KR102052384B1 - 미세 자기 측정 검출 시스템 및 자성 재료들의 자기 시그너처를 검출하기 위한 방법 - Google Patents

미세 자기 측정 검출 시스템 및 자성 재료들의 자기 시그너처를 검출하기 위한 방법 Download PDF

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KR102052384B1
KR102052384B1 KR1020157004027A KR20157004027A KR102052384B1 KR 102052384 B1 KR102052384 B1 KR 102052384B1 KR 1020157004027 A KR1020157004027 A KR 1020157004027A KR 20157004027 A KR20157004027 A KR 20157004027A KR 102052384 B1 KR102052384 B1 KR 102052384B1
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magnetic
sensor
curve
voltage
particles
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KR20150083072A (ko
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페리알 테르키
아즈제디네 보우스세크소우
쿠앙 훙 트란
소우레이마네 카마라
김철기
김건우
필리프 간디트
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유니베르시테 드 몽펠리에
쌩뜨레 나티오날 데 라 르세르쉬 생띠끄 (씨. 엔. 알. 에스)
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G01R33/072—Constructional adaptation of the sensor to specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/12—Measuring magnetic properties of articles or specimens of solids or fluids
    • G01R33/1269—Measuring magnetic properties of articles or specimens of solids or fluids of molecules labeled with magnetic beads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G01N27/74—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids
    • G01N27/745—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables of fluids for detecting magnetic beads used in biochemical assays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165—Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/091—Constructional adaptation of the sensor to specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/096—Magnetoresistive devices anisotropic magnetoresistance sensors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nanotechnology (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
KR1020157004027A 2012-07-13 2013-07-12 미세 자기 측정 검출 시스템 및 자성 재료들의 자기 시그너처를 검출하기 위한 방법 Expired - Fee Related KR102052384B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP12305852.1A EP2685273A1 (en) 2012-07-13 2012-07-13 Micromagnetometry detection system and method for detecting magnetic signatures of magnetic materials
EP12305852.1 2012-07-13
PCT/EP2013/064775 WO2014009516A1 (en) 2012-07-13 2013-07-12 Micromagnetometry detection system and method for detecting magnetic signatures of magnetic materials.

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KR20150083072A KR20150083072A (ko) 2015-07-16
KR102052384B1 true KR102052384B1 (ko) 2019-12-06

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US (1) US9389285B2 (enExample)
EP (2) EP2685273A1 (enExample)
JP (1) JP6335894B2 (enExample)
KR (1) KR102052384B1 (enExample)
CN (1) CN104969085B (enExample)
BR (1) BR112015000765A2 (enExample)
ES (1) ES2585007T3 (enExample)
IN (1) IN2015DN00254A (enExample)
RU (1) RU2621486C2 (enExample)
WO (1) WO2014009516A1 (enExample)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9817078B2 (en) 2012-05-10 2017-11-14 Allegro Microsystems Llc Methods and apparatus for magnetic sensor having integrated coil
US10316872B2 (en) * 2012-08-27 2019-06-11 The Board Of Trustees Of The Leland Stanford Junior University Two-dimensional magnetic trap arrays for droplet control
US10495699B2 (en) 2013-07-19 2019-12-03 Allegro Microsystems, Llc Methods and apparatus for magnetic sensor having an integrated coil or magnet to detect a non-ferromagnetic target
US10145908B2 (en) 2013-07-19 2018-12-04 Allegro Microsystems, Llc Method and apparatus for magnetic sensor producing a changing magnetic field
US9823092B2 (en) 2014-10-31 2017-11-21 Allegro Microsystems, Llc Magnetic field sensor providing a movement detector
JP2016223945A (ja) * 2015-06-01 2016-12-28 Tdk株式会社 ガス検出装置
EP3208627B1 (en) 2016-02-19 2021-09-01 Université de Montpellier Measurement system and method for characterizing at least one single magnetic object
DE102016106213A1 (de) * 2016-04-05 2017-10-05 Baier & Köppel GmbH & Co. KG Schmierstoffverteiler mit magnetoresistivem Sensor und Verfahren zur Überwachung eines Schmierstoffverteilers
EP3252461B1 (en) * 2016-06-02 2021-05-26 Universite De Montpellier A magnetic measurement system based on an ultrasensitive planar hall magnetoresistive biosensor (phr) and a method for measuring low specific bioparticles concentrations and quantifying bio-particles interactions
JP6799450B2 (ja) * 2016-12-12 2020-12-16 株式会社東海理化電機製作所 磁気センサ
CN106932737B (zh) * 2017-02-27 2019-03-19 上海理工大学 基于膜层增材加工的原子磁力传感器制备方法
CN107085191A (zh) * 2017-04-19 2017-08-22 天津大学 用于磁导率测量的传感器及测量方法
US11428755B2 (en) 2017-05-26 2022-08-30 Allegro Microsystems, Llc Coil actuated sensor with sensitivity detection
US10837943B2 (en) 2017-05-26 2020-11-17 Allegro Microsystems, Llc Magnetic field sensor with error calculation
US10996289B2 (en) 2017-05-26 2021-05-04 Allegro Microsystems, Llc Coil actuated position sensor with reflected magnetic field
EP3418759B1 (en) * 2017-06-23 2020-02-19 Universite De Montpellier Magnetic hybrid amr/phr based sensing device and method for measuring a local magnetic field
FR3069650B1 (fr) * 2017-07-26 2020-11-06 Sysnav Procede de calibration d'un magnetometre
US10901051B2 (en) 2017-08-15 2021-01-26 Uchicago Argonne, Llc Ferromagnetic particles as ultra-sensitive non-linear response labels for magnetic particles imaging (MPI) and sensing applications
JP7001513B2 (ja) * 2018-03-22 2022-01-19 株式会社東海理化電機製作所 磁気センサ
JP2019216322A (ja) * 2018-06-11 2019-12-19 株式会社東海理化電機製作所 磁気センサ装置
CN109283119B (zh) * 2018-10-16 2024-03-08 北京信息科技大学 一种油液磨粒在线监测电感传感器试验台
CN109884563B (zh) * 2019-02-26 2021-04-30 电子科技大学 一种磁性金属薄膜易磁化方向的测试方法
TWI693418B (zh) 2019-03-22 2020-05-11 宇能電科技股份有限公司 校正磁場產生裝置及其具有自我校正磁場能力的磁場感測器與校正方法
CN110068718B (zh) * 2019-05-30 2022-01-04 山东联合电力产业发展有限公司 一种电阻分压的电子式互感器
CN110161113B (zh) * 2019-06-04 2023-05-26 中国科学院微电子研究所 磁性单粒子探测装置及其制造方法、磁性单粒子探测方法
WO2021094587A1 (en) * 2019-11-13 2021-05-20 eV-Technologies Spin-wave based magnetic and/or electro-magnetic field sensing device for dc, rf and millimeter-wave applications
US11262422B2 (en) 2020-05-08 2022-03-01 Allegro Microsystems, Llc Stray-field-immune coil-activated position sensor
CN111707729B (zh) * 2020-06-11 2022-09-13 清华大学 声发射频谱系统及评估马氏体钢磁处理降低界面能的方法
CN112649768B (zh) * 2020-12-31 2021-12-21 北京航空航天大学 一种结合锁放处理的脉冲式nv色心磁场测量方法
CN113063839B (zh) * 2021-02-09 2023-01-17 于孟今 一种基于磁隧道结的湿度探测器
CN113063841B (zh) * 2021-02-09 2022-05-17 江门市润宇传感器科技有限公司 一种高灵敏湿度探测器
CN113063840B (zh) * 2021-02-09 2022-09-13 苏州市迈佳凯电子科技有限公司 一种基于磁电阻效应的湿度探测器
US11493361B2 (en) 2021-02-26 2022-11-08 Allegro Microsystems, Llc Stray field immune coil-activated sensor
US11578997B1 (en) 2021-08-24 2023-02-14 Allegro Microsystems, Llc Angle sensor using eddy currents
US20240393067A1 (en) * 2021-08-30 2024-11-28 President And Fellows Of Harvard College Methods, devices, and systems for control of heat transfer using spin crossover
KR102752881B1 (ko) * 2022-10-14 2025-01-10 재단법인대구경북과학기술원 3축 자기장 감지 장치 및 방법
CN119780136A (zh) * 2024-12-27 2025-04-08 安徽理工大学 一种漂浮水稻种植区表层沉积物中磁性矿物的提取与检测方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007500347A (ja) 2003-07-30 2007-01-11 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 改善されたｓｎｒを持つチップ上磁性粒子センサ
JP2009531706A (ja) 2006-03-30 2009-09-03 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 温度センサとしての磁気抵抗センサ

