KR102006476B1 - Organic Light Emitting Display Device and Method for Manufacturing The Same - Google Patents

Abstract

An organic light emitting display according to an aspect of the present invention includes: an anode electrode formed on a first substrate; An organic light emitting layer formed on the anode electrode; A first passivation layer formed on the organic emission layer and preventing damage to the organic emission layer; A cathode electrode formed on the first passivation layer; A second passivation layer formed on the cathode electrode to prevent damage to the cathode electrode and the organic emission layer; And a second substrate formed on the second passivation layer, wherein the cathode includes a semi-transparent layer formed on the first passivation layer and a transparent layer formed on the semi-transparent layer.

Description

Technical Field [0001] The present invention relates to an organic light emitting display device,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an organic light emitting display and a method of manufacturing the same, and more particularly, to an active organic light emitting display and a method of manufacturing the same.

With the development of information and communication technology, state-of-the-art flat panel display devices are in the spotlight. Flat panel displays are becoming more thin and more portable. In particular, organic electroluminescent display devices, which are attracting attention as a next-generation liquid crystal display device, are self-luminous devices, and thus there is an advantage that a lightweight thin flat panel device can be realized compared to a liquid crystal display device. Further, the organic light emitting display device is an eco-friendly flat panel display device having a wide viewing angle, excellent contrast ratio, quick response time and low power consumption.

The organic light emitting display device may be divided into a top emission type and a bottom emission type according to the direction of light emitted from the inside. In the top surface emission type, since the internally emitted light is emitted through the cathode electrode, the cathode electrode must be formed as a thin film, which increases the resistance.

1 is a cross-sectional view illustrating a part of a general top emission type organic light emitting display device.

1, the organic light emitting display includes a first substrate 101, a second substrate 102, an anode electrode 110, an organic light emitting layer 120, a cathode electrode 130, (140).

An anode electrode 110, an organic light emitting layer 120, and a cathode electrode 130 are sequentially formed on a first substrate 101. When electrons transferred from the cathode electrode 130, which is a common electrode, are transmitted through the anode electrode 110 and the organic light emitting layer 120, excitons are formed. At this time, the organic light emitting layer 113 The light is emitted by the band gap energy of the light.

The thin film encapsulation layer 140 is a multilayer structure in which a plurality of organic layers and inorganic layers are alternately formed, and an inorganic layer is formed at the lower and upper ends to protect the organic layer from external moisture and air. In addition, the organic layer has a property of flattening the lower part, and by covering the foreign material existing on the inorganic layer and making it flat, another inorganic layer formed on the upper part is prevented from peeling and cracking.

The multi-layered thin film sealing layer 140 protects the organic light emitting layer 120 formed at the bottom from moisture, air, and foreign matter. As the number of the layers formed increases, the property of protecting the organic light emitting layer 120 is improved. However, there is a problem that the light extraction efficiency to be emitted to the outside is lowered.

In addition, since the transmittance and resistance of the cathode 130 are proportional to each other, in order to improve the light extraction efficiency, the resistance is increased, power consumption is increased, heat is heated and life is lowered, and the cathode electrode 130 In order to solve the resistance problem, there is a problem that the light extraction efficiency is low and the power consumption must be increased in order to compensate the resistance. Accordingly, there is a need for a method of increasing light extraction efficiency and lowering power consumption while implementing a low-resistance cathode.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an organic light emitting display capable of realizing a low-resistance cathode having a high light extraction efficiency.

According to an aspect of the present invention, there is provided an organic light emitting display including: an anode electrode formed on a first substrate; An organic light emitting layer formed on the anode electrode; A first passivation layer formed on the organic emission layer and preventing damage to the organic emission layer; A cathode electrode formed on the first passivation layer; A second passivation layer formed on the cathode electrode to prevent damage to the cathode electrode and the organic emission layer; And a second substrate formed on the second passivation layer, wherein the cathode includes a semi-transparent layer formed on the first passivation layer and a transparent layer formed on the semi-transparent layer.

According to an aspect of the present invention, there is provided a method of manufacturing an organic light emitting display, including: forming an anode on a first substrate; Forming an organic light emitting layer on the anode electrode; Forming a first passivation layer on the organic light emitting layer; Forming a cathode electrode including a translucent layer and a transparent layer on the first passivation layer; Forming a second protective layer on the cathode electrode; And bonding the second substrate on the second protective layer.

