KR102088257B1 - Apparatus for measuring flow rate - Google Patents

Abstract

An object of the present invention is to provide a flow rate measurement apparatus capable of more accurately measuring a flow rate even in a low flow rate zone. The present invention is to provide a flow rate measurement apparatus including: a body having an inlet port, an outlet port on the opposite side of the inlet port, a flow channel connecting the inlet port and the outlet port, and a first space unit provided at the outside of the flow channel and fluidly connected to each of the inlet port and the outlet port; a flow rate measurement sensor disposed in the first space unit and provided to measure a flow rate of a fluid branched from the flow channel; a laminar flow element disposed in the flow channel; and a control board electrically connected to the flow measurement sensor and disposed in the body.

Description

Flow measuring device {APPARATUS FOR MEASURING FLOW RATE}

The present invention relates to a flow rate measuring device, and more particularly, to a mass flow meter using a MEMS sensor.

As a device for measuring the flow rate of fuel or gas, the mass flow meter (MFM) has a main flow channel through which fuel or gas is supplied, and a bypass channel branched from the main flow channel, and inside the bypass channel A sensor for measuring the flow rate is arranged, and the inlet end and the outlet end of the bypass channel are connected to the main flow channel.

This is to measure the flow rate that the sensor cannot measure because the mass flow rate that the sensor can measure is physically fixed.

1 is a view showing a conventional flow measurement device, the flow measurement device is a body (1) and a bypass channel (2) comprising a bypass channel (2) branching from the main flow channel is fixed to the bypass channel It includes a flow measurement sensor 3 and a sensor cover 11 covering the same.

Particularly, the bypass channel 2 is formed through machining when the body 1 is manufactured together with the groove 4 provided so that the flow measurement sensor 3 is seated and fixed.

That is, the conventional measurement sensor flow path, that is, the bypass channel 2 is formed by machining, whereby a gap or gap is generated in addition to the bypass channel 2 when a space or a gap occurs due to a difference in machining dimensions between the body and the sensor cover. There is a problem in that the flow path through which the fluid flows is generated, and thus the accuracy is lowered when measuring the flow rate.

In addition, although not shown in the drawings, even in the case of separately machining the fluid flow path of the flow measurement sensor on the sensor cover, when a space or a gap occurs due to a difference in the machining dimensions of the body and the sensor cover, the gap may be caused by a gap other than the bypass channel. There is a problem in that the flow path through which the fluid flows is generated, and thus the accuracy is lowered when measuring the flow rate.

In particular, when measuring the flow rate of a fluid in a region with a low flow rate zone, a flow rate flows out of the sensor flow path, which may cause a problem that measurement is impossible.

On the other hand, the flow rate of the fluid measured as described above is controlled by a controller disposed outside such as a cover surrounding the body 1, the arrangement of such a controller has a problem that it is difficult to miniaturize the flow measurement device.

Therefore, there is a need for a flow measurement device capable of overcoming the above problems.

KR 10-119458 (2012.10.18)

An object of the present invention is to provide a flow rate measuring device capable of more accurately measuring the flow rate even in a low flow rate zone.

In addition, an object of the present invention is to provide a flow measurement device capable of adjusting a flow range to be measured of a fluid flowing into a sensor flow path.

In addition, it is an object to provide a miniaturized flow measurement device.

In order to achieve the above object, the inflow port, the outflow port in the opposite direction of the inflow port, is provided on the outside of the flow channel and the flow channel connecting between the inflow port and the outflow port, the inflow port side and the outflow port side and the fluid movement A body having a first space portion connected as possible; A flow measurement sensor disposed in the first space portion and provided to measure a flow rate of the fluid branched from the flow channel; A laminar flow element disposed in the flow channel; And a control board electrically connected to the flow measurement sensor and disposed in the body. It provides a flow measuring device comprising a.

In addition, the body includes a second space provided in the opposite direction of the first space with the flow channel interposed therebetween, and the control board includes being disposed in the second space.

In addition, the first space portion includes a first through-hole through which fluid flows from the flow channel and a second through-hole through which fluid flows into the flow channel, and fluidly connects the first through-hole to the flow channel. And a second channel for fluidly connecting the first channel and the second through hole and the flow channel.

Further, the laminar flow element includes a plurality of microtubes, and the plurality of microtubes includes those arranged in an area between the first channel and the second channel.

In addition, the body includes a third through hole provided to connect the first space portion to the outside and a fourth through hole provided to connect the second space portion to the outside, and the flow rate measurement sensor transmits the measured signal to the control board. The pin portion is provided to be transmitted, and the third through hole and the fourth through hole are provided to communicate with each other, and the pin portion and the control board include electrically connected through the third through hole and the fourth through hole.

