KR101879177B1 - Chemical supply apparatus - Google Patents

Abstract

Disclosed is a liquid chemical supply apparatus capable of precisely controlling a supply flow rate of liquid chemical. The liquid chemical supply apparatus comprises: a liquid chemical inflow part having an inner space for receiving liquid chemical, and being arranged at a first position of the inner space so that liquid chemical flows in; a pump body arranged at a second position of the inner space and having a liquid chemical discharging part for discharging the liquid chemical; a rotary screw of which a portion is inserted into the pump body, and of which one end portion is rotatably connected to a first side of the pump body arranged at the first position and the other end portion is connected to a second side of the pump body being opposite to the first side; a driving motor mounted on the second side and connected to the rotary screw to rotate the rotary screw; a plate-shaped piston combined with the rotary screw and moving to the first position and the second position in a rotational direction of the rotary screw when the rotary screw rotates; a first bellows tube received in the inner space of the pump body, wherein one end portion is fixed to the first side and the other end portion is fixed to one side of the piston opposite to the first side; and a second bellows tube received in the inner space of the pump body, wherein one end portion is fixed to the second side and the other end portion is fixed to one side of the piston opposite to the second side.

Description

CHEMICAL SUPPLY APPARATUS

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chemical liquid supply device, and more particularly, to a chemical liquid supply device used in a single-wafer type cleaning device.

1 shows a conventional pressure type chemical liquid supply apparatus generally used in a semiconductor single wafer cleaning apparatus. 1, a conventional pressure type chemical liquid supply device forms an oil pressure in a tank 1 through a pump 2 and supplies necessary chemical liquid to the substrate by opening and closing a valve 7, Is adjusted by the orifice (9). The regulator 4 is used to keep the hydraulic pressure constant and the pilot air pressure 6 is regulated using the electropneumatic regulator 5 to stably control the hydraulic pressure even when the pressure at the input of the regulator 4 is changed Respectively.

In addition, since the pressure of the fluid is the most important factor in the conventional chemical liquid supply device, the pressure gauges 31 and 32 are used for monitoring the fluid pressure, and the flow meter 8 is mounted to measure the actual flow rate.

In such a conventional chemical liquid supply apparatus, when a plurality of cleaning process chambers are used at the same time, the oil pressure at the input end of the regulator 4 changes from time to time. It is difficult to stably maintain a sudden change in hydraulic pressure occurring instantaneously, There is a problem that it is difficult to avoid. Therefore, there has been a problem that it is difficult to control the accurate flow rate.

Korean Patent No. 10-0847590

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a chemical liquid supply device capable of precisely controlling the supply flow rate of a chemical liquid.

According to an aspect of the present invention, there is provided an apparatus for supplying a chemical solution, the apparatus including: a chemical liquid inflow portion having an internal space for containing a chemical liquid and disposed at a first position of the internal space, A pump body disposed at a second position and including a chemical liquid discharge portion through which the chemical liquid is discharged; A portion of the pump body is inserted into the interior of the pump body and the other end of the pump body is rotatably connected to the first surface of the pump body disposed at the first position, A rotating screw connected to the rotating shaft; A driving motor installed on the second surface, connected to the rotating screw, for rotating the rotating screw; A plate-shaped piston coupled to the rotating screw and moving to the first position and the second position according to a rotating direction of the rotating screw when the rotating screw rotates; A first bellows pipe accommodated in an inner space of the pump body and having one end fixed to the first surface and the other end fixed to one surface of the piston opposed to the first surface; And a second bellows pipe accommodated in the internal space of the pump body and having one end fixed to the second surface and the other end fixed to one surface of the piston facing the second surface.

According to another aspect of the present invention, there is provided a chemical liquid supply apparatus, wherein the pump body further includes a chemical liquid inlet / outlet unit disposed at the first position and into which the chemical liquid flows, and the apparatus is connected to the chemical liquid discharge unit and the chemical liquid inlet / And a chemical liquid transferring member for transferring the chemical liquid discharged from the chemical liquid discharging unit.

In one embodiment, the open / close valve may be a three-way valve including a first outlet and a second outlet opposite to the inner passage of the chemical solution circulation tube, and a third outlet positioned perpendicular to the inner passage of the chemical solution circulation tube have.

The chemical liquid supply apparatus according to the present invention has the following advantages.

