KR101875360B1 - Turntablewith air bearing capable of reduced rolling resistance and uniform pressure distribution - Google Patents

Turntablewith air bearing capable of reduced rolling resistance and uniform pressure distribution Download PDF

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Publication number
KR101875360B1
KR101875360B1 KR1020180023721A KR20180023721A KR101875360B1 KR 101875360 B1 KR101875360 B1 KR 101875360B1 KR 1020180023721 A KR1020180023721 A KR 1020180023721A KR 20180023721 A KR20180023721 A KR 20180023721A KR 101875360 B1 KR101875360 B1 KR 101875360B1
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KR
South Korea
Prior art keywords
air
hole
bearing
air supply
housing
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Application number
KR1020180023721A
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Korean (ko)
Inventor
김종민
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김종민
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Priority to KR1020180023721A priority Critical patent/KR101875360B1/en
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Publication of KR101875360B1 publication Critical patent/KR101875360B1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/80—Turntables carrying articles or materials to be transferred, e.g. combined with ploughs or scrapers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2812/00—Indexing codes relating to the kind or type of conveyors
    • B65G2812/14—Turntables

Abstract

The present invention relates to a turntable having an air bearing capable of reducing rotational resistance and achieving uniform pressure distribution. More specifically, the present invention maintains an intrinsic purpose of the turntable, and enables supplied air to be supplied in the direction in which an upper plate rotates. Accordingly, the present invention is a useful invention for minimizing friction to improve rotation accuracy, and to stably support a lower portion of the upper plate by a structure capable of amplifying the amount of air supplied to the upper plate, thereby preventing sagging and the like.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a turntable having a reduced rolling resistance and a uniform pressure distribution,

The present invention relates to a turntable having an air bearing capable of reducing rotational resistance and achieving a uniform pressure distribution. More specifically, the present invention relates to a turntable in which air supplied to the inside of a turntable flows, And an air bearing capable of reducing rotation resistance and achieving a uniform pressure distribution so as to prevent defective machining of the workpiece by improving the rotation accuracy of the turntable.

The rotary table is typically used for manufacturing various precision instruments, semiconductor components, and manufacturing apparatuses manufactured by rotation. The rotary table is rotated using a pulley or a chain, or rotated using air pressure or hydraulic pressure.

On the other hand, among these air bearings, since the bearing surface and the moving surface are in contact with each other through the sliding film formed of the lubricating oil, there is a slight difference depending on the type of lubricating oil. However, friction, noise, A certain degree of mechanical loss becomes inevitable.

A pneumatic bearing developed to improve the performance of the bearing by eliminating such mechanical loss is a pneumatic bearing as a representative example of the bearing.

The air bearing supports the load by lifting the slider by the air pressure formed by injecting the compressed air into the bearing gap between the guide rail and the slider, and can be divided into a rectangular shape or a T shape depending on the shape of the slider and the guide rail.

As shown in FIG. 1, the conventional turntable using an air bearing includes a base plate 100; A rotary housing 210 rotatably mounted on the base plate 100 and a fixed housing 230 spaced apart from the rotary housing 210 by a predetermined distance and fixed to the base plate 100, A housing (200) comprising: A lower plate 300 formed on the upper portion of the rotary housing 210; A spacer 400 formed on the upper portion of the lower plate 300; A driving motor 500 disposed at one side of the inside of the housing 200; A shaft 600 disposed vertically in the housing 200 and connected to the driving motor 500 to rotate; A radial bearing 700 formed on an outer periphery of the spacer 400; An air inlet 810 for injecting air is formed on a side surface of the radial bearing 700 and a first air supply hole 830 extending from the air inlet 810 is formed, A thrust bearing 800 which is formed in a donut shape on the upper portion so as to penetrate upward and downward and in which a first air supply hole 830 and a second air supply hole 850 are formed; An upper plate 900 formed on the spacer 400 and connected to the shaft 600; do.

The second air supply hole 850 formed in the thrust bearing 800 is formed so as to penetrate the upper and lower portions of the thruster bearing 800 in the vertical direction so that the upper plate 900 and the lower plate 300 The air can be supplied to the surface of the upper plate 900. However, since the area for supplying air to the upper plate 900 and the lower plate 300 is substantially narrowed, problems such as sagging of the upper plate 900 can not be avoided.

