KR102008721B1 - Manufacturing method of Cr-Al binary alloy powder having excellent oxidation and corrosion resistance, the Cr-Al binary alloy powder, manufacturing method of Cr-Al binary alloy PVD target having excellent oxidation and corrosion resistance and the Cr-Al binary alloy PVD target - Google Patents

Abstract

The present invention relates to a method for manufacturing Cr-Al binary alloy powder having hot oxidation and corrosion resistance, Cr-Al binary alloy powder, a method for manufacturing a Cr-Al binary alloy PVD target, and a Cr-Al binary alloy PVD target, which can manufacture Cr-Al binary alloy powder capable of being applied to hot oxidation and corrosion resistant 3D printing materials or coating materials. According to an embodiment of the present invention, the method for manufacturing Cr-Al binary alloy powder having hot oxidation and corrosion resistance comprises the following steps of: preparing Cr and Al of a predetermined composition; performing vacuum induction melting on the Cr and Al to manufacture a Cr-Al binary alloy ingot; crushing the Cr-Al binary alloy ingot to generate a Cr-Al binary alloy ingot crushed material for forming powder; and pulverizing the Cr-Al binary alloy crushed material to manufacture Cr-Al binary alloy powder.

Description

Cr-Al binary alloy powder with excellent oxidation resistance and corrosion resistance, Cr-Al binary alloy powder, Cr-Al binary alloy PVD target manufacturing method and Cr-Al binary alloy PVD target {Manufacturing method of Cr-Al binary alloy powder having excellent oxidation and corrosion resistance, the Cr-Al binary alloy powder, manufacturing method of Cr-Al binary alloy PVD target having excellent oxidation and corrosion resistance and the Cr-Al binary alloy PVD target}

The present invention relates to a Cr-Al binary alloy having excellent high oxidation resistance and corrosion resistance, and has a high oxidation resistance to prepare a Cr-Al binary alloy powder that can be applied as a high temperature oxidation and corrosion resistant 3 printing material or coating material. And a method for producing Cr-Al binary alloy powder having excellent corrosion resistance, a Cr-Al binary alloy powder, a Cr-Al binary alloy PVD target manufacturing method, and a Cr-Al binary alloy PVD target.

As disclosed in Korean Patent No. 10-1961916, a zirconium alloy material used as a core part of a nuclear fuel assembly generates a large amount of hydrogen by a very high corrosion reaction rate in a high temperature oxidation atmosphere in which cooling water is lost and the temperature of the fuel is elevated. It has a problem that causes the hydrogen explosion, to provide a Cr-Al binary alloy as a high oxidation resistance and high corrosion resistance alloy that can ensure stability in both normal and high temperature accident state.

The above-described Cr-Al binary alloy is conventional technology and the oxidation resistance and corrosion resistance are required study the Si / SiC _f material of the material high-temperature strength and oxidation resistance is excellent, but melts to a very high material in the steady state environment problems, the Republic of Korea Although the FeCrAl alloy of Patent No. 10-0584113 has excellent corrosion resistance in normal and accident environments, the material has a high neutron absorption cross section and low tritium concentration from nuclear fuel, which greatly reduces economic efficiency when used in normal operation. Disadvantages of the problem of increased manufacturing cost according to the triple layer structure of the Zr-Mo coated cladding tube and the problem of reduced coating effect due to the separation of the coating layer of the Zr coated cladding tube and the reaction between the coating material and the Zr base material at high temperature Has characteristics.

However, in order to perform 3D printing or physical vapor deposition deposition (PVD) coating of the above-described prior art Cr-Al binary alloy, it is necessary to powder the Cr-Al binary alloy.

As a technique for powdering alloys having high oxidation resistance and corrosion resistance in the prior art, the gas atomizing method was applied, but in the case of Cr-Al binary alloy, the powder has a high melting point of Cr and poor fluidity in the molten state. There was a difficulty in manufacturing.

In addition, in the case of manufacturing a Cr-Al binary alloy as a target for PVD, after preparing chromium powder and aluminum powder, respectively, the two components were mixed and manufactured into a plate of a predetermined form by HIP (Hot isostatic press) method. Failure to make a fully binary alloying resulted in poor performance, resulting in problems of heterogeneity of component composition and lowering of productivity.

