KR102113213B1 - Wavelength tunable etalon capable of controlling the cell gap and method of controlling the cell gap of the wavelength tunable etalon - Google Patents

Abstract

The present invention relates to a wavelength tunable etalon and a method for controlling a cell gap of a wavelength tunable etalon. The wavelength tunable etalon comprises an etalon module and a pressing unit, wherein the etalon module includes: a first substrate provided with a reflection film, a transparent electrode and an alignment film on one surface; a second substrate provided with a reflection film, a transparent electrode and an alignment film on one surface and facing the first substrate; a liquid crystal layer injected between the first substrate and the second substrate; and a seal member provided on the periphery of the liquid crystal layer to prevent a leakage on the liquid crystal layer, and the pressing unit is configured to press a pressing area, which is the periphery of a laser penetration area, such that a substrate interval of the core portion of the first substrate and the second substrate, which is the laser penetration area, can be regulated. The wavelength tunable etalon capable of controlling the cell gap and the method for controlling the cell gap of the wavelength tunable etalon according to the present invention make it easy to correct flatness of the laser penetration area by using a pressing clip, thereby lowering production difficulty and saving production costs.

Description

Wavelength tunable etalon capable of controlling the cell gap and method of controlling the cell gap of the wavelength tunable etalon}

The present invention relates to a method for adjusting the cell gap of a wavelength-adjustable etalon and a wavelength-adjustable etalon capable of adjusting a cell gap, and more specifically, an etalon capable of improving the flatness and parallelism of a laser passing region of the wavelength-adjustable etalon. And a method for adjusting the cell gap of etalon.

Etalon (etalon) is an optical component device configured so that two substrates including a reflector are installed in parallel so that light can be transmitted only at a specific wavelength due to interference caused by multi-reflection on two parallel mirror surfaces. to be. Etalon is an optical element that is frequently used in optical communication, and has high efficiency and high wavelength selectivity. In particular, it can be used in wavelength-controlled lasers that include an external cavity.

When the liquid crystal layer is provided inside the etalon, the refractive index can be modulated according to the applied voltage, so that the wavelength of light passing through can be selected.

Unlike a liquid crystal display (LCD), the etalon equipped with a liquid crystal needs to have a uniformity in the cell gap of the central portion through which actual laser light passes, in nanometer units. In general, in order to obtain a sharp signal in etalon, the flatness of the substrate and the uniformity of the cell gap should be excellent from 1/20 to 1/100 of the wavelength. That is, when using light of 1500nm, substrate uniformity and cell gap uniformity must be secured below 15nm to 75nm to have excellent performance.

US Patent No. 5150236 is disclosed for such an etalone.

However, such an existing etalon must maintain a very precise substrate uniformity and salgap uniformity, and thus requires a precise process, which has a problem of high difficulty and cost in the manufacturing process.

U.S. Patent No. 5150236

The present invention solves the above-mentioned problems and provides a method for adjusting the cell gap of the wavelength-adjustable etalone and the wavelength-adjustable etalone that can easily maintain the flatness of the etalon and the plate spacing uniformly. There is a purpose.

As a solution for solving the above problems, the etalon module includes a pressing part, and the etalon module includes a first substrate having a reflective film, a transparent electrode, and an alignment film on one surface, and a reflective film, a transparent electrode, and an alignment film on one surface. 1, a second substrate facing the substrate, a liquid crystal layer injected between the first substrate and the second substrate, and a sealing member provided around the liquid crystal layer so as to prevent leakage of the liquid crystal layer. A wavelength-adjustable etalon configured to press the pressing region around the laser passing region may be provided so that the substrate spacing between the central portions of the first substrate and the second substrate as the passing region is uniform.

Here, the pressing portion may be configured to be capable of adjusting the position on the plane with the etalon module so that the pressing position in the pressing region can be changed.

In addition, in the etalon module, when the pressing portion is pressed, the laser passing region may be convexly deformed outward by the liquid crystal.