In the case where a workpiece positioned on the upper plate 900 is processed in a state where the sagging phenomenon of the upper plate 900 is generated, it is inevitably accompanied with defective machining, and the economical efficiency such as disposal of the product is inevitably lowered.

In addition to the above-described prior art, a rotary table using an air bearing (Japanese Patent Laid-Open No. 10-2009-0013299) is provided with a cylindrical shaft having an upper rim protruding outward, a shaft collar coupled to a lower portion of the shaft, A cover provided on an upper portion of the air bearing; a housing spaced apart from a side surface of the air bearing by a predetermined space; A base plate installed at a lower portion of the housing and coupled to form a space at a lower portion of a shaft collar coupled to the inside of the housing; and an upper portion of the air bearing is firmly coupled to the cover and the upper portion of the housing, An air inlet port through which the air hose installed at one side of the side of the side of the housing is coupled, And a silencer provided at a lower side of the rotary table.

The above-mentioned conventional technology has a problem that rotation resistance is generated between the shaft and the shaft due to the direction in which the first air is introduced into the rotating shaft in a linear direction, and the rotation accuracy is inevitably lowered.

Therefore, it is an object of the present invention to provide a thrust bearing in which air is supplied through an air inlet of a thrust bearing, air is supplied to the upper plate while moving through the first and second air supply holes, An air amplification hole extending from the air supply hole and formed to be wider than the left and right width of the second air supply hole to amplify the amount of air to be moved to form more air contact surfaces at the lower portion of the upper plate, And a plurality of rotation induction holes extending from the second air supply hole along the outer circumference of the radial bearing formed in the inner periphery of the thrust bearing, Wherein the spacer is formed so as to be inclined in the same direction as the rotation direction of the spacer formed on the inner periphery of the radial bearing, An air bearing capable of reducing the rotational resistance and enabling a uniform pressure distribution so as to improve the rotation accuracy of the upper plate by reducing the vibration with the upper plate by forming a rotation inducing groove at a position corresponding to the rotation inducing hole on the outer side of the spacer And the technical problem was solved by focusing on providing the composed turntable.

As a technical concept to achieve the above object, a base plate 10; A fixed housing 23 formed on the upper portion of the base plate 10 and rotating, a stationary housing 23 separated from the outer periphery of the rotary housing 21 by a predetermined distance and fixed to the base plate 10, (20); A lower plate 30 formed on the upper portion of the rotary housing 21; A spacer 40 formed on the upper portion of the lower plate 30; A drive motor (50) arranged at one side of the inside of the housing (20); A shaft (60) vertically disposed in the housing (20) and connected to the drive motor (50) and rotated; A radial bearing 70 formed on an outer periphery of the spacer 40; An air inlet 81 for injecting air is formed on the side surface of the radial bearing 70 and a first air supply hole 83 extending from the air inlet 81 is formed, A thrust bearing (80) penetrating upward and downward in a donut shape and forming a second air supply hole (85) extending from the first air supply hole (83); An upper plate (90) formed on the spacer (40) and connected to the shaft (60); The housing 20, the radial bearing 70 and the thrust bearing 80 are made of a ceramic material, and the thrust bearing 80 is made of a ceramic material. An air amplification hole 87 extending in the second air supply hole 85 and having a width greater than that of the second air supply hole 85 is formed, And a rotation induction hole 71 extending to the second air supply hole 85 and inclined in the same direction as the rotation direction of the upper plate 90 is formed on a side surface of the radial bearing 70. [

The spacer 40 has the same orientation as that of the rotation inducing hole 71 of the radial bearing 70 and the rotation inducing groove 41 is formed at a position corresponding to the rotation inducing hole 71, .

The thrust bearing 80 is provided with a plurality of third air supply holes 89 spaced apart from the outer circumference of the air amplification hole 87 and extending in a direction perpendicular to the first air supply hole 83, And is formed so as to be spaced apart from each other.

