KR102069216B1 - Nitrogen gas power ejecting device with inclined inlet pipe for venturi pipe - Google Patents

Abstract

The present invention relates to a nitrogen gas power ejection apparatus having an inclined inlet pipe for a venturi pipe. According to the present invention, nitrogen gas can be smoothly mixed with reaction by-product gas by the venturi pipe. In addition, due to interference at a tip of the venture pipe, flow of the reaction by-product gas is not damaged and smooth flow can be maintained.

Description

Nitrogen gas power ejection apparatus with inclined entry pipe for venturi pipes {NITROGEN GAS POWER EJECTING DEVICE WITH INCLINED INLET PIPE FOR VENTURI PIPE}

The present invention relates to a semiconductor and LCD manufacturing equipment, and in particular, to facilitate the mixing of the nitrogen gas to the reaction by-product gas by the venturi tube smoothly without damaging the flow of the reaction by-product gas due to the interference of the end of the venturi tube The present invention relates to a nitrogen gas power ejection apparatus capable of maintaining the pressure.

In general, the semiconductor manufacturing process is largely composed of a pre-process (Fabrication process) and a post-process (Assembly process), the pre-process is to deposit a thin film on a wafer (wafer) in various process chambers (Chamber), the deposition It is a process of manufacturing a so-called semiconductor chip by repeatedly performing a process of selectively etching the thin film, so-called semiconductor chip (Chip), the post-process refers to the chip manufactured in the previous process individually After separating, refers to the process of assembling the finished product by combining with the lead frame.

In this case, the process of depositing a thin film on the wafer or etching the thin film deposited on the wafer is a process gas such as hydrogen and toxic gases such as silane (Arlane) and boron chloride and a process gas such as hydrogen in the process chamber It is carried out at a high temperature using a large amount of the reaction by-product gas containing various ignitable gases and corrosive foreign substances and toxic components during the process.

Therefore, the semiconductor manufacturing equipment is equipped with a scrubber for purifying the reaction by-product gas discharged from the process chamber to the atmosphere at the rear end of the vacuum pump to make the process chamber in a vacuum state.

However, the toxic reaction by-product gas generated from the process chamber is easily solidified and accumulated in the process of sequentially flowing through the outflow vacuum pipe of the process chamber, the outflow exhaust pipe of the vacuum pump, the outflow exhaust pipe of the scrubber, and the main duct. As a result, blockages would occur.

Therefore, as a way to solve the problem that the reaction by-product gas is solidified and clogging occurs, a jacket heater method is generally used to wrap the entire section of the pipe with a heater to keep the temperature warm in the pipe. However, such a jacket heater method has a problem that the efficiency is not high compared to the power used in spite of the high installation cost because a large portion of the pipe must be wrapped with a heater.

Meanwhile, in order to improve the jacket heater method, a nitrogen supply device in which a high temperature nitrogen gas is injected into a pipe through which reaction by-product gas flows has been developed, and the present applicant has further advanced the venturi effect and the high pressure injection effect. We have developed a 'nitrogen gas power ejector device' that allows the injection and mixing of nitrogen gas to the reaction by-product gas smoothly without clogging by maximizing suction phenomenon by synergistic application. Patent No. 1206536 (2012.11.23))

However, in the case of the nitrogen gas ejector apparatus according to the prior art, despite the advantage that the injection and mixing of the nitrogen gas to the reaction by-product gas is very smoothly formed when the reaction by-product gas is excessively formed in the middle for the Venturi effect. The narrow part acts as a bottleneck, causing the reaction byproduct gas to stagnate and flow back, preventing the smooth flow.

In addition, there was a manufacturing problem in forming a venturi section having a narrow portion in the middle by gradually reducing the inner diameter of the connecting pipe and gradually widening it to its original state.

Korean Registered Patent No. 1206536 (2012.11.23.)

Accordingly, the present invention has been proposed to solve the conventional problems as described above, and an object of the present invention is to facilitate the mixing of the nitrogen gas to the reaction by-product gas by the venturi tube due to the interference of the end of the venturi tube The present invention provides a nitrogen gas power ejection apparatus capable of maintaining a smooth flow without damaging the flow of the reaction byproduct gas.

