KR101806486B1 - Method and computer readable recording medium for preparing surface and interfacial sample of thin layer materials - Google Patents

Abstract

The present invention relates to a method of pretreating a surface and an interface sample of a thin film material, comprising: acquiring user interface information for acquiring physical property information and slicing thickness information of a sample; A sample holder unit operation control process for controlling the operation of the sample holder unit so that the sample holder unit can be fixedly coupled with the sample to reciprocate in the first direction; A selection and control signal generation process for generating blade selection information, a first motor control signal, and a second motor control signal corresponding to the obtained slicing thickness information or the obtained physical property information; A blade selection unit operation control process of controlling operation of the blade selection unit to select one of the plurality of blades according to the generated blade selection signal; And controlling the operation of the first driving motor to move the sample holder unit according to the generated first motor control signal and controlling the operation of the second driving motor in accordance with the generated second motor control signal, A sample generating step of generating a sample having a thickness indicated by the obtained slicing thickness information from the sample by mutual movement of the sample holder part and the blade holder part; . ≪ / RTI >

Description

[0001] METHOD AND COMPUTER READABLE RECORDING MEDIUM FOR PREPARING SURFACE AND INTERFACIAL SAMPLE OF THIN LAYER MATERIALS [0002]

The present invention relates to a method for pretreating a surface of a thin film material and an interface sample, and more particularly, to a thin film material pretreatment method for analyzing a surface and an interface of a thin film material composite such as a display manufacturing industry, a film industry, And a method for pretreatment of an interface sample.

In general, various thin film materials are used in the display manufacturing industry, the film industry, and the bio industry. The thin film material is formed by bonding a plurality of composite materials. For example, thin film materials such as OLED thin films, polymers, polarizing films, engineering plastics, tires, graphine, rubber, textiles and paints can be made into a single product .

However, the products produced by the multi-layer bonding process of the composite material have a difficulty in producing defective products due to the generation of impurities between the surfaces or joints of the different materials due to various causes in the manufacturing process. In order to improve the quality of the composite material, in addition to the inspection to confirm the physical properties such as the peel strength and the shear strength of the composite material of the manufactured product to solve the above difficulty, .

In order to inspect the thin film of the composite material, that is, the adhesion surface of the multilayer, defects on the surface and inside are conventionally detected by using TOF-SIMS, XPS, FT-IR, EPMA, ESCA, Raman and SEM Respectively.

However, the conventional technique of confirming defects on the adhesive surface of the multilayer fails to inspect the defect of the adhesive surface in the multilayer. In addition, the conventional technique of confirming defects on the adhesive surface of the multilayer has the following problems. That is, the difference in the chemical composition of the film surface of the composite material and the inter-layer chemical composition, the depth dependence of the surface treatment effect, the distribution of the additive in the depth direction, The chemical state of the film interface and the deterioration state from the surface layer to the inner layer after the weathering test can not be analyzed, and thus there is a limit in improving the quality of the thin film material.

Therefore, it is required to develop a technique for removing unnecessary layers by a desired value without chemical change in order to inspect the bonding surface of the thin film material.

KR 1019990057251 A

The present invention aims at solving all of the above problems.

It is another object of the present invention to provide a device for removing a layer above a bonding surface by a desired value without chemical change in order to inspect the bonding surface of the multilayer thin film.

It is another object of the present invention to provide an apparatus which enables slanting from a surface of a multilayer thin film material to an interface.

A method of preparing a surface and an interface sample of a thin film material according to an embodiment of the present invention includes: acquiring user interface information for acquiring physical property information and slicing thickness information of a sample; A sample holder unit operation control process for controlling the operation of the sample holder unit so that the sample holder unit can be fixedly coupled with the sample to reciprocate in the first direction; A selection and control signal generation process for generating blade selection information, a first motor control signal, and a second motor control signal corresponding to the obtained slicing thickness information or the obtained physical property information; A blade selection unit operation control process of controlling operation of the blade selection unit to select one of the plurality of blades according to the generated blade selection signal; And controlling the operation of the first driving motor to move the sample holder unit according to the generated first motor control signal and controlling the operation of the second driving motor in accordance with the generated second motor control signal, A sample generating step of generating a sample having a thickness indicated by the obtained slicing thickness information from the sample by mutual movement of the sample holder part and the blade holder part; . ≪ / RTI >

