KR102109032B1 - Method and apparatus for detecting a circuit abnormality using current sensing of a plasma power supply - Google Patents

Abstract

Disclosed is a circuit abnormality detection device and method using current sensing of a plasma power supply. The circuit abnormality detection device using the current detection of the plasma power supply according to the embodiment converts the input AC current into DC current, filters the DC current that satisfies the set condition from the converted DC current, and returns the filtered DC current again. A conversion circuit that outputs a conversion current converted to AC; A first sensing unit for sensing the conversion current output from the conversion circuit; An amplifying circuit that amplifies the inputted conversion current when the converted current is input, converts the amplified converted current into DC current, and filters the DC current according to a set condition to output the amplified current; A second sensing unit for sensing the amplification current output from the amplification circuit; A third sensing unit connected to the second sensing unit; And a determination module that acquires respective current values sensed by the first sensing unit, the second sensing unit, and the third sensing unit, and determines an operation abnormality of the plasma power supply configuration using any one or more of the obtained current values. It includes.

Description

METHOD AND APPARATUS FOR DETECTING A CIRCUIT ABNORMALITY USING CURRENT SENSING OF A PLASMA POWER SUPPLY}

It relates to a circuit abnormality detection method using the current detection of the plasma power supply, specifically, by determining the circuit abnormality and the detection unit abnormality using the current value measured by the plurality of detection units installed in the plasma power supply unit and the additional collected current value, It is about how to prevent unnecessary shutdown of the circuit.

Unless otherwise indicated herein, the content described in this section is not prior art to the claims of this application and is not admitted to be prior art by inclusion in this section.

Plasma (plasma) refers to a gas state separated by electrons with negative charges and positively charged ions at very high temperatures. At this time, although the charge separation degree is considerably high, the number of negative and positive charges is the same as the whole, so it becomes neutral. In general, the state of a substance is divided into three types: solid, liquid, and gas. Plasma is often called the 'fourth material state'. This is because when energy is applied to a solid, it becomes a liquid or gas, and when high energy is applied to this gas state again, the gas is separated into electrons and atomic nuclei at tens of thousands of degrees Celsius to become a plasma state.

Plasma can be seen in fluorescent lights or neon signs at home, and is used for etching and deposition, and surface treatment of metals and polymers. In addition, plasma is used to make chips for computers or microprocessors and is used to cover artificial joints, jet turbine blades, plastics, and metal membranes. In addition, plasma arcs are also used to weld skeletons of PDP TVs or steel structures. In addition, plasma power supplies have also been widely used in recent years.

In general, a conventional power supply and rectifier circuit is configured as shown in FIG. 1.

As shown in Figure 1, the circuit of the power supply and the rectifier is commercial power, DC rectifier diode, capacitor, filter, inverter (switching element), transformer (transformer), rectifier (converter), inductor (L, inductor), filter And CT2 (detection unit).

In the conventional circuit, there is a main controller for controlling the inverter, and the controller can control the inverter by processing the value collected through a sensor including a CT (Current Transformer) 2 to control the inverter, thereby adjusting the power output through the circuit.

In the conventional constant current type power supply circuit, the output current collected by CT2 is sent to the main controller to monitor and determine the current output. Therefore, the importance of CT2 is very high.

However, the part where CT2 is located is the final output part where a lot of electrical noise is generated, and CT2 is a sensor that reads DC current and has amplification circuits vulnerable to electrical noise inside it, which frequently causes malfunctions. Do. When a failure occurs in CT2, the feedback signal of the power supply unit is abnormal, so frequent failures of the CT2 cause malfunction of the power supply unit.

1. Korean Patent Registration No. 10-1104370 (Application No .: 10-2009-0069598) 2. Korean Patent Registration No. 10-0791952 (Application No .: 10-2006-0097416)

Provides a plurality of detection units (sensors) for sensing the current input or output through the circuit included in the plasma power supply, and compares the current values sensed by each of the plurality of sensors, according to the comparison result, the plasma power supply connected before and after the sensor It is determined whether the configuration circuit is abnormal.

In order to independently determine whether the second and third sensing units connected in series are abnormal, the additional collected current value is measured and compared with the current measured by the second sensing unit and the third sensing unit, and the abnormality sensing unit is determined accordingly. Then, the current measured by the normal sensing unit can be used as an effective current value.

