KR102113293B1 - Processing apparatus of exhaust gas - Google Patents

Abstract

The present invention relates to an exhaust gas processing apparatus capable of purifying exhaust gas discharged from a substrate processing apparatus or the like, an exhaust gas purification unit connected to a chamber to purify exhaust gas; And a foreign matter collection unit for collecting foreign substances generated in the exhaust gas purification unit, wherein the foreign matter collection unit is installed in communication with the exhaust gas purification unit, and includes a first receiving unit for firstly receiving the foreign matter; A second accommodating part installed in communication with the first accommodating part and accommodating the foreign material secondarily so as to discharge the foreign material contained in the first accommodating part to the outside; And a first blocking device installed between the first receiving portion and the second receiving portion.

Description

Processing apparatus of exhaust gas

The present invention relates to an exhaust gas processing apparatus, and more particularly, to an exhaust gas processing apparatus capable of processing exhaust gas discharged from a substrate processing apparatus or the like.

In general, a semiconductor manufacturing process repeatedly performs a process of depositing a thin film on a substrate or glass disposed in a process chamber or etching the deposited thin film. At this time, for the process, harmful gases such as silane, arsine, and boron chloride and reaction gases such as hydrogen are supplied to the process chamber according to the type of process, and various ignitable gases and corrosive gases are inside the process chamber during the process. Hazardous gases containing foreign substances and toxic components may be generated.

In addition, the supplied reaction gas may remain unreacted. After the process is completed, the exhaust gas remaining in the process chamber may be exhausted through a vacuum pump or the like.

Such harmful components included in the exhaust gas are highly toxic, corrosive, and oxidative, and when discharged to the atmosphere without filtration, there is a possibility of causing many problems to the human body and the environment as well as to the production facilities themselves.

Accordingly, it is necessary to purify harmful components contained in the exhaust gas before discharging the exhaust gas to the atmosphere.

As a conventional technique for solving this, as disclosed in Korean Patent Registration No. 10-1275870, techniques for purifying harmful components of exhaust gas using a remote plasma generator have been developed.

However, these conventional exhaust gas purification apparatuses have many problems such that these foreign substances adversely affect the pump because it is difficult to sufficiently remove foreign substances such as particles generated in the process of purifying harmful components.

The idea of the present invention is to solve these problems, the exhaust gas purification unit and the foreign matter collection unit are integrated to improve airtightness and exhaust gas purification ability, and the foreign matter collection unit is provided with a first receiving unit and a second receiving unit to provide a second The continuous exhaust gas purifying operation is possible in the first accommodating part even while the foreign material is removed from the accommodating part, and it is possible to facilitate the external discharge of the foreign material and to apply the toroidal type remote plasma generator to improve the product's performance. It is an object of the present invention to provide an exhaust gas treatment device capable of improving and preventing a short circuit of an insulating member due to foreign material deposition. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

Exhaust gas processing apparatus according to the spirit of the present invention for solving the above problems is connected to the chamber to purify the exhaust gas exhaust gas purification unit; And a foreign matter collection unit for collecting foreign substances generated in the exhaust gas purification unit, wherein the foreign matter collection unit is installed in communication with the exhaust gas purification unit, and includes a first receiving unit for firstly receiving the foreign matter; A second accommodating part installed in communication with the first accommodating part and accommodating the foreign material secondarily so as to discharge the foreign material contained in the first accommodating part to the outside; And a first blocking device installed between the first receiving portion and the second receiving portion.

In addition, according to the present invention, the foreign matter collecting portion, the second receiving portion is installed on one side of the first receiving portion, the exhaust pump is a horizontally arranged body installed on the other side of the first receiving portion; And a second blocking device installed in the second receiving portion. The first blocking device and the second blocking device may be vertical gate valves that allow a foreign material collection tray to pass through.

In addition, according to the present invention, the foreign matter collecting portion, the second receiving portion is installed on the lower side of the first receiving portion, the exhaust pump is vertically arranged body installed on one side of the first receiving portion; The first blocking device may be a horizontal gate valve capable of dropping the foreign material.

In addition, according to the present invention, the foreign matter collecting portion, the second receiving portion is installed on the lower side of the first receiving portion, the exhaust pump is provided on one side of the first receiving portion; The first blocking device may be an inclined gate valve capable of dropping the foreign material.