Meanwhile, the pressing unit may be configured to simultaneously press the first substrate and the second substrate.

Furthermore, the pressing unit may be configured to press the first substrate and the second substrate with the etalon module interposed therebetween.

Meanwhile, the pressing portion may include a first pressing piece pressing the first substrate and a second pressing piece pressing the second substrate.

In addition, one side of the first pressing piece and the second pressing piece may be connected to each other, and the other side may be configured as a detachable coupling portion.

In addition, the pressing portion may include protrusions formed to protrude toward the etalon module so as to contact and press the pressing regions of the first substrate and the second substrate, respectively.

On the other hand, the pressing portion is formed with a hollow so that the laser can pass, the protrusion is projected along the perimeter of the hollow

In addition, the protrusions may be formed to protrude at a plurality of spaced apart points along the perimeter of the hollow.

On the other hand, the first substrate and the second substrate each further includes a contact portion extending from the transparent electrode, is provided at a position facing the contact portion, and includes an elastic portion configured to be electrically connected to the outside, the first substrate and the second When the substrate is bonded, the contact portion and the elastic portion may be configured to be electrically connected.

In addition, in the method of adjusting the substrate spacing of the etalon module provided with the liquid crystal layer to enable wavelength adjustment, the method comprising the steps of disposing the etalon module between the pressing portions including the hollow and the protruding portion, the pressing portion of the etalon module A method of adjusting the substrate spacing of the wavelength-adjustable etalons, including the step of adjusting the substrate spacing by adjusting the substrate spacing of the laser passing region by pressing and fixing the pressing portion with the etalon when it is determined that the substrate spacing of the etalon module is uniform. Can be provided.

Here, in the step of adjusting the substrate spacing, the laser passing area may be convexly deformed outward.

In addition, the step of adjusting the substrate spacing may be configured to press in the thickness direction of the etalon module using a pressing portion.

On the other hand, when it is determined that the substrate spacing of the etalon module is non-uniform, the step of adjusting the relative position of the pressing portion and the etalon module may be further included.

Furthermore, the relative position change can be a horizontal movement parallel to the substrate of the etalon module.

On the other hand, the determination of whether or not the substrate spacing of the etalon module is uniform may be determined as having a uniform substrate spacing when the intensity is measured by passing a laser beam through a laser passing region to a predetermined value or more.

According to the present invention, the method for adjusting the cell gap of the wavelength-adjustable etalon and the wavelength-adjustable etalon according to the present invention can be easily corrected for flatness in the laser passing region using a press clip, thereby lowering the production difficulty and manufacturing It has the effect of reducing costs.

1 is a plan view of an etalone according to an embodiment of the present invention.
2 is a cross-sectional view of FIG. 1.
3 is an enlarged view of a laser passing area of FIG. 2.
Figure 4 is an exploded perspective view showing an enlarged contact and elastic portion of the etalon.
5 is a cross-sectional view showing an example in which the cell gap of etalon is non-uniform.
6 is an enlarged cross-sectional view of a portion adjacent to the laser passing region of FIG. 5 (a).
7 is a cross-sectional view showing a state in which the cell gap of the laser passing region is adjusted.
8 is another embodiment of the pressing clip.
9 is a flowchart of a method for adjusting a cell gap of a wavelength-adjustable etalone according to another embodiment of the present invention.

Hereinafter, a method for adjusting a cell gap of a wavelength-adjustable etalon and a wavelength-adjustable etalon capable of adjusting a cell gap according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the following description of the embodiments, the names of each component may be referred to as other names in the art. However, if they have functional similarity and identity, even if a modified embodiment is employed, it can be regarded as an even configuration. In addition, reference numerals added to each component are described for convenience of description. However, the illustrated contents on the drawings in which these codes are described do not limit each component to the range in the drawing. Similarly, even if an embodiment in which some modifications of the configuration on the drawings are employed, it can be regarded as an equivalent configuration if there is functional similarity and identity. In addition, in light of the level of general skill in the art, if it is recognized as a component to be included, description of it will be omitted.

