KR101993526B1 - Microfluidic device and method for manufacturing the same - Google Patents

Abstract

A microfluidic device according to an embodiment includes: a first piezoelectric substrate; A second piezoelectric substrate arranged to face the upper surface of the first piezoelectric substrate; A first transducer patterned on an upper surface of the first piezoelectric substrate; A second transducer patterned on a lower surface of the second piezoelectric substrate; And a fine flow channel disposed between the first piezoelectric substrate and the second piezoelectric substrate, wherein a surface acoustic wave generated in the first transducer or the second transducer is transmitted to the fine flow channel, Dimensional flow in the flow channel.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a microfluidic device,

The present invention relates to a microfluidic device and a method for manufacturing the microfluidic device, and more particularly, to a microfluidic device capable of three-dimensionally controlling the flow of fluid or fine particles in a microfluidic channel, And a manufacturing method thereof.

Techniques for controlling microfluids and particles in micron-sized microenvironments have played an important role in many areas, including biochemical research and medical analysis. However, in the subject of microfluidic mixing, the flow in most microfluidic devices is a laminar flow with a low Reynolds number, which makes it difficult to mix quickly and uniformly. Thus, fluid mixing in the microfluidic channel depends primarily on molecular diffusion and its efficiency is very low. Many attempts have been made to develop a technique capable of quickly and uniformly mixing two different fluids in a variety of ways.

In a passive method that does not utilize external force, research has been carried out to mix the fluid by changing the structure of the microfluidic channel to zigzag structure, herringbone structure, and three-dimensional multi-layer structure. This approach increases the width of the interface between the two fluids and interferes with the flow of fluid to the laminar flow to increase the fluid mixing efficiency.

This may require sophisticated microfluidic channel design and complex fabrication processes. In addition, a method of mixing the fluid by generating turbulence having a high Reynolds number using a very high flow rate in the microfluidic channel has also been used. This may require special chemical treatments within the microfluidic device to withstand the large pressure differentials that occur within the microfluidic channel due to the high flow rate.

On the other hand, as an active fluid mixing method for externally applying a force in a microfluidic device, a method using electric, magnetic, optical, pressure, heat, or the like has been developed. These devices have the advantage of greatly reducing the time required for fluid mixing as they externally apply force.

Recently, a method of mixing fluids using an uneven electric field at the interface of micro- and nano-sized microfluidic channels has been developed. A strong electric field concentrated around the entrance of the nanochannel generates a vortex and mixes the fluid therethrough. This method may require multiple processing processes to produce micro- and nano-sized channels.

In recent years, acoustic wave-based fluid mixing has attracted a great deal of attention due to its non-invasiveness and ease of use. Using a piezoelectric substrate and an ultrasonic transducer, acoustic waves are generated to increase the mixing efficiency of the fluid through the advection in the microfluidic channel, and shorten the time required for the mixing. As a previous study, a method of trapping micro air bubbles in a horseshoe-shaped structure in a microfluidic channel and then vibrating it using an acoustic wave has been developed to interfere with the flow of the surrounding fluid.

The first piezoelectric substrate and the second piezoelectric substrate are disposed at the upper and lower ends of the micro flow channel to prevent energy dissipation of the surface acoustic wave as the height of the micro flow channel increases, And a method of manufacturing the microfluidic device.

An object according to an embodiment is to provide a method for controlling fluid or fine particles (particularly, nanoparticles) in a microfluidic channel, either individually or simultaneously, by controlling the electrical energy applied to the first transducer and the second transducer, And a method of manufacturing the microfluidic device.

An object of the present invention is to provide a microfluidic device capable of smoothly mixing fluids by generating a three-dimensional flow in a microfluidic channel, and a method of manufacturing the microfluidic device.

An object of an embodiment is to provide a microfluidic device capable of improving efficiency of microfluidic and particle control and capable of performing various functions at a wide range of operating frequencies as well as being capable of being processed at a high yield and a method of manufacturing the microfluidic device .

