KR101884096B1 - Apparatus for monitoring multiple structure using electromagnetic acoustic resonance frequency and method thereof - Google Patents

Abstract

The present invention relates to an apparatus and method for detecting internal defects in a complex structure using an electromagnetic acoustic resonance frequency, and an apparatus for measuring internal defects of a complex structure according to an embodiment of the present invention includes: An electromagnetic acoustic resonance sensor including a coil for generating ultrasonic waves and receiving a reflected ultrasonic wave, and a magnet disposed on the coil; A jig and a jig driving unit for moving the electromagnetic acoustic resonance sensor on the surface of the complex structure; And a control unit for controlling the jig driving unit and detecting the resonance frequency from the ultrasonic waves received from the electromagnetic acoustic resonance sensor. At this time, the controller generates an ultrasonic resonance having a predetermined frequency range through the coil into the interior of the composite structure, and detects internal defects of the composite structure based on the ultrasonic resonance frequency reflected by the composite structure .

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to an apparatus and method for detecting an internal defect in a complex structure using an electromagnetic acoustic resonance frequency,

The present invention relates to an apparatus and method for detecting an internal defect in a composite structure using an electromagnetic acoustic resonance frequency.

In a composite structure composed of materials having different physical properties such as metals or semiconductors, if there is a non-bonding portion between different material layers, a defect occurs. Therefore, quality inspection for detecting defects in composite structures is essential.

However, in the case of the conventional non-destructive inspection technique using ultrasonic waves, the use of a fluidizing agent is inevitable, and corrosion of the composite structure may be caused by the fluidizing agent. Therefore, in order to detect defects in the composite structure, it is troublesome to vacuum-package the composite structure and perform inspection by applying a fluidizing agent.

Therefore, there is a need for an internal defect detection apparatus of a complex structure that can easily detect an internal defect of a composite structure without applying a vacuum package or a fluidizing agent.

Korean Patent Publication No. 10-2011-0004393 (entitled " Nondestructive Ultrasonic Inspection Method and Inspection Apparatus for Detecting Internal Defects in Semiconductor Materials ") discloses a method of measuring relative motion between a semiconductor material and a semiconductor material, Wherein the ultrasonic device emits ultrasonic waves toward the semiconductor material during the generation of relative motion between the side of the semiconductor material and the ultrasonic device, and at the same time, the ultrasonic-echo signal from the inside of the semiconductor material to the ultrasonic pulse, Discloses a non-destructive inspection method for detecting defects in a semiconductor material having a length and a cross-sectional area for inspecting a defect inside the semiconductor material from the entire bulk of the semiconductor material.

However, the above-described inspection apparatus also requires a liquid medium in order to fill the semiconductor material with the ultrasonic pulse and the ultrasonic echo-signal, and the inspection must proceed in a state in which the liquid is immersed in the sieve body.

Korean Patent Publication No. 10-2011-0004393

SUMMARY OF THE INVENTION The present invention provides an apparatus and method for detecting internal defects in a complex structure using an electromagnetic acoustic resonance frequency.

Specifically, there is provided an apparatus and method for detecting internal defects of a complex structure capable of detecting whether or not a defect exists in a non-invasive and non-destructive complex structure using an electromagnetic acoustic resonance frequency.

It is to be understood that both the foregoing general description and the following detailed description of the present invention are exemplary and explanatory and are not intended to limit the invention to the precise form disclosed. It can be understood.

As a technical means for accomplishing the above technical object, an internal defect measuring apparatus of a composite structure according to a first embodiment of the present invention is disposed on a surface of a composite structure, generates ultrasonic waves into the composite structure, An electromagnetic acoustic resonance sensor including a coil for receiving ultrasonic waves to be received and a magnet disposed on the coil; A jig and a jig driving unit for moving the electromagnetic acoustic resonance sensor on the surface of the complex structure; And a control unit for controlling the jig driving unit and detecting the resonance frequency from the ultrasonic waves received from the electromagnetic acoustic resonance sensor. At this time, the controller generates an ultrasonic resonance having a predetermined frequency range through the coil into the interior of the composite structure, and detects internal defects of the composite structure based on the ultrasonic resonance frequency reflected by the composite structure .