First, since the driving means for supplying the chemical liquid, that is, the rotating screw, the driving motor, the first bellows pipe, and the second bellows pipe are provided on the inner space and the outer surface of the pump body, the volume and structure of the chemical liquid supply device can be simplified.

Secondly, since the piston is moved inside the pump body to supply the chemical liquid and the chemical liquid can be discharged according to the volume change of the first bellows pipe and the second bellows pipe as the piston moves, it is necessary to supply the hydraulic pressure to supply the chemical liquid There is no need to provide a pump of a hydraulic pressure supply type for forming hydraulic pressure, so that the manufacturing cost of the chemical liquid supply device can be reduced.

Third, since the chemical solution can be supplied by pushing the chemical solution according to the movement of the piston and the volume change of each bellows pipe, it is possible to precisely control the flow rate of the chemical solution by controlling the movement of the piston and the volume change of each bellows pipe have.

1 shows a conventional pressure type chemical liquid supply apparatus generally used in a semiconductor single wafer cleaning apparatus.
2 is a cross-sectional view illustrating a chemical liquid supply apparatus according to an embodiment of the present invention.
3 is a perspective view showing an outer appearance of the pump body and an inner view of the pump body of the chemical liquid supply apparatus shown in FIG.

Hereinafter, a chemical liquid supply apparatus according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings. The present invention is capable of various modifications and various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. It should be understood, however, that the invention is not intended to be limited to the particular forms disclosed, but includes all modifications, equivalents, and alternatives falling within the spirit and scope of the invention. Like reference numerals are used for like elements in describing each drawing. In the accompanying drawings, the dimensions of the structures are enlarged to illustrate the present invention in order to clarify the present invention.

The terms first, second, etc. may be used to describe various components, but the components should not be limited by the terms. The terms are used only for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be referred to as a second component, and similarly, the second component may also be referred to as a first component.

The terminology used in this application is used only to describe a specific embodiment and is not intended to limit the invention. The singular expressions include plural expressions unless the context clearly dictates otherwise. In this application, the terms "comprises", "having", and the like are used to specify that a feature, a number, a step, an operation, an element, a part or a combination thereof is described in the specification, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

FIG. 2 is a cross-sectional view illustrating a chemical liquid supply apparatus according to an embodiment of the present invention, and FIG. 3 is a perspective view illustrating an outer appearance of a pump body and an inner appearance of a pump body of the chemical liquid supply apparatus shown in FIG.

2 and 3, a chemical liquid supply apparatus according to an embodiment of the present invention includes a pump body 110, a rotating screw 120, a driving motor 130, a piston 140, a first bellows pipe 151 And a second bellows pipe 152.

The pump body 110 has an internal space for accommodating the chemical liquid, and may include a chemical liquid inlet 111 and a chemical liquid discharge port 112. The chemical liquid inlet port 111 can be disposed at the first position of the inner space and the chemical liquid outlet port 112 can be disposed at the second position opposite the first position. In one example, the pump body 110 includes a first surface 110a, a second surface 110b, and a third surface 110c that is perpendicular to the first surface 110a and the second surface 110b It may be a cylindrical shape. In this case, the chemical solution inlet 111 may be provided on the first surface 110a, and the chemical solution discharge port 112 may be formed on one side of the third surface 110c close to the second surface 110b Can be located. Accordingly, the chemical liquid inlet 111 may be disposed at the first position, and the chemical liquid discharge port 112 may be disposed at the second position.

A liquid supply pipe 10 extending from a liquid reservoir tank (not shown) may be connected to the liquid supply port 111. The liquid supply pipe 10 may be opened when a chemical liquid is supplied toward the liquid supply port 111 A check valve 20 may be provided.

The rotating screw 120 has a predetermined length, and a part of the rotating screw 120 can be inserted into the pump body 110. At this time, the first end of the rotating screw 120 is supported on the first surface 110a of the pump body 110, and the second end of the rotating screw 120 is supported through the second surface 110b of the pump body 110 . The rotary screw 120 is rotatably provided. For example, it can be supported in combination with the bearing when it is supported on the first surface 110a and the second surface 110b.

The driving motor 130 rotates the rotating screw 120. The driving motor 130 may be installed on the second surface 110b of the pump body 110 and connected to the second end of the rotating screw 120. [

The piston 140 can pump the chemical solution contained in the inner space of the pump body 110. The piston 140 may be coupled onto the rotating screw 120 and received in the interior space of the pump body 110. The piston 140 moves to the first position and the second position of the inner space of the pump body 110 according to the rotating direction of the rotating screw 120 when the rotating screw 120 rotates. For example, when the rotating screw 120 rotates clockwise, it moves to the second position, and when the rotating screw 120 rotates counterclockwise, it can move to the first position.

