of a DC plasma power supply device according to an embodiment of the present invention.
7 is a flowchart showing an execution process of a self-calibration method of a DC plasma power supply device according to an embodiment of the present invention.

Terms or words used in this specification and claims are limited to their usual or dictionary meanings and should not be interpreted, and that the inventor can appropriately define the concept of terms in order to describe his own invention in the best way. Based on the principle, it should be interpreted as a meaning and concept consistent with the technical idea of the present invention.

Throughout the specification, when a part "includes" a certain component, it means that other components may be further included rather than excluding other components unless specifically stated to the contrary. In addition, terms such as "...unit", "...group", "module", and "device" described in the specification mean units that process at least one function or operation, which is a combination of hardware or software or hardware and software. It can be implemented as

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

Here, prior to the full description of the embodiments of the present invention, in order to help understand the present invention, a brief description of the theoretical background of the self-diagnosis module, the self-diagnosis method, and the self-correction method, which are the main technical contents of the present invention. Let's see.

1 is a diagram schematically explaining the theoretical background of a self-diagnosis module, a self-diagnosis method, and a self-correction method.

Referring to FIG. 1, the ultimate goal of the present invention is to utilize the concept of a buck converter among power converters in order to remove a dummy load resistor having a heavy, bulky, and very large electric capacity in the prior art. In addition, a peculiarity in the present invention is that in the self-diagnosis and self-calibration process of a plasma power supply capable of an arbitrary output (A), there is no need for a load to fully handle the arbitrary output (A).

Looking at the contents in detail in FIG. 1, the output power of an arbitrary plasma power supply is Pout, the input power of the self-diagnosis module is Pin, the period is T, and the ratio of the time when the output of the plasma power supply is supplied to the self-diagnosis module. When is D, the relationship between the output of the plasma power supply and the input of the self-diagnosis module can be expressed by the following equation.

Pin = 1/T·{DT·Pout + (1-D)T·0} = D·Pout

As can be seen from the above equation, the input power Pin of the self-diagnosis module is the result of multiplying the output power Pout of the plasma power supply by the application rate D.

Therefore, when the application rate D is decreased, the input power of the self-diagnosis module decreases. As a result, it is shown that the power storage unit (LC tank) required for the self-diagnosis module for self-diagnosis and self-calibration of the plasma power supply (described later in this regard) can be sufficiently small according to the application ratio D. This can be seen through the dotted ellipse mark.

Then, hereinafter, an embodiment of the present invention will be described based on the above theoretical background.

3 is a view showing a state in which a self-diagnosis/calibration module of a DC plasma power supply according to an embodiment of the present invention is applied to a plasma power supply, and FIG. 4 is a configuration of a self-diagnosis/calibration module of the DC plasma power supply It is a block diagram schematically showing.

3 and 4, the self-diagnosis/calibration module 300 of the DC plasma power supply device according to the present invention is connected to the output unit 230 of the plasma power supply device 200 and is connected to the plasma power supply device ( As a module for self-diagnosing and correcting the abnormality of 200), the power division unit 310, the divided power accumulation unit 320, the accumulated power discharge unit 330, the divided current detection unit 340, the first filter unit ( 350), a second filter unit 360, and a central processing unit 370.

The power dividing unit 310 is connected to the output terminals (Point A, Point B) of the output unit 230 of the plasma power supply 200, and divides the output power to be diagnosed at an arbitrary ratio. Here, in the power dividing unit 310 dividing the output power of the plasma power supply device 200 at an arbitrary rate, the central processing unit 370, which will be described later, provides a division control signal at an arbitrary rate. It can be received from the self-controller 371.

The divided power accumulating unit 320 accumulates the electric power divided by the power dividing unit 310. Here, the divided power accumulating unit 320 may be formed of a series-parallel combination of a capacitor C that stores divided power and an inductor L that suppresses the inrush of excessive inrush current.

