KR101853292B1 - Harmful exhaust gas treatment wet multi-scrubber system contaning wet electrostatic precipitator - Google Patents

Abstract

A hazardous exhaust gas treatment wet multiscrubber system including a wet electrostatic precipitator is disclosed. A venturi scrubber for increasing the inertial force of the particulate matter to rotate the particles and spraying water from the spray nozzle at a velocity different from the gas velocity to connect and remove particles; A condensing heat exchanger for removing the lean gaseous phase when passing through the cooling coil using the condensing temperature; And a wet electrostatic precipitator in which electricity is applied to the electrodes to move the particles to the dust collecting plate and the particle and the mist are removed by the water film applied to the dust collecting plate, and a multi filter for filtering the particles to remove particles of the exhaust gas and spray water on the peeling layer A multi-scrubber for treating harmful gas, and a recycle tank for recycling used wastewater. Therefore, the exhaust gas containing particles (dust, high viscosity droplets) which are difficult to be treated due to the adherence discharged from the factory can be cleaned, and it is possible to provide an equipment which is easy to install and manage to treat harmful gases as well.

Description

TECHNICAL FIELD [0001] The present invention relates to a harmful exhaust gas treatment wet multi-scrubber system including a wet electrostatic precipitator,

TECHNICAL FIELD The present invention relates to a system for removing harmful gases and fine dusts caused by industrial activities, and more particularly to a system for removing harmful gases and fine dusts from exhaust gas including particulates (dust, high viscous droplets) To a hazardous exhaust gas treatment wet scrubber system comprising a wet electrostatic precipitator that improves the performance of the wet scrubber system.

The exhaust gas emitted from the semiconductor display process contains a large amount of dust and droplets. In order to treat the exhaust gas, a multi-stage packing layer is disposed in the wet scrubber to treat the cleaning water by spraying the cleaning water. However, Mixed with water to form a viscous droplet. This droplet adheres to the packing layer and can not be removed by the washing water, resulting in differential pressure in the equipment and the sludge sticking to the inner wall can not be discharged smoothly, resulting in frequent cleaning cycles and clogging of the drain pipe.

Generally, hazardous exhaust gas containing particles is treated as follows. It is a facility to install a wet filter pre-treatment and to treat wet electrostatic precipitator at the front end or the rear end of main processing. In the wet electrostatic precipitator, negative ions are generated by the corona discharge generated by applying electricity to the electrodes, and the anion is in an insecure state and tries to stabilize the dust particles floating around. The dust particles are anionized and moved to a grounded dust collecting plate having a positive pole. A water film is formed on the dust collecting plate and particles are removed together with the washing water. The wet electrostatic precipitator has to be applied entirely without DRY on the dust collecting plate, and the efficiency is very high and the BEAD is not generated. However, due to the adhesion of the dust, frequent cleaning and frequent trouble and electrical safety due to high voltage, It has many difficulties.

Application No.: 10-2009-0013269, Waste Treatment System Application No. 10-2011-0002121, Volatile Organic Compound Processor for Removing Odor, and High-Odor Treatment Device Using It

It is an object of the present invention to solve the above-mentioned problems, and it is an object of the present invention to provide an exhaust gas purifying apparatus which is not affected by not only the exhaust gas including particles (dust, high viscosity droplets) And a wet electrostatic precipitator that improves the processing and management efficiency of the equipment by commercializing the wet scrubber system.

In order to accomplish the above object, the present invention provides a gas turbine engine having a plurality of exhaust passages for combining a plurality of exhaust gas inlets and introducing exhaust gas into the cyclone inlet through separate passages, thereby eliminating interference between exhaust gases, The inertial force of the particulate matter is increased by the exhaust gas flowing into the cyclone inlet portion to rotate the particles, and at the portion where the speed of the neck portion is raised by the venturi effect, A cyclone venturi scrubber which removes hydrofluoric acid and chlorine of the ACID gas by spraying water and discharging water from the packing layer to the exhaust gas moving downward along the venturi and then moving from the bottom to the top again; A condensing heat exchanger in which, in the exhaust gas passing through the venturi scrubber, the poorly soluble gaseous phase is condensed and removed through the cooling coil; And a wet electrostatic precipitator in which electricity is applied to the dust collecting plate from the exhaust gas passing through the condensing heat exchanger to move the particles to the dust collecting plate and particles are removed by the water film applied to the dust collecting plate, And the cleaning water is sprayed to remove the harmful exhaust gas.