According to the turntable having the air bearing capable of reducing the rotation resistance and distributing the pressure uniformly according to the present invention, it is possible to maintain the original purpose of the turntable and to supply the air in the direction in which the top plate is rotated, The rotary accuracy is improved by minimizing the amount of air supplied to the upper plate, and the amount of air supplied to the upper plate can be further amplified to provide a uniform pressure to the lower portion of the upper plate, thereby stably supporting the upper plate.

1 is a cross-sectional view showing a turntable having a conventional air bearing,
2 is a cross-sectional view showing a preferred embodiment of the present invention,
Figure 3 is a drawing illustrating rotated and non-rotating configurations of the present invention;
4 is a front sectional view showing a radial bearing, a thrust bearing, and a spacer according to the present invention,
5 is a plan view showing a preferred embodiment of aa of Fig. 4
6 is a plan sectional view showing another embodiment of aa in Fig. 5
7 is a comparative drawing showing the conventional air flow and the air flow of the present invention
Figure 8 is an operating state diagram illustrating a preferred embodiment of the present invention.
9 is a view showing a preferred embodiment of the air distribution of the present invention
Fig. 10 is a front sectional view showing another embodiment of the present invention

According to the present invention, the air supplied to the inside of the turntable flows, reducing the rotational resistance of the upper plate and providing a uniform pressure distribution, thereby improving deflection and rotation accuracy of the upper plate, The present invention provides a turntable having an air bearing capable of uniform pressure distribution.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

Prior to describing the present invention, the structure will be described with reference to FIGS. 2 to 5, wherein the base plate 10; A fixed housing 23 formed on the upper portion of the base plate 10 and rotating, a stationary housing 23 separated from the outer periphery of the rotary housing 21 by a predetermined distance and fixed to the base plate 10, (20); A lower plate 30 formed on the upper portion of the rotary housing 21; A spacer 40 formed on the upper portion of the lower plate 30; A drive motor (50) arranged at one side of the inside of the housing (20); A shaft (60) vertically disposed in the housing (20) and connected to the drive motor (50) and rotated; A radial bearing 70 formed on an outer periphery of the spacer 40; An air inlet 81 for injecting air is formed on the side surface of the radial bearing 70 and a first air supply hole 83 extending from the air inlet 81 is formed, A thrust bearing (80) penetrating upward and downward in a donut shape and forming a second air supply hole (85) extending from the first air supply hole (83); An upper plate (90) formed on the spacer (40) and connected to the shaft (60); The housing 20, the radial bearing 70 and the thrust bearing 80 are made of a ceramic material, and the thrust bearing 80 is made of a ceramic material. An air amplification hole 87 extending in the second air supply hole 85 and having a width greater than that of the second air supply hole 85 is formed, A rotation induction hole 71 extending to the second air supply hole 85 and inclined in the same direction as the rotation direction of the upper plate 90 is formed on the side surface of the radial bearing 70.

3, the shaft 60 connected to the driving motor 50, the upper plate 90 connected to the shaft 60, the spacer 40 connected to the upper plate 90, the spacer 40, And the rotary housing 21 connected to the lower plate 30 are configured to rotate in the same direction as the rotation direction of the drive motor 50 due to the rotation of the drive motor 50, A fixed housing 23 coupled to the base plate 10 and a thrust bearing 80 coupled to the stationary housing 23 and a radial bearing 70 configured to bear the thrust bearing 80, It is maintained in a fixed state without rotating.

As described above, the present invention is based on the organic combination of the rotating components and the non-rotating components, wherein when the top plate 90 rotates, it provides uniform pressure to the bottom thereof, It is possible to improve the rotation accuracy by supplying the air in the same direction as the rotation direction of the spacer 40 coupled to the upper plate 90 in accordance with the rotation direction of the upper plate 90, The occurrence of vibration can be reduced.

In the case of the housing 20, the lower plate 30, the drive motor 50, the shaft 60 and the upper plate 90 constituted by the base plate 10, the rotary housing 21 and the fixed housing 23, The base plate 10 and the housing 20 are made of a ceramic material and can have high rigidity.

The spacer 40, the radial bearing 70, and the thrust bearing 80, which are features of the present invention, will be mainly described.

