KR101831682B1 - Apparatus and method for measuring gas temperature - Google Patents

Abstract

The present invention relates to an apparatus for measuring the gas temperature for measuring the temperature of gas passing through a gas transferring pipe, comprising first and second temperature measuring portions installed in the gas transferring pipe, and provided with first and second thermocouples having end portions in an inner portion of the gas transferring pipe, respectively, wherein the end portions of the first and second thermocouples are formed to face each other while being adjacent to each other, and formed to have different diameters.

Description

[0001] Apparatus and method for measuring gas temperature [0002]

The present invention relates to an apparatus and a method for measuring a gas temperature. And more particularly, to an apparatus and a method for measuring the temperature of a gas flowing in a gas delivery pipe.

A thermocouple is a sensor made by joining two kinds of metals to measure a wide range of temperature by using a seeback effect. The sensor is widely used in extreme environments such as a power plant or a steel mill because of its durability. In this case, the Hebeck effect is a phenomenon in which, when two different metals are combined, a thermoelectric power is generated between two metals when the temperatures at both ends are different from each other. By using this, The temperature difference between the contact points can be known.

(Tt-Ts) between the surface of the thermocouple and the inner surface of the transfer tube from the thermocouple surface to the inner surface of the transfer tube in the measurement of the temperature of the high temperature gas flowing in the gas transfer pipe In particular, when the fluid flowing through the tube is a gas at a high temperature, the heat transfer coefficient (h) of the gas is relatively small, convective heat transfer from the gas to the thermoelectric conduction is small, and the difference between the gas temperature and the ambient surface temperature is relatively large The measurement error due to radiant heat loss also increases, so that it is difficult to measure the fluid temperature accurately.

According to an embodiment of the present invention, there is provided a gas temperature measuring apparatus and a gas temperature measuring method capable of accurately measuring the temperature of a gas inside a gas transfer tube even when the size of the gas transfer tube is small or the gas flow area is small.

There is also provided a gas temperature measuring apparatus and a gas temperature measuring method capable of accurately measuring the temperature of the gas inside the gas transfer pipe without assuming that the effective ambient radiation temperature of radiative heat transfer generated from the two thermocouples is the same.

According to an aspect of the present invention, there is provided a gas temperature measuring apparatus for measuring a temperature of a gas passing through a gas transfer pipe, comprising: a first thermocouple installed in the gas transfer pipe, Wherein the first thermocouple and the second thermocouple are formed in a ratio of 1: 2, and the effective peripheral radiation temperature of the first thermocouple and the second temperature of the second thermocouple are different from each other, The end of the second thermocouple is disposed adjacent to the end of the first thermocouple such that the end of the first thermocouple and the end of the second thermocouple are positioned adjacent to the end of the first thermocouple, A gas temperature measuring device is provided which is spaced apart from each other by at least 70% of its diameter.

At this time, the first thermocouple and the second thermocouple may be arranged in a direction perpendicular to the direction of transfer of the gas passing through the gas transfer pipe.

At this time, the ratio of the diameters of the first thermocouple and the second thermocouple may be 1: 2.

The first thermocouple and the second thermocouple may be disposed at an interval of 180 degrees with respect to the center of the gas feed pipe.

At this time, the first thermocouple and the second thermocouple may be disposed such that the end of the first thermocouple and the end of the second thermocouple are spaced apart from each other by 2 to 3 mm.

At this time, the first thermocouple and the second thermocouple have different diameters, and the first thermocouple and the second thermocouple are spaced apart from each other by at least 70 of the diameter of the thermocouple having the larger diameter among the first thermocouple and the second thermocouple. % ≪ / RTI >

At this time, the ends of the first thermocouple and the second thermocouple may be disposed at the center of the gas feed pipe.

At this time, first and second openings to which the first and second temperature measuring portions are coupled may be formed in the gas feed pipe, and the first and second openings, respectively, coupled to the first and second openings, Each of the temperature measuring portions includes a tubular coupling body coupled to the opening; A thermocouple member disposed to penetrate the coupling body, and a tubular sealing member disposed between the thermocouple member and the coupling body.