A first displacement sensor operation control process of measuring a rotation angle of the first drive motor in response to an operation of the first drive motor to generate a first rotation angle measurement signal; A second displacement sensor operation control process of measuring a rotation angle of the second drive motor in response to an operation of the second drive motor to generate a second rotation angle measurement signal; And first and second drive motor positions for controlling the rotational position of the first drive motor and the rotational position of the second drive motor through feedback control referring to the first rotational angle measurement signal and the second rotational angle signal, Control process; As shown in FIG.

The plurality of blades may include at least two blades having different materials, hardnesses, and thicknesses.

The direction of the reciprocating motion in the first direction and the direction of the reciprocating motion in the second direction may be perpendicular to each other.

The blade may be formed of at least one of diamond, tungsten, and sapphire.

A sample image signal generating step of generating a sample image signal, including information for confirming a thickness, a surface, and an interface of the sample, by photographing the sample through the camera; A sample image signal processing step of analyzing the generated sample image signal to generate sample thickness information indicating the thickness of the sample; And a thickness deviation information calculation step of calculating thickness deviation information indicating a difference value between the thickness of the sample represented by the sample thickness information and the thickness indicated by the slicing thickness information; And the reference deviation range information stored in advance in the storage unit including the thickness indicated by the calculated thickness deviation information includes information indicating a range of tolerance thickness values corresponding to the slicing thickness information, A blade replacement signal generating step of generating a blade replacement signal instructing to select a blade having a thickness thinner or stronger than the selected one particular blade; A blade replacement step of controlling the blade selection unit to replace the existing selected one specific blade with another blade in accordance with the generated blade replacement signal; And controlling the operation of the first driving motor and the second driving motor such that the slicing is performed again using the replaced other blade. As shown in FIG.

A blade image signal generating step of generating a blade image signal by capturing a selected one of the specific blades through a camera equipped to the blade, the information including information for checking blade wear state of the blades; A blade image signal processing step of analyzing the generated blade image signal to generate abrasion information indicating the abrasion degree of the blades; The reference abrasion information stored in the storage unit including the degree of abrasion of the blade of the selected one blade indicated by the generated abrasion information indicates information indicating the abrasion degree of the blade of the blade in the usable state Generating a blade replacement signal that, when out of the degree of wear, instructs the blade selector to select another blade that is the same as the selected one particular blade or that is thinner or more rigid than the selected one particular blade A replacement signal generation process; A blade replacement step of controlling the blade selection unit to replace the existing one selected blade with the other blade in accordance with the generated blade replacement signal; And controlling the operation of the first driving motor and the second driving motor such that the slicing is performed again using the replaced other blade. As shown in FIG.

Wherein the sample is a multilayer thin film material to be inspected, and the physical property information of the sample includes material information indicating a material of each material constituting the thin film material, stiffness information indicating a degree of stiffness of the sample, And softness information indicating the softness information.

The slicing thickness information may be information indicating a target thickness of the sample to be obtained by sliding the sample to the one specific blade.

The selection and control signal generation process may include generating motor control signal information that is stored in advance in the storage unit, the first and second motors being mapped with at least one of the slicing thickness information, the material information, the rigidity information, Wherein the control unit generates the first motor control signal and the second motor control signal by further referring to the slice thickness information, the material information, the rigidity information, And blade selection signals that are mapped to at least one of the soft information, to generate the blade selection information.

On the other hand, the information on the surface of the thin film material and the method of pretreatment of the interface sample can be stored in a computer-readable recording medium. Such a recording medium includes all kinds of recording media in which programs and data are stored so that they can be read by a computer system. Examples of the storage medium include a ROM, a Random Access Memory, a CD, a DVD, a magnetic tape, a floppy disk, an optical data storage device, an embedded multimedia card (eMMC) . Such a recording medium may also be distributed over a networked computer system so that computer readable code in a distributed manner can be stored and executed.