As shown in FIGS. 2, 4 and 5, the thrust bearing 80 is formed of a ceramic-based BN (boronitride) material and is configured to have high rigidity. The thrust bearing 80 is formed in a donut shape on the upper side, An air amplification hole 87 having a width wider than the width of the air supply hole 85 is formed.

4, the air that flows through the second air flow hole 85 indirectly has a greater contact surface with the lower surface of the upper plate 90, The air is uniformly distributed in the lower portion of the upper plate 90 so that the upper plate 90 can be prevented from falling down.

7 or 9, the air amplification hole 87 is suddenly expanded by the air amplification hole 87 when it is discharged while moving through the second air flow hole 85, The predetermined air is moved to both sides while striking the lower portion of the upper plate 90. The predetermined air is moved upward by the air moving in the second air flow hole 85 again while rotating on the air amplification hole 87, 90, respectively.

In other words, the air is moved through the configuration of the air amplification hole 87, allowing the air to flow on the air amplification hole 87 while allowing the upper plate 90 to form more indirect contact surfaces, Can be stably supported.

That is, the thrust bearing (80) of the present invention can provide the optimum pressure condition provided by the top plate (90).

2, 4, 5 and 6, the radial bearing 70 is made of the same ceramic-type BN (boronitride) material as the thrust bearing 80, And a rotation induction hole 81 extending to the first air supply hole 83 of the thrust bearing 80 is formed on the outer circumference.

5, the air that is moved through the first air supply hole 83 is moved toward the outside of the spacer 40 while being moved in the direction of the rotation induction hole 81, Can be supplied. At this time, the rotation induction hole 81 is inclined so as to have the same direction as the rotation direction of the spacer 40, so that the rotation resistance of the spacer 40 and the vibration of the spacer 40 are suppressed, So that stable rotation of the coupled top plate 90 is enabled.

6, the first air supply hole 83 of the thrust bearing 80 starts from a portion extending from the second air supply hole 85, And may be formed so as to extend at the same angle as that of the rotation inducing hole 71 to a portion extending to the hole 71.

2, 5 and 8, the spacer 40 has the same orientation as that of the rotation inducing hole 71 of the radial bearing 70, and is provided on the outer periphery of the spacer 40 in correspondence with the rotation inducing hole 71 So that the air discharged from the rotation inducing hole 71 of the radial bearing 70 is continuously supplied to the outer periphery of the spacer 40 and the rotation resistance is further suppressed .

8, a spacer 40 is coupled to the upper plate 90, a radial bearing 70 is formed on the outer periphery of the spacer 40, and a thrust (not shown) is formed on the outer periphery of the radial bearing 70, The air flowing through the air inlet 81 of the thrust bearing 80 moves through the first air flow hole 83 while passing through the second air flow hole 85, And is moved to the air amplification hole 87 so that a uniform pressure can be distributed to the lower portion of the upper plate 90 and the rotation of the radial bearing 70 positioned on the same line in the first air flow hole 83 The induction hole 71 is inclined so as to have the same direction as the rotating direction of the spacer 40 connected to the upper plate 90 so that when the spacer 40 rotates by the rotation of the upper plate 90, 40 is minimized and the vibration can be suppressed.

As shown in FIG. 10, the thrust bearing 80 is provided with a plurality of thrust bearings 80 spaced apart from the outer circumference of the air amplification holes 87 and extending in a direction perpendicular to the first air supply holes 83, 3 air supply holes 89 are formed to be spaced apart from each other, so that the upper plate 90 can be more stably supported.

At this time, the third air supply hole 89 is formed in one hole instead of the donut shape because there is a portion where the bolt is engaged for fixing the thrust bearing 80.

According to the turntable having the air bearing capable of reducing the rotation resistance and distributing the pressure uniformly according to the present invention, it is possible to maintain the intrinsic purpose of the turntable and to supply the air in the direction in which the top plate is rotated, The rotation accuracy is improved and the amount of air supplied to the upper plate can be further amplified to stably support the lower portion of the upper plate to prevent sagging and the like.