In addition, the first support member is disposed in the first space portion, the first through-hole having an inflow through hole fluidly connected to the first through hole and an outflow through hole fluidly connected to the second through hole; A sensor flow path plate having a sensor flow path in contact with the first support member, fluidly connected to the inflow and outflow through-holes, and having a flow path through which the fluid passing through the inflow through-hole flows into the outflow through-hole; And a second support member provided to fix and support the flow measurement sensor. Including, and the flow rate measurement sensor, is located in at least a portion of the sensor flow path includes that arranged to measure the flow rate of the fluid flowing through the sensor flow path.

In addition, the body, a first cover surrounding the second support member, provided to seal the first space portion; A second cover surrounding the control board and provided to seal the second space portion; And a third cover provided to close the third and fourth through holes.

According to the present invention, by forming the sensor flow path by using a separate sensor flow path plate, the sensor flow path is formed only in the measurement portion of the sensor, so that it is possible to more accurately measure the flow rate even in a region where the flow rate is low.

In addition, by changing the volume of the sensor flow path by adjusting the thickness of the sensor flow path plate, it is possible to effectively control the flow range to be measured of the fluid flowing into the sensor flow path.

That is, it is possible to control the flow rate flowing into the sensor flow path.

In addition, according to the present invention, by manufacturing and using a separate sensor flow path plate, there is an effect of minimizing the change in the cross-sectional area of the flow path caused by the machining deviation.

Further, according to the present invention, by the laminar flow element disposed in the flow channel, there is an effect that can more stably flow the fluid into the first space.

In addition, according to the present invention, by placing the control board inside the body, there is an advantage that the flow measurement device can be miniaturized.

1 is a view showing for explaining a conventional flow measurement device.
2 and 3 is an exploded perspective view showing a flow measurement device according to an embodiment of the present invention.
4 is a view showing a body of a flow measurement device according to an embodiment of the present invention.
5 is a view showing a cross section of A-A 'in FIG.
6 and 7 are views showing a laminar flow device according to an embodiment of the present invention.
8 is a front view of a first support member according to an embodiment of the present invention.
9 is a view showing a sensor flow path plate according to an embodiment of the present invention.
10 is a combination view of the first support member and the sensor flow path plate according to an embodiment of the present invention.
11 is a view showing a flow measurement sensor according to an embodiment of the present invention.
12 is a view showing a second support member according to an embodiment of the present invention.
13 to 15 are combination views of a first support member, a sensor flow path plate, a flow rate measurement sensor, and a second support member according to an embodiment of the present invention.
16 is a perspective view showing a first cover according to an embodiment of the present invention.
17 is a view illustrating the first to third covers according to an embodiment of the present invention.
18 and 20 are views illustrating an order in which components are disposed in a first space unit according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings. Prior to this, the terms or words used in the present specification and claims should not be construed as being limited to ordinary or lexical meanings, and the inventor appropriately explains the concept of terms to explain his or her invention in the best way. Based on the principle that it can be defined, it should be interpreted as meanings and concepts consistent with the technical spirit of the present invention.

In addition, irrespective of the reference numerals, the same or corresponding components will be given the same or similar reference numerals, and redundant description thereof will be omitted. For convenience of description, the size and shape of each component member may be exaggerated or reduced. Can be.

Therefore, the embodiments shown in the embodiments and the drawings described in this specification are only the most preferred embodiments of the present invention and do not represent all of the technical spirit of the present invention, and at the time of this application, various alternatives are possible. It should be understood that there may be equivalents and variations.

Hereinafter, a flow measurement apparatus 10 according to an embodiment of the present invention will be described in detail with reference to FIGS. 2 to 20.

The present invention relates to a flow measurement device (10), and more particularly to a mass flow meter (MEMS) using a MEMS sensor.

According to the present invention, by forming the sensor flow path using a separate sensor flow path plate, the sensor flow path is formed only in the measurement portion of the sensor, so that the flow rate can be more accurately measured even in a region where the flow rate is low, and the thickness of the sensor flow path plate is reduced. By adjusting and changing the area of the sensor flow path, it is possible to effectively adjust the flow range to be measured of the fluid flowing into the sensor flow path.

2 and 3 is an exploded perspective view showing a flow rate measuring device according to an embodiment of the present invention.

2 and 3, the flow measurement device 10 of the present invention includes a body 100, a first support member 200, a sensor flow path plate 300, a flow measurement sensor 400, and a second support member 500, a first cover 600, a sealing member 700, a laminar flow element 800 and a control board 900.

More specifically, the body 100 has an inflow port 101, an outflow port 102 opposite to the inflow port, a flow channel 103 connecting the inflow port and the outflow port, and the outside of the flow channel 103 It is provided on, and has a first space portion 110 connected to the inlet port side and the outlet port side to be fluidly movable, respectively.