In order to achieve the above object, the nitrogen gas power ejection apparatus according to the technical idea of the present invention reacts to a transfer pipe to which the reaction byproduct gas is transferred in order to prevent a blockage of the pipe due to the reaction byproduct gas generated during semiconductor manufacturing. A nitrogen gas power ejection apparatus for injecting nitrogen gas at a higher temperature than by-product gas, comprising: a connecting pipe having a rear end inlet through which the reaction byproduct gas is introduced and a front end outlet through which the introduced reaction byproduct gas flows out; A nitrogen gas injection pipe connected to an outer circumferential surface of the connection pipe to inject high temperature nitrogen gas into the connection pipe; Installed inside the connecting pipe and the inner portion is gradually reduced along the flow direction of the reaction by-product gas, the bottleneck portion to maintain the state of the inner diameter is reduced by the reducing portion, the inner diameter is gradually increased by the nitrogen gas injection tube And a venturi tube for inducing mixing of the injected nitrogen gas and the reaction by-product gas. The inner peripheral surface of the connecting pipe protrudes in an inclined shape toward the front while gradually narrowing the flow path, and the front end portion of the venturi tube is inclined forward. Is provided with an inclined inlet pipe which is drawn in but spaced apart from the inner circumferential surface of the reduction portion, when the reaction by-product gas flowing inside the connection pipe is introduced into the venturi tube can minimize the resistance due to the front end surface of the venturi tube It is characterized by its technical configuration.

Here, the inside of the connecting pipe communicates with the nitrogen gas inlet pipe to receive nitrogen gas and to inject a high-temperature, high-pressure nitrogen gas toward the reduced portion of the venturi pipe compared to the reaction byproduct gas on the inner central axis of the connecting pipe. It may be characterized in that it further comprises a spray nozzle.

In addition, the venturi pipe is installed to be spaced apart from the inner circumferential surface of the connection pipe along the inner center of the connection pipe to form a main flow path of the reaction byproduct gas on the inside, and to the space between the reaction product and the connection pipe on the outside. A bypass flow path is formed, and the bypass flow path is installed in the bypass channel to avoid the reduced part and the enlarged part of the bypass flow path is installed outside the bottleneck part having the largest cross-sectional area to block the flow of the reaction by-product gas in the normally closed state While the reaction byproduct gas flows under a predetermined pressure due to the flow may further include an opening and closing door to allow the flow of the reaction by-product gas flowing through the bypass passage.

In addition, the connection pipe is made of a combination of the first pipe, the second pipe and the third pipe from the rear end to the front end, the venturi pipe is installed from the inside of the second pipe to the inside of the third pipe. It may be characterized by.

In addition, it is coupled to the front surface of the front end of the flange of the second pipe between the second pipe and the third pipe, is inserted into the center of the bottleneck of the venturi pipe by the first center hole to cut across the bypass flow path to the left side And a post each having a first disk having a first opening for allowing the flow of reaction by-product gas, and the opening and closing door is installed to open and close a pair of left and right from the front of the first disk to open and close the first opening It can be characterized in that it can be.

In addition, the front surface of the first disk is formed with an inner protrusion tube and an outer protrusion tube protruding at a distance while forming concentric circles with respect to the first center hole, the outer peripheral surface of the inner protrusion tube and the inner peripheral surface of the outer protrusion tube In the space formed between, the hinge shaft is installed vertically on the upper side and the lower side with respect to the inner protruding tube, the opening and closing door is rotatably installed in the half moon plate shape on the left side and the post around the hinge axis, It may be characterized in that it has a tendency to rotate in the closing direction by the elastic force of the torsion spring installed on the hinge shaft and is pushed forward when the pressure is higher than a certain amount by the reaction by-product gas, and opens against the elastic force of the torsion spring.