According to the present invention, by forming the cathode electrode in a multilayer structure, the organic light emitting layer can be protected from external foreign substances by replacing the thin film sealing layer while implementing a low resistance cathode electrode.

In addition, according to the present invention, a protective layer is formed by a thermal vapor deposition method which does not damage the organic light emitting layer before forming the cathode electrode having a multi-layer structure, thereby preventing the organic light emitting layer from being damaged by the sputtering method There is an effect that can be done.

Further, according to the present invention, there is an effect that the cathode electrode can be electrically connected to the auxiliary electrode while forming the protective layer before forming the cathode electrode.

Further, according to the present invention, it is possible to realize a low-resistance cathode and reduce power consumption.

1 is a cross-sectional view illustrating a conventional organic light emitting display device;
2 is a cross-sectional view illustrating an organic light emitting display device according to an embodiment of the present invention;
3 is a cross-sectional view illustrating an organic light emitting display device according to another embodiment of the present invention; And
4 is a cross-sectional view illustrating a portion of an organic light emitting display device according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 is a cross-sectional view illustrating an organic light emitting display according to an exemplary embodiment of the present invention.

2, an organic light emitting display according to an exemplary embodiment of the present invention includes a first substrate 201, a second substrate 202, an anode electrode 210, an organic light emitting layer 220, 1 protective layer 230, a cathode electrode 240, and a second passivation layer 250. The anode electrode 210 includes a reflective layer 215 therein and the cathode electrode 240 includes a translucent layer 241 formed on the first passivation layer 230 and a transparent layer 242 formed on the translucent layer 241 242).

First, the first substrate 201 and the second substrate 202 are formed of glass. In addition, if a flexible plastic material is used, it can be realized as a flexible display. For example, a flexible substrate can be formed with polyimide, polyetherimide (PEI), and polyethylene terephthalate (PET).

Next, an anode electrode 210 is formed on the first substrate 201. The anode electrode 210 is formed of a material having a high work function to supply holes to the organic light emitting layer 220. In the case of the top surface emission type, the anode electrode 210 does not need to be transparent. However, the conductive material having a high work function is generally transparent. For example, indium tin oxide (ITO), indium zinc oxide IZO) and indium tin zinc oxide (ITZO).

The anode electrode 210 may include a reflective layer 215. The refractive index of the second passivation layer 250 formed on the cathode electrode 240 is lower than the refractive index of the cathode electrode 240. In this case, total reflection is induced on the surface where the second protective layer 250 and the cathode electrode 240 are in contact with each other. The light emitted from the organic light emitting layer 220 may be reflected by the total reflection in the direction of the anode electrode 210 and the reflected light may be reflected by the reflective layer 215 to amplify the emitted light, Can be released. The above effect is called a micro cavity effect, and the light extraction efficiency of the upper emission type can be improved.

Next, an organic light emitting layer 220 is formed on the anode electrode 210. A plurality of functional layers may be formed between the organic light emitting layer 220 and the anode electrode 210. These functional layers may facilitate injection and movement of holes supplied from the anode electrode 210. [ Similarly, a plurality of functional layers may be formed between the organic light emitting layer 220 and the cathode electrode 240, and injection and movement of electrons supplied from the cathode electrode 240 may be smoothly performed.

As described above, the holes supplied from the anode electrode 210 and the electrons supplied from the cathode electrode 240 form an exciton to be in an excited state, and then fall to a ground state and emit energy into light.

The organic light emitting layer 220 may be formed by depositing a light emitting material composed of a polymer or a low molecular organic material. The organic electroluminescent display device may have various methods depending on the color of light emitted from the organic light emitting layer 220. A WRGB method in which an organic light emitting layer 220 emitting white light is used and a color refiner of red, green, and blue are formed in each pixel on the organic light emitting layer 220 to represent a desired gradation, and a WRGB system in which red, green, and blue independent organic light emitting layers (RGB) method in which a desired gray level is expressed by forming a gray level 220. The organic light emitting layer 220 for emitting the white light may include a red polymer light emitting layer having a nanostructure, for example, a poly (2-methoxy) 5- (2-ethyl-hexyloxy) -phenylene vinylene] 2-methyl-9,10-di (2-naphthyl) anthracene (MADN) blue low molecular weight luminescent layer may be mixed to form an organic luminescent layer 220 emitting white light.