Republic of Korea Patent No. 10-1961916 Republic of Korea Patent No. 10-0584113

Therefore, the present invention is to solve the problems of the prior art described above, it is possible to manufacture a Cr-Al binary alloy powder that can be applied as a three-printing material or a coating material of a material requiring high temperature oxidation resistance and corrosion resistance It is a technical subject to provide the manufacturing method of Cr-Al binary alloy powder excellent in oxidation resistance and corrosion resistance, the Cr-Al binary alloy powder, the Cr-Al binary alloy PVD target manufacturing method, and the Cr-Al binary alloy PVD target.

One embodiment of the present invention for achieving the above technical problem, preparing a Cr and Al of the set composition; Preparing Cr-Al binary alloy ingot by performing vacuum induction melting on the Cr and Al; Crushing the Cr-Al binary alloy ingot to produce Cr-Al binary alloy ingot crushed material for powder formation; And pulverizing the Cr-Al binary alloy crushed powder to produce Cr-Al binary alloy powder. The method provides a method for preparing high oxidation and corrosion resistant Cr-Al binary alloy powder, the method comprising:

The preparing of Cr and Al may include preparing Cr and Al in an amount of 8 wt% to 12 wt% and Cr at 88 wt% to 92 wt% based on the total Cr and Al. It is done.

The step of producing the Cr-Al binary alloy ingot by performing the vacuum induction melting step, after loading Cr and Al in the crucible at a predetermined ratio, placing the crucible inside the vacuum induction furnace; Evacuating the interior of the vacuum induction furnace; Forming an interior of the vacuumized vacuum induction furnace in an inert gas dissolving atmosphere; Induction heating of a vacuum induction furnace having the inert gas dissolving atmosphere to melt Cr and Al charged into the crucible; Injecting Cr-Al binary alloy molten metal formed by melting the Cr and Al into an ingot casting mold to cool the molten metal; And extracting the Cr-Al binary alloy ingot from the ingot casting mold.

In the step of placing the crucible inside the vacuum induction furnace, the Cr forms a layer corresponding to a ratio of 88 wt% to 92 wt%, and the Al forms a layer corresponding to a ratio of 8 wt% to 12 wt%. To achieve this, the Cr and the Al are characterized in that the stack charge alternately in the crucible.

Vacuuming the interior of the vacuum induction furnace is characterized in that the vacuum in the vacuum induction furnace to a pressure in the range of 10 ^-3 torr to 10 ^-5 torr.

The step of forming the inside of the vacuumized vacuum induction furnace in an inert gas dissolving atmosphere, characterized in that purging the inert gas to 400 to 500 torr to minimize the reaction between the melt and the atmosphere.

Melting the Cr and Al, characterized in that it further comprises the step of stirring the Cr-Al binary alloy molten metal for 5 to 10 minutes.

The step of producing the Cr-Al binary alloy ingot crushed, characterized in that the Cr-Al binary alloy ingot crushed to a size of 5 to 10 mm.

The Cr-Al binary alloy powder in the step of producing the Cr-Al binary alloy powder is characterized in that it has a size of 20 to 100 ㎛.

In order to achieve the above technical problem of the present invention, another embodiment of the present invention, Al is 8 wt% to 12 wt%, the balance has a composition of Cr and inevitable impurities, the size is 20 to 100 ㎛, vacuum It is prepared by induction melting to provide a Cr-Al binary alloy powder, characterized in that the content of O is 5 wt% or less.

In order to achieve the above technical problem of the present invention, another embodiment of the present invention, preparing a Cr and Al of the set composition; Preparing Cr-Al binary alloy ingot by performing vacuum induction melting on the Cr and Al; Crushing the Cr-Al binary alloy ingot to produce Cr-Al binary alloy ingot crushed material for powder formation; Pulverizing the Cr-Al binary alloy crushed powder to produce Cr-Al binary alloy powder; And sintering the Cr-Al binary alloy powder to produce a Cr-Al binary alloy Physical Vaporized Deposition (PVD) target; a method for producing a high oxidation resistance and corrosion resistant Cr-Al binary alloy PVD target, comprising: To provide.