Further, according to the present invention, the inclined gate valve may include a holder-type door in which an engaging portion is formed to engage with a peripheral portion formed on an inclined bottom surface of the inclined placement type body.

In addition, according to the present invention, the exhaust gas purification unit, the plasma is generated, the reaction body is formed integrally with at least a portion of the foreign matter collecting unit; And a magnetic core coupled to the reaction body to form an induced electromotive force for generating plasma to the reaction body by a primary winding.

Further, according to the present invention, the magnetic core may be formed in a shape surrounding a part of the reaction body.

Further, according to the present invention, the reaction body has a hollow shape, and branched branches may be formed such that annular plasma discharge loops are formed on the left and right sides or on the upper and lower sides, respectively.

In addition, according to the present invention, the branch pipe, the first branch formed on the upper portion of the reaction body; A second branch formed on the lower portion of the reaction body and externally coupled to the first branch; A sealing member formed between the first branch portion and the second branch portion; And insulation formed between the first branch and the second branch, formed below the sealing member, and installed at a position higher than the end height of the first branch so as to be protected from the exhaust gas flow. It may include a member.

Further, according to the present invention, the exhaust gas purification unit may be an upper and lower multistage exhaust gas purification unit in which a first exhaust gas purification unit is formed at an upper side and a second exhaust gas purification unit is formed at a lower portion.

Further, according to the present invention, the exhaust gas purification unit may be a left-right multi-stage exhaust gas purification unit in which a first exhaust gas purification unit is formed on the left side and a second exhaust gas purification unit is formed on the right side.

According to some embodiments of the present invention made as described above, the exhaust gas purification unit and the foreign matter collection unit are integrated to improve airtightness and exhaust gas purification ability, and the foreign matter collection unit is provided with a first receiving unit and a second receiving unit. 2 While removing foreign substances from the receiving part, continuous exhaust gas purifying operation is possible in the first receiving part, and it is possible to facilitate the external discharge of foreign materials and to apply the toroidal type remote plasma generator to the product's performance. It is possible to improve, and to have the effect of preventing the short circuit of the insulating member due to the deposition of foreign matter. Of course, the scope of the present invention is not limited by these effects.

1 is a cross-sectional view showing an exhaust gas treatment apparatus according to some embodiments of the present invention.
FIG. 2 is an enlarged cross-sectional view showing a first blocking device of the exhaust gas processing device of FIG. 1.
3 is a cross-sectional view showing an exhaust gas treatment apparatus according to some other embodiments of the present invention.
4 is an enlarged cross-sectional view showing an enlarged portion A of the exhaust gas processing apparatus of FIG. 1.
5 is a cross-sectional view showing an exhaust gas treatment apparatus according to some other embodiments of the present invention.
6 is a cross-sectional view showing an exhaust gas treatment apparatus according to some other embodiments of the present invention.
7 is a cross-sectional view showing an exhaust gas treatment apparatus according to some other embodiments of the present invention.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully describe the present invention to those skilled in the art, and the following embodiments may be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the Examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to fully convey the spirit of the present invention to those skilled in the art. In addition, the thickness or size of each layer in the drawings is exaggerated for convenience and clarity of explanation.

The terms used in this specification are used to describe specific embodiments, and are not intended to limit the present invention. As used herein, singular forms may include plural forms unless the context clearly indicates otherwise. Also, as used herein, “comprise” and/or “comprising” specifies the shapes, numbers, steps, actions, elements, elements and/or the presence of these groups. And does not exclude the presence or addition of one or more other shapes, numbers, actions, elements, elements and/or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the drawings, for example, depending on the manufacturing technique and/or tolerance, deformations of the illustrated shape can be expected. Therefore, embodiments of the inventive concept should not be interpreted as being limited to a specific shape of the region shown in this specification, but should include, for example, a change in shape resulting from manufacturing.

Hereinafter, the exhaust gas treatment apparatuses 100 to 500 according to various embodiments of the present invention will be described in detail with reference to the drawings.

1 is a cross-sectional view showing an exhaust gas processing apparatus 100 according to some embodiments of the present invention, and FIG. 2 is an enlarged cross-sectional view showing a first blocking device 26 of the exhaust gas processing apparatus 100 of FIG. 1. .

