KR101874601B1 - Apparatus For Testing Gas Leakage Can Be Portable - Google Patents
Apparatus For Testing Gas Leakage Can Be Portable Download PDFInfo
- Publication number
- KR101874601B1 KR101874601B1 KR1020160010372A KR20160010372A KR101874601B1 KR 101874601 B1 KR101874601 B1 KR 101874601B1 KR 1020160010372 A KR1020160010372 A KR 1020160010372A KR 20160010372 A KR20160010372 A KR 20160010372A KR 101874601 B1 KR101874601 B1 KR 101874601B1
- Authority
- KR
- South Korea
- Prior art keywords
- casing
- pin
- gas
- inner valve
- push switch
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/3281—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators removably mounted in a test cell
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/32—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators
- G01M3/34—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for containers, e.g. radiators by testing the possibility of maintaining the vacuum in containers, e.g. in can-testing machines
Abstract
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rechargeable portable leak test apparatus for testing leakage of various vacuum equipment used in a semiconductor, LCD, LED, or SOLAR manufacturing facility. His composition is; A pressure-resistant container filled with a test gas, which is adapted to be easily carried by an operator; An inner valve coupled to an inlet of the pressure-resistant vessel; A casing enclosing the inner valve and having a gas outlet; And a valve opening portion provided in the casing, the valve opening portion allowing the test gas to be blown out through the gas outlet by pressing and opening the inner valve.
Description
BACKGROUND OF THE
Vacuum equipment is installed in semiconductor, LCD, LED or SOLAR manufacturing facilities. These vacuum equipments are used for various purposes and should be operated in vacuum condition. Therefore, the degree of vacuum is an important factor in determining the quality or defect of the product. Therefore, periodic care should be taken to prevent leakage from any part of the vacuum system. If a leak is found, it must be recovered.
In this way, it is being carried out to check whether or not the vacuum is leaked from various vacuum equipment or to locate the leakage point. The test gas is used for this operation. That is, when the test gas is sprayed to the leaked portion, the test gas will flow into the vacuum facility, and the test gas can be detected by the gas detector inside the equipment. That is, if the test gas is detected, there is a leak.
As the test gas, helium (He) gas having a small particle size and stable molecular structure is used. Helium has been widely used because it has a stable structure and a small particle size, which can be introduced through fine gaps and can increase detection accuracy.
For the test using helium, conventionally, piping for only helium gas was installed inside the plant, and helium was taken out from the plant for testing. In this case, since the helium pipe must be installed as a whole, there is a problem that the cost is excessively increased.
To solve this problem, a helium gas cylinder filled with helium was installed on a cart or a bogie to carry out a leak test by going around the facility. In this case, the helium gas cylinder used is large in size and difficult to transport and obstructs the existing operator. In order to test a narrow area or a high point, a long hose must be connected and used.
SUMMARY OF THE INVENTION An object of the present invention is to provide a portable leak tester for testing the leakage of vacuum equipment installed in various industrial facilities. More specifically, it is an object of the present invention to provide a portable leak tester which can be carried in an operator's hand so that it can be tested while carrying it in a cramped place, and which is simple in construction and does not interfere with other workers and enables rapid testing .
The above-
A pressure-resistant container filled with a test gas, which is adapted to be easily carried by an operator; An inner valve coupled to an inlet of the pressure-resistant vessel;
A casing enclosing the inner valve and having a gas outlet;
And a valve opening portion provided in the casing and configured to pressurize and open the inner valve to cause the test gas to be ejected through the gas outlet.
According to another aspect of the present invention, the valve opening includes:
A pushbutton that presses up the pin projecting from the upper surface of the inner valve while vertically moving in a state of being installed in the casing;
A push switch installed on an upper end of the casing so as to press the pushbutton from above; And a gas guiding means provided inside the casing so that the test gas ejected from the pressure-resistant container can be ejected only through a gas outlet provided on the side of the casing when the pushing member presses the pin.
The valve opening portion being connected to the inner valve so as to be installed on the pressure-resistant container;
A pushbutton that presses up the pin projecting from the upper surface of the inner valve while vertically moving in a state of being installed in the casing; A push switch installed on an upper end of the casing so as to press the pushbutton from above; And a gas guiding unit provided inside the casing so that the test gas ejected from the pressure-resistant container can be ejected only through a gas outlet provided at a side of the casing when the pushing member presses the pin.
