KR102025849B1 - Device for reducing voc and control method thereof - Google Patents

Device for reducing voc and control method thereof Download PDF

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KR102025849B1
KR102025849B1 KR1020120145685A KR20120145685A KR102025849B1 KR 102025849 B1 KR102025849 B1 KR 102025849B1 KR 1020120145685 A KR1020120145685 A KR 1020120145685A KR 20120145685 A KR20120145685 A KR 20120145685A KR 102025849 B1 KR102025849 B1 KR 102025849B1
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temperature
regeneration
voc
damper
temperature sensor
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KR1020120145685A
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KR20130113304A (en
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김규범
조인수
유병옥
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주식회사 원방테크
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67248Temperature monitoring
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment

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Abstract

The present invention relates to a VOC abatement apparatus and a control method thereof, the VOC abatement apparatus of the present invention, the first damper for treatment and the second damper for processing are respectively provided at both ends connected to the clean zone (zone); A first damper for regeneration provided at an outside air inlet of the body; A VOC treatment rotor for adsorbing VOCs in the outside air while passing through the cooling zone the outside air introduced through the first damper for regeneration, and desorbing the adsorbed moisture by the heating air while passing through the regeneration zone; A plurality of heating coils for regeneration heating the air treated in the cooling zone of the VOC treatment rotor before supplying the air to the regeneration zone; Second and third dampers for regeneration provided on a regeneration air discharge passage communicating with the outside air inlet; A plurality of temperature sensors provided between the regenerative heating coil and the VOC processing rotor and on the regenerative air discharge passage to sense respective temperatures; A fire extinguishing agent injection module for injecting a extinguishing agent when all of the temperature sensing values of the plurality of temperature sensors exceed a set value or a portion of the plurality of temperature sensors exceeds a set value; And a VOC reduction device controller provided outside the body to control whether the VOC reduction device is operated and the temperature according to the deviation of the temperature sensing values sensed by the plurality of temperature sensors.
According to the present invention, by using the injection pressure of the extinguishing agent to be injected in the event of an emergency such as a fire as a drive source for driving the damper, the structure is simple, the manufacturing cost is reduced, and a plurality of sensors for detecting the temperature of the heating coil is provided Therefore, there is an effect that can determine whether the failure of the sensor according to the temperature deviation degree.

Figure R1020120145685

Description

JOC reduction device and control method {DEVICE FOR REDUCING VOC AND CONTROL METHOD THEREOF}

The present invention relates to a VOC abatement apparatus and a control method thereof, and more particularly, to a VOC abatement apparatus and a control method thereof capable of improving driving conditions of a module for injecting a extinguishing agent in the process of processing VOC of indoor air.

In general, a large amount of VOCs are generated due to the development of the semiconductor and LCD industries due to the chemicals used in the manufacture of wafers and LCD panels, and a VOC treatment rotor is employed to process such VOCs.

VOCs may be present in the liquid or solid phase at room temperature and pressure, but can be defined as any organic compound present in the gas phase in the atmosphere. It is used to refer to all organic materials that can exist in the gaseous state at room temperature and atmospheric pressure, such as hydrocarbons composed of carbon and hydrogen only, halogenated hydrocarbons, nitrogen or sulfur-containing hydrocarbons, and also broadly include semi-volatile organic compounds.

The VOC treatment rotor passes the gas containing the organic solvent between the end faces of the rotatable VOC treatment rotor made of the adsorption element to adsorb the organic solvent to the adsorption element, and blows off the organic solvent attached to the adsorption element in a reverse direction by blowing hot air. It is also a device for purifying by blowing and blowing to restore the adsorption element to a reusable state.

In particular, a rotary type adsorber for organic solvents equipped with a conventional adsorption element rotates a VOC treated rotor in a holding case divided into an adsorption zone, a cooling zone, and a regeneration zone, whereby one end surface of the VOC treated rotor is rotated. The adsorption zone and regeneration zone are temporarily set in the air, and when the surface of the VOC treated rotor passes through the adsorption zone, the organic solvent is adsorbed by the adsorption element which supported the gas containing the organic solvent in the VOC treated rotor, and the organic solvent in the cooling zone. The adsorbed organic solvent is removed by passing the regeneration air heated to a temperature above the boiling point temperature of 180 ° C. to 200 ° C. through the inside of the adsorption element from the end face opposite to the above end face.

Among the gases containing an organic solvent, for example, gases generated in a semiconductor component manufacturing process or the like are, for example, DMSO (dimethylsulfoxide), MEA (monoethanol amine), HMDS (hexamethylene disilazane), or the like. Contains organic compounds. These organic compounds cannot be removed sufficiently at a regeneration temperature of 180 ° C to 200 ° C. For this reason, such organic compounds only accumulate in the VOC-treated rotor, causing deterioration of performance and the loss of the VOC-treated rotor. In order to remove such organic compounds, high temperature air heated to 200 to 350 ° C. must be sent from the regeneration zone to the VOC treatment rotor.

A technology related to such a VOC abatement device has been proposed in Patent Registration No. 0970114.

Hereinafter, the structure of the VOC abatement apparatus disclosed in Patent Registration No. 0970114 as a prior art will be briefly described.