As shown in FIG. 1, the exhaust gas processing apparatus 100 according to some embodiments of the present invention may include an exhaust gas purification unit 10 and a foreign material collection unit 20.

Here, the exhaust gas purification unit 10 is connected to the exhaust gas outlet 1a of the chamber 1 to apply plasma energy or purification gas to the exhaust gas to burn or purify harmful components of the exhaust gas. It can be a structure.

Here, the chamber 1 may be, for example, an ashing chamber for removing photoresist, a Chemical Vapor Deposition (CVD) chamber configured to deposit an insulating film, and to form interconnect structures. It may be an etching chamber configured to etch apertures or openings in the insulating film. Or it may be a PVD chamber configured to deposit a barrier film, or a PVD chamber configured to deposit a metal film.

In addition, the chamber 1 may be provided with a substrate support on which a substrate W, such as a wafer, is mounted, and although not shown, a supply port for receiving plasma from a plasma supply unit may be installed.

Meanwhile, more specifically, for example, the exhaust gas purification unit 10 may use a toroidal type, that is, a remote plasma generator (RPG) of a transformer-coupled type.

That is, as shown in Figure 1, the exhaust gas purification unit 10, the plasma is generated, the reaction body 11 and the reaction body (11) formed integrally with at least a portion of the foreign matter collecting unit (20) It may include a magnetic core 12 coupled to 11) to form an induced electromotive force for plasma generation to the reaction body 11 by the primary winding 13. Here, the magnetic core 12 may be formed in a shape surrounding a part of the reaction body 11.

In addition, for example, as shown in FIG. 1, the lower portion of the reaction body 11 is formed integrally with the upper portion of the foreign matter collecting portion 20, and a separate exhaust gas supply pipe may be unnecessary in the middle. . That is, through this, the number of parts can be reduced, airtightness is easy, and manufacturing and installation can be facilitated.

In addition, as shown in FIG. 1, the reaction body 11 has a hollow shape, and branched branches may be formed such that annular plasma discharge loops are formed on the left and right sides or on the upper and lower sides, respectively.

The branch pipe may be largely divided into two parts so that an ignition electromotive force can be formed. For example, the first branch portion 11-1 formed on the upper portion of the reaction body 11, and It is formed on the lower portion of the reaction body 11, and may be divided into a second branch portion 11-2 that is externally coupled to the first branch portion 11-1.

In addition, the branch pipe, the first branch portion (11-1) and the second branch portion (11-2) to maintain the airtight, and electrically insulated from each other, the first branch portion (11) It is formed between the sealing member 14 formed between -1) and the second branch 11-2 and the first branch 11-1 and the second branch 11-2, An insulating member 15 formed under the sealing member 14 may be included.

Here, as shown in Figure 4 to be described later, the insulating member 15, the end height (H1) of the first branch (11-1) to be protected from the flow of the exhaust gas (F) It can be installed in a high position (H2).

That is, since the flow F of the exhaust gas is directed downward, for example, foreign substances such as particles contained in the exhaust gas are higher than the end height H1 of the first branch 11-1. Since it is difficult to reach the insulating member 15 of (H2), it is possible to reduce the occurrence of a lamination phenomenon of a foreign material, and thereby, a short phenomenon due to a lamination of a foreign material can be prevented.

Meanwhile, as illustrated in FIG. 1, the exhaust gas processing apparatus 100 according to some embodiments of the present invention includes an exhaust pump 30 that discharges the exhaust gas from which the foreign matter P has been removed to the outside. It may further include.

Accordingly, the purified gas from which the foreign matters P are removed through the exhaust gas purification unit 10 and the foreign matter collection unit 20 described above does not adversely affect the exhaust pump 30 and the exhaust pump 30. It can prolong the service life.

Referring to the exhaust gas purification process of the exhaust gas processing apparatus 100 according to some embodiments of the present invention, when an induced electromotive force is formed in the magnetic core 12 by the primary winding 13, the reaction body An annular plasma discharge loop may be generated in (11). Here, a separate reaction gas may be supplied into the reaction body 11.

At this time, when the exhaust gas that has completed the process through the exhaust gas outlet 1a of the chamber 1 flows into the reaction body 11, plasma energy is applied and combustion of harmful components due to reactions such as oxidation It can be cleaned or purified, and particles in the form of particles can be generated in the process.

