KR101918253B1 - Self-diagnosis module and self-diagnosis method of plasma power supply - Google Patents

Abstract

A self-diagnosis module and a self-diagnosis method of a plasma power supply are disclosed. According to an embodiment of the present invention, the self-diagnosis module of a plasma power supply comprises: a dummy load resistance connected to a power supply terminal unit to perform a self-diagnosis of the plasma power supply; a test current applying unit for inputting a power supply driving current to the dummy load resistance; a data collecting unit collecting self-diagnosis data including input/output currents, a voltage, a temperature, an operation state measured by a test current applied to the power supply from a diagnosis sensor provided in input/output nodes of a circuit and a component configuring the power supply; and a determining unit for comparing the self-diagnosis data received from the data collecting unit with a preset value to determine whether each of the circuit and the component of the power supply is defective.

Description

[0001] SELF-DIAGNOSIS MODULE AND SELF-DIAGNOSIS METHOD OF PLASMA POWER SUPPLY [0002]

The present invention relates to a self-diagnosis module and a self-diagnosis method of a plasma power supply apparatus, and more particularly, to a method for determining whether a component and a circuit included in a plasma power supply apparatus are normally operated or not through a load connected to a plasma power supply unit and a plurality of self- And a self-diagnosis module.

Unless otherwise indicated herein, the contents set forth in this section are not prior art to the claims of this application and are not to be construed as prior art to be included in this section.

A power supply is a device that supplies alternating current from a commercial AC power source to a load via a rectifying device, a converting device, a deformation compensating device, etc., and supplies a power by connecting a battery to the output of the rectifying device to be. The power supply unit prevents the malfunction of the equipment by stably processing the input current with noise or unstable input.

When installing the power supply unit or checking whether there is any abnormality in the operating power supply unit, it is necessary to separately operate the power supply unit installed by the operator to determine whether each operation is performed or to disconnect the power supply unit It is necessary to re-install it in a condition suitable for loading or installation conditions and to determine whether the operation is directly performed by the operator.

In this way, it is necessary to provide the power supply unit whenever the power supply unit is installed or to check whether the power supply unit is in operation or not, and it is required to separate the power supply unit from the installed position. Therefore, , Costs and manpower are consumed. In particular, there is an inconvenience that the inspector must manually set and adjust the load and the applied current condition in order to determine whether each circuit included in the power supply unit is abnormal when checking the power supply unit. In addition, since it is necessary to test the stability of the power supply configuration by connecting the switches separately after disconnecting the switches and connected switches according to the configuration of the power supply device, it is necessary to directly set various test conditions at the time of checking the power supply device, It is troublesome to directly adjust circuit wiring.

1. Korean Patent Registration No. 10-1245503 (March 23, 2013)

For the self-diagnosis of the plasma power supply, a dummy load resistor connected to the power supply termination is provided inside or outside the power supply, and the test current and dummy load resistance applied to the plasma power supply configuration, Test conditions are set and self-diagnosis data is collected according to the set conditions. Thereafter, a self-diagnosis module for analyzing the self-diagnosis data collected from the plurality of sensors provided in the circuit constituting the power supply device and determining whether the configuration of the plasma power supply device is abnormal is provided.

The self-diagnosis module of the plasma power supply according to the embodiment includes a dummy load resistor connected to the power supply terminal for self-diagnosis of the plasma power supply; A test current applying unit for inputting an arbitrary operation current of the power supply apparatus by a dummy load resistor in order to check normal operation of the power supply apparatus; A data collecting unit for collecting self-diagnosis data including input / output current, voltage, temperature, and operation / non-operation measured by a test current applied to a power supply unit from a diagnostic sensor provided at an input / output node of a component constituting the power supply unit and a circuit; A judging unit for comparing the self-diagnosis data received from the data collecting unit with a preset value to determine whether each of the power supply unit components and the circuit is faulty; .

