KR102069061B1 - System for taking image of flexible oled cell - Google Patents

Abstract

An image acquisition system of a flexible OLED cell according to an embodiment of the present invention, the mounting table is a flexible OLED cell is mounted and has a vibration limit value within 10㎛; A line scan camera which automatically sets an inspection area corresponding to the loading of the flexible OLED cell in the mounting table and moves at a speed of 100 mm / s to photograph the flexible OLED cell; A high resolution lens mounted to the line scan camera; Illumination for irradiating light toward the flexible OLED cell photographed by the line scan camera and irradiating light of high brightness and high uniformity such that a gray difference is less than 10 in the entire image; And controlling an automatic setting of a line rate in response to a speed change of the line scan camera, controlling an optimum acceleration and deceleration setting for movement of the line scan camera, and distortion occurring in the captured image. And an image controller for correcting the image.

Description

Image acquisition system of flexible OLED cell {SYSTEM FOR TAKING IMAGE OF FLEXIBLE OLED CELL}

The present invention relates to a system for acquiring an image of a flexible OLED cell, and more particularly, a line scan image at a high speed of 100 mm / s at high speed in a state of minimizing vibration applied to the flexible OLED cell and irradiating high brightness and high uniformity of light. The present invention relates to an image acquisition system of a flexible OLED cell that can scan an image in less than four seconds and process the image in less than two seconds.

In the manufacturing process of a semiconductor or FPD (flat panel display), it is necessary to automatically check whether the pattern formed in the silicon wafer or the glass substrate has defects, such as a flaw, a stain, peeling, and a contamination. The automatic visual inspection apparatus used for such an inspection is provided with imaging means, such as a metal microscope and a CCD camera, an image processing processor, etc., for example. An enlarged image of the pattern obtained by the metal microscope is photographed by the photographing means and converted into image data. Based on this image data, the quality of the pattern appearance is judged by the image processing device. Since the appearance inspection of the pattern uses a high magnification objective lens, it is common to photograph after performing auto focus.

In general, the following two methods are most commonly used for autofocus, firstly, using a displacement sensor and a z-axis motor, and moving the camera by using a z-axis motor as much as the position error detected by the position displacement sensor. Second, there is a technique for focusing the camera by using an electric zoom lens, analyzing the acquired image and adjusting the magnification of the zoom lens by the focus error of the acquired image.

However, the autofocus function using the position displacement sensor and the motor has a disadvantage in that it is difficult to quickly correct the position error detected by the displacement sensor because there is a speed limit of the motor that moves the camera. In the case of a function, high-speed focus correction is possible, but there is a disadvantage in that time is delayed due to a complicated algorithm for calculating and correcting a focus error using the analyzed image and the analyzed image.

OLED, which is used as a flat panel display device, has a wide viewing angle, excellent contrast, and fast response speed, so it is widely used in portable display devices, smart phones, tablet PCs, etc. have. OLED has advantages such as luminance, driving voltage, response speed and the like, and can be multicolored, compared to inorganic light emitting display devices.

In the OLED manufacturing process, a thin film transistor (TFT) layer is formed on a mother substrate through various film forming processes and etching processes, and a lower electrode and an organic film layer (for example, a hole transport layer, a light emitting layer, and an electron number on the TFT layer). An organic light emitting layer consisting of a layer) and an upper electrode may be formed. OLED can be completed by sealing the mother substrate in which the TFT layer and the organic light emitting layer were formed using the sealing substrate. A plurality of OLED cells may be formed on the mother substrate, and the OLED may be completed by individualizing each OLED cell through a cutting process after the encapsulation process is completed.

After the encapsulation process is completed, an inspection process for the OLED cells formed on the mother substrate may be performed. In the inspection process, inspection signals may be applied to the OLED cells to perform functional inspection of the TFT layer, correction circuit inspection, image quality inspection, spectroscopic inspection, image inspection, and the like.

However, flexible OLED is applied to a panel or a film, and flexible parts exist in the panel, and when the image inspection work is performed by the existing inspection device, a lot of time and manpower is required for precise setting considering the bent part. Accordingly, there is a demand for the development of a system capable of obtaining a more accurate image in a faster time for inspection of the flexible OLED cell.

Korea Patent Registration No. 10-1618792 (2016.04.29.registration)

The present invention has been made to improve the prior art as described above, by minimizing the vibration applied to the flexible OLED cell and by taking a line scan image at a high speed of 100mm / s at a high speed and irradiating light of high uniformity and high uniformity The aim is to provide an image acquisition system of a flexible OLED cell that can scan an image within 4 seconds and process the image within 2 seconds.

In order to achieve the above object and to solve the problems of the prior art, the image acquisition system of a flexible OLED cell according to an embodiment of the present invention, the flexible OLED cell is mounted and has a vibration limit value within 10㎛; A line scan camera which automatically sets an inspection area corresponding to the loading of the flexible OLED cell in the mounting table and moves at a speed of 100 mm / s to photograph the flexible OLED cell; A high resolution lens mounted to the line scan camera; Illumination for irradiating light toward the flexible OLED cell photographed by the line scan camera and irradiating light of high brightness and high uniformity such that a gray difference is less than 10 in the entire image; And controlling an automatic setting of a line rate in response to a speed change of the line scan camera, controlling an optimum acceleration and deceleration setting for movement of the line scan camera, and distortion occurring in the captured image. And an image controller for correcting the image.

In addition, the line scan camera of the image acquisition system of the flexible OLED cell according to an embodiment of the present invention detects the four corners of the flexible OLED cell, and set the inner region based on the detection edge and the detection edge It is characterized by photographing by setting the outer inspection area as a reference.

