KR102152647B1 - Droplet removal device by electrowetting and method thereof - Google Patents

Abstract

One embodiment of the present invention provides a droplet removal device by electrowetting. The droplet removal device by electrowetting comprises: a base; a first electrode having a plurality of first interdigit electrode units formed on the base; an insulating layer covering the first electrode; a second electrode formed between the base and the insulating layer and having a second interdigit electrode unit positioned next to the first interdigit electrode units when viewed in a plan view; a third electrode formed between the base and the insulating layer and having a plurality of third interdigit electrode units spaced apart from the plurality of first interdigit electrode units and arranged in an interdigitated configuration when viewed in a plan view, wherein the second interdigit electrode unit is positioned between the first interdigit electrode unit and the third interdigit electrode unit; and a circuit unit applying first power to some of the first, second, and third electrodes according to a mode and applying second power different from the first power to the remaining electrodes to be driven to substantially change a width of an electrode to which the first power is applied according to the mode when generating an electrowetting effect, which causes vibration of a droplet on the insulating layer.

Description

Droplet removal device by electrowetting and its method {DROPLET REMOVAL DEVICE BY ELECTROWETTING AND METHOD THEREOF}

The present invention relates to a droplet removal apparatus and method thereof by electrowetting, and more particularly, a droplet removal apparatus by electrowetting capable of removing droplets of various sizes by changing the width of an electrode for electrowetting according to a mode. And to the method.

In general, when an electric field is applied to a liquid placed in a solid phase, particularly a liquid in the form of a droplet, the contact angle and surface tension of the fluid with the solid are changed. This liquid droplet behavior is called the electrowetting effect.

Liquid droplets, that is, liquid droplets can be moved by using the change in contact angle and contact area according to the electrowetting effect, and the moving direction of the droplets can also be controlled by controlling the direction of the applied electric field. That is, when the direction of the electric field is vibrated according to the frequency of the applied power, vibration may occur in the droplet.

An electrowetting element that controls or removes droplets using the electrowetting effect has been developed, and has been applied to various fields.

For example, in recent years, the development of a cleaning technology capable of efficiently removing foreign substances such as rainwater or dust generated from a windshield of a vehicle or a transparent display to replace the same has become important.

In addition, devices such as a camera may be exposed to the external environment as it is. Therefore, water droplets adhere to the camera surface when it rains or gets wet with water. In order to keep the field of view of a small camera clean, droplets generated on the lens surface must be immediately removed, but there is no separate means for removing droplets, so in this case, camera performance is inevitably degraded.

In a conventional electrowetting device for removing droplets on a surface, a technique of applying an AC power source to an electrode in positive and negative differences, and removing droplets by vibration due to the electrowetting effect is disclosed.

However, in the case of fine droplets having a size smaller than the width of the electrode, there is a problem that it is not easy to remove due to the electrowetting effect.

In addition, when both the electrode pattern for removing fine droplets and the electrode pattern for removing larger sized droplets are separately provided, the electrode pattern becomes complicated, the size increases, and the area in which fine droplets cannot be removed occurs, which is inefficient. There is a problem of being a way of working.

The technical problem to be achieved by the present invention is to provide a droplet removal apparatus and method by electrowetting capable of removing droplets of various sizes with one multi-electrode pattern by arranging a plurality of electrodes in a specific pattern and driving them in a specific manner. will be.

The technical problem to be achieved by the present invention is not limited to the technical problems mentioned above, and other technical problems that are not mentioned can be clearly understood by those of ordinary skill in the technical field to which the present invention belongs from the following description. There will be.

In order to achieve the above technical problem, an embodiment of the present invention provides an apparatus for removing droplets by electrowetting. The apparatus for removing droplets by electrowetting includes a base; A first electrode having a plurality of first comb electrode portions formed on the base; An insulating layer covering the first electrode; A second electrode formed between the base and the insulating layer and having a second comb electrode portion positioned next to each of the first comb electrode portions when viewed in plan view; And a third formed between the base and the insulating layer and having a plurality of third comb electrode portions spaced apart from the plurality of first comb electrode portions and arranged in an interdigitated configuration when viewed in plan view. A third electrode, wherein the second comb electrode portion is formed to be positioned between the first comb electrode portion and the third comb electrode portion; In addition, a first power is applied to some of the electrodes according to a mode among the first electrode, the second electrode, and the third electrode, and a second power different from the first power is applied to the remaining electrodes. And a circuit unit driving such that the width of the electrode to which the first power is applied is substantially changed according to the mode when generating the electrowetting effect that causes vibration of the droplet.