The present invention can remove the layer above the adhesive surface by a desired value without chemical change in order to inspect the adhesive surface of the multilayer thin film.

The present invention also provides a method for manufacturing a multilayer thin film material by providing a sloped cut surface of a thin film for defect inspection on a joint surface of a multilayer thin film material, thereby providing a chemical composition difference between the film surface and the inside, a depth dependency of a surface treatment effect, The quality of the thin film material can be improved since the diffusion state of the chemical species from the other layer, the chemical state of the film interface, and the degradation state from the surface layer portion to the inner layer surface after the weathering test can be analyzed.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a surface and interface sample pretreatment method of a thin film material according to embodiments of the present invention. FIG.
Fig. 2 is a view showing the state of the blade in the surface and interface sample pretreatment method of the thin film material according to the embodiments of the present invention. Fig.
3 is a schematic block diagram of a surface and interface sample preprocessing method of a thin film material according to embodiments of the present invention.
4 is a view showing an operating state of a surface and an interface sample preprocessing method of a thin film material according to embodiments of the present invention.

The following detailed description of the invention refers to the accompanying drawings, which illustrate, by way of illustration, specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention. It should be understood that the various embodiments of the present invention are different, but need not be mutually exclusive. For example, certain features, structures, and characteristics described herein may be implemented in other embodiments without departing from the spirit and scope of the invention in connection with an embodiment. It is also to be understood that the position or arrangement of the individual components within each disclosed embodiment may be varied without departing from the spirit and scope of the invention. The following detailed description is, therefore, not to be taken in a limiting sense, and the scope of the present invention is to be limited only by the appended claims, along with the full scope of equivalents to which such claims are entitled, if properly explained. In the drawings, like reference numerals refer to the same or similar functions throughout the several views.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings, so that those skilled in the art can easily carry out the present invention.

FIG. 1 is a schematic view showing a method of pretreating a surface and an interface sample of a thin film material according to embodiments of the present invention. FIG. 3 is a schematic view of a method of pretreating a surface and an interface sample of a thin film material according to embodiments of the present invention And Fig.

1 and 3, a preprocessing apparatus 100 according to an embodiment of the present invention includes a user interface unit 110, a sample holder unit 120, a blade selecting unit 130, a blade holder unit 140, A motor unit 150, a sensor unit 160, a storage unit 170, a camera unit 180, and a control unit 190.

The user interface unit 110 may acquire physical property information and slice thickness information of the sample under the control of the controller 190.

The sample according to embodiments of the present invention may refer to a thin film material of a multilayer to be inspected.

The physical property information of the sample according to the embodiments of the present invention includes material information indicating the material of each material constituting the thin film material formed by stacking the respective materials, stiffness information indicating the degree of stiffness of the sample, And softness information.

The slicing thickness information according to the embodiments of the present invention may mean information indicating the thickness of the sample desired by the user, that is, information indicating the target thickness of the sample to be obtained by sliding the sample S with the blade (B) . The user can set the thickness of the sample to be finally obtained by setting the slicing thickness information. For example, the user can set the sample thickness to 250 nm, thereby making a sample having a thickness of 250 nm. Further, by adjusting the thickness of the sample through the setting of the slicing thickness information, the thin film having a specific thickness of the sample can be easily removed without chemical change. The user proceeds the defect inspection of the joint surface of the multilayer thin film material through the sample made to the desired thickness, so that the chemical composition of the film surface and the inside, the depth dependency of the surface treatment effect, the distribution of the additive in the depth direction, It is possible to analyze the state of diffusion of the chemical species from the surface layer, the chemical state of the film interface, and the degradation state from the surface layer to the inner layer after the weathering test, so that the quality of the thin film material can be improved.

The sample holder 120 may be formed to allow the sample S to be fixedly coupled and reciprocated in the first direction under the control of the controller 190.

More specifically, the sample holder portion 120 can be combined with the sample S to fix the sample S so as not to be separated by an external force. In addition, the sample holder 120 may be formed to have a shape capable of reciprocating motion in the horizontal direction or the vertical direction while being fixedly coupled to the sample S.