The accumulated power discharging unit 330 discharges the accumulated electric charge in order to accurately measure the power divided by the power dividing unit 310 and initializes the divided power accumulating unit 320. Here, when the accumulated power discharge unit 330 discharges the accumulated charge and initializes the divided power storage unit 320, a discharge control signal from the self-control unit 371 of the central processing unit 370 to be described later The divided power accumulation unit 320 may be initialized by receiving.

The divided current sensing unit 340 measures an amount of current when power is transferred from the power dividing unit 310 to the divided power accumulating unit 320. A current sensor may be used as the divided current sensing unit 340. When the power divided by the power dividing unit 310 is accumulated in the divided power accumulating unit 320, the test current may be sensed by a current sensor. At this time, the test current becomes a test current signal from which semiconductor switching noise is removed (filtered) by a second filter unit 360 to be described later.

The first filter unit 350 removes noise included in the output voltage signal of the divided power accumulating unit 320. That is, the power accumulated in the divided power accumulating unit 320 becomes a test voltage signal from which semiconductor switching noise is filtered by the first filter unit 350. The test voltage signal, which is an analog value, is converted into a digital value by the central processing unit 370 and stored in a test voltage buffer (not shown) by the self-processing unit 372 of the central processing unit 370.

The second filter unit 360 removes noise included in the output current signal of the divided current detection unit 340. When the power divided by the power dividing unit 310 is accumulated in the divided power accumulating unit 320, the test current may be sensed by the divided current detecting unit 340 (current sensor). In this case, the test current becomes a test current signal from which semiconductor switching noise is removed (filtered) by the second filter unit 360. The test current signal, which is an analog value, is converted into a digital value by the central processing unit 370 and stored in a test current buffer (not shown) by the self-processing unit 372 of the central processing unit 370.

Here, the self-diagnosis data collected in the test voltage buffer and the test current buffer as described above can be compared/analyzed by a self-diagnosis method and used to determine the presence or absence of an abnormality in the plasma power supply 200, and the operating voltage signal And it can be used as a means of self-calibration by comparing/analyzing with the driving current signal.

The central processing unit 370 controls the operation of the power dividing unit 310 and the accumulated power discharging unit 330, while a test voltage signal corresponding to the voltage of the divided power as state information of the plasma power supply unit 200 And, a test current signal corresponding to the divided power current is collected from the first filter unit 350 and the second filter unit 360, respectively, and the function of the plasma power supply 200 based on the collected state information And determine whether or not the performance is abnormal. Such a central processing unit 370 includes a self-control unit 371 for controlling the operation of the power splitting unit 310 and the accumulated power discharging unit 330; It may be configured to include a self-processing unit 372 that collects state information of the plasma power supply 200 and determines whether the function and performance of the plasma power supply 200 is abnormal based on the collected state information. . Here, the self-controller 371 may generate a discharge control signal for controlling the accumulated power discharging unit 330 and a division control signal having an arbitrary ratio for controlling the power dividing unit 310. At this time, the self-controller 371 either continuously generates the divided control signal at a fixed application rate (refer to FIG. 5A), or repeats the generation and interruption of the divided control signal at a fixed application rate ( 5(B)), the generation and interruption of the divided control signal may be continued or the generation and interruption of the divided control signal may be repeated (refer to FIG. 5C) at a variable application rate. In addition, the self-processing unit 372 receives a test voltage signal corresponding to the voltage of the divided power and a test current signal corresponding to the current of the divided power from the first filter unit 350 and the second filter unit 360, respectively. It can be received and used for comparison and analysis as collected data for self-diagnosis and self-calibration.