At this time, the coupling body coupled to the opening may include a length adjuster for adjusting the length of the thermocouple member inserted into the gas feed pipe.

At this time, the length adjuster may include a screw thread formed on an outer circumferential surface of the coupling body and a corresponding screw groove formed on an inner circumferential surface of the opening.

According to another aspect of the present invention, there is provided a method of measuring a temperature of a gas passing through a gas feed pipe using the gas temperature measuring apparatus, wherein the end portions of the first and second thermocouples are arranged to face the inside of the gas feed pipe step; So that the effective ambient radiation temperature of the first thermocouple and the measured temperature of the second thermocouple are equal to each other without interfering with the respective temperature boundary layers formed by the first and second thermocouples, Adjusting the spacing distance between the ends of the thermocouple; Measuring a temperature (T1) of the first thermocouple and a temperature (T2) of the second thermocouple; And calculating the temperature of the gas inside the gas feed pipe using the following equation (1): " (1) "

(1)

: 제 1 열전대 대류 열전달 계수, A: 대류 열전달 면적,

: 복사율,

: 슈테판 볼츠만 상수,

: 기체의 온도,

: 제 1 열전대 측정온도,

: 제 2 열전대 측정온도 이다.here,

: First thermocouple convection heat transfer coefficient, A: convection heat transfer area,

: Emissivity,

: Stefan Boltzmann Constant,

: The temperature of the gas,

: First thermocouple measurement temperature,

Is the second thermocouple measurement temperature.

)를 결정하는 단계; 및 상기 제 1 열전대의 재질에 따라 복사율(

)을 결정하는 단계; 를 포함할 수 있다.In this case, the step of obtaining the temperature of the gas inside the gas feed pipe using Equation (1) may include calculating a convective heat transfer coefficient according to the diameter of the first thermocouple and the flow velocity of the gas inside the gas feed pipe

); And the first thermocouple material has an emissivity (

); . ≪ / RTI >

According to the exemplary embodiment of the present invention, in measuring the temperature of the gas inside the gas transfer tube, the temperature of the gas can be accurately measured by correcting the radiation effect by the thermocouple.

In addition, the temperature of the gas can be calculated without assuming that the effective ambient radiation temperature of each thermocouple is the same, which is advantageous in that the accuracy is high.

Especially, the accuracy of measurement can be guaranteed even when the flow area of the gas inside the gas transfer pipe is small, and thus the technology can be utilized in a wider range.

1 is a perspective view illustrating a state in which a gas temperature measuring apparatus according to an embodiment of the present invention is mounted on a gas transfer pipe.
2 is a cross-sectional view of a gas temperature measuring apparatus according to an embodiment of the present invention mounted on a gas transfer pipe.
3 is a cross-sectional view of a first temperature measuring unit and a second temperature measuring unit of the gas temperature measuring apparatus according to an embodiment of the present invention.
4 is a flowchart of a gas temperature measurement method according to an embodiment of the present invention.
5 is a graph showing the results of the gas temperature measurement method and the conventional gas temperature measurement method according to an embodiment of the present invention.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, which will be readily apparent to those skilled in the art to which the present invention pertains. The present invention may be embodied in many different forms and is not limited to the embodiments described herein. In order to clearly illustrate the present invention, parts not related to the description are omitted, and the same or similar components are denoted by the same reference numerals throughout the specification.

In this specification, the terms "comprises" or "having" and the like refer to the presence of stated features, integers, steps, operations, elements, components, or combinations thereof, But do not preclude the presence or addition of one or more other features, integers, steps, operations, components, parts, or combinations thereof.