1 is a structural diagram showing a VOC reduction device in the patent registration No. 0970114 (hereinafter referred to as 'prior art'). As shown in FIG. 1, a VOC processing rotor 1 made of a honeycomb-like processing material of the prior art 1, and a rotation driving means M for rotationally driving the VOC processing rotor 1, process a VOC in a room. Air after passing through the cooling zone (1c) of the VOC treatment rotor (1) adsorbing the VOC contained in the room to be transferred to the regeneration heater (5) by the regeneration fan (4) and heated, A VOC abatement apparatus, which is supplied to a regeneration zone 1b of the processing rotor 1 and is heated by heated air while passing through the regeneration zone to remove adsorbed moisture and is exhausted through a regeneration air discharge passage to remove the VOC. A temperature sensor unit TE and a thermo controller TIC are installed between the processing rotor 1 and the regeneration heater 5, and the temperature measured by the temperature sensor unit TE is the VOC processing rotor 1. Re-closing only when the temperature is below the first temperature as the initial measurement temperature. The first regeneration damper 31 is rotatably supported at the inner circumferential end of the live air discharge passage.

However, in the conventional VOC reducing device, the first regenerative damper 31, the second regenerative damper 32, and the refractory damper 41 are operated by solenoid valves MVD1, MVD2, and MVD3 operated by applying power. Since it is driven individually, there is a problem that the manufacturing cost increases according to the drive source required.

KR 0970114 B1

An object of the present invention is to solve the problems of the prior art as described above, by using the injection pressure of the extinguishing agent to be injected in the event of an emergency such as a fire as a drive source for driving the damper, while the structure is simple, manufacturing cost is reduced The present invention provides a VOC reduction apparatus and a control method thereof, which are provided with a plurality of sensors for detecting a temperature of a heating coil to determine whether a sensor malfunctions according to a degree of temperature deviation.

In addition, another object of the present invention is to provide a VOC abatement apparatus and a control method for preventing abuse of the extinguishing agent through proper use by spraying the extinguishing agent only when the spraying conditions of the predetermined extinguishing agent are satisfied. It is.

According to a feature of the present invention for achieving the object as described above, the present invention, the first damper for processing and the second damper for processing are respectively provided at both ends connected to the clean zone (zone); A first damper for regeneration provided at an outside air inlet of the body; A VOC treatment rotor for adsorbing VOCs in the outside air while passing through the cooling zone the outside air introduced through the first damper for regeneration, and desorbing the adsorbed moisture by the heating air while passing through the regeneration zone; A plurality of heating coils for regeneration heating the air treated in the cooling zone of the VOC treatment rotor before supplying the air to the regeneration zone; Second and third dampers for regeneration provided on a regeneration air discharge passage communicating with the outside air inlet; A plurality of temperature sensors provided between the regenerative heating coil and the VOC processing rotor and on the regenerative air discharge passage to sense respective temperatures; A fire extinguishing agent injection module for injecting a extinguishing agent when all of the temperature sensing values of the plurality of temperature sensors exceed a set value or a portion of the plurality of temperature sensors exceeds a set value; And a VOC reduction device controller provided outside the body to control the operation and temperature of the VOC reduction device according to the deviation of the temperature sensing value detected by the plurality of temperature sensors.

The temperature sensor may include first to fifth temperature sensors, and the first to fourth temperature sensors are sequentially provided between the regenerative heating coil and the VOC processing rotor, and the fifth temperature is measured. The sensor may be provided on the regeneration air discharge passage.

The first temperature sensor may detect an upper limit value and a lower limit value according to temperatures of the plurality of regenerative heating coils.

In addition, the extinguishing agent injection module may be controlled to operate through a controller for disaster prevention means additionally connected to the temperature controller.

In addition, the extinguishing agent injection module, the extinguishing agent receiving unit is stored therein extinguishing agent; A fire extinguishing agent spraying unit having one end in communication with the extinguishing agent receiving unit for injecting a extinguishing agent by a control signal; The other end of the extinguishing agent receiving portion and the other end is in communication with each other to provide a driving force to selectively drive the first and second dampers for treatment and the first and second dampers for regeneration through the injection pressure of the extinguishing agent It may include a piston.

In addition, when the extinguishing agent is injected, at least one of the first and second dampers for treatment and the first and second dampers for regeneration may be pre-closed, and the third damper for treatment may be later closed after a predetermined time.

In addition, the third damper for regeneration may be controlled to be opened when the regeneration fan disposed to communicate with the regeneration air discharge passage of the body and closed when the regeneration fan is stopped.

In addition, the present invention comprises the steps of checking the power state; Operating the processing fan and the regeneration fan when the power is on and opening the regeneration damper; Driving the VOC processing rotor after opening the regeneration damper; If the sensing temperature of the first temperature sensor is smaller than the first temperature and the sensing temperature of the first temperature sensor is smaller than the fifth temperature by operating the regeneration heating coil after driving the VOC processing rotor, the processing is performed. Starting all of the fans; Outputting a normal indication for fire monitoring when the sensing temperature of the second temperature sensor is less than the second temperature or when the sensing temperature of the third temperature sensor is less than the second temperature in the normal operation state in which the processing fans are all operated; Outputting a fire occurrence alarm when a flame is detected; Stopping the operation of the processing fan, the heating coil for regeneration and the VOC processing rotor after the fire occurrence alarm is output; And closing the regeneration damper and the processing damper while turning on the solenoid after the regeneration fan is stopped to allow the drug to be discharged.

Further, when the power is OFF, the operation of the reheating heating coil and the processing fan is stopped, and when the sensed temperature of the fourth temperature sensor is lower than the seventh temperature, the operation of the regeneration fan is stopped. The method may further include stopping the operation of the VOC abatement device after closing the damper.

Further, when the sensing temperature of the first temperature sensor is greater than the first temperature, the regenerative heating coil is stopped. If the sensing temperature of the first temperature sensor is less than the sixth temperature, before the regenerative heating coil is operated. The method may further include moving to step.