The blade selecting unit 130 includes a blade accommodating space (not shown) capable of accommodating a plurality of blades B under the control of the controller 190, One specific blade (B) can be selected according to the selected blade selection signal.

In addition, the blade selecting unit 130 can support the selected specific blade (B) to be fixedly coupled to the blade holder unit 140.

More specifically, the blade selecting unit 130 selects a sample having a thickness indicated by the slice thickness information obtained at the user interface unit 110 from the sample S, It is possible to select one specific blade (B) among the plurality of blades provided with the blade accommodation space according to the selection signal. Thereafter, the blade selecting unit 130 can support one selected blade to be fixedly coupled to the blade holder unit 140.

The blade according to embodiments of the present invention may include at least one of diamond, tungsten, and sapphire.

The blade selection signal according to the embodiments of the present invention can be generated by the controller 190 referring to the blade selection information stored in the storage unit 170 in advance.

The blade selection information according to embodiments of the present invention includes at least one of the slice thickness information obtained in the user interface unit 110, the material information included in the physical property information, the rigidity information, and the soft information, .

The plurality of blades according to embodiments of the present invention may include at least two blades having different materials, hardnesses, and thicknesses.

The blade holder unit 140 may be formed so that one selected blade B is fixedly coupled to the blade selecting unit 130 under the control of the controller 190 and reciprocating motion in the second direction is possible.

More specifically, the blade holder portion 140 can fix one specific blade B so as not to be separated by an external force in combination with one specific blade (B). The blade holder 140 may be formed to have a shape capable of reciprocating motion in a horizontal direction or a vertical direction in a state where one specific blade B is fixedly coupled.

The direction of reciprocation of the sample holder part 120 in the first direction and the direction of reciprocation of the blade holder part 140 in the second direction according to the embodiments of the present invention may be perpendicular to each other. For example, if the sample holder part 120 is formed in a shape having a structure capable of vertically reciprocating motion, the blade holder part 140 can be formed in a structure capable of reciprocating horizontally .

The motor unit 150 may include a first drive motor 151 and a second drive motor 152.

The first drive motor 151 may move the sample holder 120 in the first direction reciprocating motion according to the control-first motor control signal of the controller 190. [

The second drive motor 152 may move the blade holder 140 in the second direction reciprocating motion according to the control-second motor control signal of the controller 190.

For example, the motor unit 150 moves the sample holder unit 120 and the blade holder unit 140 to reciprocate in the first direction and reciprocate in the second direction, respectively, under the control of the controller 190, The slice thickness information obtained at the user interface unit 110 is obtained by using one specific blade B fixedly coupled to the blade holder unit 140 with respect to the sample S fixedly coupled to the sample holder unit 120 A sample having a target thickness of the sample to be formed can be formed. That is, one blade of the specific blade (B) fixedly coupled to the blade holder part 140 can slice a part of the sample S fixedly coupled to the sample holder part 120 to produce a sample.

More specifically, FIG. 2 is a diagram showing the state of the blades in the surface and interface sample preprocessing method of the thin film material according to the embodiments of the present invention.

The operation of the motor unit 150 is controlled such that the inclination angle of the blade B and the moving direction of the sample S are parallel to each other under the control of the controller 190, It is preferable that the center axis and the movement axis of the sample S are controlled to have a predetermined angle. For this purpose, the blade holder unit 120 is formed to have a structure that can be automatically moved according to the driving of the second driving motor 152 according to the second motor control signal of the controller 190, It is obvious that the blade 120 can be formed to include the structure in which the angle of the blade B fixed to the holder portion 120 can be adjusted.

Referring to FIG. 2B, when the center axis of the blade B is parallel to the moving axis of the sample S, pressure is applied to the sample S when the sample S is sliced, So that it becomes difficult to cut to a uniform thickness.

The first motor control signal and the second motor control signal according to the embodiments of the present invention can be generated by the controller 190 referring to the motor control signal information stored in advance in the storage unit 170. [

The motor control signal information according to embodiments of the present invention may include at least one of a slip thickness information obtained at the user interface unit 110, material information included in physical property information, a first motor control Information and second motor control information.

