KR101827497B1 - Substrate inspection device - Google Patents

Abstract

The present invention relates to a substrate inspection device using a laser which uses a change difference of a light quantity by linearity of a laser beam and diffusion of the laser beam to detect foreign substances on a surface of a substrate and a lower surface of the substrate and accurately acquire positions of detected foreign substances. The substrate inspection device using a laser comprises: a surface plate unit to support or levitate a substrate in response to an intermittent movement of the substrate; a first and a second measurement unit arranged to have the opposite propagation directions for a first and a second laser beam; a position moving unit to relatively move the first and the second measurement unit in response to the surface plate unit; and a position indication unit to use a light quantity change of the first laser beam detected by a first detection unit by first measurement time in response to an area of the surface plate unit where the substrate is supported and a light quantity change of the second laser beam detected by a second detection unit by second measurement time to determine positions of foreign substances on a surface of the substrate and a lower surface of the substrate.

Description

[0001] SUBSTRATE INSPECTION DEVICE [0002]

The present invention relates to an apparatus for inspecting a substrate using a laser, and more particularly to a system and method for detecting a foreign substance generated on a surface of a substrate as well as a bottom surface of a substrate by using a difference in the amount of light depending on the straightness of the laser beam and the diffusibility of the laser beam And more particularly, to a substrate inspection apparatus using a laser capable of precisely grasping a position of a detected foreign substance.

2. Description of the Related Art In recent years, a variety of portable terminals, such as mobile phones, PDAs, PMPs, and MP3 players, have been getting larger in size to provide good quality images. In order to meet a demand for miniaturization of the portable terminal itself and enlargement of the display substrate to be applied thereto, a touch screen system which allows a user to input on a display substrate itself is used instead of a key button provided separately from the display substrate.

Such a substrate may cause foreign substances such as scratches and protrusions on the surface of the substrate during a manufacturing process or a handling process. In this case, defects of the substrate are inspected through not only visual inspection of the operator but also automatic inspection of the substrate including a camera and an optical system .

However, in the conventional substrate inspection apparatus, there is a drawback that the size of the entire apparatus is increased because the optical system is installed so as to face the substrate. In order to inspect the back surface of the substrate, there is a problem that the optical system must be installed in the opposite direction or the substrate must be turned upside down there was.

Korean Patent Laid-Open Publication No. 2015-0106672 (name of the invention: substrate inspecting device, disclosed on May 22, 2015)

SUMMARY OF THE INVENTION The object of the present invention is to solve the problems of the prior art, and it is an object of the present invention to detect a foreign substance generated on the surface of a substrate as well as a surface of a substrate by using a difference in light amount depending on the straightness of the laser beam and the diffusivity of the laser beam, And a substrate inspection apparatus using the laser.

According to another aspect of the present invention, there is provided a substrate inspection apparatus for inspecting a foreign substance generated on a substrate, the apparatus comprising: A support base unit supported by the support base; A first light emitting section for emitting a first laser beam, a first light receiving section for receiving the first laser beam, and a first detecting section for detecting an amount of light of the first laser beam received by the first light receiving section 1 measuring unit; A second light emitting unit which is spaced apart from the first light receiving unit and emits a second laser beam parallel to the first laser beam, a second light receiving unit which is spaced apart from the first light emitting unit and receives the second laser beam, A second measuring unit including a second detecting unit for detecting an amount of light of the second laser beam received by the second light receiving unit; A position moving unit for relatively moving the first measurement unit and the second measurement unit in correspondence with the surface mount unit; And a control unit for controlling the light quantity change of the first laser beam detected by the first detection unit in accordance with the first measurement time corresponding to the region where the substrate is supported in the surface plate unit and the light amount change detected by the second detection unit And a position indicating unit for determining a position of a foreign matter on a surface of the substrate and a bottom surface of the substrate by using a change in light amount of the second laser beam.

Here, the position indicating unit may include: a setting counting unit counting the first measuring time and the second measuring time; A displacement matching unit for matching the light amount change of the first laser beam according to the first measurement time and matching the light amount variation amount of the second laser beam according to the second measurement time; A position deriving unit for deriving a position of the foreign object by using the bent portion of the light amount change with time and deriving a time variation amount and a light amount variation amount corresponding to the position of the foreign matter; And a position indicator for determining whether or not the foreign object is misidentified on the surface of the substrate and the bottom surface of the substrate and the position of the foreign substance using the time variation amount and the light amount variation amount derived from the position derivation unit.

Here, in the position indication portion, the width w of the foreign matter is represented by the product of t and v, and the square of the height h of the foreign matter or the height h of the foreign matter is proportional to s. Here, t is a time variation amount in accordance with the first measurement time or a time variation amount in accordance with the second measurement time derived from the position derivation unit in correspondence with the position of the foreign object, s is a time variation amount in accordance with the position of the foreign substance, And v is a movement speed of the first measurement unit or a movement speed of the second measurement unit. The light amount change amount is a light amount change amount according to the first measurement time or a light amount change amount according to the second measurement time derived from the first measurement unit.

Here, the position indication unit finally determines whether or not the foreign object on the surface of the substrate and the bottom surface of the substrate are erroneously detected and the position of the foreign matter at a ratio between the width of the foreign matter and the height of the foreign matter.

Here, the position indicating unit may be configured to measure the positional relationship between the intermittent moving state of the substrate and the moving speed of the first measuring unit or the intermittent moving state of the substrate and the movement of the second measuring unit And a position confirming unit for deriving a detection coordinate of a foreign object with respect to the movement direction of the substrate based on the velocity.

Here, the support base includes a support base through which a vent hole is formed to correspond to a region where the substrate is supported; A substrate adsorption unit for adsorbing air through the vent hole; Wherein the position indicating unit controls the operation of the substrate attracting unit or the substrate floating unit in response to intermittent movement of the substrate.