In order to achieve the above technical problem of the present invention, another embodiment of the present invention, Al is 8 wt% to 12 wt%, the balance has a composition of Cr and inevitable impurities, the size is 20 to 100 ㎛, vacuum It provides a Cr-Al binary alloy PVD (Physical Vaporized Deposition) target produced by sintering a Cr-Al binary alloy powder having an O content of 5 wt% or less by vacuum or inert gas atmosphere by being prepared by induction melting.

Embodiments of the present invention described above, having a uniform distribution that can be applied as a three-printing material or a coating material of a material requiring high temperature oxidation resistance and corrosion resistance, Cr-Al binary alloy powder, Cr- It provides the effect of making Al binary alloy PVD target.

PVD target manufacturing method of the embodiment of the present invention described above, by producing a PVD target by applying a homogeneously distributed Cr-Al binary alloy powder with a minimum content of oxide, it is not fully binary alloying in the prior art The performance is lowered, and the effect of solving the problems of inhomogeneity of the component composition and lowering of the productivity is provided.

In addition, the PVD target manufacturing method of the embodiment of the present invention described above, PVD coating quality by casting cracks and pores on the surface of the PVD target generated in the case of the PVD target produced by cutting the Cr-Al binary alloy ingot Solving the problem of deterioration provides the effect of performing a high quality Cr-Al binary alloy PVD coating.

1 is a flow chart of a Cr-Al binary alloy powder manufacturing method of an embodiment of the present invention.
Figure 2 is a flow chart showing the detailed processing of the step (S20) of producing a Cr-Al binary alloy ingot by vacuum induction dissolution during the process of Figure 1;
3 is a photograph of the heated ingot casting mold 10.
4 is a schematic diagram illustrating alternately laminating Cr and Al at a predetermined ratio inside the crucible 20.
5 is a view showing a process of crushing the produced Cr-Al binary alloy ingot.
6 is a view showing the Cr-Al binary alloy powder produced.
Figure 7 is a photograph of the produced Cr-Al binary alloy PVD target.
8 is a scanning electron microscope photograph of Cr-Al binary alloy powder 50 of the Experimental Example.
9 is a table showing the results of component analysis of the Cr-Al binary alloy powder (50) of FIG.
10 is a graph of the results of size analysis of Cr-Al binary alloy powder 50 of FIG. 8.
11 is a scanning electron micrograph of a PVD target prepared by applying the SPS (Spark Plasma Sintering) method to the Cr-Al binary alloy powder prepared.
12 is a component analysis result table of the PVD target of FIG.

In the following description of the present invention, detailed descriptions of well-known functions or configurations will be omitted when it is deemed that they may unnecessarily obscure the subject matter of the present invention.

Since the embodiments according to the concept of the present invention can be variously modified and have various forms, specific embodiments will be illustrated in the drawings and described in detail in the present specification or application. However, this is not intended to limit the embodiments in accordance with the concept of the present invention to a particular disclosed form, it is to be understood that the present invention includes all changes, equivalents, and substitutes included in the spirit and scope of the present invention.

When a component is referred to as being "connected" or "connected" to another component, it may be directly connected to or connected to that other component, but it may be understood that other components may be present in between. Should be. On the other hand, when a component is said to be "directly connected" or "directly connected" to another component, it should be understood that there is no other component in between. Other expressions describing the relationship between components, such as "between" and "immediately between," or "neighboring to," and "directly neighboring to" should be interpreted as well.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. As used herein, the terms "comprise" or "having" are intended to indicate that there is a feature, number, step, action, component, part, or combination thereof that is described, and that one or more other features or numbers are present. It should be understood that it does not exclude in advance the possibility of the presence or addition of steps, actions, components, parts or combinations thereof.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings of the present invention with reference to the embodiments of the present invention.

1 is a flow chart of a Cr-Al binary alloy powder production method and Cr-Al binary alloy PVD (Physical Vaporized Deposition) target manufacturing method of an embodiment of the present invention.

Cr-Al binary alloy powder production method of an embodiment of the present invention, as shown in Figure 1, preparing a Cr-Al compound (S10), preparing a Cr-Al binary alloy ingot (S20), Cr-Al binary system It characterized in that it comprises a step (S30) for producing an alloy crushed material and a step (S40) for preparing a Cr-Al binary alloy powder.