The method may further include outputting an alarm when all of the processing fans have not been operated and increasing the number of rotations of the processing fan to control the normal air volume.

In addition, when the sensing temperature of the third temperature sensor is greater than the second temperature, a fire alarm is output and the operation of the reheating heating coil is stopped, and the sensing temperature of the second temperature sensor is greater than or equal to the second temperature. When the sensing temperature at the third temperature sensor is greater than the second temperature, the sensing temperature at the third temperature sensor is greater than the third temperature while the sensing temperature at the second temperature sensor is greater than the third temperature, or The method may further include outputting a fire alarm if one of the cases where the sensing temperature at the temperature sensor is greater than the fourth temperature or the sensing temperature at the second temperature sensor is greater than the fourth temperature is satisfied. have.

According to the present invention, by using the injection pressure of the extinguishing agent to be injected in the event of an emergency such as a fire as a drive source for driving the damper, the structure is simple, the manufacturing cost is reduced, and a plurality of sensors for detecting the temperature of the heating coil is provided Therefore, there is an effect that can determine whether the failure of the sensor according to the temperature deviation degree.

In addition, the present invention has the effect of preventing the abuse of the extinguishing agent through proper use by injecting the extinguishing agent only when the predetermined spraying conditions of the extinguishing agent are satisfied.

1 is a structural diagram showing a VOC reducing device of the prior art.
2 is a schematic view showing the structure of a VOC reducing apparatus according to the present invention.
3A and 3B are flowcharts illustrating a control method of the VOC reducing apparatus according to the present invention.

The terms or words used in the present specification and claims are meant to be consistent with the technical spirit of the present invention on the basis of the principle that the inventor can appropriately define the concept of the term in order to best explain his invention. It must be interpreted as and concepts.

Throughout the specification, when a part is said to "include" a certain component, it means that it can further include other components, without excluding other components unless otherwise stated. In addition, the term "... unit" described in the specification means a unit for processing at least one function or operation, which may be implemented in hardware or software or a combination of hardware and software.

Hereinafter, a configuration of an embodiment of a VOC reducing apparatus according to the present invention will be described in detail with reference to the accompanying drawings.

2 is a schematic view of the structure of the VOC abatement apparatus according to the present invention.

According to this figure, the VOC reduction apparatus 100 according to the present embodiment includes a body 110, a first damper 120 for processing, a second damper 130 for processing, a first damper 140 for regeneration, and a VOC. Process rotor 150, regenerative heating coil 160, temperature sensor 170, regenerative second damper 180, regenerative third damper 190, extinguishing agent injection module 200, VOC abatement controller 210 and the controller 220 for disaster prevention means.

The body 110 is connected to communicate with a clean zone such as a clean room while the first damper 120 and the second damper 130 are disposed on both sidewalls, respectively. The outside air inlet 112 having the first damper 140 and the regeneration air discharge port 114 communicating with the regeneration air discharge passage 116 are formed at the other end of the upper surface. At this time, the outside air inlet 112 may be provided with a processing fan (not shown in the drawing) forcibly introducing the outside air.

In addition, a plurality of processing fans 122 for forcibly introducing outside air may be provided on the side of the first damper 120 for processing, which is the inlet direction of the body 110. do. On the other hand, when some of the three processing fan 122 is broken by an electrical or mechanical defect, the three operating the fan by increasing the number of rotation of the remaining processing fan 122 by the control of the VOC reduction device controller 210 It can be made equal to the air volume of the case.

At this time, in the body 110, the treatment air is forcibly transferred to the adsorption zone 156 of the VOC treatment rotor 150 by the treatment fan 122, and the treated air is processed through the adsorption zone 156. Thereafter, the processing air exiting the adsorption zone 156 is cooled by the cooling coil 118 and then supplied to a clean zone of the target space. Here, the cooling coil 118 may be omitted.

The first damper 120 for processing is provided at the inlet side of the body 110 into which outside air is introduced to open and close the inlet side of the body 110 according to whether the extinguishing agent injection module 200 to be described later is operated. It is opened at the inflow of outside air and closed at the time of emergency such as fire.

The second damper 130 for treatment is provided at the outlet side of the body 110 through which the treatment air is discharged, and opens and closes the outlet side of the body 110 according to whether the extinguishing agent injection module 200 to be described later is operated. It is open when inflow of outside air and closed in case of emergency such as fire.

Here, the treatment first damper 120 and the treatment second damper 130 are closed in an emergency such as a fire to prevent the extinguishing agent from being discharged to the outside.

Regeneration first damper 140 is installed in the outside air inlet 112 of the body 110 to open and close the outside air inlet 112 of the body 110 according to the operation of the extinguishing agent injection module 200 to be described later. It is opened at the inflow of outside air and closed at the time of emergency such as fire.

The VOC-treated rotor 150 is a continuously arranged along the rotational direction of the rotor by using an adsorbent layer using an adsorbent such as silica gel, zeolite, activated carbon, etc. as a component, and in the direction along the rotation axis. The cylindrical shape which can pass a gas is adopted.

At this time, the VOC processing rotor 150 is made of a honeycomb-like processing material, and further includes a rotation driving unit (not shown in the drawing) for rotating the processing rotor.

Furthermore, the VOC processing rotor 150 is divided into a cooling zone 152, a regeneration zone 154, and an adsorption zone 156 in the rotational direction, and these three zones are arranged in the order described above. As a result, when the VOC (Volatile Organic Compounds) is treated with the rotation of the processing rotor, the respective parts are transferred in the order of the regeneration zone 154, the cooling zone 152, and the adsorption zone 156.