Hereinafter, a wavelength-adjustable etalon capable of adjusting a cell gap according to the present invention will be described in detail with reference to FIGS. 1 to 4.

In the following drawings, it may be expressed as a little exaggerated to explain the uniformity of the substrate.

FIG. 1 is a plan view of an etalone according to an embodiment of the present invention, FIG. 2 is a cross-sectional view of FIG. 1, FIG. 3 is an enlarged view of a laser passing area of FIG. 2, and FIG. 4 is a contact portion of the etalon It is an exploded perspective view showing the elastic part enlarged.

As illustrated, the wavelength-adjustable etalon capable of adjusting the cell gap according to the present invention may include a wavelength-adjustable etalon module and a press clip.

The etalon module may include a first substrate 110, a second substrate 120, a liquid crystal layer 140, and a seal member 150 as shown.

The first substrate 110 and the second substrate 120 are bonded to each other, and a liquid crystal layer 140 is provided between both substrates, so that the arrangement of the liquid crystal layers varies according to the applied voltage. The bases of the first substrate 110 and the second substrate 120 may include a colorless transparent material such as glass or crystal.

The first substrate 110 is formed of a thin flat plate of a transparent material, coated on both sides to allow laser transmission and multi-reflection, and includes electrical elements to transmit a voltage to the liquid crystal layer. .

The first substrate 110 includes a first antireflection coating 111, a high reflection coating, a first alignment layer 113, a first transparent electrode 114, and a first contact portion It may be configured to include 115 and the first elastic portion (116).

The first low-reflection film 111 is provided on the outer surface when it is cemented with an etalon module, and the first reflective coating film 112 can be provided on the inner surface of the first substrate 110. The first reflective coating film 112 may be generally composed of a dielectric mirror made by laminating a dielectric layer, and the reflectance may be 95% or more. The first reflective coating film 112 may be formed of several μm to several mm.

The first alignment layer 113 is configured to align liquid crystals in a specific direction when voltage is applied to the liquid crystal layer. The first alignment layer 113 (Alignment layer) is formed while covering the first transparent electrode 114, and is configured to be arranged so that the liquid crystal layer 140 is arranged at a specific angle when supplying electrical energy. The first alignment layer 113 may be formed by a vacuum deposition method so as to be formed with a uniform thickness, and may be configured by including a specific pattern on the alignment surface that is the first inner surface direction. At this time, the specific pattern may be formed at a predetermined angle as necessary. The first alignment layer 113 may be formed while covering the first transparent electrode 114 to be described later, and may be formed in a thin film form. The first alignment layer 113 avoids contact with the seal member 150 in order to secure adhesion at a portion where the seal member 150, which will be described later, is contacted for sealing the liquid crystal, and is directly formed on the first reflective coating layer 112. Can be. Meanwhile, the first alignment layer 113 may include an inorganic insulating layer and may be an inorganic insulating layer itself. At this time, the inorganic insulating film may include SiOx or SiNx. In general, the alignment film used for LCD or the like may be a polyimide (polyimid) -based material, but in the case of polyimide, the adhesive force tends to be slightly lower than that of the inorganic insulating film. In this case, separation may occur between the first alignment layer 123 and the substrate. Therefore, in order to prevent the alignment layer from being separated, the first alignment layer 123 may be selected including an inorganic insulating layer.

The first transparent electrode 114 is configured to apply a voltage to the liquid crystal layer. The first transparent electrode 114 is composed of a planar electrode, and may be provided on the inner surface of the first substrate 110. Specifically, it may be formed on the first reflective coating film 112. The first transparent electrode may be formed to extend across the seal line so that it can be electrically connected to the outside when the etalon module is manufactured. Since the first transparent electrode 114 satisfies the transmittance of the laser in a predetermined range, it is possible to form a potential difference in the liquid crystal layer while passing the laser.