The circuit abnormality detection device using the current detection of the plasma power supply according to the embodiment converts the input AC current into DC current, filters the DC current that satisfies the set condition from the converted DC current, and returns the filtered DC current again. A conversion circuit that outputs a conversion current converted to AC; A first sensing unit for sensing the conversion current output from the conversion circuit; When the conversion current is input, amplification circuit that amplifies the input conversion current, converts the amplified conversion current to DC current, and filters the DC current according to the set conditions to output the amplified current; the amplification current output from the amplification circuit A second sensing unit for sensing; A third sensing unit connected to the second sensing unit; And a determination module that acquires respective current values sensed by the first sensing unit, the second sensing unit, and the third sensing unit, and determines an operation abnormality of the plasma power supply configuration using any one or more of the obtained current values. It includes.

The circuit abnormality detection method using the current detection of the plasma power supply according to another embodiment (A) converts the AC current input from the conversion circuit to DC current, filters the DC current that satisfies the set condition from the converted DC current, , Outputting the converted current converted from the filtered DC current back to AC; (B) sensing the converted current output from the conversion circuit in the first sensing unit; (C) amplifying the inputted conversion current when the converted current is input from the amplifying circuit, converting the amplified converted current into DC current, and filtering the DC current according to a set condition to output the amplified current; (D) sensing the amplification current output from the amplifying circuit by the second sensing unit; And (E) obtaining the respective current values sensed by the first sensing unit, the second sensing unit, and the third sensing unit connected to the second sensing unit in the determination module, and using one or more of the obtained current values to supply the plasma power. Determining an operation abnormality of the device configuration; It includes.

By using the respective current values sensed by the plurality of current sensing units, when a malfunction occurs in the plasma power supply, it is possible to accurately identify a circuit that causes the malfunction, and to prevent a failure of the plasma power supply.

By measuring the additional collected current value, it is possible to identify each malfunction of the sensing unit and feed back the measured current value from the normally operating sensing unit, thereby increasing the circuit driving time, preventing unnecessary shutdown, and power and circuit booting. Try to save time.

It should be understood that the effects of the present invention are not limited to the above-described effects, and include all effects that can be deduced from the configuration of the invention described in the detailed description or claims of the present invention.

1 is a view showing a conventional power supply and rectifier circuit
2 is a block diagram showing a plasma power supply configuration according to an embodiment
3 is a view showing a specific circuit configuration of the conversion circuit and the amplification circuit of the plasma power supply according to the embodiment
FIG. 4 is a diagram showing a circuit configuration for determining whether each of the second sensing unit and the third sensing unit of the plasma power supply according to the embodiment is faulty.
5 is a view showing a data processing configuration of the determination module 300 according to the embodiment
6 is a data processing flow diagram of an embodiment of detecting an error of a plasma power supply and an error of a sensing unit using current values sensed by the first sensing unit and the second sensing unit.
7A is a data processing flow diagram of an embodiment of detecting an error of a plasma power supply unit and an error of a sensing unit by using current values sensed by the second sensing unit and the third sensing unit.
7B is a view showing a process of determining whether the second sensing unit and the third sensing unit are abnormal in the embodiment.
8 is a data processing flow diagram of an embodiment in which a plasma power supply error and a detection unit error are detected using current values sensed by the first detection unit, the second detection unit, and the third detection unit.
9 is a data processing flow chart for determining the presence or absence of each of the second detection unit and the third detection unit according to an embodiment

Advantages and features of the present invention, and methods for achieving them will be clarified with reference to embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but may be implemented in various different forms, and only the embodiments allow the disclosure of the present invention to be complete, and common knowledge in the technical field to which the present invention pertains. It is provided to fully inform the holder of the scope of the invention, and the invention is only defined by the scope of the claims. The same reference numerals refer to the same components throughout the specification.

In describing embodiments of the present invention, when it is determined that a detailed description of known functions or configurations may unnecessarily obscure the subject matter of the present invention, the detailed description will be omitted. In addition, terms to be described later are terms defined in consideration of functions in an embodiment of the present invention, which may vary according to a user's or operator's intention or practice. Therefore, the definition should be made based on the contents throughout this specification.

2 is a block diagram showing a plasma power supply configuration according to an embodiment.