The apparatus for inspecting a substrate using a laser according to the present invention is characterized in that the substrate inspecting apparatus using laser comprises a region in which the substrate is supported in the surface plate unit and a light amount of the first laser beam detected by the first detecting unit in correspondence with a foreign substance, And a coordinate derivation unit for calculating the coordinates of the foreign substance on the substrate using the light amount of the second laser beam detected by the detection unit and the relative position of the foreign substance.

According to the apparatus for inspecting a substrate using a laser according to the present invention, it is possible to detect a foreign substance generated on the surface of the substrate as well as the substrate, using the difference in the amount of light depending on the straightness of the laser beam and the diffusibility of the laser beam, The position and the coordinates can be accurately grasped. In particular, it is possible to prevent the size of the entire apparatus from becoming large, and to easily detect the foreign object even if the foreign object located on the bottom surface of the substrate is not reversed without reversing the substrate.

In addition, the present invention can derive a graph of a correlation between time and light quantity change corresponding to the size of a preset base unit, and analyzing the graph, it is possible to simplify the position and coordinate determination of foreign matter.

Further, the present invention can roughly derive the width of a foreign object to be detected and the height of the foreign object, and can clarify the position and coordinates of the foreign object through the correlation formed between the width of the foreign object and the height of the foreign object. In other words, it is possible to distinguish whether a foreign substance detected through the above-described feature is generated on the surface of the substrate or on the bottom surface of the substrate.

Further, the present invention can clarify the moving state of the substrate in correspondence with the intermittent movement of the substrate, and allow foreign matter generated on the bottom surface of the substrate to outline on the surface of the substrate.

In addition, the present invention can easily determine the position and coordinate of the foreign matter with respect to the width direction of the substrate according to the change in the amount of light of the first laser beam and the second laser beam, and the intermittent movement of the substrate, The moving distance of the substrate can be easily calculated through the moving speed.

Further, by adjusting the individual moving speed of each measuring unit and the individual light quantity of each measuring unit to be equal to each other, it is possible to simplify the calculation of the position and coordinates of the foreign object and improve the detection accuracy of the foreign substance.

In addition, the present invention can simultaneously inspect the surface of the substrate as well as the bottom surface of the substrate, simplify the structure of the apparatus, and can easily derive the position and coordinates of the foreign object on the substrate using the proportional formula.

Further, it is convenient to calculate the light amount change in the first laser beam and the second laser beam depending on the position of the foreign substance and the position of the foreign matter or the position of the foreign substance, and the accuracy of the substrate inspection can be improved.

Further, the present invention can easily inspect the entire substrate even if the length of the surface plate unit is shorter than the length of the substrate, corresponding to the moving direction of the substrate.

1 is a view showing a substrate inspection apparatus according to an embodiment of the present invention.
2 is a block diagram showing a coordinate derivation unit in a substrate inspection apparatus according to an embodiment of the present invention.
3 is a block diagram showing a position indicating unit in a substrate inspection apparatus according to an embodiment of the present invention.
4 is a view showing a change state of light amount when a substrate passes through a first measurement unit and a second measurement unit in a substrate inspection apparatus according to an embodiment of the present invention.
5 is a view showing a state in which a first measurement unit and a second measurement unit detect foreign matter in the substrate inspection apparatus according to an embodiment of the present invention.
6 is a view showing a foreign substance generated on a substrate supported on a support table in a substrate inspection apparatus according to an embodiment of the present invention.
FIG. 7 is a graph showing a state in which the first measurement unit and the second measurement unit in the substrate inspection apparatus according to the embodiment of the present invention detect the foreign matter of FIG. 6;

Hereinafter, an embodiment of a substrate inspection apparatus using a laser according to the present invention will be described with reference to the accompanying drawings. Here, the present invention is not limited or limited by the examples. Further, in describing the present invention, a detailed description of well-known functions or constructions may be omitted for clarity of the present invention.

2 is a block diagram showing a coordinate derivation unit in a substrate inspection apparatus according to an embodiment of the present invention. FIG. 4 is a block diagram showing a position indicating unit in a substrate inspecting apparatus according to an embodiment of the present invention, and FIG. 4 is a cross-sectional view of a substrate inspecting apparatus according to an embodiment of the present invention when a substrate passes through a first measuring unit and a second measuring unit 5 is a view showing a state in which a first measurement unit and a second measurement unit detect a foreign substance in the substrate inspection apparatus according to an embodiment of the present invention, FIG. 7 is a view illustrating a foreign substance generated on a substrate supported on a support table in a substrate inspection apparatus according to an embodiment of the present invention. FIG. 7 is a cross- When the unit detects the foreign substance in Fig. 6 It is a graph that shows the state.

4 (a) is a view showing the state before the substrate passes through the first measurement unit and the second measurement unit, and Fig. 4 (b) FIG. 4C is a view showing a change in the amount of light when a portion where foreign matter is generated on the substrate passes through the first measurement unit or the second measurement unit, and FIG. to be.

Referring to Figures 1 to 7, in one embodiment of the present invention, the substrate 100 is linearly moved through a roller or a floating chuck (not shown). Considering the size of the substrate 100 and the size of the support table 51, the substrate 100 is divided into two or more along the moving direction of the substrate 100, and each of the partition areas is intermittently moved .

Here, the floating chuck (not shown) can float the substrate 100, and the divided region of the substrate 100 transported by the floating chuck (not shown) is supported by the support base 51, 1 laser beam and the second laser beam to interfere with the substrate 100 or the foreign matter 101, 101a. In addition, the substrate 100 can be linearly moved in an aligned state by the alignment portion 200. [

The foreign substances 101 and 101a can be classified into a foreign matter 101 generated on the surface of the substrate 100 and a foreign matter 101a generated on the bottom surface of the substrate 100 (the surface facing the support surface 51) .

6, the substrate 100 is supported on the support base 51 in a flat state and the foreign material 101 is supported on the surface of the substrate 100. In this case, 101) is displayed.