1 is a perspective view illustrating a state in which a gas temperature measuring apparatus according to an embodiment of the present invention is mounted on a gas transfer tube. 2 is a cross-sectional view of a gas temperature measuring apparatus according to an embodiment of the present invention mounted on a gas transfer pipe. 3 is a cross-sectional view of a first temperature measuring unit and a second temperature measuring unit according to an embodiment of the present invention. 4 is a flowchart of a gas temperature measurement method according to an embodiment of the present invention.

The apparatus 1 for measuring a gas temperature according to an embodiment of the present invention can measure the temperature of a gas passing through a gas transfer pipe 100 installed in a gas transfer pipe 100. The gas temperature measuring apparatus 1 may include a first temperature measuring unit 10 and a second temperature measuring unit 20. Each temperature measuring part may include one thermocouple having different diameters.

The gas transfer pipe 100 shown in FIG. 1 may be a gas or a liquid, but it may be limited to a case where gas flows in the case of the present invention. In addition, temperature measurement openings (17, 27) for measuring the temperature of the gas flowing in the pipe can be formed on the outer peripheral surface of the gas transfer pipe (100). According to one embodiment of the present invention, two openings 17 and 27 are formed on the outer circumferential surface of the gas transfer tube, and the two openings 17 and 27 are formed to be spaced 180 degrees apart.

3 (a), the first temperature measuring unit 10 includes a first thermocouple 11 having a relatively small diameter, coupling bodies 12 and 22, length adjusting portions 14 and 24 formed on the outer circumferential surfaces of the coupling bodies Sealing members 13 and 23 formed inside the coupling body, and wires 15 and 25 for outputting electric signals from the thermocouple.

At this time, the coupling bodies 12 and 22 may be formed in a tubular shape and may be inserted and fixed in the openings 17 and 27 formed in the gas transfer tube 100. In order to fix the engaging bodies 12 and 22 to the gas transfer tube 100, threaded grooves formed on the inner circumferential surfaces of the openings 17 and 27 of the gas transfer tube 100 are threadedly engaged with the engaging bodies 12 and 22 And may be formed on the outer circumferential surface. However, the present invention is not limited thereto, and it may be a combination that can prevent the gas inside the gas transfer pipe 100 from flowing out to the outside as described later.

The threads formed on the outer circumferential surface of the coupling bodies 12 and 22 can also serve as the length adjusting portions 14 and 24. [ At this time, the length adjusting portions 14 and 24 can be used to adjust the depth of insertion of the first temperature measuring portion 10 into the gas feed pipe 100. Specifically, if it is desired to arrange the first thermocouple 11 of the first temperature measuring part 10 in the direction of the center of the gas feed pipe 100, the coupling bodies 12 and 22 having the length adjusting parts 14 and 24, Can be rotated clockwise. This may be useful in adjusting the distance between the first and second thermocouples 11 and 21, which will be described later.

Here, sealing members 13 and 23 may be provided inside the coupling bodies 12 and 22. The sealing members 13 and 23 are provided to prevent gas in the gas transfer tube 100 from flowing out to the openings 17 and 27 and to be firmly coupled to the inner wall surfaces of the engaging bodies 12 and 22 desirable.

The first thermocouple 11 is disposed so as to pass through the sealing members 13 and 23 in the vertical direction and the temperature measuring ends 16 and 26 at one end of the first thermocouple 11 are connected to the gas transfer pipe 100, As shown in FIG. The other end of the first thermocouple 11 may be connected to the wires 15 and 25 for providing an electric signal by the thermoelectric power generated in the first thermocouple 11. [ The wirings (15, 25) can be connected to a computer or the like to measure the temperature of the gas flowing in the gas transfer tube (100).

In the first thermocouple 11, two kinds of metals of different kinds are bonded, and when the temperatures at both bonding portions are different, a thermoelectric power is generated between the metals and a current can flow. In this case, the generated thermoelectric power is proportional to the temperature difference between the two bonding metals, and the proportional constant is the Shekel constant.

Hereinafter, a second temperature measuring unit 20 of the temperature measuring apparatus according to an embodiment of the present invention will be described. The description of the parts overlapping with the first temperature measuring unit 10 will be omitted.