The sensor unit 160 may include a displacement sensor unit 161, a load cell sensor 162, and a distance sensor 163.

The displacement sensor unit 161 may include a first displacement sensor 161-1 and a second displacement sensor 161-2.

The first displacement sensor 161-1 may generate a first rotation angle measurement signal by measuring the rotation angle of the motor unit 150 according to the operation of the first drive motor 151 under the control of the controller 190 have. The first displacement sensor outputs a rotation angle measurement signal according to the operation of the first drive motor 151 and can be integrally formed with the first drive motor 151. [

The second displacement sensor 161-2 may generate a second rotation angle measurement signal by measuring the rotation angle of the motor unit 150 according to the operation of the second drive motor 152 under the control of the controller 190 have. The second displacement sensor outputs a rotation angle measurement signal according to the operation of the second drive motor 152 and can be formed integrally with the second drive motor 152. [

More specifically, the displacement sensor unit 161 measures the rotation angle of the motor unit 150 according to the operation of the first drive motor 151 and the second drive motor 152 under the control of the controller 190 The first rotation angle measurement signal and the second rotation angle measurement signal, respectively. The displacement sensor unit 161 outputs a first rotation angle measurement signal and a second rotation angle measurement signal, which are generated so that the control unit 190 can refer to the motor control signal-the first motor control signal or the second motor control signal- To the control unit 190 in real time. The motor drive unit 191 of the control unit 190 controls the operation of the first drive motor 151 of the motor unit 150 and the operation of the first drive motor 151 of the motor unit 150 through the feedback control using the first rotation angle measurement signal and the second rotation angle measurement signal, The rotational position of the motor can be precisely controlled.

The load cell sensor 162 can measure the peeling force (bonding force between layers) of the sample S in the multilayer bonded state under the control of the control unit 190 to generate the peeling force value. The control unit 190 can refer to the value of the peeling force generated by the load cell sensor 162 when generating the sample using the blade B with respect to the sample S. [

The distance sensor 163 can generate the distance value between the sample S and the blade B in real time under the control of the controller 190 and transmit the distance value to the controller 190. The control unit 190 can refer to the distance value generated and transmitted in real time from the distance sensor when the sample (S) is generated using the blade (B).

The storage unit 170 may store motor control signal information, blade selection information, reference deviation range information, and reference wear rate information in advance under the control of the control unit 190.

The reference deviation range information according to the embodiments of the present invention is information indicating a range of tolerance thickness values corresponding to the slicing thickness information.

The reference wear rate information according to the embodiments of the present invention is information indicating the wear degree of the blades of the blades in a usable state.

The control unit 190 may generate blade selection information corresponding to the slice thickness information or physical property information obtained in the user interface unit 110. [

Thereafter, the control unit 190 can control the operation of the blade selecting unit 130 so that one specific blade is selected in the generated blade selecting information.

More specifically, the control unit 190 can extract blade selection information corresponding to the slicing thickness information obtained from the user interface unit 110 among the blade selection information stored in advance in the storage unit 170 have. Thereafter, the control unit 190 can generate the blade selection information with reference to the extracted blade selection information. Thereafter, the control unit 190 transmits the generated blade selection information to the blade selection unit 130, and controls the operation to select one specific blade according to the blade selection signal received by the blade selection unit 130 .

The controller 190 may generate a first motor control signal and a second motor control signal corresponding to the slice thickness information or physical property information obtained in the user interface unit 110. [ More specifically, among the motor control signal information stored in advance in the storage unit 170, the controller 190 controls the first motor control information corresponding to the slicing thickness information obtained in the user interface unit 110, Information can be extracted. Thereafter, the control unit 190 refers to the extracted first motor control information to generate a first motor control signal for controlling the operation of the first driving motor 151, and refers to the extracted second motor control information The second motor control signal for controlling the operation of the two-drive motor 152 can be generated. Thereafter, the control unit 190 transmits the generated first motor control signal to the first driving motor 151 provided in the motor unit 150, and supplies the generated second motor control signal to the motor unit 150 To the second drive motor (152).