According to another embodiment of the present invention, there is provided a method of self-diagnosing a plasma power supply device, comprising the steps of: (A) inputting a test current value of a power supply device using a dummy load resistor to confirm normal operation of the power supply device; (B) collecting self-diagnosis data including input / output current, voltage, temperature, and operation state, which are measured by a test current applied to the power source device from a diagnostic sensor provided in a configuration input / output load of the power source device in the data collector; And (C) comparing the self-diagnosis data received from the data collecting unit with a predetermined value in the determining unit to determine whether each of the power supply device components and the circuit is faulty; .

  It is possible to quickly and accurately diagnose the abnormality of the components and circuits of the plasma power supply device without separately attaching, cooling and connecting the wires when checking the power supply.

In addition, it is operated by any operation command value inputted by the power source device without checking each individual function operation without separating and unplugging from the mother equipment in which the power source device is installed, and the result of the check is displayed by the user such as LCD or FND This significantly shortens the inspection time and the downtime of the equipment.

It should be understood that the effects of the present invention are not limited to the above effects and include all effects that can be deduced from the detailed description of the present invention or the configuration of the invention described in the claims.

1 is a view showing a configuration of a plasma power supply apparatus including a self-diagnosis module according to an embodiment
FIG. 2 is a diagram illustrating an example in which a dummy load resistor according to an embodiment is connected to a power supply device or provided in a power supply device to be used in self-diagnosis of the power supply device
3 is a view showing a plurality of diagnostic sensors and a specific circuit configuration for self-diagnosis of the plasma power supply according to the embodiment
4 is a diagram showing a data processing configuration of the self-diagnosis module 300 according to the embodiment
5 is a flowchart showing a data processing flow of the self-diagnosis method of the plasma power supply apparatus according to the embodiment

BRIEF DESCRIPTION OF THE DRAWINGS The advantages and features of the present invention and the manner of achieving them will become apparent with reference to the embodiments described in detail below with reference to the accompanying drawings. The present invention may, however, be embodied in many different forms and should not be construed as being limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the invention to those skilled in the art. Is provided to fully convey the scope of the invention to those skilled in the art, and the invention is only defined by the scope of the claims. Like numbers refer to like elements throughout.

In the following description of the present invention, a detailed description of known functions and configurations incorporated herein will be omitted when it may make the subject matter of the present invention rather unclear. The following terms are defined in consideration of the functions in the embodiments of the present invention, which may vary depending on the intention of the user, the intention or the custom of the operator. Therefore, the definition should be based on the contents throughout this specification.

1 is a view illustrating a configuration of a plasma power supply including a self-diagnosis module according to an embodiment of the present invention.

1, the plasma power supply according to the embodiment includes a dummy load resistance 400 conversion circuit 100, an amplification circuit 200, a diagnostic sensor 1, 3, 5 for measuring self-diagnostic data according to a test condition And a self-diagnosis module 300. The term " module ", as used herein, should be interpreted to include software, hardware, or a combination thereof, depending on the context in which the term is used. For example, the software may be machine language, firmware, embedded code, and application software. As another example, the hardware may be a circuit, a processor, a computer, an integrated circuit, an integrated circuit core, a sensor, a micro-electro-mechanical system (MEMS), a passive device, or a combination thereof.

The dummy load resistor 400 is connected to the power supply termination for self-diagnosis of the plasma power supply, and constitutes a closed circuit at the power supply output. In the embodiment, when a current is applied to the power supply device by the dummy load resistor 400, components and circuits of the plasma power supply device operate as if the power supply device were actually driven.

The conversion circuit 100 converts the AC current input to the power source device into a DC current, and filters the DC current satisfying the set conditions in the converted DC current. The filtered DC current is then converted back to AC to output the converted current.

The amplifying circuit 200 amplifies the input current when the converted current is input, converts the amplified current into a DC current, and outputs an amplified current obtained by filtering the converted DC current.