3 (b), the second temperature measuring unit 20 includes a second thermocouple 21, coupling bodies 12 and 22, coupling bodies 12 and 22 (not shown) similar to the first temperature measuring unit 10, (15, 25) for outputting an electric signal from the thermocouple and sealing members (13, 23) formed inside the coupling bodies (12, 22)

At this time, the second thermocouple 21 may have a larger diameter than the first thermocouple 11, and this may be achieved by measuring the effective ambient radiation temperature of the first thermocouple 11 by measuring the second thermocouple 21 This is to approximate the temperature.

In one embodiment of the present invention, the diameter of the second thermocouple 21 having a larger diameter is formed to be about twice the diameter of the first thermocouple 11 having a smaller diameter.

In consideration of the fact that the effective ambient radiation temperature of the first thermocouple 11 is approximated to the measured temperature of the second thermocouple 21, The larger the ratio of the second thermocouple diameter to the diameter of the thermocouple 1, the more the distance between the first thermocouple 11 and the second thermocouple 21 is increased, And the second thermocouple 21, the response time of the thermocouple increases.

In consideration of the above conditions, the diameter ratio of the second thermocouple to the first thermocouple is preferably about twice. In an embodiment of the present invention, the diameters of the first and second thermocouples 11 and 21 may be 1/16 inch and 1/8 inch, respectively, but are not necessarily limited thereto.

The second temperature measuring unit 20 having the first thermometer 11 and the second thermometer 21 is connected to the inside of the gas feed pipe 100 through a temperature measuring unit And can be fixed to the openings 17 and 27 formed on the outside of the gas feed pipe 100 by using the screw threads formed on the engaging bodies 12 and 22. [ Referring again to Fig. 1, the temperature measurement stages 16 and 26 of the first thermocouple 11 may be arranged such that the ends of the temperature measurement stages 16 and 26 face the end of the temperature measurement stage of the second thermocouple 21. In this case, it can be arranged to be perpendicular to the flow F of the gas. At this time, the temperature measurement stages 16 and 26 of the first and second thermocouples 11 and 21 should be adjacent but spaced apart from each other by a predetermined distance.

At this time, the predetermined interval in which the first and second thermocouples 11 and 21 are spaced apart may be considered as an interval in which the temperature boundary layers formed in the respective thermocouples are not interfered with each other.

More specifically, the predetermined spacing between the first thermocouple and the second thermocouple may be formed to be at least 70% of the second thermocouple diameter larger in diameter. (Nu) of the outer surface of the thermocouple is always larger than 2, so that the average thickness of the convective temperature boundary layer formed by the thermocouple is formed to be equal to or smaller than the radius of the thermocouple. In one example, the first and second thermocouples may be spaced 2 to 3 mm apart.

Specifically, due to the flow of gas in the gas transfer tube 100, convection heat transfer from the gas to the temperature measurement stages 16 and 26 of the thermocouple may occur. By the convective heat transfer, the thermocouple temperature measurement stages 16 and 26 A temperature boundary layer may be formed. If each thermocouple is located closer than a predetermined interval, any one thermocouple may affect the gas flow around the other thermocouple, and thus an inaccurate temperature can be measured.

It can also be considered that the effective peripheral radiation temperature of the first thermocouple 11 can be approximated to the measured temperature of the second thermocouple 21 while setting the predetermined interval. Specifically, considering the thermal equilibrium equation of each thermocouple, convection heat transfer may occur from the high-temperature gas flowing through the gas feed pipe 100 to the first thermocouple 11, and the first thermocouple 11 may have an electromagnetic wave form Can radiate radiant heat. At this time, it can further be considered whether the effective ambient radiation temperature can be approximated to the measured temperature of the second thermocouple 21 in the radiant heat transfer from the first thermocouple to the surroundings.

A method of calculating the internal gas temperature of the gas transfer pipe 100 when the first and second temperature measurement units 10 and 20 are inserted into the gas transfer pipe 100 will be described with reference to FIGS.