The control unit 190 controls the first drive motor 151 of the motor unit 150 that receives the first motor control signal to move the sample holder unit 120 in accordance with the first motor control signal , And the second drive motor 152 of the motor unit 150 which receives the second motor control signal moves the blade holder unit 140 in accordance with the second motor control signal.

The control unit 190 controls operations of the first driving motor 151 and the second driving motor 152 to control the operation of the sample S by mutual movement of the sample holder unit 120 and the blade holder unit 140. [ The slice thickness information obtained from the user interface unit 110 may be generated from the slice thickness information.

More specifically, FIG. 4 is a diagram showing an operating state of the surface and interface sample preprocessing method of the thin film material according to the embodiments of the present invention.

4, the controller 190 controls the second driving motor 152 of the driving unit 150 according to the second motor control signal generated corresponding to the slicing thickness information obtained by the user interface unit 110, It is possible to control the blade holder portion 140 to move so that the blade B is positioned in the inner region by the predetermined thickness at the front end of the sample S. [

The control unit 190 controls the first driving motor 151 of the driving unit 150 to move to the sample holder unit 150 according to the first motor control signal generated corresponding to the slicing thickness information obtained by the user interface unit 110 120 so that the blade slides the front end of the sample S to produce a sample having a thickness indicated by the slicing thickness information.

The control unit 190 controls the operation of the second driving motor 151 of the motor driving unit 150 so that the blade holder unit 140 is returned to the home position so that the blade B is separated from the sample S can do.

The control unit 190 controls the operation of the first driving motor 151 of the motor driving unit 150 to control the sample holder unit 120 to be positioned in the lower direction of the blade B One cycle of generating the sample can be performed.

In addition, the controller 190 repeats the above operations by a cycle set value obtained through the user interface unit 110 to form a sample for inspection of a thin film material or remove a layer having a desired thickness from the thin film material.

4, the first drive motor 151 moves the sample holder unit 120 and the second drive motor 152 moves the blade holder unit 140. However, in the embodiment described above, The first and second driving motors 151 and 152 may be configured to move the sample holder unit 120 such that the sample holder unit 120 is reciprocated in the first direction and in the second direction, Can be configured. The motor unit 150 further includes motors other than the first driving motor 151 and the second driving motor 152 to move the sample holder unit 120 and move the blade holder unit 140 precisely Can be controlled.

4, the preprocessing apparatus 100 may further include a camera unit 180 and an image processing unit (not shown). The preprocessing apparatus 100 may determine whether the sample is in a predetermined position, It is possible to judge the blade condition and determine the thickness of the sample.

The camera unit 180 may generate a sample image signal or a blade image signal by photographing the sample under the control of the control unit 190. [ Thereafter, the camera unit can transmit the generated sample image signal or the blade image signal to the image processing unit.

The sample image signal according to embodiments of the present invention may include information for identifying the thickness, surface, and interface of the sample.

The blade image signal according to the embodiments of the present invention may include information that can confirm the wear state of the blade of the blade B fixedly coupled to the current blade holder unit 140. [

The image processing unit may analyze the sample image signal generated by the camera unit 180 to generate sample thickness information indicating the thickness of the sample. Thereafter, the image processing unit may transmit the generated sample thickness information to the control unit 190.

When the sample thickness information is transmitted from the image processing unit, the controller 190 obtains thickness deviation information indicating the difference between the thickness of the sample indicated by the received sample thickness information and the thickness indicated by the slice thickness information transmitted from the user interface unit 110 Can be calculated. Thereafter, the control unit 190 can determine whether the calculated thickness deviation information is out of the reference deviation range information stored in advance in the storage unit 170. If it is determined that the thickness deviation information is out of the reference deviation range information, the controller 190 determines that the blade selection unit 130 selects a blade having a thinner thickness or a stiffer blade than the one selected blade To generate a blade replacement signal. Then, the control unit 190 transmits the generated blade replacement signal to the blade selection unit 130 so that the blade selection unit 130 can control to replace the existing selected one specific blade with another blade in accordance with the blade replacement signal have. Thereafter, the control unit 190 can control the operation of the motor unit 150 such that the slicing is performed again using the replaced blade.