According to a second aspect of the present invention, there is also provided a method of manufacturing an ultrasonic diagnostic apparatus, comprising the steps of: generating a ultrasonic wave by generating ultrasonic waves inside a complex structure, receiving a reflected ultrasonic wave, A method of measuring an internal defect measuring apparatus of a complex structure including an acoustic resonance sensor includes the steps of generating an ultrasonic resonance in the interior of the complex structure through the coil, Detecting the ultrasonic resonance frequency of the complex structure based on a frequency response of the control unit reflected by the complex structure; And the controller detects an internal defect of the complex structure based on the ultrasonic resonance frequency.

According to any one of the above-mentioned objects of the present invention, an apparatus and method for detecting an internal defect in a composite structure using an electromagnetic acoustic resonance frequency can be provided.

Specifically, the internal defect detection apparatus of a complex structure according to an embodiment of the present invention can detect whether there is a defect inside the complex structure by non-invasively and non-destructively using the electromagnetic acoustic resonance frequency.

It should be understood, however, that the effects obtained by the present invention are not limited to the above-mentioned effects, and other effects not mentioned may be clearly understood by those skilled in the art to which the present invention belongs It will be possible.

1 shows an example of a composite structure considered in an embodiment of the present invention.
2 is a block diagram schematically showing an internal defect detection apparatus of a composite structure using an electromagnetic acoustic resonance frequency according to an embodiment of the present invention.
3 is a schematic view of an electromagnetic acoustic resonance sensor according to an embodiment of the present invention.
4 shows an example of a coil included in the electromagnetic acoustic resonance sensor according to an embodiment of the present invention.
5 is a view for explaining an internal defect detection principle of an internal defect detection apparatus of a composite structure using an electromagnetic acoustic resonance frequency.
6 is a diagram for explaining driving of an internal defect detection apparatus of a composite structure using an electromagnetic acoustic resonance frequency according to an embodiment of the present invention.
FIG. 7 is a flow chart for explaining a defect detection method of an internal defect detection apparatus of a complex structure using an electromagnetic acoustic resonance frequency according to an embodiment of the present invention.
8 is a graph illustrating the frequency response detected in accordance with one embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and similar parts are denoted by like reference characters throughout the specification.

Throughout the specification, when a part is referred to as being "connected" to another part, it includes not only "directly connected" but also "electrically connected" with another part in between . Also, when an element is referred to as "including" an element, it is to be understood that the element may include other elements as well as other elements, And does not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

In this specification, the term " part " includes a unit realized by hardware, a unit realized by software, and a unit realized by using both. Further, one unit may be implemented using two or more hardware, or two or more units may be implemented by one hardware.

In this specification, some of the operations or functions described as being performed by the terminal or the device may be performed in the server connected to the terminal or the device instead. Similarly, some of the operations or functions described as being performed by the server may also be performed on a terminal or device connected to the server.

1 shows an example of a composite structure considered in an embodiment of the present invention.

The composite structure 50 considered in one embodiment of the present invention includes a first material layer 51, a second material layer 52 and a third material layer 53 formed of different materials, as shown in Fig. ) May be formed by bonding with a bonding agent.

For example, the composite structure 50 may include a second material layer 52 formed of ITO or ISO on top of a first material layer 51 formed of copper or stainless steel (SUS) The layer 53 may be a structure bonded by a bonding agent. At this time, the bonding agent may be indium for example, but is not limited to the above-described structure and materials.

In the case of the composite structure 50 described above, quality inspection is indispensably required because the bonding agent is not uniformly applied and defects occur when non-bonding portions are present. At this time, when the liquid comes into contact with the complex structure 50, it may cause corrosion and the like. In the case of the related art, the complex structure is vacuum-packed and the fluidizing agent is applied to perform the ultrasonic inspection.

