KR101878153B1 - Valve assembly and piezoelectric pump-hydrulic actuator having the same and method for driving thereof - Google Patents

Abstract

A piezoelectric pump-hydraulic hybrid drive device and method according to the present invention includes a first valve plate on which an inlet port is formed; A second valve plate having an outlet port communicating with the inlet port; And a fixing part fixed between the first valve plate and the second valve plate, the fixing part having one end extending from the fixing part and the other end being a free end, and being positioned between the inflow port and the inflow port, And a valve plate having an opening and closing part that is expanded in accordance with a difference between the pressure and the pressure of the outflow port to block the inflow port or to bend to open the inflow port, And a guide portion is formed so as to be guided in the outflow port direction. Thus, it is possible to prevent the vortex from being generated at the valve end and to prevent the working fluid from stagnating, thereby increasing the flow velocity and improving the pumping performance.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a valve assembly, an integrated hybrid drive system having the valve assembly,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a valve assembly, an integrated hybrid drive system, and a method of operating the same. More particularly, the present invention relates to a valve assembly applied to a piezoelectric pump, and an integrated hybrid drive system including the same.

Currently, research on small-sized flying objects is being actively pursued. In such small-sized flying objects, an integrated hybrid driving device capable of high performance and miniaturization is used.

A piezoelectric pump-hydraulic hybrid drive system, which is a type of integrated hybrid drive system, is a hybrid drive system in which a hydraulic pump driven by a piezoelectric element is connected to a hydraulic cylinder. The piezoelectric pump applied to it is extremely advantageous for miniaturization, weight reduction, cost reduction, and reliability improvement, and its application fields are also various. Such a piezoelectric pump is advantageous in that it can output a large driving force and a high speed at the same time while being small in size and easy to control.

The piezoelectric pump-hydraulic hybrid drive system (hereinafter referred to as a drive system) drives the hydraulic cylinder and the hydraulic pump by moving the working fluid only by an electrical signal applied to the piezoelectric element, Is very important in.

In the conventional driving apparatus, a valve assembly to which a reed valve is applied is mainly used. Since the structure of the reed valve itself is simple, it is easy to manufacture and operates by the pressure difference. Therefore, the reed valve can be used for a long period of time while saving the cost.

However, the conventional reed valve has a problem that a vortex is generated in the downstream of its characteristics. That is, the reed valve has a form in which a thin plate-like opening / closing part is formed in a cantilever shape and opens and closes the flow path while rotating around the fixed end in accordance with the pressure difference between both sides. 1, a vortex is generated at the end of the opening and closing part 1, and this vortex is stagnated in the valve groove 2 to greatly reduce the flow speed of the fluid, thereby effectively operating the hydraulic cylinder and the hydraulic pump The overall performance of the system could be degraded.

In addition, the conventional driving apparatus has a limitation in increasing the maximum driving speed and the maximum driving force generated in the output unit by operating an output unit such as a hydraulic cylinder using a single piezoelectric pump. Therefore, there is a limit to apply the driving apparatus using a single piezoelectric pump to an aircraft or a rocket system which requires a light weight but requires a high output.

It is an object of the present invention to provide a reed valve capable of minimizing eddy currents.

Another object of the present invention is to provide a piezoelectric pump and an integrated hybrid drive device having a reed valve capable of reducing the flow loss in a piezoelectric pump employing a reed valve to improve performance.

It is another object of the present invention to provide a valve assembly capable of increasing a maximum driving speed and a maximum driving force so as to be applicable to equipment requiring relatively light and high output such as a small flying object or a rocket system, I am trying to provide a driving method.

In order to accomplish the object of the present invention, there is provided a valve apparatus comprising: a first valve plate in which an inlet port is formed; A second valve plate having an outlet port communicating with the inlet port; And a fixing part fixed between the first valve plate and the second valve plate, the fixing part having one end extending from the fixing part and the other end being a free end, and being positioned between the inflow port and the inflow port, And a valve plate having an opening and closing part that is expanded in accordance with a difference between the pressure and the pressure of the outflow port to block the inflow port or to bend to open the inflow port, And a guide portion is formed so as to be guided in an outflow port direction.

Here, the guide portion is formed by being bent from the free end of the opening / closing portion toward the fixed end.

The length of the guide portion is formed to be smaller than or equal to the diameter of the outflow port.

The bending angle of the guide portion is formed such that the angle formed by the virtual line in the longitudinal direction of the guide portion with respect to the upper surface of the guide portion and the center line of the outflow port is less than or equal to 90 degrees.

The guide portion is curved or inclined along the rim of the opening / closing portion.

A valve groove having a predetermined width and depth is formed on one side surface of the second valve plate in contact with the first valve plate to accommodate the opening and closing portions and the guide portion when the opening and closing portion is bent and opened, A through hole is formed.

The first valve plate is provided with a first inlet port and a second outlet port, and the second valve plate is provided with a second inlet port and a first outlet port, and the valve plate body is provided with the first and second A first opening / closing portion positioned between the inlet ports and a second opening / closing portion located between the first outlet port and the second outlet port are formed, and a first guide portion and a second guide portion are respectively formed in the first opening / closing portion and the second opening / And the first guide portion and the second guide portion are formed in directions opposite to each other.

In order to accomplish the object of the present invention, there is provided an air conditioner comprising: an output unit having an operating space in which a working fluid is accommodated and transmitting a driving force generated according to a pressure difference of a working fluid flowing into the operating space to the outside; A connection unit connected to the output unit for guiding the working fluid to the working space of the output unit; A switching unit coupled to the connecting unit to switch a flow direction of the working fluid; A first piezoelectric pump connected to the output unit by the connecting unit via the switching unit; A second piezoelectric pump connected to the output unit by the connection unit via the switching unit and connected to the first piezoelectric pump; And a control unit for controlling the valve assembly, the first piezoelectric pump and the second piezoelectric pump, wherein the first piezoelectric pump and the second piezoelectric pump are provided with the valve assembly described above, Device is provided.

Here, the connection unit includes a plurality of main connection pipes for connecting the output unit to the first piezoelectric pump and the second piezoelectric pump with the valve assembly interposed therebetween, and a connection between the first piezoelectric pump and the second piezoelectric pump And a sub-connection pipe.

In order to achieve the object of the present invention, the first piezoelectric pump and the second piezoelectric pump are connected to one output unit through a switching unit for switching the flow direction of the working gas, and the first piezoelectric pump and the second piezoelectric pump In an integrated hybrid drive system in which a pump assembly and a valve assembly described above are provided, the operation cycle of the first piezoelectric pump and the operation cycle of the second piezoelectric pump are controlled to have the same phase, Is provided.