The reheating heating coil 160 is provided in plural and functions to heat the air treated in the cooling zone 152 of the VOC processing rotor 150 before supplying it to the regeneration zone 154. In this embodiment, Illustrates that a dog is installed. Here, the reason why the plurality of reheating heating coils 160 are provided is that dividing the heating temperature into two rather than controlling the entire heating temperature by one may reduce the operating load.

The temperature sensor 170 includes a plurality of first temperature sensors TE1, second temperature sensors TE2, third temperature sensors TE3, and third between the regenerative heating coil 160 and the VOC processing rotor 150. 4, a temperature sensor TE4 is provided in the direction from the regenerative heating coil 160 to the VOC processing rotor 150 to sense the ambient temperature of the regenerative heating coil 160 and onto the regenerative air discharge passage 116. The fifth temperature sensor TE5 is provided to sense the temperature of the regenerated air exhausted.

The first temperature sensor TE1, the second temperature sensor TE2, the third temperature sensor TE3, the fourth temperature sensor TE4, and the fifth temperature sensor TE5 are each a VOC reduction device controller 210. ) Is electrically connected to the sensor to transmit sensing values. The first temperature, the second temperature, the first temperature sensor TE1, the second temperature sensor TE2, the third temperature sensor TE3, the fourth temperature sensor TE4, and the fifth temperature sensor TE5 may be used. The third temperature, the fourth temperature, the fifth temperature, the sixth temperature, and the seventh temperature can be detected.

The first temperature sensor TE1 simultaneously detects the first temperature and the sixth temperature, which are the temperatures of the before and after reheating heating coil 160, and the second temperature sensor TE2 simultaneously detects the second temperature and the alarm temperature. The third temperature sensor TE3 detects a fire alarm temperature which is a third temperature, the fourth temperature sensor TE4 detects a fire alarm temperature which is a fourth temperature, and the fifth temperature sensor TE5 is a regeneration air discharge passage. The exhaust temperature, which is the fifth temperature emitted from 116, is always sensed. And the seventh temperature is the stop temperature of the regeneration fan P.

Here, as an example, if the range of each temperature is limited, the first temperature range is 230 to 250 ° C, the second temperature range is 250 to 300 ° C, the third temperature range is 240 to 260 ° C, and the fourth temperature range is It is 280-300 degreeC, the 5th temperature range is 40-60 degreeC, the 6th temperature range is 190-210 degreeC, and the 7th temperature range is 40-60 degreeC.

That is, the first temperature sensor TE1 is a heating coil for regeneration through a magnetic circuit MC controlled by the VOC reduction device controller 210 to turn on / off driving when the sensing temperature value is greater than the first temperature. The operation 160 is stopped, and when the sensing temperature value is less than the sixth temperature, the heating coil 160 for regeneration is operated through a magnetic circuit controlled by the VOC reduction device controller 210 to turn on / off the driving. This means that the first temperature sensor TE1 detects an upper limit value and a lower limit value according to the temperature of the front and rear regeneration heating coil 160.

As a result, the first temperature sensor TE1 stops the operation of the regenerative heating coil 160 when the sensing temperature is greater than the first temperature, and activates the regenerative heating coil 160 when the sensing temperature is smaller than the sixth temperature. It is.

The second temperature sensor TE2 provides a fire alarm signal to the VOC reduction device controller 210 when the VOC reduction device 100 maintains a normal operating state and the sensing temperature value is greater than the second temperature. If less than the second temperature is provided to the VOC abatement controller 210 to output a fire monitoring normal indication to the VOC abatement controller 210.

The third temperature sensor TE3 is configured to maintain a normal operating state of the VOC reducing device 100 like the second temperature sensor TE2, but when the sensing temperature value is greater than the third temperature, the third temperature sensor TE3 transmits a fire alarm signal to the VOC reducing device controller 210. If the sensing temperature value is less than the third temperature is provided to the VOC reduction device controller 210 to output a fire monitoring normal indication.

The fourth temperature sensor TE4 may operate the regeneration fan P when the sensing temperature value is lower than the seventh temperature while the regeneration heating coil 160 and the first, second and third processing fans 122 are turned off. It is provided to the VOC reduction device controller 210 to be turned off. Thereafter, the regeneration first damper 140 and the regeneration second damper 180 and the regeneration third damper 190 are closed after the set time, and the VOC reduction device 100 is stopped.

The fifth temperature sensor TE5 may generate an alarm signal when the sensing temperature value is less than the fifth temperature when the sensing temperature value is less than the first temperature in the first temperature sensor TE1. After providing to the processing fan 122 is turned on all, if the sensing temperature value is greater than the fifth temperature is provided to the VOC reduction device controller 210 so that all of the processing fan 122 can be turned on immediately.

On the other hand, when sensing the temperature using one temperature sensor 170, when electrical or mechanical defects occur in the sensor, the injection timing of the extinguishing agent is missed by the sensing error. In addition, when the sensing temperature is higher than the actual temperature of the actual temperature sensor 170 due to the failure of the temperature sensor 170, there is a problem that the injection of the extinguishing agent should not be sprayed.

As a result, as described above, when the temperature rise due to a flame or the like, the fire extinguishing agent should be sprayed, but the temperature is sensed to be low due to a sensor defect, and the fire extinguishing agent should not be sprayed. There is a need for a solution for the injection of extinguishing agents.