6, the foreign matter 101 is displayed between the substrate 100 and the support table 51, so that the substrate 100 is supported by the supporting table 51. Therefore, when the foreign matter 101a is formed on the bottom surface of the substrate 100, And is supported in a bent state on the base 51.

The apparatus for inspecting a substrate according to an embodiment of the present invention can detect the foreign substances generated on the substrate by using the difference in the amount of light depending on the straightness of the laser beam and the diffusibility of the laser beam, It is possible to accurately detect the position of the foreign matter 101, 101a detected by detecting the foreign matter 101, 101a generated on the bottom surface of the foreign matter 101, 101a.

Particularly, in inspecting the surface of the substrate 100, the apparatus for inspecting a substrate according to an embodiment of the present invention includes a substrate 100 and a bottom surface of the substrate 100 51 and the foreign matter 101 and the foreign matter 101a on the surface opposite to the foreign matter 101, 101a.

A substrate inspection apparatus according to an embodiment of the present invention includes a polishing unit 50, a first measurement unit 10, a second measurement unit 20, a position movement unit, and a position indication unit 40 do.

The substrate unit 100 is supported or floated in response to intermittent movement of the substrate 100. The surface mount unit 50 includes a support base 51 having a through hole 51a formed therein to correspond to a region where the substrate 100 is supported and a substrate attracting portion 52 for attracting air through the through hole 51a, And a substrate floating portion 53 for discharging air through the vent hole 51a. At this time, the position indicating unit 40 controls the operation of the substrate attracting section 52 or the substrate floating section 53 in response to the intermittent movement of the substrate 100.

When the substrate 100 moves in the divided areas corresponding to the intermittent movement of the substrate 100 in the surface mount unit 50, the substrate floating unit 53 is operated to move the substrate 100 in the support surface plate 51 The substrate suction unit 52 is operated to move the substrate 100 to the supporting table 51. The substrate 100 is held by the holding table 51 in the divided areas corresponding to the intermittent movement of the substrate 100, ) Is adsorbed and supported.

The first measurement unit 10 senses the substrate 100 according to the intermittent movement of the substrate 100 and the relative movement with respect to the substrate 100 as well as the foreign substances 101 and 101a generated in the substrate 100 Can be detected. In particular, the first measurement unit 10 can detect the foreign matter 101, 101a generated on the bottom surface of the substrate 100 (the surface facing the support table 51) as well as the surface of the substrate 100. [

The first measurement unit 10 includes a first light emitting portion 11 for emitting a first laser beam, a first light receiving portion 12 for receiving a first laser beam emitted from the first light emitting portion 11, And a first detection unit 13 that detects the amount of light of the first laser beam received by the first light receiving unit 12.

When the substrate 100 passes through the first measurement unit 10, the amount of light of the first laser beam before and after the substrate 100 passes through the light amount of the first laser beam detected by the first detection unit 13 The presence or absence of the passage of the substrate 100 can be detected through the change of the light amount of the first laser beam.

When the foreign substances 101 and 101a generated in the substrate 100 pass through the first measurement unit 10, the foreign substances 101 and 101a are irradiated to the light amount of the first laser beam detected by the first detection unit 13. [ The presence or absence of the foreign substances 101 and 101a can be detected through the change of the amount of light of the first laser beam.

The positions of the foreign matter 101 and 101a are shifted toward the first light emitting portion 11 side according to the positions of the foreign materials 101 and 101a with respect to the traveling direction of the first laser beam, The amount of light of the laser beam is reduced and the amount of the first laser beam received by the first light receiving unit 12 becomes larger as the position of the foreign matter 101 or 101a becomes closer to the first light receiving unit 12, The light amount variation of the first laser beam can be calculated according to the position of the first laser beam 101a.

When the foreign substances 101 and 101a pass through the first measurement unit 10 with respect to the relative movement between the first measurement unit 10 and the substrate 100, The change in the amount of light of the first laser beam changes sharply before and after the foreign matter 101 generated on the surface of the substrate 100 passes through the surface of the substrate 100. The light amount of the first laser beam detected by the first detection unit 13 The change in the amount of light of the first laser beam changes gently before and after the foreign matter 101a generated on the bottom surface of the substrate 100 passes.

Accordingly, whether or not the foreign substances 101 and 101a pass through the surface of the substrate 100 and the bottom surface of the substrate 100 can be separately detected.

The second measuring unit 20 not only senses the substrate 100 that has passed through the first measuring unit 10 according to the intermittent movement of the substrate 100 and the relative movement with the substrate 100, The foreign matter 101, 101a detected by the measuring unit 10 can be detected. In particular, the second measurement unit 20 can detect the foreign matter 101, 101a generated on the bottom surface of the substrate 100 (the surface facing the support table 51) as well as the surface of the substrate 100. [

The second measuring unit 20 includes a second light emitting unit 21 which emits a second laser beam parallel to the first laser beam emitted from the first light emitting unit 11 by being separated from the first light receiving unit 12, A second light receiving portion 22 that is spaced apart from the first light emitting portion 11 and receives a second laser beam emitted from the second light emitting portion 21 and a second light receiving portion 22 that receives the light amount of the second laser beam received by the second light receiving portion 22 And a second detection unit 23 for detecting the second detection signal.

When the substrate 100 passes through the second measurement unit 20, the amount of light of the second laser beam is measured before and after the substrate 100 passes through the light amount of the second laser beam detected by the second detection unit 23 It is possible to detect the passage of the substrate 100 through the change of the light amount of the second laser beam.

When the foreign substances 101 and 101a generated on the substrate 100 pass through the second measurement unit 20, the foreign substances 101 and 101a are irradiated to the light amount of the second laser beam detected by the second detection unit 23, The presence or absence of the foreign substances 101 and 101a can be detected through the change in the amount of light of the second laser beam.