The first contact portion 115 is in contact with the second elastic portion 126, which will be described later, and is electrically connected to the outside, and is an area located outside the seal member among the portions extending from the first transparent electrode 114 described above. That is, the liquid crystal layer 140 from the seal member 150 may be disposed on an external area distinct from the area provided.

The first elastic portion 116 is in contact with the second contact portion 115 that faces when the first substrate 110 and the second substrate 120 are bonded so that electric energy can be transferred to the second transparent electrode 124. It is composed. The first elastic part 116 may be formed of a flat spring and attached to the inner surface of the first substrate 110. When the first substrate 110 and the second substrate 120 are bonded to each other, the first elastic portion 116 is in contact with the second contact portion 125 to be somewhat deformed, and the second contact portion (continuously) by the restoring force Electrical contact with 125) can be maintained. However, although the first elastic portion 116 is shown to be composed of a curved flat plate spring, this is only an example, and may be configured in various shapes having elastic force.

As described above, the liquid crystal layer 140 is configured to switch arrangements as necessary, and may be accommodated in a space between the first substrate 110 and the second substrate 120. Meanwhile, the seal member 150 may be applied around the liquid crystal layer 140 so as to prevent external leakage of the liquid layer 140.

The seal member 150 is provided to encapsulate the liquid crystal layer 140, and is configured to maintain a parallel state of the substrate between the first substrate 110 and the second substrate 120. The seal member 150 is formed around the liquid crystal layer 140 and is configured to prevent liquid crystal from flowing out by contacting the inner surface of the first substrate 110 and the inner surface of the second substrate 120. do. At this time, one side of the seal member 150 may be in contact with the first reflective coating film 112 or the first substrate 110, and the other side may be formed in contact with the second reflective coating film 122 or the second substrate 120. Can be.

The second substrate includes the same configuration as the first substrate, the second low-reflection film 121, the second reflective coating film 122, the second alignment layer 123, the second transparent electrode 124, and the second contact portion 125 ) And the second elastic portion 126. Each configuration may be configured symmetrically to the configuration in the first substrate 110 described above, so a detailed description thereof will be omitted. In addition, the second substrate 120 has a first substrate 110 and the surfaces facing each other are configured symmetrically, it may be bonded to be composed of one etalon module (1). The liquid crystal layer 140 described above may be provided between the first substrate 110 and the second substrate 120. Meanwhile, a liquid crystal layer may be injected after the first substrate 110 and the second substrate 120 are bonded, and the bonding may be completed by sealing the injection hole for the injection of the liquid crystal.

Meanwhile, although not shown, a separate spacer (not shown) may be provided to fix the gap between the first substrate 110 and the second substrate 120 along the periphery of the liquid crystal layer.

The pressing clip 2 may be configured to press the first substrate and the second substrate of the etalon module 1 in the thickness direction to uniformly adjust the cell gap of the laser passing region.

The pressing clip 2 is configured to wrap the etalon module 1 from the outside, and is configured in the form of a clip so as to press the etalon module located inside by its own elasticity upon fastening.

The pressing clip may include a first pressing piece 211, a second pressing piece 212, a hollow 213, a protrusion 214, and an engaging portion 215.

The first pressing piece 211 is configured to press the upper first substrate 110 on FIG. 2, and may be configured in a flat plate shape. The second pressing piece 212 is configured to press the lower second substrate 120 on FIG. 2 and may be configured in a flat plate shape. The first pressing piece 211 and the second pressing piece 212 may be configured to be connected to and fixed to one side. The other side of the first pressing piece 211 and the second pressing piece 212 may be configured to include a coupling portion 215 configured to be selectively fastened to each other. When the pressure clip 2 is fastened, it is possible to simultaneously press the first substrate 110 and the second substrate 120 in the thickness direction of the etalon module 1 by its own elasticity. The coupling portion 215 is composed of a male and female structure and may alternatively be configured for each of the first pressing piece and the second pressing piece. However, the configuration of the coupling portion 215 is only an example, and may be modified into various configurations capable of connecting the first pressing piece 211 and the second pressing piece 212 with a mechanism seat.