The plurality of diagnostic sensors (1, 3, 5) are provided on the input / output rods of the circuit, and measure self-diagnostic data necessary for judgment of circuit abnormal operation such as input / output current value, voltage and temperature according to the current applied to the circuit. In the embodiment, the diagnosis data measured by the diagnosis sensor 3 is used to detect a short circuit of the conversion circuit, an overload of the amplification circuit, a heating state of the wiring to which the diagnosis sensor 3 is connected, a current sensor abnormality, It is possible to grasp the circuit condition affecting the power supply operation.

The self-diagnosis module 300 collects the self-diagnosis data measured by the diagnostic sensors 1, 3, 5 when the test current and voltage by the dummy load resistor 400 are applied to each circuit of the power supply. Thereafter, the self-diagnosis data is compared with previously stored data, and a component or a circuit having an abnormality in the configuration of the power supply device is determined based on the comparison result.

FIG. 2 is a diagram illustrating an example in which a dummy load resistor according to an embodiment is connected to a power supply device and used for self-diagnosis of the power supply device.

As shown in FIG. 2, when the dummy load resistor 400 according to the embodiment is connected to the power supply device, the current applied by the connected dummy load resistor 400 can be used to determine whether the power supply device configuration is abnormal have. The dummy load resistor 400 provided in the embodiment can be used not only in the power supply device but also in various electronic devices equipped with a general power supply device or built therein. When the dummy load resistor 400 provided in the embodiment is connected to the output terminal of the power supply unit, since the closed circuit is formed, the current can be applied to each circuit and components constituting the power supply unit have. The current applied by the dummy load resistor 400 can be applied as a test current to each of the components and circuits constituting the power supply device individually. In addition, in the embodiment, the diagnosis data can be collected while changing the dummy load resistance value or the applied current value, so that the abnormality of the power supply device can be easily checked under various test conditions. Although the dummy load resistor 400 is shown as an example in Figure 2 as being external to the power supply, the dummy load resistor 400 provided by the present disclosure may be provided within the power supply to be used for power supply self- have.

3 is a diagram illustrating a plurality of diagnostic sensors and a specific circuit configuration for self-diagnosis of the plasma power supply according to the embodiment.

Referring to FIG. 3, the conversion circuit 100 may include a converter, a filter, and an inverter. The amplifier circuit 200 may include a transformer, a converter, and a filter.

Each of the diagnostic sensors (1, 2, 4, 5, 6) constituted in the plasma power source apparatus is not only included in the input / output circuits 1, 3, 5 of the conversion circuit 100 and the amplification circuit 200, (2, 4, 6) of the filter and the transformer to measure the diagnostic data including the current value and the temperature input to and output from each of the components constituting the conversion circuit 100 and the amplifier circuit 200 can do.

For example, the converter of the conversion circuit 100 converts an input alternating current into a direct current, and the filter filters the current which is higher than a predetermined value among the converted direct current and inputs the filtered current to the inverter. At this time, the diagnostic sensor 1 senses the input current value, the heat generation temperature depending on the connection wiring resistance, and the diagnostic sensor 2 detects the diagnostic data such as the output current value of the converter, the temperature, can do.

The inverter 130 converts the input DC current into an alternating current and outputs it, and the diagnostic sensor 3 senses the output current. At this time, it is possible to judge the short-circuit of the conversion circuit or the overload of the amplification circuit through the diagnostic data sensed by the diagnostic sensor 3. The output current of the converting circuit 100 becomes the input current of the amplifying circuit 200 and is amplified by the transformer 210. The diagnostic sensor 4 senses the amplified current, the amplified current is converted from the converter 220 to the direct current, and the diagnostic sensor 5 senses the direct current output from the converter and inputs it to the filter. In the filter 230, a current less than a certain value is filtered. Thereafter, the current passed through the filter 230 is sensed by the diagnostic sensor 6.

The self-diagnosis module 300 collects diagnostic data measured by a plurality of diagnostic sensors installed in the input / output terminals of the circuit and components constituting the power supply device, and performs a circuit operation abnormally in the power supply device according to the result of comparison with pre- Identify the parts.