2, the plasma power supply according to the embodiment of the conversion circuit 100, the first sensing unit 10, the amplifying circuit 200, the second sensing unit 20, the third sensing unit 30 and It may be configured to include a determination module 300. As used herein, the term 'module' should be interpreted to include software, hardware, or a combination thereof, depending on the context in which the term is used. For example, the software may be machine language, firmware, embedded code, and application software. As another example, the hardware can be a circuit, processor, computer, integrated circuit, integrated circuit core, sensor, micro-electro-mechanical system (MEMS), passive device, or combinations thereof.

The conversion circuit 100 converts the input AC current to DC current, filters the DC current that satisfies the set condition from the converted DC current, and outputs the converted DC current converted to AC again.

The first sensing unit 10 detects the conversion current output from the conversion circuit. In an embodiment, the first sensing unit 10 may detect a short circuit of the conversion circuit 100 or an overload of the amplification circuit 200 according to the current value.

The amplifying circuit 200 converts the output current of the converting circuit 100 into a DC current, and filters the DC current according to a set condition to output the amplified current.

The second sensing unit 20 detects the amplification current output from the amplification circuit 200.

The third sensing unit 30 is connected to the second sensing unit, and senses the current value output from the amplifying circuit 200.

The determination module 300 acquires respective current values sensed by the first sensing unit, the second sensing unit, and the third sensing unit, and determines an operation abnormality of the plasma power supply configuration using any one or more of the obtained current values. can do. For example, the determination module 300 detects a short circuit of the conversion circuit 100 or an overload of the amplification circuit 200 with the current value of the first detection unit 10 and sensed by the first detection unit and the second detection unit. The current value may be compared with a predetermined current value to determine whether the amplification circuit 200 is abnormal. That is, the determination module 300 according to the embodiment may determine whether the circuit included in the plasma power supply is abnormal according to the installation position of each sensing unit by collecting and comparing the current values sensed by the plurality of sensing units. have. For example, the preset current value in the embodiment means a current value output from a normally operating conversion circuit and an amplification circuit.

In this specification, in order to help understanding of the present invention, a method of sensing a current value from the first to third sensing units 10, 20, and 30 and determining a circuit abnormality based on the current value has been described. It is not intended to limit the installation location. That is, the number of sensing units used in the embodiment may be increased to n, and the determination module 300 may compare or analyze n current values sensed by each sensing unit with each other or with a preset value. Thereafter, the determination module may determine whether there is an abnormality of the circuit connected before and after the sensing unit that senses the abnormal current value according to the result of the comparative analysis of n current values.

3 is a view showing a specific circuit configuration of the conversion circuit and the amplification circuit of the plasma power supply according to the embodiment.

Referring to FIG. 3, the conversion circuit 100 according to the embodiment may include a converter 110, a filter 120, and an inverter 130, and the amplification circuit 200 includes a transformer 210 and a converter It may be configured to include 220 and the filter 230.

The converter 110 of the conversion circuit 100 converts the input AC current to DC current,

The filter 120 filters the current of a predetermined value or more among the converted DC current and inputs it to the inverter 130. The inverter 130 converts the input DC current back to AC and outputs it, and the first sensing unit 10 senses the output current.

The output current of the conversion circuit 100 becomes the input current of the amplification circuit 200, and is amplified by the transformer 210. The amplified current is converted into a direct current in the converter 220, and a current less than a certain value is filtered in the filter 230. Then, the current passing through the filter 230 is input to the second sensing unit 20 and the third sensing unit 30.

4 is a view showing a circuit configuration for determining the presence or absence of each of the second sensing unit and the third sensing unit of the plasma power supply according to the embodiment.

The determination module 300 collects the output current of the second sensing unit at the output terminal A at the second sensing unit and collects the output current of the third sensing unit at the output terminal B of the third sensing unit. In addition, by measuring the additional measured current value at the point C of the input terminal of the equipment, it is used to determine the abnormality of each of the second sensing unit 20 and the third sensing unit 30.

