KR101881816B1 - 진공 처리 장치 - Google Patents

진공 처리 장치 Download PDF

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Publication number
KR101881816B1
KR101881816B1 KR1020120092554A KR20120092554A KR101881816B1 KR 101881816 B1 KR101881816 B1 KR 101881816B1 KR 1020120092554 A KR1020120092554 A KR 1020120092554A KR 20120092554 A KR20120092554 A KR 20120092554A KR 101881816 B1 KR101881816 B1 KR 101881816B1
Authority
KR
South Korea
Prior art keywords
processing device
vacuum processing
vacuum
processing
Prior art date
Application number
KR1020120092554A
Other languages
English (en)
Other versions
KR20140026852A (ko
Inventor
마호열
Original Assignee
주식회사 탑 엔지니어링
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 탑 엔지니어링 filed Critical 주식회사 탑 엔지니어링
Priority to KR1020120092554A priority Critical patent/KR101881816B1/ko
Publication of KR20140026852A publication Critical patent/KR20140026852A/ko
Application granted granted Critical
Publication of KR101881816B1 publication Critical patent/KR101881816B1/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physical Vapour Deposition (AREA)
KR1020120092554A 2012-08-23 2012-08-23 진공 처리 장치 KR101881816B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020120092554A KR101881816B1 (ko) 2012-08-23 2012-08-23 진공 처리 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020120092554A KR101881816B1 (ko) 2012-08-23 2012-08-23 진공 처리 장치

Publications (2)

Publication Number Publication Date
KR20140026852A KR20140026852A (ko) 2014-03-06
KR101881816B1 true KR101881816B1 (ko) 2018-07-25

Family

ID=50641224

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020120092554A KR101881816B1 (ko) 2012-08-23 2012-08-23 진공 처리 장치

Country Status (1)

Country Link
KR (1) KR101881816B1 (ko)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070111899A (ko) * 2006-05-19 2007-11-22 주식회사 아이피에스 진공처리장치
KR20090124210A (ko) * 2008-05-29 2009-12-03 주식회사 에스에프에이 화학 기상 증착 장치
KR20110117485A (ko) * 2010-04-21 2011-10-27 주성엔지니어링(주) 인젝터 어셈블리 및 이를 구비한 기판 처리 장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20070111899A (ko) * 2006-05-19 2007-11-22 주식회사 아이피에스 진공처리장치
KR20090124210A (ko) * 2008-05-29 2009-12-03 주식회사 에스에프에이 화학 기상 증착 장치
KR20110117485A (ko) * 2010-04-21 2011-10-27 주성엔지니어링(주) 인젝터 어셈블리 및 이를 구비한 기판 처리 장치

Also Published As

Publication number Publication date
KR20140026852A (ko) 2014-03-06

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E902 Notification of reason for refusal
E701 Decision to grant or registration of patent right
GRNT Written decision to grant