In an exemplary embodiment of the present invention, the apparatus for removing droplets by electrowetting further includes a fourth electrode having a fourth comb electrode portion extending between the second comb electrode portion and the third comb electrode portion, wherein the circuit portion , By applying a fifth power to some of the electrodes according to a mode among the first electrode, the second electrode, the third electrode, and the fourth electrode, and applying a sixth power different from the fifth power to the remaining electrodes When generating an electrowetting effect that causes vibration of droplets on the insulating layer, the width of the electrode to which the fifth power is applied may be driven to substantially change according to the mode.

In an embodiment of the present invention, the first electrode further includes a first connection electrode portion connecting the plurality of first comb electrode portions at one side, wherein the third electrode is the plurality of third comb electrode portions at the other side. And a third connection electrode part connecting the part, wherein an end of the first comb electrode part is positioned to face a side surface of the third connection electrode part, and an end of the third comb electrode part is a side surface of the first connection electrode part Can be positioned to face to face.

In an embodiment of the present invention, each of the second comb electrode portions is a side surface of one of the adjacent two first comb electrode portions, a side surface of the first connection electrode portion, and the remaining first comb electrode portion. A pattern extending along a side surface and bent between an end portion of the first comb electrode portion and a side surface of the third connection electrode portion is formed to be repeated, and each of the fourth comb electrode portions is the two adjacent first comb electrode portions A pattern extending along both sides of the third comb electrode portion positioned therebetween, and bent between an end portion of the third comb electrode portion and a side surface of the first connection electrode portion may be formed to be repeated.

In an embodiment of the present invention, the circuit unit, in a first mode, applies the first power to the first comb electrode unit and the second comb electrode unit, and the second power supply to the third comb electrode unit Is applied to remove the first droplet by a periodic potential difference between the first power electrode portion and the third comb electrode portion, which are formed of the first comb electrode portion and the second comb electrode portion, and in the second mode, the second A third power is applied to the first comb electrode unit and the third comb electrode unit, and a fourth power is applied to the second comb electrode unit, so that between the first comb electrode unit and the second comb electrode unit and the first The second droplet having a size smaller than that of the first droplet may be removed by a periodic potential difference between the 2 comb electrode portion and the third comb electrode portion.

In an embodiment of the present invention, the circuit unit, in a third mode, applies a fifth power to the first comb electrode unit and the second comb electrode unit, and applies a fifth power to the third comb electrode unit and the fourth comb electrode unit. By applying a sixth power to the unit, there is a periodicity between the fifth power electrode unit including the first and second comb electrode units, and the sixth power electrode unit including the third and fourth comb electrode units. A third droplet is removed by a potential difference, and in a fourth mode, a seventh power is applied to the first and fourth electrodes, and the second and third electrodes are applied. By applying the eighth power, the fourth droplet having a size smaller than that of the third droplet may be removed due to a periodic potential difference between each of the first to fourth comb electrode portions.

In order to achieve the above technical problem, another embodiment of the present invention

It provides a method for removing droplets by electrowetting. Using a droplet removal device by electrowetting, in a first mode, the first power is applied to the first and second comb electrode units, and the second power is applied to the third comb electrode unit. By applying the application, the first droplet may be removed by a periodic potential difference between the first power electrode portion and the third comb electrode portion formed of the first comb electrode portion and the second comb electrode portion. In the second mode, a third power is applied to the first and third comb electrode portions, and a fourth power is applied to the second comb electrode portion, so that the first comb electrode portion and the second comb electrode portion A second droplet having a size smaller than that of the first droplet may be removed by a periodic potential difference between the comb electrode portions and between the second comb electrode portion and the third comb electrode portion.