Therefore, an embodiment of the present invention is to provide an internal defect detection apparatus for a composite structure capable of detecting internal defects of a composite structure without applying vacuum packaging or fluidizing agent by using an electromagnetic acoustic resonance frequency.

2 is a block diagram schematically showing an internal defect detection apparatus of a composite structure using an electromagnetic acoustic resonance frequency according to an embodiment of the present invention.

2, an internal defect detection apparatus for a composite structure using an electromagnetic acoustic resonance frequency according to an embodiment of the present invention includes an electromagnetic acoustic resonance sensor 100, an excitation unit 130, a reception unit 140, 200, an output unit 300, a jig 400, and a jig driving unit 500.

First, the electromagnetic acoustic resonance sensor 100 induces an electromagnetic acoustic resonance shape inside the complex structure to detect internal defects of the complex structure 50, and receives the reflected resonance frequency.

At this time, the electromagnetic acoustic resonance sensor 100 is connected to the excitation unit 130 and the reception unit 140, and the excitation unit 130 and the reception unit 140 are controlled by the control unit 200.

The control unit 200 controls the excitation unit 130 to adjust the intensity of the pulse signal applied to the complex structure 50 and can detect the resonance frequency received from the reception unit 140. At this time, although not shown, the receiving unit 140 may include an oscilloscope or a signal amplifier.

The controller 200 outputs the resonance frequency detected through the output unit 300 in real time. Here, the output unit 300 may include a display, which may be a light emitting diode (LED), a liquid crystal display (LCD), a thin film transistor-liquid crystal display , A TFT LCD, an organic light emitting diode (OLED), a flexible display, a 3D display, and an electronic paper. However, the present invention is not limited thereto.

Also, the electromagnetic acoustic resonance sensor 100 is fixed by the jig 400, and the jig 400 can be moved by the jig driving part 500. At this time, the jig driving unit 500 can be controlled by the controller 200 in the same manner as the exciting unit 130 and the receiving unit 140.

Hereinafter, with reference to FIG. 3 and FIG. 4, the electromagnetic acoustic resonance sensor 100 according to an embodiment of the present invention will be described in more detail.

3 is a schematic view of an electromagnetic acoustic resonance sensor according to an embodiment of the present invention.

4 shows an example of a coil included in the electromagnetic acoustic resonance sensor according to an embodiment of the present invention.

3, the electromagnetic acoustic resonance sensor 100 generates an electromagnetic acoustic resonance inside the complex structure 50 and receives the resonance frequency reflected by the complex structure 50 and returns And a magnet 120 disposed on the upper portion of the coil 110. The magnet 110 may be a magnet or a magnet.

4, the coil 110 may be a meander or a race-track type coil, but it may be a shape of a coil, But is not limited thereto.

The magnet 120 may be an electromagnet or a permanent magnet and is disposed on the upper portion of the coil 110 to generate a static magnetic field in a direction perpendicular to the surfaces of the coil 110 and the composite structure 50.

When a pulse signal is applied to the conductor of the coil 110 through the excitation unit 130, an eddy current is generated on the surface of the complex structure. The eddy current and the static magnetic field due to the magnetic field by the magnet 120 are applied to the left- A Lorentz force is generated. Therefore, the electromagnetic acoustic resonance sensor induces a vibration phenomenon, that is, a resonance phenomenon, inside the composite structure 50 by the Lorentz force described above. At this time, the pulse signal may be an alternating voltage, for example, and the intensity of the voltage or the like may be adjusted by the controller 200.

Then, the receiver 140 measures the current flowing in the conductor of the coil 110, thereby detecting the resonance frequency of the ultrasonic signal that is reflected back to the complex structure 50.

At this time, the control unit 200 can detect a defect existing in the complex structure 50 through the change of the resonance frequency of the received ultrasonic signal.

5 is a view for explaining an internal defect detection principle of an internal defect detection apparatus of a composite structure using an electromagnetic acoustic resonance frequency.