In the preparing of the Cr-Al blend (S10), Cr and Al having a predetermined composition ratio are prepared. At this time, the Al may be 8 wt% to 12 wt% with respect to the total Cr and Al, and the Cr may be 88 to 92 wt%. At this time, in the prepared Cr-Al binary alloy, Al is present in a solid solution in Cr. When the Al content is more than 12 wt%, an AlCr ₂ intermetallic compound is formed or the Al rich phase and the Cr rich phase are present in a form separated from each other. Is reduced. When the Al is included in less than 8 wt%, high temperature oxidation resistance and corrosion resistance cannot be expected.

And Cr and Al may be in the form of Cr ingot and Al ingot having a size of 5 to 10 mm in consideration of melting and grinding. At this time, when the size of the Cr and Al ingot is less than 5mm, the final product of Cr-Al binary alloy powder is less than 20 ㎛ when applied as a 3D printing material scattering occurs material loss occurs, melting efficiency This lowers and the printing efficiency lowers. And when the magnitude | size of the said Cr lump and Al lump exceeds 15 mm, melt efficiency will fall and productivity will fall.

In the step of preparing the Cr-Al binary alloy ingot (S20), Cr-Al binary alloy ingot is manufactured by performing vacuum induction dissolution of the Cr and Al.

Figure 2 is a flow chart showing the detailed processing of the step (S20) of producing a Cr-Al binary alloy ingot by vacuum induction of the processing of Figure 1, Figure 3 is a photograph of the heated ingot casting mold (10). 4 is a schematic diagram showing alternately laminating Cr and Al at a predetermined ratio inside the crucible 20.

Hereinafter, the step (S20) of manufacturing the Cr-Al binary alloy ingot will be described in detail with reference to FIGS. 2 to 4.

As shown in Figure 2, the step of producing the Cr-Al binary alloy ingot (S20), the step of heating the ingot casting mold (S21), after charging the Cr and Al at a predetermined ratio inside the crucible, the crucible Positioning the Cr and Al in the vacuum induction melting furnace (S22) (hereinafter, referred to as 'step Cr and Al in the vacuum induction melting furnace (S22)'), the vacuum induction Evacuating the interior of the furnace (S23), forming the interior of the vacuumized vacuum induction furnace into an inert gas dissolving atmosphere (S24), and induction heating the vacuum induction furnace in which the inert gas dissolving atmosphere is formed. Melting Cr and Al charged into the crucible (S25), injecting Cr-Al binary alloy molten metal formed by melting the Cr and Al into an ingot casting mold, and cooling (S26) and the ingot casting mold Cr-Al Binary It is characterized in that comprises a step (S27) for extracting the alloy ingot.

The step S21 of heating the ingot casting mold heats the ingot casting mold 10 into which the Cr-Al melt is injected so that water is removed to prevent an accident such as an explosion during tapping. At this time, the heating temperature may be approximately 400 to 600 ℃.

Positioning the Cr and Al in the vacuum induction furnace (S22), as shown in Fig. 4, the Cr and Al are alternately loaded in the crucible 20 alternately. Generally, the Al has a melting temperature of about 660.3 ° C. and the Cr is about 1907 ° C. As a result, when the distribution of Cr and Al in the crucible is not uniform, the Cr is not melted and a Cr-Al binary alloy in which Cr-Al is uniformly distributed cannot be obtained. Therefore, the Cr charged in the step of placing the Cr and Al in the vacuum induction (S22) forms a layer corresponding to the ratio of 88 wt% to 92 wt%, the Al of 8 wt% to 12 wt% Cr ingots and Al are charged into the crucible 20 to form a layer corresponding to the ratio. The crucible 20 and the heated ingot casting mold 10 in which Cr and Al ingots are stacked are charged inside the vacuum induction furnace.

Vacuuming the interior of the vacuum induction furnace (S23) is to remove oxygen by vacuuming the internal pressure of the vacuum induction furnace to a pressure in the range of 10 ^-3 torr to 10 ^-5 torr so that no oxide is produced. The oxide is not included in the Cr-Al binary alloy ingot 30 (see FIG. 5).

The step (S24) of forming the inside of the vacuumized vacuum induction furnace into an inert gas dissolving atmosphere purges the inert gas to 400 to 500 torr to minimize the reaction between the molten metal and the atmosphere. Is prepared in an inert gas atmosphere. At this time, the inert gas may be an Ar ₂ gas or the like.