In addition, a plurality of second interposed between the second pipe and the third pipe is inserted into the center of the venturi pipe by a second center hole formed in the center to block across the bypass flow passage to allow the reaction by-product gas to flow. And a second disc having an opening, the space protrusion protruding backward along the rear circumference of the second disc to face the front surface of the first disc, wherein the opening / closing door is inward surrounded by the space protrusion. It may be characterized in that a space for opening and closing operation is formed.

In addition, the first disk, the second disk, the hinge shaft and a pair of opening and closing doors are formed as a module between the second pipe and the third pipe, the venturi tube is a bottleneck and the enlarged state is separated The second pipe and the third pipe may be characterized in that they are coupled together when coupled by the first disk and the second disk.

The nitrogen gas power ejection apparatus according to the present invention minimizes the problem that the reaction by-product gas flow is interfered by the tip end of the venturi tube by a slanting inlet tube which is introduced from the inner circumferential surface of the connecting pipe into the inlet of the venturi tube. Keep the flow going.

The present invention also provides a bypass flow path between the connecting pipe and the venturi pipe, but does not install an opening / closing door that opens and closes the bypass flow path to the outside of the bottleneck of the venturi pipe that can secure the widest cross-sectional area. In one configuration, it is possible to minimize the problem that the inlet flow path is reduced due to the installation of the opening and closing door and the problem that the reaction by-product gas flow is interfered with.

1 is a perspective view of a nitrogen gas power ejection apparatus according to an embodiment of the present invention
2 is an exploded perspective view of a nitrogen gas power ejection apparatus according to an embodiment of the present invention;
Figure 3 is an exploded perspective view of the back side of the nitrogen gas power ejection apparatus according to an embodiment of the present invention
4 is a cross-sectional view of a nitrogen gas power ejection apparatus according to an embodiment of the present invention.
5 is a cross-sectional perspective view of the nitrogen gas power ejection apparatus according to the embodiment of the present invention.
6 and 7 are a series of reference diagrams for explaining the operation of the nitrogen gas power ejection apparatus according to an embodiment of the present invention;

With reference to the accompanying drawings will be described in detail a nitrogen gas power ejection apparatus according to embodiments of the present invention. As the inventive concept allows for various changes and numerous embodiments, particular embodiments will be illustrated in the drawings and described in detail in the text. However, this is not intended to limit the present invention to a specific disclosed form, it should be understood to include all changes, equivalents, and substitutes included in the spirit and scope of the present invention. In describing the drawings, similar reference numerals are used for similar elements. In the accompanying drawings, the dimensions of the structure is shown to be larger than the actual size for clarity of the invention, or to reduce the actual size to understand the schematic configuration.

In addition, terms such as first and second may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as the second component, and similarly, the second component may also be referred to as the first component. On the other hand, unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art, and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

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1 is a perspective view of a nitrogen gas power ejection apparatus according to an embodiment of the present invention, Figure 2 is an exploded perspective view of a nitrogen gas power ejection apparatus according to an embodiment of the present invention, Figure 3 is a nitrogen according to an embodiment of the present invention 4 is a cross-sectional perspective view of a nitrogen gas power ejection apparatus according to an embodiment of the present invention, and FIG. 5 is a cross-sectional perspective view of a nitrogen gas power ejection apparatus according to an embodiment of the present invention.

As shown, the nitrogen gas power ejection apparatus according to an embodiment of the present invention, the first disk including the connection pipe 110, injection nozzle 120, venturi tube 130, opening and closing doors (144a, 144b) The assembly 140, the second disk assembly 150, the nitrogen gas injection tube 160 is formed.