In addition, the image acquisition system of a flexible OLED cell according to an embodiment of the present invention is to inspect the flexible panel of 4 inches to 5.5 inches, detect foreign matters having a size of 50㎛ * 50㎛, two sheets placed in parallel Image processing and detection are performed on the cells, and two cells placed in parallel are simultaneously imaged within 1.5 seconds, and foreign material or crack detection is processed within 2.4 seconds per sheet.

According to the image acquisition system of the flexible OLED cell of the present invention, within 4 seconds by minimizing the vibration applied to the flexible OLED cell and taking a line scan image at a high speed of 100 mm / s at high speed while irradiating light with high brightness and high uniformity. The effect is that you can scan an image and process it within two seconds.

Hereinafter, embodiments of the present invention will be described in detail.

An image acquisition system of a flexible OLED cell according to an embodiment of the present invention, the mounting table is a flexible OLED cell is mounted and has a vibration limit value within 10㎛; A line scan camera which automatically sets an inspection area corresponding to the loading of the flexible OLED cell in the mounting table and moves at a speed of 100 mm / s to photograph the flexible OLED cell; A high resolution lens mounted to the line scan camera; Illumination for irradiating light toward the flexible OLED cell photographed by the line scan camera and irradiating light of high brightness and high uniformity such that a gray difference is less than 10 in the entire image; And controlling an automatic setting of a line rate in response to a speed change of the line scan camera, controlling an optimum acceleration and deceleration setting for movement of the line scan camera, and distortion occurring in the captured image. And an image controller for correcting the image.

The line scan camera of an image acquisition system of a flexible OLED cell according to an embodiment of the present invention detects four corners of the flexible OLED cell, sets an inner region based on the detection edge, and based on the detection edge. You can shoot by setting the outer inspection area. An image acquisition system of a flexible OLED cell according to an embodiment of the present invention inspects a flexible panel of 4 inches to 5.5 inches, detects foreign substances having a size of 50 ㎛ * 50 ㎛, and placed in two cells in parallel Image processing and detection can be performed, and two cells placed in parallel can be simultaneously imaged within 1.5 seconds, and foreign matter or crack detection can be processed within 2.4 seconds per sheet.

As such, the image acquisition system of the flexible OLED cell of the present invention relates to a system for obtaining accurate images at high speed with respect to a flexible panel having a size of 4 inches to 5.5 inches. According to the image acquisition system of the flexible OLED cell of the present invention, within 4 seconds of image scanning and within 2 seconds of image processing, an optimal image can be obtained using a strobe high-brightness led light, and an image correction technique is used according to motion movement. You can get a video.

In general, the inspection using a line scan camera moves at a moving speed of about 50mm / sec. However, in order to meet the total image scan time of 4 seconds, the speed of the constant section should be increased to about 100mm / sec. Higher amounts of light are required to acquire high-speed line scan images. The faster the line scan moves, the less light the camera receives and the darker the image. Therefore, in the present invention, a high-brightness high-speed line scan illumination is applied, and a uniform image can be obtained even at a high speed moving speed rather than a general speed. The most important part of the system in the image acquisition and inspection system is designed to minimize vibration during line scan inspection. It is designed to apply the equipment foot and frame sufficiently to minimize the vibration by supporting the equipment stably. Even when moving at high speed, the vibration quality within 10um can optimize the image quality.

If the line rate is slightly misaligned when acquiring a line scan camera image at high speed, the image may be distorted. The image acquisition system of the flexible OLED cell of the present invention is automatically set to a clear line rate according to the speed change, so that an image can be optimally obtained. Even if the image obtained by the ultra-fast line scan is optimally adjusted, the image can be corrected through its own algorithm for distortion that may occur in the image, and the foreign material and crack detection can be performed in the corrected image. In addition, it is possible to apply the optimum acceleration / deceleration to minimize the speed and vibration when acquiring the image while moving at high speed.

As described above, although the present invention has been described by way of limited embodiments and drawings, the present invention is not limited to the above embodiments, and those skilled in the art to which the present invention pertains various modifications and variations from such descriptions. This is possible.

Therefore, the scope of the present invention should not be limited to the described embodiments, but should be determined not only by the claims below but also by the equivalents of the claims.

Claims (3)

In an image acquisition system of a flexible OLED (Organic Light Emitting Diode) cell,
A mount on which the flexible OLED cell rests and has a vibration limit of less than 10 μm;
A line scan camera that automatically sets an inspection area corresponding to the loading of the flexible OLED cell on the mounting table and moves at a speed of 100 mm / s to photograph the flexible OLED cell;
A high resolution lens mounted to the line scan camera;
Illumination for irradiating light toward the flexible OLED cell photographed by the line scan camera and irradiating light of high brightness and high uniformity such that a gray difference is less than 10 in the entire image; And
Control the automatic setting of the line rate in response to the speed change of the line scan camera, control the optimum acceleration and deceleration setting for the movement of the line scan camera, and control the distortion generated in the captured image. Image control for image correction
Including,
The line scan camera detects four edges of the flexible OLED cell, sets an inner region based on the detected edge, and sets an outer inspection region based on the detected edge,
Inspect the flexible panel of 4 inches to 5.5 inches, detect foreign matters having a size of 50 μm * 50 μm, perform image processing and detection on two cells placed in parallel, and apply the two cells placed in parallel The image acquisition system of the flexible OLED cell, characterized in that the image processing within 1.5 seconds at the same time and the foreign material or crack detection within 2.4 seconds per sheet.

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