In an embodiment of the present invention, in a third mode, a fifth power is applied to the first and second comb electrodes, and a sixth power is applied to the third and fourth electrodes. When power is applied, a periodic potential difference between the fifth power electrode portion consisting of the first comb electrode portion and the second comb electrode portion, and the sixth power electrode portion consisting of the third comb electrode portion and the fourth comb electrode portion is determined by applying power. 3 Droplets can be removed. In a fourth mode, a seventh power is applied to the first and fourth comb electrode portions, and an eighth power is applied to the second and third comb electrode portions, and the first The fourth droplet having a size smaller than that of the third droplet may be removed by a periodic potential difference between each of the fourth comb electrode portions.

In an embodiment of the present invention, in a fifth mode, a ninth power is applied to the first comb electrode, the second comb electrode, and the fourth comb electrode, and the tenth power is applied to the third comb electrode. By applying, the fifth droplet may be removed by a periodic potential difference between the ninth power electrode portion and the third comb electrode portion, which are formed of the first comb electrode portion, the second comb electrode portion, and the fourth comb electrode portion. In a sixth mode, an eleventh power is applied to the second comb electrode unit, the third comb electrode unit, and the fourth comb electrode unit, and a twelfth power is applied to the first comb electrode unit, so that the second comb The sixth droplet may be removed by a periodic potential difference between the eleventh power electrode portion and the first comb electrode portion, which are the electrode portion, the third comb electrode portion, and the fourth comb electrode portion.

In an embodiment of the present invention, the fifth power source may be AC, the sixth power source may be Vcom, the seventh power source may be Vcom, and the eighth power source may be AC.

According to an embodiment of the present invention, it is possible to provide a droplet removal apparatus and method by electrowetting capable of removing droplets of various sizes with one multi-electrode pattern by arranging a plurality of electrodes in a specific pattern and driving in a specific manner. I can.

The effects of the present invention are not limited to the above effects, and should be understood to include all effects that can be inferred from the configuration of the invention described in the detailed description or claims of the present invention.

1 is a view for explaining an example of a droplet removal method by electrowetting.
2 is a view for explaining a difference in removal effect by electrowetting according to the size of a droplet.
3 and 4 are diagrams showing examples of electrodes that can be employed in the apparatus for removing droplets by electrowetting according to an embodiment of the present invention.
5 is a view showing an apparatus for removing droplets by electrowetting according to an embodiment of the present invention.
6 is a view for explaining an apparatus and method for removing droplets by electrowetting according to an embodiment of the present invention.
7 is a view showing an apparatus for removing droplets by electrowetting according to another embodiment of the present invention.
8 to 12 are views showing an apparatus and method for removing droplets by electrowetting according to another embodiment of the present invention.

Hereinafter, the present invention will be described with reference to the accompanying drawings. However, the present invention may be implemented in various different forms, and therefore is not limited to the embodiments described herein. In the drawings, parts irrelevant to the description are omitted in order to clearly describe the present invention, and similar reference numerals are assigned to similar parts throughout the specification.

Throughout the specification, when a part is said to be "connected (connected, contacted, bonded)" with another part, it is not only "directly connected", but also "indirectly connected" with another member in the middle. "Including the case. In addition, when a part "includes" a certain component, it means that other components may be further provided, rather than excluding other components unless specifically stated to the contrary.

The terms used in the present specification are only used to describe specific embodiments, and are not intended to limit the present invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In the present specification, terms such as "comprise" or "have" are intended to designate the presence of features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, but one or more other features. It is to be understood that the presence or addition of elements or numbers, steps, actions, components, parts, or combinations thereof, does not preclude in advance.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 is a view for explaining an example of a droplet removal method by electrowetting.

FIG. 1 illustrates the principle of a droplet removal method by electrowetting capable of self-removing droplets, dust, and frost such as liquids such as rainwater and fog.

The device is exposed to the external environment, and as a result, droplets such as rainwater may adhere to the surface of the device. Droplets need to be removed as soon as droplets that obscure the field of view such as cameras adhere to the surface.

As shown in FIG. 1, when a periodic potential difference is applied to the electrodes 131 and 151, the droplets vibrate due to the vibration of the electric field between the electrodes 131 and 151, and the droplets eventually fall from the surface. Droplets can be removed by development.

