KR102025849B1 - Device for reducing voc and control method thereof - Google Patents
Device for reducing voc and control method thereof Download PDFInfo
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- KR102025849B1 KR102025849B1 KR1020120145685A KR20120145685A KR102025849B1 KR 102025849 B1 KR102025849 B1 KR 102025849B1 KR 1020120145685 A KR1020120145685 A KR 1020120145685A KR 20120145685 A KR20120145685 A KR 20120145685A KR 102025849 B1 KR102025849 B1 KR 102025849B1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67098—Apparatus for thermal treatment
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Abstract
The present invention relates to a VOC abatement apparatus and a control method thereof, the VOC abatement apparatus of the present invention, the first damper for treatment and the second damper for processing are respectively provided at both ends connected to the clean zone (zone); A first damper for regeneration provided at an outside air inlet of the body; A VOC treatment rotor for adsorbing VOCs in the outside air while passing through the cooling zone the outside air introduced through the first damper for regeneration, and desorbing the adsorbed moisture by the heating air while passing through the regeneration zone; A plurality of heating coils for regeneration heating the air treated in the cooling zone of the VOC treatment rotor before supplying the air to the regeneration zone; Second and third dampers for regeneration provided on a regeneration air discharge passage communicating with the outside air inlet; A plurality of temperature sensors provided between the regenerative heating coil and the VOC processing rotor and on the regenerative air discharge passage to sense respective temperatures; A fire extinguishing agent injection module for injecting a extinguishing agent when all of the temperature sensing values of the plurality of temperature sensors exceed a set value or a portion of the plurality of temperature sensors exceeds a set value; And a VOC reduction device controller provided outside the body to control whether the VOC reduction device is operated and the temperature according to the deviation of the temperature sensing values sensed by the plurality of temperature sensors.
According to the present invention, by using the injection pressure of the extinguishing agent to be injected in the event of an emergency such as a fire as a drive source for driving the damper, the structure is simple, the manufacturing cost is reduced, and a plurality of sensors for detecting the temperature of the heating coil is provided Therefore, there is an effect that can determine whether the failure of the sensor according to the temperature deviation degree.
Description
The present invention relates to a VOC abatement apparatus and a control method thereof, and more particularly, to a VOC abatement apparatus and a control method thereof capable of improving driving conditions of a module for injecting a extinguishing agent in the process of processing VOC of indoor air.
In general, a large amount of VOCs are generated due to the development of the semiconductor and LCD industries due to the chemicals used in the manufacture of wafers and LCD panels, and a VOC treatment rotor is employed to process such VOCs.
VOCs may be present in the liquid or solid phase at room temperature and pressure, but can be defined as any organic compound present in the gas phase in the atmosphere. It is used to refer to all organic materials that can exist in the gaseous state at room temperature and atmospheric pressure, such as hydrocarbons composed of carbon and hydrogen only, halogenated hydrocarbons, nitrogen or sulfur-containing hydrocarbons, and also broadly include semi-volatile organic compounds.
The VOC treatment rotor passes the gas containing the organic solvent between the end faces of the rotatable VOC treatment rotor made of the adsorption element to adsorb the organic solvent to the adsorption element, and blows off the organic solvent attached to the adsorption element in a reverse direction by blowing hot air. It is also a device for purifying by blowing and blowing to restore the adsorption element to a reusable state.
In particular, a rotary type adsorber for organic solvents equipped with a conventional adsorption element rotates a VOC treated rotor in a holding case divided into an adsorption zone, a cooling zone, and a regeneration zone, whereby one end surface of the VOC treated rotor is rotated. The adsorption zone and regeneration zone are temporarily set in the air, and when the surface of the VOC treated rotor passes through the adsorption zone, the organic solvent is adsorbed by the adsorption element which supported the gas containing the organic solvent in the VOC treated rotor, and the organic solvent in the cooling zone. The adsorbed organic solvent is removed by passing the regeneration air heated to a temperature above the boiling point temperature of 180 ° C. to 200 ° C. through the inside of the adsorption element from the end face opposite to the above end face.