According to still another aspect of the present invention, there is provided a gas turbine engine, further comprising: an induction pipe coupling coupled to the gas outlet so as to eject the test gas precisely at a local point;
The induction pipe assembly includes a socket having a pinhole formed on both sides thereof to be screwed to the casing; A rotatable member coupled to a pinhole of the socket and rotatably installed around the pinhole; And a spray pipe coupled to a distal end of the rotary shaft and extending long. Here, a packing for maintaining airtightness may be provided between the casing and the socket, and between the socket and the rotary tool.
According to another aspect of the present invention, a spring is interposed between the pushing plate and the push switch, so that the push switch receives a force to return to the original position by the elastic force of the spring.
According to still another aspect of the present invention, the apparatus further includes a gas control port for controlling the ejection amount of the test gas by limiting the start range of the switch;
An adjusting pin having one end screwed to the casing and an upper end selectively supported on a bottom surface of the push switch; An adjustment switch for limiting the degree to which the adjustment pin is screwed to the casing by rotating the adjustment pin; And a regulating pin guide hole which is fitted to the upper end of the regulating pin to guide the regulating pin to move up and down and is fixed to the casing.
According to the above configuration, a portable leak test apparatus for testing whether leakage of vacuum equipment installed in various industrial facilities is provided. More specifically, it is small enough to fit in a pocket, providing a leak testing device that can be conveniently carried and carried in tight spaces, high or deep places. This test tool is not cumbersome and does not interfere with the factory operator and enables rapid testing.
1 and 2 are perspective views of a portable leak test instrument according to an embodiment of the present invention.
3 is an exploded perspective view of a portable leak test instrument according to an embodiment of the present invention.
Fig. 4 is a longitudinal sectional view taken along the line AA of Fig. 1, and Fig. 5 is an exploded sectional view.
6 is a partial longitudinal cross-sectional view taken along the line AA in Fig. 1; Fig.
7 to 10 are exploded perspective views of an inner valve of a portable leak test instrument according to an embodiment of the present invention.
FIG. 8 is an exploded sectional view of an inner valve of a portable leak test instrument according to an embodiment of the present invention, and FIG. 9 is a sectional view of an assembled state.
10 is a sectional view showing the state of use of the inner valve of the portable leak test instrument according to the embodiment of the present invention.
Hereinafter, the present invention will be described in detail with reference to the accompanying drawings. First, basic matters will be described with reference to FIGS. 1 to 6, and the following description will be given with reference to the remaining drawings.
The portable leak test instrument according to the present invention has a configuration in which the test gas is charged into the pressure-resistant container (B) at a high pressure and is drawn out at a moment to be tested. Therefore, it is easy for the operator to carry it personally, and the pressure-resistant container may have a capacity of 50 to 300 cc, for example, and may be made of metal such as aluminum. The charging pressure of the test gas depends on various conditions.
In the pressure-resistant vessel B, a thread is provided in the injection port, and the
The
The
On the other hand, a sealing
According to the feature of the present invention, since the
The
A
According to still another aspect of the present invention, a gas (flow rate) regulator for regulating the amount of test gas to be blown by limiting the starting range of the
The gas control member includes an adjusting
The
The
According to another aspect of the present invention, the apparatus further includes an induction pipe coupling body (53) coupled to the gas outlet (47) so as to eject the test gas precisely at a local point.
The
Between the casing (3) and the socket (63) and between the socket (63) and the rotary tool (69), packing (49, 51) for hermetic sealing is provided. The
Hereinafter, the
The body of the valve mechanism is integrally formed to maintain rigidity.
In order to engage the valve opening described above, a
A first
The
According to another embodiment of the present invention, the
The stopper member 127 is corked to the rear end of the
The
On the other hand, in the case of a gas composed of small particles such as helium (He), more careful attention to leakage is required. In the previous embodiment, there is also a possibility that the
The
A presser bar (157) is integrally protruded toward the second sealing member (125) at the center of the front end wall (139) of the body. The
The
The
The configuration shown and described above is merely a preferred embodiment based on the technical idea of the present invention. It will be understood by those skilled in the art that various changes and modifications may be made without departing from the scope of the present invention.