In addition, the image processing unit may analyze the blade image signal generated by the camera unit 180 and generate abrasion information indicating abrasion of the blades. Thereafter, the image processing unit can transmit the generated wear rate information to the control unit 190.

When the wear degree information is transmitted from the image processing unit, the controller 190 determines whether the degree of abrasion of one currently selected blade indicated by the received wear rate information exceeds the wear degree indicated by the reference wear rate information previously stored in the storage unit 170 It can be judged. If it is determined that the degree of abrasion of the blade of the specific blade is out of the degree of abrasion indicated by the reference wear rate information, the controller 190 determines that the blade selecting unit 130 is the same as one selected blade It is possible to generate a blade replacement signal that commands to select another blade that is thinner or more rigid than the other. Then, the control unit 190 transmits the generated blade replacement signal to the blade selection unit 130 so that the blade selection unit 130 can control to replace the existing selected one specific blade with another blade in accordance with the blade replacement signal have. Thereafter, the control unit 190 can control the operation of the motor unit 150 such that the slicing is performed again using the replaced blade.

Meanwhile, the methods according to the embodiments of the present invention described above can be implemented in the form of program instructions that can be executed through various computer means and recorded in a computer-readable medium. The computer-readable medium may include program instructions, data files, data structures, and the like, alone or in combination. The program instructions recorded on the medium may be those specially designed and configured for the present invention or may be available to those skilled in the art of computer software. Examples of computer-readable media include magnetic media such as hard disks, floppy disks and magnetic tape; optical media such as CD-ROMs and DVDs; magnetic media such as floppy disks; Magneto-optical media, and hardware devices specifically configured to store and execute program instructions such as ROM, RAM, flash memory, and the like. Examples of program instructions include machine language code such as those produced by a compiler, as well as high-level language code that can be executed by a computer using an interpreter or the like. The hardware devices described above may be configured to operate as one or more software modules to perform the operations of the present invention, and vice versa.

It will also be appreciated that embodiments of the present invention may be implemented in hardware, software, or a combination of hardware and software. Such arbitrary software may be stored in a memory such as, for example, a volatile or non-volatile storage device such as a storage device such as ROM or the like, or a memory such as a RAM, a memory chip, a device or an integrated circuit, , Or a storage medium readable by a machine (e.g., a computer), such as a CD, a DVD, a magnetic disk, or a magnetic tape, as well as being optically or magnetically recordable. It will be appreciated that the storage unit, which may be included in the object Internet device or service server, is an example of a machine-readable storage medium suitable for storing programs or programs containing instructions embodying the embodiments of the present invention. Accordingly, the present invention includes a program including code for implementing the system or method described in any claim herein, and a machine-readable storage medium storing such a program. In addition, such a program may be electronically transported through any medium such as a communication signal transmitted via a wired or wireless connection, and the present invention appropriately includes the same.

While the present invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments. Therefore, the scope of the present invention should not be limited by the described embodiments but should be determined by the equivalents of the claims and the claims.

100: preprocessing unit 110: user interface unit
120: sample holder unit 130: blade selection unit
140: blade holder part 150: motor part
151: first drive motor 152: second drive motor
160: sensor unit 161: displacement sensor unit
161-1: first displacement sensor 161-2: second displacement sensor
162: load cell sensor 163: distance sensor
170: storage unit 180: camera unit
190: Control part B: Blade
S: Sample

Claims (11)