A large amount of wastewater generated for the treatment of particles and noxious gas is generated by applying electricity to the metal electrode, generating ions from the anode, generating hydrogen from the cathode, removing the aggregate from the ions in the coagulation bath, Further comprising a circulation water processor for removing by-products from the bubbles and reusing the water treated by filtering the particles in the filter bath.

A hazardous exhaust gas treatment wet multiscrubber system with a wet electrostatic precipitator is used to remove the aggregate and byproduct from the stack if the removal amount exceeds a certain level, to replace the used filter with a new filter and to stack the used filter And a filter replacement portion.

When the wet scrubber system including the wet electrostatic precipitator according to the present invention as described above is used, the exhaust gas containing particles (dust, high viscosity liquid droplets), which is difficult to be treated due to adhesion from the plant, It is possible to provide equipment that can be processed and installed and managed easily.

FIG. 1 is an overall schematic view showing a harmful exhaust gas treatment wet type multiscubber system including a wet electrostatic precipitator according to a first embodiment of the present invention.
2 is a front view of the pretreatment (venturi cyclone) of Fig.
3 is a multi-filter of Fig.
FIG. 4 is a schematic view showing a harmful exhaust gas treatment wet type multiscubber system including a wet electrostatic precipitator that does not have poor solubility and contains particles. FIG.
FIG. 5 is a schematic view showing a harmful exhaust gas treatment wet type multiscrubber system including a small amount of particles and wet electrostatic precipitator having a small throughput including poor solubility characteristics.

Unless defined otherwise, all terms used herein, including technical or scientific terms, have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. Terms such as those defined in commonly used dictionaries are to be interpreted as having a meaning consistent with the contextual meaning of the related art and are to be interpreted as either ideal or overly formal in the sense of the present application Do not.

Hereinafter, preferred embodiments according to the present invention will be described in detail with reference to the accompanying drawings.

As the exhaust gas is introduced into the exhaust gas inlet pipe connected to the exhaust pipe through which the exhaust gas is discharged from the factory and the flow rate of the particulate matter is increased by passing through the venturi scrubber and the cyclone, the particles (dust, droplets) The gaseous impurities entering the tank are condensed while passing through the condensing heat exchanger, and the treated gas properties of the treated gas are treated by a water-soluble and neutralization reaction in a multi-scrubber. The venturi cyclone scrubber and condensing heat exchanger can determine whether or not to install according to the presence and concentration of particles (dust, droplets) and insoluble gas of the incoming exhaust gas.

Particles (dust, droplets) increase the removal efficiency of particles by using the inertial force that is generated by spraying water from the spray nozzle at a speed different from the gas flow rate when passing through the venturi portion of the venturi scrubber, and the cyclone inlet.

The poorly soluble gaseous phases drawn into the inlet (11) of the condensing heat exchanger (300) are removed when passing through the cooling coil (12) using the condensation temperature.

As shown in FIG. 3, the multi-filter 24 of the multi-scrubber 400 is composed of layers of mutually-shaped filters, and determines the density, the thickness, and the number of filters of the exhaust gas according to a property to be processed .

A venturi scrubber for treating ACID gas and a multiscrubber, and a condensing heat exchanger for treating the lean gas. A wet scrubber system in which at least one of a venturi scrubber, a condensation heat exchanger, and a multiscrubber is included in a wet electrostatic precipitator in accordance with the type of gas constituting the exhaust gas. FIGS. 1 to 3 are schematic diagrams of a harmful exhaust gas treatment wet multi-scrubber system including a wet electrostatic precipitator. FIG. 4 is a schematic view of a harmful exhaust gas treatment wet process apparatus including a wet electrostatic precipitator including particles and noxious gas, FIG. 5 is a block diagram showing a harmful exhaust gas treatment wet type multiscrubber system including a comparatively small particle and a wet electrostatic precipitator including the poorly soluble property. FIG.

