KR101848307B1 - Exhaust purge valve unit for prevention of a gas alarm - Google Patents

Abstract

Disclosed is an outside air purification valve unit for gas alarm prevention. The outside air purification valve unit for gas alarm prevention injects outside air into a chamber for a semiconductor process, and comprises: a body; an injection connection body connected to the body to inject the outside air into the body; a chamber connection body which connects the chamber and the body, and has an injection hole formed therein to inject the outside air injected into the body by the injection connection body into the chamber; an opening valve to control opening and closing operations to allow the outside air of the body to flow into the chamber through the injection hole; and a pressure control valve to control an amount of the outside air sucked into the body to control a pressure in the chamber. According to the outside air purification valve unit for gas alarm prevention, the pressure in the chamber can be maintained to efficiently discharge harmful gas in the chamber, and the outside air can be injected into the chamber to dilute the harmful gas in advance to prevent an alarm device for sounding an alarm in accordance with a harmful gas concentration from being sounded.

Description

Exhaust purge valve unit for prevention of gas alarm

The present invention relates to an outside air purifying valve unit for preventing a gas alarm.

In the chamber of the semiconductor manufacturing process, noxious gas is generated during the process inside the chamber. Therefore, a device for discharging such harmful gas is separately provided.

Examples of such gas discharging devices are those of the patent documents given below.

Here, the following patent document including the conventional gas discharge apparatus is merely a system capable of discharging noxious gas. However, if a high concentration of harmful gas is suddenly discharged in a short period of time, harmful gas is discharged, and the discharge of harmful gas has to be adjusted by adversely affecting the workplace. Therefore, a device that sounds an alarm when the concentration of harmful gas emitted is measured and reaches a concentration that is a dangerous standard of harmful gas has already been developed and widely used.

That is, when the concentration of the harmful gas discharged from the chamber exceeds the concentration determined to be dangerous by the alarm, the alarm sounds to inform the operator, and if the alarm sounds, the discharge of the harmful gas is manually or automatically stopped.

When the discharge of hazardous gas is started at the workplace equipped with the alarm device as described above, since the concentration of the noxious gas is suddenly increased around the alarm device, it is determined that the concentration of the noxious gas is dangerous, There was a disadvantage that the alarm was intermittently interrupted during the discharge operation to interfere with the operation. Thus, to stop the alarm from time to time, the gas discharge operation was interrupted whenever the alarm sounded, which resulted in a delay in the time required for the discharge of the toxic gas.

In addition, in the pump device used for discharging noxious gas, as the noxious gas is gradually discharged, the pressure in the chamber gradually decreases and the pumping for discharging the noxious gas is failed, so that the noxious gas is not properly discharged.

Patent Document 10-2001-01059411, Publication date: Nov. 29, 2001 Title of the invention: Registered Patent No. 10-1553667, Date of Registration: May 10, 2015. Title of the Invention: Chamber exhaust gas monitoring automatic calibrating device

The present invention relates to an apparatus and a method for controlling an internal combustion engine in which a pressure in a chamber is maintained so that noxious gas in a chamber can be smoothly discharged, An object of the present invention is to provide an outside air purifying valve unit for preventing an alarm.