In order to solve such a problem, in the present invention, the sensing temperature of the reheating heating coil 160 includes a plurality of temperature sensors 170 including the first temperature sensor TE1, the second temperature sensor TE2, and the third temperature sensor TE3. ) And a fourth temperature sensor TE4 to detect all of the temperature detection values of the plurality of temperature sensors 170 exceed a set value, or sense a temperature of a portion of the plurality of temperature sensors 170. If the set value is satisfied, such as when the value exceeds the set value, it is controlled to spray the extinguishing agent. As a result, if the deviation is within the set value by putting a deviation in the temperature sensed by the plurality of temperature sensors 170, it is normal, if it is above the set value it can be recognized that there is an error in the sensor.

The second damper for regeneration 180 is provided in the middle of the lower end of the regeneration air discharge passage 116 communicating with the outside air inlet 112 of the body 110, and the regeneration according to whether the extinguishing agent injection module 200 will be described later. The air discharge passage 116 is opened and closed, and is opened when the outside air is introduced, and is closed in an emergency such as a fire.

The third damper 190 for regeneration is provided at the upper end of the regenerated air discharge passage 116 that is upper side of the second damper 180 for regeneration, and discharges the regenerated air according to whether the extinguishing agent injection module 200 to be described below is operated. The passage 116 is opened and closed, and is opened when the outside air is introduced, and is closed in an emergency such as a fire. In addition, the third damper 190 for regeneration is always set to an open state, and in case of an emergency fire, the third damper 190 receives power from the controller 220 for disaster prevention means and is set to operate rapidly in a closed state.

Furthermore, the third damper 190 for regeneration is opened when the regeneration fan P disposed in communication with the regeneration air outlet 114 of the body 110 is closed and closed when the regeneration fan P is stopped. Controlled through the VOC abatement controller 210.

Here, the regeneration first damper 170 and the regeneration second damper 180 are closed in an emergency such as a fire to prevent the extinguishing agent from being discharged to the outside as in the first and second dampers for treatment.

Fire extinguishing agent injection module 200 detects the ambient temperature of the heating coil 160 for regeneration in a plurality of temperature sensors 170, all of the plurality of temperature sensors exceeds a set value, or a plurality of temperature sensors 170 If some of the setting value exceeds the set value VOC reduction device controller 210 to send the operation signal to the controller 220 for disaster prevention means to inject the extinguishing agent. In another embodiment, the extinguishing agent injection module 200 is configured to regenerate the heating coil 160 for regeneration in the first temperature sensor TE1, the second temperature sensor TE2, the third temperature sensor TE3, and the fourth temperature sensor TE4. By sensing the ambient temperature, the fire extinguishing agent is sprayed by sending an operation signal from the VOC reduction device controller 210 to the controller 220 for disaster prevention means according to the amount of temperature deviation. At this time, the extinguishing agent injection module 200 includes a extinguishing agent accommodating part 202, a extinguishing agent injecting part 204, a piston 206, and the like.

The extinguishing agent accommodating part 202 is a space (container) in which the extinguishing agent is accommodated, and is operated by receiving an operation signal from the controller 220 for disaster prevention means.

The extinguishing agent accommodating part 202 is connected to the extinguishing agent injecting part 204 and the piston 206 by a pipe or a tube, or a valve (V :) as an example. Needle valve) is provided so that the operation of the valve (V) by the controller 220 for disaster prevention means.

Here, the valve (V) is provided with a solenoid (solenoid (not shown in the figure)) to operate the valve (V) while the solenoid is operated by the signal of the controller 220 for disaster prevention means.

The extinguishing agent spraying unit 204 is in communication with the extinguishing agent receiving unit 202 through a pipe or a tube, etc., and extinguishing agent contained in the extinguishing agent receiving unit 202 is injected when an operation signal of the controller 220 for disaster prevention means is output. The components are located close to the cooling zone 152, the regeneration zone 154 and the adsorption zone 156 in the interior of the body 110.

Piston 206 is in communication with the extinguishing agent receiving unit 202 through a pipe or tube, etc., when the extinguishing agent contained in the extinguishing agent receiving unit 202 is output when the operation signal of the controller 220 for disaster prevention means is extinguishing agent injection unit The first damper 120 for treatment, the second damper 130 for treatment and the first damper 140 for regeneration, the second damper 180 for regeneration, and the regenerating agent through the injection pressure at the same time at 204. 3 provides a driving force to selectively drive the damper 190.

In other words, the extinguishing agent spray module 200 is a fire extinguishing agent in the extinguishing agent injection unit 204 and the piston in the extinguishing agent receiving unit 202 with a pump or the like when the operation signal is output from the controller 220 for disaster prevention means Simultaneously conveyed toward the side 206, the extinguishing agent is injected from the extinguishing agent injection unit 204 and at the same time to advance the rod of the piston 206 by the injection pressure of the extinguishing agent and the first damper 120 for treatment, treatment agent The second damper 130, the first damper for regeneration 140, the second damper for regeneration 180, and the third damper for regeneration 190 may be selectively operated to close a specific damper.

When the extinguishing agent injection module 200 is operated to inject extinguishing agent, the first damper 120 for treatment, the second damper 130 for treatment, the first damper 140 for regeneration, and the second damper for regeneration ( 180) to selectively operate the third damper 190 for regeneration to close the inside of the body 110.

Meanwhile, when the extinguishing agent injection module 200 is operated, the first damper 120 for processing, the second damper 130 for processing, and the first damper 140 for regeneration through the control of the VOC reduction device controller 210. The second damper 180 for regeneration is closed earlier and the third damper 190 for regeneration is closed later. Thus, at least one of the first damper 120 for treatment, the second damper 130 for treatment, the first damper 140 for regeneration, and the second damper 180 for regeneration is first closed, and the third third for regeneration is performed. The damper 190 is closed later with a time difference to ensure safety in the process of spraying the extinguishing agent.