Here, the first space portion 110 includes a first through hole 112 through which fluid flows from the flow channel 103 and a second through hole 113 through which the introduced fluid is discharged into the flow channel 103. .

In addition, the flow channel 103 includes a first channel 120 and a second through hole 113 and a flow channel 103 for fluidly connecting the first through hole 112 and the flow channel 103. ) Includes a second channel 121 for fluidly connecting the fluid.

In addition, the flow measurement sensor 400 is disposed in the first space portion 110 and may be provided to measure the flow rate of the fluid branched from the flow channel 103.

Also, the laminar flow element 800 may be disposed in the flow channel 103.

In addition, the control board 900 is electrically connected to the flow measurement sensor 400 and may be disposed in the body 100.

Meanwhile, the body 100 has a second space portion 130 provided in the opposite direction of the first space portion 110 with the flow channel 103 therebetween.

At this time, the control board 900 may be disposed in the second space 130.

In addition to this, the first support member 200 is disposed in the first space portion 110, the inflow through hole 210 and the outflow connected to the inlet port 101 side via the first space portion 110 It has an outlet through-hole 220 connected to the port 102 side.

Specifically, the first support member is disposed in the first space portion 110, the inflow through hole 210 is fluidly connected to the first through hole 112 via the first space portion 110 And an outlet through hole 220 fluidly connected to the second through hole 113.

That is, the inlet through hole 210 may be connected to the inlet port 101 side through the first through hole 112 and the first channel 120, and the outlet through hole 220 is the second through hole 113 ) And the second channel 121 can be connected to the outlet port 102 side. In addition, the sensor flow path plate 300 contacts the first support member 200, and the inlet and outlet through holes 210 and 220 ) And are respectively movably connected to the fluid, and have a sensor flow path 310 provided so that the fluid passing through the inflow through-hole 210 flows through the outflow through-hole 220.

In addition, the flow measurement sensor 400 is disposed to be located in at least a portion of the sensor flow path 310 to measure the flow rate of the fluid flowing through the sensor flow path 310.

In addition, the second support member 500 may be provided to fixedly support the flow measurement sensor.

Here, the second support member 500 has an insertion groove 510 on which the flow measurement sensor 400 is seated.

In addition, the first cover 600 surrounds the second support member 500 and is provided to seal the first space portion 110.

4 is a view showing a body of a flow measurement apparatus according to an embodiment of the present invention, FIG. 5 is a view showing a cross section of A-A 'in FIG. 4, FIGS. 6 and 7 are according to an embodiment of the present invention It is a diagram showing a laminar flow element.

Referring to FIG. 4, the body 100 has an inflow port 101 and an outflow port 102 in opposite directions of the inflow port 101, and a flow channel provided for fluid to flow between the inflow port and the outflow port ( 103).

In addition, the first space portion 110 in the process of the fluid flowing into the inlet port 101 flows through the flow channel 103 and is discharged to the outlet port 102, a part of the fluid flowing through the flow channel 103 ) May be provided to measure the flow rate of the fluid by branching to the outside.

Here, the flow channel 103 is formed inside the body 100, the first space portion 110 is formed outside the body, a portion of the first space portion 110 having a predetermined space is a flow channel ( 103) may form a part of the outer circumferential surface.

In particular, the first space portion 110 may be formed to have a predetermined depth h1 in an inner direction in which a flow channel is formed on the outer surface 104 on one side of the body.

For example, the first space portion 110 may have a predetermined height h1 and may be formed in a rectangular parallelepiped shape with one surface open to the outside, but is not limited thereto.

In addition, the first space portion 110 includes a first bottom surface 111 forming at least a portion of the flow channel.

In addition, the first bottom surface 111 includes a first through hole 112 and an outlet through hole 220 and a flow channel 103 for connecting the flow channel 103 and the inflow through hole 210. It includes a second through-hole 113 for connection.

More specifically, referring to FIGS. 5 to 7, in the flow channel 103, fluid flowing through the flow channel 103 passes through the first through hole 112 and flows into the first space 110. It includes a first channel 120 provided to be. The first channel 120 may fluidly connect at least a portion of the flow channel 103 and the first through hole 112.

The first channel 120 and the first through hole 112, the fluid flowing into the inlet port 101 flows through the flow channel 103 and is discharged to the outlet port 102, the flow channel 103 ) May be provided to supply a portion of the fluid flowing through the inlet through-hole 210 to the sensor flow path 310.

In addition, the second through hole 113 may be provided such that the fluid flowing into the sensor flow path 310 flows through the sensor flow path 310 and passes through the outflow through hole 220 and is discharged to the flow channel 103. have.

In particular, the flow channel 103 includes a second channel 121 provided to discharge the fluid flowing into the first space 110, that is, the fluid flowing into the sensor flow path 310 to the flow channel 103. .