According to an aspect of the present invention, an outside air purifying valve unit for preventing a gas alarm injects outside air into a chamber for a semiconductor process, comprising: a body; An injection connector connected to the body to inject the outside air into the body; A chamber connecting body connecting the chamber and the body, wherein an injection hole is formed in the chamber so that the outside air injected into the body from the injection connection body is injected into the chamber; An opening / closing valve for adjusting the opening / closing operation so that the outside air of the body can flow into the chamber through the injection hole; A pressure regulating valve for controlling an amount of the outside air sucked into the body to adjust a pressure inside the chamber; And a balance sensing member interposed between the chamber connection body and the body for sensing a verticality of the chamber connection body or the body, wherein the balance sensing member is formed in an empty circular cylinder shape, A rotation connecting ring projecting in a hemispherical shape at an upper end of the inside of the balance sensing case, and a rotation connecting ring rotatably mounted on the rotation connecting ring so as to be pivotable toward the gravity direction and gradually increasing toward a distal end remote from the rotation connecting ring And a balance sensing hole sensor for sensing a change in magnetic force of the rotation magnet which is disposed on a bottom surface of the balance sensing case and is pivotally suspended from the pivoting body, wherein the rotation sensing magnet is disposed at a distal end of the pivoting body. And a balance sensing case disposed on the lower side of the inside of the balance sensing case, And a balance sensing contact sensor capable of sensing the contact of the rotating magnet when the chamber connecting body or the body starts to be tilted. When the chamber connecting body or the body starts to be inclined, the chamber connecting body or the body is tilted by the tilting degree The chamber coupling body or the body can be sensed as being tilted by changing the magnetic force sensed by the balance sensing hall sensor as the position of the rotation magnet is changed while the body is rotated, When the body is tilted to its maximum value, a change in magnetic force due to a change in the position of the rotation magnet is detected by the balance detection hall sensor, and the rotation magnet is brought into contact with the balance detection contact sensor, The maximum inclination can be detected.

According to the gas alarm prevention outdoor air purification valve unit according to one aspect of the present invention,

A method for injecting outside air into a chamber for a semiconductor process, comprising: a body; An injection connector connected to the body to inject the outside air into the body; A chamber connecting body connecting the chamber and the body, wherein an injection hole is formed in the chamber so that the outside air injected into the body from the injection connection body is injected into the chamber; An opening / closing valve whose opening / closing operation is adjusted so that the outside air of the body can flow into the chamber through the injection hole; And a pressure regulating valve for regulating the pressure inside the chamber by controlling the amount of the outside air sucked into the body, thereby maintaining the pressure in the chamber so that the noxious gas in the chamber can be smoothly discharged, It is possible to preliminarily dilute the noxious gas by injecting the outside air into the chamber so that the alarm of the alarm device that sounds the alarm will not be triggered.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a chamber according to a first embodiment of the present invention in which a pump and an outside air purifying valve unit for preventing a gas alarm are installed. FIG.
2 is a view showing a state where noxious gas is present inside a chamber according to the first embodiment of the present invention.
FIG. 3 is a view showing a state where an outside air purifying valve unit for preventing a gas alarm according to the first embodiment of the present invention injects outside air into a chamber. FIG.
4 is a view showing a state in which outside air and noxious gas inside the chamber according to the first embodiment of the present invention are moved by a pump through a pump tube.
5 is a front view of a gas alarm prevention outer air purification valve unit according to the first embodiment of the present invention.
6 is a view showing a state in which the opening and closing valve is turned off according to the first embodiment of the present invention.
7 is a view of the chamber connecting body according to the first embodiment of the present invention viewed from the inlet side.
8 is a front view of a gas alarm prevention outer air purification valve unit according to a second embodiment of the present invention.
9 is a schematic view of a structure of a balance sensing member according to a second embodiment of the present invention.
10 is a view showing a state in which the balance magnet according to the second embodiment of the present invention is inclined.
11 is a view showing a balance magnet according to a second embodiment of the present invention in contact with a balance sensing contact sensor.
12 is a view showing a state in which outside air and noxious gas inside the chamber according to the third embodiment of the present invention are moved by a pump through a pump tube.
13 is a front view of an outside air purifying valve unit for preventing a gas alarm according to the third embodiment of the present invention.