In the configuration of the present invention, the remarkable point is to form a bypass flow path (AA) between the connecting pipe 110 and the venturi tube 130, but the opening and closing doors (144a, 144b) for opening and closing the bypass flow path (AA) venturi pipe ( It is configured to be installed outside the bottleneck portion 131 of the venturi tube 130 that can secure the widest cross-sectional area without being installed at the distal end of the 130, and from the inner circumferential surface of the inner flow passage 111a of the connecting pipe 110 It is in the structure which newly provided the inclined drawing pipe 111b which made it enter the entrance of the reduction part 132 of 130. As shown in FIG. As a result, when the opening and closing door is installed at the tip of the venturi tube 130, the inlet having the narrowest cross-sectional area of the bypass passage is further reduced, thereby completely eliminating the disadvantage of failing to divert a sufficient amount of reaction byproduct gas toward the bypass passage. In addition, the reaction by-product gas flow is to maintain a smooth flow by minimizing even the problem of interference due to the front end surface of the venturi tube (130).

Hereinafter, a nitrogen gas power ejection apparatus according to an embodiment of the present invention will be described in detail with reference to the above components.

The connecting pipe 110 has a rear end inlet through which the reaction byproduct gas is introduced and a front end outlet through which the introduced reaction byproduct gas flows out, and the flanges 111c and 113c are respectively provided at the connecting pipe 110 to be connected to the middle of the transfer pipe. The connection pipe 110 is composed of a combination of the first pipe 111, the second pipe 112 and the third pipe 113 from the rear end to the front end.

An injection nozzle 120 is installed in the internal flow path 111a of the first pipe 111, and a nitrogen gas injection pipe 160 communicating with the injection nozzle 120 through a wall is installed outside. The inner peripheral surface of the distal end portion of the first pipe 111 is provided with an inclined inlet pipe 111b protruding in a form inclined forward while gradually narrowing the flow path. The inclined inlet pipe (111b) is formed in the inner peripheral surface of the distal end of the first pipe 111, the front end is introduced into the inlet of the reduced portion 132 of the venturi tube 130, but is spaced apart from the inner peripheral surface of the reduced portion (132) It is pulled in. As a result, a space between the distal end of the inclined inlet pipe 111b and the inner circumferential surface of the reduced part 132 of the venturi tube 130 becomes the inlet AB of the bypass passage AA. Since the bypass flow inlet (AB) of this type is not provided with the opening of the opening door or its appendages, it is possible to secure the widest cross-sectional area as much as possible in the given conditions. Since the distal end is already introduced into the inside of the reduction part 132 of the venturi tube 130, the reaction by-product gas flowing inside the connection pipe 110 is initially introduced into the venturi tube 130 of the venturi tube 130. There is no problem in that a reverse flow or vortex does not occur due to the resistance received while colliding with the front end surface, and the reaction by-product gas is controlled to flow through the inlet of the bypass passage AA only when the reaction by-product gas does not sufficiently flow through the venturi tube 130. will be.

The venturi tube 130 is installed inside the second pipe 112 and the third pipe 113. In this case, according to the configuration in which the second pipe 112 and the third pipe 113 are divided and combined into separate entities, the enlarged portion 133 is separated from the bottleneck part 131 even in the case of the venturi tube 130. It is configured to be divided into objects of and combined. The first disk assembly 140 and the second disk assembly 150 are installed as one module between the second pipe 112 and the third pipe 113. At this time, the first disk 141 of the first disk assembly 140 is coupled to the front end flange 112c of the second pipe 112 to be coupled and fixed, and the second disk 151 faces the first disk 141. Are combined and fixed, and an O-ring 149 is interposed therebetween. As can be seen in FIG. 4, the third pipe 113 in which the enlarged portion 133 of the venturi tube 130 is positioned is a second portion in which the reduced portion 132 and the bottleneck 131 of the venturi tube 130 are positioned. It is provided to have a wider inner diameter than the pipe 112 to allow the enlarged portion 133 of the venturi tube 130 to be wider than the reduced portion 132.

Thus, the venturi tube 130, the first disk assembly 140, and the second tube 110 according to the configuration in which the connection pipe 110 is divided into the first pipe 111, the second pipe 112, and the third pipe 113. Installation of the disk assembly 150 as well as the overall assembly is facilitated.