An object of an embodiment is to provide a microfluidic device that can be utilized for mixing of microfluids, separation or concentration of fine particles or cells (for example, cancer cells, bacteria, blood cells), and a method of manufacturing the microfluidic device .

An object of an embodiment is to provide a microfluidic device capable of controlling particles of temperature sensitive proteins, cells and the like by generating flow of fluid or fine particles in a microfluidic channel without using a temperature change, Method.

According to an aspect of the present invention, there is provided a microfluidic device comprising: a first piezoelectric substrate; A second piezoelectric substrate arranged to face the upper surface of the first piezoelectric substrate; A first transducer patterned on an upper surface of the first piezoelectric substrate; A second transducer patterned on a lower surface of the second piezoelectric substrate; And a fine flow channel disposed between the first piezoelectric substrate and the second piezoelectric substrate, wherein a surface acoustic wave generated in the first transducer or the second transducer is transmitted to the fine flow channel, Dimensional flow in the flow channel.

According to one aspect of the present invention, surface acoustic waves generated in the first transducer are transmitted to the lower side of the microfluidic channel, and surface acoustic waves generated in the second transducer are transmitted to the upper side of the microfluidic channel.

According to one aspect of the present invention, the first transducer and the second transducer may be disposed to be offset from each other with the fine flow channel interposed therebetween.

According to one aspect, the first transducer and the second transducer may be arranged to face each other with the fine flow channel therebetween.

According to one aspect of the present invention, at least one fluid injection port is provided at one end of the microfluidic channel so that fluid injected into the at least one fluid injection port can be mixed in the microfluidic channel.

According to one aspect of the present invention, there is further provided a control unit for controlling a surface acoustic wave generated by the first transducer or the second transducer, wherein the control unit controls the flow of the fluid or fine particles in the micro flow channel to 3 Dimensionally.

According to another aspect of the present invention, there is provided a method of manufacturing a microfluidic device, including: patterning a first transducer on a first piezoelectric substrate; Patterning a second transducer on a second piezoelectric substrate; And forming a microfluidic channel through which a fluid including fine particles flows between the first piezoelectric substrate and the second piezoelectric substrate, wherein the first piezoelectric substrate is bonded to a lower end of the microfluidic channel, The second piezoelectric substrate may be bonded to the upper end of the micro flow channel.

According to one aspect of the present invention, the step of forming a microfluidic channel through which a fluid including fine particles flows between the first piezoelectric substrate and the second piezoelectric substrate includes the steps of: forming, on the upper surface of the master mold, 1 reversibly bonding the piezoelectric substrate; Injecting a photocurable material into the master mold; Subjecting the photocurable material to primary light curing; Removing the master mold; Bonding the second piezoelectric substrate to a microfluidic channel made of the photocurable material so as to face the first piezoelectric substrate; And secondary light curing the photocurable material.

According to one aspect of the present invention, an alignment marker for aligning the first piezoelectric substrate is provided on an upper surface of the master mold, and the first piezoelectric substrate is reversibly bonded to the upper surface of the master mold provided in the shape of the micro flow channel , The first piezoelectric substrate may be aligned with the alignment markers, and the first piezoelectric substrate may be reversibly bonded to the upper surface of the master mold.

According to the microfluidic device and the manufacturing method of the microfluidic device according to the embodiment, the first piezoelectric substrate and the second piezoelectric substrate are disposed at the upper and lower ends of the microfluidic channel, and the surface acoustic wave The energy loss of the surface acoustic wave can be prevented and the energy transfer efficiency of the surface acoustic wave can be improved.

According to the microfluidic device and the method for fabricating the microfluidic device according to the embodiment, the fluid or the fine particles in the microfluidic channel Particularly, nanoparticles) can be variably or three-dimensionally controlled.

According to the microfluidic device and the method for fabricating the microfluidic device according to one embodiment, the fluid can be smoothly mixed by generating the three-dimensional flow in the microfluidic channel.

According to the microfluidic device and the method for fabricating the microfluidic device according to one embodiment, it is possible to improve the efficiency of microfluidic and particle control, process at a high yield, and perform various functions at a wide range of operating frequencies .