FIG. 1 is a general view showing a harmful exhaust gas treatment wet type multiscubber system including a wet electrostatic precipitator according to a first embodiment of the present invention. 2 is a front view of the pretreatment (venturi cyclone) of Fig.

The venturi scrubber is composed of two exhaust gas inlets (1) and a double channel with separate passages. Two exhaust gas flows through separate passages to purify the particles by rotating the particles, and the noxious gas passes through the packing layer 200). The venturi scrubber sprays washing water on the packing layer 200 to have a gas phase treating efficiency of 75 percent.

In another embodiment, the two exhaust passages are configured to couple the two exhaust gas inlets, but a multi-stage exhaust passageway can be formed when combining the exhaust gas inlets of multiple stages. It is to construct several ducts to combine several exhaust gas inlets. This eliminates interference between the exhaust gases, allowing the exhaust gas to flow well into the venturi scrubber, thereby reducing the generation of differential pressure and enhancing purification performance.

The venturi scrubber raises the inertial force of the particulate matter to the venturi (cyclone) 100 from the exhaust gas input to the inlet port 1 to spray the water 2 from the spray nozzle at a speed different from the gas flow rate, And is removed. The venturi scrubber rotates the particles and injects the water (2) at a different velocity than the gas flow rate to connect and remove particles. The venturi scrubber performs a pretreatment process. The exhaust gas descends along the venturi and then moves from bottom to top again.

The venturi scrubber sprays water at the speed of the neck part by a venturi effect to remove 99 percent of the entrained exhaust gases and particles more than 10 micrometers.

The venturi scrubber sprays water (3) on the packing layer (200) to remove hydrofluoric acid and chlorine of the ACID gas. Venturi scrubbers spray clean water on the packing layer and have 75 percent gas treatment efficiency.

The water (2) used as washing water flows into the water tank (6). The water (2) introduced into the water tank (8) is treated by the circulating water processor and reused.

The cyclone 100 increases the residence time of the exhaust gas by lengthening the passage, spraying the water 2 from the spray nozzle, and connecting the particles to remove the water. The outlet is connected to the inlet (11) of the condensing heat exchanger. The cyclone 100 rotates the particles and injects water at a velocity different from the gas flow velocity to connect and remove the particles.

The condensing heat exchanger (300) removes the poorly soluble gaseous phase when passing through the cooling coil (12) using the condensation temperature. The exhaust gas is delivered to the multiscrubber 400 via the filter 13 and the discharge port 14. The condensing heat exchanger (300) removes the poorly soluble gaseous phase drawn into the inlet when passing through the cooling coil (12) using the condensation temperature. The condensing heat exchanger 300 performs a pretreatment process.

The multiscrubber 400 includes a wet electrostatic precipitator in which electricity is applied to the dust collecting plate 23 to move the particles to the dust collecting plate 23 and particles are removed by the water films 22a, 22b, 22c and 22d applied to the dust collecting plate, To remove particles of the exhaust gas with a multi-filter (24) for filtering the particles. The multi-scrubber 400 efficiently removes particles and mist with a wet electrostatic precipitator.

The multi-scrubber 400 is composed of a primary wet electrostatic precipitator, a packing layer, a secondary wet electrostatic precipitator, and a packing layer, and FIG. 1 is a view showing a wet electrostatic precipitator and a packing layer. The multi-scrubber 400 greatly coalesces the mist particles in the first wet electrostatic precipitator and removes SiO 2 and SiO 3 particles. The multi-scrubber 400 sprays water on the packing layer to remove 90 percent of the hydrofluoric acid and chlorine of the ACID gas. The multi-scrubber 400 removes particles from the second wet electrostatic precipitator up to 0.3 micrometers of small mist and removes the particles. The multi-scrubber 400 sprays water on the packing layer to remove 90 percent of the hydrofluoric acid and chlorine of the ACID gas. The biofilter removes moisture and removes the odor from the VOC gas and discharges it to the stack.

3 is the multi-filter 24 of Fig.