The first bellows pipe 151 is accommodated in the inner space of the pump body 110 to cover a portion of the rotating screw 120. The first bellows pipe 151 is fixed to one surface of the piston 140 whose one end is fixed to the first surface 110a of the pump body 110 and the other end is opposite to the first surface 110a . This first bellows pipe 151 can be retracted when the piston 140 moves in the first position of the internal space of the pump body 110 and can be stretched when the piston 140 moves in the second position direction .

The second bellows pipe 152 is accommodated in the inner space of the pump body 110 and covers the other part of the rotating screw 120. The second bellows pipe 152 is fixed to one surface of the piston 140 whose one end is fixed to the second surface 110b of the pump body 110 and the other end is opposite to the second surface 110b . This second bellows pipe 152 can be retracted when the piston 140 moves in the second positional direction of the inner space of the pump body 110 and can be stretched when the piston 140 moves in the first positional direction .

The chemical liquid supply device according to an embodiment of the present invention may further include a chemical liquid transferring member 160, and the pump body 110 may further include a chemical liquid inlet 113.

The chemical solution inlet 113 is disposed at a first position in the inner space of the pump body 110, and the chemical solution can be taken in and out.

The chemical liquid transfer switching member 160 can switch the moving direction of the chemical liquid discharged from the chemical liquid discharge port 112 of the pump body 110. [ The chemical solution transferring member 160 may include a chemical solution circulating pipe 161 and an on-off valve 162.

The chemical solution circulation pipe 161 can be connected to the chemical solution discharge port 112 and the chemical solution inlet 113.

The on / off valve 162 is provided on the chemical liquid circulation pipe 161 to open / close the internal passage of the chemical liquid circulation pipe 161. The opening and closing valve 162 has a first outlet 1621 and a second outlet 1622 opposed to the internal passage of the chemical liquid circulating pipe 161 and a third outlet Way valve including a valve 1623, The third outlet 1623 may be connected to a chemical liquid discharge pipe 40 connected to a chemical liquid spray nozzle (not shown) disposed in the process chamber of the semiconductor cleaning equipment. The on-off valve 162 may be an electromagnetic valve.

Hereinafter, a process of injecting a chemical into a process chamber of a semiconductor device through a chemical liquid supply apparatus according to an embodiment of the present invention will be described.

Drives the drive motor 130 to supply the chemical liquid to the nozzles disposed in the process chamber of the semiconductor equipment. At this time, in a state where the piston 140 is positioned between the first position and the second position of the inner space of the pump body 110, the driving motor 130 rotates in the forward direction to rotate the rotating screw 120 clockwise.

When the rotary screw 120 is rotated clockwise, the piston 140 moves in the second positional direction and the second bellows pipe 152 is contracted. At this time, a part of the chemical solution stored in the pump body 110 is discharged to the chemical liquid discharge port 112 according to the distance of movement of the piston 140 and the shrinked volume of the second bellows pipe 152, The chemical liquid is discharged to the chemical liquid circulation pipe 161 of the chemical liquid transfer switching member 160 via the chemical liquid discharge port 112 and the discharged chemical liquid flows along the internal passage of the chemical liquid circulation pipe 161 in the direction of the on- Move.

At this time, the opening / closing valve 162 operates so that the first outlet 1621 and the third outlet 1623 are opened and the second outlet 1622 is closed. The chemical liquid moving along the inner passage of the chemical liquid circulation pipe 161 flows into the first outlet 1621 of the opening and closing valve 162 and then to the third outlet 1623 and the third outlet 1623, Is supplied to the nozzle through the third outlet 1623 and the chemical solution supply pipe 10 connected between the nozzles, and the chemical solution is injected through the nozzle.

In this process, the first bellows pipe 151 is extended to suck the chemical solution stored in the chemical solution storage tank through the chemical solution inlet 111 by the amount of the chemical solution discharged through the chemical solution discharge port 112, . At this time, the first check valve 20 provided on the chemical liquid supply pipe 10 is opened so that the chemical liquid moves along the chemical liquid supply pipe 10 and the chemical liquid is supplied to the internal space of the pump body 110 through the chemical liquid inlet port 111 .