First, when the first temperature measuring unit 10 is inserted into the gas transfer pipe 100 through which the gas flows, the first thermocouple 11 provided in the first temperature measuring unit 10 from the flowing gas, This happens. At this time, the first thermocouple 11 generates radiative heat transfer in the form of an electromagnetic wave, and the thermal equilibrium equation of the first thermocouple 11 can be obtained in consideration of both heat transfer. If the first thermocouple 11 and the second thermocouple 21 are disposed to be spaced apart from each other by a predetermined distance in consideration of the radiative heat transfer of the first thermocouple 11, The measured temperature can be approximated to the effective ambient radiation temperature.

Equation 1

: 제 1 열전대의 대류 열전달 계수, A: 열전달 면적,

: 복사율,

: 슈테판 볼츠만 상수,

: 기체의 온도,

: 제 1 열전대(11) 측정온도,

: 제 2 열전대(21) 측정온도)(

: Convective heat transfer coefficient of the first thermocouple, A: heat transfer area,

: Emissivity,

: Stefan Boltzmann Constant,

: The temperature of the gas,

: First thermocouple (11) Measuring temperature,

: Measurement temperature of the second thermocouple 21)

In this case, the convective heat transfer coefficient may vary depending on the diameter of the first thermocouple 11 and the flow velocity of gas flowing through the gas feed pipe 100, and the emissivity may vary depending on the material of the thermocouple. The temperature of the gas inside the gas transfer pipe 100 can be calculated by substituting the measured temperatures of the first and second thermocouples 11 and 21 into the above equation (1).

In addition, a thermal equilibrium equation can be obtained for the second thermocouple 21 as well. Specifically, convection heat transfer occurs from the gas inside the gas transfer pipe 100 to the second thermocouple 21, and radiant heat transfer occurs from the second thermocouple 21 to the inside wall of the gas transfer pipe 100.

Equation 2

는 기체 이송관(100) 내부 벽의 온도이다. 즉, 수학식 1로부터 계산된 기체의 온도와 제 2 열전대(21)의 측정된 온도를 이용하여 기체 이송관(100) 내부 벽의 온도를 계산할 수 있는 것이다.here

Is the temperature of the inner wall of the gas transfer pipe (100). That is, the temperature of the inner wall of the gas transfer pipe 100 can be calculated using the temperature of the gas calculated from Equation (1) and the measured temperature of the second thermocouple (21).

Hereinafter, with reference to FIG. 4, a method of measuring the temperature of the gas passing through the gas feed pipe using the gas temperature measuring apparatus 1 according to the embodiment of the present invention will be described.

) 및 복사율(

)을 결정하는 단계(S40); 및 기체 이송관 내부 기체의 온도를 계산하는 단계(S50); 를 포함할 수 있다.In one embodiment of the present invention, a method for measuring the temperature of a gas includes the steps of: (S10) placing first and second thermocouples facing each other inside a gas feed pipe; Adjusting the position of the first and second thermocouples (S20); Measuring a temperature of the first thermocouple and a temperature of the second thermocouple (S30); Convective Heat Transfer Coefficient

) And emissivity (

(S40); And calculating a temperature of the gas inside the gas transfer pipe (S50); . ≪ / RTI >

1, the first and second thermocouples 10 and 20 are disposed inside the gas transfer tube 100 (see FIG. 1) The first and second temperature measuring portions 10 and 20 are vertically moved in the direction of gas flow by using the screw threads formed on the coupling bodies 12 and 22 of the first and second temperature measuring portions 10 and 20, Can be disposed in the openings (17, 27) formed in the pipe (100). At this time, the diameter of the first thermocouple may be smaller than the diameter of the second thermocouple.