A user interface information acquiring step of acquiring physical property information and slicing thickness information of a sample;
A sample holder unit operation control process for controlling the operation of the sample holder unit so that the sample holder unit can be fixedly coupled with the sample to reciprocate in the first direction;
A selection and control signal generation process for generating blade selection information, a first motor control signal, and a second motor control signal corresponding to the obtained slicing thickness information or the obtained physical property information;
A blade selection unit operation control process for controlling the operation of the blade selection unit to select one of the at least two blades having different materials, hardnesses, and thicknesses according to the generated blade selection signal;
Controls the operation of the first driving motor to move the sample holder unit according to the generated first motor control signal and controls the operation of the second driving motor according to the generated second motor control signal to move the blade holder unit And a sample generation step of generating a sample having a thickness indicated by the obtained slice thickness information from the sample by mutual movement of the sample holder part and the blade holder part,
A sample image signal generation step of generating a sample image signal (including information for identifying the thickness, surface, and interface of the sample) by photographing the sample through the camera unit;
A sample image signal processing step of analyzing the generated sample image signal to generate sample thickness information indicating the thickness of the sample; And
A thickness deviation information calculation step of calculating thickness deviation information indicating a difference value between the thickness of the sample represented by the generated sample thickness information and the thickness indicated by the slicing thickness information;
And the reference deviation range information stored in advance in the storage unit including the thickness indicated by the calculated thickness deviation information includes information indicating a range of tolerance thickness values corresponding to the slicing thickness information, A blade replacement signal generating step of generating a blade replacement signal instructing to select a blade having a thickness thinner or stronger than the selected one particular blade;
A blade replacement step of controlling the blade selection unit to replace the existing selected one specific blade with another blade in accordance with the generated blade replacement signal; And
And controlling the operation of the first drive motor and the second drive motor such that the slicing is performed again using the replaced other blade,
A blade image signal generating step of generating a blade image signal by capturing a selected one of the blades through a camera unit, the blade image signal including information for checking blade wear status of the blades;
A blade image signal processing step of analyzing the generated blade image signal to generate abrasion information indicating the abrasion degree of the blades;
A reference wear information previously stored in a storage unit having a degree of wear of a blade of the selected one blade indicated by the wear information generated; and information indicating a wear degree of a blades blade in a usable state. , The blade selector is configured to select a blade that is the same as the selected one of the selected blades or has a thickness that is thinner than the selected one of the selected blades or that is stiffer than the selected one of the blades Signal generation process;
A blade replacement step of controlling the blade selection unit to replace the existing one selected blade with the other blade in accordance with the generated blade replacement signal; And
And controlling the operations of the first driving motor and the second driving motor such that the slicing is performed again using the replaced other blade
Wherein the slicing thickness information is information indicating a target thickness of the sample to be obtained by sliding the sample with the one specific blade,
Measuring a distance value between the sample and the blade by a distance sensor and transmitting the same to a control unit; And
Further comprising the step of measuring the value of the peeling force of the sample in the multilayer bonding state by the load cell sensor and transmitting the measured value to the control unit.
The method according to claim 1,
A first displacement sensor operation control process of measuring a rotation angle of the first drive motor in response to an operation of the first drive motor to generate a first rotation angle measurement signal;
A second displacement sensor operation control process of measuring a rotation angle of the second drive motor in response to an operation of the second drive motor to generate a second rotation angle measurement signal; And
A first and a second drive motor position control for controlling a rotation position of the first drive motor and a rotation position of the second drive motor through feedback control referring to the first rotation angle measurement signal and the second rotation angle signal, process;
Further comprising the step of pre-treating the surface and interface samples of the thin film material. delete The method according to claim 1,
Wherein the direction of the reciprocating motion in the first direction and the direction of reciprocating motion in the second direction are perpendicular to each other. The blade according to claim 1,
Diamond, tungsten, and sapphire. 2. A method for pretreating a surface and an interface sample of a thin film material, comprising: delete delete The method according to claim 1,
Wherein the sample is a multilayer thin film material to be inspected, and the physical property information of the sample includes material information indicating a material of each material constituting the thin film material, stiffness information indicating a degree of stiffness of the sample, And at least one of softness information indicating the surface of the thin film material and the softness information indicating the surface of the thin film material. delete 9. The method of claim 8, wherein the selection and control signal generation comprises:
The motor control signal information previously stored in the storage unit, including first and second motor control signals mapped to at least one of the slicing thickness information, the material information, the stiffness information, and the soft information, To generate the first motor control signal and the second motor control signal, and to map the blade selection information stored in advance in the storage unit to at least one of the slicing thickness information, the material information, the stiffness information, Wherein the blade selection information is generated with reference to the blade selection signals. A computer-readable recording medium recording a program for performing the method according to any one of claims 1, 2, 4, 5, 8, and 10 on a computer.

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