1: valve opening part 3: casing
11: sealing member 21: pressing member
27: regulating pin 29: regulating switch
33: push switch 41: connector
43: spring 59:
63: socket 73: switch seat part
100: Inner valve
B: pressure vessel
Claims (6)
An inner valve (100) coupled to an inlet of the pressure-resistant vessel;
A casing 3 surrounding the inner valve and having an orifice-shaped gas outlet 47;
And a valve opening part (1) installed in the casing (3) for discharging the test gas by a small amount while depressurizing the test gas through the gas outlet (47) by pressing and opening the inner valve;
The valve opening (1) comprises:
A casing 3 coupled to the inner valve 100 to be installed on the pressure vessel B; A presser bar (21) for pressing the pin (121) projecting from the upper surface of the inner valve (100) upwards while being vertically operated in a state of being installed in the casing (3);
And a push switch (33) installed on the upper end of the casing (3) so as to press the presser (21) upward;
The presser bar 21 is installed in the casing 3 so as to be vertically movable while being kept in a hermetic state in a state of being inserted into the cylinder 20 provided in the longitudinal direction inside the casing 3 like a piston;
A pressing pin 15 protrudes downward from the lower portion of the presser bar 21;
The push pin 15 extends through the pin guide hole 19 and then extends toward the pin of the inner valve 100 so as to penetrate the pin guide hole 19 formed at the lower end of the cylinder.
A spring 43 is interposed between the presser bar 21 and the push switch 33 so that the push switch 33 receives a force to return to the original position by the elastic force of the spring 43;
A connector (41) is interposed between the spring (43) and the push switch (33);
Further comprising: a gas regulator for controlling an ejection amount of the test gas by limiting a start range of the push switch (33);
An adjusting pin (27) having one end screwed to the casing (3) and an upper end selectively supported on the bottom surface of the push switch (33); An adjustment switch (29) for limiting the degree of screwing the adjustment pin (27) to the casing (3); And an adjusting pin guide hole (30) fitted to the upper end of the adjusting pin (27) and fixed to the casing (3) to guide the adjustment pin (27) up and down. Portable leakage testing apparatus.
Further comprising: an induction tube coupling coupled to the outlet so as to eject the test gas precisely at a local point;
A socket 63 screwed to the casing 3 and provided with pinholes on both sides thereof;
A rotary shaft 69 coupled to the pin hole of the socket 63 so as to be rotatable about the pin hole;
A spray tube 59 screwed to the tip of the rotary shaft 69 and extending long;
Wherein the portable leak test instrument comprises:
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020160010372A KR101874601B1 (en) | 2016-01-28 | 2016-01-28 | Apparatus For Testing Gas Leakage Can Be Portable |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020160010372A KR101874601B1 (en) | 2016-01-28 | 2016-01-28 | Apparatus For Testing Gas Leakage Can Be Portable |
Publications (2)
Publication Number | Publication Date |
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KR20170090033A KR20170090033A (en) | 2017-08-07 |
KR101874601B1 true KR101874601B1 (en) | 2018-07-04 |
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KR1020160010372A KR101874601B1 (en) | 2016-01-28 | 2016-01-28 | Apparatus For Testing Gas Leakage Can Be Portable |
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Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR200383181Y1 (en) * | 2005-02-01 | 2005-05-03 | 주식회사 엘지생활건강 | Pump dispenser |
JP2009208842A (en) * | 2008-03-05 | 2009-09-17 | Id Package:Kk | Aerosol can container cap device provided with widely jetting angle-variable nozzle head |
JP5073296B2 (en) * | 2006-05-18 | 2012-11-14 | 英夫 吉田 | Fire extinguisher gas injector |
JP2013524226A (en) * | 2010-04-09 | 2013-06-17 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | How to check for leaks |
-
2016
- 2016-01-28 KR KR1020160010372A patent/KR101874601B1/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR200383181Y1 (en) * | 2005-02-01 | 2005-05-03 | 주식회사 엘지생활건강 | Pump dispenser |
JP5073296B2 (en) * | 2006-05-18 | 2012-11-14 | 英夫 吉田 | Fire extinguisher gas injector |
JP2009208842A (en) * | 2008-03-05 | 2009-09-17 | Id Package:Kk | Aerosol can container cap device provided with widely jetting angle-variable nozzle head |
JP2013524226A (en) * | 2010-04-09 | 2013-06-17 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | How to check for leaks |
Also Published As
Publication number | Publication date |
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KR20170090033A (en) | 2017-08-07 |
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