In the step S25 of melting Cr and Al, induction heating is performed in a vacuum induction furnace in which the inert gas dissolving atmosphere is formed to melt Cr and Al charged into the crucible to produce Cr-Al binary alloy molten metal. At this time, the step of melting the Cr and Al (S25) further comprises the step of stirring the Cr-Al binary alloy molten metal for 5 to 10 minutes to be uniformly mixed with the Cr melt and Al melt.

Injecting and cooling the Cr-Al binary alloy molten metal into the ingot casting mold 10 (S26) while maintaining the Cr-Al binary alloy molten metal at about 1,800 ° C. inside the vacuum induction furnace (10). ) And cool.

Extracting the Cr-Al binary alloy ingot from the ingot casting mold (S27) extracts the ingot 30 from the cooled ingot casting mold 10.

Referring to FIG. 1 again, in the step of generating the Cr-Al binary alloy crushed material (S30), the Cr-Al binary alloy ingot 30 produced by the process of FIGS. Shredded to prepare Al binary alloy powder. 5 is a view showing a process of crushing the produced Cr-Al binary alloy ingot. In order to manufacture the Cr-Al binary alloy powder, as shown in FIG. 5A, first, the manufactured Cr-Al binary alloy ingot 30 is cut through a cutter or the like. Thereafter, as shown in FIG. 5B, the Cr-Al binary alloy ingots cut by using a press hammer or the like are crushed to prepare a Cr-Al binary alloy crushed product 40. In this case, the Cr-Al binary alloy crushed product 40 may have a size of 5 to 10 mm. When the Cr-Al binary alloy crushed product 40 is less than 5 mm, the final product of Cr-Al binary alloy powder is less than 20 μm, and when applied as a 3D printing material, scattering occurs and loss of material occurs. The efficiency is lowered and the printing efficiency is lowered. In addition, when the size of the Cr-Al binary alloy crushed product 40 exceeds 10 mm, in order to manufacture Cr-Al binary alloy powder having a size of 20 to 100 μm, two or more ball milling operations are performed, thereby reducing the grinding efficiency. .

The step of preparing the Cr-Al binary alloy powder (S40) is a Cr-Al binary alloy powder 40 of the Cr-Al binary alloy powder having a size of 20 to 100 ㎛ by grinding by performing a ball milling To make. 6 shows Cr-Al binary alloy powder 50 produced. At this time, the Cr-Al binary alloy powder 50 produced as described above, when less than 20 ㎛ when scattering occurs when applied as a 3D printing material material loss occurs, melting efficiency is lowered and printing efficiency is lowered do. And when it exceeds 100 micrometers, melting efficiency will fall and printing efficiency will fall.

The Cr-Al binary alloy powder 50 having high oxidation resistance and corrosion resistance improved according to another embodiment of the present invention manufactured by the above-described process of FIGS. 1 to 6 is 8 wt% to 12 wt% Al, and the balance is It has a composition of Cr and unavoidable impurities and can be 20 to 100 μm in size. In addition, the Cr-Al binary alloy powder 50 may have an O content of 5 wt% or less, wherein the contained O is not mixed with an oxide in the process of preparing Cr-Al binary alloy powder, and is manufactured as Cr-Al binary system. It may be an impurity mixed in the process of processing the alloy powder 50.

In addition, Cr-Al binary alloy PVD target manufacturing method of another embodiment of the present invention for solving the technical problem of the present invention, Cr-Al binary alloy powder manufacturing method of FIGS. To step (S10), to produce a Cr-Al binary alloy ingot (S20), to produce a Cr-Al binary alloy shreds (S30) and to prepare a Cr-Al binary alloy powder (S40) Figure 1 It is characterized in that it comprises a step (S50) to prepare a Cr-Al binary alloy PVD target by sintering the Cr-Al binary alloy powder of.