In order to achieve the object of the present invention, the first piezoelectric pump and the second piezoelectric pump are connected to one output unit through a switching valve for switching the flow direction of the working gas, and the first piezoelectric pump and the second piezoelectric pump In the integrated hybrid drive system in which the pump assembly described above is provided, the operation cycle of the first piezoelectric pump and the operation cycle of the second piezoelectric pump are controlled to have a phase difference of 180 degrees. A method of operating the apparatus is provided.

The valve assembly according to the present invention and the integrated hybrid drive apparatus and method having the same provide the following advantages. That is, the working fluid flowing into or out of the pumping space smoothly flows through the guide portion provided in the valve plate of the valve assembly, The flow rate of the fluid can be increased and the pumping performance can be improved as the fluid flows in or out quickly without stagnation. Thus, the efficiency of the driving device can be improved and the present invention can be applied to a device requiring relatively light and high output such as a small flying object or a rocket system.

When a plurality of piezoelectric pumps are connected in series or in series to one output unit, when a plurality of piezoelectric pumps are simultaneously or cross-driven, a high maximum driving force and a maximum driving speed can be realized, A high-output driving apparatus can be provided in the same field as that of FIG.

FIG. 1 is a schematic view for explaining a phenomenon in which a vortex is generated when a conventional reed valve is opened;
2 is a perspective view of a piezoelectric pump according to an embodiment of the present invention,
FIG. 3 is a perspective view of the piezoelectric pump shown in FIG. 2,
Figure 4 is a cross-sectional view of the assembly of the valve assembly of Figure 3,
Fig. 5 is a schematic view for explaining a guide portion of the valve plate in the valve assembly according to Fig. 4,
6 is a degree of freedom for calculating the height at which the opening and closing portions of the valve plate are opened,
FIGS. 7A and 7B are sectional views showing a process of opening and closing the valve plate according to the present embodiment,
8 is a perspective view showing another embodiment of the valve plate according to the present embodiment,
FIG. 9 is a sectional view showing a state in which the valve plate of FIG. 8 is assembled between valve plates;
10 is a system diagram showing an embodiment of a piezoelectric pump-hydraulic hybrid drive apparatus according to the present invention,
Fig. 11A shows a process of simultaneously driving the first piezoelectric pump and the second piezoelectric pump in the piezoelectric pump-hydraulic hybrid drive apparatus shown in Fig. 10, and Fig. 11B shows a process in which the first piezoelectric pump and the second piezoelectric pump cross- Also,
12 is a system diagram showing another embodiment of a piezoelectric pump-hydraulic hybrid drive apparatus according to the present invention,
FIG. 13A shows a process of simultaneously driving the first piezoelectric pump and the second piezoelectric pump in the piezoelectric pump-hydraulic hybrid drive device according to FIG. 12, and FIG. 13B shows a process in which the first piezoelectric pump and the second piezoelectric pump cross- Also,

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a valve assembly according to the present invention, an integrated hybrid drive system having the hybrid assembly, and an operation method thereof will be described in detail with reference to the accompanying drawings.

FIG. 2 is a perspective view showing a piezoelectric pump according to an embodiment of the present invention; FIG. 3 is a perspective view of the piezoelectric pump shown in FIG. 2 in which the valve assembly is exploded; Fig. 5 is a schematic view for explaining the guide portion of the valve plate in the valve assembly according to Fig. 4; Fig.

As shown in the drawing, the piezoelectric pump 100 according to the present embodiment has a pump body 111 formed in a cylinder shape having both ends opened, and a top cap 112 And a bottom cap 113 may be fixedly coupled.

A piezoelectric stack 120 is installed in the inner space of the pump main body 111 in the longitudinal direction for selectively expanding or contracting according to an electric signal. In the upper part of the piezoelectric stack 120, A connector 130 for transmitting the pumping force to the valve assembly 160 to be described later may be installed.

The connector 130 is slidably coupled to the rod 131 through the upper cap 112. The upper end of the rod 131 is reciprocated in a pumping space V V may be coupled to the pumping piston 140 to vary the volume of the piston.

Here, the pumping space V may be formed inside the pumping cylinder 150 in which the pumping piston 140 reciprocates. The pumping cylinder 150 is formed by assembling a plurality of cylinder blocks, and a pumping space V may be formed on a surface where the plurality of cylinder blocks abut each other. Accordingly, the pumping space V may be formed by the cylinder block 150, the pumping piston 140, and the valve assembly 160 described below.

The pumping cylinder 150 includes a lower cylinder block 152 coupled to the upper end of the upper cap 112 of the pump body 111 and an upper cylinder block 154 coupled to the upper end of the lower cylinder block 152. .

The lower cylinder block 152 is formed with a piston space 152a so that the pumping piston 140 reciprocates and the upper cylinder block 154 is associated with the piston space 152a of the lower cylinder block 152, A valve space 154a in which the valve body 160 is mounted is formed. The pumping space V is located between the piston space 152a and the valve space 154a so that the upper surface of the pumping piston 140 and the bottom surface of the valve assembly 160 and the valve space (or piston space) (V).

The upper cylinder block 154 may be provided with an inlet 154b and an outlet 154c communicating with the valve space 154a and forming an inlet and an outlet of the working fluid.

The valve assembly 160 includes a plurality of valve plates 162 and 164 having communication openings communicating with the inlet 154b and the outlet 154c of the cylinder block 150, And a valve plate 166 for opening and closing the valve.

The plurality of valve plates 162 and 164 includes a lower plate 162 corresponding to the pressing surface of the pumping piston 140 and an upper plate 162 corresponding to the inlet 154b and the outlet 154c of the upper cylinder block 154, (164).

The lower plate 162 and the upper plate 164 are both formed in a disk shape having a predetermined thickness and guide the working fluid into the pumping space V to the lower plate 162 and the upper plate 164, Side communication port 164a and the outlet side communication ports 162b and 164b for guiding the working fluid to flow out of the pumping space V1 can be formed.

Here, the inlet communication hole is formed only on the upper plate 164, but may be formed on the lower plate 162 as the case may be. When the upper plate 164 is also formed on the lower plate 162, the first inlet port 164a formed on the upper plate 164 and the second inlet port formed on the lower plate 162 may be referred to as a second inlet port. The outflow communication port is referred to as a first outflow port 162b formed on the lower plate 162 and the second outflow port 164b formed on the upper plate 164.

A first valve groove 162c is formed in the upper surface of the lower plate 162 (that is, on the valve surface) so as to form a space in which the first opening and closing part 167 of the valve plate 166, which will be described later, And the first valve groove 162c serves as an inlet port. A second valve groove 164c is formed in the bottom surface (i.e., the valve surface) of the upper plate 164 so as to form a space in which the second opening and closing portion 168 of the valve plate body 166, which will be described later, And a second outlet port 164b may be formed at the center of the valve groove 164c.