On the other hand, the first position of the inner space of the pump body 110 is in a state where the chemical solution has increased from the second position side, when viewed from the piston 140 moved in the above operation. In this state, the piston 140 must move toward the first position of the inner space of the pump body 110 to supply the chemical liquid to the nozzle again. To this end, the driving motor 130 is rotated in the reverse direction to rotate the rotating screw 120 counterclockwise. When the rotary screw 120 rotates counterclockwise, the piston 140 moves in the first position of the inner space of the pump body 110, and the piston 140 moves the chemical solution accommodated in the first position side to the chemical liquid inlet / 113).

At this time, the check valve 20 on the chemical liquid supply pipe 10 is closed, the opening / closing valve 162 is closed so that the third outlet 1623 is closed, and the first outlet 1621 and the second outlet 1622 are opened do. The chemical liquid pushed by the piston 140 moving in the first positional direction is discharged through the chemical liquid outlet port 113 and then discharged through the first outlet port 1621 and the second outlet port 1622 of the on- Flows along the inner passage of the chemical liquid circulation pipe 161 and flows into the second position of the inner space of the pump body 110 through the chemical liquid discharge port 112. [ This process can be continued until the piston 140 is positioned between the first position and the second position of the inner space of the pump body 110 as in the first case. That is, the amount of the chemical solution on the first position side and the second position side of the pump body 110 may be the same or similar based on the piston 140.

The chemical liquid supply apparatus according to one embodiment of the present invention has the following advantages.

First, the driving means for supplying the chemical liquid, that is, the rotating screw 120, the driving motor 130, the first bellows pipe 151, and the second bellows pipe 152 are provided on the inner space and the outer surface of the pump body 110 The volume and structure of the chemical liquid supply device can be simplified.

Secondly, the piston 140 is moved inside the pump body 110 in order to supply the chemical liquid. In accordance with the volume change of the first bellows pipe 151 and the second bellows pipe 152 in accordance with the movement of the piston 140, It is not necessary to supply the hydraulic pressure to supply the chemical liquid. Accordingly, since it is not necessary to provide the pump of the hydraulic pressure supply type for forming the hydraulic pressure, the manufacturing cost of the chemical liquid supply apparatus can be reduced.

Since the chemical liquid can be supplied by pushing the chemical solution according to the movement of the piston 140 and the volume change of the respective bellows pipes 151 and 152, the movement of the piston 140 and the movement of the bellows pipes 151 and 152, So that the supply flow rate of the chemical liquid can be precisely controlled.

Meanwhile, the surface of the rotating screw 120 of the chemical liquid supply apparatus according to an embodiment of the present invention may be coated with an anti-corrosive coating layer to prevent surface corrosion, The surface coating material of the metallic material is composed of 35 wt% of benzotriazole, 5 wt% of boron, 5 wt% of carboxy methyl cellulose (CMC), 5 wt% of zirconium, 5 wt% of titanium and 45 wt% of aluminum oxide (Al 2 O 3).

Benzotriazole is added for the purpose of preventing corrosion and preventing discoloration, and boron serves as a deoxidizer.

CMC (Carboxy Methyl Cellulose) is a white or whitish powder with high water absorption. It is easily dissolved in water to exhibit viscosity, forming a film, and acting as a dispersant.

Zirconium acts to enhance abrasion resistance and corrosion resistance, and titanium is a corrosion-resistant transition metal element with excellent water resistance and corrosion resistance.

Aluminum oxide is added for the purpose of refractoriness and chemical stability.

The reason why the proportions of the constituent components are limited as described above is that the present inventors have analyzed through several test results, and as a result, showed the optimum corrosion preventing effect at the above ratios.

On the other hand, a discoloring portion whose color changes according to the temperature can be applied to the outer surface of the case of the driving motor 130. The discoloring portion is applied to the surface of the case of the driving motor 130 by separating two or more temperature-coloring materials whose color changes when the temperature becomes a predetermined temperature or more, into two or more intervals according to the temperature change, And a protective film layer is applied on the discolored portion to prevent the discolored portion from being damaged.

Here, the discoloring portion may be formed by applying a temperature discoloring material having a discoloration temperature of not less than 40 DEG C and not less than 60 DEG C, respectively. The discoloring portion is for detecting a temperature change of the paint by changing color according to the case temperature of the driving motor 130.