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6242908B1 (en) * 1996-01-17 2001-06-05 Allegro Microsystems, Inc. Detection of passing magnetic articles while adapting the detection threshold
EP1092988B1 (en) * 1999-10-13 2007-04-11 HILTI Aktiengesellschaft Inductive sensor arrangement and method for detecting ferrous objects
US6518747B2 (en) * 2001-02-16 2003-02-11 Quantum Design, Inc. Method and apparatus for quantitative determination of accumulations of magnetic particles
CN1570661A (zh) * 2003-07-16 2005-01-26 张奔牛 一种测量微磁场的方法及其高灵敏传感器
JP4756868B2 (ja) * 2005-01-31 2011-08-24 キヤノン株式会社 検出方法
CN104042214A (zh) * 2007-01-24 2014-09-17 皇家飞利浦电子股份有限公司 用于影响和/或探测作用区域中的磁性粒子的方法、磁性粒子以及磁性粒子的使用
GB0704359D0 (en) * 2007-03-07 2007-04-11 Byotrol Plc Methods and apparatus for particle detection
RU2530715C2 (ru) * 2008-10-16 2014-10-10 Конинклейке Филипс Электроникс Н.В. Способ и устройство для определения количества магнитно меченных целевых компонентов
CN201576087U (zh) * 2009-11-03 2010-09-08 上海交通大学 弱磁性材料磁力测量装置
KR101093776B1 (ko) * 2010-01-21 2011-12-19 충남대학교산학협력단 자기 센서

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007500347A (ja) 2003-07-30 2007-01-11 コーニンクレッカ　フィリップス　エレクトロニクス　エヌ　ヴィ 改善されたｓｎｒを持つチップ上磁性粒子センサ
JP2009531706A (ja) 2006-03-30 2009-09-03 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 温度センサとしての磁気抵抗センサ

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KR20150083072A (ko) 2015-07-16
RU2015104778A (ru) 2016-09-10
EP2872911A1 (en) 2015-05-20
US9389285B2 (en) 2016-07-12
BR112015000765A2 (pt) 2017-06-27
ES2585007T3 (es) 2016-10-03
RU2621486C2 (ru) 2017-06-06
US20150168507A1 (en) 2015-06-18
IN2015DN00254A (enExample) 2015-06-12
EP2872911B1 (en) 2016-05-25
WO2014009516A1 (en) 2014-01-16
JP2015524919A (ja) 2015-08-27
EP2685273A1 (en) 2014-01-15
CN104969085A (zh) 2015-10-07
JP6335894B2 (ja) 2018-05-30
CN104969085B (zh) 2018-03-02

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