Specifically, FIG. 5A is an example of an internal defect detection apparatus for detecting a composite structure in which no internal defect exists, and FIG. 5B is an example of an internal defect detection apparatus for detecting a composite structure in which an internal defect exists. It is an example.

5A, when the first material layer 51, the second material layer 52, and the third material layer 53 are well bonded, the three materials combine to exhibit the same resonance frequency response characteristic as one material. However, when the first material layer 51, the second material layer 52, and the third material layer 53 are not well bonded and the internal defect 55 exists, as shown in FIG. 5B, Frequency response characteristics are generated.

Hereinafter, a driving method and an internal defect detection method of an internal defect detection apparatus for a composite structure using an electromagnetic acoustic resonance frequency according to an embodiment of the present invention will be described in detail with reference to FIG. 6 and FIG.

6 is a diagram for explaining driving of an internal defect detection apparatus of a composite structure using an electromagnetic acoustic resonance frequency according to an embodiment of the present invention.

Referring to FIG. 6, an electromagnetic acoustic resonance sensor 100 according to an embodiment of the present invention is fixed by a jig 400. At this time, the jig 400 includes a first fixing part 410a formed in a 'C' shape, a second fixing part 410b spaced from the first fixing part 410a and arranged to face each other . At this time, a rail may be formed inside the first fixing part 410a and the second fixing part 410b, and the first fixing part 410a and the second fixing part 420b may be provided with a rail, The moving part 420 is engaged. Accordingly, the first moving unit 420 moves the electromagnetic acoustic resonance sensor 100 in the x-axis direction 1. [

A rail is formed at an inner center of the first moving part 420, and a second moving part 430 is coupled to the rail. That is, the second moving part 430 is moved along the rail formed at the inner center of the first moving part 420, thereby moving the electromagnetic acoustic resonance sensor 100 in the y-axis direction 2. The second moving part 430 can be formed to be adjustable in length in the longitudinal direction so that the electromagnetic acoustic resonance sensor 100 is moved in the z-axis direction 3 and the electromagnetic acoustic resonance sensor 100 The distance between the composite structures 50 can be adjusted.

Then, the second moving part 430 is coupled to a case for protecting the electromagnetic acoustic resonance sensor 100, and the case is supported by the supporting part 440. The support portion 440 includes a plurality of wheels 450 provided on the lower side of the support portion 440 to facilitate the movement of the composite structure 50 on the surface thereof.

The first moving part 420 and the second moving part 430 may be driven by the jig driving part 500 and the jig driving part 500 may be controlled by the control part 200. [

The electromagnetic acoustic resonance sensor is movable in the x-axis 1, the y-axis 2, and the z-axis 3 with respect to the upper surface of the composite structure 50, And detects whether there is a defect in the composite structure 50. [

FIG. 7 is a flow chart for explaining a defect detection method of an internal defect detection apparatus of a complex structure using an electromagnetic acoustic resonance frequency according to an embodiment of the present invention.

Referring to FIG. 7, a defect detection method of an internal defect detection apparatus for a composite structure using an electromagnetic acoustic resonance frequency according to an embodiment of the present invention is characterized in that, at a first point on the surface of a complex structure, A first step (s100) of detecting an ultrasonic resonance frequency by generating an ultrasonic wave of a frequency; And a second step (s200) of generating a pulse signal of an ultrasonic resonance frequency and receiving a frequency response of the signal; And a third step (S300) of moving the electromagnetic acoustic resonance sensor to a second position. After the third step, the second step and the third step are repeatedly performed along the predetermined scan path.

An ultrasonic wave having a frequency of 10 kHz to 10 MHz is generated in a coil of the electromagnetic acoustic resonance sensor 100 through a part 130 of the control unit 200 at a first point on the surface of the complex structure 50, The ultrasonic resonance frequency of the complex structure 50 is detected by detecting a signal reflected by the complex structure 50 (S100). At this time, the detected resonant frequency may vary depending on the thickness of the composite structure.

