KR102066714B1 - Optical inspection apparatus for tilted lighting - Google Patents

Abstract

The present invention relates to an optical inspection apparatus for tilted irradiation, and more specifically, is designed to allow an illumination light to enter a camera when photographing through a guide main body where the camera is connected and an illumination unit provided at the guide main body and irradiating the illumination light. In particular, the illumination unit is configured to slide so as to solve a problem that a light amount of the incident light is reduced when an irradiation surface, which is the surface to be photographed, is a curved surface, and therefore it is possible to clearly photograph the irradiation surface having a variety of inclined surfaces.

Description

Optical inspection device for tilt irradiation {OPTICAL INSPECTION APPARATUS FOR TILTED LIGHTING}

The present invention relates to an optical inspection device for inclined irradiation, and more particularly, a guide main body to which the camera is connected, and provided in the guide main body so that the illumination light can be incident on the camera when the image is photographed through an illumination unit irradiating the illumination light. In particular, the illumination unit is provided to be slidably movable, and thus, when the irradiation surface, that is, the surface to be photographed is a curved surface, the light amount of the incident light is reduced, thereby solving the problem of clearly photographing the irradiation surface having various inclined surfaces. The present invention relates to an optical inspection device for tilt irradiation.

In general, there are two methods of taking an image of a plane object, which is an object commonly used in industrial fields. First, if the camera shoots vertically on a plane target, use coaxial illumination. If the camera shoots on a plane target, not vertically, use a bar or surface light that illuminates the lighting to match the tilt. Done.

Accordingly, when photographing an image of a curved plane, there is a need for a light that can be used in such a way that an appropriate lighting is separately used and a light that needs to be adjusted according to the inclination slope is easily adjusted through one light.

Such a prior art is a registered Patent No. 10-1248184 "vision inspection lighting device" (hereinafter referred to as "prior art 1"),

The prior art 1 applies a reflection mirror of the illumination light as a total reflection mirror so as to utilize all of the illumination light, and forms a slit hole in the reflection mirror so that the illumination light incident from the inspected object passes through the camera, thereby reducing the amount of illumination light. And to prevent the refraction of incident light, thereby improving the contrast and clarity of the inspected image of the subject to perform more accurate vision inspection, and to mount the reflection mirror to move linearly, coaxial lighting effect, three-dimensional lighting It proposes a vision inspection lighting device that can exhibit various lighting effects such as effects and side lighting effects.

However, although the prior art 1 may exhibit coaxial lighting effects, three-dimensional lighting effects, and side lighting effects as the reflective mirror is moved, in the case of forming a complex inclined surface, the position of the reflecting mirror is determined according to the bending angle of each inclined surface. In the case of irradiating at the same time, there is a problem in that the subject is not clearly photographed as the amount of light varies depending on each surface and is incident with a dark or too bright light amount.

In addition, when the distance between the reflecting mirror and the light source is far away, the amount of light decreases in proportion to the square of the distance between the reflecting mirror and the light source.

Another conventional technology is Patent No. 10-1364148 "Camera mobile automatic optical inspection device" (hereinafter referred to as "prior art 2"),

The prior art 2 is a transfer roller for continuously conveying the inspection target base material; At least one mobile camera that acquires a surface image of a corresponding area by continuously photographing in a longitudinal direction of an inspection target base material based on an image acquisition range having a width smaller than an entire width of the inspection target base material; At least one coaxial light positioned at a front side of the camera and radiating light to the inspection target base material in the same path as the image acquisition path of the mobile camera; A linear stage having the mobile camera and the coaxial illumination installed to reciprocate the mobile camera and the coaxial illumination in a width direction of the inspection target base material; And controlling the linear stage such that the position of the mobile camera is moved in the width direction of the inspection target base material when the inspection target base material is transferred by a predetermined sampling interval in a longitudinal direction, and the image obtained by the mobile camera for each sampling interval. The control unit performs a sampling inspection on the entire area of the inspection target base material by using a control unit for detecting a defect of the inspection target base material.

However, the prior art 2 clarifies the photographing result by transporting the base material to be photographed and reciprocating the camera to photograph, thereby always causing a coaxial lighting effect. Similar to the above-mentioned prior art 1, there is a hassle that needs to be taken by moving each area separately.

