KR101792326B1 - Tube holder support - Google Patents

Tube holder support Download PDF

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Publication number
KR101792326B1
KR101792326B1 KR1020150061592A KR20150061592A KR101792326B1 KR 101792326 B1 KR101792326 B1 KR 101792326B1 KR 1020150061592 A KR1020150061592 A KR 1020150061592A KR 20150061592 A KR20150061592 A KR 20150061592A KR 101792326 B1 KR101792326 B1 KR 101792326B1
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KR
South Korea
Prior art keywords
holder support
hole
tube
tube holder
main body
Prior art date
Application number
KR1020150061592A
Other languages
Korean (ko)
Other versions
KR20160129433A (en
Inventor
윤호근
Original Assignee
윤호근
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Publication date
Application filed by 윤호근 filed Critical 윤호근
Priority to KR1020150061592A priority Critical patent/KR101792326B1/en
Publication of KR20160129433A publication Critical patent/KR20160129433A/en
Application granted granted Critical
Publication of KR101792326B1 publication Critical patent/KR101792326B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L3/00—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets
    • F16L3/08—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets substantially surrounding the pipe, cable or protective tubing
    • F16L3/10—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets substantially surrounding the pipe, cable or protective tubing divided, i.e. with two or more members engaging the pipe, cable or protective tubing
    • F16L3/1008—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets substantially surrounding the pipe, cable or protective tubing divided, i.e. with two or more members engaging the pipe, cable or protective tubing with two members engaging the pipe, cable or tubing, both being made of thin band material completely surrounding the pipe
    • F16L3/1025—Supports for pipes, cables or protective tubing, e.g. hangers, holders, clamps, cleats, clips, brackets substantially surrounding the pipe, cable or protective tubing divided, i.e. with two or more members engaging the pipe, cable or protective tubing with two members engaging the pipe, cable or tubing, both being made of thin band material completely surrounding the pipe the members being joined by quick acting means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Supports For Pipes And Cables (AREA)

Abstract

The present invention relates to a tube holder support, and more particularly, it relates to a tubular holder support for supporting a Teflon tube by a tube holder support during line piping for supplying chemical through an inner valve and a pump of a semiconductor device, It prevents corrosion caused by chemical fumes and can save cost by plastic injection product.

Description

Tube holder support {Tube holder support}

The present invention relates to a method for manufacturing a semiconductor device, comprising the steps of: (a) providing a tubular holder supporting a Teflon tube in a piping line for supplying chemical through an internal valve and a pump of a semiconductor device; To a tube holder support capable of preventing corrosion due to plastic injection and reducing cost with a plastic injection product.

Generally, chemicals including sulfuric acid, hydrofluoric acid, hydrochloric acid, etc. necessary for the semiconductor manufacturing process are supplied to each process of the semiconductor production line through the Teflon tube.

Therefore, the Teflon tube is fixed so that the chemical does not leak out through the Teflon tube when the line piping that supplies the chemical through the inner valve and the pump of the semiconductor equipment.

The tube holder support for fixing the Teflon tube is now fixed by clamping the Teflon tube with a clamp and assembling it with bolts.

However, such a fixing method of Teflon tube has a problem that the work process is complicated and the fatigue of the worker is increased due to the use of the power tool by the operator in order to fix the clamp with the bolt.

Also, since bolts are corroded and contaminated due to the fume of the Teflon tube when the semiconductor equipment is operated, it is troublesome to replace the bolts for a certain period of time, thus raising the cost of raw material purchase.

Therefore, in order to prevent corrosion of the bolt, Teflon coating is performed. However, since the Teflon coating cost is high, the manufacturing cost is increased.

In addition, since some of the tube holder supports are bonded by an adhesive, there is a problem that the adhesive strength decreases with time.

In addition, since the conventional tube holder support is manufactured by CNC machining, the cost increases.

Korean Patent Application No. 20 - 2007 - 0006532 "Teflon tube cutting jig"

In order to solve the above problems, it is an object of the present invention to shorten the working time for fixing the Teflon tube in the line piping operation for supplying the chemical through the inner valve and the pump of the semiconductor equipment and to reduce the work fatigue And to prevent corrosion due to chemical fumes.

According to an aspect of the present invention for achieving the above object of the present invention, there is provided an air conditioner in which a lower groove is formed on an upper surface and a control hole is formed in a front portion of the upper surface to pierce through the rear surface, An adjusting lever having a screw thread formed on an inner circumferential surface of a rotating hole penetrated in a vertical direction at the center in a state of being inserted by the adjusting hole,

The upper and lower grooves are formed in the upper portion of the main body so as to coincide with the lower grooves, and an assembling hole is formed to insert the Teflon tube. The elevating shaft is protruded downward at one side of the upper groove and threaded at the outer circumference, And a fixing cap disposed on an upper portion of the main body coupled to the lever, wherein when the adjusting lever is rotated in the forward and reverse directions, the lifting shaft moves in the vertical direction to separate and couple the fixed cap from the main body. .