The VOC reduction device controller 210 is a main controller, which is provided outside the body 110 and includes a first temperature sensor TE1, a second temperature sensor TE2, a third temperature sensor TE3, and a fourth temperature sensor ( The first damper 120 for processing to control the temperature of the VOC reduction device 100 through the first to seventh temperatures according to the deviation of the temperature sensing value detected by TE4) and the fifth temperature sensor TE5. Whether the second damper 130 and the first damper 140 for regeneration, the second damper 180 for regeneration, and the third damper 190 for regeneration are opened and closed, the reheating heating coil 160 and the extinguishing agent injection The driving of the module 200 is controlled.

Disaster prevention means controller 220 is an auxiliary controller, and provides a drive signal to the extinguishing agent injection module 200 by the control of the VOC abatement controller 210 is electrically connected. Furthermore, the controller 220 for the disaster prevention means drives the fire extinguishing agent injection module 200, that is, the first damper 120 for treatment, the second damper 130 for treatment, and the first damper 140 for regeneration. In addition, a recognition module including a warning light or an alarm may be further provided to allow the operator to recognize the current situation visually or acoustically when the second damper 180 for regeneration and the third damper 190 for regeneration are closed. .

That is, when the VOC reduction device controller 210 outputs a drive signal to the disaster prevention means controller 220, the disaster prevention means controller 220 outputs a drive signal to the recognition module to drive the recognition module for a set time. After the extinguishing agent is injected through the extinguishing agent injection module 200, the first damper 120 for treatment, the second damper 130 for treatment, the first damper 140 for regeneration, and the second damper for regeneration ( After the 180 is closed and the regeneration fan P is stopped, the third damper 190 for regeneration is closed after a predetermined time.

Therefore, as shown in FIGS. 3A and 3B, the procedure according to the control method of the VOC reducing apparatus according to the present invention is as follows.

First, the VOC reduction apparatus 100 starts operation (S200) under the control of the VOC reduction apparatus controller 210.

Next, the VOC reduction device controller 210 checks the main power state (S201). In this case, when the main power is OFF, the control is turned off through the magnetic circuit of the heating coil 160 for regeneration (S202a), and the first, second, and third processing fans 112 are turned off (S202b), and then the fourth When the sensing temperature value of the temperature sensor TE4 is smaller than the seventh temperature (S202c), the regeneration fan P is turned off (S202d), and the first damper 140 for regeneration, the second damper 180 for regeneration, and the regeneration are performed. After closing all the third dampers 190 (S202e), the VOC reduction device 100 is stopped (S202f).

On the other hand, in the case of the main power supply ON (S202), the first, second and third processing fans 122 are sequentially operated (S203), and then the regeneration fan P is turned ON (S204). At this time, it is preferable that the sequential operating time of the first, second and third processing fans 122 is within 5 seconds, the regeneration fan P is operated after a set time delay, and the delay time is preferably within 5 seconds. Do.

Next, after the first, second, and third processing fans 122 are sequentially operated, the first damper 140 for regeneration, the second damper 180 for regeneration, and the regeneration are controlled by the control of the VOC reduction device controller 210. All of the third dampers 190 are opened (S205).

Next, after the VOC processing rotor 150 is driven (S206) while the rotary drive unit is driven by the control of the VOC reduction device controller 210, the reheating heating coil 160 is turned on (S207).

At this time, when the sensing temperature value of the first temperature sensor TE1 is greater than the first temperature (S208), the control of the VOC abatement controller 210 is controlled to stop the operation of the regenerative heating coil 160 (S208a). In addition, when a predetermined time passes and the sensing temperature value of the first temperature sensor TE1 is smaller than the sixth temperature (S208b), the heating heating coil 160 for regeneration is controlled by controlling the VOC reduction device controller 210 (S207b). Go to step).

On the other hand, when the sensing temperature value of the first temperature sensor TE1 is smaller than the first temperature (S208) and the sensing temperature value of the fifth temperature sensor TE5 is larger than the fifth temperature (S209), the alarm signal S209a After providing the VOC reduction device controller 210, all the processing fan 122 is turned on (S210), and if the sensing temperature value is less than the fifth temperature, all the processing fan 122 is turned on immediately (S210).

On the other hand, when the processing fan 122 is turned off, the rotation speed of the processing fan 122 is sensed. At this time, when some of the three processing fans 122 are stopped by a combination, the processing fan stops due to an alarm. Recognize (S210b) and then increase the number of revolutions of the processing fan 122 is operated to match the same amount of the three processing fan 122 air flow (S210a).

Thereafter, the VOC abatement apparatus 100 maintains a normal operating state (S211), and when the VOC abatement controller 210 starts to recognize that the normal operating state is maintained, sensing by the second temperature sensor TE2 is performed. Whether the temperature value is greater than the second temperature (S221), whether the sensing temperature value in the third temperature sensor (TE3) is greater than the second temperature (S231) and whether the flame is generated in the body 110 (S241) There are three cases to proceed.

In the case where the sensing temperature value of the first second temperature sensor TE2 is greater than the second temperature (S221), the second temperature sensor TE2 is configured to maintain the normal operating state while the VOC reduction device 100 maintains a normal operating state. If the value is greater than the second temperature, the fire alarm signal S232 is provided to the VOC abatement controller 210, and if the sensing temperature value is less than the second temperature, the fire monitoring normal indication is displayed on the VOC abatement controller 210. Provided to the VOC reduction device controller 210 to output (S222).