The width and depth of the first valve groove 162c and the second valve groove 164c may be equal to each other. For example, the first valve groove 162c and the second valve groove 164c may have an area larger than a cross sectional area of the first opening and closing part 167 and the second opening and closing part 168, respectively, The depth of the second valve groove 164c and the depth of the second valve groove 164c are set to be larger than the height at which the respective opening and closing portions 167 and 168 are bent in consideration of the height of the first valve opening 167 and the second opening and closing portion 168, .

The proper opening height of the first opening and closing part 167 and the second opening and closing part 168 can be obtained by the following equation. 6 is a degree of freedom for calculating the height at which the opening and closing portions of the valve plate are opened. Hereinafter, the second opening and closing part will be mainly described, and the first opening and closing part will be used therefor.

Here, it is assumed that the metal used for the valve plate is stainless steel STS304 and the thickness t is 0.1 mm. 6, a is the length of the opening and closing part, b is the vertical length of the opening and closing part, and x is the distance from the pumping space to the point receiving the pressure (the center of the first outlet port) at the fixed end of the opening and closing part. At this time, the inertia moment (I _valve ) of the opening / closing part can be expressed by the following equation. [Equation 1]

Also, since the opening and closing parts are homogeneous and behave linearly in response to the pressure received in the pumping space, the following equation, which is a moment-curvature relationship, can be used.

&Quot; (2) "

Where M is the internal moment at which the radius of curvature is, E is the modulus of elasticity of the material, and I is the moment of inertia calculated relative to the central axis. The inclination of the cantilever-shaped opening and closing part can be calculated by modifying the following equation.

&Quot; (3) "

At this time, F is a force applied to the opening and closing part, and? Is an opening angle of the opening and closing part. Therefore, by using Eq. (3), the opening height of the opening and closing part can be obtained as Δh = atanθ. The obtained height becomes the final height with respect to the end portion of the opening / closing part, so that the proper opening height of the valve can be set by using this height.

The valve plate body 166 is provided between the lower plate 162 and the upper plate 164 and is disposed between the first inlet port 164a and the first valve port 162c and between the first outlet port 162b and the second outlet port 162b. And selectively opens and closes between the second outlet ports 164b.

The first and second opening and closing parts 167 and 168 are formed at both sides of the center of the valve plate 166. The first opening and closing part 167 and the second opening and closing part 168, Are connected to each other to form a fixed portion 169 of a fixed type.

The first opening and closing part 167 and the second opening and closing part 168 may be formed in a simple rectangular flat plate shape. In this case, when the first and second opening and closing portions 167 and 168 are opened, a vortex is generated at the ends of the first and second opening and closing portions 167 and 168 so that the fluid flows into the first and second valve grooves 162c and 164c ), And consequently, the efficiency of the piezoelectric pump and the system employing the piezoelectric pump may be deteriorated.

Therefore, in this embodiment, the guide portions 167e and 168e, which are bent by a predetermined angle from the free ends of the first opening and closing portion 167 and the second opening and closing portion 168 and extend by a predetermined length, can be extended. The guide portions 167e and 237 are formed by bending the end portions of the respective opening and closing portions 167 and 168 in opposite directions, that is, fixed ends 167c and 168c connected to the fixed portion 169 as shown in the figure.

Here, the shapes of the first guide portion and the second guide portion, for example, the length of the guide portion, the bending angle, the opening height, etc., can influence the flow state of the working fluid. However, the second valve groove 164c is communicated with the second outlet port (or outlet) having a relatively small cross-sectional area, while the first valve groove 162c is directly communicated with the pumping space without a separate inlet port. Therefore, since the working fluid may be more likely to stagnate in the second valve groove than the first valve groove, the shape of the guide portion will be described below taking the second guide portion as an example. Since the second opening and closing part is formed in the same shape as the first opening and closing part and is opened and closed in the opposite direction, the description of the basic shape is replaced with the first opening and closing part.

3 to 5, the second opening and closing part 168 is formed in a rectangular shape on the same plane as the fixing part 169 so as to open and close the first outlet opening 162b, and the second opening and closing part 168, A bent portion 168d which is bent in the direction opposite to the fixed end 168c opposite to the free end 168b of the second opening and closing portion 168 is formed in the middle of the free end of the second opening and closing portion 168, And the second guide portion 168e for guiding the working fluid to the valve groove 164c is formed.

The bending angle alpha of the bent portion 168d of the second opening and closing portion 168 may be sufficient to allow the working fluid to flow near the second valve groove 164c when the second opening and closing portion 168 is opened. That is, when the bending angle? Is too large, the bent portion 168d of the second opening and closing portion 168 interferes with the second valve groove 164c at the end of the second guide portion 168e when the second opening and closing portion 168 is opened The opening amount of the second opening and closing part 168 can be reduced. Conversely, when the bending angle? Of the bent portion 168d is too small, the influent working fluid flows to the fixed end 168c of the second opening and closing portion 168 beyond the second guide portion 168e, The fluid stagnates in the second valve groove 164c, so that the flow rate of the fluid may not be greatly improved. The bending angle alpha 1 of the bent portion 168d is set such that the second guiding portion 168e does not interfere with the second valve groove 164c when the second opening and closing portion 168 is opened, To be guided toward the guide portion 164c. That is, the bending angle? Of the second guide portion 168e is set such that the imaginary line formed along the longitudinal direction of the upper surface of the second guide portion 168e is 90 degrees or more than the center line CL of the second outlet port 164b It may be preferable to be bent and formed to such an extent that a small inclination angle beta can be obtained.

It is preferable that the length L1 of the second guide portion 168e is formed to be at least half or more as compared with the inner diameter D1 of the second outflow port 164b. In this case, the length L1 of the second guide portion 168e is set such that the end of the second guide portion 168e when the second opening and closing portion 168 is opened is moved from the center of the valve assembly through the second outlet port 164b It may be most preferable to be formed so as to be located on the opposite side. If the length L of the second guide portion is too short, a vortex may be generated at the end of the second guide portion 168e before the working fluid is guided to the second outlet port 164b. However, if the length L of the second guide portion 168e is too long, not only the weight of the first opening and closing portion 167 including the second guide portion 168e increases but also the end portions of the adjacent members, The amount of opening of the second opening / closing portion 168 can be limited by engaging with the second valve groove 164c of the plate 164 or the like. The length L of the second guide portion 168e is set such that the second guide portion 168e is not in contact with the top plate 164 when the second opening and closing portion 168 is opened but has a length that can overlap with the second outlet port 164b .