These foreign substances may be collected in the foreign substance collecting unit 20 to be described later.

Therefore, the exhaust gas purifying unit 10 and the foreign matter collecting unit 20 are integrated to improve airtightness and exhaust gas purifying ability, and the foreign matter collecting unit 20 includes the first receiving unit 21 and the second. Equipped with a receiving portion 22, while removing foreign substances from the second receiving portion 22, it is possible to continuously purify the exhaust gas in the first receiving portion 21, and to facilitate the external discharge of foreign substances. Can be.

In addition, by applying the toroidal type remote plasma generator to the exhaust gas purification unit 10 described above, it is possible to improve the performance of the product, and to prevent the short circuit of the insulating member due to the deposition of foreign matter.

In addition, for example, as shown in Figure 1, the foreign matter collecting unit 20 is installed in communication with the exhaust gas purification unit 10, the first receiving unit for receiving the foreign matter (P) primarily ( 21), and is installed in communication with the first receiving portion 21, the second receiving the foreign matter (P) so that the foreign matter (P) accommodated in the first receiving portion 21 can be discharged to the outside It may include a second receiving portion 22 and the first blocking device 26 is installed between the first receiving portion 21 and the second receiving portion 22.

Here, the second accommodating portion 22 is installed in the lower side of the first accommodating portion 21, the inclined arrangement body 20-3 is installed on one side of the first accommodating portion 21 further It can contain. In addition, the first blocking device 26 may be an inclined gate valve capable of dropping the foreign material P.

More specifically, for example, as shown in FIG. 2, the inclined gate valve, the engaging portion engaged with the peripheral portion (M) formed on the inclined bottom surface (C) of the inclined arrangement type body (20-3) ( N) may be formed, and may include a holder-type door 26-1 in which a sealing member S is formed at the tip.

At this time, a sealing member S may be additionally installed between the inclined arrangement-type body 20-3 and the holder-type door 26-1, and the inclined arrangement-type body 20-3 and the Bellows pipe (V) is installed between the holder-type door (26-1) can maintain the tightness more tightly.

Therefore, the foreign matters P generated in the exhaust gas purifying part 10 are firstly stacked on the inclined bottom surface C of the first accommodating part 21 to be removed by the inclined bottom surface C. 1 can be guided in the direction of the blocking device (26).

Subsequently, when the foreign matters P are sufficiently stacked, the first blocking device 26 may be opened to drop the foreign matters P and move to the second receiving part 22.

Subsequently, although not illustrated, a separate gate valve or cover may be disassembled to remove the foreign substances P by discharging them to the outside.

At this time, by blocking the first blocking device 26, a process in which foreign substances are stacked can be continuously performed without interruption of equipment.

3 is a cross-sectional view showing an exhaust gas processing apparatus 200 according to some other embodiments of the present invention, and FIG. 4 is an enlarged cross-sectional view showing an enlarged portion A of the exhaust gas processing apparatus 200 of FIG. 1.

First, as illustrated in FIGS. 3 and 4, the foreign matter collecting unit 20 of the exhaust gas processing apparatus 200 according to some embodiments of the present invention is integrated with the exhaust gas purification unit 10 described above. As a device for collecting foreign substances P generated by the exhaust gas purification unit 10, the foreign substances P are separated from the exhaust gas and stacked in a separate location or accommodated in a separate tray T and moved. It can be a device that can be.

More specifically, for example, as illustrated in FIG. 3, the foreign matter collecting unit 20 is installed in communication with the exhaust gas purification unit 10, and is firstly configured to receive the foreign material P primarily. The foreign matter P is installed in communication with the receiving part 21 and the first receiving part 21, and the foreign matter P is 2 to discharge the foreign matter P accommodated in the first receiving part 21 to the outside. It may include a second accommodating portion 22 accommodated by the vehicle and a first blocking device 23 installed between the first accommodating portion 21 and the second accommodating portion 22.

In addition, as shown in Figure 3, the foreign matter collecting portion 20, the second receiving portion 22 is installed on one side of the first receiving portion 21, the exhaust pump 30 is the first 1 may further include a horizontally arranged body 20-1 installed on the other side of the receiving portion 21 and a second blocking device 24 installed on the second receiving portion 22.

Here, as illustrated in FIG. 3, the first blocking device 23 and the second blocking device 24 may be vertical gate valves through which a tray T for collecting foreign matter passes.