According to the microfluidic device and the method for manufacturing the microfluidic device according to one embodiment, it can be utilized for mixing of microfluids, separation or concentration of fine particles or cells (for example, cancer cells, bacteria, blood cells) .

According to the microfluidic device and the method for fabricating the microfluidic device according to the embodiment, the flow of the fluid or the fine particles in the microfluidic channel is generated without using the temperature change, thereby controlling the particles such as proteins and cells sensitive to temperature .

1 shows a microfluidic device according to one embodiment.
2 is a flowchart showing a method of manufacturing a microfluidic device according to an embodiment.
FIGS. 3A to 3D illustrate a fabrication process of a microfluidic device according to an embodiment.
Figures 4a-4e illustrate the eddy effect of two fluids under slow flow conditions.
Figures 5A through 5E show the result of mixing microfluidic fluid in the microfluidic channel.
6A and 6B show the behavior of fine particles for a single SAW and a single SAW.

Hereinafter, embodiments will be described in detail with reference to exemplary drawings. It should be noted that, in adding reference numerals to the constituent elements of the drawings, the same constituent elements are denoted by the same reference symbols as possible even if they are shown in different drawings. In the following description of the embodiments, detailed description of known functions and configurations incorporated herein will be omitted when it may make the best of an understanding clear.

In describing the components of the embodiment, terms such as first, second, A, B, (a), and (b) may be used. These terms are intended to distinguish the constituent elements from other constituent elements, and the terms do not limit the nature, order or order of the constituent elements. When a component is described as being "connected", "coupled", or "connected" to another component, the component may be directly connected or connected to the other component, Quot; may be "connected," "coupled," or "connected. &Quot;

The components included in any one embodiment and the components including common functions will be described using the same names in other embodiments. Unless otherwise stated, the description of any one embodiment may be applied to other embodiments, and a detailed description thereof will be omitted in the overlapping scope.

1 shows a microfluidic device according to one embodiment.

1, a microfluidic device 10 according to an embodiment includes a first piezoelectric substrate 100, a second piezoelectric substrate 200, a first transducer 300, a second transducer 400, And may include a microfluidic channel 500.

The first piezoelectric substrate 100 and the second piezoelectric substrate 200 are made of a piezoelectric material so that they can be converted into mechanical energy such as vibration when electric energy is applied. The piezoelectric material is, for example, a lithium niobate (LiNbO3) or quartz. At this time, when electrical energy is applied to the first piezoelectric substrate 100 and the second piezoelectric substrate 200, mechanical contraction or expansion may occur.

The first piezoelectric substrate 100 may be a lower plate with respect to the microfluidic channel 500 and the second piezoelectric substrate 200 may be a top plate with respect to the microfluidic channel 500.

In other words, the first piezoelectric substrate 100 and the second piezoelectric substrate 200 can be arranged so as to face each other up and down, and in particular, the second piezoelectric substrate 200 faces the upper surface of the first piezoelectric substrate 100 .

The first transducer 300 and the second transducer 400 may be disposed on the first piezoelectric substrate 100 and the second piezoelectric substrate 200, respectively.

The first transducer 300 is patterned on the upper surface of the first piezoelectric substrate 100 and can generate the first surface acoustic wave A by applying electrical energy to the first piezoelectric substrate 100, The transducer 400 is patterned on the lower surface of the second piezoelectric substrate 200 and the second surface acoustic wave B can be generated by applying electrical energy to the second piezoelectric substrate 200. [

Also, the first transducer 300 and the second transducer 400 may be provided as an interdigital transducer, for example. In this case, the electrodes in which the fingers are staggered may be arranged in parallel or in a concentrated form And can be patterned on the first piezoelectric substrate 100 and the second piezoelectric substrate 200.

The structure or arrangement of the electrodes constituting the first transducer 300 and the second transducer 400 may be variously designed so that the surfaces of the first transducer 300 and the second transducer 400, It is natural that the control of the seismic waves can be further diversified.