Next, a first passivation layer 230 is formed on the organic light emitting layer 220. The first passivation layer 230 may be molybdenum oxide (MoOx) of the conductive oxide, and preferably molybdenum oxide (MoO3) may be used. Molybdenum oxide (MoO3) can be formed by thermal deposition instead of sputtering. Other conductive oxides can be formed by sputtering, for example, indium tin oxide (ITO), indium zinc oxide, and indium tin zinc oxide, The organic light emitting layer 220 can be damaged by the process of forming the upper layer of the organic light emitting layer 220. Therefore, molybdenum oxide (MoO 3), which can electrically connect the organic light emitting layer 220 and the cathode electrode 240 without damaging the organic light emitting layer 220, is preferable as a material for forming the first passivation layer 230 .

Further, the first passivation layer 230 should be formed of a transparent material so that the emission light emitted from the organic light emitting layer 220 does not deteriorate the light extraction efficiency emitted through the cathode electrode 240. Since molybdenum oxide (MoO3) is a transparent material, even if it is formed between the organic light emitting layer 220 and the cathode electrode 240, the light extraction efficiency may not be lowered.

Next, a cathode electrode 240 is formed on the first passivation layer 230. The cathode electrode 240 is formed of a material having a low work function to supply electrons to the organic light emitting layer 220.

The cathode electrode 240 may be formed of silver (Ag). The cathode electrode 240 may include any one of lithium (Li), calcium (Ca), aluminum (Al), copper (Cu), and magnesium (Mg). The cathode electrode 240 may include a translucent layer 241 formed on the first passivation layer 230 and a transparent layer 242 formed on the translucent layer 241.

The semitransparent layer 241 may be formed of Ag or a metal containing any one of lithium (Li), calcium (Ca), aluminum (Al), copper (Cu), and magnesium . Since the cathode electrode 240 has to emit light to the outside, in particular, the opaque translucent layer 241 can be formed as a light-transmissive thin film, and can be formed thin to a thickness of several hundreds of angstroms (A) or less.

The transparent layer 242 may be formed of a transparent conductive oxide. For example, the transparent layer 242 may be formed of indium tin oxide (ITO), indium zinc oxide (ITO), and indium tin zinc oxide (ITO), as in the case of the anode electrode 210 .

The semi-transparent layer 241 and the transparent layer 242 are formed by sputtering. However, since the first protective layer 230 protects the organic light-emitting layer 220, the organic light-emitting layer 220 can be formed without damage.

Since the translucent layer 241 transmits only a part of the emitted light emitted from the organic light emitting layer 220, the light extraction efficiency and the brightness are lowered, which may increase the power consumption. However, when the semi-transparent layer 241 is formed as an extremely thin film, the transmittance of the emitted light is increased to increase the light extraction efficiency and the luminance. However, since the resistance increases, the power consumption There is no choice but to increase.

Here, when the transparent layer 242 is further formed on the translucent layer 241, the translucency layer 241 has only a higher transparency than the transparent layer 242 having only the translucent layer 241 or the thicker transparent layer 242. Accordingly, the translucent layer 241 can lower the work function and can be driven by the cathode electrode 240, and the transparent layer 242 is further formed on the translucent layer 241 to increase the thickness of the conductive material It is possible to improve the transparency and transparency while reducing the resistance.

The cathode electrode 240 may be a kind of common electrode because it applies the same voltage to all the pixels. Thus, it can be formed as a single layer that covers the entire surface of the substrate without being patterned. In order to prevent a driving problem due to an increase in resistance, an auxiliary electrode may be connected to the upper or lower portion of the cathode electrode 240 to reduce the resistance.

Next, a second passivation layer 250 is formed on the cathode electrode 240. The second passivation layer 250 may be formed on the transparent layer 242 of the cathode electrode 240 and may be formed of a material having a lower refractive index than the transparent layer 242. [ Preferably, the transparent layer 242 may be formed of silicon oxide (SiOx) or silicon nitride (SiNx). Alternatively, it may preferably be formed of an aluminum oxide (Al 2 O 3). Silicon oxide (SiOx), silicon nitride (SiNx), and aluminium oxide (Al2O3) are highly effective in preventing moisture permeation. In addition, the material is a material having a refractive index lower than that of the transparent layer 242. Accordingly, the second passivation layer 250 reflects part of the internal light passing through the cathode electrode 240 toward the anode electrode 210. The reflected internal light is re-reflected by the reflective layer 215 of the anode electrode 210 to obtain a micro-cavity effect, thereby improving light extraction efficiency.

