KR101811633B1 - Burn in test chamber comprising independent heat processing space - Google Patents

Burn in test chamber comprising independent heat processing space Download PDF

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Publication number
KR101811633B1
KR101811633B1 KR1020150150590A KR20150150590A KR101811633B1 KR 101811633 B1 KR101811633 B1 KR 101811633B1 KR 1020150150590 A KR1020150150590 A KR 1020150150590A KR 20150150590 A KR20150150590 A KR 20150150590A KR 101811633 B1 KR101811633 B1 KR 101811633B1
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KR
South Korea
Prior art keywords
door
chamber
test
main body
heat treatment
Prior art date
Application number
KR1020150150590A
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Korean (ko)
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KR20170049804A (en
Inventor
임종찬
Original Assignee
(주)예스티
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Publication date
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Priority to KR1020150150590A priority Critical patent/KR101811633B1/en
Publication of KR20170049804A publication Critical patent/KR20170049804A/en
Application granted granted Critical
Publication of KR101811633B1 publication Critical patent/KR101811633B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2862—Chambers or ovens; Tanks
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2642—Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/2872—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation
    • G01R31/2874—Environmental, reliability or burn-in testing related to electrical or environmental aspects, e.g. temperature, humidity, vibration, nuclear radiation related to temperature

Abstract

A burn-in test apparatus having an independent heat treatment space according to the present invention includes a chamber member constituting an overall appearance of a heat treatment apparatus and a door member provided in front of the chamber member, wherein the chamber member is provided with a heat treatment space Wherein the door member is installed in each of the heat treatment spaces, and the door member includes a door main body for closing the front of the chamber member, and a door main body for slidingly guiding the door main body in the left- A left and right sliding cylinder member for sliding the door body portion in the left and right directions in the pair of rail members and a forward and backward transport cylinder member installed to slide in the left and right direction along the rail member, , And the door main body portion is moved by the forward and backward transport cylinder member And is configured to be moved forward or away from the front of the chamber member.
According to the present invention, by providing a plurality of independent heat treatment spaces in one apparatus, the heat treatment process can be performed for each heat treatment space, thereby wasting space and improving the test yield.
Further, since the test apparatus is configured compactly and a separate space for opening the door is not required, it is possible to reduce the size of the area for use of the heat treatment apparatus in the field where the test apparatus is installed, and even when the door is opened The risk of injury to the operator can be drastically reduced even when the door is opened.

Description

[0001] The present invention relates to a burn-in test apparatus having a plurality of independent test chambers.

The present invention relates to a burn-in test apparatus, and more particularly, to a burn-in test apparatus which is provided with a plurality of independent test chambers inside a single apparatus, so that independent test chambers And a burn-in test apparatus.

Recently, with the rapid development and spread of computer technology, the memory part technology that can be used in connection with this has been dramatically developed.

In view of the fact that such high-density integration of memory parts is rapidly proceeding, the role of the manufacturing and testing apparatuses is becoming more important.

Normally, memory parts such as USB, SSD, and EMMC are used in various conditions and defects may occur due to the heat generated by the use of the memory. Therefore, Inspection is performed.

As such a memory component temperature test apparatus, there is a Korean Registered Utility Model No. 435565, for example.

The test apparatus has a plurality of cooling / heating systems for applying a temperature condition to a memory module installed in a base frame, and is installed on a base frame so that a plurality of cooling / heating systems can move up and down, forward and backward, And a plurality of cradles for supporting the system.

However, in the conventional semiconductor component temperature testing apparatus, since one test space is provided in one chamber, the test is performed under the same temperature condition for all the semiconductor components to be tested.

This is a waste of space and energy if the number of semiconductor components to be tested is not large enough to fill the entire test space.

In addition, even in the case of a small amount of semiconductor component test, the entire space is required to be heated or cooled in the same test atmosphere, so that this increases the process time required for the test.

In addition, in the conventional test apparatus, the door installed in the test apparatus is rotated around the door hinge in the forward direction to open and close the test apparatus. Therefore, an area for rotating the door unit is secured at the site where the test apparatus is installed .

In addition, in the case where the door is protruded forward of the test apparatus in a state in which the door is opened, it may cause injury due to carelessness of the field workforce.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and it is an object of the present invention to provide an apparatus and a method for testing a plurality of independent test chambers, And a test chamber of the burn-in test apparatus.