Hereinafter, an outside air purifying valve unit for preventing a gas alarm according to embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a schematic view of a chamber according to a first embodiment of the present invention in which a pump and an outside air purifying valve unit for preventing a gas alarm are installed. FIG. 2 is a schematic view of a chamber according to the first embodiment of the present invention, FIG. 3 is a view showing a state in which an outside air purifying valve unit for preventing a gas alarm according to the first embodiment of the present invention injects outside air into a chamber, and FIG. 4 is a cross- FIG. 5 is a front view of the outer air purifying valve unit for preventing a gas alarm according to the first embodiment of the present invention. FIG. FIG. 6 is a view showing a state in which the opening / closing valve according to the first embodiment of the present invention is turned off, FIG. 7 is a view showing the chamber connecting body according to the first embodiment of the present invention, A rabon drawings.

1 to 7, the outer air purifying valve unit 100 for preventing gas alarm according to the present embodiment injects the outside air 70 into the chamber 10 for semiconductor processing, and includes a body 130, An injection connection body 150, a chamber connection body 140, an on-off valve 110, and a pressure control valve 120.

The chamber 10 provides a space within the semiconductor manufacturing line for allowing a process, such as a wafer, to be performed on the object.

Reference numeral 20 denotes a noxious gas generated during the process inside the chamber 10 and the reference numeral 70 is present outside the chamber 10 and flows into the chamber 10, Reference numeral 80 denotes a pressure member 80 for a chamber for measuring the pressure inside the chamber 10 and reference numeral 60 denotes a noxious gas inside the chamber 10 30 is connected to the chamber 10 so as to discharge the noxious gas 20 or the chamber 10 by pumping, and numeral 30 denotes a discharge pump connected to the chamber 10 to discharge the noxious gas 20 or the chamber 10, 40 denotes a concentration of the noxious gas 20 discharged from the discharge pump 60 and the concentration of the noxious gas 20 is in the range of the risk Level alarm device 40 that sounds an alarm when the level reaches a certain level.

The body 130 can be filled with the external air 70 into the interior of the body 130. The body 130 includes the injection connection body 150, the chamber connection body 140, the opening / closing valve 110, And the pressure regulating valve 120 is coupled.

The injection connector 150 is connected to the body 130 to inject the external air 70 into the body 130. The external air 70 passes through the injection connector 150, (130).

Here, the injection connection body 150 itself may be formed to inject the outside air 70, or may be provided with a separate infusion pipe into which the outside air 70 is injected.

The chamber connection body 140 connects the chamber 10 and the body 130 so that the outside air 70 injected into the body 130 from the injection connection body 150 flows into the chamber 10, The injection hole 141 is formed so as to be able to flow to the inside.

More specifically, the chamber connecting body 140 connects the body 130 and the chamber 10 so that the outside air 70 of the body 130 flows into the chamber 10, And is tightly packed so that the outside air 70 does not leak out from the joint portion of the chamber 10. Needless to say, the chamber connecting body 140 may be formed integrally with the body 130.

The injection hole 141 is formed to extend from the body 130 toward the chamber 10 so that a portion of the injection hole 141 that is open toward the chamber 10 is relatively larger in diameter than the portion opened toward the body 130 And is formed so as to be gradually narrowed. The inside of the injection hole 141 is formed to be gradually narrowed toward the chamber 10 so that when the outside air 70 flows from the injection hole 141 to the chamber 10 The pressure of the outside air 70 gradually increases, and is rapidly discharged when the air is discharged into the chamber 10. Then, the outside air 70 is rapidly injected into the chamber 10 and can be smoothly mixed with the noxious gas 20.

3, the noxious gas 20 is mixed with the outside air 70 in the chamber 10, so that the concentration of the noxious gas 20 is lowered. As shown in FIG. 4, The noxious gas 20 in the chamber 10 and the outside air 70 can be introduced into the discharge pump 60 along the pump side flow pipe 30 as shown in FIG. When the concentration of the noxious gas 20 is measured in the concentration alarm device 40 in which an alarm sounds according to the noxious gas 20 concentration, the noxious gas 20 diluted by the ambient air 70, The concentration of the gas 20 is measured so that the alarm does not sound. That is, by injecting the outside air 70 into the chamber 10 and diluting the noxious gas 20 in advance, it is possible to prevent the alarm of the concentration alarm device 40 from ringing.