As described above, the second passivation layer 250 protects the organic light emitting layer 220 from damage during the process, and realizes a micro-cavity phenomenon, thereby improving light extraction efficiency.

Next, the second substrate 202 is formed on the second passivation layer 250. The second substrate 202 is formed with the first substrate 201 and the second protective layer 250 to prevent moisture, air, and foreign substances from entering from the outside to prevent damage to the organic light emitting layer 220, And serves to seal the inside of the display device. The second substrate 202 is formed of glass or a flexible material, similar to the first substrate 201. In order to prevent moisture permeation and foreign matter inflow, it is preferable to be formed of glass.

3 is a cross-sectional view illustrating an organic light emitting display according to another embodiment of the present invention.

3, an organic light emitting display according to an exemplary embodiment of the present invention includes a first substrate 201, a second substrate 202, an anode electrode 210, an organic light emitting layer 220, 1 protective layer 230, a cathode electrode 240, and a second passivation layer 250. The anode electrode 210 includes a reflective layer 215 therein and the cathode electrode 240 includes a translucent layer 241 formed on the first passivation layer 230 and a transparent layer 242 formed on the translucent layer 241 242), and an auxiliary translucent layer (243) and an auxiliary transparent layer (244) alternately formed on the transparent layer (242).

First, an anode electrode 210 is formed on a first substrate 201. The anode electrode 210 includes a reflective layer 215 to form a micro-cavity structure with the second protective layer 250 to be formed later. The organic light emitting layer 220 formed on the anode electrode 210 by a deposition method can emit light of different colors according to a band gap of a forming material.

Next, the first passivation layer 230 is formed on the organic light emitting layer 220, and is formed by thermal evaporation so that the organic light emitting layer 220 is not damaged during the process. The first passivation layer 230 is formed of a conductive material so that the organic light emitting layer 220 and the cathode electrode 240 can communicate with each other and the internal light emitted from the organic light emitting layer 220 is emitted to the outside Or the like. Examples of transparent conductive oxides include indium doped materials such as indium tin oxide (ITO), indium zinc oxide, and indium tin zinc oxide. These materials are deposited by sputtering to form The organic light emitting layer 220 may be damaged. Therefore, it is preferable that molybdenum oxide (Mo3O2), which can be formed by thermal evaporation and has excellent electric conductivity, is used as a material for forming the first protective layer 230. [

Next, the cathode electrode 240 includes a semitransparent layer 241 formed on the first passivation layer 230 and a transparent layer 242 formed on the semitransparent layer 241.

The translucent layer 241 may be formed of a material having a low work function. The conductive oxide has a high work function and is mainly used as the anode electrode 210, and the cathode electrode 240 should include a material such as a metal having a low work function. For example, the semitransparent layer 241 of the cathode electrode 240 may be formed of Ag, or may be formed of any one of lithium (Li), calcium (Ca), aluminum (Al), copper (Cu), and magnesium And may be formed of a metal including one.

The opaque translucent layer 241 is formed of a thin film capable of transmitting light and can be formed thin to a thickness of several hundreds of angstroms (A) or less because the cathode electrode 240 has to emit the internal light to the outside.

The transparent layer 242 may be formed of a transparent conductive oxide. For example, the transparent layer 242 may be formed of indium tin oxide (ITO), indium zinc oxide (ITO), and indium tin zinc oxide (ITO), as in the case of the anode electrode 210 .

Since the transparent layer 242 is formed of a conductive material, the resistance of the cathode electrode 240 is lowered, thereby reducing power consumption. At the same time, when the transparent layer 242 is formed on the translucent layer 241, the transmittance of the internal light can be further improved.

The cathode electrode 240 may further include an auxiliary translucent layer 243 formed on the transparent layer 242 and an auxiliary transparent layer 244 formed on the auxiliary translucent layer 243. The auxiliary translucent layer 243 may be formed of the same material and the same thickness as the translucent layer 241 and the auxiliary transparent layer 244 may be formed of the same material and the same thickness as the transparent layer 242. [ In addition, the auxiliary semitransparent layer 243 and the auxiliary transparent layer 244 can be alternately deposited a plurality of times in the same order as described above. When the auxiliary translucent layer 243 and the auxiliary transparent layer 244 are repeatedly deposited, the resistance of the cathode electrode 240 can be lowered to solve the low resistance problem.