The positions of the foreign matter 101 and 101a are shifted to the second light emitting portion 21 side in accordance with the positions of the foreign matter 101 and 101a with respect to the traveling direction of the second laser beam, The amount of light of the laser beam is reduced and the amount of the second laser beam received by the second light receiving portion 22 becomes larger as the position of the foreign matter 101 or 101a becomes closer to the second light receiving portion 22. Thus, The change in the amount of light of the second laser beam depending on the position of the first laser beam 101a can be calculated.

When the foreign substances 101 and 101a pass through the second measurement unit 20 with respect to the relative movement between the second measurement unit 20 and the substrate 100, The light amount change of the second laser beam rapidly changes before and after the foreign matter 101 generated on the surface of the substrate 100 with respect to the light amount of the beam passes through and the light amount of the second laser beam detected by the second detection portion 23 The change in light amount of the second laser beam changes gently before and after the foreign matter 101a generated on the bottom surface of the substrate 100 passes.

Accordingly, whether or not the foreign substances 101 and 101a pass through the surface of the substrate 100 and the bottom surface of the substrate 100 can be separately detected.

Therefore, the first measurement unit 10 and the second measurement unit 20 can detect the presence or absence of the foreign matter 101, 101a by measuring the change in the amount of light depending on the presence or absence of the foreign matter 101, 101a, respectively.

Further, the first laser beam and the second laser beam exhibit substantially the same intensity and shape. In more detail, the first laser beam and the second laser beam exhibit substantially the same mutually the same Gaussian cross-sectional profile.

The first laser beam and the second laser beam are made parallel to each other and the traveling direction of the first laser beam emitted from the first emitting portion 11 and the traveling direction of the second laser beam emitted from the second emitting portion 21 The direction of the traveling of the vehicle is opposite to each other.

Then, the first light emitting portion 11 and the second light emitting portion 21 are the same, and the first light receiving portion 12 and the second light receiving portion 22 are the same.

For example, when the substrate 100 is emitted from the first light emitting portion 11 and is received by the first light receiving portion 12 in a state in which the substrate 100 does not pass through the measurement units 10 and 20, The light amount of the first laser beam detected may be equal to the light amount of the second laser beam detected by the second detector 23 when the second light emitter 21 emits light and is received by the second light receiver 22. [

In addition, the first laser beam can be diverged from the first light emitting portion 11 in such a manner that the cross-sectional area thereof increases. Also, the second laser beam can be diverged from the second light emitting portion 21 in such a manner that the cross-sectional area thereof increases.

For example, the first laser beam may be emitted in a truncated cone shape increasing in diameter from the first light emitting portion 11, and the second laser beam may be emitted in a truncated cone shape increasing in diameter from the second light emitting portion 21 . At this time, the first laser beam and the second laser beam may have the same Gaussian cross-sectional profile. Then, coordinate calculation of the foreign matter 101 can be easily performed in the coordinate derivation unit 30 described later.

The position shifting unit relatively moves the first measuring unit 10 and the second measuring unit 20 in correspondence with the surface mount unit 50. [

The supporting table 51 of the table unit 50 is fixed and the first measuring unit 10 and the second measuring unit 20 can be moved corresponding to the moving direction of the substrate in the embodiment of the present invention, The position moving unit is capable of moving the first measuring unit 10 and the second measuring unit 20 relatively to each other in correspondence with the surface plate unit 50. [

The position moving unit can simultaneously move the first measurement unit 10 and the second measurement unit 20 at the same speed.

The positioning unit includes a first moving unit 60 for moving the first measuring unit 10 in correspondence with the surface plate unit 50 and a second moving unit 60 for moving the second measuring unit 10 corresponding to the surface plate unit 50. [ And a mobile unit 70 as shown in FIG.

The first moving unit 60 moves the first measuring unit 10 at a constant speed and the second moving unit 70 can move the second measuring unit 20 at a constant speed. Here, the moving speed of the first moving unit 60 and the moving speed of the second moving unit 70 may be substantially the same.

The position indicating unit 40 is configured to detect a change in the amount of light of the first laser beam detected by the first detecting unit 13 in accordance with the first measurement time corresponding to the region where the substrate 100 is supported in the surface plate unit 50, The position of the foreign matter 101, 101a on the surface of the substrate 100 and the bottom surface of the substrate 100 is determined using the change in the amount of the second laser beam detected by the second detection unit 23 according to the measurement time 2.

The position indicating unit 40 includes a setting counting unit 41 for counting a first measuring time and a second measuring time, and a setting unit 41 for matching the light amount change of the first laser beam detected according to the first measuring time, A displacement matching unit 42 for matching the light amount variation of the second laser beam detected according to the position of the foreign object 101 and 101a, A position deriving section 43 for deriving a time variation amount t and a light amount variation amount s corresponding to the position and the position of the substrate W using the time variation amount t and the light amount variation amount s derived from the position derivation section 43, And a position instruction section 44 for finally determining whether or not the foreign substance 101 or 101a is incorrectly detected on the surface of the substrate 100 and the bottom surface of the substrate 100 and the position of the foreign matter 101 or 101a.

The first measurement time is a time at which the first measurement unit 10 moves in correspondence with the region where the substrate 100 is supported in the base unit 50 and the second measurement time is the time at which the substrate 100 is moved in the base unit 50. [ Is the time at which the second measurement unit (20) moves in correspondence with the region to be supported.

The width w of the foreign substances 101 and 101a is represented by the product of t and V and the square of the height h of the foreign matter or the height h of the foreign matter 101 and 101a is s . For example, the height h of the foreign matter 101, 101a can be expressed as a product of s and h0. As another example, the height h of the foreign matter 101, 101a can be expressed as the product of the root s (s ^ 0.5) and h0. Here, t is a time variation amount t1 in accordance with the first measurement time or a time variation amount t2 in accordance with the second measurement time derived from the position derivation unit 43 in correspondence with the position of the foreign matter 101, 101a. S is the amount of light change s1 in accordance with the first measurement time or the amount of light change s2 in accordance with the second measurement time derived from the position deriving portion 43 corresponding to the position of the foreign matter 101 or 101a. V is the moving speed V1 of the first measuring unit 10 or the moving speed V2 of the second measuring unit 20. [ H0 is the height parameter of the foreign matter 101, 101a with respect to the light amount variation amount s, h01 is the height parameter of the foreign matter 101, 101a with respect to the light amount variation s1 according to the first measurement time, The height parameter of the foreign matter 101, 101a with respect to the amount of light change s2 in accordance with the second measurement time is h02.