The opening and closing valve 110 is controlled by opening and closing operations so that the outside air 70 of the body 130 flows into the chamber 10 through the injection hole 141, A manually operated manual valve or an automatic type regulating valve such as a solenoid valve.

5 shows a state in which the open / close valve 110 is turned on. In this state, the outside air 70 of the body 130 flows into the chamber 10 through the injection hole 141 Closing valve 110 is opened in the outside air 70 of the body 130 through the injection hole 141. In this state, So that it is prevented from flowing into the chamber 10.

The pressure regulating valve 120 regulates the pressure inside the chamber 10 by controlling the amount of the outside air 70 sucked into the body 130. In this embodiment, And can be formed of, for example, an air regulator.

If the internal pressure of the chamber 10 is kept low, the discharge pump 60 does not pump well at any moment. Accordingly, the noxious gas 20 in the chamber 10 can not be discharged smoothly and remains in the chamber 10. Therefore, maintaining the pressure inside the chamber 10 at a predetermined pressure or more is an important condition for smoothly discharging the noxious gas 20 from the discharge pump 60.

When the pressure inside the chamber 10 is adjusted to a predetermined pressure by using the pressure control valve 120, the pressure of the inside of the chamber 10 measured by the chamber pressure member 80 is maintained constant, Can be controlled. Here, the predetermined pressure refers to a pressure value for preventing a pump failure in the discharge pump (60).

Then, the noxious gas 20 in the chamber 10 can be smoothly discharged, and the noxious gas 20 can be prevented from remaining in the chamber 10.

Hereinafter, the process of diluting and discharging the noxious gas 20 in the chamber 10 using the gas alarm preventing outside air purifying valve unit 100 so as to prevent the alarm of the concentration alarm apparatus 40 from being sounded, .

First, as shown in FIG. 2, the chamber 10 in which the noxious gas 20 is formed is prepared at the end of the process.

Here, the on / off valve 110 is kept off until the process is completed in the chamber 10.

Then, as shown in FIG. 3, the open / close valve 110 is turned on to inject the outside air 70 into the chamber 10. Then, the noxious gas 20 of the chamber 10 is diluted.

Then, as shown in FIG. 4, the noxious gas 20 mixed in the chamber 10 and the outside air 70 flow together to the discharge pump 60 and are discharged to the outside.

The pressure regulating valve 120 is controlled so that the pressure inside the chamber 10 is not lower than a predetermined pressure by the noxious gas 20 discharged to the discharge pump 60 and the outside air 70 To control the amount of the outside air 70 injected into the chamber 10.

The noxious gas 20 in the chamber 10 is discharged smoothly by discharging the noxious gas 20 in the chamber 10 by using the gas alarm prevention outer air purification valve unit 100 as described above, There is an advantage that the alarm can be prevented from ringing in the concentration alarm device 40 while maintaining the pressure in the chamber 10 so that the alarm can be performed.

Hereinafter, an outside air purifying valve unit for preventing a gas alarm according to another embodiment of the present invention will be described with reference to the drawings. In carrying out the above description, the description overlapping with the content already described in the embodiment of the present invention described above will be omitted and it will be omitted here.

FIG. 8 is a front view of an outside air purifying valve unit for preventing a gas alarm according to a second embodiment of the present invention, FIG. 9 is a view schematically showing a structure of a balance sensing member according to a second embodiment of the present invention, FIG. 10 is a view showing a state in which the balance magnet according to the second embodiment of the present invention is inclined, and FIG. 11 is a view showing a state in which the balance magnet according to the second embodiment of the present invention is in contact with the balance sensing sensor .

8 to 11, the outer air purifying valve unit 200 for preventing gas alarm according to the present embodiment injects outside air into a chamber for a semiconductor process, and includes a body 230, an injection connector 250 A chamber connecting body 240, an opening / closing valve 210, a pressure regulating valve 220, and a balance sensing member 260.