At this time, when applying a potential difference of a specific frequency to the electrodes 131 and 151, an AC voltage is applied to all adjacent electrodes, or one electrode is set as a common power source (com) or a ground voltage, and the other electrode AC power can also be applied to.

If the surface on which the droplet is located is an inclined surface, the vibrating droplet can more easily fall off the surface.

As the AC power source, for example, by applying a low-frequency AC power source to cause the droplet to vibrate, the surface tension of the droplet can be changed. However, AC power is not limited to low frequency AC power.

For example, since the vehicle glass has a predetermined inclination with respect to the plane, the droplets vibrate and move downwards (eventually the outside of the vehicle glass).

Specifically, when a low-frequency AC power source of several hundred Hz or less, for example, 10 Hz is applied to the electrode, the area of the droplet in contact with the surface of the insulating layer 170 covering the electrode continuously changes (shakes), causing the droplet to vibrate. As a result, the adhesive force between the droplet and the surface of the insulating layer 170 continuously decreases, so that the droplet may move and be removed.

2 is a view for explaining a difference in removal effect by electrowetting according to the size of a droplet.

However, since the droplet is of a fine size, it cannot be spread between the electrodes 131 and 151, and a droplet having a size smaller than the width of the electrodes 131 and 151 is positioned on the electrode (for example, 22) or between the electrodes 131 and 151 Or (e.g. 23), or when it is over only one electrode (e.g. 25), there is a problem that the droplet is not easily separated from the surface of the insulating layer 170 because vibration is not generated or weak as described above. .

This problem is difficult to solve by a method of controlling the frequency or the magnitude of the voltage of the AC power applied to the electrodes 131 and 151.

3 and 4 are diagrams showing examples of electrodes that can be employed in the apparatus for removing droplets by electrowetting according to an embodiment of the present invention.

For example, the first electrode 300 on the upper side of FIG. 3 may include a first input terminal 310, a plurality of first comb electrode portions 330, and a first connection electrode portion 350.

The first connection electrode part 350 may connect the plurality of first comb electrode parts 330 at one side. One end of the first connection electrode unit 350 may be connected to the first input terminal 310.

The second electrode 400 on the lower side of FIG. 3 includes a plurality of second comb electrode portions 430 extending from one side to the other side opposite to the second electrode portion 430 from the other side, and two second comb electrode portions 430 alternately from one side. ) And alternately connects the two second comb electrode parts 430 from the other side, and may include a second connection electrode part 450.

For example, the third electrode 500 on the upper side of FIG. 4 may include a third input terminal 510, a third connection electrode part 550, and a plurality of third comb electrode parts 530.

The third connection electrode part 550 may connect the plurality of third comb electrode parts 530 from the other side. One end of the third connection electrode part 550 may be connected to the third input terminal 510.

The fourth electrode 600 on the lower side of FIG. 4 includes a plurality of fourth comb electrode portions 630 extending from the other side to the opposite side and extending from one side to the other side, and two fourth comb electrode portions alternately from the other side ( It may include a fourth connection electrode unit 650 connecting the 630 and alternately connecting the two fourth comb electrode units 630 at one side.

The first to fourth electrodes may be transparent electrodes or opaque electrodes.

Materials of the transparent electrodes include metal oxide, indium oxide (ITO), antimony tin oxide (ATO), zinc oxide (ZnO), tin oxide (SnO2), and indium zinc oxide (IZO). Oxide), Gallium Zinc Oxide (GZO), Aluminum-dopped Zinc Oxide (AZO), Cadmium Tin Oxide (CTO), Metal Nanowire, P-dot, Metal Mesh (3M Patent) , Metal ink, and carbon nanotubes.

On the other hand, in the case of a device that requires transparency, that is, a significant transmittance of light, an electrode may be formed of a material such as gold, silver, copper, aluminum, iron, tungsten, platinum, lead, mercury, nichrome, and the like.

The shape of the electrode shown in FIGS. 3 and 4 is only an example, and the shape of the electrode included in the electrowetting droplet removal apparatus of the present embodiment is not limited thereto.

5 is a view showing an apparatus for removing droplets by electrowetting according to an embodiment of the present invention.