In FIG. 3, diagnostic sensors 1 to 6 are shown, and self-diagnosis data is collected at input and output nodes of a filter, a converter, a conversion circuit, and an amplifier circuit. . The number and location of the self-diagnosis sensors may vary depending on the configuration of the power supply unit equipped with the self-diagnosis module.

 4 is a diagram showing a data processing configuration of the self-diagnosis module 300 according to the embodiment.

Referring to FIG. 4, the self-diagnosis module 300 may include a test current applying unit 310, a data collecting unit 330, and a determining unit 350.

The test current application unit 310 inputs a power supply operation current value or a voltage value with a dummy load resistance to confirm normal operation of the power supply. The test current value may be adjusted by adjusting the test current value in the test current application unit 310 or by adjusting the dummy load resistance value in the test current application unit 310. [

The test current application unit 310 may separately control the configuration of the power supply unit and the power supply of each of the circuits in order to check the configuration of the plasma power supply unit and whether or not each of the circuits operates normally. For example, when the power source apparatus includes n parts, the test current applying unit 310 may calculate the number of test current application cases using Equation (1) below, and output each of the calculated test currents to the component including the power source device .

Equation 1

=_nC₁+_nC₂+_nC₃+_nC₄+……+_nC_n=n!The number of test current input / output path calculation cases of the power supply device including n parts =

= _n C ₁ + _n C ₂ + _n C ₃ + _n C ₄ + ... + _n C _n = n!

Specifically, in the case of a circuit including n parts, one of the n parts is selected, test data input / output to the selected part is applied to measure the diagnostic data, and two (adjacent) And the test current is applied to the two selected parts to measure the diagnostic data. That is, the test current application unit 310 applies a current to each of the components constituting the plasma power source device to check whether the operation is abnormal. If the parts are confirmed to be normal operation, the plurality of components are selected, So that it is possible to grasp whether or not an abnormal operation occurs when each of the parts is connected. That is, the test current applying unit 310 according to the embodiment conditions the test current path that can grasp the connection state of each component and each component included in the power supply unit, and measures the diagnostic data according to each condition, So that the abnormal operation of the parts included in the apparatus can be individually grasped and the connection state between the parts can be diagnosed.

Also, the test current applying unit 310 can apply the test current to the selected part when the user selects the input / output part. For example, the test current application unit 310 may input a test current to the selected configuration and circuit when the configuration and the circuit are selected to check whether the plasma power supply is abnormal.

Also, the test current applying unit 310 may be configured to set a test condition including any one of dummy load resistance value, component parts and circuit to be diagnosed, and input current value, and to diagnose a test current according to the set test condition, Circuit and causes the power supply to self-diagnose through the self-diagnosis data measured by the applied test current.

The data collecting unit 330 collects input / output current, voltage, temperature (temperature) measured by the test current applied to the power supply from the diagnostic sensors (1, 2, 3, 4, 5, 6) provided in the component input / , And collects diagnostic data including the presence / absence of operation.

The determination unit 350 compares the circuit diagnosis data received from the data collecting unit with a preset value to determine whether each of the circuits and parts constituting the power supply unit is faulty. For example, the determination unit 350 compares one or more of the measured values received from the plurality of diagnostic sensors 1, 2, 3, 4, 5, and 6 with a preset value, The components of the apparatus and the circuit can be judged.

Further, the determination unit 350 adjusts the dummy load resistance value, the test current value applied to the components of the power supply unit and the circuit, and compares the ratio of the measured values received from the plurality of diagnostic sensors to the preset value, The yield of each of the configuration of the apparatus and the circuit can be calculated. That is, the determination unit 350 may calculate the dummy load resistance value, the applied current value, and the yield according to the test condition including the component configuration and circuit to be self-diagnosed. For example, the determination unit 350 compares the diagnostic data measured by the applied test current with the stored data according to the test current input / output path calculation of the power supply device, and calculates a loss current And the loss rate. In the embodiment, the determination unit 350 may be configured to replace circuits and components whose loss ratios are equal to or higher than a certain level, and to increase the output current loss caused by the noise generated in the connection lines or nodes between the components. And the location of the node to the tester.