In the case where the sensing temperature value of the second temperature sensor TE3 is greater than the second temperature (S231), the third temperature sensor TE3 is the VOC reduction device 100 like the second temperature sensor TE2. Maintains a normal operation state and provides a fire alarm signal S232 to the VOC reduction device controller 210 when the sensing temperature value is greater than the third temperature, and the VOC reducing device when the sensing temperature value is smaller than the third temperature. Provided to the controller 210 to output the fire monitoring normal display (S222).

Next, after the sensing temperature value of the third temperature sensor TE3 is greater than the second temperature and the fire alarm signal is output, the regeneration heating coil 160 is turned off (S233).

Next, when the sensing temperature value in the second temperature sensor TE2 is greater than the second temperature (S234) and the sensing temperature value in the third temperature sensor TE3 is greater than the second temperature, the second temperature sensor ( Whether the sensing temperature value in the third temperature sensor TE3 is greater than the third temperature together with whether the sensing temperature value in the TE2) is greater than the third temperature (S236), and the third temperature sensor TE3 It is determined whether the sensing temperature value at is greater than the fourth temperature (S238) and whether the sensing temperature value at the second temperature sensor TE2 is greater than the fourth temperature (S239).

First, when the sensing temperature value of the second temperature sensor TE2 is greater than the third temperature with respect to whether the sensing temperature value of the second temperature sensor TE2 is greater than the third temperature (S236) It is determined whether the sensing temperature value of the third temperature sensor TE3 is greater than the third temperature (S237), and if the sensing temperature value of the third temperature sensor TE3 is greater than the third temperature, a fire occurrence alarm S212 is generated. And the sensing temperature value of the second temperature sensor TE2 is smaller than the third temperature and the sensing temperature value of the third temperature sensor TE3 is smaller than the third temperature. Returning between the operation OFF step S233 and the step S234 of inquiring whether the sensing temperature value at the second temperature sensor TE2 is smaller than the second temperature, and the sensing temperature value at the second temperature sensor TE2. A step S234 of inquiring whether the temperature is lower than the second temperature is performed.

Second, when the sensing temperature value of the third temperature sensor TE3 is greater than the fourth temperature with respect to whether the sensing temperature value of the third temperature sensor TE3 is greater than the fourth temperature (S238), a fire occurrence alarm ( S212).

Thirdly, if the sensing temperature value of the second temperature sensor TE2 is greater than the fourth temperature with respect to whether the sensing temperature value of the second temperature sensor TE2 is greater than the fourth temperature (S239), a fire occurrence alarm ( S212).

On the other hand, if the sensing temperature value of the third temperature sensor TE3 is smaller than the second temperature, it is added by +1 in the reset counter (S225), and the value added in the reset counter is greater than a (in this embodiment, a is an integer 4). In a small case (S224), the alarm and the operation of the reheating heating coil 160 are reset (S223).

Next, after the alarm and the operation of the heating coil 160 for regeneration (reset: S223) and outputs a signal to the fire monitoring normal indication (S222) to the VOC reduction device controller 210, the VOC reduction device controller 210 ) And maintains a normal operating state (S211) after the fire monitoring normal display (S222) output.

Next, while the sensing temperature value in the second temperature sensor TE2 is greater than the third temperature (S236), whether the sensing temperature value in the third temperature sensor TE3 is greater than the second temperature (S237), and 3 whether the sensing temperature value in the temperature sensor TE3 is greater than the fourth temperature (S238) and whether the sensing temperature value in the second temperature sensor TE2 is greater than the fourth temperature (S239), respectively, to determine the fire When the generation alarm S212 sounds, the powers of the first, second and third processing fans 122, the reheating heating coil 160, and the VOC processing rotor 150 are turned off (S213). After the set time delay, the playback fan P is turned off (S214).

Next, when the regeneration fan P is OFF (S214), the solenoid switch is turned on (S215) while outputting a signal from the VOC abatement device controller 210 to the controller 220 for disaster prevention means, and then the solenoid operates while hitting the valve. (V) is activated, and then the drug is released (S216) through the extinguishing agent injection unit 204.

Next, the first damper 120 for treatment, the second damper 130 for treatment, the first damper 140 for regeneration and the second damper 180 for regeneration are first closed and the third third for regeneration after a set time. The damper 190 is closed (S217).

As described above, the present invention has been described by way of limited embodiments and drawings, but the present invention is not limited to the above embodiments, and those skilled in the art to which the present invention pertains various modifications and variations from such descriptions. This is possible.

Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined not only by the claims below but also by the equivalents of the claims.

Claims (12)