Among the gases containing an organic solvent, for example, gases generated in a semiconductor component manufacturing process or the like are, for example, DMSO (dimethylsulfoxide), MEA (monoethanol amine), HMDS (hexamethylene disilazane), or the like. Contains organic compounds. These organic compounds cannot be removed sufficiently at a regeneration temperature of 180 ° C to 200 ° C. For this reason, such organic compounds only accumulate in the VOC-treated rotor, causing deterioration of performance and the loss of the VOC-treated rotor. In order to remove such organic compounds, high temperature air heated to 200 to 350 ° C. must be sent from the regeneration zone to the VOC treatment rotor.
A technology related to such a VOC abatement device has been proposed in Patent Registration No. 0970114.
Hereinafter, the structure of the VOC abatement apparatus disclosed in Patent Registration No. 0970114 as a prior art will be briefly described.
1 is a structural diagram showing a VOC reduction device in the patent registration No. 0970114 (hereinafter referred to as 'prior art'). As shown in FIG. 1, a
However, in the conventional VOC reducing device, the first
An object of the present invention is to solve the problems of the prior art as described above, by using the injection pressure of the extinguishing agent to be injected in the event of an emergency such as a fire as a drive source for driving the damper, while the structure is simple, manufacturing cost is reduced The present invention provides a VOC reduction apparatus and a control method thereof, which are provided with a plurality of sensors for detecting a temperature of a heating coil to determine whether a sensor malfunctions according to a degree of temperature deviation.
In addition, another object of the present invention is to provide a VOC abatement apparatus and a control method for preventing abuse of the extinguishing agent through proper use by spraying the extinguishing agent only when the spraying conditions of the predetermined extinguishing agent are satisfied. It is.
According to a feature of the present invention for achieving the object as described above, the present invention, the first damper for processing and the second damper for processing are respectively provided at both ends connected to the clean zone (zone); A first damper for regeneration provided at an outside air inlet of the body; A VOC treatment rotor for adsorbing VOCs in the outside air while passing through the cooling zone the outside air introduced through the first damper for regeneration, and desorbing the adsorbed moisture by the heating air while passing through the regeneration zone; A plurality of heating coils for regeneration heating the air treated in the cooling zone of the VOC treatment rotor before supplying the air to the regeneration zone; Second and third dampers for regeneration provided on a regeneration air discharge passage communicating with the outside air inlet; A plurality of temperature sensors provided between the regenerative heating coil and the VOC processing rotor and on the regenerative air discharge passage to sense respective temperatures; A fire extinguishing agent injection module for injecting a extinguishing agent when all of the temperature sensing values of the plurality of temperature sensors exceed a set value or a portion of the plurality of temperature sensors exceeds a set value; And a VOC reduction device controller provided outside the body to control the operation and temperature of the VOC reduction device according to the deviation of the temperature sensing value detected by the plurality of temperature sensors.
The temperature sensor may include first to fifth temperature sensors, and the first to fourth temperature sensors are sequentially provided between the regenerative heating coil and the VOC processing rotor, and the fifth temperature is measured. The sensor may be provided on the regeneration air discharge passage.
The first temperature sensor may detect an upper limit value and a lower limit value according to temperatures of the plurality of regenerative heating coils.
In addition, the extinguishing agent injection module may be controlled to operate through a controller for disaster prevention means additionally connected to the temperature controller.
In addition, the extinguishing agent injection module, the extinguishing agent receiving unit is stored therein extinguishing agent; A fire extinguishing agent spraying unit having one end in communication with the extinguishing agent receiving unit for injecting a extinguishing agent by a control signal; The other end of the extinguishing agent receiving portion and the other end is in communication with each other to provide a driving force to selectively drive the first and second dampers for treatment and the first and second dampers for regeneration through the injection pressure of the extinguishing agent It may include a piston.
In addition, when the extinguishing agent is injected, at least one of the first and second dampers for treatment and the first and second dampers for regeneration may be pre-closed, and the third damper for treatment may be later closed after a predetermined time.
In addition, the third damper for regeneration may be controlled to be opened when the regeneration fan disposed to communicate with the regeneration air discharge passage of the body and closed when the regeneration fan is stopped.
