KR101797655B1

KR101797655B1 - Graphene Synthesis Apparatus

Info

Publication number: KR101797655B1
Application number: KR1020150164833A
Authority: KR
Inventors: 류재철; 원동관
Original assignee: 해성디에스 주식회사
Priority date: 2015-11-24
Filing date: 2015-11-24
Publication date: 2017-11-15
Also published as: KR20170060408A

Abstract

One embodiment of the present invention provides a method of fabricating a semiconductor device, comprising: a chamber defining a space in which graphene is synthesized in a catalyst metal; A first heating unit disposed in the chamber and heating the catalyst metal and the carbon-containing gas using radiant heat; And a second heating unit disposed inside the chamber and heating the catalyst metal using a joule heat.

Description

Graphene Synthesis Apparatus < RTI ID = 0.0 >

Embodiments of the present invention relate to a graphene synthesizer.

Generally, graphite has a structure in which a plate-shaped two-dimensional graphene sheet in which carbon atoms are connected in a hexagonal shape is laminated. Recently graphene was stripped from graphite and its properties were investigated.

The most notable feature is that when electrons move from graphene, the mass of electrons flows like zero. This means that the electrons flow at the speed at which the light travels in the vacuum, that is, the light flux. Graphene also has an unusual half-integer quantum Hall effect on electrons and holes. Also, to date, the electron mobility of graphene is known to have a high value of about 20,000 to 50,000 cm 2 / Vs.

Chemical vapor deposition (CVD) is used as a method for synthesizing graphene. In the chemical vapor deposition method, a metal thin plate made of a catalytic metal such as copper or platinum is placed in an inner space of a graphene synthesis chamber, a hydrocarbon such as methane or ethane is injected into an inner space of a graphene synthesis chamber, Is heated to a high temperature to synthesize graphene on the surface of the thin metal plate.

As mentioned above, graphene has very useful properties, but it is difficult to synthesize optimum graphene in a high temperature / high vacuum environment to synthesize graphene.

Korean Patent Publication No. 2012-0001591 (2012.04.04) "Manufacturing apparatus and manufacturing method of graphene"

An embodiment of the present invention aims to provide a graphene synthesizing apparatus capable of mass production and capable of producing high quality graphene.

According to an embodiment of the present invention, there is provided a method of manufacturing a semiconductor device, including: a chamber defining a space in which graphene is synthesized with a catalyst metal; a gas supply unit supplying a gas containing carbon into the chamber; A first heating unit for heating the carbon-containing gas; And a second heating unit disposed inside the chamber and heating the catalyst metal using a joule heat.

In one embodiment of the present invention, the second heating unit includes a pair of conductive rollers that are in contact with the catalyst metal in a spaced apart relationship and serve as rollers for moving the catalyst metal, The apparatus may further include a current supply unit for supplying current to the catalyst metal through the pair of conductive rollers.

In the present embodiment, the apparatus further comprises a catalytic metal supply portion for supplying the catalytic metal into the chamber in a roll-to-roll manner during graphene synthesis, wherein the first heating portion and the second heating portion comprise a catalyst metal As shown in FIG.

In one embodiment of the present invention, the chamber further comprises at least one blocking wall dividing a first region in which the first heating section is disposed and a second region in which the second heating section is disposed, May be made of a heat insulating member.

In one embodiment of the present invention, the first heating unit may include a lamp provided on at least one side surface of the chamber and heating the catalyst metal by emitting light toward the catalyst metal.

According to an embodiment of the present invention, the plasma processing apparatus may further include a susceptor portion arranged to face the catalytic metal so as to face each other and to absorb heat radiated from the first heating portion and to discharge the catalytic metal toward the catalytic metal have.

According to an embodiment of the present invention, a cooling unit disposed inside the chamber and disposed between the first heating unit and the second heating unit to cool the catalyst metal discharged from the first heating unit .

In one embodiment of the present invention, the heating by the first heating unit and the heating by the second heating unit are sequentially performed and can be performed at substantially the same first temperature.

In one embodiment of the present invention, the graphene synthesizing apparatus cools the catalyst metal at a second temperature before heating by the second heating section after heating by the first heating section, and the second temperature And may be the maximum temperature among the temperatures lower than the first temperature and capable of graphene synthesis.