Hereinafter, the self-diagnosis method according to the embodiment will be described in turn. Since the function (function) of the self-diagnosis method according to the embodiment is essentially the same as the function on the self-diagnosis module, a description overlapping with those of FIGS. 1 to 4 will be omitted.

5 is a flowchart illustrating a data processing flow of a self-diagnosis method of the plasma power supply apparatus according to the embodiment.

In step S410, a power device test current value is input to the dummy load resistor in order to check the normal operation of the power device in the test current application part. In step S410, in order to check the configuration of the plasma power source device and the normal operation of each of the circuits, a test current is individually input to each of the configuration of the power source device and the circuit. For example, in step S410, each of the test current input / output path calculation cases of the power supply device calculated by Equation (1) is set as a test current condition so that test current is applied according to the set conditions and diagnostic data based on the applied current can be collected do. In addition, in step S410, when a configuration and a circuit for confirming the abnormality of the plasma power supply are selected, a test current can be inputted to the selected configuration and circuit.

In step S410, a test condition including any one of dummy load resistance value, component parts and circuit to be diagnosed, and input current value may be set, and a test current according to the set test condition may be applied to components and circuits to be diagnosed. have.

In step S430, the data collecting unit collects diagnostic data including input / output currents, voltages, temperatures, and operation states, which are measured by a test current applied to the power supply apparatus, from diagnostic sensors provided in the component input / output nodes of the power supply apparatus.

In step S450, the determination unit compares the diagnostic data received from the data collection unit with a predetermined value to determine whether each of the power supply unit configurations is faulty. In step S450, it is possible to compare the at least one of the measured values transmitted from the plurality of diagnostic sensors with the predetermined value, and to determine the configuration and circuit of the power source device that operates abnormally according to the comparison result. In step S450, the dummy load resistance is adjusted according to the dummy load resistance value, the configuration of the power supply device, the test current value applied to the circuit, and the test current input / output path condition of the power supply device. The yield of each component of the power supply apparatus and the circuit can be calculated. For example, in step S450, a test current value applied according to a test condition including any one of a dummy load resistance value, a component to be diagnosed, a circuit, and an input current value is adjusted, It is possible to calculate the configuration of the power supply device and the yield and loss rate of each of the circuits by comparing the ratios of the preset values.

A method for self-diagnosing a plasma power supply according to an embodiment of the present invention is a method for checking the abnormal operation by applying a current to each of the components constituting the plasma power supply, Currents are applied to the parts so that it is possible to grasp whether an abnormal operation occurs when each of the parts is connected. That is, in the embodiment, the abnormality of the parts included in the plasma power supply apparatus is individually measured by measuring the diagnostic data in accordance with each condition by conditioning each of the parts included in the power supply unit and the test current path capable of grasping the connection state of each part So that the connection state between parts can be diagnosed.

Further, by changing the test condition including the dummy load resistance value, the test current value, and the test current including the input / output path connected to the output terminal of the power source device, diagnostic data of the power source device can be collected according to the test condition, So that it can automatically perform not only the diagnosis but also the yield and the loss rate.

The self-diagnosis module and the self-diagnosis method of the plasma power supply according to the embodiment can quickly and accurately diagnose the abnormality of the components and circuits of the power supply device without separately attaching the cooler and wiring when checking the power supply device .

It is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims. It is not limited to the embodiment.

400: dummy load resistance
300: Self-diagnosis module
310: Test current applying section
330: Data collection unit
350:

Claims (13)