In addition, the present invention comprises the steps of checking the power state; Operating the processing fan and the regeneration fan when the power is on and opening the regeneration damper; Driving the VOC processing rotor after opening the regeneration damper; If the sensing temperature of the first temperature sensor is smaller than the first temperature and the sensing temperature of the first temperature sensor is smaller than the fifth temperature by operating the regeneration heating coil after driving the VOC processing rotor, the processing is performed. Starting all of the fans; Outputting a normal indication for fire monitoring when the sensing temperature of the second temperature sensor is less than the second temperature or when the sensing temperature of the third temperature sensor is less than the second temperature in the normal operation state in which the processing fans are all operated; Outputting a fire occurrence alarm when a flame is detected; Stopping the operation of the processing fan, the heating coil for regeneration and the VOC processing rotor after the fire occurrence alarm is output; And closing the regeneration damper and the processing damper while turning on the solenoid after the regeneration fan is stopped to allow the drug to be discharged.
Further, when the power is OFF, the operation of the reheating heating coil and the processing fan is stopped, and when the sensed temperature of the fourth temperature sensor is lower than the seventh temperature, the operation of the regeneration fan is stopped. The method may further include stopping the operation of the VOC abatement device after closing the damper.
Further, when the sensing temperature of the first temperature sensor is greater than the first temperature, the regenerative heating coil is stopped. If the sensing temperature of the first temperature sensor is less than the sixth temperature, before the regenerative heating coil is operated. The method may further include moving to step.
The method may further include outputting an alarm when all of the processing fans have not been operated and increasing the number of rotations of the processing fan to control the normal air volume.
In addition, when the sensing temperature of the third temperature sensor is greater than the second temperature, a fire alarm is output and the operation of the reheating heating coil is stopped, and the sensing temperature of the second temperature sensor is greater than or equal to the second temperature. When the sensing temperature at the third temperature sensor is greater than the second temperature, the sensing temperature at the third temperature sensor is greater than the third temperature while the sensing temperature at the second temperature sensor is greater than the third temperature, or The method may further include outputting a fire alarm if one of the cases where the sensing temperature at the temperature sensor is greater than the fourth temperature or the sensing temperature at the second temperature sensor is greater than the fourth temperature is satisfied. have.
According to the present invention, by using the injection pressure of the extinguishing agent to be injected in the event of an emergency such as a fire as a drive source for driving the damper, the structure is simple, the manufacturing cost is reduced, and a plurality of sensors for detecting the temperature of the heating coil is provided Therefore, there is an effect that can determine whether the failure of the sensor according to the temperature deviation degree.
In addition, the present invention has the effect of preventing the abuse of the extinguishing agent through proper use by injecting the extinguishing agent only when the predetermined spraying conditions of the extinguishing agent are satisfied.
1 is a structural diagram showing a VOC reducing device of the prior art.
2 is a schematic view showing the structure of a VOC reducing apparatus according to the present invention.
3A and 3B are flowcharts illustrating a control method of the VOC reducing apparatus according to the present invention.
The terms or words used in the present specification and claims are meant to be consistent with the technical spirit of the present invention on the basis of the principle that the inventor can appropriately define the concept of the term in order to best explain his invention. It must be interpreted as and concepts.
Throughout the specification, when a part is said to "include" a certain component, it means that it can further include other components, without excluding other components unless otherwise stated. In addition, the term "... unit" described in the specification means a unit for processing at least one function or operation, which may be implemented in hardware or software or a combination of hardware and software.
Hereinafter, a configuration of an embodiment of a VOC reducing apparatus according to the present invention will be described in detail with reference to the accompanying drawings.
2 is a schematic view of the structure of the VOC abatement apparatus according to the present invention.
According to this figure, the
The
In addition, a plurality of
At this time, in the
The
The
Here, the treatment
Regeneration
The VOC-treated
At this time, the
Furthermore, the
The reheating
The
The first temperature sensor TE1, the second temperature sensor TE2, the third temperature sensor TE3, the fourth temperature sensor TE4, and the fifth temperature sensor TE5 are each a VOC reduction device controller 210. ) Is electrically connected to the sensor to transmit sensing values. The first temperature, the second temperature, the first temperature sensor TE1, the second temperature sensor TE2, the third temperature sensor TE3, the fourth temperature sensor TE4, and the fifth temperature sensor TE5 may be used. The third temperature, the fourth temperature, the fifth temperature, the sixth temperature, and the seventh temperature can be detected.
