KR102156263B9 - 전사장치 - Google Patents

전사장치

Info

Publication number
KR102156263B9
KR102156263B9 KR20190023078A KR20190023078A KR102156263B9 KR 102156263 B9 KR102156263 B9 KR 102156263B9 KR 20190023078 A KR20190023078 A KR 20190023078A KR 20190023078 A KR20190023078 A KR 20190023078A KR 102156263 B9 KR102156263 B9 KR 102156263B9
Authority
KR
South Korea
Prior art keywords
transferring apparatus
transferring
Prior art date
Application number
KR20190023078A
Other languages
English (en)
Other versions
KR102156263B1 (ko
KR20200104966A (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR1020190023078A priority Critical patent/KR102156263B1/ko
Priority to PCT/KR2020/001706 priority patent/WO2020175814A1/ko
Publication of KR20200104966A publication Critical patent/KR20200104966A/ko
Application granted granted Critical
Publication of KR102156263B1 publication Critical patent/KR102156263B1/ko
Publication of KR102156263B9 publication Critical patent/KR102156263B9/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67144—Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Led Device Packages (AREA)
  • Manufacturing Of Printed Wiring (AREA)
KR1020190023078A 2019-02-27 2019-02-27 전사장치 KR102156263B1 (ko)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020190023078A KR102156263B1 (ko) 2019-02-27 2019-02-27 전사장치
PCT/KR2020/001706 WO2020175814A1 (ko) 2019-02-27 2020-02-06 전사장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020190023078A KR102156263B1 (ko) 2019-02-27 2019-02-27 전사장치

Publications (3)

Publication Number Publication Date
KR20200104966A KR20200104966A (ko) 2020-09-07
KR102156263B1 KR102156263B1 (ko) 2020-09-16
KR102156263B9 true KR102156263B9 (ko) 2021-08-23

Family

ID=72240138

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020190023078A KR102156263B1 (ko) 2019-02-27 2019-02-27 전사장치

Country Status (2)

Country Link
KR (1) KR102156263B1 (ko)
WO (1) WO2020175814A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11718115B2 (en) * 2019-11-27 2023-08-08 National Technology & Engineering Solutions Of Sandia, Llc Architected stamps for liquid transfer printing

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2794443B1 (fr) * 1999-06-02 2001-06-22 Commissariat Energie Atomique Procede de transfert d'elements et dispositif permettant ledit transfert
CN100559271C (zh) * 2005-05-03 2009-11-11 皇家飞利浦电子股份有限公司 将图案从印模转印到基体的方法和装置
JP5637785B2 (ja) * 2010-09-06 2014-12-10 キヤノン株式会社 原版、及びそれを用いた物品の製造方法
KR101673580B1 (ko) * 2014-12-29 2016-11-07 광주과학기술원 마이크로 디바이스의 전사장치, 마이크로 디바이스의 전사방법, 및 그 전사장치의 제조방법
KR101771327B1 (ko) * 2015-11-11 2017-08-25 연세대학교 산학협력단 직접 전사 프린팅 방법 및 상기 방법에 이용되는 전사 매체
KR101897129B1 (ko) * 2016-10-18 2018-09-10 한국기계연구원 소자 전사방법 및 소자 전사방법을 이용한 전자제품 제조방법
KR101971470B1 (ko) * 2017-11-29 2019-04-23 재단법인 파동에너지 극한제어 연구단 마이크로 소자 전사용 캐리어 필름
KR102123419B1 (ko) * 2018-10-29 2020-06-17 한국기계연구원 소자 간격 제어가 가능한 시트 및 이를 이용한 소자 간격 제어방법

Also Published As

Publication number Publication date
WO2020175814A1 (ko) 2020-09-03
KR102156263B1 (ko) 2020-09-16
KR20200104966A (ko) 2020-09-07

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Legal Events

Date Code Title Description
E701 Decision to grant or registration of patent right
GRNT Written decision to grant
G170 Publication of correction