A self-diagnostic module of a plasma power supply,
A dummy load resistor which is located inside the plasma power supply for self-diagnosis of the plasma power supply and connected to a power supply termination to constitute a closed circuit at the output of the power supply when the power supply is self-diagnosed;
A test current application unit for inputting a power supply operation current into the dummy load resistor to check normal operation of the power supply unit;
Diagnosis data including at least one of an input current, a voltage, a temperature, and the presence or absence of operation, measured by a test current applied to the power source device, from a diagnostic sensor provided at an input / output node of the components and circuits constituting the power source device A data collecting unit for collecting data;
A determining unit for comparing the self-diagnosis data received from the data collecting unit with a preset value to determine whether each of the power supply unit components and the circuit is faulty; And a self-diagnostic module of the plasma power device.
The power supply according to claim 1,
Converter, filter, inverter, transformer,
Wherein the diagnostic sensor is configured as an input / output node of a converter, a filter, an inverter, a transformer, a conversion circuit, and an amplifier circuit constituting a plasma power source device.
The apparatus of claim 1, wherein the determination unit
Wherein the at least one of the plurality of diagnostic sensors is configured to compare at least one of the measured values with a preset value, and to determine a component and a circuit of the power supply device that operates abnormally according to the comparison result.
The apparatus of claim 1, wherein the test current application unit
Wherein the power supply for each of the components and circuits of the power supply unit is individually controlled to check the configuration of the plasma power supply unit and whether or not each of the circuits operates normally.
The apparatus of claim 1, wherein the test current application unit
Wherein a test current is input to the selected components and circuits when a configuration and a circuit for checking whether the plasma power supply is abnormal are selected.
The apparatus of claim 1, wherein the test current application unit
Setting a test condition including any one of the dummy load resistance value, components and circuits to be diagnosed, and an input current value, applying a test current according to the set test condition to the component and circuit to be diagnosed, And transmits the self-diagnosis data measured by the test current and the voltage to the determination unit.
The apparatus of claim 1, wherein the determination unit
Adjusting a test current value to be applied in accordance with a test condition including any one of the dummy load resistance value, the components to be diagnosed and the circuit, and the input current value, And calculates a yield of each of the configuration of the power supply device and the circuit.
A method of self-testing a plasma power supply,
(A) inputting a power device test current value with a dummy load resistor in order to confirm a normal operation of the power source device in a test current application portion;
(B) a self-diagnosis including at least one of an input / output current, a voltage, a temperature, and an operation status measured by a test current applied to the power source device from a diagnostic sensor provided at a configuration input / output node of the power source device Collecting data; And
(C) comparing the self-diagnosis data received from the data collecting unit with a predetermined value, and determining whether each of the power supply device components and the circuit is faulty; / RTI >
Wherein the dummy load resistor is located inside the plasma power supply,
Wherein the dummy load resistor is connected to an end of the power supply unit to constitute a closed circuit at an output terminal of the power supply unit during a self-diagnosis of the power supply unit.
9. The method of claim 8, further comprising: (C) determining whether each of the power supply unit components and the circuit has failed; The
Wherein the at least one of the measured values transmitted from the plurality of diagnostic sensors is compared with a predetermined value to determine a component and a circuit of the power supply apparatus that operates abnormally according to the comparison result.
The method of claim 8, further comprising: (A) inputting a power device test current value; The
Whether or not the normal operation of each of the components and circuits of the plasma power supply apparatus
Wherein the power supply is controlled by individually inputting a test current to each of the configuration of the power supply device and the circuit.
The method of claim 8, further comprising: (A) inputting a power device test current value; The
Wherein a test current is input to the selected configuration and circuit when a component and a circuit to be checked for abnormality of the plasma power supply are selected.
The method as claimed in claim 8, wherein the step (A)
Setting a test condition including any one of the dummy load resistance value, components and circuits to be diagnosed, and an input current value;
Applying a test current according to the set test condition to the component and circuit to be diagnosed; And
Transmitting the self-diagnosis data measured by the applied test current to the determination unit; And a second power supply for supplying power to the plasma generator.
The method of claim 8, further comprising: (C) determining whether each of the power supply unit configurations is failed; The
Adjusting a test current value to be applied according to a test condition including any one of the dummy load resistance value, the components and circuit to be diagnosed, and the input current value; And
Comparing the ratio of the measured values received from the plurality of diagnostic sensors with the preset value to calculate the configuration of the power supply unit and the yield of each circuit; And a second power supply for supplying power to the plasma generator.

Images