Furthermore, there is another conventional technology, which is registered Patent No. 10-1865338, "Line width measuring apparatus and line width measuring method using the same" (hereinafter referred to as "prior art 3"),

The prior art 3 includes a substrate support, a first lighting unit, a reflecting unit, an image acquisition unit, and a control unit. The line width measuring method of the present invention includes a horizontal adjustment step, a light irradiation step, an image acquisition step, The line width calculation step is included. According to the present invention, the light irradiated toward the substrate is specularly reflected by the reflector, and the light reflected from the reflector is captured by the image acquisition unit to acquire an image having a pair of contrast boundaries formed on both sides of the inclined surface of the circuit pattern. A technique for calculating the line width of a circuit pattern by measuring the distance between pairs of contrast lines is proposed.

However, in the related art 3, the light is irradiated to the circuit pattern and the contrast image is obtained based on the inclined plane. In the light irradiation, as shown in the drawing, the first lighting unit should be provided on both sides of the image acquisition unit. In particular, although it is suitable for photographing a circuit pattern formed on a plane, there is a problem that it is difficult to capture an accurate image because the amount of light incident on the image acquisition unit is changed by the incident angle and the reflection angle of the light when the curved surface is provided.

Therefore, the present invention has been made to solve the above problems,

And a guide body to which a camera for photographing is connected, and a sliding unit provided to be slidably movable on the guide body and irradiating a light source to the irradiation surface. The irradiation unit slides the illumination unit according to the curved surface of the irradiation surface. An object of the present invention is to provide an optical inspection device for inclined irradiation, which allows the illumination light reflected by the surface to be incident on the entire surface of the imaging surface.

In order to achieve the above object, the tilt inspection optical inspection device according to the present invention

In the optical inspection device for obtaining the inspection image of the irradiation surface through the illumination light reflected from the irradiation surface and incident to the camera,

A guide body to which the camera is connected;

An illumination unit coupled to the guide body and including a housing, a light source provided in the housing to emit illumination light, and a half mirror to reflect the illumination light of the light source to an irradiation surface;

Including but not limited to,

The illumination unit may be slidably moved from the guide body to move the illumination unit according to the curvature of the irradiation surface so that the illumination light reflected from the irradiation surface is incident on the entire surface of the imaging surface.

As described above, the optical inspection device for tilt irradiation according to the present invention

The guide body to which the camera is connected and coupled to the guide body, consisting of a lighting unit for irradiating the illumination light, according to the curvature of the irradiation surface sliding the moving unit from the guide body irradiation of the imaging surface and the lighting unit of the image It is possible to fit the area, so that it is not necessary to replace the lighting, move the reflection mirror or adjust the inclination to measure various inclined surfaces of the conventional curved surface, so that the irradiation surface can be clearly captured regardless of the ease of use and the curved surface. Has an effect.

In addition, as the distance between the half mirror and the light source is kept constant, the amount of light decreases with distance.

According to the curved surface provided with a plurality of inspection devices, or by unifying the inspection device to adjust the direction or the irradiation angle according to the inclination, the irradiation surface can be taken with a simpler configuration.

1 is a perspective view of an optical inspection device for inclined irradiation according to the present invention
2 is a table related to a change in light quantity of a light source
Figure 3 is an embodiment when using the first embodiment of the present invention fixedly
Figure 4 is an embodiment of a first embodiment of the optical inspection device for tilt irradiation according to the present invention
5 is an embodiment when using a second embodiment of the present invention fixedly
Figure 6 is an embodiment of a second embodiment of the optical inspection device for inclined irradiation according to the present invention

Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

Since the present invention may be modified in various ways and have various forms, embodiments (or embodiments) will be described in detail in the text. However, this is not intended to limit the present invention to the specific form disclosed, it should be understood to include all modifications, equivalents, and substitutes included in the spirit and scope of the present invention.

In each of the drawings, the same reference numerals, in particular, the tens and ones digits, or the same digits, tens and ones, and the same alphabet, refer to members having the same or similar functions, and unless otherwise specified, each member in the figures The member referred to by the reference numeral may be regarded as a member conforming to these criteria.

In addition, in the drawings, the components are exaggerated in size (or thick) in size (or thick) in size (or thin) or simplified in consideration of the convenience of understanding and the like, thereby limiting the scope of protection of the present invention. It should not be.

The terminology used herein is for the purpose of describing particular embodiments (suns, aspects, and embodiments) (or embodiments) only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. In this application, the terms “comprises” or “consists” are intended to indicate that there is a feature, number, step, operation, component, part, or combination thereof described on the specification, but one or more other features. It is to be understood that the present invention does not exclude the possibility of the presence or the addition of numbers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art. Terms such as those defined in the commonly used dictionaries should be construed as having meanings consistent with the meanings in the context of the related art and shall not be construed in ideal or excessively formal meanings unless expressly defined in this application. Do not.