In the step of preparing the Cr-Al binary alloy PVD target (S50), the Cr-Al binary alloy powder is pressurized by heat sintering to a column such as a cylinder, a pillar, a plate, or the like to prepare a PVD target. At this time, the sintering treatment is carried out in a vacuum or inert gas atmosphere, the pressure is 30 to 100 MPa, the temperature is 1100 to 1300 ℃, the sintering time may be performed for 3 to 15 minutes. In addition, the sintering treatment may be applied to a variety of sintering treatment methods such as SPS (Spark Plasma Sintering)

Therefore, another embodiment of the present invention provides a Cr-Al binary alloy PVD (Physical Vaporized Deposition) target prepared by sintering the Cr-Al binary alloy powder. 7 is a photograph of a Cr-Al binary alloy PVD target 60 manufactured according to an embodiment of the present invention.

Cr-Al binary alloy PVD target 60 produced by sintering the Cr-Al binary alloy powder In addition, Al is 8 to 12 wt%, the balance is characterized in that the composition of Cr and inevitable impurities. In addition, the content of O in the Cr-Al binary alloy PVD target 60 is characterized in that 5 wt% or less.

Experimental Example

In order to measure the performance of the present invention, Cr and Al were blended to have a composition of Cr 86 wt% and Al 14 wt%, aiming at a particle size of 45 μm to 100 μm of the Cr-Al binary alloy powder. According to an embodiment of the present invention, Cr-Al binary alloy powders were prepared, and Cr-Al binary alloy powders were sintered to prepare Cr-Al binary alloy PVD targets.

8 is a scanning electron micrograph of the Cr-Al binary alloy powder 50 of the experimental example, Figure 9 is a table showing the results of the component analysis of the Cr-Al binary alloy powder 50 of Figure 8, Figure 10 is FIG. Size analysis result of Cr-Al binary alloy powder 50 is a graph.

As shown in Figure 8 to 10, Cr-Al binary alloy powder according to an embodiment of the present invention is 12.32 wt% to 17.18 wt% Al, 82.37 wt% to 87.98 wt% Cr is uniform according to the mixing ratio of Cr-Al. It was confirmed that it had one composition distribution. However, the difference in the composition ratio of Al and Cr was due to the fact that the powder shape was angular rather than flat, showing some deviation along the irradiation direction.

In addition, when examining the table of FIG. 9, the O content shown in the table of FIG. 9 is due to contamination during sample preparation, and Cr-Al binary alloy powder of the present invention is well formed with no oxide formation or minimized powder during manufacture. It was confirmed.

In addition, the size of the Cr-Al binary alloy powder of Figure 10 was in the range of 63 to 96 ㎛ in the experimental example, it was confirmed that satisfies the target range of 45 to 100 ㎛.

Next, PVD targets were prepared by sintering the prepared Cr-Al binary alloy powder by applying the SPS method. The Cr-Al binary alloy PVD target was charged with a Cr-Al binary alloy powder in a graphite crucible using a SPS (Spark Plasma Sintering) method, and then maintained at an atmosphere of Ar gas for 5 minutes at a pressure of 40Mpa and a temperature of 1200 ° C. It was made with a diameter of 48.87Φ and a height of 30mm. The sintering treatment may be applied to various sintering methods other than the SPS method.

FIG. 11 is a scanning electron micrograph of a PVD target prepared by applying a SPS (Spark Plasma Sintering) method to the prepared Cr-Al binary alloy powder, and FIG. 12 is a component analysis result table of the PVD target product of FIG. 11.

As can be seen in Figures 11 and 12, PVD target prepared by applying the SPS method to the Cr-Al binary alloy powder is a composition of the PVD coating quality by the composition is homogeneous and does not contain an oxide It can be confirmed that can be significantly improved.

Although the technical spirit of the present invention described above has been described in detail in a preferred embodiment, it should be noted that the above embodiment is for the purpose of description and not of limitation. In addition, those skilled in the art will understand that various embodiments are possible within the scope of the technical idea of the present invention. Therefore, the true technical protection scope of the present invention will be defined by the technical spirit of the appended claims.