Therefore, the foreign matters P generated in the exhaust gas purification unit 10 may be primarily stacked inside the tray T accommodated in the first accommodating portion 21 or the first accommodating portion 21. have.

Subsequently, when the foreign matters P are sufficiently stacked in the tray T, the first blocking device 23 is opened to horizontally move or exchange the tray T to the second receiving portion 22. I can do it. This horizontal movement process may be performed by a separate mobile device or a manual operation of the operator.

Subsequently, the foreign matter P may be removed by opening the second blocking device 24 and discharging the tray T to the outside.

At this time, by blocking the first blocking device 23, a process in which foreign substances are stacked on the new tray T can be continuously performed without stopping the equipment.

5 is a cross-sectional view illustrating an exhaust gas treatment apparatus 300 according to some other embodiments of the present invention.

As shown in FIG. 5, the foreign matter collecting part 20 of the exhaust gas treatment apparatus 300 according to some other embodiments of the present invention, the second receiving part 22 is the first receiving part 21 ) Is installed on the lower side, the exhaust pump 30 further includes a vertically arranged body 20-2 installed on one side of the first receiving portion 21, the first blocking device 25 is, It may be a horizontal gate valve capable of dropping the foreign material.

Therefore, the foreign matters P generated in the exhaust gas purification unit 10 may be primarily stacked on the first blocking device 25 of the first receiving unit 21.

Subsequently, when the foreign matters P are sufficiently stacked, the first blocking device 25 may be opened to drop the foreign matters P and move to the inside of the tray T of the second receiving part 22. have.

Subsequently, although not illustrated, a separate gate valve or cover may be disassembled to discharge the tray T to the outside to remove the foreign material P.

At this time, by blocking the first blocking device 25, the process of depositing foreign substances can be continuously performed without stopping the equipment.

6 is a cross-sectional view of an exhaust gas treatment apparatus 400 according to some other embodiments of the present invention.

6, the exhaust gas purification unit 10 of the exhaust gas processing apparatus 400 according to some other embodiments of the present invention, the first exhaust gas purification unit 1010 is formed on the upper side , The upper and lower multi-stage exhaust gas purification unit 1000 in which the second exhaust gas purification unit 1020 is formed at the lower portion.

Therefore, according to the technical idea of the present invention, the purification process is repeated to form the exhaust gas purification unit 10 in multiple stages up and down to meet the environmental conditions of which the amount of exhaust gas discharged is high or contains many harmful substances or is severe. It can be easy to perform.

7 is a cross-sectional view of an exhaust gas treatment apparatus 500 according to some other embodiments of the present invention.

As illustrated in FIG. 7, in the gas purification unit 10 of the exhaust gas processing apparatus 500 according to some other embodiments of the present invention, a first exhaust gas purification unit 2010 is formed on the left side. , A right and left multi-stage exhaust gas purification unit 2000 in which a second exhaust gas purification unit 2020 is formed on the right side.

Accordingly, according to the technical idea of the present invention, the purification process is repeatedly performed to form the exhaust gas purification unit 10 in left and right multi-stages to satisfy the environmental conditions in which the amount of exhaust gas discharged is large or contains many harmful substances or is severe. It can be easy to perform.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

1: Chamber
1a: exhaust gas outlet
10: exhaust gas purification unit
11: reaction body
12: Magnetic core
13: primary winding
11-1: first quarter
11-2: Second Branch
14: sealing member
15: insulating member
20: foreign matter collection unit
21: first receiving unit
22: second receiving section
23, 25, 26: first blocking device
24: second blocking device
T: Foreign material collection tray
20-1: Horizontally placed body
20-2: Vertically placed body
20-3: Inclined body
C: Slope bottom
M: Lead
N: Interlocking part
S: sealing member
26-1: Holder-type door
30: exhaust pump
100: exhaust gas treatment device
1010, 2010: First exhaust gas purification unit
1020, 2020: second exhaust gas purification unit
1000: upper and lower multi-stage exhaust gas purification unit
2000: left and right multi-stage exhaust gas purification unit

Claims (11)