Another embodiment of the present invention is directed to a plasma processing apparatus comprising: a first chamber for heating a catalytic metal using radiant heat; And a second chamber that heats the catalyst metal after being heated through the first chamber and then heats the catalyst metal that has been cooled, wherein the second chamber heats by using a joule heat.

In another embodiment of the present invention, a pair of second heating parts disposed in the second chamber and contacting the catalytic metal in a state of being spaced apart from each other; And a current supply unit for supplying current to the catalyst metal through the pair of second heating units.

In another embodiment of the present invention, the pair of second heating portions may be a pair of conductive rollers serving as rollers for moving the catalyst metal.

According to another embodiment of the present invention, there is further provided a catalytic metal supply unit for sequentially supplying the catalytic metal to the first chamber and the second chamber, wherein the catalytic metal supply unit includes: Catalyst metal can be supplied.

In another embodiment of the present invention, a first heating unit may be provided on at least one side of the first chamber and may heat the catalyst metal by emitting light toward the catalyst metal.

In another embodiment of the present invention, heating by the first chamber and heating by the second chamber are sequentially performed at substantially the same first temperature, The catalyst metal is cooled at a second temperature before the heating by the second heating unit after heating by the heating unit, and the second temperature is lower than the first temperature and may be the maximum temperature among the temperatures at which graphene synthesis is possible .

Other aspects, features, and advantages other than those described above will be apparent from the following detailed description, claims, and drawings.

According to the embodiments of the present invention as described above, high-quality graphene having a dense structure can be synthesized by two graphene-forming processes.

FIGS. 1A and 1B are cross-sectional views schematically showing a state of a metal thin plate used for synthesizing graphene in a graphene synthesis chamber according to an embodiment of the present invention. FIG.
2 is a side cross-sectional view schematically showing a graphene synthesizing apparatus according to a first embodiment of the present invention.
FIG. 3 is a graph schematically showing the temperature condition of the graphene synthesizing apparatus according to the embodiments of the present invention, according to time (t).
4 is a side cross-sectional view schematically showing a graphene synthesizing apparatus according to a second embodiment of the present invention.
5 is a side cross-sectional view schematically showing a graphene synthesizing apparatus according to a third embodiment of the present invention.
6 is a side cross-sectional view schematically showing a graphene synthesizing apparatus according to a fourth embodiment of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The present invention is capable of various modifications and various embodiments, and specific embodiments are illustrated in the drawings and described in detail in the detailed description. The effects and features of the present invention and methods of achieving them will be apparent with reference to the embodiments described in detail below with reference to the drawings. However, the present invention is not limited to the embodiments described below, but may be implemented in various forms.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings, wherein like reference numerals refer to like or corresponding components throughout the drawings, and a duplicate description thereof will be omitted .

It is to be understood that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In the present specification, the singular form includes plural forms unless otherwise specified in the specification. As used in the specification, "comprises" and / or "comprising" do not exclude the presence or addition of the stated components, steps, operations, and / or elements. The terms first, second, etc. may be used to describe various elements, but the elements should not be limited by terms. Terms are used only for the purpose of distinguishing one component from another.

In the present specification, when various components such as layers, films, regions, plates, and the like are referred to as being "on" another component, it is to be understood that not only is there a " . Also, for convenience of explanation, the components may be exaggerated or reduced in size. For example, the size and thickness of each component shown in the drawings are arbitrarily shown for convenience of explanation, and thus the present invention is not necessarily limited to those shown in the drawings.

FIGS. 1A and 1B are cross-sectional views schematically showing a state of a catalyst metal used in synthesis of graphene in a graphene synthesis chamber according to an embodiment of the present invention.

The "catalytic metal 10" herein may be formed of a single metal layer as shown in Fig. 1A, or may be formed on the base layer 20 as shown in Fig. 1B. The catalytic metal 10 functions as a catalyst for the graphitization and functions to help the carbon components contained in the source gas combine to form a hexagonal plate-like structure.

For example, the catalytic metal 10 may be at least one selected from the group consisting of Ni, Co, Fe, Pt, Au, Ag, Al, Cr, Cu, Mg, Mn, Mo, Rh, Si, Ta, Ti, W, At least one metal selected from the group consisting of palladium (V), palladium (Pd), yttrium (Y), and zirconium (Zr).