10: Base plate
20: housing 21: rotary housing 23: stationary housing
30: Lower plate
40: spacer 41: rotation guide groove
50: drive motor
60: Shaft
70: radial bearing 71: rotation induction hole
80: thrust bearing 81: air inlet 83: first air supply hole
85: second air supply hole 87: air amplification hole 89: third air supply hole
90: top plate

Claims (3)

A base plate (10); A fixed housing 23 formed on the upper portion of the base plate 10 and rotating, a stationary housing 23 spaced apart from the outer circumference of the rotary housing 21 by being coupled with the base plate 10, (20); A lower plate 30 formed on the upper portion of the rotary housing 21; A spacer 40 formed on the upper portion of the lower plate 30; A drive motor (50) arranged at one side of the inside of the housing (20); A shaft (60) vertically disposed in the housing (20) and connected to the drive motor (50) and rotated; A radial bearing 70 formed on an outer periphery of the spacer 40; An air inlet 81 for injecting air is formed on the side surface of the radial bearing 70 and a first air supply hole 83 extending from the air inlet 81 is formed, A thrust bearing (80) penetrating upward and downward in a donut shape and forming a second air supply hole (85) extending from the first air supply hole (83); An upper plate (90) formed on the spacer (40) and connected to the shaft (60); The air bearing according to claim 1,
The base plate 10, the housing 20, the radial bearing 70, and the thrust bearing 80 are formed of a ceramic material,
The thrust bearing 80 is formed in an upper portion of the thrust bearing 80 and has an air amplification hole (not shown) extending in the second air supply hole 85 and having a width wider than the width of the second air supply hole 85 87)
Wherein a rotation induction hole (71) extending from the second air supply hole (85) and inclining in the same direction as the rotation direction of the upper plate (90) is formed on a side surface of the radial bearing (70) Turntable with air bearings with reduced resistance and uniform pressure distribution.
The method according to claim 1,
The spacer 40 has the same orientation as the rotation inducing hole 71 of the radial bearing 70 and has a rotation inducing groove 41 at a position corresponding to the rotation inducing hole 71 And a turntable with an air bearing capable of uniform pressure distribution.
The method according to claim 1,
The thrust bearing 80 is provided with a plurality of third air supply holes 89 spaced apart from the outer circumference of the air amplification hole 87 and extending in a direction perpendicular to the first air supply hole 83, The air bearing being capable of reducing rotational resistance and distributing the pressure uniformly.

KR1020180023721A 2018-02-27 2018-02-27 Turntablewith air bearing capable of reduced rolling resistance and uniform pressure distribution KR101875360B1 (en)

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Application Number Priority Date Filing Date Title
KR1020180023721A KR101875360B1 (en) 2018-02-27 2018-02-27 Turntablewith air bearing capable of reduced rolling resistance and uniform pressure distribution

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Application Number Priority Date Filing Date Title
KR1020180023721A KR101875360B1 (en) 2018-02-27 2018-02-27 Turntablewith air bearing capable of reduced rolling resistance and uniform pressure distribution

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022146691A1 (en) * 2020-12-28 2022-07-07 Mattson Technology, Inc. Workpiece support for a thermal processing system
CN117212338A (en) * 2023-11-07 2023-12-12 无锡星微科技有限公司杭州分公司 High-bearing precision air-floatation turntable

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002066854A (en) 2000-08-29 2002-03-05 Ntn Corp Static pressure gas bearing spindle
JP2009012120A (en) 2007-07-04 2009-01-22 Toshiba Mach Co Ltd Turning table device
JP2011208724A (en) 2010-03-30 2011-10-20 Ntn Corp Static pressure journal bearing spindle

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002066854A (en) 2000-08-29 2002-03-05 Ntn Corp Static pressure gas bearing spindle
JP2009012120A (en) 2007-07-04 2009-01-22 Toshiba Mach Co Ltd Turning table device
JP2011208724A (en) 2010-03-30 2011-10-20 Ntn Corp Static pressure journal bearing spindle

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022146691A1 (en) * 2020-12-28 2022-07-07 Mattson Technology, Inc. Workpiece support for a thermal processing system
CN117212338A (en) * 2023-11-07 2023-12-12 无锡星微科技有限公司杭州分公司 High-bearing precision air-floatation turntable
CN117212338B (en) * 2023-11-07 2024-02-06 无锡星微科技有限公司杭州分公司 High-bearing precision air-floatation turntable

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