As shown in FIG. 1, the tilt inspection optical inspection device A according to the present invention includes a guide main body 10 to which a camera is connected, and an illumination unit 20 slidably coupled to the guide main body 10. The lighting unit 20 is made of a housing 21, a light source 23 and a half mirror 25, characterized in that the guide body 10 consists of two embodiments according to the sliding movement method. It is done.

First, the irradiation surface in the present specification refers to the surface of the object to be photographed, and the illumination light means light emitted from the light source 23 described later, and the imaging surface is like a CCD or CMOS sensor of a film or a digital camera. It refers to the device or the area of the device that serves to receive light from the light collecting portion of the camera, the image can be taken more clearly when sufficient light flows into the imaging surface.

When the inclined inspection target surface (hereinafter referred to as 'inclined surface') of the inspected object is composed of a single inclined plane or a plurality of inclined planes having various inclinations, the present invention is irradiated with one unit without the need to separately install a unit for illuminating the illumination light. Irrespective of the inclination of the surface, the illumination light can be incident on the entire surface of the image pickup surface, characterized in that the captured image can be more clearly secured.

Let's look at each structure first

First, the guide main body 10 is provided with a connecting portion 11 for connecting the camera, and the upper portion of the connecting portion 11 is provided with a movable mounting portion 13 to which the lighting unit 20 is movable.

In addition, the lighting unit 20 is provided to be slidably movable from the guide body 10, and is provided with a sliding protrusion 211 corresponding to the movable mounting portion 13 of the guide body 10.

Further, the guide protrusions 133 are provided at both sides of the upper surface of the guide body 10 to prevent the illumination unit 20 from being separated and to be slidable.

More precisely, the first embodiment of the present invention (FIG. 1 [A]) guides the illumination unit 20 in the longitudinal direction (hereinafter referred to as the longitudinal direction based on FIG. 3 [A]). It is provided to be movable horizontally from the main body 10, the sliding protrusion 211 is coupled into the guide protrusion 133, the horizontal movement is possible.

In addition, in the first embodiment, the direction in which the illumination unit moves refers to a linear movement along a horizontal plane in an inclined direction of the irradiation surface.

That is, the present invention is designed to photograph the inclined irradiation surface even in the structure in which the optical inspection device is fixed, without the need to operate the optical inspection device to be parallel to the inclined surface.

In addition, the second embodiment (Fig. 1 [B]) is made so that the swing unit to draw a circular arc when the lighting unit 20 slidingly moves from the guide body 10 in the longitudinal direction, for this purpose The upper surface of the guide body 10 is provided with a circular arc-shaped sliding groove 131 on the basis of the virtual center point, and a sliding protrusion coupled to the sliding groove, to move along the sliding groove to swing the lighting unit. In this case, the shape of the sliding protrusion is preferably implemented in the same manner as the shape of the sliding groove.

That is, the sliding protrusion is inserted into the sliding groove, so that the sliding protrusion is made to move along the sliding groove, so that the lighting unit can swing.

In addition, in the second embodiment, the direction in which the illumination unit moves refers to a swing movement along the horizontal plane in the inclined direction of the irradiation surface.

That is, the present invention is designed to photograph the inclined irradiation surface even in a structure in which the optical inspection device is fixed, without the need to operate the optical inspection device to be parallel to the inclined surface.

Here, the center point of the arc is preferably located on a virtual center axis extending vertically from the camera imaging plane because the light reflected from the irradiation plane can be effectively incident on the camera imaging plane. And the radius of the said arc is adjusted according to the separation distance between a camera imaging surface and an inspection object surface (irradiation surface).

In addition, the sliding protrusion and the sliding groove are opposite to each other, that is, the sliding protrusion may be provided in the guide body, the sliding groove may be provided in the lighting unit, this should not be limited interpretation of the scope.

Referring to the lighting unit 20 is slidably coupled to the guide body 10 again, the lighting unit 20 is provided in the movable mounting portion 13 of the guide body 10, which will be described later Comprised of the enclosure 21 is blocked in all directions to prevent the light of the lighting unit 20 is leaked, an entrance hole 212 is formed on the lower surface of one side of the housing 21 for the illumination light to enter the imaging surface of the camera, Reflecting hole 213 in which the illumination light is emitted to the upper surface of one side of the enclosure 21, more precisely the upper surface of the position corresponding to the incident hole 212, the illumination light is reflected through the half mirror 25 to illuminate the irradiation surface ) Is formed.

