KR102123734B1 - Ozone Free Fine Dust Removal and Sterilization Device Using Plasma Discharge - Google Patents

Abstract

An object of the present invention is to provide a plasma discharge source suitable for removing fine dust and sterilizing, obtaining a rich plasma at a low voltage, using ultraviolet rays generated during plasma discharge, and having a relatively low ozone concentration, The collection of fine dust is intended to provide an efficient plasma discharge source.
According to the above object, the present invention forms X electrodes and Y electrodes on both sides of the dielectric substrate, covers the electrodes with a dielectric, and surrounds the space with the X electrodes with a transparent dielectric chamber, thereby lowering the space where the X electrodes are disposed. It consists of a chamber to discharge the plasma by applying a voltage to the electrode, causing a strong plasma discharge on the X electrode side where the low-pressure space is formed, and the ultraviolet rays generated by this pass through the transparent dielectric chamber to exert the sterilizing power, On the Y-electrode side, which is formed without, it generates a weak dark discharge plasma, thereby generating active species, and the electric field formed between the X and Y electrodes causes fine dust vibration to aggregate fine dust to grow fine dust particles to filter the aggregated dust particles. It provides a plasma source that can be removed.

Description

Ozone Free Fine Dust Removal and Sterilization Device Using Plasma Discharge}

The present invention relates to an apparatus for removing fine dust and sterilizing using plasma discharge.

The application range of plasma technology is being used more and more diversified beyond the semiconductor manufacturing field in combination with the bio field. In particular, atmospheric plasma is applied to skin beauty, treatment, various sterilization devices, cleaning devices, and various other surface treatment devices. In the case of such atmospheric pressure plasma, it is generally generated using a plasma jet source and a dielectric barrier discharge plasma source. In the case of the plasma jet source, although it is convenient to supply the discharge gas, it is more advantageous to use a dielectric barrier plasma source for large area because it is difficult to perform plasma treatment over a wide range due to a small discharge area. In the case of a dielectric barrier plasma source, large area is advantageous, but when an appropriate discharge gas is supplied to generate a desired active species, a voltage required for plasma discharge may be high or discharge may not be smooth. In addition, in the case of atmospheric discharge including oxygen, ozone is generated to use the sterilizing power of ozone, but must be released after being removed below a regulated level due to human health.

Patent No. 10-1522902 proposes a harmful gas removal device that combines an ionizer and a plasma generator to purify contaminated air, and Patent No. 10-0769328 proposes a DBD plasma device and an air purification device using various catalyst filters do. In the former case, a plasma generating electrode and a separate ionizer are provided, and the latter shows a simple DBD electrode structure. In the plasma application as described above, the structure of the electrode may be insignificant when the particles to be treated are neutral particles that are not charged, and the treatment effect by the discharged plasma may be insignificant. Can have problems.

In addition, as described above, under atmospheric pressure, it is difficult to obtain a rich plasma at a low voltage, and ozone removal means is required when generating ozone.

An object of the present invention is to provide a plasma discharge source suitable for performing fine dust removal and sterilization, obtains abundant plasma at low voltage, can use ultraviolet rays generated during plasma discharge, has a relatively low ozone concentration, The collection of fine dust is intended to provide an efficient plasma discharge source.

In accordance with the above object, the present invention forms X electrodes and Y electrodes on both sides of the dielectric substrate, covers the electrodes with a dielectric, and surrounds the space where the X electrodes are located with a transparent dielectric chamber. It consists of a chamber to discharge the plasma by applying a voltage to the electrode, causing a strong plasma discharge at the X electrode side where the low-pressure space is formed, and the ultraviolet rays generated by this penetrate the transparent dielectric chamber to exert the sterilizing power, and On the Y-electrode, which is configured without, it causes a weak plasma discharge, thereby generating active species, and the electric field formed between the X and Y electrodes causes fine dust vibration to aggregate fine dust to grow fine dust particles to filter the dust particles. A plasma source that can be removed is provided.

In the above, the X electrode is configured in a pattern shape, and the Y electrode is configured in a pattern shape or a flat plate shape.

In the above, it is possible to provide a plasma source having an expanded range and efficiency by connecting a plurality of parallel plasma sources having electrodes.

In the above, desired active species can be obtained by supplying a desired kind of gas to each electrode side.