Here, the input unit 210, the inverter 220, the output unit 230, which are components of the plasma power supply 200 to which the self-diagnosis/calibration module 300 of the DC plasma power supply device of the present invention is applied as described above. I will also briefly add a description of

The input unit 210 detects the state of the current and voltage of the output unit 230, and the presence or absence of an abnormality is determined by the central processing unit unit 370 of the self-diagnosis/correction module 300 of the DC plasma power supply device of the present invention. Judging from this, a main power cut-off unit (not shown) that cuts off the main power when an abnormality occurs in the system (i.e., a plasma power supply), a rectifier (not shown) that rectifies the 3-phase AC power into DC power, and the rectified It may be composed of a DC-Link capacitor unit (not shown) to smooth the power.

The inverter 220 receives a command (e.g., PWM) from the central processing unit 370 and supplies a driving signal suitable for the IGBT or FET, and a driver unit (not shown) that receives the driving signal and switches DC power to maintain a constant cycle. It may be composed of a switching unit (not shown) that converts into AC power and a main power transformer (not shown) for transmitting maximum power to the output load.

The output unit 230 includes a rectifier (not shown) for converting the output of the inverter 220, that is, AC power into final DC power, and a DC smoother (not shown) for smoothing power having a large pulsation passing through the rectifier. ), a coupling transformer (not shown) that couples plasma ignition energy to a load, and a sensor unit (not shown) that senses output voltage and current.

The self-diagnosis/calibration module 300 of the present invention is connected to the output terminal of the plasma power supply 200 as described above, and is used as a means for self-diagnosis and self-calibration of the plasma power supply 200. In this embodiment, regardless of whether a load is connected to the output terminal of the plasma power supply 200, the central processing unit 370 controls the input unit 210 and the inverter 220 under the condition of a self-diagnosis method or a self-calibration method. Then, the output unit 230 controls an output corresponding thereto.

5 is a diagram illustrating a case in which a divided control signal is input to a power divider of a self-diagnosis/calibration module of a DC plasma power supply device according to the present invention in various application ratios and control methods.

Referring to FIG. 5, the self-controller 371 of the central processing unit 370 may continuously generate a divided control signal at an arbitrary fixed fertilization rate as shown in (A), and a fixed fertilization rate as shown in (B). The generation and interruption of the divided control signal can be repeated. In addition, as shown in (C), generation and interruption of the divided control signal may be continued or generation and interruption may be repeated at a variable application rate.

In the case of continuously generating the divided control signal at a fixed rate as shown in (A), the input power of the self-diagnosis/correction module 300 is small, and the burden on the divided power accumulating unit 320 is small. And in the case of repeating the generation and interruption of the divided control signal at a fixed ratio with (B), the input power of the self-diagnosis/calibration module 300 is very large, and a very large test on the divided power accumulator 320 This is the case where power is accumulated. In addition, when the generation and interruption of the divided control signal is continued or the generation and interruption of the divided control signal is repeated at a variable time ratio as shown in (C), it is more effective in the self-calibration process in the actual operating state of the plasma power supply 200. .

Hereinafter, a self-diagnosis method and a self-calibration method of a DC plasma power supply device based on a self-diagnosis/calibration module of the DC plasma power supply device according to the present invention having the above configuration will be described.

6 is a flowchart illustrating an execution process of a self-diagnosis method of a DC plasma power supply device according to an embodiment of the present invention.

Referring to FIG. 6, the self-diagnosis method of the DC plasma power supply apparatus according to the present invention includes a power division unit 310, a divided power storage unit 320, a stored power discharge unit 330, and a divided current as described above. Self-diagnosis/calibration module 300 of the DC plasma power supply including the detection unit 340, the first filter unit 350, the second filter unit 360, and the central processing unit 370 As a diagnostic method, first, the central processing unit 370 generates an arbitrary output power to the output unit 230 of the plasma power supply 200 in order to check whether the plasma power supply 200 is defective or faulty. (Step S601).

Then, the accumulated power discharging unit 330 initializes the divided power accumulating unit 320 in order to accurately measure the divided power (step S602).