The apparatus for removing droplets by electrowetting according to the present embodiment includes, for example, a device including an outer glass, such as a vehicle camera, a digital camera, a mobile camera, an image sensor of the Internet of Things, and the surface of the windshield of the vehicle. It may be a device for removing droplets present in the. In addition, the electrowetting droplet removal device can be applied to any device where droplets need to be removed.

The apparatus for removing droplets by electrowetting includes a base 110, a first electrode 300, a second electrode 400, a third electrode 500, and an insulating layer 170.

The apparatus for removing droplets by electrowetting may be attached or installed on the surface of various devices as one device. Alternatively, it may be included as part of the device's surface.

The base 110 may be formed or attached to the surface of the device.

The first electrode 300, the second electrode 400, and the third electrode 500 may include first to third electrodes illustrated in FIGS. 3 and 4.

The first and third electrodes 330 and 530 are interdigitated, and the second electrode 430 extends between them. The second electrode 400 and the third electrode 500 may be disposed.

As described above, the first electrode 300 includes a plurality of first comb electrode portions 330 formed on the base 110, a first connection electrode portion 350 connecting them from one side, and a first input terminal ( 310) may be included.

For example, the plurality of first comb electrode portions 330 may be arranged in parallel with each other, and may have a width of about 0.1mm to 2.0mm. The width of the electrode is only an example and may vary depending on the applied device and the characteristics of the droplet to be removed.

In FIG. 5, the end portion of the first electrode 300 may be disconnected or may be wired so that current flows.

The second electrode 400 is formed between the base and the insulating layer, and when viewed in a plan view, the second comb electrode portion 430 may be positioned next to each of the first comb electrode portions 330.

Each second comb electrode unit 430 includes a side surface of one of the first comb electrode units 330 adjacent to each other, a side surface of the first connection electrode unit 350, and the other A pattern extending along a side surface of the first comb electrode unit 330 and bending between the end of the first comb electrode unit 330 and the side surface of the third connection electrode unit 550 may be formed to be repeated.

The third electrode 500 is formed between the base and the insulating layer, and when viewed in plan view, a plurality of third electrodes are spaced apart from the plurality of first comb electrode portions 330 and are arranged in an interdigitated configuration. It has a comb electrode part 530. The second comb electrode portion 430 may be formed to be positioned between the first comb electrode portion 330 and the third comb electrode portion 530.

The end of the first comb electrode part 330 is positioned to face the side surface of the third connection electrode part 550, and the end of the third comb electrode part 530 faces the side surface of the first connection electrode part 350. Can be located.

6 is a view for explaining an apparatus and method for removing droplets by electrowetting according to an embodiment of the present invention.

The insulating layer 170 is formed to cover the first electrode 300, the second electrode 400, and the third electrode 500. Droplets such as raindrops may contact the surface of the insulating layer 170. For example, the insulating layer 170 may include a dielectric layer 171 and a hydrophobic layer 173 formed on the dielectric layer 171. As the dielectric layer 171, a material such as polysilazane or SiO2 may be used, and of course, it is not limited thereto, and various insulating materials may be used as long as it has an appropriate dielectric constant and is bonded to a device.

Water molecules of water droplets may be attached to the hydrophobic layer 173 to achieve a contact angle within a specific range. By forming such a contact angle, it may be easier to generate vibration when power is applied to the electrode.

The circuit unit 1000 (refer to FIG. 7) applies first power to some of the first electrodes 300, the second electrode 400, and the third electrode 500 according to the mode, and the first electrode to the remaining electrodes. A second power source different from the power source can be applied. Accordingly, when generating an electrowetting effect that causes vibration of droplets on the insulating layer, the width of the electrode to which the first power is applied can be driven to substantially change according to the mode.

That is, vibration may occur due to the electrowetting effect in droplets spreading across electrodes of different polarities.In this embodiment, power is applied to a plurality of electrodes so that two electrodes function as one electrode, thereby substantially increasing the electrode width. It can be operated in such a way that the width of the electrode is reduced by applying another power source or by applying another power source.

Accordingly, vibration can be generated in droplets of various sizes on the insulating layer, so that the effect of removing droplets by electrowetting can be remarkably increased.