The width w1 of the foreign substances 101 and 101a derived by using the first measurement unit 10 is represented by the product of t1 and V1 and the foreign matter 101 and 101a derived by using the second measurement unit 20, The width w2 of the foreign matter 101 and 101a derived by using the first measurement unit 10 is represented by the product of t2 and V2 and the width w1 of the foreign matter 101 and 101a derived using the second measurement unit 20 And may be substantially the same as the width w2 of the foreign matter 101, 101a.

Similarly, the height h1 of the foreign matter 101 and 101a derived by using the first measurement unit 10 is represented by the product of s1 and h01, and the foreign matter 101 The height h1 of the foreign matter 101 and 101a derived by using the first measurement unit 10 is represented by the product of s2 and h02 with respect to the height h2 of the first measurement unit 10a and the second measurement unit 20a, And may be substantially the same as the height h2 of the foreign substances 101 and 101a derived by using them.

Based on the width w of the foreign substances 101 and 101a, the height h of the foreign matter 101 and 101a and the light amount change state depending on the positions of the foreign matter 101 and 101a, The shape can be deduced.

Particularly, the position indication unit 44 is provided on the surface of the substrate 100 and the bottom surface of the substrate 100 in proportion to the width w of the foreign substances 101, 101a and the height h of the foreign substances 101, 101 and 101a and the position of the foreign matter 101 and 101a can be finally determined. The ratio of the width w of the foreign matters 101 and 101a to the height h of the foreign matter 101 and 101a is not limited and the foreign matter 101 And the height h of the foreign matter 101, 101a can be set.

For example, the foreign matter 101 generated on the surface of the substrate 100 abruptly changes in the amount of light with reference to the bent portion of the light amount change with time, so that the width w of the foreign matter 101, , And 101a, respectively, or at a constant ratio.

As another example, the foreign matter 101a generated on the bottom surface of the substrate 100 gently changes in the amount of light with reference to the bent portion of the light amount change with time, so that the width w of the foreign matter 101, , 101a, respectively, or at a constant ratio.

The position indicating unit 40 measures the intermittent moving state and the first measuring time of the substrate 100 and the moving speed of the first measuring unit 10 or the intermittent moving state and the second measuring time of the substrate 100, (45) for deriving detected coordinates of the foreign matter (101, 101a) with respect to the moving direction of the substrate (100) based on the moving speed of the substrate (20)

인 검출좌표 관계식을 도출할 수 있다.Since the above-mentioned moving speed is moved at a constant speed, the position determining unit 45

Can be derived.

Where V is the moving speed V1 of the first measuring unit 10 or the moving speed V2 of the second measuring unit 20 and S is the moving speed corresponding to the position of the foreign matter 101, And Y is the detection coordinate of the foreign matter 101, 101a with respect to the moving direction of the substrate 100. [

S represents the time S1 corresponding to the position of the foreign matter 101 or 101a detected by the first measurement unit 10 per division area and the time S1 corresponding to the position of the foreign matter 101, And a time S2 corresponding to the position of the first switch 101a.

Therefore, when the first measurement unit 10 or the second measurement unit 20 detects the foreign matter 101, 101a, the position determination unit 45 can derive Y, The detection coordinates of the foreign matter 101, 101a with respect to the direction can be determined.

The detected coordinates of the foreign substances 101 and 101a with respect to the moving direction of the substrate 100 led out through the position confirming unit 45 are the detected coordinates of the foreign substances 101 and 101a in the width direction of the substrate 100 The coordinates of the foreign matter 101, 101a detected on the substrate 100 can be determined.

Accordingly, the substrate inspection apparatus according to an embodiment of the present invention may further include a coordinate derivation unit 30 for determining the coordinates of the foreign matter 101, 101a.

The coordinate derivation unit 30 is configured to calculate the coordinate of the region where the substrate 100 is supported in the surface mount unit 50 and the amount of light of the first laser beam detected by the first detection unit 13 in correspondence with the foreign matter 101, The amount of the second laser beam detected by the second detecting unit 23 in correspondence with the foreign matter 101 and 101a and the relative position of the foreign matter 101 and 101a are used to detect the position of the foreign substances 101 and 101a Calculate the coordinates.

Here, since the first laser beam and the second laser beam having the same Gaussian cross-sectional profile mutually proceed in opposite directions to each other, the detection coordinates of the foreign matter 101 with respect to the width direction of the substrate 100, which is unknown, can be calculated.

The coordinate deriving unit 30 calculates the distance between the center of the substrate 100 and the radius of the first laser beam emitted from the first light emitting portion 11 and the radius of the first laser beam emitted from the first light receiving portion 12 A radius setting unit 32 for storing the radius of the first laser beam or storing the radius of the second laser beam emitted from the second light emitting unit 21 and the radius of the second laser beam received by the second light receiving unit 22, A light amount setting section 33 for storing the light amount of the first laser beam detected by the first detecting section 13 and the light amount of the second laser beam detected by the second detecting section 23, (37) for calculating the detection coordinates of the foreign matter (101, 101a) with respect to the width direction of the substrate (100) based on the values stored in the radius setting unit (32) and the light amount setting unit have. The coordinate derivation unit 37 calculates the coordinates of the foreign matter 101 and 101a with respect to the moving direction of the substrate 100 derived through the position confirmation unit 45 and the coordinates of the foreign substances 101 and 101a The coordinates of the foreign matter 101, 101a detected on the substrate 100 can be determined.