The step S20 of adjusting the position of the first and second thermocouples may then be performed by the first thermocouple 11 without interfering with the respective temperature boundary layers formed by the first and second thermocouples 11, And adjusting the positions of the first and second temperature measuring units 10 and 20 so that the effective peripheral radiation temperature of the second thermocouple 21 is approximated to the measured temperature of the second thermocouple 21.

If the first and second thermocouples 11 and 21 are too close to each other, one of the thermocouples influences the flow of the gas flowing to the other thermocouple, This is because measurement is difficult. Referring to the right side of Equation 1, the radiation heat transfer by the first thermocouple 11 should be sufficiently close so that the effective peripheral radiation temperature can be approximated to the measured temperature of the second thermocouple 21.

At this time, if the distance is experimentally 2 to 3 mm, the accuracy of the measured gas temperature can be guaranteed. In order to adjust the gap between the first and second thermocouples 11 and 21 inserted into the gas feed pipe 100 as described above, the length adjusting portions 14 and 24 formed on the outer circumferential portions of the coupling bodies 12 and 22 ) Can be used.

Thereafter, the step of measuring the temperature of the first thermocouple and the temperature of the second thermocouple (S30) is performed to measure the temperature of the first thermocouple 11 and the temperature of the second thermocouple 21, The electric signals transmitted through the wirings 15 and 25 can be read by a computer or the like to measure the value.

) 및 복사율(

)을 구하는 단계(S40)가 더 포함될 수 있다. 대류 열전달 계수는 제 1 열전대(11)의 직경 및 기체 이송관(100) 내부 기체의 유동 속도에 따라 달리 결정될 수 있으며, 복사율은 제 1 열전대(11)의 재질에 따라 결정될 수 있다.At this time, the convective heat transfer coefficient

) And emissivity (

(Step S40). The convective heat transfer coefficient may be determined depending on the diameter of the first thermocouple 11 and the flow velocity of the gas inside the gas feed pipe 100 and the emissivity may be determined according to the material of the first thermocouple 11. [

이며, 좌변은 측정하고자 하는 기체로부터 제 1 열전대에 전달된 대류 열을 나타내고, 우변은 제 1 열전대로부터 제 2 열전대로 전달된 복사 열 전달을 나타낸다. 이 때,

: 대류 열전달 계수, A: 대류 열전달 면적,

: 복사율,

: 슈테판 볼츠만 상수,

: 기체의 온도,

: 제 1 열전대 측정온도,

: 제 2 열전대 측정온도를 나타낸다.Finally, the step S50 of calculating the temperature of the gas inside the gas transfer tube is a step of substituting the measured value into the equation (1) and obtaining the unknown gas temperature. Equation (1)

The left side represents the convection heat transferred from the gas to be measured to the first thermocouple and the right side represents the radiant heat transfer from the first thermocouple to the second thermocouple. At this time,

: Convection heat transfer coefficient, A: convection heat transfer area,

: Emissivity,

: Stefan Boltzmann Constant,

: The temperature of the gas,

: First thermocouple measurement temperature,

: Represents the second thermocouple measurement temperature.

The gas temperature measuring method according to an embodiment of the present invention can accurately measure the temperature of the gas by correcting the radiation effect by the thermocouple when measuring the temperature of the gas flowing through the gas transfer pipe 100. Also, unlike the prior art, the temperature of the gas can be calculated without assuming that the effective ambient radiation temperature of each thermocouple is the same, and the accuracy is high. In particular, unlike the prior art, the accuracy of measurement can be ensured even when the flow area of the gas inside the gas transfer pipe 100 is small, and thus the technology can be utilized in a wider range.

Specifically, referring to FIG. 5, it can be seen that the effective ambient radiation temperature is calculated to be 11K when using the prior art in which two thermocouples are arranged in parallel in one direction. This is a physically impossible temperature, which means that the assumption that the effective ambient radiation temperature of each thermocouple is equal is inadequate.