The opening height H of the second opening and closing portion 168 is set such that the virtual line formed along the longitudinal direction of the upper surface of the second guide portion 168e is smaller than 90 degrees with the center line CL of the second outlet port 164b It is preferable to open it to such an extent that the inclination angle beta can be obtained. If the opening height H1 of the second opening and closing part 168 is too low, the flow resistance may increase and the efficiency may be lowered. If the opening height H of the second opening and closing part 168 is too high, The angle between the imaginary line of the second outflow port 164e and the center line CL of the second outflow port 164b becomes a right angle or an acute angle smaller than the angle between the virtual line and the centerline CL of the second outflow port 164b, . The opening height H of the second opening and closing portion 168 is set to be sufficiently large so that the second guide portion 168e can be maintained tilted toward the second outlet opening 164b when the second opening and closing portion 168 is opened It is preferable to open.

167b is a free end, 167c is a fixed end, 167d is a bent portion, and 167e is a first guide portion.

When the valve plate according to the present embodiment as described above is applied to a piezoelectric pump, the following actions and effects are obtained. 7A and 7B are sectional views showing a process of opening and closing the valve plate according to the present embodiment.

First, as shown in FIG. 7A, when the piezoelectric stack 120 is inflated, the pumping piston 140 moves upward through the connector 130. As the volume of the pumping space V becomes smaller, the pressure of the pumping space V is increased.

The pressure of the pumping space V becomes higher than the pressure of the second valve groove (or the second outlet port) 164c so that the second opening and closing portion 168 is bent about the fixed end 168c and flows into the first outlet port 162b are opened.

The working fluid in the pumping space V is guided to the second outlet port 164b while pushing the second opening and closing portion 168 and this working fluid flows through the second outlet port 164b into the outlet of the cylinder block 150 (154c). At this time, the first opening and closing part 167 is pushed by the pressure in the pumping space V to keep the first inlet port 164a shut off.

Next, as shown in FIG. 7B, when the piezoelectric stack 120 is contracted, the pumping piston 140 moves downward through the connector 130.

As the volume of the pumping space V is increased, the pressure of the pumping space V becomes lower than the pressure of the first valve groove 162c. Then, the first opening and closing part 167 moves about the fixed end 167c So that the first inlet 164a is opened.

The working fluid passing through the inlet port 154b of the cylinder block 150 is guided to the first valve groove 162c through the first inlet port 164a while pushing the first opening and closing part 167, And flows into the pumping space V through the first valve groove 162c. At this time, the second opening / closing portion 168 on the opposite side is restored to block the first outlet port 162b.

In the process of flowing out the working fluid in the pumping space V as the second opening and closing part 168 is extended or in the process of flowing the working fluid into the pumping space V as the first opening and closing part 167 is extended, Vortices are generated at the ends of the first opening and closing part 167 and the second opening and closing part 168 or are moved in the direction of the fixed ends of the opening and closing parts 167 and 168 to be stagnated in the respective valve grooves 162c and 164c The flow rate may be lowered.

However, when the first guiding portion 167e and the second guiding portion 168e are extended at the ends of the first opening and closing part 167 and the second opening and closing part 168 as in this embodiment, 164a or the first outlet port 162b is guided by the respective guide portions 167e, 168e extending from the ends of the respective opening and closing portions 167, 168, 2 outlet port 164b. Accordingly, the working fluid does not move in the fixed end direction of the first opening and closing part 167 and the second opening and closing part 168, but moves along the respective guide parts 167e and 168e to the first valve groove 162c or the second outlet It is possible to quickly move to the passage 164b, and the flow rate of the fluid can be improved.

The numerical analysis confirms the following.

That is, the analysis of the present embodiment proceeded with a two-dimensional moving mesh analysis, and for convenience, the second opening and closing part, which is a flow-out valve of the driving apparatus, was performed. The working fluid used was incompressible DTE-24 jet fuel, and the velocity of the working fluid was the result of detecting the velocity of the fluid passing through the inlet of the second outlet.

As a result of the analysis, it can be seen that the velocity in the bent valve having the guide portion of the present embodiment is increased as compared with the flat plate type valve without the conventional guide portion, irrespective of the driving frequency, as shown in Table 1 below.

Driving frequency [Hz] Average speed [mm / s] Existing valve Curved valve 50 6.52 7.1 250 31.4 34.9

Particularly, when the driving frequency is 50 Hz, the fluid velocity is improved by about 8%, but at the driving frequency of 250 Hz, the fluid velocity is improved by about 10%. That is, as the driving frequency increases, the speed increase in the case of the guide portion is higher. It can be expected that high efficiency can be expected in high-speed operation.

Hereinafter, another embodiment of the guide portion of the valve plate according to the present invention will be described.

That is, in the above-described embodiment, the guide portion is formed by bending the end of the opening and closing portion in the opposite direction, but in this embodiment, the guide portion is curved or inclined along the outer peripheral surface of the opening and closing portion. FIG. 8 is a perspective view showing another embodiment of the valve plate according to the present embodiment, and FIG. 9 is a sectional view showing a state in which the valve plate of FIG. 8 is assembled between valve plates.

As shown in FIG. 8, the valve plate 266 according to the present embodiment may be formed such that the first opening and closing part 267 and the second opening and closing part 268 are opposed to each other on both sides of the central part of the disk-shaped plate.

The first opening / closing part 267 and the second opening / closing part 268 are each formed in a disc shape. The center part of the opening / closing part 267 and the second opening / closing part 268 are pressed in opposite directions, So that the first guide portion 267e and the second guide portion 268e are formed. Thereby, the first guide portion 267e and the second guide portion 268e are formed in directions opposite to each other.

The first opening and closing part 267e and the second opening and closing part 268e are formed so as to face each other as in the above embodiment and are provided at opposite ends of the opening and closing parts 267 and 268, The elastic portions 267f and 268f are formed to have a narrow cross-sectional area in the direction of the opening and closing portions. Thus, the first pawl portion 267 and the second opening and closing portion 268 are bent around the fixed ends 267c and 268c and can be quickly opened and closed.

9, the working fluid passing through the inflow port 164a or the outflow ports 162b and 164b is guided by the guiding portions 267e (267e) and 267e ) 268e, it is possible to suppress the generation of vortexes at the rims of the opening / closing portions 267 and 268, thereby increasing the flow speed of the fluid through the opening portions 267 and 268, thereby increasing the efficiency of the overall system.

Meanwhile, the case where the piezoelectric pump according to the present embodiment as described above is applied to the integrated hybrid drive system is as follows.

10 is a block diagram showing an integrated type hybrid driving apparatus according to an embodiment of the present invention.

As shown, the driving apparatus according to the present embodiment includes an output unit 10 for transmitting a driving force to the outside, a connecting unit 20 for guiding a working fluid to the output unit 10, A plurality of piezoelectric pumps 40, 50 for pumping the working fluid to the output unit 10, a switching unit 30, and a plurality of piezoelectric pumps 40, (40) 50 to control the operation fluid pumped by each piezoelectric pump to be supplied to the operating space of the output unit 10 in an alternating manner.