The first temperature sensor TE1 simultaneously detects the first temperature and the sixth temperature, which are the temperatures of the before and after reheating
Here, as an example, if the range of each temperature is limited, the first temperature range is 230 to 250 ° C, the second temperature range is 250 to 300 ° C, the third temperature range is 240 to 260 ° C, and the fourth temperature range is It is 280-300 degreeC, the 5th temperature range is 40-60 degreeC, the 6th temperature range is 190-210 degreeC, and the 7th temperature range is 40-60 degreeC.
That is, the first temperature sensor TE1 is a heating coil for regeneration through a magnetic circuit MC controlled by the VOC
As a result, the first temperature sensor TE1 stops the operation of the
The second temperature sensor TE2 provides a fire alarm signal to the VOC
The third temperature sensor TE3 is configured to maintain a normal operating state of the
The fourth temperature sensor TE4 may operate the regeneration fan P when the sensing temperature value is lower than the seventh temperature while the
The fifth temperature sensor TE5 may generate an alarm signal when the sensing temperature value is less than the fifth temperature when the sensing temperature value is less than the first temperature in the first temperature sensor TE1. After providing to the
On the other hand, when sensing the temperature using one
As a result, as described above, when the temperature rise due to a flame or the like, the fire extinguishing agent should be sprayed, but the temperature is sensed to be low due to a sensor defect, and the fire extinguishing agent should not be sprayed. There is a need for a solution for the injection of extinguishing agents.
In order to solve such a problem, in the present invention, the sensing temperature of the reheating
The second damper for
The
Furthermore, the
Here, the regeneration
Fire extinguishing
The extinguishing
The extinguishing
Here, the valve (V) is provided with a solenoid (solenoid (not shown in the figure)) to operate the valve (V) while the solenoid is operated by the signal of the
The extinguishing
In other words, the extinguishing
When the extinguishing
Meanwhile, when the extinguishing
The VOC
Disaster prevention means
That is, when the VOC
Therefore, as shown in FIGS. 3A and 3B, the procedure according to the control method of the VOC reducing apparatus according to the present invention is as follows.
First, the
Next, the VOC
On the other hand, in the case of the main power supply ON (S202), the first, second and
Next, after the first, second, and
Next, after the
At this time, when the sensing temperature value of the first temperature sensor TE1 is greater than the first temperature (S208), the control of the
On the other hand, when the sensing temperature value of the first temperature sensor TE1 is smaller than the first temperature (S208) and the sensing temperature value of the fifth temperature sensor TE5 is larger than the fifth temperature (S209), the alarm signal S209a After providing the VOC
On the other hand, when the
Thereafter, the
In the case where the sensing temperature value of the first second temperature sensor TE2 is greater than the second temperature (S221), the second temperature sensor TE2 is configured to maintain the normal operating state while the
In the case where the sensing temperature value of the second temperature sensor TE3 is greater than the second temperature (S231), the third temperature sensor TE3 is the
Next, after the sensing temperature value of the third temperature sensor TE3 is greater than the second temperature and the fire alarm signal is output, the
Next, when the sensing temperature value in the second temperature sensor TE2 is greater than the second temperature (S234) and the sensing temperature value in the third temperature sensor TE3 is greater than the second temperature, the second temperature sensor ( Whether the sensing temperature value in the third temperature sensor TE3 is greater than the third temperature together with whether the sensing temperature value in the TE2) is greater than the third temperature (S236), and the third temperature sensor TE3 It is determined whether the sensing temperature value at is greater than the fourth temperature (S238) and whether the sensing temperature value at the second temperature sensor TE2 is greater than the fourth temperature (S239).
First, when the sensing temperature value of the second temperature sensor TE2 is greater than the third temperature with respect to whether the sensing temperature value of the second temperature sensor TE2 is greater than the third temperature (S236) It is determined whether the sensing temperature value of the third temperature sensor TE3 is greater than the third temperature (S237), and if the sensing temperature value of the third temperature sensor TE3 is greater than the third temperature, a fire occurrence alarm S212 is generated. And the sensing temperature value of the second temperature sensor TE2 is smaller than the third temperature and the sensing temperature value of the third temperature sensor TE3 is smaller than the third temperature. Returning between the operation OFF step S233 and the step S234 of inquiring whether the sensing temperature value at the second temperature sensor TE2 is smaller than the second temperature, and the sensing temperature value at the second temperature sensor TE2. A step S234 of inquiring whether the temperature is lower than the second temperature is performed.