For example, the determination module 300 collects the additional current value input to the equipment connected to the plasma power supply. Specifically, the additional measurement current value is data that may be additional collection used when determining whether any one of the second sensing unit 20 or the third sensing unit 30 is defective. As illustrated in FIG. 4, when the second sensing unit and the third sensing unit are connected in series and there is no abnormality between the two sensing units, the current value measured in A, the current value measured in B, and the current value measured in C If the loss current of the silver circuit is not considered, it should be the same. If there is an abnormality in the second sensing unit, the current value measured in A by the loss current generated by the internal resistance of each sensing unit differs from the additional measured current data measured in C by a certain level or higher, and the third sensing unit When there is an abnormality in the negative, the current value measured in B differs from the current value measured in C by a certain level or higher. In an embodiment, a certain level means an error range of a difference in current value due to circuit loss current.

In the embodiment illustrated in FIG. 4, the current values sensed by the second sensing unit 20 and the third sensing unit 30 are not compared to determine whether a failure is present, but the data output from the second sensing unit and the third The data output from the sensing unit and the additional measured current value are compared to determine whether the second sensing unit 20 and the third sensing unit 30 are abnormal. In the embodiment, the current value output from the second sensing unit is measured at point A, and the current value output from the third sensing unit is measured at point B. In addition, at point C, additional measurement current values necessary for determining whether the second or third sensing unit is abnormal are collected.

For example, the determination module 300 detects a short circuit of the amplification circuit with the current value of the second sensing unit 20, and the second sensing unit 20 and the third sensing unit 30 are connected in series, and the second If the current values obtained by the sensing unit 20 and the third sensing unit 30 are compared, and the current values measured by the second sensing unit 20 and the third sensing unit 30 are different by a predetermined level or more, the power is By collecting additional measurement current at the input terminal of the equipment connected to the device, it is determined whether the second sensing unit and the third sensing unit are abnormal. When at least one of the second sensing unit or the third sensing unit is determined to be normal, the current value measured by the normally determined sensing unit is set as an effective current and circuit operation is maintained. If the second sensing unit and the third sensing unit are both judged to have failed by the additional measurement current, the circuit is shut down.

To this end, the determination module 300 calculates the failure detection data of the second sensing unit comparing the current output from the second sensing unit with the additional measured current data, and calculates the current output from the third sensing unit and the additional collected current data. Calculate the fault detection data of the compared third detection unit. The determination module 300 may determine the presence or absence of a failure of the second detection unit 20 or the third detection unit 30 based on the calculated failure determination data. For example, the determination module 300 is the same as the current output from the second sensing unit 20 and the current output from the third sensing unit 30 and additional collected current data, or within a certain error range corresponding to the circuit loss current. In the case of an existing value, the second sensing unit and the third sensing unit may be determined as normal.

In addition, the determination module 300 calculates the failure detection data of the second detection unit based on the difference and ratio values between the current output from the second detection unit 20 and the additional measurement current, and the calculated second detection unit 20 failure When the determination data is less than the set value, it may be determined that the second sensing unit 20 is normal. However, if the failure detection data of the second detection unit exceeds a certain level exceeding the difference due to noise, it is determined that there is a possibility of failure in the second detection unit.

In addition, in the embodiment, the determination module 300 is the second output when the current output from the second sensing unit, the current output from the third sensing unit, and the additional collected current data all coincide or exist within a certain error range. The current output from the sensing unit or the third sensing unit may be selected to output a current closer to the additional collection current, the current output from the selected sensing unit may be set as an effective current, and circuit operation may be maintained.

Similarly, the determination module 300 calculates the failure detection data of the third detection unit based on the difference and ratio values of the current output from the third detection unit 30 and the additional measurement current, and the failure detection data of the third detection unit is less than a set value. In this case, it can be determined that the second sensing unit is normal. The determination module 300 determines that the second sensing unit 30 is in a fault state when the second sensing unit failure determination data exceeds a certain level that exceeds the difference due to circuit noise.

In addition, in the embodiment, the output current of the second sensing unit collected by the first collection module, the output current of the third sensing unit, and additional measured current data are displayed, so that the user of the plasma power supply unit directly detects the second sensing unit 20. Alternatively, it is possible to determine whether or not the third detection unit 30 has failed.

5 is a diagram showing a data processing configuration of the determination module 300 according to the embodiment.

Referring to FIG. 5, the determination module 300 may include a collection unit 310 and a determination unit 330.

The collection unit 310 collects current values sensed by a plurality of detection units included in the plasma power supply.