The injection nozzle 120 is installed on the inner central axis of the first pipe 111 of the connection pipe 110 serves to inject a high temperature and high pressure nitrogen gas toward the narrow portion of the venturi pipe 130. The injection nozzle 120 extends along a central axis of the first portion 121 and then the connecting pipe 110 from the wall of the connecting pipe 110 on the central axis of the connecting pipe 110 and the venturi pipe ( 130) the second portion 122 to reach the vicinity, and the end portion of the second portion 122 of the nitrogen gas is injected into a section (121a) is narrowly reduced and expanded the diameter is provided in the form of diffusion of nitrogen gas To be sprayed. As such, when the injection nozzle 120 for injecting nitrogen gas toward the narrow portion of the venturi tube 130 is provided in the vicinity, the narrow portion of the narrow passage having a relatively narrow flow path compared to other sections may cause the flow to stagnate or flow backward. It can be suppressed automatically. The injection pressure of the injection nozzle 120 is about 5 to 10 (kgf / cm ㅂ) is appropriate, this injection pressure is a level that can be conventionally implemented in an external device for supplying nitrogen gas to the transport gas.

The venturi pipe 130 is installed therein over the second pipe 112 and the third pipe 113 of the connection pipe 110. The venturi pipe 130 is installed to be spaced apart from the inner circumferential surface of the connection pipe 110 along the inner center of the connection pipe 110, the reduction portion 132, the reduced diameter gradually decreases the inner diameter along the flow direction of the reaction by-product gas The bottleneck portion 131 maintains a state in which the inner diameter is reduced by 132, and an enlarged portion 133 in which the inner diameter gradually increases. Accordingly, the venturi tube 130 forms a main flow path of the reaction by-product gas consisting of flow paths sequentially shown by reference numerals 132a, 131a, and 133a, and spaced apart from the connection pipe 110 by the outside. As a result, a bypass flow path AA of the reaction byproduct gas is formed. The venturi tube 130 has a reduction part 132 and a bottleneck part 131 are integrally formed, and the expansion part 133 is provided in a separated state so that the second pipe 112 and the third pipe 113 are made of the first pipe. When the first disk assembly 140 and the second disk assembly 150 are interposed therebetween to be coupled together.

As described above, when the venturi tube 130 is installed, the flow rate of the reaction by-product gas flowing inside the connection pipe 110 passes through the bottleneck 131 and the pressure is lower than that of the surroundings. As a result, a rot phenomenon that sucks the surrounding gas or air occurs, and when such a phenomena occur, the nitrogen gas injection ability is remarkably improved by the effect of sucking the nitrogen gas injected from the injection nozzle 120 and reacts. Mixing of by-product gas and nitrogen gas is smooth.

The first disk assembly 140 includes a first disk 141, a hinge shaft 144c, and a pair of opening and closing doors 144a and 144b.

The first disk 141 is coupled to the front surface of the front end flange 112c of the second pipe 112 between the second pipe 112 and the third pipe 113, the first center hole (141a) It is inserted around the bottleneck 131 of the venturi tube 130 to block the bypass passage AA, but each of the left side and the post has a first opening 141b to allow the flow of the reaction by-product gas. . An inner protruding tube 143 and an outer protruding tube 142 are formed on a front surface of the first disk 141 at a distance from each other while forming concentric circles with respect to the first center hole 141a.

The hinge shaft 144c is installed in the space formed between the outer circumferential surface of the inner protruding tube 143 and the inner circumferential surface of the outer protruding tube 142, and is installed perpendicularly to the upper and lower sides of the inner protruding tube 143, respectively. A pair of semi-monthly plate opening and closing doors 144a and 144b are rotatably installed on the left side and the post so as to be rotatable about the hinge shaft 144c.