The output unit 10 includes a cylinder 11 having a working space in which a working fluid is accommodated, a piston 11 slidably engaged in the working space of the cylinder 11 and linearly reciprocating by a working fluid filled in the working space, (15). Both sides of the piston 15 may be provided with a piston rod 16 coupled with an external system to transmit a driving force to the outside.

The working space of the cylinder 11 can be divided into the first working space 12a and the second working space 13a with the piston 15 therebetween. The volume of the first working space 12a and the volume of the second working space 13a are controlled by the piston 15 moving according to the pressure between the working spaces of the first working space 12a and the second working space 13a Can be varied.

A first inlet 12b for introducing a working fluid into the first working space 12a is formed at one side of the cylinder 11 and a working fluid is supplied to the second working space 13a at the other side of the cylinder 11. [ And a second inlet / outlet 13b through which the refrigerant flows. One end of each of the first main pipe 21 and the second main pipe 22, which will be described later, may be connected to the first inlet 12b and the second inlet 13b.

The first inlet 12b and the second inlet 13b of the cylinder 11 may be provided in the first operation space 12a and the second operation space 13a, respectively, as shown in FIG. 10 , And may be provided in plural as the case may be. When a plurality of first and second outlets 12b and 13b are provided, the plurality of switching units 30 are also provided so that each of the switching units 30 is connected to one of the first outlets 12b and the second outlets 12b, And can be connected to the entrance / exit 13b in a pair.

The connecting unit 20 includes a main connecting pipe connecting the output unit 10 and the first and second piezoelectric pumps 40 and 50 with the switching unit 30 therebetween, 40) and the second piezoelectric pump (50). The working fluid compressed and ejected from the first piezoelectric pump 40 or the second piezoelectric pump 50 moves to the first working space 12a or the second working space 13a so that the pressure in the working space Thereby reciprocating the piston 15 in the cylinder 11 in the lateral direction of the drawing.

The main connection pipe includes a first main pipe 21 connecting between the first inlet 12b of the cylinder 11 and a first common port 32a of the switching unit 30 to be described later, A second main pipe 22 connecting the second inlet port 13b and the second common port 32b of the switching unit 30 to be described later and a second main pipe 22 connecting the first inlet port 34a of the switching unit 30, A third main pipe 23 connecting the first inlet 41a of the first piezoelectric pump 40 and a second inlet 34b of the switching unit 30 to be described later and a second piezoelectric pump 50, And a fourth main pipe 24 connecting between the second discharge ports 51b.

The sub connection pipe is composed of one sub pipe 25 and can connect between the first outlet 41b of the first piezoelectric pump 40 and the second inlet 51a of the second piezoelectric pump 50. [ The first piezoelectric pump 40 and the second piezoelectric pump 50 are connected in series so that the operating fluid flows from the pumping space V1 of the first piezoelectric pump 40 to the pumping space of the second piezoelectric pump 50 V2).

The switching unit 30 may be a solenoid valve of a four-way valve. The switching unit 30 is electrically connected to a valve control unit 62 to be described later and includes two common ports 32a and 32b, input / output ports 34a and 34b, And a switching valve 36 for switching the flow direction of the refrigerant.

The first common port 32a is connected to the first main pipe 21 and the second common port 32b is connected to the first inlet 12b and the second inlet 12b of the cylinder 12 through the second main pipe 22, The first inlet 34a is connected to the third connection pipe 23 and the second inlet 34b is connected to the first piezoelectric pump 40 to be described later via the fourth connection pipe 24, Respectively, to the first and second outlets 41a and 51b of the first and second piezoelectric pumps 50 and 50, respectively. The switching unit 30 switches the flow direction of the working fluid discharged from each of the pumping spaces V1 and V2 of the first piezoelectric pump 40 or the second piezoelectric pump 50 to the first inlet / (12b) or the second inlet (13b) Can be switched.

The plurality of piezoelectric pumps may comprise a first piezoelectric pump (40) and a second piezoelectric pump (50) connected in series with each other.

The first piezoelectric pump 40 and the second piezoelectric pump 50 may be applied to the same embodiments as those of FIGS. 2 to 9 described above. The first piezoelectric pump 40 and the second piezoelectric pump 50 have the first and second pumping spaces V1 and V2 and the first and second pumping spaces V1 and V2. V1 and V2 are connected to the switching unit 30 to connect the first and second inlets 41a and 51a to and from the first and second outlets 51a and 51b, ) 51b may be formed in the first and second pump bodies 41 and 51, respectively.

The first and second pump main bodies 41 and 51 are provided with first and second piezoelectric stacks 44 and 54 and one end of the first and second pump main bodies 41 and 51 is connected to the pumping space V1 and V2 are formed between the pumping space V1 and V2 and the pumping space V1 and V2 between the inlet 41a and the outlet 41b and the outlet 41b 201 and 202 for selectively opening and closing the pumping space V1 and V2 and the outflow ports 41b and 51b, respectively.

The first piezoelectric stack 44 and the second piezoelectric stack 54 are stacked piezoelectric stacks and can be electrically connected to a controller 64 for a pump to be described later. As a result, the first and second piezoelectric stacks 44 and 54 are expanded or contracted by a power source applied by the pump control unit 64, respectively, (30). ≪ / RTI >

The control unit 60 includes a valve control unit 62 for controlling the switching unit 30 and a control unit 62 for controlling the piezoelectric stacks 44 and 54 of the first and second piezoelectric pumps 40 and 50 And a controller 64 for the pump.

The valve control unit 62 can be controlled in the same manner regardless of the operation mode of the first piezoelectric pump 40 and the second piezoelectric pump 50. [ That is, not only "simultaneous drive" in which the first piezoelectric pump 40 and the second piezoelectric pump 50 simultaneously carry out one cycle operation consisting of four stages of compression, ejection, expansion, and suction, Even when the piezoelectric pump 40 and the second piezoelectric pump 50 are in the " cross drive mode " in which the four steps are performed with a phase difference of 180 degrees, the first and second piezoelectric stacks 44 and 54 perform the one- The valve assembly can also be controlled to proceed with a one-time switching operation during its travel.

The pump control unit 64 may be configured to be interlocked with the valve control unit 62. That is, the pump control unit 64 controls the first and second piezoelectric stacks 44 and 44 so that the working fluid can flow into the first and second working spaces 12a and 13a together with the valve control unit 62, 2 piezoelectric stack 54 can be controlled to control the expansion and contraction.

The driving apparatus according to the present embodiment as described above operates as follows.