The determination unit 330 determines a circuit that operates abnormally among the circuits constituting the plasma power supply unit using the current values sensed by the plurality of sensing units. For example, the determination unit 330 detects a short circuit of the amplification circuit with the current value of the second sensing unit 20, and when the second sensing unit 20 and the third sensing unit 30 are connected in series, If the current values obtained from the second sensing unit 20 and the third sensing unit 30 are compared, and the current values measured by the second sensing unit 20 and the third sensing unit 30 differ by a predetermined level or more, , The circuit abnormality may be determined using only the current value measured by either the second sensing unit 20 or the third sensing unit 30.

In addition, the determination unit 330 may determine a configuration circuit abnormality according to the position of each of the sensing units using the current values sensed by the first sensing unit, the second sensing unit, and the third sensing unit.

For example, the determination unit 330 may differ from the current value sensed by the first detection unit 10 and the set current value detected by the second detection unit 20 by a predetermined level or higher than the set value, or the second detection unit 20 ), When the current value sensed by the third detection unit 30 differs by a predetermined level or more, the operation of the plasma power device may be stopped or a warning notification may be output. That is, the determination unit 330 collects all current values sensed by the first to third detection units, and compares each current value with a preset value or detects an abnormal value based on a result of comparing each other. It is possible to determine whether an abnormal operation of a circuit connected to the negative.

Hereinafter, an error detection method of the plasma power supply will be sequentially described. The operation (function) of the error detection method is essentially the same as the function on the plasma power supply, so a description overlapping with FIGS. 1 to 5 will be omitted.

6 is a data processing flow of an embodiment of detecting an error of the plasma power supply and an abnormality of the sensing unit by using current values sensed by the first sensing unit and the second sensing unit.

In step S510, AC power is input to the plasma power supply. In step S520, the input AC power is converted to DC, and in step S530, the converted current value is detected.

In step S540, a circuit abnormality such as a short circuit of a circuit outputting a current input to the first sensing unit or an overload of a circuit receiving a current output from the first sensing unit, based on the current value detected by the first sensing unit. Judging and determining whether the first detection unit is abnormal.

In step S550, the current is amplified, and in step S560, it is converted to direct current by an inverter. In step S570, the current value amplified by the second sensing unit is detected, and in step S580, a circuit anomaly and a sensing unit abnormality are determined based on the current value detected by the second sensing unit. In an embodiment, in step S580, a circuit abnormality may be determined using the current value of the first sensing unit and the second current value, as well as the current value of the second sensing unit. For example, when the difference between the first current value and the second current value is greater than or equal to a predetermined level, it may be determined that the current input to the second sensing unit is greater than the circuit (eg, amplification circuit) output. In addition, it is possible to grasp the presence or absence of an abnormality in the second sensing unit with the current value additionally measured at the input node C to the equipment.

7A is a data processing flow of an embodiment of detecting an error of a plasma power supply unit and an error of a sensing unit by using current values sensed by the second sensing unit and the third sensing unit.

In step S581, the abnormality of the amplification circuit is detected by the current value of the second sensing unit.

In step S583, the current values collected by the second sensing unit and the third sensing unit are compared. In step S585, it is determined whether the current value of the second sensing unit is different from the current value of the third sensing unit using the comparison result.

When the two current values differ by a predetermined level or more, in step S587, the current value measured by either the second sensing unit or the third sensing unit is selected.

In step S589, a circuit abnormality is determined based on the selected current value.

7B is a view showing a process of determining whether the second and third sensing units are abnormal in the embodiment.

In step S51, the determination module detects the inverter output control current as the current value of the second sensing unit, and in step S52, the current value of the second sensing unit is compared with the current value of the third sensing unit. In step S53, the determination module determines whether the current value of the second sensing unit differs from the current value of the third sensing unit by a predetermined level or more. If it is different than a certain level, the determination module determines in step S54 that the circuit is abnormal, and enters step S55 to determine whether the detection unit is abnormal. In step S55, the collected current value is compared with the current value measured at the output terminals of the second sensing unit and the third sensing unit. For example, the additional collected current value is compared with the current value measured at the output terminal of the second sensing unit, and the additional collected current value is compared with the current value measured at the output terminal of the third sensing unit.