For example, the circuit unit 1000 applies a first power to the first comb electrode unit 330 and the second comb electrode unit 430 in the first mode, as shown in the upper drawing of FIGS. 5 and 6 , By applying a second power to the third comb electrode unit 530, the first power electrode unit and the third electrode 500, which are composed of the first comb electrode unit 330 and the second comb electrode unit 430, The first droplet can be removed by the periodic potential difference of.

In the second mode, as shown in the lower figure of FIGS. 5 and 6, a third power is applied to the first comb electrode part 330 and the third comb electrode part 530, and the second comb electrode part 430 is By applying the fourth power, the first droplet is smaller than the first droplet due to the periodic potential difference between the first and second comb electrode portions 330 and 430 and between the second and third comb electrode portions 430 and third comb electrode portions. A second droplet of size can be removed.

Here, the first power and the second power may be AC power having different phases. In addition, the third power source and the fourth power source may be AC power sources having different phases.

Alternatively, one of the first power and the second power source may be an AC power source and the other may be a Vo power source. In addition, one of the third and fourth power sources may be AC power and the other may be Vo power. In this case, Vo may be a common power source (com) or ground.

For example, the first power source and the third power source may be AC, and the second power source and the fourth power source may be Vcom (see FIG. 5).

7 is a view showing an apparatus for removing droplets by electrowetting according to another embodiment of the present invention. 8 to 11 are views showing an apparatus and method for removing droplets by electrowetting according to another embodiment of the present invention.

The apparatus for removing droplets by electrowetting shown in FIG. 7 includes a base, a first electrode 300, a second electrode 400, a third electrode 500, and a fourth electrode 600, an insulating layer and a circuit unit 1000. Includes.

The first to third electrodes described in FIG. 5 may be adopted.

As the fourth electrode, the fourth electrode 600 described in FIG. 4 may be adopted. The fourth electrode 600 may have a fourth comb electrode portion 630 extending between the second comb electrode portion 430 and the third comb electrode portion 530.

Each fourth comb electrode portion 630 extends along both sides of the third comb electrode portion 530 positioned between the adjacent two first comb electrode portions 330, and the third comb electrode portion 530 The pattern may be formed to repeat the curved pattern between the end of and the side surface of the first connection electrode unit 350.

The circuit unit 1000 applies fifth power to some of the first electrodes 300, the second electrodes 400, the third electrodes 500, and the fourth electrodes 600 according to a mode, and the remaining electrodes A sixth power source different from the fifth power source may be applied. Accordingly, when generating an electrowetting effect that causes vibration of droplets on the insulating layer, the width of the electrode to which the fifth power is applied may be driven to substantially change according to the mode.

For example, in a third mode, the circuit unit 1000 applies a fifth power to the first and second comb electrode units 330 and 430 as shown in FIG. 8, and as shown in FIG. 9, The sixth power may be applied to the third and fourth comb electrode portions 530 and 630. Accordingly, as shown in the upper figure of FIG. 12, the fifth power electrode unit including the first comb electrode unit 330 and the second comb electrode unit 430, the third electrode 500, and the fourth electrode 600 unit The third droplet may be removed by the periodic potential difference between the sixth power electrode portions.

The fifth power source may be AC, and the sixth power source may be Vo (eg, ground or Vcom).

In the fourth mode, the circuit unit 1000 applies a seventh power to the first and fourth electrode portions 330 and 630 as shown in FIG. 10, and the second comb electrode unit ( The eighth power may be applied to the 430 and the third comb electrode part 530. Accordingly, as shown in the lower figure of FIG. 12, the fourth droplet having a size smaller than that of the third droplet can be removed by the periodic potential difference between the first to fourth comb electrode portions 630.

The seventh power source may be Vo, and the eighth power source may be AC.

The method of removing droplets by electrowetting may further include a fifth mode and a sixth mode.

For example, in the fifth mode, the circuit unit 1000 applies a ninth power to the first comb electrode unit 330, the second comb electrode unit 430, and the fourth comb electrode unit 630, and The tenth power may be applied to the comb electrode part 530. Accordingly, due to the periodic potential difference between the ninth power electrode unit and the third electrode 500, each of the first comb electrode unit 330, the second comb electrode unit 430, and the fourth comb electrode unit 630 5 Droplets can be removed.