On the other hand, under the assumption that the effective ambient radiation temperature of the first thermocouple is approximated to the measured temperature of the second thermocouple without assuming that the effective ambient radiation temperature of each thermocouple is the same, using the gas temperature measuring method according to an embodiment of the present invention, It can be seen that the effective peripheral radiation temperature of the second thermocouple 21 is about 630 degrees and the error is remarkably reduced.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the scope of the present invention is not limited to the disclosed exemplary embodiments, Other embodiments may easily be suggested by adding, changing, deleting, adding, or the like of a component, but this also belongs to the scope of the present invention.

1: gas temperature measuring apparatus 10: first temperature measuring unit
11: first thermocouple 20: second temperature measuring unit
21: second thermocouple 12, 22: coupling body
13, 23: sealing member 14, 24:
15, 25: wiring 16, 26: temperature measuring stage
100: gas transfer pipe

Claims (12)

A gas temperature measuring apparatus for measuring a temperature of a gas passing through a gas transfer pipe,
And a first and a second temperature measuring unit provided on the gas transfer tube and having first and second thermocouples, each having an end located inside the gas transfer tube,
Wherein the first thermocouple and the second thermocouple have a ratio of 1: 2,
The end of the second thermocouple is disposed adjacent to the end of the first thermocouple so that the effective peripheral radiation temperature of the first thermocouple and the measured temperature of the second thermocouple are the same,
Wherein an end of the first thermocouple and an end of the second thermocouple are spaced apart from each other by 70% or more of the diameter of the second thermocouple. The method according to claim 1,
Wherein the first thermocouple and the second thermocouple are disposed in a direction perpendicular to a transfer direction of the gas passing through the gas transfer tube. delete The method according to claim 1,
Wherein the first thermocouple and the second thermocouple are disposed at an interval of 180 degrees with respect to the center of the gas delivery pipe. The method according to claim 1,
Wherein the first thermocouple and the second thermocouple are arranged so that the end of the first thermocouple and the end of the second thermocouple are spaced apart by 2 to 3 mm from each other. delete The method according to claim 1,
And the ends of the first thermocouple and the second thermocouple are disposed at the center of the gas feed pipe. The method according to claim 1,
Wherein the gas transfer pipe is provided with first and second openings for respectively coupling the first and second temperature measuring units,
Each of the first and second temperature measuring portions coupled to the first and second openings, respectively,
A tubular coupling body coupled to the opening;
A thermocouple member arranged to penetrate the coupling body and
And a tubular sealing member disposed between the thermocouple member and the coupling body. 9. The method of claim 8,
Wherein the coupling body coupled to the opening includes a length adjuster for adjusting a length of the thermocouple member inserted into the gas transfer tube. 10. The method of claim 9,
The length-
A threaded portion formed on an outer peripheral surface of the coupling body,
And a corresponding screw groove formed on an inner peripheral surface of the opening. An apparatus for measuring a gas temperature according to any one of claims 1, 2, 4, 5, 7, 8, 9, and 10, As a method for measuring the temperature of a substrate,
Disposing the ends of the first and second thermocouples facing the inside of the gas delivery pipe;
So that the effective ambient radiation temperature of the first thermocouple and the measured temperature of the second thermocouple are equal to each other without interfering with the respective temperature boundary layers formed by the first and second thermocouples, Adjusting the spacing distance between the ends of the thermocouple;
Measuring a temperature (T1) of the first thermocouple and a temperature (T2) of the second thermocouple; And
And calculating a temperature of the gas inside the gas transfer pipe using the following equation (1).
(1)

At this time,

: 1st thermocouple convection heat transfer coefficient
A: 1st thermocouple convection heat transfer area

: Emissivity

: Stefan Boltzmann Constant

: Temperature of gas

: First thermocouple measurement temperature

: Second thermocouple measurement temperature 12. The method of claim 11,
Before the step of obtaining the temperature of the gas inside the gas feed pipe using the above equation (1)
And the convection heat transfer coefficient (the flow velocity of the gas inside the gas feed pipe)

); And
Depending on the material of the first thermocouple,

); Wherein the temperature of the gas is measured.

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