The opening / closing doors 144a and 144b are rotatably installed at the left side and the zip around the hinge shaft 144c, and the inner protruding tube is closed to block the first opening 141b of the first disk 141. The space 142a formed between the outer circumferential surface of 143 and the inner circumferential surface of the outer protruding tube 142 is completely drawn in and rested. The opening / closing doors 144a and 144b have a tendency to rotate in the closing direction by the elastic force of the torsion spring (not shown) installed on the hinge shaft 144c, and are pushed forward when subjected to a certain pressure by the reaction byproduct gas. It is configured to open against the elastic force of the torsion spring. As a result, the opening and closing doors 144a and 144b are installed outside the bottleneck part 131 having the widest cross-sectional area to avoid the reduction part 132 and the expansion part 133 of the venturi tube 130 among the bypass flow paths AA. When the first opening 141b of the first disk 141 is shut off in a normally closed state, the first opening 141b of the first disk 141 opens naturally when a predetermined pressure or more is received due to the flow of the reaction byproduct gas. Open to allow the flow of reaction byproduct gas.

The second disk assembly 150 is positioned between the second pipe 112 and the third pipe 113 and is inserted around the venturi tube 130 by a second center hole 151a formed at the center thereof. The second disk 151 has a plurality of second openings 151b that block the bypass passage AA but allow the flow of the reaction byproduct gas. A space protrusion 152 is formed to protrude backward along the rear circumference of the second disk 151 to face the front surface of the first disk 141. As a result, as shown in FIG. 4, a space in which the opening / closing doors 144a and 144b can be opened and closed is surrounded by the space protrusion 152.

Here, the first disk assembly 140 and the second disk assembly 150 form one module through the configuration in which the first disk 141 and the second disk 151 described above are coupled to each other. Then, the first disk 141, the hinge shaft 144c, the pair of opening and closing doors 144a and 144b and the second disk 151 between the second pipe 112 and the third pipe 113, one by one. Only one module can be installed without the need to install the connection pipe 110.

Looking at the operation and operation of the nitrogen gas power ejection apparatus according to the embodiment of the present invention described above are as follows.

As shown in FIG. 6, the reaction by-product gas flows only through the main flow path formed along the inside of the venturi tube 130 installed inside the connection pipe 110. At this time, the opening and closing doors 144a and 144b installed in the bypass passage AA block the first opening 141b of the first disk 141. However, when excessive reaction by-product gas is introduced into the connecting pipe 110 and the narrow venturi tube 130 is not completely extinguished, as shown in FIG. 7, a substantial portion of the reaction by-product gas is the outer peripheral surface of the venturi tube 130. And a bypass passage inlet (branched through the AB and flows along the bypass passage AA) provided between the inner circumferential surface of the connecting pipe 110. In this process, the reaction by-product gas flowing along the bypass passage AA opens and closes at a predetermined pressure. In the case of acting on the 144a and 144b, the opening / closing doors 144a and 144b do not block the first opening 141b of the first disk 141 and remain open. The portion of the reaction byproduct gas flows along the main flow path formed inside the venturi tube 130 as usual, while the other part of the reaction byproduct gas flows through the venturi. It has an aspect flowing through the bypass flow path (AA) formed to the outside of the 130. In particular, in the present invention, the opening and closing doors (144a, 144b) at the front end of the venturi tube 130, the inlet of the bypass flow path (AA) is formed; It is to be noted that by installing in the bottleneck 131 which is sufficiently biased to the rear side from this, it is possible to bypass a much larger amount of reaction by-product gas by the configuration that secures the inlet flow passage as wide as possible. Can be.

Although preferred embodiments of the present invention have been described above, the present invention may use various changes, modifications, and equivalents. It is clear that the present invention can be applied in the same manner by appropriately modifying the above embodiments. Therefore, the above description does not limit the scope of the present invention as defined by the limitations of the following claims.

110: connecting pipe 111b: inclined drawing pipe
120: injection nozzle 130: venturi tube
140: first disk assembly 141: first disk
144a, 144b: opening and closing door 150: second disk assembly

Claims (8)