The discoloring unit may be formed by applying a coloring material having a color change to a surface of the case of the driving motor 130 when the temperature of the discoloring unit is higher than a predetermined temperature. In addition, the temperature discoloring substance is generally composed of a microcapsule structure having a size of 1 to 10 탆, and the microcapsules can exhibit a colored and transparent color due to the bonding and separation phenomenon depending on the temperature of the electron donor and the electron acceptor.

In addition, the temperature-changing materials can change color quickly and have various coloring temperatures such as 40 ° C, 60 ° C, 70 ° C, and 80 ° C, and such coloring temperature can be easily adjusted by various methods. Such a temperature-coloring material may be various kinds of temperature-coloring materials based on principles such as molecular rearrangement of an organic compound and spatial rearrangement of an atomic group.

For this purpose, it is preferable that the discoloring unit is formed so as to be divided into two or more sections according to the temperature change by applying two or more temperature-coloring materials having different discoloration temperatures. The temperature-coloring layer preferably uses a temperature-coloring material having a relatively low temperature of the discoloration temperature and a temperature-discoloring material having a relatively high discoloration temperature, more preferably a discoloration temperature of not lower than 40 ° C and not lower than 60 ° C A color change portion can be formed by using a temperature coloring material.

Accordingly, the temperature change of the driving motor 130 can be checked step by step, so that the temperature change of the paint can be sensed. Accordingly, the driving motor 130 can be operated in an optimal state, 130 can be prevented from being damaged.

In addition, the protective film layer is coated on the discolored portion, thereby preventing the discolored portion from being damaged due to external impact, easily recognizing discoloration of the discolored portion, and considering the weakness of the temperature discolored material, Is preferably used.

In order to effectively prevent and prevent adhesion of contaminants to the surfaces of the first bellows pipe 151 and the second bellows pipe 152 of the chemical liquid supply apparatus according to an embodiment of the present invention, The applied anti-fouling coating layer can be formed. The antifouling coating composition contains sodium hydroxide and alkyl betaine in a molar ratio of 1: 0.01 to 1: 2, and the total content of sodium hydroxide and alkyl betaine is 1 to 10% by weight based on the total aqueous solution.

The molar ratio of the sodium hydroxide and the alkyl betaine is preferably 1: 0.01 to 1: 2. When the molar ratio is out of the above range, the coating property of the base material is lowered or the moisture adsorption on the surface is increased to remove the coating film have.

The sodium hydroxide and alkyl betaine are preferably used in an amount of 1 to 10% by weight based on the total weight of the composition. When the content is less than 1% by weight, the coating properties of the base material deteriorate. When the content exceeds 10% by weight, Precipitation tends to occur.

As a method of applying the composition for anti-fouling coating on a substrate, it is preferable to apply the coating composition by a spray method. The thickness of the final coated film on the substrate is preferably 500 to 2000 angstroms, and more preferably 1000 to 2000 angstroms. When the thickness of the coating film is less than 500 ANGSTROM, there is a problem that it deteriorates in the case of a high-temperature heat treatment. When the thickness is more than 2000 ANGSTROM, crystallization of a coated surface tends to occur.

The anti-contamination coating composition may be prepared by adding 0.1 mol of sodium hydroxide and 0.05 mol of alkylbetaine to 1000 mL of distilled water, followed by stirring.

Meanwhile, the first bellows pipe 151 and the second bellows pipe 152 of the chemical liquid supply device according to an embodiment of the present invention may be made of a rubber material. In this case, the first bellows pipe 151 and the second bellows pipe 152 The raw material content ratio of the 2-bellows pipe 152 can be mixed with 60 parts by weight of the rubber, 33 to 36 parts by weight of carobone black, 2 to 5 parts by weight of an antioxidant and 1 to 3 parts by weight of sulfur as an accelerator.

When the content is less than 33 parts by weight, the elasticity and abrasion resistance are reduced. When the content is more than 36 parts by weight, the content of rubber as a main component is relatively small and the elasticity may be lowered. Therefore, 33 to 36 parts by weight.

The antioxidant may be selected from 3C (N-PHENYL-N'-ISOPROPYL-P-PHENYLENEDIAMINE) or RD (POLYMERIZED 2,2,4-TRIMETHYL-1,2-DIHYDROQUINOLINE) If the content is less than 5 parts by weight, the product tends to be oxidized. If the amount is more than 5 parts by weight, the content of the rubber as the main component may be relatively small and the elasticity may be lowered. Weight is adequate.