Then, the control unit 200 applies the same pulse signal as the detected ultrasonic resonance frequency through the excitation unit 130 and receives the frequency response according to the signal through the receiving unit 140 (s200).

Next, the controller 200 moves the electromagnetic acoustic resonance sensor 100 to a second point on the surface of the complex structure 50 (s300), and then repeats the second step again.

8 is a graph illustrating the frequency response detected in accordance with one embodiment of the present invention.

Specifically, FIG. 8A shows the frequency response of a composite structure with good junctions, and FIG. 8B shows the frequency response of a composite structure where defects exist.

Referring to FIG. 8A, it can be seen that a resonance frequency of a certain band is generated in the case of a composite structure having good junctions and no defects, but in the case of a composite structure in which defects exist, as shown in FIG. 8B , It can be confirmed that the resonance frequency shows a peak at a certain point.

As described above, the internal defect detection apparatus of the complex structure according to an embodiment of the present invention detects the presence of defects in the interior of the composite structure 50 in a non-invasive and non-destructive manner using the electromagnetic acoustic resonance frequency can do.

Meanwhile, the controller 200 according to the embodiment of the present invention refers to a hardware component such as software or an FPGA (Field Programmable Gate Array) or an ASIC (Application Specific Integrated Circuit), and performs predetermined roles. However, 'component' is not meant to be limited to software or hardware, and each component may be configured to be in an addressable storage medium and configured to play back one or more processors.

Thus, as an example, a component may include components such as software components, object-oriented software components, class components and task components, processes, functions, attributes, procedures, Microcode, circuitry, data, databases, data structures, tables, arrays, and variables, as will be appreciated by those skilled in the art.

In addition, the components and functions provided in the components may be combined into a smaller number of components or further separated into additional components.

The method of processing logs according to an embodiment of the present invention may also be implemented in the form of a recording medium including instructions executable by a computer, such as program modules, being executed by a computer. Computer readable media can be any available media that can be accessed by a computer and includes both volatile and nonvolatile media, removable and non-removable media. The computer readable medium may also include both computer storage media and communication media. Computer storage media includes both volatile and nonvolatile, removable and non-removable media implemented in any method or technology for storage of information such as computer readable instructions, data structures, program modules or other data.

For example, a ROM (Read Only Memory), a RAM (Random Access Memory), a magnetic tape, a magnetic disk, a flash memory, an optical data storage device, and the like. The computer-readable recording medium may also be stored and executed as a code that is distributed in a computer system connected to a computer network and readable in a distributed manner.

Communication media typically includes any information delivery media, including computer readable instructions, data structures, program modules, or other data in a modulated data signal such as a carrier wave, or other transport mechanism.

It will be understood by those skilled in the art that the foregoing description of the present invention is for illustrative purposes only and that those of ordinary skill in the art can readily understand that various changes and modifications may be made without departing from the spirit or essential characteristics of the present invention. will be. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims rather than the detailed description and all changes or modifications derived from the meaning and scope of the claims and their equivalents are to be construed as being included within the scope of the present invention do.

100: electromagnetic acoustic resonance sensor
110: Coil
120: Magnet
130:
140: Receiver
200:
300:
400: jig
500: jig driving part

Claims (13)