The base layer 20 can be made of a material having heat resistance. The catalytic metal 10 may be formed on the base layer 20 by using a sputtering apparatus, an electron beam evaporator, or the like. Base layer 20 is, for _{example, SiO 2, Si 3 N 4} , SiON, SIOF, BN, HSQ (hydrogen silsesquiloxane), xerogels (xerogel), airgel (aero gel), poly-naphthalene (poly naphthalene), Amorphous carbon fluoride (a-CF), SiOC, MSQ, black diamond and the like can be used.

As used herein, the term "graphene" refers to a graphene in which a plurality of carbon atoms are covalently linked to one another to form a polycyclic aromatic molecule, wherein the carbon atoms linked by a covalent bond A 6-membered ring is formed as a basic repeating unit, but it is also possible to further include a 5-membered ring and / or a 7-membered ring. The graphene sheets thus form a single layer of covalently bonded carbon atoms (usually sp2 bonds). The graphene sheet may have a variety of structures, and such a structure may vary depending on the content of the five-membered ring and / or the seven-membered ring which may be contained in the graphene.

2 is a side cross-sectional view schematically showing a graphene synthesizing apparatus according to a first embodiment of the present invention. In FIG. 2, for convenience of explanation, the catalyst metal 10 is formed as a single metal layer.

2, a graphene synthesizing apparatus 1000 includes a chamber 100, a gas supply unit 110, a gas discharge unit 120, a first heating unit 130, a second heating unit 170, (180).

The chamber 100 has a substantially hexahedral shape, and the interior of the chamber 100 defines a space for synthesizing graphene in the catalyst metal 10. The chamber 100 may be made of a material such as SUS. A gas supply unit 110 for supplying a gas containing carbon to the inside of the chamber 100 is provided at one side of the chamber 100. The gas discharge unit 120 is provided on the opposite side of the gas supply unit 110, that is, on the other side of the chamber 100. Although one gas supply unit 110 and a gas discharge unit 120 are illustrated as being disposed in the chamber 100, the present invention is not limited thereto. For example, the gas supply part 110 and the gas discharge part 120 may be arranged so that gas flows in the same direction as the traveling direction of the catalytic metal 10, and the first area 100A and the second area (100C), respectively.

A gas containing carbon may be supplied to the inner space of the chamber 100 through the gas supply unit 110. [ The carbon-containing gas is a source gas for graphene formation, for example, carbon monoxide (CO), carbon dioxide (CO2), methane (CH4), ethane (C2H6), ethylene (C2H4), ethanol (C2H6O) , Propane (CH3CH2CH3), propylene (C3H6), butane (C4H10), butadiene, pentane CH3 (CH2) 3CH3, pentene (C5H10), cyclopentadiene (C5H6), hexane (C6H14), cyclohexane C6H6), and toluene (C7H8).

Meanwhile, the atmospheric gas may be introduced into the inner space of the chamber 100 through the gas supply unit 110. The atmospheric gas may include an inert gas such as helium (He) or argon (Ar), and / or a non-reacted gas such as hydrogen (H2) to keep the surface of the catalyst metal 10 clean.

The gas discharging unit 120 can discharge the generated residual gas to the outside after the graphene synthesis is performed.

By the opening and closing operations of the gas supplying unit 110 and the gas discharging unit 120, the vacuum state inside the chamber 100 can be maintained before the graphene synthesis is performed. For example, the inside of the chamber 100 can be evacuated by operating a vacuum pump (not shown) connected to the gas discharging part 120 in a state where the gas supplying part 110 is closed.

The first heating part 130 is disposed inside the chamber 100 and can heat the catalyst metal 10 and the carbon-containing gas using radiant heat. The first heating unit 130 may be disposed on at least one side of the chamber 100 to face at least one of the first surface of the catalyst metal 10 and the second surface opposite to the first surface.