At this time, the width of the substrate 100 in the thickening part 31 is a predetermined value according to the size of the substrate 100 to be transported.

The radius setting unit 32 includes a first radius setting unit for storing the radius of the first laser beam emitted from the first light emitting unit 11 and the radius of the first laser beam received by the first light receiving unit 12, And a second radius setting unit in which the radius of the second laser beam emitted from the second light emitting unit 21 and the radius of the second laser beam received by the second light receiving unit 22 are stored. The radius of the first laser beam or the radius of the second laser beam stored in the radius setting part 32 is a preset value or a measurement value according to the optical characteristic.

The light amount setting unit 33 includes a first setting unit that stores the light amount of the first laser beam detected by the first detection unit 13 and a second setting unit that stores the light amount of the second laser beam detected by the second detection unit 23 And a second setting section for setting the second setting section.

The amount of light of the first laser beam received by the first light receiving unit 12 when only the substrate 100 does not pass through the first measurement unit 10 is detected by the first setting unit, The amount of light of the first laser beam received by the first light receiving unit 12 when the foreign substance 101 passes through the first measuring unit 10 The amount of light is stored.

The amount of light of the second laser beam received by the second light receiving section 22 when the substrate 100 does not pass through the second measuring unit 20 is detected by the second setting section, The amount of light of the second laser beam received by the second light receiving unit 22 when the foreign substance 101 passes through the second measuring unit 20, The amount of light is stored.

The amount of light of the first laser beam or the amount of light of the second laser beam stored in the light amount setting unit 33 is preset to the amount of light detected by the first detecting unit 13 and the second detecting unit 23 according to the optical characteristics.

The coordinate derivation unit 37 includes a first coordinate derivation unit, a second coordinate derivation unit, and a width calculation unit. The first coordinate derivation unit calculates the correlation between the light amount of the first laser beam, the cross-sectional area of the foreign matter 101, 101a, and the cross-sectional area of the first laser beam when the foreign object 101, 101a passes through the first measurement unit 10 Derive a relationship. The second coordinate derivation unit calculates the distance between the light amount of the second laser beam, the cross-sectional area of the foreign matter 101, 101a, and the cross-sectional area of the first laser beam when the foreign matter 101, 101a passes through the second measurement unit 20. [ Derive a correlation. The width calculating unit determines the detected coordinates of the foreign matter (101, 101a) with respect to the width direction of the substrate (100) by using the relational expressions respectively derived from the first coordinate deriving unit and the second coordinate deriving unit.

In other words, the first coordinate derivation unit is configured to extract the foreign matter 101, 101a with respect to the light amount of the first laser beam and the width of the substrate 100 when the foreign matter 101, 101a passes through the first measurement unit 10. [ And derives a correlation between the positions. The second coordinate derivation unit also calculates a correlation between the light amount of the second laser beam and the position of the foreign matter 101 with respect to the width of the substrate 100 when the foreign matter 101, 101a passes through the second measurement unit 20 Derive a relationship.

Here, assuming that the first laser beam and the second laser beam have the same specifications, are circular with respect to a cross section perpendicular to the width direction of the substrate 100, and have a uniform light amount profile, the foreign matter 101, Assuming it is also circular,

X is the detection coordinate of the foreign matter 101, 101a with respect to the width direction of the substrate 100 when the foreign substance 101 is detected in the first measurement unit 10 and LX is the detection coordinate of the foreign matter 101, (101, 101a) with respect to the width direction of the substrate 100 when the first and second substrates 101, 101a are detected.

At this time, for a section where the divergence angle of the laser beam is constant,

L is the width of the substrate (100), R ₀₁ is the radius of the second laser beam from the side of the first light emitting portion 11 radially of the first laser beam from the side or the second light emitting portion (21), R ₀₂ is the 1, the light receiving section 12 and the second radius of the laser beam in the radial or the second light receiving unit 22 side of the first laser beam side, Rp is the diameter of the foreign material (101, 101a), R ₁ is the first measurement unit ( 10) when foreign objects (101, 101a) is detected at the first and the radius of the laser beam, Q ₁ is the first time the foreign material (101, 101a) is detected in the measuring unit 10, a first light amount of the laser beam R ₂ is the radius of the second laser beam when the foreign matter 101, 101a is detected in the second measurement unit 20 and Q ₂ is the radius of the foreign matter 101, 101a in the second measurement unit 20 When it is detected, the quantity of light of the second laser beam, and M is a radius variable according to the divergence angle of the laser beam,

인 관계식이 성립되고,Between R ₁ and X

In this way,

인 관계식이 성립된다.Between R ₂ and X

Is established.

Q ₁ can be expressed by the cross-sectional area of the foreign matter 101, 101a with respect to the cross-sectional area of the first laser beam at the position where the first measuring unit 10 detects the foreign matter 101, 101a.

Then, between Q ₁ and Rp and R ₁ with respect to the light amount of the first laser beam,

인 제1관계식을 도출할 수 있다.

Can be derived.

Q ₂ can be expressed by the cross-sectional area of the foreign matter 101, 101a with respect to the cross-sectional area of the second laser beam at the position where the second measurement unit 20 has detected the foreign matter 101, 101a.

Then, between Q ₂ and Rp and R _{2 for} the second laser beam,

인 제2관계식을 도출할 수 있다.

Can be derived.

By combining the first and second relationships,

인 제3관계식을 도출할 수 있다.

Can be derived.

Therefore, when the foreign substance 101, 101a is detected in the first measurement unit 10 and the second measurement unit 20 because the coordinate derivation unit 37 can derive X by calculating the third relational expression, The detection coordinates of the foreign matter 101 in the width direction of the substrate 100 can be determined.

The coordinate derivation unit 30 may further include a variable setting unit 34 in which a radius variable according to the traveling direction of the light is stored for the first laser beam or the second laser beam.