The second channel 121 may fluidly connect at least a portion of the flow channel 103 and the second through hole 113.

Also, the first channel 120 and the second channel 121 may be arranged at predetermined intervals.

Meanwhile, the laminar flow element 800 includes a plurality of microtubes 810.

The plurality of micro-tubes 810 may be formed of bundles of micro-tubes extending along the axial direction of the flow channel 103, and may be disposed in the flow channel 103.

In particular, the plurality of microtubes 810 may be disposed in an area between the first channel 120 and the second channel 121.

Thus, the laminar flow element 800 disposed as described above, that is, the flow of the fluid branched to the first space portion 110 by the plurality of micro-tubes 810, more specifically, to the flow rate measurement flow path 313 to be described later There is an effect that can stabilize the flow of the incoming fluid.

On the other hand, the first bottom surface 111 is formed by forming a partial region of the flow channel 103, so as to be fluidly connected to the inlet port side and the outlet port side, respectively.

Here, the first through hole 112, the first bottom surface adjacent to the inlet port 101 side so that the fluid flowing into the inlet port flows through the flow channel on the inlet port and branches to the first space part 110 It may be provided on the first end (111a) side of 111).

That is, one end 120a of the first channel 120 may also be provided in a predetermined region of the flow channel adjacent to the inflow port 101 side, and the other end 120b of the first channel 120 may include a first through hole. It may be provided with a connection to 112.

On the contrary, the second through hole 113 flows through the flow channel in the first space 110 after the flow rate of the fluid is measured by the fluid flowing into the first space 110 flowing through the sensor flow path 310. It may be provided on the second end 111b side of the first bottom surface 111 adjacent to the outlet port 102 side to be discharged to 103).

That is, one end 121a of the second channel 121 may also be provided in a predetermined region of the flow channel adjacent to the outlet port 102 side, and the other end 121b of the second channel 121 may have a second through hole. It may be provided with a connection with 113.

In addition, the first bottom surface 111 may be provided with a plurality of first seating grooves 114 provided at positions corresponding to a plurality of fastening holes on which a plurality of fastening means to be described later are seated.

In addition, a sealing member groove 115 into which the sealing member 700 is inserted may be provided on the outer surface 104 side of the body 100 to seal the first space part 110.

Here, the sealing member 700 may be inserted into the sealing member groove 115 to seal the first space portion 110. For example, the sealing member 700 may include a rubber packing made of a rubber material or the like suitable for conventional packing, but is not limited thereto.

In addition, referring to FIG. 8, the body 100 may have a second space portion 130 provided in the opposite direction of the first space portion 100 with the flow channel 103 therebetween.

Accordingly, the flow channel 103 is formed inside the body 100, and the first and second space portions 110 and 130 are formed outside the body, and the first and second space portions 110 and 130 having a predetermined space are formed. Some areas may form a part of the outer circumferential surface of the flow channel 103.

In particular, the second space portion 130 may be formed to have a predetermined depth h2 in the inner direction in which the flow channel 103 is formed on the outer surface 104 on one side of the body.

For example, the second space portion 130 may have a predetermined height h2, and one surface may be formed in a rectangular parallelepiped shape, but is not limited thereto.

In addition, the second space portion 130 includes a second bottom surface 131 forming at least a portion of the flow channel.

The first and second space parts 110 and 130 may have a flow channel 103 therebetween, and the first space part 110 may be formed on one side of the body, and the second space part 130 may include: It may be formed on the other side of the body. In addition, the body 100 connects the third through hole 116 and the second space 130 provided to connect the first space portion 110 to the outside. It includes a fourth through hole 136 provided for.

More specifically, at least a portion of the third through hole 116 is recessed by a predetermined depth inward on one side of the first bottom surface of the first space portion 110, and one side of the outer circumferential surface of the adjacent body 100 It is provided to penetrate and connects the first space portion and the outside.

In addition, at least a portion of the fourth through hole 136 is recessed by a predetermined depth inward on one side of the second bottom surface of the second space part 130 so as to penetrate through one side of the outer circumferential surface of the adjacent body 100. It is provided to connect the second space portion and the outside.

Here, the outer circumferential surface of the adjacent body 100 through which the third through hole 116 and the fourth through hole 136 respectively pass may be, for example, an upper surface of the body.

In addition, the third through hole 116 and the fourth through hole 136 may be provided at positions facing each other.

In addition, the third through hole 116 and the fourth through hole 136 may be provided to communicate with each other.

After the flow measurement sensor 400 is mounted in the first space portion, a pin portion 403, which will be described later, passes through the third through hole 116 and protrudes outside the body to control the control board disposed in the second space portion. 4 may be electrically connected through the through hole 136.