Second, when the sensing temperature value of the third temperature sensor TE3 is greater than the fourth temperature with respect to whether the sensing temperature value of the third temperature sensor TE3 is greater than the fourth temperature (S238), a fire occurrence alarm ( S212).
Thirdly, if the sensing temperature value of the second temperature sensor TE2 is greater than the fourth temperature with respect to whether the sensing temperature value of the second temperature sensor TE2 is greater than the fourth temperature (S239), a fire occurrence alarm ( S212).
On the other hand, if the sensing temperature value of the third temperature sensor TE3 is smaller than the second temperature, it is added by +1 in the reset counter (S225), and the value added in the reset counter is greater than a (in this embodiment, a is an integer 4). In a small case (S224), the alarm and the operation of the reheating
Next, after the alarm and the operation of the
Next, while the sensing temperature value in the second temperature sensor TE2 is greater than the third temperature (S236), whether the sensing temperature value in the third temperature sensor TE3 is greater than the second temperature (S237), and 3 whether the sensing temperature value in the temperature sensor TE3 is greater than the fourth temperature (S238) and whether the sensing temperature value in the second temperature sensor TE2 is greater than the fourth temperature (S239), respectively, to determine the fire When the generation alarm S212 sounds, the powers of the first, second and
Next, when the regeneration fan P is OFF (S214), the solenoid switch is turned on (S215) while outputting a signal from the VOC
Next, the
As described above, the present invention has been described by way of limited embodiments and drawings, but the present invention is not limited to the above embodiments, and those skilled in the art to which the present invention pertains various modifications and variations from such descriptions. This is possible.
Therefore, the scope of the present invention should not be limited to the described embodiments, but should be defined not only by the claims below but also by the equivalents of the claims.
Claims (12)
A first damper for regeneration provided at an outside air inlet of the body;
A VOC treatment rotor for adsorbing VOCs in the outside air while passing through the cooling zone the outside air introduced through the first damper for regeneration, and desorbing the adsorbed moisture by the heating air while passing through the regeneration zone;
A plurality of heating coils for regeneration heating the air treated in the cooling zone of the VOC treatment rotor before supplying the air to the regeneration zone;
Second and third dampers for regeneration provided on a regeneration air discharge passage communicating with the outside air inlet;
A plurality of temperature sensors provided between the regenerative heating coil and the VOC processing rotor and on the regenerative air discharge passage to sense respective temperatures;
A fire extinguishing agent injection module for injecting a extinguishing agent when all of the temperature sensing values of the plurality of temperature sensors exceed a set value or a portion of the plurality of temperature sensors exceeds a set value; And
It is provided on the outside of the body includes a VOC reduction device controller for controlling the operation and temperature of the VOC reduction device according to the deviation of the temperature sensing value detected by the plurality of temperature sensors,
The VOC reduction device controller
Checking a main power state;
Operating the processing fan and the regeneration fan when the power is on and opening the first regeneration damper;
Driving the VOC processing rotor after opening the first regeneration damper;
If the sensing temperature of the first temperature sensor is smaller than the first temperature and the sensing temperature of the first temperature sensor is smaller than the fifth temperature by operating the regeneration heating coil after driving the VOC processing rotor, the processing is performed. Starting all of the fans;
Outputting a normal indication for fire monitoring when the sensing temperature of the second temperature sensor is less than the second temperature or when the sensing temperature of the third temperature sensor is less than the second temperature in the normal operation state in which the processing fans are all operated; Outputting a fire occurrence alarm when a flame is detected;
Stopping the operation of the processing fan, the heating coil for regeneration and the VOC processing rotor after the fire occurrence alarm is output; And
Closing the regeneration damper and the processing damper while turning on the solenoid after the regeneration fan is stopped to allow the drug to be released;
VOC reducing apparatus for performing a control method of the VOC reducing apparatus comprising a.
The temperature sensor includes a first temperature sensor to a fifth temperature sensor,
The first to fourth temperature sensors are sequentially provided from the regenerative heating coil to the VOC processing rotor, and the fifth temperature sensor is provided on the regenerative air discharge passage.