Specifically, when the first transducer 300 is provided with a pair of first transducers and the second transducer 400 is provided with a pair of second transducers, a pair of first transducers 300 may be spaced apart from each other with respect to the lower end of the microfluidic channel 500 and the pair of second transducers 400 may be spaced apart from each other with respect to the upper end of the microfluidic channel 500. At this time, the pair of first transducers 300 and the pair of second transducers 400 may be arranged to face each other with respect to the micro flow channel 500.

By the arrangement of the pair of first transducers 300 and the pair of second transducers 400 described above, the first surface acoustic wave A generated in the pair of first transducers 300 is fine The second surface acoustic waves B transmitted to one side of the flow channel 500, for example, the lower side and generated by the second pair of transducers 400, are transmitted to the other side of the micro flow channel 500, For example, toward the upper side.

In addition, one first transducer 300 may be patterned on the first piezoelectric substrate 100, one second transducer 400 may be patterned on the second piezoelectric substrate 200, The transducer 300 and the one second transducer 400 may be arranged to be shifted from each other or diagonally with respect to the microfluidic channel 500.

Alternatively, a first transducer 300 such as three or more, e.g., three, two, five, or three pairs may be patterned on the first piezoelectric substrate 100 and the first transducer 300 may be provided on the second piezoelectric substrate 200 A second transducer 400 such as three, two, five, three, or more can be patterned and three or more first transducers 300 and three or more second transducers 400 can be patterned May be disposed on the first piezoelectric substrate 100 and the second piezoelectric substrate 200, respectively.

The arrangement of the first transducer 300 and the second transducer 400 on the first piezoelectric substrate 100 and the second piezoelectric substrate 200 is the same as that of the surface acoustic wave generated in the first transducer 300 And the surface acoustic wave (B) generated in the second transducer (400) can transmit surface acoustic waves to the micro flow channel (500).

In addition, the acoustic waves of the surface acoustic waves generated in the first transducer 300 and the second transducer 400 can control the fluid or fine particles in the fine droplet or the microfluidic channel 500.

The speed of the surface acoustic wave in contact with the fluid in the microfluidic channel 500 is lower than the speed (-3900 m / s) at which the surface acoustic wave propagates along the surfaces of the first piezoelectric substrate 100 and the second piezoelectric substrate 200 (- 1495m / s). The surface acoustic waves propagating into the fluid due to this velocity difference are refracted with the angle (23 degrees) defined by the following equation, which is called Rayleigh angle.

If the microelectrodes are disposed at positions facing each other such as the first transducer 300 or the second transducer 400 and the respective surface acoustic waves are allowed to cross each other, the normal surface acoustic wave Standing surface acoustic wave (SSAW) is formed. The point where the vibration energy is maximized is called the anti-pressure node, and the point where the vibration energy is minimized by the offset phenomenon is called the pressure-node. In the microfluidic channel 500 located in the region between opposing electrodes, the particles are moved by the normal surface acoustic wave to the pressure point or the semi-pressure point, where the force is defined as follows.

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Ρc, ρw, βc, and βw denote the particle density, the density of the medium, the compressibility of the particles, and the compressibility of the medium, respectively, where p ₀ , λ and Vc denote the elastic pressure, wavelength and volume of the target microparticles. P, Z, and A denote the areas of the input power, the impedance of the electrode, and the surface acoustic waves, respectively. If Φ> 0, the fine particles move to the pressure point. If Φ <0, the fine particles move to the semi-pressure point.

As described above, a flow is generated in the microfluidic channel 500 by the surface acoustic wave or the normal surface acoustic wave generated in the first transducer 300 or the second transducer 400, Control of fine particles becomes possible.

Although not shown in detail, a control unit (not shown) may be connected to the first transducer 300 or the second transducer 400, and the first transducer 300 or the second transducer 400 may be connected to the first transducer 300 or the second transducer 400, The surface acoustic waves generated in the microchannel 400 can be controlled, and as a result, the flow of fluid or fine particles (particularly, nanoparticles) in the microfluidic channel 500 can be controlled three-dimensionally (or spatially).