A body having a first damper for treatment and a second damper for treatment respectively at both ends connected to and connected to a clean zone;
A first damper for regeneration provided at an outside air inlet of the body;
A VOC treatment rotor for adsorbing VOCs in the outside air while passing through the cooling zone the outside air introduced through the first damper for regeneration, and desorbing the adsorbed moisture by the heating air while passing through the regeneration zone;
A plurality of heating coils for regeneration heating the air treated in the cooling zone of the VOC treatment rotor before supplying the air to the regeneration zone;
Second and third dampers for regeneration provided on a regeneration air discharge passage communicating with the outside air inlet;
A plurality of temperature sensors provided between the regenerative heating coil and the VOC processing rotor and on the regenerative air discharge passage to sense respective temperatures;
A fire extinguishing agent injection module for injecting a extinguishing agent when all of the temperature sensing values of the plurality of temperature sensors exceed a set value or a portion of the plurality of temperature sensors exceeds a set value; And
It is provided on the outside of the body includes a VOC reduction device controller for controlling the operation and temperature of the VOC reduction device according to the deviation of the temperature sensing value detected by the plurality of temperature sensors,
The VOC reduction device controller
Checking a main power state;
Operating the processing fan and the regeneration fan when the power is on and opening the first regeneration damper;
Driving the VOC processing rotor after opening the first regeneration damper;
If the sensing temperature of the first temperature sensor is smaller than the first temperature and the sensing temperature of the first temperature sensor is smaller than the fifth temperature by operating the regeneration heating coil after driving the VOC processing rotor, the processing is performed. Starting all of the fans;
Outputting a normal indication for fire monitoring when the sensing temperature of the second temperature sensor is less than the second temperature or when the sensing temperature of the third temperature sensor is less than the second temperature in the normal operation state in which the processing fans are all operated; Outputting a fire occurrence alarm when a flame is detected;
Stopping the operation of the processing fan, the heating coil for regeneration and the VOC processing rotor after the fire occurrence alarm is output; And
Closing the regeneration damper and the processing damper while turning on the solenoid after the regeneration fan is stopped to allow the drug to be released;
VOC reducing apparatus for performing a control method of the VOC reducing apparatus comprising a.
The method of claim 1,
The temperature sensor includes a first temperature sensor to a fifth temperature sensor,
The first to fourth temperature sensors are sequentially provided from the regenerative heating coil to the VOC processing rotor, and the fifth temperature sensor is provided on the regenerative air discharge passage.
The method of claim 2,
The first temperature sensor is VOC reduction apparatus for detecting the upper limit value and the lower limit value according to the temperature of the plurality of regenerative heating coils.
The method of claim 1,
The fire extinguishing agent injection module is VOC reduction device is controlled to operate through a controller for disaster prevention means additionally connected to the controller.
According to claim 1, wherein the extinguishing agent injection module,
A fire extinguishing agent containing an extinguishing agent stored therein;
A fire extinguishing agent spraying unit having one end in communication with the extinguishing agent receiving unit for injecting a extinguishing agent by a control signal;
The other end of the extinguishing agent receiving portion and the other end is in communication with each other to provide a driving force to selectively drive the first and second dampers for treatment and the first and second dampers for regeneration through the injection pressure of the extinguishing agent VOC abatement device including a piston.
The method of claim 5,
And at least one of the first and second dampers for treatment and the first and second dampers for regeneration are pre-closed when the extinguishing agent is injected, and the third damper for treatment is later closed after a set time.
The method of claim 1,
And the third damper for regeneration is controlled to open when the regeneration fan disposed to communicate with the regeneration air discharge passage of the body and to be closed when the regeneration fan is stopped.
Checking a power state;
Operating the processing fan and the regeneration fan when the power is on and opening the regeneration damper;
Driving the VOC processing rotor after opening the regeneration damper;
If the sensing temperature of the first temperature sensor is smaller than the first temperature and the sensing temperature of the first temperature sensor is smaller than the fifth temperature by operating the regeneration heating coil after driving the VOC processing rotor, the processing is performed. Starting all of the fans;
Outputting a normal indication for fire monitoring when the sensing temperature of the second temperature sensor is less than the second temperature or when the sensing temperature of the third temperature sensor is less than the second temperature in the normal operation state in which the processing fans are all operated; Outputting a fire occurrence alarm when a flame is detected;
Stopping the operation of the processing fan, the heating coil for regeneration and the VOC processing rotor after the fire occurrence alarm is output; And
And closing the regeneration damper and the processing damper while turning on the solenoid after the regeneration fan is stopped to allow the drug to be discharged.
The method of claim 8,
When the power is OFF, the operation of the regeneration heating coil and the processing fan is stopped, and if the detection temperature of the fourth temperature sensor is less than the seventh temperature, the operation of the regeneration fan is stopped, and the regeneration damper is And closing the operation of the VOC abatement device after closing.
The method of claim 8,
When the sensing temperature of the first temperature sensor is greater than the first temperature, the regenerative heating coil is stopped. If the sensing temperature of the first temperature sensor is less than the sixth temperature, the operation is performed before the operation of the regenerative heating coil. Control method of the VOC abatement device further comprising the step of moving.
The method of claim 8,
And outputting an alarm when all of the processing fans are not operated, and increasing the rotation speed of the operating processing fan to control the normal air volume.
The method of claim 8,
If the sensing temperature of the third temperature sensor is greater than the second temperature, a fire alarm is output and the heating coil for regeneration is stopped, and the sensing temperature of the second temperature sensor is greater than the second temperature or the third temperature. If the sensed temperature at the sensor is greater than the second temperature,
When the sensing temperature in the second temperature sensor is greater than the third temperature and the sensing temperature in the third temperature sensor is greater than the third temperature, or the sensing temperature in the third temperature sensor is greater than the fourth temperature, And outputting a fire occurrence alarm when any one of the cases where the sensed temperature at the second temperature sensor is greater than the fourth temperature is satisfied.
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KR101483631B1 (en) * 2014-09-03 2015-01-16 주식회사 신성엔지니어링 Device for reducing VOC and control method thereof
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CN110007015A (en) * 2019-02-13 2019-07-12 华电智控(北京)技术有限公司 A kind of total volatile organism monitoring device

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JP2000042517A (en) * 1998-07-27 2000-02-15 Koog Tekunika:Kk Decomposition treating device for organic waste
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Publication number Priority date Publication date Assignee Title
JP2000042517A (en) * 1998-07-27 2000-02-15 Koog Tekunika:Kk Decomposition treating device for organic waste
JP6075602B2 (en) * 2012-08-13 2017-02-08 株式会社大一商会 Game machine

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