It is another object of the present invention to provide a testing apparatus and a testing apparatus in which door portions are slidable in the left and right direction from the front of the chamber so as to be opened and closed so as to provide a plurality of independent test chambers, Device.

It is still another object of the present invention to provide a burn-in test apparatus having a plurality of independent test chambers configured not to protrude out of the test apparatus even when the door is opened.

According to an aspect of the present invention, there is provided a burn-in test apparatus having independent test chambers. The burn-in test apparatus includes a chamber member constituting an overall appearance of a test apparatus, and a door member provided in front of the chamber member, Wherein the door member is installed in each of the test chambers, the door member includes a door main body for closing the front of the test chamber, and a door main body for holding the door main body in front of the test chamber, A left and right sliding cylinder member for sliding the door body portion in the left and right directions of the pair of rail members, and a pair of left and right sliding cylinder members installed to slide in the left and right directions along the rail member And a front-rear direction transfer cylinder member, wherein the front-rear direction transfer cylinder member The door body portion is characterized by being configured to be moved forward away of the chamber member, or from the front of the chamber member.

Preferably, the connecting bracket is fixed to the upper and lower portions of the door main body, and the front and rear direction transfer cylinder members are installed on the sliding brackets so that the connecting brackets are transferred in the front-rear direction of the chamber member, And to open or close the front of the test chamber.

A guide shaft may be provided between the connection bracket and the sliding bracket for guiding the connection bracket in the longitudinal direction.

The front and rear direction transfer cylinder members may be installed on both side portions of the upper and lower portions of the door main body portion.

On the other hand, the guide shafts may be respectively installed on the side of the front-rear direction transfer cylinder member.

Preferably, the chamber members are provided on the left and right sides.

According to the present invention, by providing a plurality of independent test chambers in one apparatus, it is possible to perform a test process for each test chamber, thereby preventing waste of space and improving the yield of the test process.

In addition, since the test apparatus is compact and no separate space for door opening is required, it is possible to reduce the size of the area for use of the test apparatus in the field where the test apparatus is installed.

In addition, since the door is not protruded to the outside of the test apparatus even when the door is opened, the risk of injury to the operator can be drastically reduced even when the door is opened.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
1 is a perspective view of a burn-in test apparatus having a plurality of independent test chambers according to the present invention,
2 is a perspective view of another embodiment of the test apparatus,
3 is a perspective view of a door member included in the test apparatus,
4 is a top perspective view of the door member,
FIG. 5 is a top rear perspective view of the door member,
6 is a bottom perspective view of the door member,
7 is a bottom rear perspective view of the door member,
8 is a sectional view of the upper side of the door member,
Fig. 9 is a bottom cross-sectional view of the door member,
10 is a bottom cross-sectional perspective view of the door member.

Hereinafter, the configuration of the present invention will be described in detail with reference to the accompanying drawings.

Prior to this, the terms used in the specification and claims should not be construed in a dictionary sense, and the inventor may, on the principle that the concept of a term can be properly defined to explain its invention in the best way And should be construed in light of the meanings and concepts consistent with the technical idea of the present invention.

Therefore, the embodiments shown in the present specification and the drawings are only exemplary embodiments of the present invention, and not all of the technical ideas of the present invention are presented. Therefore, various equivalents It should be understood that water and variations may exist.

FIG. 1 is a perspective view of a burn-in test apparatus having independent test chambers according to the present invention, FIG. 2 is a perspective view of another embodiment of the test apparatus, FIG. 3 is a perspective view of a door member included in the test apparatus, 6 is a bottom perspective view of the door member, FIG. 7 is a bottom rear perspective view of the door member, and FIG. 8 is a front perspective view of the door member, 9 is a bottom side cross-sectional view of the door member, and Fig. 10 is a bottom cross-sectional perspective view of the door member.