1. An apparatus for measuring internal defects of a composite structure,
An electromagnetic acoustic resonance sensor disposed on a surface of the composite structure, the electromagnetic acoustic resonance sensor including a coil for generating ultrasonic waves into the composite structure, receiving a reflected ultrasonic wave, and a magnet disposed on the coil;
A jig and a jig driving unit for moving the electromagnetic acoustic resonance sensor on the surface of the complex structure; And
And a control unit for controlling the jig driving unit and detecting a resonance frequency from ultrasonic waves received from the electromagnetic acoustic resonance sensor,
Wherein the controller generates an ultrasonic resonance having a frequency within a predetermined range through the coil to the interior of the complex structure,
The control unit detects an ultrasonic resonance frequency that is reflected by the complex structure and returns,
Wherein the controller generates a pulse signal that is the same as the detected ultrasonic resonance frequency into the interior of the complex structure,
Wherein the control unit detects an internal defect of the composite structure based on a response of the pulse signal reflected by the composite structure and returned.
An apparatus for measuring internal defects of a composite structure. The method according to claim 1,
The magnet
An electromagnet or a permanent magnet,
An apparatus for measuring internal defects of a composite structure. The method according to claim 1,
The coil
Wherein the coil is a race-track shaped coil.
An apparatus for measuring internal defects of a composite structure. The method according to claim 1,
The control unit controls the coil
And generates ultrasonic waves at a frequency of 10 kHz to 10 MHz.
An apparatus for measuring internal defects of a composite structure. The method according to claim 1,
The electromagnetic acoustic resonance sensor
An exciter for generating ultrasonic waves having a predetermined frequency range through the coil; And
And a receiver for receiving a frequency response of ultrasonic waves reflected by the complex structure and returning,
Wherein the excitation unit and the reception unit are controlled by the control unit.
An apparatus for measuring internal defects of a composite structure. 6. The method of claim 5,
The receiving unit
And an output unit for outputting a graph of the change of the resonance frequency of the ultrasonic wave with time,
Wherein the output comprises a display.
An apparatus for measuring internal defects of a composite structure. And an electromagnetic acoustic resonance sensor disposed on the surface of the composite structure and including a coil for generating ultrasonic waves inside the complex structure and receiving a reflected ultrasonic wave and a magnet disposed on the upper portion of the composite structure A method of measuring an internal defect measuring apparatus,
Generating ultrasonic resonance inside the complex structure through the coil, the ultrasonic resonance having a predetermined frequency range;
Detecting the ultrasonic resonance frequency of the complex structure based on a frequency response of the control unit reflected by the complex structure;
Generating a pulse signal having the same frequency as the detected ultrasonic resonance frequency in the complex structure; And
And detecting the internal defect of the complex structure based on the response of the pulse signal reflected by the complex structure and returning.
Method of measuring internal defect measuring apparatus of composite structure. 8. The method of claim 7,
The magnet
An electromagnet or a permanent magnet,
Method of measuring internal defect measuring apparatus of composite structure. 8. The method of claim 7,
The coil
Wherein the coil is a race-track shaped coil.
Method of measuring internal defect measuring apparatus of composite structure. 8. The method of claim 7,
Wherein the step of generating the ultrasonic resonance inside the complex structure having the predetermined frequency range through the coil
Wherein the control unit generates ultrasound at a frequency of 10 kHz to 10 MHz through the coil.
Method of measuring internal defect measuring apparatus of composite structure. 8. The method of claim 7,
Wherein the step of detecting an internal defect of the complex structure based on the ultrasonic resonance frequency
Generating ultrasonic waves of the same frequency band as the ultrasonic resonance frequency into the interior of the complex structure; And
And detecting the ultrasonic resonance frequency based on a frequency response reflected and returned by the complex structure.
Method of measuring internal defect measuring apparatus of composite structure. 12. The method of claim 11,
When the intensity of the frequency response to the received ultrasonic resonance frequency exceeds a preset value,
Wherein the control unit determines that a defect exists in the composite structure. And an electromagnetic acoustic resonance sensor disposed on the surface of the composite structure and including a coil for generating ultrasonic waves inside the complex structure and receiving a reflected ultrasonic wave and a magnet disposed on the upper portion of the composite structure A recording medium on which a program of instructions executable by a computer to perform an internal defect measurement method of an internal defect measuring apparatus is tangibly embodied and can be read by the computer,
The internal defect measurement method
Generating ultrasonic resonance inside the complex structure through the coil, the ultrasonic resonance having a predetermined frequency range;
Detecting the ultrasonic resonance frequency of the complex structure based on a frequency response of the control unit reflected by the complex structure;
Generating a pulse signal having the same frequency as the detected ultrasonic resonance frequency in the complex structure; And
And detecting the internal defect of the complex structure based on the response of the pulse signal reflected by the complex structure and returning.
Recording medium.

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