As shown in FIG. 3, the multi-filter 24 is formed of layers of mutually-shaped filters, and determines the density, the thickness, and the number of filters of the filter according to characteristics of the exhaust gas to be treated. The multi-filter 24 has a network structure and is stacked in layers to excellently remove particles. The used multi-filter is replaced with a new multi-filter.

FIG. 4 is a view showing a harmful exhaust gas treatment wet type multiscubber system including a wet electrostatic precipitator including particles and noxious gas, which is free from poor solubility.

This is the first embodiment.

The venturi scrubber rotates the particles by raising the inertia force of the particulate matter to the venturi 100 from the exhaust gas input into the inlet port 1 and injects the water 2 from the spray nozzle at a speed different from the gas flow rate to connect the particle Remove.

The water (2) flows into the water tank (8).

The cyclone 100 increases the retention time by lengthening the passage, spraying water from the spray nozzle to connect and remove particles. The outlet is connected to the inlet (21) of the multi-scrubber (400).

The multiscrubber 400 includes a wet electrostatic precipitator in which particles are removed by the water film 22a, 22b, 22c, 22d applied to the dust collecting plate by moving the particles to the dust collecting plate 23 by applying electricity to the electrode plate 23, To remove the particles of the exhaust gas.

FIG. 5 is a schematic view showing a harmful exhaust gas treatment wet type multiscubber system including a wet electrostatic precipitator including a poorly soluble particle having an amount of particles smaller than that of FIG. 1;

This is the second embodiment.

The condensing heat exchanger (300) removes the poorly soluble gaseous phase when passing through the cooling coil (12) using the condensation temperature. The exhaust gas is delivered to the multiscrubber 400 via the filter 13 and the discharge port 14.

The multiscrubber 400 includes a wet electrostatic precipitator in which electricity is applied to the dust collecting plate 23 to move the particles to the dust collecting plate 23 and particles are removed by the water films 22a, 22b, 22c, and 22d applied to the dust collecting plate, And the particles of the exhaust gas are removed by the multi-filter 24 to be filtered.

6 is an exemplary view showing a water treatment apparatus of a scrubber according to an embodiment of the present invention.

A scrubber 610 for removing particles from the water; An electric bath 620 in which the metal electrode 622 is immersed in the water 621 and electricity is applied to the metal electrode 622 to generate ions in the anode and generate hydrogen in the cathode; An agglomeration tank 630 for removing agglomerates 631 by ions; A bypass vessel 640 for removing by-products 641 due to bubbles caused by hydrogen; A filter array 650 for filtering particles; And a circulation water processor 660 for reusing the water passed through the electric bath 620, the flocculation bath 630, the bathtub bath 640, and the filter bath 650.

The scrubber 610 removes particles from the water. The scrubber 610 may be a wet electrostatic precipitator. The scrubber 610 collects the particles in the dust collecting plate by applying electricity to the dust collecting plate and removes the particles by the water film applied to the dust collecting plate. The scrubber 610 uses water to remove the particles and reuse the used water, i.e. wastewater.

In the electric tank 620, a metal electrode is immersed in water 621, electricity is applied to the metal electrode, ions are generated in the anode 622, and hydrogen is generated in the cathode. Hydrogen generation generates bubbles.

The flocculation tank 630 removes the flocculated material 631 generated by the metal electrode. The metal electrode is any one of aluminum, copper, and iron. The ions generated at the metal electrode react with particles dissolved in the water to form an aggregate 631. Agglomerates 631 are accumulated in the agglomeration tank 630. The agglomerate 631 accumulated under the flocculation tank 630 is removed by a removal plate driven in an endless track. The removal plate clears the flocculation 631 and cleans the flocculation tank 630. The agglomerates (631) taken off by the removal plate are loaded separately.

Busan tank 640 removes byproducts 641 due to bubbles generated by the hydrogen generated in the cathode. Hydrogen generated from the cathode produces a bubble. The bubble produces the by-product 641. The by-product 641 floats on the water and is in Busan (640). The byproducts 641 accumulated on the bus vessel 640 are removed by a removing plate driven by an endless track. The removal plate cleans the byproducts (641) and cleans the pond vessel (640). The by-product 641, which is removed by the removal plate, is loaded separately.