As described above, since the tube holder support according to the present invention fixes the Teflon tube by using the bolt and the transmission mechanism unused as in the prior art, it shortens the work process time and work time, reduces the work fatigue applied to the worker, . ≪ / RTI >

In addition, the present invention has an effect that the cost of the tube holder support can be reduced by a plastic injection product.

1 is an exploded perspective view showing a tube holder support according to the present invention;
2 is an exploded perspective view of a tube holder support of the present invention.
3 is a sectional view of the tube holder support of the present invention.
4 is a front view showing the operation state of the tube holder support of the present invention.
5A and 5B are perspective views showing another embodiment of the tube holder support of the present invention.
6A and 6B are perspective views showing a state where a tube is coupled to a tube holder support of the present invention.
7 is a perspective view showing a state where a tube is coupled to a tube holder support of the present invention.
8A and 8B are perspective views showing a state where a tube is coupled to a tube holder support of the present invention.

In order to achieve the above objects and effects, the present invention will be described in detail with reference to the accompanying drawings.

FIG. 1 is a perspective view illustrating a tube holder support according to the present invention, FIG. 2 is an assembled perspective view illustrating a tube holder support according to the present invention, FIG. 3 is a connection sectional view showing a tube holder support according to the present invention, and b is a perspective view showing a state where the tube is coupled to the tube holder support of the present invention.

The tube holder support 1 of the present invention is provided with a main body 2 and a fixed cap 3. The main body 2 has a block shape and a control hole 6 is formed in a front part of the main body 2 so as to be pierced through the back surface, And a lifting hole 12 is formed at one side of the lower groove 4 in a vertical direction so as to penetrate through the center of the adjusting hole 6.

The adjusting lever 7 is inserted into the adjusting hole 6 in a cylindrical shape and the adjusting lever 7 is formed with a turning hole 8 so as to be pierced in the upper and lower directions from the center, A screw thread 17 is formed.

The fixed cap 3 located at the upper part of the main body 2 has a block shape and a hemispherical upper groove 5 is formed at the lower part so as to coincide with the lower groove 4 so that the upper and lower grooves 5, An assembly hole 13 into which the Teflon tube 16 can be inserted is formed.

An elevating shaft 11 protruding downward from the upper groove 5 of the fixed cap 3 and having a thread 17 formed on the outer circumferential surface of the elevating shaft 12 protrudes from the elevating hole 12 formed in the body 2, Is inserted into the adjustment hole (6) and is coupled to the adjustment lever (7).

The lifting shaft 1 can be separated from and coupled to the fixed cap 3.

The elevating shaft 11 is provided with a screw thread 17 formed on the whole or a part of the outer circumferential surface so that when the adjusting lever 7 is rotated in the forward or reverse direction with the screw thread 17 engaged with the screw hole 8, 11 are lifted or lowered along the thread 17 so that the fixed cap 3 is detached and engaged from the main body to press and release the Teflon tube 16.

A fixing protrusion 10 is formed on the upper portion of the main body 2 of the tube holder support 1. A fixing groove 9 is formed on the bottom surface of the fixing cap 3 so that the fixing protrusion 10 is inserted, (10) is inserted into the fixing groove (9).

The fixing groove 9 and the fixing protrusion 10 are configured to prevent the fixing force from being weakened because there is no elevation shaft 11 in the opposite direction when the elevation shaft 11 is engaged only in one direction of the main body 2 .

On the other hand, the material of the tube holder support 1 can be produced by injection using plastic.

4 is a front view showing the operation state of the tube holder support of the present invention.

In order to insert the Teflon tube 16 into the assembling hole 13 formed by coupling the upper and lower grooves 5 and 4, the tube holder support 1 of the present invention first rotates the adjusting lever 7 in the forward direction, The lifting shaft 11 is lifted along the thread 17 formed on the main body 2 and the fixing cap 3 is detached from the upper part of the main body 2 and the Teflon tube 16 is seated in the lower groove 4, The upper and lower grooves 5 and 4 are engaged with each other so that the Teflon tube 16 is pressurized and fixed to the main body 2 when the fixed cap 3 is brought into close contact with the upper portion of the main body 2, do.

5A and 5B are perspective views showing another embodiment of the tube holder support of the present invention.