8 is a front view of a first support member according to an embodiment of the present invention, FIG. 9 is a view showing a sensor flow path plate according to an embodiment of the present invention, and FIG. 10 is a first view according to an embodiment of the present invention It is a combined view of the support member and the sensor flow path plate.

Meanwhile, referring to FIGS. 8 and 10, the first support member 200 guides the fluid supplied from the flow channel 103 on the inflow port 101 side to the sensor flow path 310, and the sensor flow path 310. ) It may be provided to seal one side.

More specifically, each of the inflow through hole 210 and the outflow through hole 220 formed in the first support member 200 is first penetrated to supply the fluid supplied from the flow channel 103 to the sensor flow path 310. The holes 112 and the second through-holes 113 may be provided in the same size.

Here, the inflow through hole, the outflow through hole, the plurality of fastening holes C and the second insertion hole formed in the first support member may be formed through the first support member, respectively.

On the other hand, referring to Figure 9, the sensor flow path plate 300 according to an embodiment of the present invention is in contact with the first support member 200, the sensor flow path 310 formed to penetrate the sensor flow path plate 300 Includes.

In particular, the sensor flow path 310 is respectively connected to the inlet through hole 210 and the outlet through hole 220 so as to be movable.

That is, the sensor flow path 310 may be provided so that the fluid flows to measure the flow rate of the fluid branched from the flow channel 103.

Here, at least one sensor flow path plate 300 may be disposed in the first space portion.

More specifically, the sensor flow path 310 of the sensor flow path plate 300 includes an inflow portion 311 and an outflow portion 312 each having a predetermined width W1 so that the fluid flows in and out.

In addition, the fluid flow between the inlet portion 311 and the outlet portion 312 is fluidly connected, but the flow rate measurement provided to have a width W2 smaller than the width W1 of the inlet portion 311 and the outlet portion 312 It includes a flow path (313).

In particular, the inlet portion 311 and the outlet portion 312 are respectively connected to the inlet through hole 210 and the outlet through hole 220 so as to be movable in fluid.

In particular, the sensor flow path 310 may be formed so that the fluid flows by etching the plate 300.

Therefore, there is an advantage in that the sensor flow path can be more easily fabricated than when processing to form the sensor flow path directly on the body and the sensor cover.

Here, the material of the plate may be, for example, SUS, and a material conventionally used as a metal material may be used, but is not limited thereto.

In particular, the material may be appropriately selected and used according to reactivity with a gas to be measured.

Here, the first support member 200 may also be manufactured by etching.

In addition, the etching (etching, etching) is a surface processing method that applies the corrosion action of chemicals, after only the necessary part of the material used in the method (防蝕) treatment, corrosion to remove unnecessary parts to obtain the desired shape It means the processing method.

 In addition to this, the sensor flow path plate 300 has a predetermined thickness T, and by adjusting the volume S of the sensor flow path 310 as the thickness T is changed, the flow range to be measured can be adjusted. have.

That is, the volume of the sensor flow path 310 is adjusted to control the flow rate flowing into the sensor flow path 310.

When the flow rate flowing into the sensor flow path 310 is adjusted as described above, when measuring the flow rate of the fluid in the region where the flow rate zone is low, it is possible to increase the flow rate range to be measured, thereby more accurately measuring the flow rate. .

For example, in adjusting the flow rate range that flows into the sensor flow path, if the thickness T of the sensor flow path plate 300 is increased, the volume of the sensor flow path increases accordingly to increase the flow rate of the flowing fluid, On the contrary, when the thickness T of the sensor flow path plate 300 is decreased, the volume of the flow path of the flowed fluid can be adjusted to decrease the flow rate of the flowed fluid by reducing the volume of the flow path of the sensor.

Here, in addition to controlling the flow rate range of the fluid by adjusting the thickness of the sensor flow path plate 300 as described above, although not shown, a plurality of sensor flow path plates 300 formed in a predetermined thickness are stacked and disposed, As described above, the flow rate range of the sensor flow path may be adjusted.

In addition, the sensor flow path formed on the sensor flow path plate, the plurality of fastening holes and the first insertion hole may be formed through the sensor flow path plate, respectively.

11 is a view showing a flow measurement sensor according to an embodiment of the present invention, FIG. 12 is a view showing a second support member according to an embodiment of the present invention, and FIGS. 13 to 15 are according to an embodiment of the present invention It is a combined view of the first support member, the sensor flow path plate, the flow measurement sensor, and the second support member.

Meanwhile, referring to FIG. 11, the flow measurement sensor 400 of the present invention may be located in at least a portion of the sensor flow path 310 to measure the flow rate of the fluid flowing through the sensor flow path 310.

More specifically, the flow measurement sensor 400 includes a first surface 410 seated in the insertion groove 510 of the second support member 500 to be described later and a second surface 420 contacting the sensor flow path plate. Includes.