Filter set 650 filters the particles. Filter set 650 includes a multi-filter. The multi-filter determines the density, thickness, and the number of filters of the exhaust gas according to the property to be treated.

The circulation water processor 660 reuses water that has passed through the electric bath 620, the flocculation bath 630, the bathtub bath 640, and the filter bath 650, that is, water treated. The circulating water processor 660 pumps the water treated by the scrubber and allows the water to remove the particles. The circulation water processor 660 can continue to reuse water.

The filter replacement unit 670 fetches a new filter from the loading box 671 and replaces the used filter with a new filter when the amount of removal of the aggregate 631 and the byproduct 641 exceeds a certain level and loads the used filter 671 ). The filter replacement unit 670 knows the new filter position being stored in the loading box 671 and can replace the used filter with a new filter when the replacement is necessary, in the empty space. The filter replacement portion 670 records the position of the used filter inserted in the loading box. Ensure that used filters are not replaced again.

The filter replacing unit 670 notifies the lack of the filter when the number of new filters in the loading box 671 becomes lower than a certain number, removes the used filter, and fills the loading filter 671 with the new filter. The filter replacing unit 670 informs the user of the lack of the filter to fill the loading box 671 with a new filter. The user fills the new filter in the loading box 671 and sets the new filter position in the filter replacing unit 670.

The filter replacement unit 670 measures the daily filter usage amount and predicts the next day filter usage amount. The filter replacement unit 670 prepares the filter according to the predicted use amount of the next day filter. The filter replacement unit 670 can predict the use amount of the next day filter, so that the use of the filter can be planned. No filter shortage occurs because the filter is planned for use.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the present invention as defined by the following claims It can be understood that

1: inlet 2: water
6: water tank 11: inlet
12: cooling coil 13: filter
14: Outlets 22a, 22b, 22c, 22d:
23: Collector plate 100: Venturi
200: Cyclone 300: Condensation heat exchanger
400: Multiscrubber 610: Scrubber
620: Electrical equipment 621: Water
622: metal electrode 630: coagulation tank
631: Agglomerate 640: Busan Jo
641: by-product 650: filter tank
660: circulation water processor 670: filter replacement unit
671: Loader

Claims (3)

A plurality of exhaust gas outlets are connected to form a plurality of exhaust passages, and the exhaust gas is introduced into the cyclone inlet through separate passages, thereby eliminating interference between the exhaust gases and reducing the occurrence of differential pressure, thereby enhancing the purification performance. The inertia force of the particulate matter is raised by the exhaust gas to rotate the particles and water is sprayed from the spray nozzle at a speed different from the gas flow rate at the portion where the speed of the neck portion is raised by the venturi effect, A cyclone venturi scrubber for removing hydrofluoric acid and chlorine of the ACID gas by spraying water from the packing layer to the exhaust gas moving downward along the venturi and then moving from the bottom to the top;
A condensing heat exchanger in which, in the exhaust gas passing through the venturi scrubber, the poorly soluble gaseous phase is condensed and removed through the cooling coil;
A wet electrostatic precipitator in which particles are discharged from the exhaust gas passing through the condensing heat exchanger to move the particles to the dust collecting plate and particles are removed by the water film applied to the dust collecting plate, and a multi filter for filtering the particles to remove particles of the exhaust gas. Scrubber; And
In order to reuse the wastewater used for forming the water film and to reuse the wastewater, ions are generated in the anode by applying electricity to the wastewater through a metal electrode, hydrogen is generated in the anode, and the aggregate is removed from the coagulation bath, And a circulation water processor for removing by-products from the hydrogen bubbles in the piping vessel and reusing the water treated by filtering the particles in the filter vessel. delete The method according to claim 1,
And a filter replacement unit for replacing the used filter with the new filter and stacking the used filter on the loader by bringing a new filter from the loading box when the amount of the aggregate and the by-product removal exceeds a certain level Hazardous exhaust gas treatment wet multiscrubber system.

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