The ninth power source and the tenth power source may be different AC, or one may be AC and the other may be Vo.

In the sixth mode, the circuit unit 1000 applies the eleventh power to the second comb electrode unit 430, the third comb electrode unit 530, and the fourth comb electrode unit 630, and the first comb electrode unit ( 330) may be applied with the twelfth power. Accordingly, the sixth droplet is formed by a periodic potential difference between the eleventh power electrode unit and the first electrode 300, which are the second comb electrode unit 430, the third comb electrode unit, and the fourth comb electrode unit 630. Can be removed.

The eleventh power source and the twelfth power source may be different AC, or one may be AC and the other may be Vo.

The above description of the present invention is for illustrative purposes only, and those of ordinary skill in the art to which the present invention pertains can understand that it is possible to easily transform it into other specific forms without changing the technical spirit or essential features of the present invention. will be. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not limiting. For example, each component described as a single type may be implemented in a distributed manner, and similarly, components described as being distributed may also be implemented in a combined form.

The scope of the present invention is indicated by the claims to be described later, and all changes or modified forms derived from the meaning and scope of the claims and their equivalent concepts should be interpreted as being included in the scope of the present invention.

110: base
170: insulating layer
171: dielectric layer
173: hydrophobic film
300: first electrode
310: first input terminal
330: first comb electrode part
350: first connection electrode part
400: second electrode
410: second input terminal
430: second comb electrode part
450: second connection electrode part
500: third electrode
510: 3rd input terminal
530: third comb electrode part
550: third connection electrode part
600: fourth electrode
610: 4th input terminal
630: fourth comb electrode part
650: fourth connection electrode part
1000: circuit part

Claims (10)

In the droplet removal apparatus by electrowetting,
Base;
A first electrode having a plurality of first comb electrode portions formed on the base;
An insulating layer covering the first electrode;
A second electrode formed between the base and the insulating layer and having a second comb electrode portion positioned next to each of the first comb electrode portions when viewed in plan view; And
A third electrode formed between the base and the insulating layer and having a plurality of third comb electrode portions spaced apart from the plurality of first comb electrode portions and arranged in an interdigitated configuration when viewed in plan view A third electrode, wherein the second comb electrode portion is formed to be positioned between the first comb electrode portion and the third comb electrode portion; And
According to a mode of the first electrode, the second electrode, and the third electrode, a first power is applied to some electrodes, and a second power different from the first power is applied to the remaining electrodes, And a circuit unit driving such that a width of an electrode to which the first power is applied is substantially changed according to the mode when generating an electrowetting effect that causes enemy vibration.
The method of claim 1,
A fourth electrode having a fourth comb electrode portion extending between the second comb electrode portion and the third comb electrode portion; and
The circuit unit applies a fifth power to some of the first electrode, the second electrode, the third electrode, and the fourth electrode according to a mode, and a sixth power source different from the fifth power source to the remaining electrodes. By applying, when generating an electrowetting effect that causes vibration of droplets on the insulating layer, driving so that the width of the electrode to which the fifth power is applied is substantially changed according to the mode. Droplet removal device.
The method of claim 2,
The first electrode further includes a first connection electrode portion connecting the plurality of first comb electrode portions at one side,
The third electrode further includes a third connection electrode part connecting the plurality of third comb electrode parts from the other side,
The end of the first comb electrode part is positioned to face the side surface of the third connection electrode part,
An end portion of the third comb electrode part is located to face a side surface of the first connection electrode part.
The method of claim 3,
Each of the second comb electrode portions extends along a side surface of one of the adjacent two first comb electrode portions, a side surface of the first connection electrode portion, and a side surface of the remaining first comb electrode portion. 1 It is formed to repeat a pattern curved between the end of the comb electrode part and the side surface of the third connection electrode part,
Each of the fourth comb electrode portions extends along both sides of the third comb electrode portion positioned between the adjacent two first comb electrode portions, and ends of the third comb electrode portion and side surfaces of the first connection electrode portion A droplet removal apparatus by electrowetting, characterized in that formed so as to repeat a pattern bent therebetween.
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