That is, when power is applied to the first and second piezoelectric pumps 40 and 50, the first and second piezoelectric stacks 44 and 54 expand or contract in the pumping spaces 42a and 52a, respectively, the pumping operation is carried out with four cycles of compression, exhaustion, expansion and intake as one cycle.

The working fluid pumped by the first and second piezoelectric pumps 40 and 50 is then introduced into the first working space 12a or the second working space 13a of the cylinder 11 by the switching unit 30 On the other hand, the working fluid in the other working space in which no working fluid flows is supplied to the first pumping space V1 of the first piezoelectric pump 40 or the second pumping space V2 of the second piezoelectric pump 50 by the switching unit 30, And recycled to the space V2.

At this time, a working fluid flowing into the first working space 12a or the second working space 13a of the cylinder 11 generates a pressure difference in both working spaces, and according to the pressure difference, the piston of the output unit 10 (15) reciprocates in the cylinder (11) and transmits the driving force to the outside through the piston rod (16).

On the other hand, the first piezoelectric pump 40 and the second piezoelectric pump 50 operate in a " simultaneous drive " manner in which two piezoelectric pumps operate in the same phase without phase difference, or two piezoelectric pumps operate with a phase difference of 180 degrees Quot; cross-drive " mode. FIG. 11A shows a process of simultaneously driving the first piezoelectric pump and the second piezoelectric pump, and FIG. 11B shows a process of crossing the first piezoelectric pump and the second piezoelectric pump.

11A, when the first piezoelectric pump 40 and the second piezoelectric pump 50 operate in a simultaneous drive mode, the first piezoelectric pump 40 and the second piezoelectric pump 50 simultaneously compress - As the jetting step proceeds, the valve assembly 201, which opens and closes the second inlet 51a of the second piezoelectric pump 50, remains closed.

As a result, the working fluid pumped by the first piezoelectric pump 40 moves to the sub-pipe 25, but this working fluid is prevented from flowing into the second pumping space V2 of the second piezoelectric pump 50 . As a result, only the working fluid in the second pumping space V2 of the second piezoelectric pump 50 moves to the first working space 12a or the second working space 13a of the cylinder 11, The working-space-side pressure of the piezoelectric pump is not greatly different from that of the single piezoelectric pump. In this case, the pressure in the cylinder may be lower than that in the case of applying a single piezoelectric pump, considering the pressure loss and the like generated by applying the plurality of piezoelectric pumps 40 and 50. Therefore, in the so-called " simultaneous drive-series connection " in which the first piezoelectric pump 40 and the second piezoelectric pump 50 are connected in series and simultaneously driven without phase difference, the final discharge pressure and the flow rate are expressed by the following relational expressions . Hereinafter, the pressures discharged by the first piezoelectric pump 40 and the second piezoelectric pump 50 are referred to as P ₁ and P ₂ , respectively, and the discharging flow rates are referred to as Q ₁ and Q ₂ , respectively, Let P _d , Q _d .

&Quot; (4) "

P _d-syn-series <P ₁ or P ₂

&Quot; (5) &quot;

Q _d-syn-series <Q ₁ or Q ₂

Next, as shown in Fig. 11B, when the first piezoelectric pump 40 and the second piezoelectric pump 50 are operated in a so-called " cross drive-serial connection " The first pumping space V1 of the first piezoelectric pump 40 and the second pumping space V2 of the second piezoelectric pump 50 alternate between the expansion-sucking step and the compression-sucking step. Thereby, after the working fluid pumped in the first pumping space V1 of the first piezoelectric pump 40 is moved to the second pumping space V2 of the second piezoelectric pump 50, 50 to the working space of the cylinder together with the working fluid in the second pumping space V1. Accordingly, the pressure of the working fluid moving to the working spaces 12a, 13a of the cylinder 11 becomes twice as much as that of the single piezoelectric pump. However, considering the pressure loss, it may be smaller than twice the pressure of the single pump, and the final discharge pressure of the piezoelectric pump drive system with "cross drive-series connection" is as follows.

&Quot; (6) &quot;

P _{d-cross-series} ≤ P ₁ + P ₂

At this time, the flow rate of each piezoelectric pump according to the "cross drive-series connection" method is determined by the Bernoulli equation and the law of conservation of mass As follows.

&Quot; (7) &quot;

Where Cv is the number of flowmeters, A is the flow passage area, and ρ is the fluid density. If the first piezoelectric pump 40 and the second piezoelectric pump 50 have the same discharge capability, the relational expression is as follows.

&Quot; (8) &quot;

That is, in the " crossover drive-serial connection " mode of the piezoelectric pump drive apparatus according to the present embodiment, in the ideal state, the total discharge pressure is nearly twice the pressure discharged from the single piezoelectric pump drive apparatus and the flow rate is about 1.4 times have.

When the first piezoelectric pump 40 and the second piezoelectric pump 50 are connected in series in the double piezoelectric pump driving apparatus according to the present embodiment as described above, the two piezoelectric pumps 40 and 50 are simultaneously driven In the driving method, the pressure and the flow rate of the working fluid discharged from the piezoelectric pump are not improved as compared with the conventional single piezoelectric pump driving apparatus. However, in the case of the cross drive method in which the two piezoelectric pumps are driven with a certain phase difference, the pressure of the working fluid discharged from the piezoelectric pump and the total flow amount are increased by a maximum of 2 times and 1.4 times, respectively. Therefore, even if two piezoelectric pumps are connected in series, the performance of the double piezoelectric pump driving apparatus can be greatly improved depending on the operation mode.

In the meantime, another embodiment of the double piezoelectric pump driving apparatus according to the present invention is as follows.

That is, in the above-described embodiment, the first piezoelectric pump 40 and the second piezoelectric pump 50 are connected in series. However, in this embodiment, the first piezoelectric pump 40 and the second piezoelectric pump 50, (50) are connected in parallel.

In this case, most of the components constituting the double piezoelectric pump driving apparatus are made in the same manner. Unlike the previous embodiment, the sub-connection pipe comprises a first sub-pipe 26 and a second sub-pipe 27, and the first sub-pipe 26 is branched from the middle of the third main pipe 23 Is connected to the second inlet 51a of the second piezoelectric pump 50 and the second sub pipe 27 is branched from the middle of the fourth main pipe 24 to be connected to the first outlet of the first piezoelectric pump 40 41b.

In the case of the double piezoelectric pump driving apparatus connected in parallel as described above, it is possible to perform simultaneous driving or cross driving as in the above embodiment. FIG. 13A shows a process of simultaneously driving the first piezoelectric pump and the second piezoelectric pump, and FIG. 13B shows a process of cross-driving the first piezoelectric pump and the second piezoelectric pump.