An exhaust gas purification unit connected to the chamber to purify the exhaust gas; And
Includes; foreign matter collecting unit for collecting foreign matter generated in the exhaust gas purification unit,
The foreign matter collecting unit,
A first accommodating part installed in communication with the exhaust gas purifying part and primarily accommodating the foreign material;
A second accommodating part installed in communication with the first accommodating part and accommodating the foreign material secondarily so as to discharge the foreign material contained in the first accommodating part to the outside; And
A first blocking device installed between the first receiving portion and the second receiving portion;
Including,
The foreign matter collecting unit,
The second accommodating portion is installed on one side of the first accommodating portion, the exhaust pump is a horizontally arranged body installed on the other side of the first accommodating portion; And
Further comprising; a second blocking device installed in the second receiving portion,
The first blocking device and the second blocking device are vertical gate valves capable of passing a tray for collecting foreign substances, and the exhaust gas processing device. delete delete delete An exhaust gas purification unit connected to the chamber to purify the exhaust gas; And
Includes; foreign matter collecting unit for collecting foreign matter generated in the exhaust gas purification unit,
The foreign matter collecting unit,
A first accommodating part installed in communication with the exhaust gas purifying part and primarily accommodating the foreign material;
A second accommodating part installed in communication with the first accommodating part and accommodating the foreign material secondarily so as to discharge the foreign material contained in the first accommodating part to the outside; And
A first blocking device installed between the first receiving portion and the second receiving portion;
Including,
The foreign matter collecting unit,
The second accommodating portion is installed on the lower side of the first accommodating portion, and the exhaust pump further includes an inclined arrangement-type body installed on one side of the first accommodating portion,
The first blocking device is an inclined gate valve capable of dropping the foreign material,
The inclined gate valve,
Including, the holder-type door is formed with an engaging portion for engaging the peripheral portion formed on the inclined bottom surface of the inclined arrangement-type body, including, exhaust gas processing apparatus. According to claim 1,
The exhaust gas purification unit,
A reaction body in which plasma is generated and integrally formed with at least a part of the foreign matter collecting part; And
A magnetic core coupled to the reaction body to form an induced electromotive force for plasma generation to the reaction body by a primary winding;
Exhaust gas treatment device comprising a. The method of claim 6,
The magnetic core is formed in a shape surrounding a part of the reaction body, the exhaust gas processing apparatus. The method of claim 7,
The reaction body has a hollow shape, and an exhaust gas processing apparatus in which branched branch pipes are formed such that annular plasma discharge loops are formed on the left and right sides or on the upper and lower sides, respectively. An exhaust gas purification unit connected to the chamber to purify the exhaust gas; And
Includes; foreign matter collecting unit for collecting foreign matter generated in the exhaust gas purification unit,
The foreign matter collecting unit,
A first accommodating part installed in communication with the exhaust gas purifying part and primarily accommodating the foreign material;
A second accommodating part installed in communication with the first accommodating part and accommodating the foreign material secondarily so as to discharge the foreign material contained in the first accommodating part to the outside; And
A first blocking device installed between the first receiving portion and the second receiving portion;
Including,
The exhaust gas purification unit,
A reaction body in which plasma is generated and integrally formed with at least a part of the foreign matter collecting part; And
A magnetic core coupled to the reaction body to form an induced electromotive force for plasma generation to the reaction body by a primary winding;
Including,
The magnetic core is formed in a shape surrounding a part of the reaction body,
The reaction body has a hollow shape, and branched branches are formed so that an annular plasma discharge loop is formed on the left and right sides or on the upper and lower sides, respectively.
The branch pipe,
A first branch formed on the reaction body;
A second branch formed on the lower portion of the reaction body and externally coupled to the first branch;
A sealing member formed between the first branch portion and the second branch portion; And
An insulating member formed between the first branch and the second branch, formed below the sealing member, and installed at a position higher than the end height of the first branch so as to be protected from the exhaust gas flow. ;
Exhaust gas treatment device comprising a. The method of claim 8,
The exhaust gas purification unit,
An exhaust gas processing apparatus that is a vertically multistage exhaust gas purification unit in which a first exhaust gas purification unit is formed at an upper side and a second exhaust gas purification unit is formed at a lower portion. The method of claim 8,
The exhaust gas purification unit,
An exhaust gas processing apparatus that is a left-right multi-stage type exhaust gas purification unit in which a first exhaust gas purification unit is formed on the left side and a second exhaust gas purification unit is formed on the right side.

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