On the second surface 420 of the flow measurement sensor 400, a sensing unit 401 provided to measure a flow rate, a sensor circuit protection unit 402 and a sensing unit 401 for protecting electronic elements required for sensing, It includes a pin portion 403 provided to transmit the measured signal to the control board (900).

That is, the pin portion 403 may be provided to be electrically connected to the control board.

In particular, the sensor circuit protection part 402 may be formed to protrude outside the flow measurement sensor.

As described above, the sensor flow path plate 300 has a first insertion hole at a position corresponding to the sensor circuit protection part 402 so that the sensor circuit protection part 402 protruding outwardly is fixed to the second surface 420 as described above. 320) may be provided.

In addition, the first support member 200 also has a second insertion hole 230 in a position corresponding to the sensor circuit protection unit 402 so that the sensor circuit protection unit 402 of the flow measurement sensor protruding outward is inserted and fixed. Can be prepared.

In particular, the protruding height of the sensor circuit protection part 402 may be equal to or less than the thickness of the first insertion hole 320 and the thickness of the second insertion hole 230.

That is, the sum of the thicknesses of each of the first insertion hole 320 and the second insertion hole 230 may be larger than the protruding height of the sensor circuit protection unit 402.

In addition, the sensing unit 401 of the flow measurement sensor is disposed in the central region of the flow measurement flow path 313 of the sensor flow path 310 to measure the flow rate of the fluid.

Here, the flow measurement sensor 400 may be, for example, a MEMS mass flow sensor, a thin film type hot film sensor manufactured by MEMS technology, and a hot film sensor having high production of a conventional hot wire mass flow sensor (Hot wire). Compensation for the cost and the disadvantage that the measurement precision is damaged due to contamination of the heating wire exposed to the conventional bypass tube enables more precise measurement.

That is, the MEMS mass flow sensor may determine the amount of fluid supplied to the flow channel 103 as a whole by measuring the flow rate of the fluid moving through the sensor flow path 310.

The control board 900 may include a power supply unit, a measurement unit, a signal processing unit, a communication unit, and a control unit, and may control the output of the pump based on the flow rate of the fluid measured from the flow measurement sensor 400. .

Meanwhile, referring to FIGS. 12 to 15, the second support member 500 according to an embodiment of the present invention has an insertion groove 510 in which the flow measurement sensor 400 is seated.

The insertion groove 510 may be formed to have a size corresponding to a flow measurement sensor to be inserted in a predetermined depth from one surface of the second support member.

Accordingly, the flow measurement sensor may be seated in the insertion groove 510 and fixed.

More specifically, the second support member 500 has a first surface 501 having an insertion groove 510 and a second surface 502 in the opposite direction.

Here, the insertion groove 510 may be further formed with an inner groove 511 forming a predetermined space S inward from the insertion groove 510.

That is, a predetermined space S is formed between the flow measurement sensor and the second support member seated in the insertion groove of the second support member.

As described above, the inner groove 511 may form a space S through which fluid can flow through the hole 411 formed in the first surface 410 of the flow measurement sensor.

More specifically, when the flow measurement sensor is seated in the insertion groove 510 and the sensor flow path plate and the first support member are assembled, the fluid flows into the sensor flow path plate, and the fine gap between the flow measurement sensor and the insertion groove 510 is measured. As described above, the fluid flows into the inner groove 511 forming the predetermined space S to fill the predetermined space S.

At this time, the fluid introduced into the predetermined space (S) is introduced into the hole 411, so that the pressure on the sensing unit side formed of a glass material and the pressure on the hole 411 side become the same, that is, the sensor flow path The inlet pressure flowing into the plate is compensated to prevent breakage and damage of the flow measurement sensor when the pressure is high during flow measurement.

In addition, the second support member 500 is provided with a plurality of fastening means 520 provided to engage and fix the flow measurement sensor 400 seated in the insertion groove 510 with the sensor flow path plate 300 and the first support member 200 ).

The plurality of fastening means 520 may be, for example, a bolt, but is not limited thereto, and may be coupled and fixed by, for example, diffusion bonding.

In particular, the first support member 200, the sensor flow path plate 300, and the second support member 500 are provided with a plurality of fastening holes (C1, C2, C3) respectively provided at the same position in order for a plurality of fastening means to pass therethrough. It includes.

In addition, a plurality of first seating grooves 114 correspond to a plurality of fastening holes C on the first bottom surface 111 of the body so that one end 520a of the plurality of fastening means 520 is seated. Respectively.

In addition, the plurality of fastening holes C3 of the second support member 500 may be fastened such that the other ends 520b of the plurality of fastening means protrude outwards of the second surface 502 of the second support member 500. You can.