The hollow 213 is formed so that the laser passes through the pressure clip (2). The hollow may be formed as a concentric shaft circular hole in the central portion of the first pressing piece 211 and the second pressing piece 212. The hollow 213 has a slightly wider diameter than the laser passing area 3 so that the laser passing area 3 is not interfered by the pressing pieces 211 and 212 when the plane moves to adjust the cell gap, which will be described later. Can be configured. In general, since the line width of the laser beam is about 100 μm, the diameter of the hollow 213 may be formed to be 100 μm or more.

The protrusions 214 are configured in a pair to contact the substrates 110 and 120 of the etalon module 1 and press the substrates. The protrusion 214 may be configured to protrude toward the etalon module 1 along a circular path adjacent to the hollow 213. The protrusions 214 may be composed of a plurality of spaced apart from each other along a circular path, and are configured to press the substrates 110 and 120 at a plurality of points. The protrusion 214 is configured to press the pressing region around the laser passing region 3 of the substrate to adjust the substrate spacing.

Hereinafter, the operation of the etalon module 1 and the pressing clip 2 according to the present invention will be described in detail with reference to FIGS. 5 to 8.

5 is a cross-sectional view showing an example in which the cell gap of etalon is non-uniform, and FIG. 6 is an enlarged cross-sectional view of a portion adjacent to the laser passing region of FIG. 5 (a). As described above, the cell gap is somewhat exaggerated for smooth description in this drawing.

As a typical example of the cell gap defect of etalon, FIG. 5 (a) shows a state in which a small central portion is formed in a concave shape in a laser passing region because less liquid crystal is injected, and FIG. 5 (b) injects a lot of liquid crystal. The central part is transformed into a convex shape. In the case of vacuum injection of liquid crystal, the amount of liquid crystal is determined by pressure and time applied to etalon in the endseal process, but in general, the liquid crystal has a cell gap distribution as shown in FIG. 5 (a). There are many. Therefore, it will be described as an example in the case of Figure 5 (a) below.

Referring to FIG. 6, when the bending of the substrate is formed in the laser passing region, the spacing between the first substrate 110 and the second substrate 120 varies depending on the position of the plane, and the spacing between the two cells is minimal. The minimum point (m) will appear. The point where the cell gap is minimized is the best flatness, but is a problem when it does not coincide with the laser passing area. In this case, the uniformity of the cell gap is low, thereby deteriorating the properties of etalon.

7 is a cross-sectional view showing a state in which the cell gap of the laser passing region is adjusted.

After installing the etalon module inside the pressing clip 2 as shown, when the engaging portion 215 of the pressing clip 2 is coupled, the protrusions 214 have the first substrate 110 and the second substrate 120. Will pressurize. At this time, the liquid crystal layer 140 is accommodated in the interior space, and the liquid crystal layer 140 has a non-compressive property, and thus, when pressure is applied from the outside, the pressure increases as a whole. When the pressure is applied to the pressing region, which is the periphery of the laser passing region 3, by the protrusion 214 of the pressing clip 2, the substrate in the pressing region enters concavely, and the portion adjacent to the pressing region is convexly deformed by liquid crystal. . When the convex portion is formed in the laser passing region 3, which is the central portion of the circular path of the protruding portion 214, the point at which the cell gap between the first substrate 110 and the second substrate 120 is maximum (loca maximum) is the laser passing region ( 3) It can be generated inside. The point at which the cell gap is maximized is a portion having excellent uniformity similar to the point at which the cell gap is minimized. In addition, the point where the cell gap is maximized may be the best part of parallelism and flatness between both substrates.

However, although somewhat exaggerated in FIG. 7, the line width of the laser beam, that is, the diameter of the laser passing region 3 may be about 100 μm or so, so that the pressure clip ( 2) It is necessary to adjust the relative position between the etalon module (1). In this case, while repeating the fastening and release of the pressing clip 2, the relative position between the etalon module 1 and the pressing clip 2 is adjusted, and at the same time, the position when the received signal strength is greatest is transmitted through the laser. Determine by location.