That is, the present invention,

An X electrode formed on one surface of the dielectric substrate;

A Y electrode formed on the back surface of the substrate; And

Including a chamber surrounding the space with the X electrode and including a UV-transmitting dielectric; including,

When the inside of the chamber is formed into a space at a lower pressure than atmospheric pressure, and a voltage is applied between the X electrode and the Y electrode, a kitchen warpage occurs at the X electrode side where the pressure is lower than that of the Y electrode, and ultraviolet rays generated by plasma kitchen warpage pass through the chamber. To exert sterilizing power, but the generated ozone is confined in the chamber,

On the Y-electrode side, it produces a weaker dark-discharge plasma than the X-electrode kitchen, causing action by active species.

It provides a plasma source characterized in that the electric field formed between the X electrode and the Y electrode can cause the microparticles to vibrate by electrical vibration.

In the above, the X electrode is provided with a patterned electrode having a pattern capable of forming a plurality of discharge points, and the Y electrode is provided with a plasma source, characterized in that it consists of a patterned or flat-shaped front electrode. do.

In the above, the chamber provides a plasma source, characterized in that it has a door or gas inlet.

In the above, there is provided a plasma source, characterized in that injecting one or more gases of inert gas, nitrogen, air or oxygen into the chamber.

In the above, the inside of the chamber provides a plasma source, characterized in that formed at a pressure of 1 mTorr or more and less than atmospheric pressure.

There is provided a plasma source characterized in that the plurality of the plasma source is connected in parallel.

According to the present invention, the plasma discharge is activated in preparation for the discharge voltage in the low pressure environment on the X electrode side, and the dark discharge is generated under atmospheric pressure on the Y electrode side. Active species with low concentrations are produced. Accordingly, it is possible to obtain ultraviolet sterilization power on the X electrode side and various active species on the Y electrode side, thereby supplying a type of gas according to the application to achieve the desired purpose of sterilization, fine dust removal, and odor removal.

In addition, the electric field formed between the electrodes causes electric vibration of the charged fine dust, so that the fine dust that has not been removed by the filter can be removed by the filter.

A number of parallel-connected plasma sources make it possible to achieve the purpose of mass processing or strong sterilization, such as a large-capacity air cleaner.

1 is a cross-sectional view showing the configuration of a plasma source according to the present invention.
2 is a cross-sectional view showing a plasma source in which the Y electrode is replaced with a flat plate in FIG. 1.
FIG. 3 is a cross-sectional view showing that the plasma sources of FIG. 1 are connected in parallel.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1 shows a plasma source according to the invention.

X and Y electrodes are respectively formed on the upper and lower surfaces of the dielectric substrate, and each electrode is covered with a dielectric, and a chamber made of a transparent dielectric is formed where the X electrodes are formed. That is, a partition wall is formed on the outer periphery of the substrate with the X electrode, and a transparent dielectric ceiling for UV transmission is placed to form a chamber surrounding the X electrode. When the electrode is covered with a dielectric, the electrode life is extended and the amount of plasma and active species is abundant.

The partition wall may be an opaque dielectric, but the ceiling must consist of a transparent dielectric. The partition wall and the ceiling may be in the form of an integral cover or a dome. Since such a configuration can configure a space with an X electrode as a low-pressure environment, strong plasma discharge can be achieved at a relatively low voltage. Accordingly, when a high voltage is applied between both electrodes using the same power source, a main discharge is generated in the X electrode part having a relatively low pressure, and harmful bacteria are sterilized by UV generated at this time.

The X electrode and the Y electrode may be configured as a patterned electrode including a plurality of discharge points using lithography. Each linear electrode is connected to one another at a stripe pattern in which a plurality of linear electrodes are arranged, and each of the linear electrodes is provided with polygonal, circular, elliptical, or linear protrusions or recesses so that multiple discharge points are included.

In the above, the chamber including the X electrode may have a door or a gas inlet, and create an environment in a vacuum state lower than atmospheric pressure, for example, 1 mTorr to hundreds of Torr, and nitrogen inert gases such as argon, helium, and xenon. , Air, etc. can be mixed and used in an appropriate composition ratio. The inert gas can enhance plasma discharge, and nitrogen, oxygen, and air generate active species effective for sterilization or odor removal, such as nitrogen, oxygen, and ozone.