10: Ingot Casting Mold
20: crucible
30: Cr-Al Binary Alloy Ingot
40: Cr-Al Binary Alloy Ingot Shredder
50: Cr-Al binary alloy powder
60: Cr-Al binary alloy PVD target

Claims (12)

Preparing Cr and Al at a ratio of 8 wt% to 12 wt% and Cr at 88 wt% to 92 wt% based on total Cr and Al;
Preparing Cr-Al binary alloy ingot by performing vacuum induction melting on the Cr and Al;
Crushing the Cr-Al binary alloy ingot to produce Cr-Al binary alloy ingot crushed material for powder formation; And
And pulverizing the Cr-Al binary alloy pulverized product to produce Cr-Al binary alloy powder. The method of claim 1, further comprising: Cr-Al binary alloy powder. delete The method of claim 1, wherein the vacuum induction is performed to prepare a Cr-Al binary alloy ingot,
Charging Cr and Al into the crucible at a predetermined ratio and then placing the crucible into the vacuum induction furnace;
Evacuating the interior of the vacuum induction furnace;
Forming an interior of the vacuumized vacuum induction furnace in an inert gas dissolving atmosphere;
Induction heating of a vacuum induction furnace having the inert gas dissolving atmosphere to melt Cr and Al charged into the crucible;
Injecting and cooling the Cr-Al binary alloy molten metal formed by melting the Cr and Al into an ingot casting mold; And
Extracting the Cr-Al binary alloy ingot from the ingot casting mold; high oxidation resistance and corrosion resistance Cr-Al binary alloy powder manufacturing method comprising a. The method of claim 3, wherein in the step of placing the crucible inside the vacuum induction furnace,
The Cr and the Al alternately inside the crucible so that the Cr forms a layer corresponding to the ratio of 88 wt% to 92 wt%, and the Al forms a layer corresponding to the ratio of 8 wt% to 12 wt%. A high oxidation and corrosion resistance Cr-Al binary alloy powder production method, characterized in that the lamination charge. The method of claim 3, wherein evacuating the interior of the vacuum induction furnace,
Method for producing a high oxidation resistance and corrosion-resistant Cr-Al binary alloy powder, characterized in that the vacuum in the furnace induction pressure to a pressure in the range of 10 ^-3 torr to 10 ^-5 torr. The method of claim 3, wherein the step of forming the interior of the vacuumized vacuum induction furnace in an inert gas dissolving atmosphere,
A method for producing a high oxidation and corrosion resistant Cr-Al binary alloy powder, characterized in that the inert gas is purged at 400 to 500 torr to minimize the reaction between the melt and the atmosphere. The method of claim 3, wherein melting the Cr and Al,
Method for producing a high oxidation resistance and corrosion resistance Cr-Al binary alloy powder, characterized in that it further comprises the step of stirring the Cr-Al binary alloy molten metal for 5 to 10 minutes. The method of claim 1, wherein the producing Cr-Al binary alloy ingot crushed material,
Method for producing a high oxidation resistance and corrosion resistance Cr-Al binary alloy powder, characterized in that crushing the Cr-Al binary alloy ingot to a size of 5 to 10 mm. According to claim 1, wherein the Cr-Al binary alloy powder of the step of producing the Cr-Al binary alloy powder, high oxidation and corrosion resistance Cr-Al binary alloy powder, characterized in that having a size of 20 to 100 ㎛ Manufacturing method. Al is 8 wt% to 12 wt%, the balance has a composition of Cr and unavoidable impurities, the size is 20 to 100 μm, and the content of O is 5 wt% or less by producing by vacuum induction melting. Cr-Al binary alloy powder. Preparing Cr and Al at a ratio of 8 wt% to 12 wt% and Cr at 88 wt% to 92 wt% based on total Cr and Al;
Preparing Cr-Al binary alloy ingot by performing vacuum induction melting on the Cr and Al;
Crushing the Cr-Al binary alloy ingot to produce Cr-Al binary alloy ingot crushed material for powder formation;
Pulverizing the Cr-Al binary alloy crushed powder to produce Cr-Al binary alloy powder; And
Sintering the Cr-Al binary alloy powder to produce a Cr-Al binary alloy PVD (Physical Vaporized Deposition) target; high oxidation resistance and corrosion resistance Cr-Al binary alloy PVD target manufacturing method comprising a. Al has a composition of 8 wt% to 12 wt%, Cr is 88 wt% to 92 wt% and inevitable impurities with respect to the total Cr and Al, the size is 20 to 100 ㎛, prepared by vacuum induction Cr-Al binary alloy PVD (Physical Vaporized Deposition) target produced by sintering Cr-Al binary alloy powder having an O content of 5 wt% or less in a vacuum or inert gas atmosphere.

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