1 to 3 parts by weight of sulfur as a promoter is mixed. If less than 1 part by weight, the effect of vulcanization is insignificant in the heating process during molding, so at least 1 part by weight is added. If the amount is more than 3 parts by weight, the content of the rubber as the main component may be relatively small and the elasticity may be lowered. Therefore, 1 to 3 parts by weight is appropriate.

Therefore, since the present invention is reinforced with synthetic rubber having elasticity in various directions, the elasticity, toughness and rigidity of the first bellows pipe 151 and the second bellows pipe 152 are increased, so that the durability of the first bellows pipe 151 and the second bellows pipe 152 is improved, The life of the first bellows pipe 151 and the second bellows pipe 152 can be increased.

The description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features presented herein.

110: pump body 120: rotating screw
130: drive motor 140: piston
151: first bellows pipe 152: second bellows pipe
160: chemical liquid transfer switching member 161: chemical liquid circulation pipe
162: opening / closing valve

Claims (4)

A chemical liquid inlet port (111) disposed at a first position of the inner space and into which a chemical liquid flows, a chemical liquid discharge port (112) disposed at a second position of the inner space and through which the chemical liquid is discharged, A pump body (110) comprising;
A portion of which is inserted into the interior of the pump body 110 and one end of which is rotatably connected to the first face 110a of the pump body 110 disposed at the first position, A rotating screw 120 connected to a second surface 110b of the pump body 110 opposite to the first surface 110a;
A driving motor 130 installed on the second surface 110b and connected to the rotating screw 120 for rotating the rotating screw 120;
A plate-shaped piston 140 coupled to the rotating screw 120 and moving to the first position and the second position according to the rotating direction of the rotating screw 120 when the rotating screw 120 is rotated;
A first surface 110a which is accommodated in the internal space of the pump body 110 and has one end fixed to the first surface 110a and the other end fixed to one surface of the piston 140 facing the first surface 110a, A bellows pipe 151; And
A second surface 110b which is received in the inner space of the pump body 110 and has one end fixed to the second surface 110b and the other end fixed to one surface of the piston 140 facing the second surface 110b, A bellows tube (152);
The pump body 110 further includes a chemical liquid inlet 113 through which the chemical liquid is introduced into and discharged from the first position and is connected to the chemical liquid discharge port 112 and the chemical liquid outlet 113, Further comprising: a chemical-liquid transferring member (160) for switching the direction of the chemical liquid discharged from the chemical liquid transferring member (160);
The chemical solution transferring member 160 includes a chemical solution circulation pipe 161 connected to the chemical solution discharge port 112 and the chemical solution inlet 113; And an open / close valve (162) installed on the chemical solution circulation pipe (161) for opening and closing an internal passage of the chemical solution circulation pipe (161);
The open / close valve 162 is provided with a first outlet 1621 and a second outlet 1622 opposed to the internal passage of the chemical solution circulating pipe 161, a second outlet 1622 which is located perpendicular to the internal passage of the chemical solution circulating pipe 161 A three-way valve including an outlet 1623;
The surface of the rotating screw 120 is coated with an anti-corrosive coating layer. The coating material of the anti-corrosive coating layer is composed of 35 wt% of benzotriazole, 5 wt% of boron, 5 wt% of carboxy methyl cellulose (CMC) %, Titanium 5 wt%, and aluminum oxide (Al 2 O 3) 45 wt%;
The discoloring unit changes the color depending on the temperature on the outer surface of the case of the driving motor 130. The discoloring unit has two or more temperature-coloring materials whose color changes when they reach a predetermined temperature, A temperature change stepwise by separating into two or more sections according to a temperature change, and a protective film layer is applied on the discoloration part to prevent the discoloration part from being damaged;
The surface of the first bellows pipe (151) and the surface of the second bellows pipe (152) is provided with a coating layer for coating with antifouling coating agent. The coating composition for antifouling coating is composed of sodium hydroxide and alkyl betaine at a ratio of 1: 0.01 To 1: 2 molar ratio;
The first bellows pipe 151 and the second bellows pipe 152 are made of a rubber material and the raw material content ratio of the first bellows pipe 151 and the second bellows pipe 152 is 60 parts by weight of the rubber, 33 to 36 parts by weight of black, 2 to 5 parts by weight of an antioxidant and 1 to 3 parts by weight of sulfur as a promoter. delete delete delete

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