Meanwhile, as described above, the microfluidic channel 500 through which the fluid including the fine particles flow may be disposed between the first piezoelectric substrate 100 and the second piezoelectric substrate 200.

The micro flow channel 500 is disposed at a position where the first surface acoustic wave A generated from the first transducer 300 or the second surface acoustic wave B generated from the second transducer 400 is transmitted .

The fine flow channel 500 may extend in a direction perpendicular to the traveling direction of the surface acoustic wave A or B generated in the first transducer 300 or the second transducer 400. For example, when the traveling direction of the surface acoustic wave (A or B) generated in the first transducer 300 or the second transducer 400 is the transverse direction of the first piezoelectric substrate 100 or the second piezoelectric substrate 200 The microfluidic channel 500 may be formed to extend in the longitudinal direction of the first piezoelectric substrate 100 or the second piezoelectric substrate 200.

At this time, at least one fluid injection port (502, 504) may be provided at one end of the microfluidic channel (500), and at least one fluid discharge port (506) may be provided at the other end of the microfluidic channel (500).

For example, a tube for injecting and discharging fluid may be connected to at least one fluid injection port (502, 504) and at least one fluid discharge port (506) and fixed using an adhesive such as an epoxy bond.

The at least one fluid injected into the at least one fluid injection port 502 and 504 by the surface acoustic waves generated in the first transducer 300 and the second transducer 400 may flow into the micro flow channel 500 Lt; / RTI &gt;

FIG. 1 shows an example in which the microfluidic device 10 according to the embodiment mixes two different fluids to provide two fluid injection ports and a single fluid discharge port. However, The number of the injection port or the fluid discharge port is not limited to this, and it is natural that various channel or chamber structures may be provided according to the application field of the microfluidic device 10 according to one embodiment.

1 shows at least one fluid injection port 502 and 504 and at least one fluid discharge port 506 penetrating the upper surface of the second piezoelectric substrate 200. At least one fluid injection port 502, 504 and at least one fluid outlet 506 may be formed on one side and the other side of the first piezoelectric substrate 100 and the second piezoelectric substrate 200.

A first surface acoustic wave (A) and a second surface acoustic wave (B) are generated by applying a voltage to the first transducer (300) and the second transducer (400) The second surface acoustic waves B are all directed toward the microfluidic channel 500 and can generate a three-dimensional internal flow in the microfluidic channel 500.

Accordingly, by controlling the first surface acoustic wave (A) and the second surface acoustic wave (B) generated in the first transducer (300) and the second transducer (400), the internal flow in the micro flow channel To control fluid or fine particles in the microfluidic channel 500 in a variety of ways.

For example, the first surface acoustic wave A and the second surface acoustic wave B generated by the first transducer 300 and the second transducer 400, that is, the double surface acoustic wave (dual SAW) An internal flow can be generated so that the fluid is circulated in the same direction in the channel 500, so that fluid mixing in the microfluidic channel 500 can be made faster and more efficiently.

In addition, when the surface acoustic wave is transmitted to the microfluidic channel 500 in a state having a Rayleigh angle, wave energy is lost and energy may not be fully transmitted to the microfluidic channel 500 having a high height. Since the height of the microfluidic channel 500 is related to the throughput of the microfluidic channel 500, it is necessary to improve the efficiency of the transmission of the energy regardless of the height of the microfluidic channel 500.

In particular, the microfluidic device 10 according to an embodiment uses a plurality of piezoelectric substrates or multiple piezoelectric substrates bonded to the upper and lower ends of the microfluidic channel 500, so that even when the height of the microfluidic channel 500 is high The transmission efficiency of the wave energy can be improved and the microfluid can be processed with high efficiency or high yield as compared with the case of using a single piezoelectric substrate.

The microfluidic device according to one embodiment of the present invention has been described. Hereinafter, a method of manufacturing a microfluidic device according to one embodiment will be described.

FIG. 2 is a flowchart illustrating a method of manufacturing a microfluidic device according to an embodiment. FIGS. 3A to 3C illustrate a process of manufacturing a microfluidic device according to an embodiment. Referring to FIG.