Then, a division control signal for dividing the power input from the output unit 230 of the plasma power supply device 200 to the self-diagnosis/correction module 300 at an arbitrary ratio is transmitted to the central processing unit 370. It is generated by the self-control unit 371 and transmitted to the power dividing unit 310 (step S603). Here, in generating the divided control signal by the self-controlling 371 in this way, the self-controlling 371 continuously generates the divided control signal at an arbitrary fixed fertilization rate (see FIG. 5A). , It is possible to repeat the generation and interruption of the divided control signal at a fixed fertilization rate (refer to FIG. 5B), or repeat the generation and interruption of the divided control signal at a variable fertilization rate ( See Figure 5 (C)).

Thereafter, a test voltage signal from the first filter unit 350 and a test current signal from the second filter unit 360 are obtained by the self-processing unit 372 of the central processing unit 370, respectively, A state information signal of the plasma power supply 200 is acquired (step S604). Here, the self-processing unit 372 receives a test voltage signal corresponding to the voltage of the divided power and a test current signal corresponding to the current of the divided power from the first filter unit 350 and the second filter unit 360, respectively. It can be obtained and used for comparison and analysis as collected data for self-diagnosis and self-correction.

As described above, after acquiring the state information signal of the plasma power supply 200, the acquired state information signal of the plasma power supply unit 372 is converted to the reference state information of the plasma power supply unit in a normal state. By comparing and analyzing the signal, it is determined whether or not the plasma power supply 200 is defective (step S605).

For example, when the maximum rated output of the plasma power supply 200 is A, the output is set at a ratio of (50/n, n = 100) in the self-diagnosis process. Dividing the power by 1/2 of the application rate, the product of the test voltage value and the test current value is as follows.

(A * 50 / 100) * Fertilization ratio = (A * 05) * 05 = 025 * A

That is, if the product of the obtained test voltage value and the test current value is 25% of A, as a result of self-diagnosis, the plasma power supply 200 determines that there is no abnormality.

7 is a flowchart showing an execution process of a self-calibration method of a DC plasma power supply device according to an embodiment of the present invention.

Referring to FIG. 7, the self-calibration method of the DC plasma power supply device according to the present invention includes a power division unit 310, a divided power storage unit 320, a stored power discharge unit 330, and a divided current as described above. Self-diagnosis/calibration module 300 of the DC plasma power supply including the detection unit 340, the first filter unit 350, the second filter unit 360, and the central processing unit 370 As a calibration method, first, a driving voltage signal and a driving current signal are received from the output unit 230 of the plasma power supply 200 by the central processing unit 370 to obtain driving voltage information and driving current information, respectively ( Step S701).

Then, in the operating state of the plasma power supply 200, the accumulated power discharging unit 330 initializes the divided power accumulating unit 320 (step S702).

Then, in order to divide the operation power of the plasma power supply 200 at an arbitrary ratio, the power divider 310 generates a divided control signal by the self-controller 371 of the central processing unit 370 Control (step S703). Here, in generating the divided control signal by the self-controlling 371, the self-controlling 371 continuously generates the divided control signal at an arbitrary fixed fertilization ratio (refer to FIG. 5A), It is possible to repeat the generation and interruption of the divided control signal at a fixed fertilization rate (refer to FIG. 5B), or repeat the generation and interruption of the divided control signal at a variable fertilization rate (Fig. 5(C)).

Thereafter, the self-processing unit 372 of the central processing unit 370 obtains a test voltage signal from the first filter unit 350 and a test current signal from the second filter unit 360, respectively, and As a result, it is determined whether the divided power Pd satisfies the value obtained by multiplying the driving power Pr by the application ratio D (Pd = D·Pr) (step S704). Here, the self-processing unit 372 receives a test voltage signal corresponding to the voltage of the divided power and a test current signal corresponding to the current of the divided power from the first filter unit 350 and the second filter unit 360, respectively. It can be obtained and used for comparison and analysis as collected data for self-diagnosis and self-correction.