The first heating unit 130 may include a lamp 131 that emits light including a near-infrared wavelength band. A reflecting surface 132 may be provided on one side of the lamp 131 so that most of the light emitted from the lamp 131 can be directed to the catalyst metal 10. [ The first heating unit 130 can heat the catalyst metal 10 to a predetermined temperature by controlling the output of the plurality of lamps 131. [

The graphene synthesizing apparatus 1000 according to the first embodiment of the present invention is disposed to face the catalytic metal 10 so as to be spaced apart from each other and absorbs heat emitted from the first heating unit 130, And a susceptor 140 for discharging the susceptor toward the substrate 10. The susceptor 140 may be arranged to face the first surface of the catalytic metal 10 and the second surface opposite to the first surface of the catalytic metal 10 so as to face each other. By providing the susceptor 140, it is possible to prevent an abrupt temperature rise of the catalytic metal 10 due to the light emitted from the first heating unit 130 and to prevent the temperature around the catalytic metal 10 from being increased To maintain the environment required for graphene synthesis for a relatively long period of time.

The second heating unit 170 is disposed inside the chamber 100 and can heat the catalyst metal 10 using Jule heating. The second heating portion 170 may include a pair of conductive rollers consisting of a first conductive roller 171 and a second conductive roller 172 and is in contact with the catalytic metal 10 in a state of being spaced apart from each other, The metal 10 can be moved by rolling. The second heating portion 170 may serve as a supporting roller for supporting the catalytic metal 10. [ In another embodiment, the second heating units 170 may be provided in pairs or more. In other words, two pairs may be provided to supply current to different regions of the catalyst metal 10. In the present invention, the number of the second heating parts 170 is not limited.

The current supply unit 180 can supply current to the catalyst metal 10 through the second heating unit 170. The second heating portion 170 has conductivity and can be in line contact (or surface contact) with the catalyst metal 10, so that a uniform current can be supplied to the catalyst metal 10. The current supply part 180 is connected to the second heating part 170, that is, the first conductive roller 171 and the second conductive roller 172 so as to have voltages of different polarities, The second conductive roller 172 can supply current to the catalytic metal 10 that is in contact. The catalytic metal 10 may be heated by joule heating when an electric current is supplied.

Here, Jule heating is a heat generated when a current flows through a resistor, and is proportional to the square of the current, the resistance, and the time (Q = I ² RT). In the graphene composition device according to the first embodiment of the present invention, When the current is supplied to the catalyst metal 10, the current can be generated due to the resistance of the graphene formed on the catalyst metal 10 and / or the catalyst metal 10. The graphene synthesis apparatus 1000 according to the first embodiment of the present invention can heat the catalyst metal 10 to a constant temperature by controlling the output of the current supply unit 180. [ The graphene synthesis apparatus 1000 according to the first embodiment of the present invention may further include a catalyst metal supply unit 151 for supplying the catalyst metal 10 into the chamber 100 in a roll- . The catalytic metal 10 supplied from the catalytic metal supply unit 151 may be accommodated by the catalytic metal containing unit 152 through the interior of the chamber 100.

The first heating unit 130 and the second heating unit 170 can heat the fixed catalyst metal 10 disposed inside the chamber 100. The first heating unit 130 and the second heating unit 170 may be sequentially disposed along the traveling direction of the catalytic metal 10 supplied in a roll-to-roll manner, and the first heating unit 130 130, and then the cooled catalyst metal 10 is heated again through the second heating unit 170 to synthesize graphene. The present invention is not limited to the roll-to-roll method, but for convenience of explanation, the case where the catalyst metal 10 is supplied in a roll-to-roll manner will be mainly described.

In this case, the chamber 100 may include a first region 100A in which the first heating unit 130 is disposed and a second region 100C in which the second heating unit 170 is disposed. In the first region 100A, And at least one blocking wall 105 dividing the first region 100A and the second region 100C. The blocking wall 105 may be made of a heat insulating material to prevent heat exchange between the first region 100A and the second region 100C.

3 is a graph schematically showing the temperature condition of the graphene synthesizing apparatus 1000 according to the embodiment of the present invention at time t.

The catalytic metal 10 is supplied to the first region 100A of the chamber 100 and can be first heated (A) through the first heating portion 130 which is heated using radiant heat. Thereafter, the catalyst metal 10 may be cooled (B) to a predetermined temperature, and then heated again (C) through the second heating portion 170. Carbon is absorbed into the catalyst metal by the first heating (A), and graphene can be synthesized while carbon is crystallized by the cooling (B) process. At this time, the first temperature I heated through the first heating unit 130 and the second heating unit 170 may be substantially the same. The first temperature I may vary depending on the type of gas, and may range, for example, from about 500 ° C to 1200 ° C.