In step S56, the determination module selects an abnormality detection unit according to the comparison result. For example, when the current value measured at the output of the second sensing unit differs from the additional collected current value by a certain level or more, it is determined that there is an abnormality in the second sensing unit and the current value measured at the third sensing unit is used as an effective current. Feedback within the circuit. If the current value measured at the output terminal of the third detector differs from the additional collected current value by a certain level, it is determined that there is an error in the third detector, and the current value measured at the second detector is fed back to the effective current. can do. If it is determined that both the second sensing unit and the third sensing unit are operating abnormally according to the additional collection current and the comparison result, the circuit is shut down.

In step S57, the current measured by the normally operating sensing unit is extracted and fed back to the effective current in the circuit, so that the circuit operation can be maintained.

8 is a data processing flow of an embodiment in which a plasma power supply error and a detection unit error are detected using current values sensed by the first detection unit, the second detection unit, and the third detection unit.

In step S582, current values sensed by the first sensing unit, the second sensing unit, and the third sensing unit are collected.

In step S584, it is determined whether the difference between the current value of the first sensing unit and the current value of the second sensing unit differs from a predetermined value by a predetermined level or more.

In step S586, a circuit abnormality of the plasma power supply is determined based on the comparison result. For example, when the difference between the first current value and the second current value is higher than a predetermined value and a predetermined level, it is connected to each of the sensing units based on the current value obtained from the first sensing unit and the current value obtained from the second sensing unit. It is possible to detect abnormality of the conversion circuit or the amplification circuit.

In step S588, it is determined whether the current value of the second sensing unit is different from the current value of the third sensing unit.

If the current value of the second sensing unit and the current value of the third sensing unit are different by a predetermined level or more, in step S589, a circuit fault may be determined by comparing one current value of the two current values with a preset value and selecting the current value. In addition, when the current value sensed by the second sensing unit and the current value sensed by the third sensing unit differ by a predetermined level or more, the operation of the plasma power device may be stopped or a circuit abnormality warning notification may be output.

That is, in step S589, each of the current values sensed by the first sensing unit, the second sensing unit, and the third sensing unit is compared with each other, and the difference between the current values sensed by the respective sensing units and the preset value is compared, thereby forming a plasma. The abnormal circuit of the power supply can be more accurately determined.

After determining the circuit abnormality in step S590, the additional collected current and the current values measured at the outputs of the second and third sensing units are compared to determine whether the second sensing unit and the third sensing unit are abnormal, and in step S591, the determination module Based on the comparison result, it is determined whether the second sensing unit and the third sensing unit are abnormal. For example, when the current value measured at the output of the second sensing unit differs from the additional collected current value by a certain level or more, it is determined that there is an abnormality in the second sensing unit and the current value measured at the third sensing unit determined to be normal. Feedback in the circuit with active current. If the current value measured at the output terminal of the third detector differs from the additional collected current value by a certain level, it is determined that there is an error in the third detector, and the current value measured at the second detector determined as normal is determined. Feedback can be made with an active current.

In step S592, the current measured by the sensing unit operating normally in the determination module is extracted and fed back to the effective current in the circuit to maintain circuit operation.

In addition, in the embodiment, when the current output from the second sensing unit and the current output from the third sensing unit and the additional collected current data are all the same or exist within a certain error range, the second sensing unit or the third sensing unit Among the currents output from, a sensing unit that outputs a current closer to the additional collecting current may be selected, the current output from the selected sensing unit may be set as an effective current, and circuit operation may be maintained.

9 is a data processing flow chart for determining the presence or absence of each of the second sensing unit and the third sensing unit according to an embodiment.

In step S910, the current output from the second sensing unit and the third sensing unit and the additional collecting current are measured. In an embodiment, the current may be measured at the output terminal of the second sensing unit and the output terminal of the third sensing unit, and additional collected current may be measured at the input terminal of the equipment connected to the plasma power supply.

In step S920, it is checked whether the difference between the current output from the second sensing unit and the additional collected current is greater than a certain level. If the difference between the current output from the second sensing unit and the additional collection current is higher than a certain level, in step S960, the determination module determines the abnormality of the second sensing unit. In an embodiment, the current value of a certain level for determining whether or not the sensing unit is abnormal is a value corresponding to a loss current due to wiring and components of a circuit. In the embodiment, when the current output from each sensing unit is less than the value considering the predicted loss current, it is determined that the loss current is additionally generated due to an internal circuit failure of the sensing unit.