In this way, the self-processing unit 372 determines whether the divided power Pd satisfies the value obtained by multiplying the driving power Pr by the fertilization ratio D (Pd = D Pr), and then according to the determination result The operating power is adjusted by the processing unit 370 to correct the divided power Pd to satisfy the value obtained by multiplying the operating power Pr by the application ratio D (Pd = D·Pr) (step S705).

For example, as described in FIG. 6 above, when the plasma power supply 200 operates in a normal state as a result of self-diagnosis of the plasma power supply, the maximum rated output is B , If the output is set to 100%, self-calibration can be confirmed by the following process. Here, the operation in accordance with the set value (target value) refers to a time when the plasma power supply 200 supplies arbitrary power to the actual torch load to ignite and maintain the inside of the torch in a plasma state.

If the test voltage and test current values are obtained by operating the self-diagnosis/calibration module 300 with the application ratio D = 1 / 100, and the product of the test voltage value and the test current value is C, then C = B / 100 In this case, it is determined to be in a state that requires temporary correction. Therefore, when the operation power is adjusted in the central processing unit 370 to satisfy C = B / 100, the self-calibration is completed.

As described above, the self-diagnosis/calibration module and self-diagnosis/calibration method of the DC plasma power supply according to the present invention is a self-diagnosis module for the divided power accumulation unit, which is a combination of an inductor and a capacitor, instead of a large dummy load resistor for self-calibration. In accordance with the conditions set through the detection unit connected to the plasma power supply for self-diagnosis and self-calibration, the self-diagnosis and self-calibration information is collected and compared/analyzed with the reference value to provide information on the presence or absence of defects or failures in the plasma power supply. By providing the user with the contents and results of self-calibration, the reliability of the device can be guaranteed, and the user can economically, quickly and accurately operate the semiconductor process.

In addition, the self-diagnosis/calibration module and method according to the present invention not only determine the presence or absence of a defect or failure of the device itself immediately before the main operation process of the plasma power supply device, but also are not separated from the output stage during the main operation process, and the self-diagnosis voltage And by collecting the self-diagnosis current information and comparing/analyzing it with the operating voltage and the operating current, there is an advantage of performing a self-calibration function when a device malfunction or defect occurs.

In addition, the self-diagnosis/calibration module and method according to the present invention can determine whether or not there is an abnormality in the performance and function of the device not only during the initial inspection of the plasma power supply, but also during the continuous operation process, and the contents thereof can be communicated to the user. By using the transmission in real time, the user has the advantage of being able to immediately and actively cope with an abnormal situation that may occur while using the plasma power supply.

As described above, the present invention has been described in detail through preferred embodiments, but the present invention is not limited thereto, and various modifications and applications can be made within the scope of the technical spirit of the present invention. It is self-explanatory to the technician. Therefore, the true scope of protection of the present invention should be interpreted by the following claims, and all technical ideas within the scope equivalent thereto should be interpreted as being included in the scope of the present invention.

200: plasma power supply 210: input
220: inverter 230: output
300: (Invention) Self-diagnosis/calibration module of DC plasma power supply
310: power division unit 320: division power storage unit
330: accumulated power discharge unit 340: divided current detection unit
350: first filter unit 360: second filter unit
370: central processing unit 371: self control unit
372: self-processing unit

Claims (14)