Further, the multilayer structure of the auxiliary semitransparent layer 243 and the auxiliary transparent layer 244 can simultaneously perform the function of the thin film encapsulation layer. The thin film encapsulation layer is formed in order to prevent the damage of the organic light emitting layer 220 by alternately repeating formation of the inorganic layer and the organic layer. The auxiliary semitransparent layer 243 and the auxiliary transparent layer 244 are repeatedly formed instead of the thin film sealing layer to prevent moisture, air, and foreign substances from being injected from the outside. Accordingly, the multi-layer structure of the cathode electrode 240 can simultaneously perform the function of the thin film encapsulation layer in addition to the effect of improving the low resistance.

Next, a second passivation layer 250 is formed on the cathode electrode 240. More specifically, the second passivation layer 250 is formed on the auxiliary transparent layer 244 or the auxiliary semitransparent layer 243 of the cathode electrode 240. In general, the inorganic layer of the thin film encapsulation layer is formed of silicon nitride or silicon oxide, and the inorganic layer is positioned at the lower and upper ends of the thin encapsulation layer to seal the thin encapsulation layer and the organic emission layer 220 from the outside. The second passivation layer 250 is formed of the same material as the inorganic layer of the thin-film encapsulation layer and functions to seal the organic light-emitting layer 220 from the outside as described above. It is possible to prevent foreign matter from being injected.

At the same time, the refractive index of the second passivation layer 250 may be smaller than the refractive index of the cathode electrode 240 to form a micro cavity structure. The second passivation layer 250 is formed of a material having a lower refractive index than the auxiliary semitransparent layer 243 or the auxiliary transparent layer 244 of the cathode electrode 240 so that the second semiconducting layer 243 or the second semitransparent layer 244, Internally emitted light traveling to the protection layer 250 is totally reflected and is reflected again by the reflective layer 215 of the anode electrode 210 so that the emitted light can be amplified and emitted to the outside. Thus, the light extraction efficiency can be improved.

4 is a cross-sectional view illustrating a portion of an organic light emitting display according to an exemplary embodiment of the present invention.

4, an organic light emitting display according to an exemplary embodiment of the present invention includes a first substrate 201, a second substrate 202, an anode electrode 210, a bank layer 215, A light emitting layer 220, a first passivation layer 230, a cathode electrode 240, and a second passivation layer 250. In particular, the organic light emitting display device further includes an auxiliary electrode 211. Further, a bank layer 215 may be further formed between the anode electrode 210 and the organic light emitting layer 220.

Even if the cathode electrode 240 is formed in a multi-layered structure, if the number of the layers is increased, there is a disadvantage of reduction in luminance and the thickness is increased. Therefore, the number of layers of the multi- (Not shown).

The auxiliary electrode 211 may be formed of the same material as the anode electrode 210 and may be formed of the same material at the same time as other metal wirings are formed. 4 is a view showing an example in which the auxiliary electrode 211 is formed of the same material as the anode electrode 210 in the same layer. At this time, the barrier rib 216 may be formed on the auxiliary electrode 211 for the contact between the auxiliary electrode 211 and the cathode electrode 240.

Thereafter, a semi-transparent layer 241 formed on the bottom of the organic light emitting layer 220, the first passivation layer 230, and the cathode electrode 240 is formed on the barrier layer 216, the bank layer 215, and the anode electrode 210, . A thin film is not formed in the space between the barrier rib 216 and the bank layer 215 because the organic light emitting layer 220, the first passivation layer 230 and the semi-transparent layer 241 have low step coverage .

Step coverage refers to the property of a material that a thin film can be deposited on its side surface in a stepped region. Therefore, a substance having a large step coverage can be deposited as a thin film on the side surface of the reverse tapered partition wall 216 as well.

Therefore, it is preferable that a transparent layer 242 formed of a transparent conductive oxide having a high step coverage is formed on the translucent layer 241 after the translucent layer 241 of the cathode electrode 240 is formed. The transparent layer 242 is brought into contact with the auxiliary electrode 211, so that the resistance of the cathode electrode 240 can be further lowered.

The auxiliary translucent layer 243 and the auxiliary transparent layer 244 may be further formed on the transparent layer 242. However, as described above, there may occur disadvantages such as decrease in brightness and increase in thickness of the emitted light emitted to the outside, As the number of thin films increases, the emitted light may be lost internally due to total internal reflection or the like.