In addition, when the plasma is discharged by using the same power source for the X electrode and the Y electrode, the X electrode, which is a relatively low pressure environment, produces a stronger plasma discharge than the Y electrode side, thereby emitting ultraviolet rays accordingly, and through the UV-transmitting chamber. UV sterilization can also be used in parallel. The relatively weak dark discharge plasma occurring at the Y electrode produces active species from gases such as air around the Y electrode. When a specific gas is supplied around the plasma source, the active species generated at the Y electrode generate specific active species depending on the supply gas.

In addition, an electric field is formed between the X electrode and the Y electrode, and in addition to the contribution to plasma discharge, the electric field charges and vibrates surrounding microparticles so that they are united by electric attraction. Therefore, it is possible to filter out the filter by causing the fine or ultrafine dust that is not filtered by the general filter to be aggregated with the electric field. That is, in the Y electrode portion, NO ₂ ^- or generator oxygen ([O]) is generated due to weak discharge, resulting in a sterilizing effect, and a dust collecting effect is generated by the electric field.

The plasma source configured as described above may be transformed into a front electrode formed of a flat plate instead of a pattern, as shown in FIG. 2. Through this structural change, the plasma discharge region can be controlled and the amount of active species generated can be controlled.

In addition, the front-type electrode can obtain a more stable plasma discharge than the pattern-type electrode, and in particular, when the plasma source is installed in a vibration or moving vehicle, the reliability can be increased.

FIG. 3 shows an attempt to enlarge a processing region or improve an effect by connecting multiple plasma plasma sources of FIG. 1 in parallel. In the above, one or more of the Y electrodes may be arranged in front, or Y electrodes may be disposed adjacent to each other or vice versa, and Y electrodes and X electrodes are disposed adjacent to each other to appropriately use a change in the formation of an electric field to fine dust or active species. You can control the operation of them.

Since the plasma discharge occurring on the Y electrode side is a relatively weak dark discharge, the ozone concentration is relatively low. That is, the ozone concentration is high due to the main discharge on the X electrode side, but since they are trapped in the chamber, they are naturally extinguished after a certain period of time, and thus the ozone is almost entirely free from the plasma source. Therefore, it is possible to obtain sterilization, sterilization, treatment, etc. through sterilization of ultraviolet rays and the role of active species including low concentration of ozone. The dust collection effect by the electric field is as described above.

In this way, an ozone-free plasma fine dust removal and sterilization apparatus can be produced.

On the other hand, the specific numerical values given in the above examples and experimental examples are exemplary and can be modified as necessary, and those skilled in the art to which the present invention pertains may have other specific details without changing the technical spirit or essential features of the present invention. It will be understood that it can be carried out in the form. Therefore, the embodiments described above are illustrative in all respects and should be understood as non-limiting. The scope of the present invention is indicated by the following claims rather than the above detailed description, and it should be interpreted that all changes or modifications derived from the meaning and scope of the claims and equivalent concepts thereof are included in the scope of the present invention. do.

No reference sign.

Claims (6)

An X electrode formed on one surface of the dielectric substrate;
A Y electrode formed on the back surface of the substrate; And
Including a chamber surrounding the space with the X electrode and including a UV-transmitting dielectric; including,
When the inside of the chamber is formed into a space at a lower pressure than atmospheric pressure, and a voltage is applied between the X electrode and the Y electrode, an electrostatic force is generated at the X electrode side having a lower pressure than the Y electrode side, and ultraviolet rays generated by the plasma electrostatic force penetrate the chamber. To exert sterilizing power, but the generated ozone is confined in the chamber,
On the Y-electrode side, it produces a weaker dark-discharge plasma than the X-electrode kitchen, causing action by active species.
A plasma source characterized in that the electric field formed between the X electrode and the Y electrode can cause the microparticles to vibrate by electrically vibrating. The plasma source of claim 1, wherein the X electrode is composed of a patterned electrode having a pattern capable of forming a plurality of discharge points, and the Y electrode is composed of a patterned or flat-shaped front electrode. . The plasma source of claim 1, wherein the chamber has a door or a gas inlet. The plasma source of claim 3, wherein one or more of inert gas, nitrogen, air or oxygen is injected into the chamber. 5. The plasma source of claim 4, wherein the chamber interior is formed at a pressure of 1 mTorr or more and less than atmospheric pressure. A plasma source according to claim 1 or 2, wherein a plurality of plasma sources are connected in parallel.

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