As a module that is connected to the output of the plasma power supply to self-diagnose and correct the abnormality of the plasma power supply,
A power dividing unit connected to the output terminal of the plasma power supply and dividing the output power to be diagnosed at an arbitrary ratio;
A divided power accumulating unit that accumulates the electric power divided by the power dividing unit;
An accumulated power discharging unit for discharging the accumulated charge to accurately measure the electric power divided by the power dividing unit and initializing the divided power accumulating unit;
A divided current sensing unit that measures an amount of current when electric power is transferred from the power dividing unit to the divided power accumulating unit;
A first filter unit for removing noise included in the output voltage signal of the divided power storage unit;
A second filter unit for removing noise included in the output current signal of the divided current detection unit; And
While controlling the operation of the power dividing unit and the accumulated power discharging unit, a test voltage signal corresponding to the voltage of the divided power and a test current signal corresponding to the current of the divided power as the state information of the plasma power supply device are transmitted to the first Self-diagnosis/calibration module for DC plasma power supply including a central processing unit that collects each from the filter unit and the second filter unit and determines whether the function and performance of the plasma power supply is abnormal based on the collected state information .
The method of claim 1,
The divided power accumulating unit is a self-diagnosis/calibration module of a DC plasma power supply, characterized in that the combination of a capacitor (C) for storing divided power and an inductor (L) for suppressing the inrush of excessive inrush current.
The method of claim 1,
The central processing unit,
A self-controller for controlling operations of the power dividing unit and the accumulated power discharging unit;
A self-diagnosis/calibration module of a DC plasma power supply comprising a self-processing unit that collects state information of the plasma power supply and determines whether the function and performance of the plasma power supply is abnormal based on the collected state information.
The method of claim 3,
Wherein the self-controller generates a discharge control signal for controlling the accumulated power discharging unit and a division control signal for controlling the power dividing unit at an arbitrary ratio. The method of claim 4,
The self-controller continuously generates a divided control signal at a fixed application rate, repeats generation and interruption of the divided control signal at a fixed application rate, or continues generation and interruption of the divided control signal at a variable application rate. Or a self-diagnosis/calibration module of a DC plasma power supply, characterized in that repeating generation and interruption.
The method of claim 3,
The self-processing unit receives a test voltage signal corresponding to the divided power voltage and a test current signal corresponding to the divided power current from the first filter unit and the second filter unit, respectively, as collected data for self-diagnosis and self-calibration. Self-diagnosis/calibration module of a DC plasma power supply, characterized in that used for comparison and analysis.
The method of claim 4,
The self-diagnosis of a DC plasma power supply device, characterized in that when the accumulated power discharge unit discharges the accumulated charge and initializes the divided power storage unit, the divided power storage unit is initialized by receiving a discharge control signal from the self control unit. Calibration module. The method of claim 4,
In the power division unit dividing the output power of the plasma power supply at an arbitrary rate, the self-diagnosis of a DC plasma power supply device, characterized in that it receives a division control signal at an arbitrary rate from the self-controller Calibration module.
A power dividing unit connected to the output terminal of the plasma power supply and dividing the output power to be diagnosed at an arbitrary ratio; A divided power accumulating unit that accumulates the electric power divided by the power dividing unit; An accumulated power discharging unit for discharging the accumulated charge to accurately measure the electric power divided by the power dividing unit and initializing the divided power accumulating unit; A divided current sensing unit that measures an amount of current when electric power is transferred from the power dividing unit to the divided power accumulating unit; A first filter unit for removing noise included in the output voltage signal of the divided power storage unit; A second filter unit for removing noise included in the output current signal of the divided current detection unit; And a test voltage signal corresponding to a voltage of divided power and a test current signal corresponding to a current of divided power as status information of the plasma power supply device while controlling the operation of the power dividing unit and the accumulated power discharging unit. Self-diagnosis/calibration of a DC plasma power supply including a central processing unit that collects each from the 1 filter unit and the second filter unit and determines whether the function and performance of the plasma power supply is abnormal based on the collected status information As a module-based self-diagnosis method,
a) generating an arbitrary output power to the output of the plasma power supply to check whether the plasma power supply is defective or faulty by the central processing unit;