As a nitrogen gas power ejection device for injecting nitrogen gas at a higher temperature than the reaction by-product gas in a transfer pipe through which the reaction by-product gas is transferred in order to prevent blockage of the pipe due to the reaction by-product gas generated during semiconductor manufacturing.
A connection pipe having a rear end inlet through which the reaction byproduct gas is introduced and a front end outlet through which the introduced reaction byproduct gas is discharged; A nitrogen gas injection pipe connected to an outer circumferential surface of the connection pipe to inject high temperature nitrogen gas into the connection pipe; Installed inside the connecting pipe and the reduction portion is gradually reduced in the inner diameter along the flow direction of the reaction by-product gas, the bottleneck portion to maintain the state of the inner diameter is reduced by the reduction portion, the inner diameter is gradually increased by the nitrogen gas injection tube It includes a venturi tube for inducing mixing of the injected nitrogen gas and the reaction by-product gas,
The inner circumferential surface of the connection pipe is provided with an inclined inlet pipe which protrudes in the form inclined toward the front while gradually narrowing the flow path, and the leading end is introduced into the inlet of the reduced part of the venturi tube, but is spaced apart from the inner circumferential surface of the reduced part. When the reaction by-product gas flowing inside the connection pipe is introduced into the venturi pipe to minimize the resistance due to the front end surface of the venturi pipe,
Injecting nitrogen gas in communication with the nitrogen gas injection pipe in the connection pipe and injecting nitrogen gas at a higher temperature and pressure than the reaction by-product gas on the inner central axis of the connection pipe toward the reduced portion of the venturi pipe. Further comprising a nozzle,
The venturi pipe is installed to be spaced apart from the inner circumferential surface of the connection pipe along the inner center of the connection pipe to form a main flow path of the reaction byproduct gas on the inside, and a bypass flow path of the reaction byproduct gas to the space between the connection pipe and the outside. Form the
It is installed in the bypass flow passage but avoids the reduced portion and the enlarged portion of the venturi tube is installed outside the bottleneck portion having the largest cross-sectional area of the bypass flow passage to block the flow of the reaction by-product gas in the closed state in the normal Opening and receiving the pressure more than a certain pressure due to the flow further includes an opening and closing door to allow the flow of the reaction by-product gas flowing through the bypass passage,
The connecting pipe is made of a combination of the first pipe, the second pipe and the third pipe from the rear end to the front end, the venturi pipe is installed from the inside of the second pipe to the inside of the third pipe,
It is coupled to the front surface of the front end of the flange of the second pipe between the second pipe and the third pipe, is inserted into the center of the bottleneck of the venturi pipe by the first center hole to cut across the bypass flow path, but the left side and the post Each having a first disk having a first opening for allowing a flow of the reaction byproduct gas,
The opening and closing door is opened and closed in a pair of left and right from the front of the first disk to open and close the first opening,
An inner protruding tube and an outer protruding tube are formed on the front surface of the first disk to form a concentric circle with respect to the first center hole and spaced apart from each other.
In a space formed between the outer circumferential surface of the inner protruding tube and the inner circumferential surface of the outer protruding tube, hinge shafts are installed vertically on the upper side and the lower side of the inner protruding tube, and the opening and closing door is located at the left side and the post about the hinge axis. It is installed rotatably in half moon shape.
The opening / closing door has a tendency to rotate in the closing direction by the elastic force of the torsion spring installed on the hinge shaft, and is pushed forward when the pressure of the reaction by-product gas is applied to a predetermined pressure, thereby opening the counter to the elastic force of the torsion spring. Nitrogen gas power ejection device. delete delete delete delete delete The method of claim 1,
A plurality of second openings interposed between the second pipe and the third pipe and positioned between the venturi pipes by a second center hole formed in the center and intersecting the bypass passage to allow the flow of the reaction byproduct gas; It has a second disk having,
A space protrusion protruding backward along the rear circumference of the second disc to face the front surface of the first disc is formed to form a space in which the opening / closing door can be opened and closed inwardly surrounded by the space protrusion. Nitrogen gas power ejection apparatus, characterized in that. The method of claim 1,
The first disc, the second disc, the hinge shaft and a pair of opening and closing doors are installed between the second pipe and the third pipe by forming a module.
The venturi tube is provided with a bottleneck and an enlarged portion separated from the nitrogen gas power ejection apparatus characterized in that the second pipe and the third pipe is coupled together when coupled by the first disk and the second disk.

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