1 to 10, a burn-in test apparatus having independent test chambers according to the present invention includes a chamber member 10 constituting an overall appearance of a test apparatus, Wherein the test chamber is provided with upper and lower test chambers, and the door members (20-1, 20-2) are installed in each of the test chambers (20-1, 20-2) And the door members 20-1 and 20-2 include door body portions 22 for closing the front of the test chamber and door body portions 22 for moving the door body portions 22 in the left- A pair of left and right sliding cylinder members 24 and 24-1 for sliding the door main body 22 in the left and right directions from the pair of rail members 24 and 24-1 26 that are installed to slide in the left-right direction along the rail members (24, 24-1) Wherein the door body portion 22 is moved forward or forward of the test chamber 10 by the forward and backward transporting cylinder members 28 and 28-1, And is configured to move away from the front of the test chamber (10).

The chamber member 10 is formed in a hexahedral shape as a whole for receiving a semiconductor component therein and performing a high temperature and low temperature test while forming an external appearance of the burn-in test apparatus according to the present invention.

The chamber member 10 is formed of a metal wire and a metal panel. On one side, control switches (not shown) are provided for controlling various components of the test apparatus according to the present invention.

Test chambers are installed in upper and lower parts of the chamber member 10 and the door members 20-1 and 20-2 are opened or closed in front of the test chamber.

A cassette 110 on which a semiconductor component is mounted is accommodated in a test chamber provided in the chamber member 10, and the cassette 110 is transported by an automatic guided vehicle 120.

The cassette 110 on which the semiconductor components are mounted can be put into or discharged from the test chamber with the door members 20-1 and 20-2 opened or closed in front of the test chamber being opened.

Then, a test process for the semiconductor component is performed in a state in which the door members 20-1 and 20-2 in the front of the test chamber are closed.

The construction of the door members 20-1 and 20-2 will be described with reference to FIG.

Since the door members 20-1 and 20-2 installed in the test chambers have the same configuration, the door member 20-1 installed at the upper portion will be described as an example.

The door members 20-1 and 20-2 include a door main body 22 for closing the front of the test chamber and a sliding door 22 for sliding the door main body 22 in the left- And a left and right sliding cylinder member 26 for sliding the door body portion 22 in the left and right direction from the rail members 24 and 24-1 do.

The door main body 22 is formed of a rectangular plate, and the surface of the door main body 22 is made of a metal material, and may include a heat insulating material.

Thus, the heat inside the test chamber is prevented from being transmitted to the outside through the door main body portion 22.

The door main body 22 is configured to be moved in the lateral direction of the chamber member 10 on the rail members 24 and 24-1 by driving the left and right sliding cylinder members 26. [

The rail members 24 and 24-1 for guiding the door main body 22 are installed at upper and lower portions of the test chamber and are installed at a width equal to or less than the width of the chamber member 10, The door main body portion 22 does not protrude out of the chamber member 10 even when the door main body 22 reaches the maximum opened state.

Therefore, even when the door body 22 is opened, the door body 22 can be prevented from being injured due to carelessness of the worker by protruding out of the chamber member 10 .

Further, the door main body portion 22 is configured to be moved toward or away from the test chamber by the front and rear direction transfer cylinder members 28. [

Sliding brackets 34 for installing the front and rear direction transfer cylinder members 28 and 28-1 and the guide shafts 42 and 42-1 are slidably installed on the rail members 24 and 24-1.

The front and rear direction transfer cylinder members 28 and 28-1 may be installed on the upper and lower sides of the door main body 22, respectively.

Thus, the sliding bracket 34 can be slid in the left-right direction along the rail members 24, 24-1 by driving the left and right sliding cylinder members 26. [

The upper and lower portions of the door main body 22 are provided with connection brackets 32 and 32-1 and the front and rear directional transfer cylinders 32 and 32-1 are provided between the connection brackets 32 and 32-1 and the sliding bracket 34, Members 28 and 28-1 and guide shafts 42 and 42-1 are provided.

The connection brackets 32 and 32-1 are moved in the direction toward the chamber member 10 or in the direction away from the chamber member 10 by the driving of the forward and backward transfer cylinder members 28 and 28-1. Can be moved.

Here, the guide shafts 42 and 42-1 are provided to guide the connection brackets 32 and 32-1 in the front-rear direction about the chamber member 10.

The guide shafts 42 and 42-1 are provided on the side portions of the front and rear direction transfer cylinder members 28 and 28-1, respectively.

As a result, the door main body 22 coupled to the connection brackets 32 and 32-1 is also moved in the forward and backward directions around the chamber member 10 to open or close the test chamber.