The first temperature sensor is VOC reduction apparatus for detecting the upper limit value and the lower limit value according to the temperature of the plurality of regenerative heating coils.
The fire extinguishing agent injection module is VOC reduction device is controlled to operate through a controller for disaster prevention means additionally connected to the controller.
A fire extinguishing agent containing an extinguishing agent stored therein;
A fire extinguishing agent spraying unit having one end in communication with the extinguishing agent receiving unit for injecting a extinguishing agent by a control signal;
The other end of the extinguishing agent receiving portion and the other end is in communication with each other to provide a driving force to selectively drive the first and second dampers for treatment and the first and second dampers for regeneration through the injection pressure of the extinguishing agent VOC abatement device including a piston.
And at least one of the first and second dampers for treatment and the first and second dampers for regeneration are pre-closed when the extinguishing agent is injected, and the third damper for treatment is later closed after a set time.
And the third damper for regeneration is controlled to open when the regeneration fan disposed to communicate with the regeneration air discharge passage of the body and to be closed when the regeneration fan is stopped.
Operating the processing fan and the regeneration fan when the power is on and opening the regeneration damper;
Driving the VOC processing rotor after opening the regeneration damper;
If the sensing temperature of the first temperature sensor is smaller than the first temperature and the sensing temperature of the first temperature sensor is smaller than the fifth temperature by operating the regeneration heating coil after driving the VOC processing rotor, the processing is performed. Starting all of the fans;
Outputting a normal indication for fire monitoring when the sensing temperature of the second temperature sensor is less than the second temperature or when the sensing temperature of the third temperature sensor is less than the second temperature in the normal operation state in which the processing fans are all operated; Outputting a fire occurrence alarm when a flame is detected;
Stopping the operation of the processing fan, the heating coil for regeneration and the VOC processing rotor after the fire occurrence alarm is output; And
And closing the regeneration damper and the processing damper while turning on the solenoid after the regeneration fan is stopped to allow the drug to be discharged.
When the power is OFF, the operation of the regeneration heating coil and the processing fan is stopped, and if the detection temperature of the fourth temperature sensor is less than the seventh temperature, the operation of the regeneration fan is stopped, and the regeneration damper is And closing the operation of the VOC abatement device after closing.
When the sensing temperature of the first temperature sensor is greater than the first temperature, the regenerative heating coil is stopped. If the sensing temperature of the first temperature sensor is less than the sixth temperature, the operation is performed before the operation of the regenerative heating coil. Control method of the VOC abatement device further comprising the step of moving.
And outputting an alarm when all of the processing fans are not operated, and increasing the rotation speed of the operating processing fan to control the normal air volume.
If the sensing temperature of the third temperature sensor is greater than the second temperature, a fire alarm is output and the heating coil for regeneration is stopped, and the sensing temperature of the second temperature sensor is greater than the second temperature or the third temperature. If the sensed temperature at the sensor is greater than the second temperature,
When the sensing temperature in the second temperature sensor is greater than the third temperature and the sensing temperature in the third temperature sensor is greater than the third temperature, or the sensing temperature in the third temperature sensor is greater than the fourth temperature, And outputting a fire occurrence alarm when any one of the cases where the sensed temperature at the second temperature sensor is greater than the fourth temperature is satisfied.
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KR101483631B1 (en) * | 2014-09-03 | 2015-01-16 | 주식회사 신성엔지니어링 | Device for reducing VOC and control method thereof |
KR102162172B1 (en) * | 2018-11-26 | 2020-10-06 | 한국조선해양 주식회사 | VOCs removal system and large scaled painting shop having the same |
CN110007015A (en) * | 2019-02-13 | 2019-07-12 | 华电智控(北京)技术有限公司 | A kind of total volatile organism monitoring device |
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JP2000042517A (en) * | 1998-07-27 | 2000-02-15 | Koog Tekunika:Kk | Decomposition treating device for organic waste |
JP6075602B2 (en) * | 2012-08-13 | 2017-02-08 | 株式会社大一商会 | Game machine |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2000042517A (en) * | 1998-07-27 | 2000-02-15 | Koog Tekunika:Kk | Decomposition treating device for organic waste |
JP6075602B2 (en) * | 2012-08-13 | 2017-02-08 | 株式会社大一商会 | Game machine |
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