That is, the plurality of fastening means 520 penetrates the first support member, penetrates the sensor flow path plate, and then fastens through the second support member, so that the first support member 200 and the sensor flow path plate 300 ), The flow measurement sensor 400 and the second support member 500 can be integrally fixed.

Here, the first support member and the sensor flow path plate have a first surface and a second surface opposite to the first surface, respectively, and the fastening holes C are formed through the first surface and the second surface. Each of the first and second surfaces is formed as a flat surface.

More specifically, the first support member has a first surface facing the first bottom surface and a second surface facing the sensor flow path plate.

In addition, the sensor flow path plate has a first surface facing the first support member and a second surface facing the flow measurement sensor.

That is, the first support member and the sensor flow path plate can be in close contact with each other when fastened by a flat surface, so that there is no gap, and thus an accurate flow rate can be measured.

In addition to this, the first bottom surface 111 also has a flat surface facing the first surface of the first support member. Therefore, the first bottom surface in contact with the first support member is formed as a flat surface, so that it is mounted tightly in the first space portion to guide the fluid more tightly to the sensor flow path.

In addition, in manufacturing as described above, it is possible to manufacture more easily than conventionally processing the flow path inside the body, and accordingly, there is an effect of minimizing the change in the cross-sectional area of the flow path caused by the machining deviation.

On the other hand, the inlet portion 311 of the sensor flow path 310 and the inflow through hole 210 of the first support member are provided at positions corresponding to the first through hole 112, and the outlet portion 312 of the sensor flow path And the outlet through hole 220 of the first support member may be provided at a position corresponding to the second through hole 113.

Here, the diameter (D1 ') of the inflow through-hole 210 may be formed to extend in the longitudinal direction to have the same length as the diameter (D1) of the first through-hole (112).

In addition, the diameter (D2 ') of the outlet through-hole 220 may be formed to extend in the longitudinal direction to have the same length as the diameter (D2) of the second through-hole (113).

By forming the diameters of the inlet through hole and the outlet through hole as described above, it is possible to prevent the fluid passing through the first and second through holes from leaking into a path other than the sensor flow path.

16 is a perspective view illustrating a first cover according to an embodiment of the present invention, and FIG. 17 is a view illustrating a first to third cover according to an embodiment of the present invention.

Meanwhile, referring to FIG. 16, the flow rate measuring device 10 according to an embodiment of the present invention includes a first cover 600 provided to seal the first space portion 110.

The first cover 600 may surround the second support member 500 and seal the first space 110. More specifically, the first cover 600 may include a first surface 601 ) And the second surface 602 in the opposite direction of the first surface, while opening and closing the first space portion and using a bolt or the like so as to engage one side of the body 100 so that the fluid inside does not leak out to the outside. I can do it.

In particular, the first surface 601 of the first cover 600 includes a plurality of second seating grooves 610 to which the other ends 520b of the plurality of fastening means 520 are respectively seated.

The second seating grooves 610 may be provided at positions corresponding to the plurality of fastening holes C, respectively.

Therefore, the first cover 600 can be sealed to the first space portion by placing all of the above-described components in the first space portion and then mounting the uppermost portion.

In addition, referring to FIG. 17, the flow rate measuring device 10 of the present invention includes a second cover 630 surrounding the control board 900 and provided to seal the second space.

The second cover 630 may be mounted on the uppermost portion after the control board is disposed in the second space portion 130 to make the second space portion airtight through connecting means such as bolts.

In addition to this, the third cover 650 provided to close the third and fourth through holes 116 and 136 is further included.

The third cover 650 may be hermetically sealed such that the third and fourth through holes 116 and 136 communicate with each other, and the third and fourth through holes do not communicate with the outside.

In particular, the first to third covers 600, 630, 650 may have an approximately 'U' shape in cross section.

More specifically, when looking at the inflow port 101 from the front, the first cover 600 is disposed on the left side of the body, the second cover 600 is disposed on the right side of the body, and the third cover 650 ) Is disposed on the upper surface of the body so that the shape may have a 'U' shape in cross section.

On the other hand, the flow measurement device 10 of the present invention, based on the first bottom surface 111, the first support member 200, the sensor flow path plate 300, the flow measurement sensor 400 and the second support member ( 500) are sequentially arranged in close contact with each other in the first space part 110, and the inside of the first space part may be sealed by the first cover 600 and the sealing member 700.

In addition, based on the second bottom surface 131, the control board is disposed to be tightly coupled inside the second space part 130, and the inside of the second space part may be sealed by the second cover 630. More specifically, referring to FIGS. 18 and 20 shown to describe the order in which components are disposed in the first space according to an embodiment of the present invention, first the first surface 410 of the flow measurement sensor is removed. 2 The sensor flow path plate 300 is disposed to be seated in the insertion groove 510 of the support member and to contact the second surface 420 of the flow measurement sensor.