The balance sensing member 260 is interposed between the chamber connecting body 240 and the body 230 to sense the verticalness of the chamber connecting body 240 or the body 230, 261, a rotation connecting ring 262, a rotary body 263, a rotation magnet 264, a balance sensing hole sensor 266 and a balance sensing contact sensor 265.

The pivoting connection ring 262 protrudes in a hemispherical shape from the upper end of the inside of the balance sensing case 261, and the pivoting connection ring 262 is formed in a shape of a hollow cylinder, The pivoting connection ring 262 is pivotably connected to the pivoting connection ring 262 so that the pivoting connection ring 262 can be pivoted toward the gravity direction and relatively gradually increases toward the distal end portion remote from the pivoting connection ring 262, The balance sensing hall sensor 266 is disposed on the bottom of the balance sensing case 261 and is disposed on the distal end of the rotating body 264, And the balance sensing contact sensor 265 is disposed on the lower side of the inside of the balance sensing case 261 and is rotated by the rotation of the rotary body 263, For example, as being capable of detecting the contact of the same magnet 264 is formed of a pressure sensitive sensor or the like.

The rotation magnet 264 is formed of a magnetic body magnetized so as to be sensed by the balance sensing hall sensor 266.

The rotary member 263 and the rotary magnet 264 are always connected to the rotary connection ring 262 by their own weight and are always oriented in the direction of gravity.

In order to enhance the sensing effect, the balance sensing hall sensor 266 is installed at three or more distances from the center on the bottom surface of the balance sensing case 261 and the opposite sides thereof.

As shown in FIG. 9, the rotating magnet 264 may include a plurality of balance detection Hall sensors (not shown), while at least one of the chamber connector 240 and the body 230 maintains a normal posture without shaking. 266, which are in the middle.

When at least one of the chamber connector 240 and the chamber 230 starts to be tilted at random, the chamber connection body 240 or the body 230 is tilted, as shown in FIG. 10, The magnetic force sensed by the balance sensing hall sensor 266 is changed as the position of the rotation magnet 264 is changed while the rotary body 263 is rotated by the gravity by an amount of tilting, 240 or the body 230 may start to be tilted.

When at least one of the chamber connection member 240 and the body 230 is tilted to the maximum value, the maximum change in the magnetic force due to the variation of the position of the rotation magnet 264, as shown in FIG. 11, Is detected by the hall sensor 266 and the pivoting magnet 264 contacts the balance sensing touch sensor 265 so that the maximum tilting of one or both of the chamber connector 240 or the body 230 Can be detected.

Information about the inclination and inclination of at least one of the chamber connecting body 240 and the body 230 is transmitted to a control system provided outside the gas alarm preventing outside air purifying valve unit 200 .

The control system may inform the operator of the information by an alarm or a monitoring method, and may be formed outside the gas alarm-preventing outside air purifying valve unit 200.

There is a risk that the chamber connecting body 240 and the chamber 230 are disengaged if one or more of the chamber connecting body 240 or the body 230 is tilted or shaken. 240 or the body 230 and the degree of tilting of the body 230 can be quickly detected. Further, if any arbitrary inclination of at least one of the chamber connector 240 and the chamber 230 is quickly detected, the chamber connector 240 and the chamber 230 may be moved in a direction to prevent the inclination of the chamber connector 240 or the body 230, It is possible to confirm that the coupling between the chambers is safe.

FIG. 12 is a view showing a state in which outside air and noxious gas inside the chamber according to the third embodiment of the present invention are moved by a pump through a pump tube, and FIG. 13 is a cross- Fig. 5 is a front view of the purge valve unit. Fig.

12 to 13, the purge valve unit for preventing the gas alarm 70 according to the present embodiment injects the outside air 70 into the chamber 10 for semiconductor processing, and includes a body 330, An injection connection body 350, a chamber connecting body 340, an opening / closing valve 310, a pressure regulating valve 320, and a controller 320.