Referring to FIG. 2, a microfluidic device according to an embodiment may be manufactured as follows.

First, the first transducer is patterned on the first piezoelectric substrate (S10), and the second transducer is patterned on the second piezoelectric substrate (S20).

In this case, the first transducer or the second transducer may be a micro-electrode in the form of a single-phase uni-directional transducer (SPUDT), for example. However, it goes without saying that the shape or arrangement of the first transducer or the second transducer may be varied.

Subsequently, a microfluidic channel through which a fluid including fine particles flows is formed between the first piezoelectric substrate and the second piezoelectric substrate (S30).

At this time, the first piezoelectric substrate may be bonded to the lower end of the microfluidic channel, and the second piezoelectric substrate may be bonded to the upper end of the microfluidic channel.

More specifically, with reference to FIGS. 3A to 3D, the step of forming a microfluidic channel through which a fluid containing fine particles flows between the first piezoelectric substrate and the second piezoelectric substrate can be performed as follows.

First, the first piezoelectric substrate 100 is reversibly bonded to the upper surface of the master mold M provided in the shape of a micro flow channel (S31).

At this time, the master mold M provided in the form of a micro flow channel may be a PDMS channel manufactured through a semiconductor etching process. At this time, the master mold M may be provided with an alignment marker A for precisely adjusting or aligning the position of the first transducer 300 patterned on the first piezoelectric substrate 100, The first piezoelectric substrate 100 can be reversibly bonded to the upper surface of the master mold M after aligning the ends of the first piezoelectric substrate 100 with the aligned markers A. [

Then, the photocurable material N is injected into the master mold M (S32).

At this time, the photocurable material (N) constitutes a microfluidic channel, for example, NOA (Norland Optical Adhesive) which can be cured by ultraviolet rays may be used.

Then, the photocurable material N is first cured (S33), and the master mold is removed (S34).

For example, the photo-curable material (N) is exposed to ultraviolet radiation for about 60 seconds. At this time, the photocurable material N is not completely cured, and even if the master mold M is removed, the degree of curing can be maintained to such a degree that the shape thereof can be maintained. In other words, the microfluidic channel 500 formed by the photo-curable material N at this time can be a channel in an incompletely cured state.

Then, the second piezoelectric substrate 200 is bonded to the microfluidic channel 500 made of the photo-curable material N so as to face the first piezoelectric substrate 100 (S36), and the photo- (S37).

Specifically, the first piezoelectric substrate 100 is turned upside down so that the microfluidic channel 500 made of the photo-curable material N is positioned on the first piezoelectric substrate 100, After bonding the piezoelectric substrate 200, secondary light curing is performed through additional ultraviolet exposure. Thereby, the second piezoelectric substrate 200 is bonded to the microfluidic channel 500 made of the photo-curable material N, and the microfluidic channel 500 can be completely cured so as to be usable.

Hereinafter, experimental results using a microfluidic device according to an embodiment will be described.

Figs. 4A to 4E show vortex effects of two fluids under slow flow conditions, Figs. 5A to 5E show mixing results of microfluidic channels in a microfluidic channel, Figs. 6A and 6B show a single SAW and double Shows the behavior of the fine particles with respect to the surface acoustic wave (single SAW).

Referring to Figs. 4A to 4E, the vortex effect of two fluids can be confirmed in a slow flow condition.

At this time, FIGS. 4A to 4D show the variation patterns with time, and FIG. 4E shows the results with the three-dimensional vortex effect.

Specifically, an internal flow can be formed in the microchannel channel through surface acoustic waves generated in the first transducer and the second transducer patterned on the first piezoelectric substrate and the second piezoelectric substrate. At this time, an internal flow is formed in one direction within the microfluidic channel by the surface acoustic wave. It is injected into the channel to maintain the laminar flow and can be visualized through a solution of flowing distilled water and fluorescent nanoparticles of 140 nm in size.