13A, when the first piezoelectric pump 40 and the second piezoelectric pump 50 operate in the "simultaneous drive-parallel connection" manner, the first piezoelectric pump 40 and the second piezoelectric pump 50 The working fluid in each of the first and second piezoelectric pumps 40 and 50 is supplied to the first working space 12a of the cylinder 11 or the second working space 12b of the cylinder 11, (13a). Accordingly, the pressure of the working fluid moving to the working space of the cylinder 11 is equal to the pressure of the single piezoelectric pump driving device, but the flow rate may be about twice or less than twice as much as the energy loss etc. . The final discharge pressure and flow rate in the "simultaneous drive-parallel connection" system are as follows.

&Quot; (9) &quot;

P _d-syn-paral < P ₁ or P ₂

&Quot; (10) &quot;

Q _d-syn-paral < Q ₁ + Q ₂

Next, as shown in FIG. 13B, when the first piezoelectric pump 40 and the second piezoelectric pump 50 operate in the "cross drive-parallel connection" manner, the first pumping space V1 of the second piezoelectric pump 50 and the second pumping space V2 of the second piezoelectric pump 50 alternate between the expansion-sucking step and the compression-sucking step. The working fluid in the first pumping space V1 of the first piezoelectric pump 40 and the working fluid in the second pumping space V2 of the second piezoelectric pump 50 are independently supplied to the operating space of the cylinder 11 So that the pressure of the working fluid flowing into the operating space of the cylinder 11 can be approximately equal to that of the single piezoelectric pump. In this case, a bottleneck section is generated at a point where the fourth main pipe 24 and the second sub pipe 27 are branched, and the working fluid ejected from the first piezoelectric pump 40 and the working fluid ejected from the second piezoelectric pump 50 The pressure of the working fluid is generated, so that the final pressure can be equal to or lower than that of the single piezoelectric pump driving device.

In the same principle, the flow rate of the double piezoelectric pump driving device in the "cross drive-parallel connection" method can be approximately twice as large as that in the case of the single piezoelectric pump driving device, The flow rate in the case of FIG. However, in the case of the " simultaneous drive-parallel connection " method according to the present embodiment, since the collision occurs at the outlet of the first piezoelectric pump 40 as shown in FIG. 13A, the pressure and flow rate of the " May be less than the discharge pressure and flow rate in the " cross drive-parallel connection " The following is the expression.

&Quot; (11) &quot;

P _d-syn-paral <P _{d-cross-paral} ≤ P ₁ or P ₂

&Quot; (12) &quot;

Q _d-syn-paral < Q _{d-cross-paral} Q ₁ + Q ₂

When the first piezoelectric pump 40 and the second piezoelectric pump 50 are connected in parallel in the double piezoelectric pump drive apparatus according to the present embodiment as described above, in the simultaneous drive method of simultaneously driving the two piezoelectric pumps, The flow rate of the working fluid to be discharged is improved to about twice that of the conventional single piezoelectric pump drive device, but the pressure can be the same or lower. However, as in the case of the above-mentioned " simultaneous drive-parallel connection ", the pressure of the working fluid discharged from the piezoelectric pump may be the same or lower than that in the case of the cross drive system in which the two piezoelectric pumps are driven with a predetermined phase difference. However, The flow rate of the working fluid can be increased to nearly two times. Therefore, it can be seen that when the two piezoelectric pumps are connected in parallel, the flow rate of the working fluid increases regardless of the operation mode.

On the other hand, as the piston reciprocates in the cylinder in the output unit, the reciprocation of the piston determines the performance of the overall system. Therefore, the diameter of the cylinder greatly affects the driving force and the driving speed of the system.

The proper diameter of the cylinder can be obtained by the following mathematical modeling. In the present embodiment, mathematical modeling mainly uses formulas derived from a piezoelectric pump and a hydraulic cylinder. The effective volumetric modulus of the fluid is given by:

&Quot; (13) &quot;

Where β _eff is the effective volume modulus, β _fluid and β _air are the bulk modulus of the fluid and air, ΔP is the pressure variation, ΔV is the volume variation, x is the percentage of air content, t is the thickness of the tube, Diameter, and E represents the elastic modulus of the pipe.

High fluid modulus increases fluid stiffness and resonant frequency and reduces pressure loss. The main reason for the decrease in the volumetric elastic modulus of the system is that it does not completely remove the air inside the system. In consideration of this, in the present embodiment, the volume elastic modulus is set to 0.2 GPa in consideration of the internal air and the like. The fluid stiffness of the pump body can be expressed by the following equation.

&Quot; (14) &quot;

Where β is the bulk modulus, A _chamber is the area of the pumping space, and L _chamber is the length of the pumping space. The displacement and the force of the actual piezoelectric stack when the piezoelectric stack is put into the pump body can be expressed by the following equation.

&Quot; (15) &quot;

&Quot; (16) &quot;

F _O = F _b - δ _O × K _stack

In this case, K _stack and K _chamber are the stiffness of the piezoelectric stack and the pump body, δ _O is the displacement of the piezoelectric stack in the load state, δ _free is the maximum displacement in the no-load state, F _O is the force generated in the actual pumping space, _b is the maximum force of the piezoelectric stack. Therefore, the pressure generated by a single pump can be expressed by the following equation.

&Quot; (17) &quot;

The driving force and speed of the cylinder can be expressed by the following equations.

&Quot; (18) &quot;

F _ext = P _pump x A _ext

&Quot; (19) &quot;

Here, Q _pump is the flow rate discharged from a single pump. Where A _ext is the internal cross-sectional area of the cylinder and can be expressed as:

&Quot; (20) &quot;

A _ext = 0.25 x? (D ² _cylinder - d ² _shaft )

Where d _cylinder and d _shaft are the diameter of the cylinder and piston rod, respectively. Fluid viscosity, inertia, friction losses and valve pressure losses were not considered.

Accordingly, when the other conditions are constant, the driving force of the driving device becomes larger and the driving speed becomes smaller as the inner cross-sectional area of the cylinder in Equations (15) and (16) becomes larger. It can be seen that the diameter of the cylinder has a great influence on the performance of the system.

On the other hand, in the case of " cross drive-series connection ", the pressure discharged by the two pumps 40 and 50 under ideal conditions can be expressed by the following equation.

&Quot; (21) &quot;

P _d = 2 x P _pump

Here, P _d is the discharge pressure of the piezoelectric pump-hydraulic hybrid drive device (hereinafter referred to as a double piezoelectric pump drive device) to which two piezoelectric pumps are applied.

This is because, if a cylinder having a diameter of 21 mm is used based on the results of a piezoelectric pump-hydraulic hybrid drive apparatus (hereinafter referred to as a single piezoelectric pump drive apparatus) to which one piezoelectric pump is applied, the driving force of the double piezoelectric- It can be doubled.