In the variable setting unit 34, the radius variable is a radius increase with respect to the radius of the light in the width direction of the substrate 100. [ The radius variable can be preset according to the optical characteristics. The radius variable can be calculated based on the values stored in the width and radius setting unit 32 of the substrate 100. [

At this time, there is a proportional relation between M and X and R ₀₂ with respect to the radial variable according to the resemblance of a triangle.

Here, the above-described relational expressions are simplified to express the content of the correlation, but the present invention is not limited to this, and it is possible to use a general expression of using a divergence angle of a laser beam and a more precise configuration of a laser beam having a Gaussian cross- And a description thereof will be omitted.

The coordinate deriving unit 30 calculates the amount of light of the first laser beam received by the first light receiving unit 12 and the amount of light of the second laser beam received by the second light receiving unit 22 based on the amount of light stored in the light amount setting unit 33, And a light quantity comparing unit 35 for comparing the light quantity of the beam.

The coordinate derivation unit 30 calculates the position of the first measurement unit 10 or the second measurement unit 20 when the difference is generated based on the comparison value to be compared in the light amount comparison unit 35 And may further include an adjustment unit 36. The position adjustment section 36 can adjust the alignment state of the substrate 100. [

The measurement accuracy can be improved in the first measurement unit 10 and the second measurement unit 20 in accordance with the operation of the position adjustment unit 36 and the error due to the calculation can be reduced.

In addition, since the substrate 100 is aligned by the alignment part 200, the interval between the substrate 100 and the first light emitting part 11 can be maintained constant in a predetermined state.

Hereinafter, a method of inspecting a substrate according to an embodiment of the present invention will be described. The substrate inspection method according to an embodiment of the present invention is a method of inspecting the substrate 100 using the substrate inspection apparatus according to an embodiment of the present invention.

First, in an embodiment of the present invention, the substrate 100 is divided into two or more sections corresponding to the size of the surface plate unit 50 to form two or more section areas.

In the substrate 100, the roller or the floating chuck is moved intermittently in each of the partition areas in association with the surface plate unit 50. Then, the substrate 100 may be supported on the surface plate unit 50 or pass through the surface plate unit 50 for each of the partition areas.

When the substrate 100 is supported by the surface plate unit 50, the surface plate unit 50 sucks and supports the substrate 100.

The first measurement unit 10 and the second measurement unit 20 sense the substrate 100 relative to the substrate 100 or the support table 51. Here, the substrate 100 can sense a change in the amount of light of the first laser beam through the first measurement unit 10 or a change in the amount of light of the second laser beam through the second measurement unit 20. [

The first measurement unit 10 and the second measurement unit 20 also detect foreign matter 101 and 101a by relative movement with the substrate 100 or the support table 51. Here, the foreign matter 101, 101a can be detected by a light amount change of the first laser beam through the first measurement unit 10 or a light amount change of the second laser beam through the second measurement unit 20. [

When the foreign substances 101 and 101a are detected for each of the divided areas, the first laser beam is detected by the first detection unit 13 in accordance with the first measurement time corresponding to the region where the substrate 100 is supported by the surface plate unit 50, The difference between the light amount of the beam and the light amount change of the second laser beam detected by the second detection unit 23 in accordance with the second measurement time is used to detect the foreign matter 101, ) Is determined. In addition, the detection coordinates of the foreign matter 101, 101a in accordance with the moving direction of the substrate 100 can be calculated.

The positions of the foreign matter 101 and 101a on the surface of the substrate 100 and the bottom surface of the substrate 100 can be determined through the position indicating unit 40. [ The detection coordinates of the foreign matter 101, 101a in accordance with the moving direction of the substrate 100 can be determined through the position indicating unit 40. [

When the foreign matter 101 or 101a is detected for each of the divided areas, the area where the substrate 100 is supported by the surface plate unit 50 and the area where the foreign matter 101 and 101a are detected by the first detection unit 13 The amount of light of the first laser beam and the amount of light of the second laser beam detected by the second detecting unit 23 corresponding to the foreign matter 101 and 101a and the relative positions of the foreign matter 101 and 101a The coordinates of the foreign matter 101, 101a are calculated.

Coordinates of the foreign substances 101 and 101a on the substrate 100 can be calculated through the coordinate derivation unit 30. [

When the foreign substances 101 and 101a are not detected for each of the divided areas or the detection of the foreign substances 101 and 101a is completed for each of the divided areas, the controlling unit 50 releases the adsorption of the substrate 100, 51 to float the substrate 100.

Next, the substrate 100 is intermittently moved by the roller or the floating chuck in association with the surface plate unit 50, and then repeatedly performs the above-described detection of the substrate 100 and the detection of the foreign substances 101 and 101a do.

Finally, after inspecting all the substrates 100, two or more divided regions are formed by dividing the new substrate 100 into two or more regions corresponding to the size of the surface plate unit 50, and then the above- Conduct.

According to the above-described substrate inspection apparatus using a laser, the foreign substances 101, 102 generated on the bottom surface of the substrate 100, as well as the surface of the substrate 100, by utilizing the difference in the amount of light depending on the straightness of the laser beam and the diffusibility of the laser beam, 101a and detects the position of the foreign matter 101, 101a accurately. Particularly, it is possible to prevent the size of the whole equipment from becoming large, and to easily detect the foreign matter 101, 101a even to the foreign matter 101, 101a located on the bottom surface of the substrate 100 without reversing the substrate 100, 101 and 101a can be accurately grasped.

Further, the correlation between the time and the light amount change can be derived in a graph corresponding to the size of the predetermined base unit 50, and the position and coordinate determination of the foreign matter 101, 101a can be simplified by analyzing the graph .

The width w of the foreign matter 101 and the height h of the foreign matter 101 and 101a can be roughly derived and the width w of the foreign matter 101 and the foreign matter 101 101a can be clarified through the correlation formed between the height h of the foreign substances 101, 101a. In other words, it is possible to distinguish whether the foreign matter 101, 101a detected through the feature is generated on the surface of the substrate 100 or on the bottom surface of the substrate 100.