The second temperature (II), which is the cooling temperature, is lower than the first temperature (I) but may have a temperature range at which carbon can be crystallized. The second temperature (II) may be a selected constant temperature among the temperature ranges over which carbon can be crystallized. The temperature range in which graphene synthesis is possible may be varied depending on the gas type, for example, about 550 ° C to 700 ° C when the gas is methane (CH 4) and about 300 ° C to 450 ° C when the gas is acetylene (C 2 H 2) Lt; 0 > C. In some embodiments, the second temperature (II) may be the maximum of the temperature range over which the carbon can crystallize, for example about 700 ° C if the gas is methane (CH 4), the gas is acetylene Lt; RTI ID = 0.0 > 450 < / RTI > Since the graphene synthesizing apparatus 1000 according to the first embodiment of the present invention cools the first heated catalyst metal to a maximum temperature in a temperature range in which graphene synthesis is possible, It is possible to reheat to the first temperature (I) in a short time with less energy.

The graphene synthesizing apparatus 1000 according to the first embodiment of the present invention can cool the catalyst metal 10 by controlling the on / off of the first heating unit 130. The first region 100A in which the first heating unit 130 is disposed and the second region 100C in which the second heating unit 170 are disposed are divided into the blocking wall 105 serving as the heat insulating member, Can not be achieved.

The graphene synthesizing apparatus according to the comparative example of the present invention can synthesize graphene to the catalyst metal through one heating and cooling process. At this time, the graphenes synthesized on the catalyst metal may not be dense and may not be synthesized, so that high-quality graphene can not be obtained. On the contrary, the graphene synthesizing apparatus 1000 according to the first embodiment of the present invention synthesizes seeds of graphene through the first heating unit 130, and then, through the second heating unit 170, The graphene can be synthesized in a dense manner over the entire area of the catalyst metal 10 by heating the catalyst metal 10 on which the seed of the pin is formed by the second heating (C). Therefore, the graphene synthesizing apparatus 1000 according to the first embodiment of the present invention can synthesize high-quality graphene by two graphening processes.

Meanwhile, the graphene synthesizing apparatus 1000 according to the first embodiment of the present invention can be applied to the graphene synthesizing apparatus 1000 of the present invention in the same manner as in the first heating and the second heating by radiant heat alone , It is possible to shorten the synthesis time of graphene. The heating method using radiant heat is required to heat up the whole chamber to a certain temperature, so that the heating time is longer than the method using the heating method using only the catalytic metal. Likewise, since the heating using the joule heat requires energy to heat only the catalytic metal, the same temperature condition can be realized with less power than in the case of heating using the radiant heat, so that the energy efficiency can be enhanced.

4 is a side cross-sectional view schematically showing a graphene synthesizing apparatus 2000 according to a second embodiment of the present invention.

4, the graphene synthesizer 2000 includes a chamber 200, a gas supply unit 210, a first heating unit 230, a second heating unit 270, a current supply unit 280, A metal supply part 251 and a second catalytic metal supply part 253. The graphene synthesizing apparatus 2000 according to another embodiment of the present invention includes a graphene synthesizing apparatus 2000 according to an embodiment except that the graphening apparatus 2000 includes a first catalyst metal supply unit 251 and a second catalyst metal supply unit 253. [ The same reference numerals are used for the same elements as those of FIG.

The graphene synthesizing apparatus 2000 includes the first catalyst metal supply section 251 for supplying the first catalyst metal 10A and the second catalyst metal supply section 253 for supplying the second catalyst metal 10B, The graphene can be synthesized in the first catalytic metal 10A and the second catalytic metal 10B.

5 is a side sectional view schematically showing a graphene synthesizing apparatus 3000 according to a third embodiment of the present invention.

5, the graphene synthesizing apparatus 3000 includes a chamber 100, a gas supply unit 110, a first heating unit 130, a second heating unit 170, a current supply unit 180, (351) and a cooling unit (390). Since the graphene synthesizing apparatus 3000 according to the third embodiment of the present invention is the same as the components of the graphene synthesizing apparatus 1000 according to the first embodiment except for the cooling section 390, It is omitted.