The flow rate of two pumps under ideal conditions in the cross drive-parallel connection can be expressed by the following equation.

&Quot; (22) &quot;

Q _d = 2 x Q _pump

Assuming that the speed of the cylinder in the double piezoelectric pump drive equals the cylinder speed in a single piezoelectric pump drive, the following equation can be obtained.

&Quot; (23) &quot;

&Quot; (25) &quot;

A _ext1 = 2 x A _Aext

&Quot; (26) &quot;

A _ext1 = 0.25 x? X (d ² _{cylinder 1} - d ² _shaft )

Where A _ext1 and d _cylinder1 are the internal cross-sectional area and diameter of the large cylinder. Using the equations (24), (25) and (20), the diameter of a large cylinder can be calculated to be about 29.1 mm. The diameter of the large cylinder can be set to 30 mm for ease of production.

배, 병렬연결에서는 2배의 속도가 되지 않음을 알 수 있다.Then, in case of using a 30 mm cylinder directly connected to the series connection in order to obtain a larger driving force in the " crossover drive-serial connection &quot;, considering the loss in the sub connection pipe used to connect the two pumps, As in Equation 22,

It can be seen that the speed is not doubled in the case of a doubly connected parallel connection.

On the other hand, the performance of the operation mode according to the present embodiment can be predicted based on the maximum driving force and the maximum driving speed of the single piezoelectric pump. In this case, based on the above mathematical modeling, you can use LabVIEW software to predict as shown in [Table 2] below. [Table 2] shows performance prediction tables of driving force and driving speed. As a result, the maximum driving force was 1614 N and the maximum speed was 65.5 mm / s at a cylinder diameter of 21 mm, and the maximum driving force was 1718 N at a cylinder diameter of 30 mm, and the maximum driving speed was 42.1 mm / s, and it can be seen that the maximum driving force of the cross driving-series connecting-cylinder diameter 30 mm is 3444 N and the maximum driving speed is 34 mm / s.

Kinds
Maximum driving force (N) Maximum driving speed (mm / s) prediction Experimental compensation prediction Experimental compensation Single pump (result) 1691 807 40 54.0 Cross-series (21mm) 3383 1614 57 65.5 Cross-parallel (30mm) 3609 1718 38 42.1 Cross-serial 30mm) 7212 3444 31 34.0

In the case where a plurality of piezoelectric pumps are applied as described above to operate in the cross-series or cross-parallel manner, if the piezoelectric pumps of FIGS. 2 to 9 described above are applied, the vapors in the valve assembly can be prevented in advance It is possible to allow the fluid to flow quickly but not stagnant. Accordingly, as the flow rate of each piezoelectric pump increases, the pumping performance can be improved. Thus, the efficiency of the drive device can be improved and the present invention can be applied to a device requiring relatively light and high output such as a small flying object or a rocket system .

In the above-described embodiment, the piezoelectric pumps of FIGS. 2 to 9 are applied to a case where a plurality of piezoelectric pumps are connected to a cylinder through a switching unit. However, in some cases, The piezoelectric pump of Figs. 2 to 9 described above can be applied. In this case as well, the same effect as in the case where a plurality of piezoelectric pumps are applied in advance can be expected.

Claims (11)

A first valve plate on which an inflow port is formed;
A second valve plate having an outlet port communicating with the inlet port; And
A fixing part fixed between the first valve plate and the second valve plate, a fixed end having one end extending from the fixed part and a free end having a free end, the pressure control part being located between the inflow port and the inflow port, And a valve plate member having an opening and closing part that is expanded in accordance with a difference between the pressure of the outlet port and the inlet port to block or bend to open the inlet port,
A guide portion is formed at an end portion of the opening / closing portion so as to guide the fluid passing through the inlet port in the outflow port direction,
Wherein the guide portion is formed by being bent from a free end of the opening / closing portion toward the fixed end,
And the length of the guide portion is formed to be smaller than or equal to the diameter of the outflow port. delete delete The method according to claim 1,
Wherein a bending angle of the guide portion is formed such that an angle formed by a longitudinal imaginary line of the guide portion with respect to the upper surface of the guide portion and a center line of the outlet tube is less than or equal to 90 degrees at a maximum opening height of the guide portion. delete The method according to claim 1,
A valve groove having a predetermined width and depth is formed on one side surface of the second valve plate in contact with the first valve plate so as to accommodate the opening and closing portions and the guide portion when the opening and closing portion is bent,
And the inlet port is formed in the valve groove. The method according to claim 1,
Wherein the first valve plate has a first inlet port and a second outlet port formed therein, a second inlet port and a first outlet port are formed in the second valve plate,
Wherein the valve plate body is formed with a first opening and closing part located between the first and second inlet openings and a second opening and closing part located between the first and second outlet openings, 1 guide portion and a second guide portion are formed,
Wherein the first guide portion and the second guide portion are formed in opposite directions to each other. An output unit that is provided with a working space in which a working fluid is accommodated and transmits a driving force generated according to a pressure difference of the working fluid flowing into the working space to the outside;
A connection unit connected to the output unit for guiding the working fluid to the working space of the output unit;
A switching unit coupled to the connecting unit to switch a flow direction of the working fluid;
A first piezoelectric pump connected to the output unit by the connecting unit via the switching unit;
A second piezoelectric pump connected to the output unit by the connection unit via the switching unit and connected to the first piezoelectric pump; And
And a control unit for controlling the valve assembly, the first piezoelectric pump and the second piezoelectric pump,
Wherein the first piezoelectric pump and the second piezoelectric pump are provided with the valve assembly according to any one of claims 1, 4 and 6 to 7. 9. The method of claim 8,
The connection unit includes a plurality of main connection pipes for connecting the output unit to the first piezoelectric pump and the second piezoelectric pump with the valve assembly interposed therebetween, And a connecting tube. The first piezoelectric pump and the second piezoelectric pump are connected to one output unit through a switching unit for switching the flow direction of the working gas, and the first piezoelectric pump and the second piezoelectric pump are connected to the first piezoelectric pump and the second piezoelectric pump, 8. An integrated hybrid drive system having a valve assembly according to any one of claims 6 to 7,
Wherein the driving period of the first piezoelectric pump and the driving period of the second piezoelectric pump are controlled to have the same phase. The first piezoelectric pump and the second piezoelectric pump are connected to one output unit through a switching valve for switching the flow direction of the working gas, and the first piezoelectric pump and the second piezoelectric pump are connected to the first piezoelectric pump and the second piezoelectric pump, The integrated hybrid drive system according to any one of claims 6 to 7,
Wherein the operation period of the first piezoelectric pump and the operation period of the second piezoelectric pump are controlled to have a phase difference of 180 degrees.

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