The control unit 320 receives an internal pressure value of the chamber 10 from a chamber pressure member 80 that senses a pressure inside the chamber 10 and receives the internal pressure value according to a predetermined internal pressure value The pressure regulating valve 320 is automatically adjusted so that the outside air 70 is injected into the chamber 10.

Then, the operator confirms the pressure value inside the chamber 10 with the chamber pressure member 80, and does not need to adjust the pressure control valve 320 from time to time, thereby improving the convenience of the operation.

Reference numeral 40 denotes a concentration alarm device which measures the concentration of the noxious gas 20 discharged from the discharge pump and sounds an alarm when the concentration of the noxious gas 20 reaches a dangerous level, And outputting the concentration value to the controller 320. [0034] FIG.

The control unit 320 receives the concentration value of the noxious gas 20 from the concentration alarm apparatus 40 that measures the concentration of the noxious gas 20 diluted in the chamber 10 , The ambient air 70 is injected into the chamber 10 to dilute the noxious gas 20 in the chamber 10 to a predetermined concentration value ) Can be automatically adjusted. Thereby, the operator does not need to manually adjust the pressure regulating valve 320, and the alarm can be prevented from arbitrarily ringing.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those of ordinary skill in the art that various changes in form and detail may be made therein without departing from the spirit and scope of the invention as defined by the following claims And can be changed. However, it is intended that the present invention covers the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.

According to an aspect of the present invention, there is provided an outside air purifying valve unit for preventing gas alarm, in which the pressure in the chamber is maintained so that the noxious gas in the chamber can be discharged smoothly while the alarm of the alarm device The ambient air can be injected into the chamber to dilute the noxious gas in advance, so that the possibility of industrial use is high.

10: chamber 20: noxious gas
30: Pump side flow tube 40: Concentration alarm device
60: exhaust pump 70: outside air 80: pressure member for chamber
100: Exhaust purification valve unit for gas alarm prevention
110: opening / closing valve
120: Pressure regulating valve
130: Body
150: injection connector
140: chamber connecting body
260: Balance sensing member
370:

Claims (4)

A method for injecting outside air into a chamber for a semiconductor process,
Body;
An injection connector connected to the body to inject the outside air into the body;
A chamber connecting body connecting the chamber and the body, wherein an injection hole is formed in the chamber so that the outside air injected into the body from the injection connection body is injected into the chamber;
An opening / closing valve for adjusting the opening / closing operation so that the outside air of the body can flow into the chamber through the injection hole;
A pressure regulating valve for controlling an amount of the outside air sucked into the body to adjust a pressure inside the chamber; And
And a balance sensing member interposed between the chamber connecting body and the body to sense the verticalness of the chamber connecting body or the body,
Wherein the balance sensing member comprises a balance sensing case formed in an empty circular cylinder shape, a pivoting connection ring protruding hemispherically at an upper end of the balance sensing case, a pivotable connection ring rotatably engaged with the pivoting connection ring, And a rotation magnet disposed at a distal end of the rotary body, wherein the rotary magnet is disposed on a bottom surface of the interior of the rotary sensing ring, A balance sensing hole sensor for sensing a change in the magnetic force of the rotation magnet that is suspended from the rotary sensing magnet, a balanced sensing hole sensor disposed on a lower side of the interior of the sensing sensing case for sensing a contact of the rotation magnet, Comprising a contact sensor,
When the chamber connecting body or the body starts to be inclined, the rotating body is rotated by the degree of tilting of the chamber connecting body or the body, and the position of the rotating magnet is changed by the balance detecting hall sensor As the magnetic force is changed, the start of the tilting of the chamber connecting body or the body can be detected,
When the chamber connector or the body is tilted to the maximum value, a change in magnetic force due to a change in the position of the rotation magnet is detected by the balance detection hall sensor, and the rotation magnet is brought into contact with the balance detection contact sensor, And the maximum inclination of the connecting body or the body can be detected. delete delete delete

Images