Thereafter, the first support member 200 is disposed to contact the sensor flow path plate 300.

At this time, the sensor circuit protection part 402 of the flow measurement sensor may be arranged to pass through the first insertion hole 320 and the second insertion hole 230 in sequence.

The first support member, the sensor flow path plate, and the flow measurement sensor by fastening so that the plurality of fastening means 520 sequentially pass through the plurality of fastening holes in the direction from the first support member side to the second support member in the state arranged as above. And a second support member.

In the combined state as described above, the pin portion 403 of the flow measurement sensor is mounted in close contact with the first space portion so as to pass through the third through hole 116 provided in the body.

At this time, the pin part 403 is electrically connected to the control board 900 mounted on the second space part 130 through the fourth through hole 136.

In addition, one end 520a of the plurality of fastening means is seated in the first seating groove 114 of the first bottom surface so that the first support member can be in close contact with the first space.

Then, the sealing member 700 is mounted in the sealing member groove to make the inside of the first space part more airtight. Here, the arrangement of the sealing member 700 can be placed in any order.

 Thereafter, each of the other ends 520b of the plurality of fastening means fastened to protrude outwardly of the second surface 502 of the second support member 500 is provided on the first surface 601 of the first cover 600 It is mounted so as to be seated in the dog's second seating grooves 610 to finally seal the first space.

In addition, after the pin portion 403 and the control board 900 are electrically connected, a third cover 650 is mounted to seal the third and fourth through holes 116 and 136.

15 and 20, the present invention is made by using a separate sensor flow path plate for measuring the flow rate, so that it can be more tightly adhered, thereby minimizing the gap generated in the flow path, thereby reducing the sensor flow path. Since it is formed only in the measurement part of the sensor, it is possible to measure the flow rate more accurately not only in a region where the flow rate is low, but also in the entire flow rate.

That is, it is possible to prevent a problem in the performance (accuracy) of the product in advance because a flow rate flows out of the sensor flow path and measurement is impossible.

The flow rate measuring device 10 having the above-described configuration can be used to measure the flow rate of fuel and gas containing volatile substances and the like for the operation of the fuel cell system in a fuel cell system that has been conventionally used. This is not applicable, and can be applied where fuel and gas flow rate measurement is required.

10: flow measurement device
100: body
200: first support member
300: sensor euro plate
400: flow measurement sensor
500: second support member
600: first cover
630: second cover
650: third cover
700: sealing member
800: laminar flow element
900: control board

Claims (7)

An inflow port, an outflow port in the opposite direction of the inflow port, a flow channel connecting the inflow port and the outflow port, and a first space part provided on the outside of the flow channel and connected to the inflow port side and the outflow port side to be fluidly movable Having a body;
A flow measurement sensor disposed in the first space portion and provided to measure a flow rate of the fluid branched from the flow channel;
A laminar flow element disposed in the flow channel; And
A control board electrically connected to the flow measurement sensor and disposed in the body; Including,
The body has a second space portion provided in the opposite direction of the first space portion with the flow channel interposed therebetween, and the control board is a flow rate measuring device disposed in the second space portion. delete According to claim 1,
The first space portion includes a first through hole through which fluid flows from the flow channel and a second through hole through which the fluid flows into the flow channel,
A flow measurement device comprising a first channel for fluidly connecting a first through hole and a flow channel and a second channel for fluidly connecting a second through hole and a flow channel. According to claim 3,
The laminar flow element includes a plurality of microtubes,
A plurality of micro-tubes is a flow measurement device disposed in the region between the first channel and the second channel. According to claim 1,
The body includes a third through hole provided to connect the first space portion to the outside and a fourth through hole provided to connect the second space portion to the outside,
The flow measurement sensor has a pin portion provided to transmit the measured signal to the control board,
The third through hole and the fourth through hole are provided to communicate with each other,
The pin part and the control board are flow rate measuring devices electrically connected through the third through-hole and the fourth through-hole. According to claim 3,
A first support member disposed in the first space portion and having an inflow through hole fluidly connected to the first through hole and an outflow through hole fluidly connected to the second through hole through the first space portion;
A sensor flow path plate having a sensor flow path in contact with the first support member, fluidly connected to the inflow and outflow through-holes, and having a flow path through which the fluid passing through the inflow through-hole flows into the outflow through-hole; And
A second support member provided for fixedly supporting the flow measurement sensor; Including,
The flow rate measurement sensor is located in at least a portion of the sensor flow path and is arranged to measure the flow rate of the fluid flowing through the sensor flow path. The method of claim 6,
The body may include a first cover surrounding the second support member and provided to seal the first space portion;
A second cover surrounding the control board and provided to seal the second space portion; And
Flow measuring device further comprises a third cover provided to close the third and fourth through-holes.

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