8 is another embodiment of the pressing clip.

As shown, the pressing clip 2 may have a protrusion 214 in an annular shape. When configured in this way, the periphery of the laser passing area 3 can be pressed along a circular path, and a point at which the substrate spacing is maximized can be formed in the laser passing area 3.

Hereinafter, a method for adjusting the cell gap of the wavelength-adjustable etalon will be described in detail with reference to FIG. 9.

9 is a flowchart of a method for adjusting a cell gap of a wavelength-adjustable etalone according to another embodiment of the present invention.

As shown, another method for adjusting the cell gap of the wavelength-adjustable etalon according to the present invention comprises the steps of disposing the etalon module between the pressing parts (S100), adjusting the substrate spacing (S200), and intensity of the laser beam. It may be configured to include a step of measuring (S300), a step of determining whether the laser beam is greater than or equal to a predetermined value (S400) and a step of adjusting the position of the pressing part (S500).

The step of disposing the etalon module between the pressing parts (S100) corresponds to a preparation step for adjusting the cell gap of the etalon module with a pressing part configured to press etalon on both sides of the etalon module. Here, the pressing portion may be the pressing clip of the above-described embodiment. The position is adjusted so that the hollow formed in the central portion of the pressing portion can correspond to the laser passing region of the etalon module.

The step of adjusting the substrate spacing (S200) corresponds to the step of pressing both sides of the etalon module by fastening the pressing portion. The pressing portion is provided with a protrusion to press the periphery of the laser passing region of the etalon module along a circular path, and when fastening the pressing portion to the etalon module, the substrates on both sides of the etalon module are mechanically adapted according to the shape of the pressing portion itself. Will pressurize. When the pressing portion is installed on the etalon module, the pressure is applied to the liquid crystal layer accommodated between both substrates of the etalon module, and the rest of the portion except for the region in contact with the pressing portion and the etalon module protrudes convexly. Here, the substrate spacing is adjusted so that a point at which the gap between the two substrates side-by-side bonded to the etalon module is maximized can be formed in the laser passing region.

The step of measuring the intensity of the laser beam (S300) corresponds to the step of measuring the intensity by transmitting the laser beam in a state where the pressing part is installed in the etalon module.

The determining whether the laser beam is greater than a predetermined value (S400) is a step of determining the intensity of the laser passing through the etalon module in a state where the substrate spacing is adjusted and determining that the uniformity of the cell gap is satisfied when a predetermined value or more is measured. It corresponds. If it is less than a predetermined value, the following steps for re-adjusting the cell gap may be performed.

The step of adjusting the position of the pressing part corresponds to a step of determining that the uniformity of the cell gap is not satisfied when the intensity of the laser measured in the above-described step (S500) is less than or equal to the reference value and adjusting the position of the pressing part to re-pressurize. In this step, the pressing part is released, the relative position between the pressing part and the etalon module is readjusted, and the pressing part is again engaged. Thereafter, a step of measuring the intensity of the laser beam and a step of determining whether the laser beam is greater than or equal to a predetermined value may be performed, and may be repeatedly performed until the intensity of the laser beam satisfies a predetermined value.

According to the present invention, the method for adjusting the cell gap of the wavelength-adjustable etalon and the wavelength-adjustable etalon according to the present invention can be easily corrected for flatness in the laser passing region using a press clip, thereby lowering the production difficulty and manufacturing It has the effect of reducing costs.