That is, the illumination light is reflected through the half mirror 25 and irradiated through the reflection hole 213, and the illumination light reflected by the irradiation surface passes through the reflection hole 213 and the half mirror 25 again to enter the incident hole ( 212) has a structure flowing into the image pickup surface of the camera.

To this end, the lighting unit 20 is further provided with a member for irradiating light,

First, it comprises a light source 23 for irradiating the illumination light, and a half mirror 25 for reflecting the illumination light to the irradiation surface through the reflecting hole 213,

The half mirror 25 is inclined with respect to the bottom surface of the illumination unit 20 and the enclosure 21 between the reflective hole 213 and the entrance hole 212, more preferably inclined at 45 degrees It is made to reflect the light of the light source 23 to the reflective hole (213).

That is, as shown in the figure, the light source 23 is provided on the other side of the housing 21 is provided to irradiate the illumination light to the half mirror 25 in the horizontal direction from the housing 21.

Furthermore, the enclosure 21 fixes the light source 23 to the other side, and fixes the half mirror 25 on an imaginary line perpendicular to the light source, through which the light source 23 and the half mirror ( As the distance of 25 may be kept constant, a problem of light reduction according to the distance between the light source 23 and the half mirror 25 may be solved.

The half mirror 25 does not reflect the incoming illumination light at 100%, but is made to be partially transmitted. This is to allow the illumination light described later to enter the incident hole 212 through the half mirror 25. to be.

Furthermore, by further providing a diffusion plate 27 between the half mirror 25 and the light source 23, it is preferable to maintain the light quantity uniformly, but the scope of rights should not be limitedly interpreted.

That is, the light has a straightness, the illumination light exiting the light source 23 through the diffuser plate 27 and reaches the half mirror 25 is reflected by the half mirror 25 to irradiate the irradiation surface as illumination light, The irradiated light is reflected again to pass through the half mirror 25 as illumination light and enter the imaging surface.

The present invention can minimize the amount of light loss by sliding the illumination unit 20 to be perpendicular to the image pickup surface is reflected at an angle symmetrical to the angle of the light reflected from the irradiation surface, reflected from the irradiation surface.

In addition, although not shown in the drawing, when the guide body 10 is mounted on the camera, it is preferable that the user can be rotated, rotated relative to the camera so that the user can change the direction according to the curved surface to shoot, more preferably. Preferably, the connecting portion 11 of the guide body 10 is provided to be rotatable from the movable mounting portion 13 so that it can be implemented.

In addition, the operation of the lighting unit, the user can be moved manually, but can also be configured to automatically control using a separate motor, etc., a separate fixing device for fixing the movement and then to be provided It should not be construed as limiting the scope of rights.

Due to the configuration as described above, the present invention is designed to slide the illumination unit 20 from the guide body 10, so that even if there is a curvature on the irradiation surface, the illumination light can be introduced into the image pickup surface so that the image can be taken more clearly As will be described below in detail the effect of the inclination angle formed by the irradiation surface with reference to the drawings.

In addition, as mentioned above, the effective illumination light irradiated from the light source is reflected by the half mirror and then illuminates the irradiation surface, and the light reflected from the irradiation surface must penetrate the half mirror and enter the imaging surface to capture a clear image. ,

Conversely, assuming that light comes from the imaging surface, the light reflected by the half mirror is irradiated back to the half mirror, and the light reflected by the half mirror must flow into the light source, so that the light reflected from the irradiation surface reaches the half mirror. Otherwise, the light is caused by an invalid light source, and through this principle, it is checked whether the illumination light of the light source is incident on the entire surface of the imaging surface.

First, a description will be given of a first embodiment, that is, an embodiment in which the lighting unit 20 is configured to move linearly from the guide body 10.

First, Figure 3 is a conventional technique, that is set to a fixed type (similar to the prior art) does not move the lighting unit 20, as shown in the figure, when the irradiation surface is a flat surface of the lighting unit 20 Even if it is impossible to move, it is possible to take clear images by the coaxial effect. Even when the inclination angle of the irradiation surface is small (up to about 7.5 degrees inclination), it is not a coaxial effect but the light reflected from the half mirror 25 is captured. Because it can flow in, photography is possible.