In step S970, it is determined whether the difference between the current output from the third sensing unit and the additional collection current is greater than a certain level. If it is above a certain level, it is determined in step S975 that both the second sensing unit and the third sensing unit are abnormal, and if it is below a certain level, the second sensing unit is abnormal in step S980, but the third sensing unit is determined to be normal.

If it is determined that both the second sensing unit and the third sensing unit are abnormal, the process proceeds to step S976 to shut down the circuit. If there is an abnormality in the second sensing unit and it is determined that the third sensing unit is normal, the process proceeds to step S952 to select the normal sensing unit and continuously operates the circuit using the current value measured by the sensing unit operating normally. Thereafter, in step S954, the determination module feedbacks the current value measured by the normal detection unit to the effective current value to maintain circuit driving.

If the difference between the current output from the second sensing unit and the additional collection current is less than a certain level in step S920, the process proceeds to step S930 to determine whether the difference between the current output from the third sensing unit and the additional collection current is greater than a certain level. If the difference between the current output from the third sensing unit and the additional collection current is less than a certain level, in step S950, the determination module determines that both the second sensing unit and the third sensing unit are normal. When the difference between the current output from the third sensing unit and the additional collection current exceeds a certain level, in step S940, the determination module determines that the third sensing unit is in an abnormal state and determines that the second sensing unit is in a normal state. That is, in the embodiment, the output currents and the additional collection currents output from the second sensing unit and the third sensing unit may be compared to determine whether the second sensing unit and the third sensing unit are abnormal. In the exemplary embodiment, when it is determined that the third sensing unit is abnormal and the second sensing unit is normal, the process proceeds to step S952 and selects the abnormality sensing unit to filter the current value measured by the abnormality sensing unit. Thereafter, in step S954, the determination module feedbacks the current value measured by the normal detection unit to the effective current value to maintain circuit driving.

If it is determined in step S950 that both the second detection unit and the third detection unit are normal, the program directly enters to step S954 without selecting an abnormality detection unit to maintain circuit operation.

In the present specification, the embodiment has been described through three sensing units to help understanding of the invention, but the sensing unit may be increased to n depending on the configuration circuit, and the current value compared with the circuit configuration and input / output current may be changed once again. Emphasis.

As described above, the plasma power supply device and the error detection method of the plasma power supply device provide other sensors (detectors) that can complement the current detection sensor with a high frequency of failure, and a plurality of current values and sensors sensed by other sensors. By using the position of the circuit for determining the abnormality of the circuit constituting the plasma power supply, it is possible to more accurately determine the circuit that performs the abnormal operation among the circuits constituting the power supply. In addition, when an abnormality occurs in the current value output from the circuit included in the plasma power supply device, it is prevented from being input to another circuit to prevent a power supply device failure. In addition, by measuring the additional collected current value, it is possible to identify the malfunction of each of the sensing units so that the current value measured by the sensing unit operating normally can be fed back. Through this, it is possible to increase circuit driving time and prevent unnecessary shutdown, thereby saving power and time required for booting the circuit.

The disclosed content is only an example, and can be variously modified by a person having ordinary skill in the art without departing from the gist of the claims claimed in the claims. It is not limited to the examples.

100: conversion circuit
200: amplification circuit
300: judgment module
10: first detection unit
20: second detection unit
30: third detection unit

Claims (10)

In the plasma power supply,
A conversion circuit that converts the input AC current into a DC current, filters the DC current that satisfies the set condition from the converted DC current, and outputs the converted DC current converted back to AC;
A first sensing unit that detects the conversion current output from the conversion circuit;
An amplifying circuit that amplifies the inputted conversion current when the converted current is input, converts the amplified converted current into a DC current, and filters the filtered current according to a set condition to output the amplified current;
A second sensing unit for sensing the amplification current output from the amplification circuit;
A third sensing unit connected to the second sensing unit and sensing an amplified current transmitted through the second sensing unit; And
A determination module for acquiring respective current values sensed by the first sensing unit, the second sensing unit, and the third sensing unit and determining an operation abnormality of a plasma power supply configuration using any one or more of the obtained current values; It includes,