In the embodiment shown in FIG. 2, two adjacent chamber members 10 are provided and have a total of four test chambers.

Thus, the door members 20-1 and 20-2 installed on the left side chamber member 10 are moved to the left side to open the test chamber and move to the right side to close the test chamber, Door members 20-1 and 20-2 provided in the chamber member 10 are moved to the right to be tested open and to move to the left side to close the test chamber.

Thus, four test chambers and door members for opening or closing them can be space-efficiently installed.

 As described above, by installing two independent test chambers in one chamber member 10 or by installing four independent test chambers in the two chamber members 10, it is possible to test each part in each of the test chambers in different atmospheres Process can be performed.

Further, when the number of parts to be tested is small, only one test chamber can be selectively used, thereby enabling efficient use of energy.

While the present invention has been described with reference to the exemplary embodiments and the drawings, it is to be understood that the technical scope of the present invention is not limited to these embodiments and that various changes and modifications will be apparent to those skilled in the art. Various modifications and variations may be made without departing from the scope of the appended claims.

10: chamber member
20-1, 20-2: Door member
22: Door body part
24, 24-1: the rail member
26: right and left sliding cylinder member
28, 28-1: forward / backward transport cylinder member
32, 32-1: connection bracket
34, 34-1: Sliding bracket
42, 42-1: guide shaft

Claims (6)

The chamber member constituting the entire outer surface of the heat treatment apparatus
And a door member installed in front of the chamber member,
Wherein the chamber member is provided with a test chamber at an upper portion and a lower portion thereof,
Wherein the door member is installed in each of the test chambers,
The door member
A door main body for closing the front of the test chamber;
A pair of rail members for slidingly guiding the door body portion in the left-right direction from the front of the test chamber;
A left and right sliding cylinder member for sliding the door body portion in the left and right directions from the pair of rail members;
And a front-rear direction transfer cylinder member installed to slide in the lateral direction along the rail member,
The door main body portion is configured to be moved forward or away from the front of the chamber member by the forward / backward transfer cylinder member,
A connection bracket is fixed to upper and lower portions of the door main body,
The sliding brackets are moved in the lateral direction by the operation of the left and right sliding cylinder members so that the connection brackets are moved in the left and right directions together,
The front and rear direction transfer cylinder members are provided on the sliding bracket so that the door main body portion opens or closes the front of the test chamber by transporting the connection bracket in the forward and backward directions of the chamber member through the forward and backward transfer cylinder members Respectively,
A guide shaft for guiding the connection bracket in the longitudinal direction is provided between the connection bracket and the sliding bracket,
The front and rear direction transfer cylinder members are installed on both side portions of the upper and lower portions of the door main body,
Wherein the guide shafts are provided on the side of the front and rear direction transfer cylinder members, respectively. The method according to claim 1,
And the chamber members are installed on the left and right sides of the chamber member. delete delete delete delete
KR1020150150590A 2015-10-28 2015-10-28 Burn in test chamber comprising independent heat processing space KR101811633B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150150590A KR101811633B1 (en) 2015-10-28 2015-10-28 Burn in test chamber comprising independent heat processing space

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150150590A KR101811633B1 (en) 2015-10-28 2015-10-28 Burn in test chamber comprising independent heat processing space

Publications (2)

Publication Number Publication Date
KR20170049804A KR20170049804A (en) 2017-05-11
KR101811633B1 true KR101811633B1 (en) 2018-01-26

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220102424A (en) 2021-01-13 2022-07-20 주식회사 엑시콘 Opening and closing apparatus for chamber

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101964578B1 (en) * 2017-07-21 2019-04-03 (주)예스티 Apparatus for testing semiconductor component
KR102215090B1 (en) * 2019-06-18 2021-02-18 에스케이하이닉스 주식회사 Probe card preheater
KR102548389B1 (en) * 2021-06-21 2023-06-27 주식회사 쎄믹스 Prober having electric equipment maintenance door
KR102647501B1 (en) * 2022-01-11 2024-03-14 주식회사 네오셈 Semiconductor Device Test Chamber

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20220102424A (en) 2021-01-13 2022-07-20 주식회사 엑시콘 Opening and closing apparatus for chamber

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