However, when it is made at an angle greater than that, shooting is impossible. Referring to the case where the inclination angle is 10 degrees or 12 degrees, as shown in FIG. 3, the light reflected from the half mirror 25, that is, the illumination light is hardly incident on the imaging surface. can see.

On the contrary, Figure 4 shows the movement of light in the case of sliding the lighting unit 20 from the guide body 10 as in the present invention under the same conditions (including the case where the inclination angle is small),

As shown in the figure, when looking at the illumination light incident on the imaging surface in reverse, the range of the illumination light is reflected through the half mirror 25 is introduced into the light source 23, the light of the light source 23 flows into the imaging surface In this case, it is possible to ensure a clearer captured image.

At this time, Figure 3 shows a picture of the amount of light emitted from the light source, in general, the light has a straightness, but also has a scattering property and the light from the light source can be spread everywhere. However, the light within a range of about 13 degrees with respect to the straight line direction from the light source can be made similar to the light coming from the straight line, but the light spreading in all directions, that is, the scattered light can be seen that the light amount is lowered have.

Therefore, in the present invention, even if the scattered light enters the imaging surface, the amount of light is very insufficient to obtain a clear image, and thus, it is designed to allow effective light having a straightness to flow into the imaging surface.

5 and 6 illustrate effects related to the second embodiment of the present invention, and first, a case in which the lighting unit 20 is fixed without moving is described with reference to FIG. 5. )

First, consider the case of plane, 4 degree slope, 8 degree slope and 12 degree slope,

As in the above-described first embodiment, it can be seen that in the case of the plane and the inclined plane of 4 degrees, the illumination light can be introduced into the imaging surface even if the illumination unit 20 is not moved. However, when the inclination of 8 degrees, the inflow of the illumination light is small, it is difficult to take a clear picture, and in the case of 12 degrees it can be seen that the illumination light cannot enter the imaging surface.

However, as shown in FIG. 6, when the sliding unit 20 is slidably moved, when the sliding movement distance is changed according to the inclined surface, as the illumination light flows into the imaging surface, a clear photographed image may be secured.

Furthermore, looking at Figure 6 in more detail, the plane, the four-degree slope, the eight-degree slope is a state showing the state in which the lighting unit 20 is moved about 2 degrees, even if the lighting unit 20 is moved only 2 degrees plane and 4 It can be seen that both the inclined plane and the inclined plane can be photographed both.

That is, even if the irradiation surface to be irradiated has a complex inclination within a range of up to 8 degrees, it is possible to move all the clear picture by moving about 2 degrees without moving the lighting unit 20 according to each inclination It is said to improve convenience.

In addition, in the above description of the present invention with reference to the accompanying drawings has been described mainly for the optical inspection device for inclined irradiation having a specific shape, structure and configuration, the present invention can be variously modified, changed and replaced by those skilled in the art, such Modifications, changes and substitutions should be construed as falling within the protection scope of the present invention.

A: Optical inspection device for tilt irradiation
10: guide body 11: connecting portion
13: moving mounting portion 131: sliding groove
133: guide protrusion 20: lighting unit
21: enclosure 211: sliding projection
212: entrance hole 213: reflection hole
23: light source 25: half mirror
27: diffuser plate

Claims (4)

An optical inspection apparatus for photographing an inspection image of an irradiation surface through illumination light reflected from an irradiation surface and incident on an imaging surface of a camera,
A guide body to which the camera is connected;
An illumination unit coupled to the guide body and including a housing, a light source provided in the housing to emit illumination light, and a half mirror to reflect the illumination light of the light source to an irradiation surface;
Including but not limited to,

The illumination unit is provided to be slidably movable from the guide body to move the illumination unit according to the curvature of the irradiation surface so that the illumination light reflected from the irradiation surface is incident to the entire surface of the imaging surface, characterized in that Inspection device. The method of claim 1,
The guide body is provided with a linear guide projection, the housing of the lighting unit is provided with a sliding projection moving in close contact with the inner surface of the guide projection,
The optical inspection device for tilt irradiation, characterized in that the illumination unit is made to move linearly from the guide body. The method of claim 1,
The guide body has an arc-shaped sliding groove is formed, the housing of the lighting unit is provided with a sliding projection coupled to the sliding groove,
The optical inspection device for tilt irradiation, characterized in that the lighting unit is made to swing along the shape of the sliding groove. The method of claim 2 or 3,
The half mirror is provided to be inclined from the bottom of the lighting unit,
An optical inspection apparatus for inclined irradiation between the light source and the half mirror further comprises a diffusion plate for transmitting illumination light.

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