The determination module
A short circuit of the amplification circuit is detected by the current value of the second sensing unit,
The second sensing unit and the third sensing unit are connected in series, and comparing the current values obtained from the second sensing unit and the third sensing unit, and comparing the current values measured by the second sensing unit and the third sensing unit If it is different than a certain level,
The additional measurement current is collected at the input terminal of the equipment connected to the power supply, and the additional measurement current is compared with the current value output from the sensing unit to determine whether the second sensing unit or the third sensing unit is abnormal, and the second If at least one of the sensing unit or the third sensing unit is determined to be normal, the current value measured by the normally determined sensing unit is set as an effective current, and circuit operation is maintained,

The determination module
If the current output from the second sensing unit, the current output from the third sensing unit, and the additional collected current data are all the same or exist within a certain error range, the current output from the second sensing unit or the third sensing unit Among the circuit abnormalities using the current detection of the plasma power supply device, a sensing unit that outputs a current closer to the additional collecting current is selected, the current output from the selected sensing unit is set as an effective current, and circuit operation is maintained. Detection device.
The method of claim 1, wherein the determination module
The short circuit of the conversion circuit and the overload of the amplification circuit are sensed by the current value of the first sensing unit, and the current value sensed by the first sensing unit and the second sensing unit is set to a preset current value that is a current value output from the normal circuit. Circuit abnormality detection device using the current detection of the plasma power supply, characterized in that to determine whether or not the conversion circuit or the amplification circuit according to the comparison result.
delete The method of claim 1, wherein the determination module
A circuit abnormality detection device using current sensing of the plasma power supply, characterized in that the circuit is shut down when both the second sensing unit and the third sensing unit are determined to be abnormal by the additional measurement current.
delete In the current detection error detection method of the plasma power supply,
(A) converting the AC current input from the conversion circuit to DC current, filtering the DC current that satisfies the set condition from the converted DC current, and outputting the converted DC current converted to AC again;
(B) detecting a conversion current output from the conversion circuit by the first detection unit;
(C) amplifying the inputted conversion current when the converted current is input from an amplifying circuit, converting the amplified converted current into a DC current, and filtering the filtered current according to a set condition to output the amplified current;
(D) sensing the amplification current output from the amplifying circuit by the second sensing unit;
(E) Each of the current values sensed by the third sensing unit detecting the amplified current transmitted through the second sensing unit and connected to the first sensing unit, the second sensing unit, and the second sensing unit in the determination module Determining an operation abnormality of the plasma power supply configuration using any one or more of the acquired and obtained current values; It includes,

Determining an operation abnormality of the (E) plasma power supply configuration; The
Detecting a short circuit of the amplifying circuit by the current value of the second sensing unit in the determination module;
When the second sensing unit and the third sensing unit are connected in series in the determination module, the current values obtained from the second sensing unit and the third sensing unit are compared, and the second sensing unit and the third sensing unit are compared. If the measured current value is different than a certain level, collecting additional measurement current at an input terminal of the equipment connected to the power supply;
Comparing the additional measurement current with the current output from the second sensing unit and the third sensing unit, and determining whether the second sensing unit and the third sensing unit are abnormal according to the comparison result; And
If at least one of the second sensing unit or the third sensing unit is determined to be normal, setting a current value measured by the normally determined sensing unit as an effective current and maintaining circuit operation; It includes,

Determining whether the second sensing unit and the third sensing unit are abnormal according to the comparison result; The
If the current output from the second sensing unit, the current output from the third sensing unit, and the additional collected current data are all the same or exist within a certain error range, the current output from the second sensing unit or the third sensing unit Selecting a sensing unit for outputting a current closer to the additional collecting current; And
Setting the current output from the selected sensing unit to an effective current, and maintaining circuit operation; Characterized in that it comprises,
A circuit fault detection method using current detection of a plasma power supply.
The method of claim 6, further comprising: (E) determining an abnormal operation of the plasma power supply configuration; The
Detecting a short circuit of the conversion circuit and an overload of the amplification circuit with the current value of the first sensing unit; And
Comparing the current values sensed by the first sensing unit and the second sensing unit with a preset current value, which is a current value output from a normal circuit, and determining whether the conversion circuit or the amplification circuit is abnormal according to a comparison result; Circuit detection method using the current detection of the plasma power supply further comprising a.
delete The method of claim 6, further comprising: determining whether the second sensing unit and the third sensing unit are abnormal according to the comparison result; The
If it is determined that both the second sensing unit and the third sensing unit are abnormal due to the additional measurement current, shutting down the circuit; Circuit detection method using the current detection of the plasma power supply further comprising a.
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