1: Etalon module
2: Pressing clip
3: laser pass area
110: first substrate
111: first low-reflection film 112: first reflective coating film
113: first alignment layer 114: first transparent electrode
115: first contact portion 116: first elastic portion
120: second substrate
121: second low-reflection film 122: second reflective coating film
123: second alignment layer 124: second transparent electrode
125: second contact portion 126: second elastic portion
140: liquid crystal layer
150: seal member
160: spacer
170: wire
211: first pressurized piece
212: 2nd pressurized piece
213: hollow
214: protrusion
215: coupling portion

Claims (17)

It consists of an etalon module and a pressing part,
The etalon module,
A first substrate having a reflective film, a transparent electrode and an alignment film on one surface;
A reflective substrate, a transparent electrode, and an alignment layer on one surface, and a second substrate facing the first substrate;
A liquid crystal layer injected between the first substrate and the second substrate;
It comprises a seal member provided on the periphery of the liquid crystal layer to prevent the leakage of the liquid crystal layer,
The pressing portion,
It is configured to press the pressing region, which is the circumference of the laser passing region, so that the spacing between the central portions of the first substrate and the second substrate which is the laser passing region is uniform,
A wavelength-adjustable etalone comprising a protrusion formed to protrude along the periphery of the hollow so as to press the first substrate and the second substrate to allow the laser to pass therethrough. According to claim 1,
The pressurizing portion is a wavelength-controlled etalon, characterized in that it is possible to adjust the position on the plane with the etalon module so that the pressing position can be changed within the pressing area. According to claim 2,
The etalon module is a wavelength-controlled etalon, characterized in that when the pressing portion is pressed, the laser passing region is convexly deformed in the outward direction by the liquid crystal. According to claim 2,
The pressing portion is a wavelength-controlled etalon, characterized in that configured to press the first substrate and the second substrate at the same time. According to claim 4,
The pressurizing portion is a wavelength-controlled etalon, characterized in that configured to press the first substrate and the second substrate with the etalon module interposed therebetween. The method of claim 5,
The pressing portion is a first pressing piece for pressing the first substrate; And
And a second pressing piece that presses the second substrate. The method of claim 6,
One side of the first pressing piece and the second pressing piece are connected to each other,
The other side is a wavelength-controlled etalon, characterized in that it consists of a coupling portion detachable from each other. According to claim 3,
The protrusion,
Wavelength-adjustable etalon characterized in that it is formed to protrude to the side of the etalon module so as to be pressed in contact with the pressing regions of the first substrate and the second substrate, respectively. delete The method of claim 8,
The protrusion is formed by protruding from a plurality of spaced apart points along the perimeter of the hollow wavelength-controlled etalons. According to claim 2,
Each of the first substrate and the second substrate further includes a contact portion extending from the transparent electrode,
It is provided at a position facing the contact portion, and includes an elastic portion configured to be electrically connected to the outside,
When the first substrate and the second substrate are bonded, a wavelength-controlled etalon, characterized in that the contact portion and the elastic portion is configured to be electrically connected. In the method for adjusting the substrate spacing of the etalon module provided with a liquid crystal layer to enable wavelength adjustment,
Disposing the etalon module between the pressing portions including hollows and protrusions;
A substrate spacing adjustment step of pressing the etalon module with the pressing portion to adjust the substrate spacing of the laser passing region; And
And when it is determined that the substrate spacing of the etalon module is uniform, fixing the pressing part with the etalon,
And when the substrate spacing of the etalon module is determined to be non-uniform, further comprising a position adjusting step of changing the relative position of the pressing part and the etalon module. The method of claim 12,
The step of adjusting the substrate spacing is a method of adjusting the substrate spacing of a wavelength-controlled etalon, characterized in that the laser passage region is convexly deformed in an outward direction. The method of claim 12,
The step of adjusting the substrate spacing is a method of adjusting the substrate spacing of the wavelength-adjustable etalons, characterized in that the pressing portion is pressed in the thickness direction of the etalon module. delete The method of claim 12,
The change in the relative position is a method of adjusting the substrate spacing of the wavelength-controlled etalons, characterized in that the movement of the etalon module in a horizontal direction parallel to the substrate. The method of claim 12,
The determination of whether the substrate spacing of the etalon module is uniform is measured by measuring the intensity by passing a laser beam through the laser passing region, and when the value is greater than a predetermined value, it is determined that the substrate spacing is uniform. How to adjust the substrate spacing.

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