Therefore, in the embodiment in which the auxiliary electrode 211 is applied, it is preferable, but not limited, to form the auxiliary semi-transparent layer 243 and the auxiliary transparent layer 244 in one or two additional times.

It will be understood by those skilled in the art that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof.

It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

201: first substrate 202: second substrate
210: anode electrode 215: reflective layer
220: organic light emitting layer 230: first protective layer
240: cathode electrode 241: semi-transparent layer
242: transparent layer 250: second protective layer

Claims (17)

An anode electrode formed on the first substrate;
An organic light emitting layer formed on the anode electrode;
A first passivation layer formed on the organic emission layer and preventing damage to the organic emission layer;
A cathode electrode formed on the first passivation layer;
A second passivation layer formed on the cathode electrode to prevent damage to the cathode electrode and the organic emission layer; And
And a second substrate formed on the second protective layer,
The cathode electrode
A semi-transparent layer formed on the first protective layer;
A transparent layer formed on the translucent layer;
An auxiliary translucent layer formed on the transparent layer; And
And an auxiliary transparent layer formed on the auxiliary semitransparent layer,
Wherein the cathode electrode has a multilayer structure in which the auxiliary semitransparent layer and the auxiliary transparent layer are alternately and repeatedly laminated so that the cathode electrode having the multilayer structure seals the organic light emitting layer. The method according to claim 1,
Wherein the first passivation layer is molybdenum oxide (MoOx). delete The method according to claim 1,
And the second passivation layer is formed on the auxiliary transparent layer of the cathode electrode. The method according to claim 1,
Wherein the refractive index of the second passivation layer is lower than the refractive index of the cathode electrode to reflect a part of the internal light emitted from the organic light emitting layer. 3. The method of claim 2,
Wherein the anode electrode includes a reflective layer and reflects the internal light reflected from the second passivation layer to amplify the light using a resonance phenomenon. The method according to claim 1,
Wherein the translucent layer comprises at least one of Ag, Li, Ca, Au, Al, Cu, and Mg. Emitting display device. The method according to claim 1,
The transparent layer preferably includes any one of indium tin oxide (ITO), indium zinc oxide (IZO), indium tin zinc oxide (ITZO), aluminum oxide (AlOx), silicon oxide (SiOx) and silicon nitride (SiNx) The organic electroluminescent display device comprising: Forming an anode electrode on the first substrate;
Forming an organic light emitting layer on the anode electrode;
Forming a first passivation layer on the organic light emitting layer;
Forming a cathode electrode on the first passivation layer;
Forming a second protective layer on the cathode electrode; And
And bonding the second substrate to the second protective layer,
The forming of the cathode electrode may include:
Forming a translucent layer on the first passivation layer;
Forming a transparent layer on the semi-transparent layer;
Forming an auxiliary translucent layer on the transparent layer; And
And forming an auxiliary transparent layer on the auxiliary translucent layer,
Wherein the cathode electrode is formed in a multi-layer structure in which the auxiliary semitransparent layer and the auxiliary transparent layer are alternately and repeatedly laminated, and the cathode electrode having the multi-layer structure is formed to seal the organic light emitting layer . 10. The method of claim 9,
Wherein the first passivation layer is formed by depositing molybdenum oxide (MoOx) by a thermal evaporation method. 10. The method according to claim 9, wherein each of the translucent layer and the transparent layer is formed by a sputtering method. 10. The method of claim 9,
And the second passivation layer is formed on the transparent layer of the cathode electrode. delete 10. The method of claim 9,
And the second passivation layer is formed on the auxiliary transparent layer of the cathode electrode. 10. The method of claim 9,
Wherein the refractive index of the second passivation layer is a transparent inorganic material having a refractive index smaller than a refractive index of the cathode electrode. The method according to claim 1,
Further comprising an auxiliary electrode comprising a conductive material,
Wherein the transparent layer is in contact with the auxiliary electrode and the cathode electrode is in contact with the auxiliary electrode in the transparent layer and the semitransparent layer. 10. The method of claim 9,
Further comprising forming an auxiliary electrode including a conductive material on the first substrate,
Wherein the transparent layer is in contact with the auxiliary electrode and the cathode electrode is in contact with the auxiliary electrode in the transparent layer and the semi-transparent layer.

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