The tube holder support 1 according to the present invention has a height adjusting portion 18 attached to a lower portion of the main body 2 so that the height of the tube holder support 1 can be fixed by fixing the Teflon tube 16.

An assembly groove 14 is formed in the lower portion of the main body 2 and an assembly protrusion 15 is formed on the upper portion of the height adjustment portion 18 to be fitted into the assembly groove 14.

FIG. 7 is a perspective view showing a state where a tube is coupled to a tube holder support of the present invention, and FIGS. 8a and 8b are perspective views showing a state where a tube is coupled to the tube holder support of the present invention.

The tube holder support 1 of the present invention has two or more adjustment holes 6 formed between the main body 2 and the fixed cap 3 to fix the Teflon tube 16 thereto.

Therefore, the main body 2 is provided with the adjusting hole 6 at the center of the front side, and the adjusting hole 6 is formed in the upper portion of the main body 2 in the state where the elevating hole 12 is formed in the direction of the adjusting hole 6, The lever 7 is inserted to bring the elevating and lowering holes 12 and 8 into alignment with each other.

Lower grooves 4 are formed on both sides of the lifting and lowering hole 12 at the upper portion of the main body 2.

An elevating shaft 11 having a screw 17 formed on an outer circumferential surface thereof in a vertical direction is protruded from a lower portion of the fixed cap 3 to form an elevating hole 12, (8).

An upper groove 5 is formed on the upper part of the lower groove 4 on both sides of the lifting hole 12 of the main body 2 so that when the adjusting lever 7 is rotated in the forward or reverse direction, The shaft 11 is spirally engaged with the rotation hole 8 of the control lever 7 and moved up and down along the thread 17 to be separated from and coupled to the main body 2 so that the Teflon tube 16 can be easily moved to the lower groove 4).

1: Tube holder Support 2: Body
3: Fixing cap 4: Lower groove
5: Upper groove 6: Regulator
7: Control lever 8:
9: Fixing groove 10: Fixing projection
Elevator shaft 11 elevator shaft 12 elevator shaft
13: Assembly 14: Assembly groove
15: Assembly projection 16: Teflon tube
17: screw thread 18:

Claims (4)

delete delete The upper surface is formed with a lower groove 4 and a part of the front surface thereof is formed with a control hole 6 so as to be pierced through the rear surface thereof. (12); Wow
An adjusting lever 7 formed with a screw hole 17 at an inner circumferential surface of the rotary hole 8; Wow
An assembly hole 13 is formed in the upper part of the main body 2 to insert the Teflon tube 16 into the upper groove 5 so as to coincide with the lower groove 4. A lower The elevating shaft 11 protruding in the direction of the main body 2 and having the screw thread 17 formed on the outer circumferential surface thereof is inserted into the elevating hole 12 and the adjusting hole 6 to be coupled to the adjusting lever 7, A cap 3; and
When the adjusting lever 7 is rotated in the forward and reverse directions, the lifting shaft 11 moves in the upper and lower directions to separate and couple the fixed cap 3 from the main body 2, And a height adjusting portion 18 having an assembling protrusion 15 formed at an upper portion thereof to be fitted into the assembly groove 14 is fitted to the tube holder support.
delete
KR1020150061592A 2015-04-30 2015-04-30 Tube holder support KR101792326B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020150061592A KR101792326B1 (en) 2015-04-30 2015-04-30 Tube holder support

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150061592A KR101792326B1 (en) 2015-04-30 2015-04-30 Tube holder support

Publications (2)

Publication Number Publication Date
KR20160129433A KR20160129433A (en) 2016-11-09
KR101792326B1 true KR101792326B1 (en) 2017-11-20

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ID=57529336

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150061592A KR101792326B1 (en) 2015-04-30 2015-04-30 Tube holder support

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KR (1) KR101792326B1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200488113Y1 (en) * 2018-07-31 2018-12-13 현종석 Fixing device for pipe
KR102088575B1 (en) 2018-08-22 2020-03-12 이충열 Pipe holder support
KR102509775B1 (en) * 2022-05-30 2023-03-14 주식회사 아이텍스 Device of supporting a pipe

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004140985A (en) * 2002-10-16 2004-05-13 Asaba Seisakusho:Kk Cable support for tunnel
KR100957611B1 (en) * 2009-06-16 2010-05-13 (주)대한프라스틱 Height adjustable tube bracket

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004140985A (en) * 2002-10-16 2004-05-13 Asaba Seisakusho:Kk Cable support for tunnel
KR100957611B1 (en) * 2009-06-16 2010-05-13 (주)대한프라스틱 Height adjustable tube bracket

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Publication number Publication date
KR20160129433A (en) 2016-11-09

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