It is also possible to clarify the moving state of the substrate 100 in response to the intermittent movement of the substrate 100 so that the contaminants 101 and 101a generated on the bottom surface of the substrate 100 are outlined on the surface of the substrate 100 .

It is also easy to determine the position and coordinates of the foreign matter 101, 101a with respect to the width direction of the substrate 100 according to the change in the amount of light of the first laser beam and the second laser beam, The moving distance of the substrate 100 can be easily calculated through the moving speeds of the measuring unit 10 and the second measuring unit 20. [

It is also possible to simplify the calculation of the position and coordinates of the foreign matter 101 and 101a by adjusting the individual moving speed of each of the measuring units 10 and 20 and the individual light amounts of the measuring units 10 and 20 to be the same, , 101a can be improved.

In addition, the surface of the substrate 10 as well as the bottom surface of the substrate 10 can be inspected at the same time, the structure of the apparatus can be simplified, and the position of the foreign matter 101, 101a in the substrate 10 The coordinates can be easily derived.

It is also convenient to calculate the amount of light change in the first laser beam and the second laser beam depending on the position of the foreign matter 101 and 101a or the position of the foreign matter 101 or 101a and improve the inspection accuracy of the substrate 100 .

In addition, even if the length of the surface mount unit 50 is shorter than the length of the substrate 100 in correspondence with the moving direction of the substrate 100, inspection of the entire substrate 100 can be easily performed.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, Modify or modify the Software.

100: substrate 101, 101a: foreign matter 200:
10: first measuring unit 11: first light emitting unit 12: first light receiving unit
13: first detection unit 20: second measurement unit 21: second light emitting unit
22: second light receiving section 23: second detection section 30: coordinate derivation unit
31: snow-making unit 32: radius setting unit 33:
34: variable setting section 35: light quantity comparing section 36: position adjusting section
37: Coordinate derivation unit 40: Position designation unit 41: Setting count unit
42: displacement matching section 43: position deriving section 44: position indicating section
45: position confirmation unit 50: face plate unit 51: support plate
51a: vent hole 52: substrate suction part 53: substrate floating part
60: first mobile unit 70: second mobile unit

Claims (7)

A substrate inspection apparatus for inspecting a foreign substance generated on a substrate,
A base unit in which the substrate is supported or lifted in response to intermittent movement of the substrate;
A first light emitting section for emitting a first laser beam, a first light receiving section for receiving the first laser beam, and a first detecting section for detecting an amount of light of the first laser beam received by the first light receiving section 1 measuring unit;
A second light emitting unit which is spaced apart from the first light receiving unit and emits a second laser beam parallel to the first laser beam, a second light receiving unit which is spaced apart from the first light emitting unit and receives the second laser beam, A second measuring unit including a second detecting unit for detecting an amount of light of the second laser beam received by the second light receiving unit;
A position moving unit for relatively moving the first measurement unit and the second measurement unit in correspondence with the surface mount unit; And
A light amount change of the first laser beam detected by the first detection unit in accordance with a first measurement time corresponding to an area where the substrate is supported in the surface plate unit; And a position indicating unit for determining a position of a foreign matter on a surface of the substrate and a bottom surface of the substrate using a change in light amount of the second laser beam,
The position indicating unit,
A setting count unit counting the first measurement time and the second measurement time;
A displacement matching unit for matching the light amount change of the first laser beam according to the first measurement time and matching the light amount variation amount of the second laser beam according to the second measurement time;
A position deriving unit for deriving a position of the foreign object by using the bent portion of the light amount change with time and deriving a time variation amount and a light amount variation amount corresponding to the position of the foreign matter;
And a position indicator for determining whether or not a foreign object on the surface of the substrate and the bottom surface of the substrate is erroneously detected and the position of the foreign object by using the time variation amount and the light amount variation amount derived from the position deriving unit. Substrate inspection apparatus. delete The method according to claim 1,
In the position indicating section,
The width (w) of the foreign substance is represented by the product of t and v,
Wherein the height of the foreign substance (h) or the height of the foreign substance (h) is proportional to s.
Here, t is a time variation amount in accordance with the first measurement time or a time variation amount in accordance with the second measurement time derived from the position deriving part corresponding to the position of the foreign object,
s is a light amount change amount in accordance with the first measurement time or a light amount change amount in accordance with the second measurement time, which is derived from the position deriving part, corresponding to the position of the foreign object,
v is the moving speed of the first measuring unit or the moving speed of the second measuring unit. The method of claim 3,
Wherein the position indication unit comprises:
Wherein a ratio between a height of the foreign object and a height of the foreign object is used to determine whether or not a foreign substance is present on the surface of the substrate and the bottom surface of the substrate and the position of the foreign substance is finally determined. The method according to claim 1,
The position indicating unit,
Based on the intermittent moving state of the substrate and the moving speed of the first measuring unit or the intermittent moving state of the substrate and the moving speed of the second measuring unit, And a position confirming unit for deriving a detection coordinate of a foreign substance with respect to a direction of the substrate. 6. The method according to any one of claims 1 to 5,
The surface-
A support base through which a vent hole is formed to correspond to an area where the substrate is supported;
A substrate adsorption unit for adsorbing air through the vent hole;
And a substrate floating portion for discharging air through the vent hole,
The position indicating unit,
Wherein the operation of the substrate attracting unit or the substrate floating unit is controlled in response to intermittent movement of the substrate. 6. The method according to any one of claims 1 to 5,
An amount of light of the first laser beam detected by the first detecting unit corresponding to a foreign substance and a quantity of light of the second laser beam detected by the second detecting unit corresponding to the foreign substance, And a coordinate derivation unit for calculating the coordinates of a foreign substance on the substrate by using a relative position of the foreign substance.

Images