The cooling part 390 may be disposed inside the chamber 300 to cool the third area 300B of the chamber 300. [ In another embodiment, the cooling unit 390 may be disposed outside the chamber 300 to cool the interior of the chamber 300, but may be disposed in the frame of the chamber 300. In the present invention, the cooling unit 390 Is not limited to the position.

The cooling section 390 is disposed between the first region 300A in which the first heating section 330 is disposed and the second region 300C in which the second heating section 370 is disposed and the first heating section 330 The catalyst metal 10 can be cooled. The cooling part 390 may be formed as a flow path through which the cooling water can flow, and the flow path may be formed to surround the third area 300B of the chamber 300 and circulate. In another embodiment, the cooling section may be arranged to cool not only the third area 300B but also the entire interior of the chamber 300 including the first and second areas 300A and 300C, For convenience of explanation, the case where the cooling section 390 is disposed in the third region 300B will be mainly described.

The cooling water is rapidly cooled at a cooling rate of about 30 to 600 degrees centigrade per minute (30 to 600 degrees Celsius per minute) by the cooling water flowing through the cooling unit 390 to separate carbon from the catalyst metal 10 Graphene grains can be grown by crystallization. The third region 300B in which the cooling unit 390 is disposed is divided into the first region 300A and the second region 300C and the blocking wall 305 so that heat exchange is not performed.

The graphene synthesizing apparatus 3000 according to the third embodiment of the present invention can cool the catalytic metal 10 heated by the first heating unit 330 through the cooling unit 390 and then cool the second heating unit 370), it is possible to continuously synthesize graphene without stopping the catalyst metal 10 in the chamber 300. Further, the cooling temperature can be controlled more accurately than the temperature is controlled by the output of the first heating unit 330. [

6 is a side cross-sectional view schematically showing a graphene synthesizing apparatus 4000 according to a fourth embodiment of the present invention.

6, a graphene synthesizing apparatus 4000 according to a fourth embodiment of the present invention includes a first chamber 400, a first gas supply unit 410, a second gas supply unit 510, A second heating unit 570, a current supply unit 580, and a catalytic metal supply unit 451. The first heating unit 570 may include a first heating unit 430, a second heating unit 570, The graphene synthesizing apparatus 4000 according to the fourth embodiment of the present invention includes a first chamber 400 and a second chamber 500 instead of the chamber, (1000), and thus redundant description is omitted.

The first chamber 400 may heat the catalytic metal 10 supplied using radiant heat. The first chamber 400 may include a first heating unit 430 and a susceptor unit 440.

The first heating part 430 is provided on at least one side of the first chamber 400 and can emit light toward the catalytic metal 10 to thereby heat the catalytic metal 10. The susceptor 440 is disposed in the first chamber 400 so as to face the catalytic metal 10 while being spaced apart from each other and absorbs the heat radiated from the first heating unit 430, Lt; / RTI >

The second chamber 500 can heat the catalytic metal 10 using a joule heat. Here, the catalytic metal 10 may be the catalytic metal 10 that has been heated through the first chamber 400 and then cooled. The second chamber 500 may include a pair of second heating portions 570 and a current supply portion 580.

The second heating portion 570 is disposed inside the second chamber 500 and can be in contact with the catalytic metal in a state where they are spaced apart from each other. At this time, the pair of second heating parts 570 may be a pair of conductive rollers 571 and 572 serving as rollers for moving the catalyst metal. The second heating unit 570 transfers the current supplied from the current supply unit 580 to the catalytic metal 10 to enable heating of the catalytic metal 10 using the geothermal heat.

The arrangement of the first chamber 400 and the second chamber 500 is not limited, but when the catalytic metal supply part 451 for supplying the catalytic metal 10 in a roll-to-roll manner is included, 400 and the second chamber 500 may be sequentially disposed along the movement path of the catalyst metal 10 to be supplied. At this time, the first chamber 400 and the second chamber 500 may further include a connection part 600 for preventing contamination due to the exposure of the catalytic metal 10. The connection part 600 may be formed of a heat insulating member to minimize the temperature change of the moving catalytic metal 10, or may be another chamber.