For visualization of the internal flow, both fluids were injected at a slow flow rate of 1 μl / min and a voltage of 14V was applied to the first transducer and the second transducer. In the absence of the surface acoustic wave (t = 0ms), the laminar flow is maintained, but the suspended solu- tion of the fluorescent particles, which appears green as time elapses after the generation of surface acoustic waves, is swirled to one side of the flow , 60ms). At t = 90ms, it was confirmed that the suspended solution of the fluorescent particles reached the opposite wall of the microfluidic channel, and the formation of the internal flow was confirmed.

Further, with reference to Figs. 5A to 5E, an example of the result of the mixing of microfluid is as follows.

As shown in FIG. 5A, the mixing efficiency according to the applied voltage was compared using a fixed flow rate of 50 μl / min. Comparing the case of using single SAW and the case of using dual SAW, it can be confirmed that the mixing efficiency is higher when using dual SAW at the same voltage.

As shown in FIG. 5B, mixing of two fluids does not occur at an applied voltage of 6 V or less. As shown in FIG. 5C, when a voltage of 14V is applied, the mixing efficiency reaches 100% when a dual SAW (dual SAW) is used, and a single SAW is used as shown in FIG. 5D The mixing efficiency is about 38%. Further, when a single SAW is used, 22V must be applied in order to obtain a mixing efficiency of 100%.

As shown in FIG. 5E, the intensity of fluorescence normalized in the channel width direction was measured for each of these cases. The fluorescence intensity is measured at 100 and 0 with respect to the half of the microfluidic channel because the mixing does not occur at a voltage of 6 V or less. However, when 14 V is applied thereafter, the fluorescence intensity measured decreases and the fluorescence spreads in the channel width direction, In the case of using dual surface acoustic wave (Dual SAW) like the microfluidic device according to one embodiment, the fluorescence intensity is lowered and fluorescence is spread throughout the microfluidic channel.

6A and 6B, the behaviors of the fine particles with respect to a single SAW and a single SAW may be as follows.

As a result of comparing the behaviors of fine particles with respect to a single SAW and a dual SAW in a state where particles are located at the same position in a cross section of a micro flow channel, It is confirmed that the rotation rate (speed) with respect to the particle behavior in the case of generating the double surface acoustic wave is faster than that in the case of using the conventional single surface acoustic wave (single SAW), and the movement distance of the particle required for one rotation is also shortened .

Although the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, And various modifications and changes may be made thereto without departing from the scope of the present invention. Accordingly, the spirit of the present invention should not be construed as being limited to the embodiments described, and all of the equivalents or equivalents of the claims, as well as the claims set forth below, fall within the scope of the present invention.

10: Microfluidic device
100: first piezoelectric substrate
200: second piezoelectric substrate
300: 1st transducer
400: second transducer
500: micro flow channel

Claims (9)

delete delete delete delete delete delete Patterning a first transducer on the first piezoelectric substrate;
Patterning a second transducer on a second piezoelectric substrate; And
Forming a microfluidic channel through which a fluid including fine particles flows between the first piezoelectric substrate and the second piezoelectric substrate;
Lt; / RTI &gt;
Forming a microfluidic channel through which a fluid including fine particles flows between the first piezoelectric substrate and the second piezoelectric substrate,
Reversibly bonding the first piezoelectric substrate to the upper surface of the master mold provided in the shape of the micro flow channel;
Injecting a photocurable material into the master mold;
Subjecting the photocurable material to primary light curing;
Removing the master mold;
Bonding the second piezoelectric substrate to a microfluidic channel made of the photocurable material so as to face the first piezoelectric substrate; And
Curing the photocurable material;
/ RTI &gt;
The first piezoelectric substrate is bonded to the lower end of the microfluidic channel,
And the second piezoelectric substrate is bonded to the upper end of the microfluidic channel.
delete 8. The method of claim 7,
An alignment marker for aligning the first piezoelectric substrate is provided on an upper surface of the master mold,
The first piezoelectric substrate is aligned with the alignment markers and the first piezoelectric substrate is placed on the upper surface of the master mold in the step of reversibly bonding the first piezoelectric substrate to the upper surface of the master mold provided in the shape of the micro flow channel, Wherein the microfluidic device is reversibly bonded.

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