b) initializing the divided power accumulating unit to accurately measure the divided power by the accumulated power discharging unit;
c) A split control signal for dividing the power input from the output of the plasma power supply to the self-diagnosis/calibration module at an arbitrary rate is generated by the self-controlling unit of the central processing unit and transmitted to the power dividing unit. step;
d) obtaining a test voltage signal from the first filter unit and a test current signal from the second filter unit by the self-processing unit of the central processing unit unit, respectively, and obtaining a state information signal of the plasma power supply unit ; And
e) comparing and analyzing the state information signal of the plasma power supply obtained by the self-processing unit with the reference state information signal of the plasma power supply in a normal state to determine whether the plasma power supply is defective or faulty. Self-diagnosis method of a DC plasma power supply comprising. The method of claim 9,
In the generation of the divided control signal by the self-controlling in step c), the self-controlling continuously generates the divided control signal at a fixed application rate, or the generation and interruption of the divided control signal at a fixed fertilization rate. A self-diagnosis method of a DC plasma power supply, characterized in that repeating, or continuing or repeating the generation and interruption of the divided control signal at a variable application rate.
The method of claim 9,
In step d), the self-processing unit obtains a test voltage signal corresponding to the divided power voltage and a test current signal corresponding to the divided power current from the first filter unit and the second filter unit, respectively, and performs self-diagnosis and self-diagnosis. Self-diagnosis method of a DC plasma power supply, characterized in that used for comparison and analysis as the collected data of calibration. A power dividing unit connected to the output terminal of the plasma power supply and dividing the output power to be diagnosed at an arbitrary ratio; A divided power accumulating unit that accumulates the electric power divided by the power dividing unit; An accumulated power discharging unit for discharging the accumulated charge to accurately measure the electric power divided by the power dividing unit and initializing the divided power accumulating unit; A divided current sensing unit that measures an amount of current when electric power is transferred from the power dividing unit to the divided power accumulating unit; A first filter unit for removing noise included in the output voltage signal of the divided power storage unit; A second filter unit for removing noise included in the output current signal of the divided current detection unit; And a test voltage signal corresponding to a voltage of divided power and a test current signal corresponding to a current of divided power as status information of the plasma power supply device while controlling the operation of the power dividing unit and the accumulated power discharging unit. Self-diagnosis/calibration of a DC plasma power supply including a central processing unit that collects each from the 1 filter unit and the second filter unit and determines whether the function and performance of the plasma power supply is abnormal based on the collected status information As a module-based self-calibration method,
a) receiving an operating voltage signal and an operating current signal from an output portion of the plasma power supply by the central processing unit to obtain operating voltage information and operating current information, respectively;
b) initializing the divided power accumulating unit by the accumulated power discharging unit in an operating state of the plasma power supply device;
c) controlling the power dividing unit by generating a division control signal by the self-controlling unit of the central processing unit to divide the driving power of the plasma power supply at an arbitrary ratio;
d) A test voltage signal and a test current signal are obtained from the first filter unit and a test current signal from the second filter unit respectively by the self-processing unit of the central processing unit, and the divided power Pd is the driving power Pr. Determining whether the multiplied by the application ratio (D) (Pd = D·Pr) is satisfied; And
e) According to the determination result, the operation power is adjusted by the central processing unit, so that the divided power (Pd) satisfies the value obtained by multiplying the operating power (Pr) by the application ratio (D) (Pd = D·Pr). Self-calibration method of a DC plasma power supply comprising the step of.
The method of claim 12,
In the generation of the divided control signal by the self-controlling in step c), the self-controlling continuously generates the divided control signal at a fixed application rate, or the generation and interruption of the divided control signal at a fixed fertilization rate. A self-calibration method of a DC plasma power supply, characterized in that repeating, or continuing or repeating the generation and interruption of the divided control signal at a variable application rate.
The method of claim 12,
In step d), the self-processing unit obtains a test voltage signal corresponding to the divided power voltage and a test current signal corresponding to the divided power current from the first filter unit and the second filter unit, respectively, and performs self-diagnosis and self-diagnosis. Self-calibration method of a DC plasma power supply, characterized in that used for comparison and analysis as the collected data for calibration.

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