The graphene synthesizing apparatus 4000 according to the fourth embodiment of the present invention separates the space in which the first heating section is disposed and the space in which the second heating section is disposed into each of the first chamber and the second chamber, It is possible to control the atmosphere in the chamber such as the temperature.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is evident that many alternatives, modifications and variations will be apparent to those skilled in the art . Accordingly, the true scope of the present invention should be determined by the technical idea of the appended claims.

1000, 2000, 3000, 4000: graphene composite device
10: catalyst metal
100: chamber
110: gas supply part
120: gas discharge portion
390: cooling section
130: first heating section
131: Lamp
132: Reflecting surface
140: susceptor portion
170: second heating section
180:
151: Catalytic metal supply
105: blocking wall

Claims

A chamber defining a space in which the graphene is synthesized in the catalytic metal;
A gas supply unit for supplying a gas containing carbon into the chamber;
A first heating unit disposed inside the chamber and heating the catalyst metal and the carbon-containing gas using radiant heat;
A second heating unit disposed inside the chamber and heating the catalytic metal using a joule heat; And
And a blocking wall dividing a first region in which the first heating section is disposed and a second region in which the second heating section is disposed and in which a penetrating section is formed such that the catalyst metal can move from the first region to the second region and,
Wherein the blocking wall is made of a heat insulating member and two or more of the blocking walls are arranged in the moving direction of the catalyst metal to form a space between the first region and the second region.

The apparatus according to claim 1,
And a pair of conductive rollers which are in contact with the catalytic metal in a spaced apart relationship and serve as rollers for moving the catalytic metal,
Wherein the graphen synthesizing apparatus further comprises a current supplying unit for supplying a current to the catalyst metal through the pair of conductive rollers.

The method according to claim 1,
Further comprising a catalyst metal supply portion for supplying the catalyst metal into the chamber in a roll-to-roll manner during graphene synthesis,
Wherein the first heating portion and the second heating portion comprise:
Wherein the graphenes are sequentially arranged in accordance with a traveling direction of the catalytic metal.

delete

2. The apparatus according to claim 1,
And a lamp disposed on at least one side of the chamber for heating the catalyst metal by emitting light toward the catalyst metal.

6. The method of claim 5,
And a susceptor portion disposed to face the catalytic metal so as to be spaced apart from each other and to absorb heat radiated from the first heating portion and to discharge the catalytic metal toward the catalytic metal.

The method according to claim 1,
And a cooling part disposed inside the chamber and disposed between the first heating part and the second heating part to cool the catalyst metal discharged from the first heating part.

The method according to claim 1,
Wherein the heating by the first heating part and the heating by the second heating part are sequentially performed at substantially the same first temperature.

9. The apparatus of claim 8, wherein the graphene-
And cooling the catalyst metal at a second temperature before heating by the second heating unit after heating by the first heating unit,
Wherein the second temperature is lower than the first temperature but the maximum temperature among the temperatures at which graphene synthesis is possible.

A first chamber for heating the catalytic metal using radiant heat;
A second chamber for heating the cooled catalytic metal through the first chamber and heating the cooled catalytic metal using a joule heat; And
And a connection portion connecting the first chamber and the second chamber, the connection portion being made of a heat insulating member,
Wherein the catalyst metal moves from the first chamber to the second chamber through the connection.

11. The method of claim 10,
A pair of second heating parts disposed in the second chamber and in contact with the catalytic metal in a state of being spaced apart from each other; And
And a current supplying unit for supplying a current to the catalyst metal through the pair of second heating units.

12. The method of claim 11,
And the pair of second heating portions are a pair of conductive rollers serving as rollers for moving the catalyst metal.

11. The method of claim 10,
And a catalytic metal supply unit for sequentially supplying the catalytic metal to the first chamber and the second chamber,
Wherein the catalyst metal supply unit supplies the catalyst metal in a roll-to-roll manner.

11. The method of claim 10,
And a first heating unit provided on at least one side of the first chamber and heating the catalyst metal by emitting light toward the catalyst metal.

11. The method of claim 10,
Heating by the first chamber and heating by the second chamber are sequentially performed at substantially the same first temperature,
Wherein the graphene synthesizing apparatus cools the catalyst metal at a second temperature before heating by the second chamber after heating by the first chamber,
Wherein the second temperature is lower than the first temperature but the maximum temperature among the temperatures at which graphene synthesis is possible.